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JPH0555831B2 - - Google Patents
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JPH0555831B2 - - Google Patents

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Publication number
JPH0555831B2
JPH0555831B2 JP57206368A JP20636882A JPH0555831B2 JP H0555831 B2 JPH0555831 B2 JP H0555831B2 JP 57206368 A JP57206368 A JP 57206368A JP 20636882 A JP20636882 A JP 20636882A JP H0555831 B2 JPH0555831 B2 JP H0555831B2
Authority
JP
Japan
Prior art keywords
junction
radiation
superconducting
tunnel
tunnel junction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57206368A
Other languages
Japanese (ja)
Other versions
JPS5995484A (en
Inventor
Masahiko Kurakado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP57206368A priority Critical patent/JPS5995484A/en
Publication of JPS5995484A publication Critical patent/JPS5995484A/en
Publication of JPH0555831B2 publication Critical patent/JPH0555831B2/ja
Granted legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/20Measuring radiation intensity with scintillation detectors
    • G01T1/2018Scintillation-photodiode combinations

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Description

【発明の詳細な説明】 本発明は、放射線検出器を超伝導トンネル接合
を用いて作製、特に、放射線から超伝導トンネル
接合に与えられたエネルギーの超伝導トンネル接
合から電極への拡散の信号の大きさへの影響を小
さくすることによつて、それを高分解能放射線検
出器として用いられるようにしたものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention fabricates a radiation detector using a superconducting tunnel junction, and in particular detects the signal of the diffusion of energy imparted from radiation to the superconducting tunnel junction from the superconducting tunnel junction to an electrode. By reducing the effect on size, it can be used as a high-resolution radiation detector.

従来、放射線検出器としては、放射線によるガ
スの電離を利用したガス・カウンター、放射線に
よるシンチレーシヨン光を利用したシンチレーシ
ヨン放射線検出器、半導体中での放射線による電
子−正孔対の生成を利用した半導体放射線検出器
などがあつた。本発明は、超伝導体中での放射線
によるクーパー対の破壊とそれに伴う電子の励起
を利用したものであり、従来の放射線検出器とは
全く異なる原理によるものである。
Conventional radiation detectors include gas counters that utilize the ionization of gas by radiation, scintillation radiation detectors that utilize scintillation light caused by radiation, and radiation detectors that utilize the generation of electron-hole pairs by radiation in semiconductors. Semiconductor radiation detectors and other equipment were used. The present invention utilizes the destruction of Cooper pairs by radiation in a superconductor and the accompanying excitation of electrons, and is based on a completely different principle from that of conventional radiation detectors.

従来の放射線検出器では、半導体中での電子−
正孔対の生成やガスの電離やシンチレーシヨン光
を1つ出すのに必要な平均エネルギーが数evか
ら数百evと大きいため、放射線による信号の大
きさの統計的ゆらぎが大きかつた。超伝導体では
放射線によつて電子を1つ励起するのに必要な平
均エネルギーが1mev程度と極めて小さく、励起
される電子の数が極めて大きい。このため、超伝
導体放射線検出器では一定のエネルギーの放射線
に対する信号の大きさの統計的ゆらぎの割合が非
常に小さい、すなわちエネルギー分解能が極めて
高くなり得る。また、従来としては分解能の高い
半導体放射線検出器では、単結晶を用いているた
め、放射線による結晶性の乱れに起因する、放射
線損傷を受け易いという使用上の大きな制約があ
つた。超伝導体放射線検出器では、多結晶の超伝
導体を用いることができるので放射線による結晶
性の乱れは、半導体放射線検出器の場合と比べ
て、ほとんど問題とならないという利点もある。
Conventional radiation detectors detect electrons in semiconductors.
Because the average energy required to generate hole pairs, ionize gas, and emit a single scintillation beam is large, ranging from several ev to several hundred ev, statistical fluctuations in the signal magnitude due to radiation were large. In superconductors, the average energy required to excite one electron with radiation is extremely small, about 1 mev, and the number of excited electrons is extremely large. Therefore, in a superconducting radiation detector, the ratio of statistical fluctuations in the signal magnitude to radiation of a constant energy is extremely small, that is, the energy resolution can be extremely high. Furthermore, since conventional semiconductor radiation detectors with high resolution use single crystals, they have had a major limitation in use in that they are susceptible to radiation damage due to disturbance of crystallinity due to radiation. Superconducting radiation detectors can use polycrystalline superconductors, so they have the advantage that disturbance of crystallinity due to radiation poses almost no problem compared to semiconductor radiation detectors.

超伝導トンネル接合では放射線が入射すると、
超伝導体中の電子が励起されるため、電流・電圧
特性が一時的に変化するのでその変化の大きさに
よつて放射線のエネルギーなどを知ることが出来
る。例えば、超伝導トンネル接合に流しておく電
流(バイアス電流)を一定にしておけば超伝導ト
ンネル接合の両端の電圧が変化するし、両端の電
圧(バイアス電圧)を一定にしておけば電流が変
化する、そしてこれらの変化を信号として取り出
すことが出来る。
When radiation enters a superconducting tunnel junction,
Since the electrons in the superconductor are excited, the current and voltage characteristics change temporarily, and the energy of the radiation can be determined by the magnitude of the change. For example, if the current flowing through a superconducting tunnel junction (bias current) is kept constant, the voltage across the superconducting tunnel junction will change, and if the voltage across both ends (bias voltage) is kept constant, the current will change. These changes can then be extracted as signals.

本発明は、コリメーターで接合の周辺部を覆う
ことによつて(第1図、第2図参照)放射線から
超伝導トンネル接合に与えられたエネルギーの電
極への拡散が信号の大きさに与える影響を小さく
する、又は、第3図に示したように電極を細い導
体の線あるいは細い帯状の導体などで作ることに
より放射線から超伝導トンネル接合に与えられた
エネルギーが超伝導トンネル接合からの拡散によ
つて電極へ逃げ難くすることによつて高い分解能
が得られるようにしたものである。なお、第4図
に示したように接合を重ねるこによつて、放射線
がそれぞれの層でどれだけのエネルギーを失なつ
たかを知ることも出来る。
In the present invention, by covering the periphery of the junction with a collimator (see Figures 1 and 2), the energy applied to the superconducting tunnel junction from the radiation is diffused to the electrodes, which increases the signal magnitude. By reducing the effect, or by making electrodes with thin conductor wires or thin strip-shaped conductors as shown in Figure 3, the energy given to the superconducting tunnel junction by the radiation can be diffused from the superconducting tunnel junction. By making it difficult for the particles to escape to the electrodes, high resolution can be obtained. By stacking the junctions as shown in FIG. 4, it is also possible to know how much energy the radiation has lost in each layer.

これらの超伝導体放射線検出器に用いる超伝導
トンネル接合は、ガラス板や水晶板などを基板と
してその上に超伝導トンネル接合を作製、あるい
は基板なしで、超伝導体の板の上に直接に接合を
作製することも出来る。また、基板上で作製した
後に基板から剥離するなどして、基板なしで使用
することも出来る。
The superconducting tunnel junctions used in these superconducting radiation detectors can be fabricated by using a glass plate or quartz plate as a substrate and creating a superconducting tunnel junction on it, or directly on a superconductor plate without a substrate. It is also possible to create joints. Furthermore, it can also be used without a substrate by, for example, producing it on a substrate and then peeling it off from the substrate.

次に本発明の1実施例について述べる。 Next, one embodiment of the present invention will be described.

この実施例では、錫−酸化錫−錫からなる超伝
導トンネル接合を使用した。その超伝導トンネル
接合は以下のようにして作製した。まず、ガラス
基板上に、メタルマスクを通して、幅0.3mm、長
さ20mm、厚さ1500Åの薄膜の錫を真空蒸着で作製
する。次に、真空蒸着装置内に0.3Torrの酸素ガ
スを導入し、真空蒸着装置内に設けた高電圧用端
子に600V−60Hzの高電圧をかけることによつて
酸素ガスを数分間グロー放電させる方法により錫
薄膜の表面を酸化してトンネル障壁層となる酸化
錫層を形成した。最後に、メタルマスクを交換し
た後、すでに設けた表面に酸化層を形成した帯状
の錫薄膜と交差するように幅0.2mm、長さ20mm、
厚さ1500Åの薄膜の錫を真空蒸着で作製する。錫
−酸化錫−錫が積層された面積0.3×0.2mm2、厚さ
3000Åの部分が超伝導トンネル接合となる。帯状
の錫薄膜と帯状の表面を酸化錫で覆われた錫薄膜
の超伝導トンネル接合以外の部分が電極となる。
本実施例においては、第1図、第2図のように、
超伝導トンネル接合の周辺部を覆い隠すようにコ
リメーターが超伝導トンネル接合の上に設置され
ている。超伝導トンネル接合とコリメーターの間
の距離は約0.1mmであつた。直径3mmのα線源を
コリメーターから15mm離して、コリメーターの真
上に設置した。その結果として、α粒子はコリメ
ーターの穴の部分を通つて超伝導トンネル接合の
中心近傍にだけしか入射しない。もしコリメータ
ーがないと、α粒子は超伝導トンネル接合内の接
合の周辺部にも入射してしまい、帯状の二つの超
伝導体からなる本実施例の場合には、周辺部に入
射したα粒子から超伝導トンネル接合に与えられ
たエネルギーの多くは拡散によつて電極に逃げて
しまい、その場合の信号は接合の中心部に入射し
たα粒子による信号よりも小さくなつてしまう。
このため、その場合には入射位置によつて信号の
大きさが異なつてしまい、高いエネルギー分解能
は得られない。
In this example, a superconducting tunnel junction made of tin-tin oxide-tin was used. The superconducting tunnel junction was fabricated as follows. First, a thin film of tin with a width of 0.3 mm, a length of 20 mm, and a thickness of 1500 Å is created by vacuum evaporation on a glass substrate through a metal mask. Next, 0.3 Torr of oxygen gas is introduced into the vacuum evaporation equipment, and a high voltage of 600V-60Hz is applied to the high voltage terminal provided in the vacuum evaporation equipment to cause the oxygen gas to glow discharge for several minutes. The surface of the tin thin film was oxidized to form a tin oxide layer that would serve as a tunnel barrier layer. Finally, after replacing the metal mask, a strip of tin thin film with a width of 0.2 mm and a length of 20 mm was placed so as to intersect with the thin strip of tin that had already formed an oxide layer on the surface.
A thin film of tin with a thickness of 1500 Å is made by vacuum evaporation. Tin-tin oxide-tin layered area: 0.3 x 0.2 mm 2 , thickness
The 3000 Å section becomes a superconducting tunnel junction. The parts other than the superconducting tunnel junction of the band-shaped tin thin film and the band-shaped thin film whose surface is covered with tin oxide serve as electrodes.
In this embodiment, as shown in FIGS. 1 and 2,
A collimator is installed above the superconducting tunnel junction so as to cover the periphery of the superconducting tunnel junction. The distance between the superconducting tunnel junction and the collimator was about 0.1 mm. An α-ray source with a diameter of 3 mm was placed 15 mm away from the collimator and directly above the collimator. As a result, the α particles only enter the vicinity of the center of the superconducting tunnel junction through the hole in the collimator. If there is no collimator, α particles will also be incident on the periphery of the junction in the superconducting tunnel junction, and in the case of this example, which consists of two band-shaped superconductors, Much of the energy given to the superconducting tunnel junction by the particles escapes to the electrodes by diffusion, and the signal in this case is smaller than the signal caused by the alpha particle incident on the center of the junction.
Therefore, in that case, the magnitude of the signal varies depending on the incident position, and high energy resolution cannot be obtained.

本実施例のα粒子の検出試験においては、超伝
導トンネル接合とコリメーターとα線源を3Heク
ライオスタツトの中に収め、超伝導トンネル接合
を0.32Kまで冷却して錫を超伝導状態とした。超
伝導トンネル接合には数ガウスの磁場をかけて
DCジヨセフソン電流は流れないようにし、上下
の電極を通して超伝導トンネル接合に一定の電流
を流しておき、前記のコリメーターを通すことに
よつてコリメーターの穴の真下の超伝導トンネル
接合の中心部にのみ5.3Mevのα粒子を照射し、
接合両端の電圧変化を信号として取り出した。本
実施例で用いた超伝導トンネル接合の場合、その
全膜厚が3000Åと薄く、α粒子はそのエネルギー
の約50分の1すなわち約100KeVしか超伝導トン
ネル接合にエネルギーを与えず、他の大部分のエ
ネルギーはガラス基板で失なわれてしまつたが、
得られたエネルギー分解能は約7%(約7KeV)
と高いものであつた。
In the α particle detection test of this example, the superconducting tunnel junction, collimator, and α-ray source were housed in a 3 He cryostat, and the superconducting tunnel junction was cooled to 0.32K to bring the tin into a superconducting state. did. A magnetic field of several Gauss is applied to the superconducting tunnel junction.
The DC Josephson current is not allowed to flow, and a constant current is allowed to flow through the superconducting tunnel junction through the upper and lower electrodes. irradiate 5.3 Mev alpha particles only to
The voltage change across the junction was extracted as a signal. In the case of the superconducting tunnel junction used in this example, the total film thickness is as thin as 3000 Å, and the α particles only give about 1/50th of that energy, or about 100 KeV, to the superconducting tunnel junction, and other large Although some energy was lost in the glass substrate,
The energy resolution obtained is approximately 7% (approximately 7KeV)
It was expensive.

このように、本願発明は従来の放射線検出器と
は全く異なる原理による放射線検出器であり、本
発明によれば半導体放射線検出器と異なつて多結
晶材料でも作製できる超伝導トンネル接合を用い
て、これまで最もエネルギー分解能の高かつた半
導体放射線検出器に匹敵するエネルギー分解能が
容易に得られる。
As described above, the present invention is a radiation detector based on a completely different principle from conventional radiation detectors. Energy resolution comparable to that of semiconductor radiation detectors, which have the highest energy resolution to date, can be easily obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の実施態様の側断面図、第2図
はその正面図、第3図は本発明の実施態様の側断
面図、第4図は本発明の実施態様の側断面図。 符号、1……コリメーター、2……電極、3…
…超伝導体、4……トンネル接合、5……電流−
電圧端子。
FIG. 1 is a side sectional view of an embodiment of the invention, FIG. 2 is a front view thereof, FIG. 3 is a side sectional view of an embodiment of the invention, and FIG. 4 is a side sectional view of an embodiment of the invention. Code, 1...collimator, 2...electrode, 3...
...Superconductor, 4...Tunnel junction, 5...Current -
voltage terminal.

Claims (1)

【特許請求の範囲】 1 超伝導体と超伝導体の間に、あるいは超伝導
体と他の導体の間にトンネル効果を生じるトンネ
ル障壁層をはさんだ1つの超伝導トンネル接合ま
たは2つ以上の超伝導トンネル接合を積層した多
層接合、及び該接合または多層接合にバイアス電
流あるいはバイアス電圧を印加する印加手段と放
射線が入射したときのトンネル効果による過渡的
な電流−電圧特性の変化の大きさから放射線のエ
ネルギーを測定する手段を有する超伝導体放射線
検出器であり、バイアス電流あるいはバイアス電
圧を印加するための導体と接合との境界の周辺部
分をコリメーターで覆つた構造とすることを特徴
とする超伝導体放射線検出器。 2 超伝導体と超伝導体の間に、あるいは超伝導
体と他の導体の間にトンネル効果を生じるトンネ
ル障壁層をはさんだ1つの超伝導トンネル接合ま
たは2つ以上の超伝導トンネル接合を積層した多
層接合、及び該接合または多層接合にバイアス電
流あるいはバイアス電圧を印加する印加手段と放
射線が入射したときのトンネル効果による過渡的
な電流−電圧特性の変化の大きさから放射線のエ
ネルギーを測定する手段を有する超伝導体放射線
検出器であり、超伝導トンネル接合にバイアス電
流あるいはバイアス電圧を印加するための導体を
細長い形状とすることを特徴とする超伝導体放射
線検出器。 3 超伝導体と超伝導体の間に、あるいは超伝導
体と他の導体の間にトンネル効果を生じるトンネ
ル障壁層をはさんだ1つの超伝導トンネル接合ま
たは2つ以上の超伝導トンネル接合を積層した多
層接合、及び該接合または多層接合にバイアス電
流あるいはバイアス電圧を印加する印加手段と放
射線が入射したときのトンネル効果による過渡的
な電流−電圧特性の変化の大きさから放射線のエ
ネルギーを測定する手段と該接合または多層接合
を液体3Heを用いて冷却する手段とを具えたこと
を特徴とする超伝導体放射線検出器。
[Claims] 1. One superconducting tunnel junction or two or more superconducting tunnel junctions sandwiching a tunnel barrier layer that creates a tunnel effect between superconductors or between a superconductor and another conductor. From the multilayer junction in which superconducting tunnel junctions are stacked, the means for applying bias current or bias voltage to the junction or multilayer junction, and the magnitude of the change in transient current-voltage characteristics due to the tunnel effect when radiation is incident. A superconducting radiation detector having means for measuring the energy of radiation, and characterized by having a structure in which the peripheral part of the boundary between a conductor and a junction for applying a bias current or bias voltage is covered with a collimator. superconductor radiation detector. 2. One superconducting tunnel junction or stacking of two or more superconducting tunnel junctions with a tunnel barrier layer that creates a tunnel effect between superconductors or between a superconductor and another conductor. The energy of the radiation is measured from the magnitude of the change in transient current-voltage characteristics due to the tunneling effect when the radiation enters the multilayer junction, the application means for applying a bias current or bias voltage to the junction or the multilayer junction, and the tunnel effect when the radiation is incident. What is claimed is: 1. A superconducting radiation detector comprising means for applying a bias current or bias voltage to a superconducting tunnel junction, the superconducting radiation detector having a conductor having an elongated shape. 3 One superconducting tunnel junction or stacking of two or more superconducting tunnel junctions with a tunnel barrier layer that creates a tunnel effect between superconductors or between a superconductor and another conductor The energy of the radiation is measured from the magnitude of the change in transient current-voltage characteristics due to the tunneling effect when the radiation enters the multilayer junction, the application means for applying a bias current or bias voltage to the junction or the multilayer junction, and the tunnel effect when the radiation is incident. A superconducting radiation detector comprising: means and means for cooling the junction or multilayer junction using liquid 3 He.
JP57206368A 1982-11-24 1982-11-24 Superconductor detector for radiation Granted JPS5995484A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57206368A JPS5995484A (en) 1982-11-24 1982-11-24 Superconductor detector for radiation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57206368A JPS5995484A (en) 1982-11-24 1982-11-24 Superconductor detector for radiation

Publications (2)

Publication Number Publication Date
JPS5995484A JPS5995484A (en) 1984-06-01
JPH0555831B2 true JPH0555831B2 (en) 1993-08-18

Family

ID=16522163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57206368A Granted JPS5995484A (en) 1982-11-24 1982-11-24 Superconductor detector for radiation

Country Status (1)

Country Link
JP (1) JPS5995484A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116466385B (en) * 2023-04-28 2025-08-05 中国科学院西安光学精密机械研究所 High time resolution radiation flow detector and detection method based on electronic signal stretching

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
CRYOGENICS *

Also Published As

Publication number Publication date
JPS5995484A (en) 1984-06-01

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