JPH0557329B2 - - Google Patents
Info
- Publication number
- JPH0557329B2 JPH0557329B2 JP63148342A JP14834288A JPH0557329B2 JP H0557329 B2 JPH0557329 B2 JP H0557329B2 JP 63148342 A JP63148342 A JP 63148342A JP 14834288 A JP14834288 A JP 14834288A JP H0557329 B2 JPH0557329 B2 JP H0557329B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- polygon mirror
- mirror
- laser beam
- beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
- B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multi-focusing
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Mechanical Optical Scanning Systems (AREA)
Description
[産業上の利用分野]
本発明はレーザによる鋼材の熱処理加工の方法
と装置に関する。
[従来の技術]
従来の、ポリゴンミラーを用いたレーザ熱処理
加工に於いては、一個のポリゴンミラーを用い
て、ビームをスキヤンさせる事により、被加工物
の処理を行つていた。また、面処理する場合に
は、被加工物を、ビームのスキヤンと同時に、ス
キヤンの方向と垂直に移動させる事により行つて
いた。
[発明が解決しようとする課題]
従来の、ポリゴンミラーを用いたレーザ加工に
於いては、一つのビームのスキヤンにより、熱処
理を行つていた。この場合、被加工物は、レーザ
による熱処理の特徴である、急加熱、急冷却加工
されていた。このため、鋼材の一様な加熱によ
る、表面温度の設定と設定温度の保持が困難であ
る。また、一つのビームのスキヤンにより、被加
工物を面処理する場合、たとえば焼入れ処理を例
にとると、第2図で示されるとおり、すでに熱処
理された部分の直近を、次のスキヤンビームが通
過し熱処理する。このため、すでに急加熱、急冷
却によつて熱処理され高硬度となつた周辺部分が
再び熱影響を受け硬度値が低下し、熱影響を受け
ない部分と硬度差が生じ処理にむらができる欠点
があつた。
ポリゴンミラーを用いたレーザビーム加工方法
としては特開昭62−13389号公報に記載されたス
クラツチ加工装置があるが、これは均一で高速加
工するために、同時に数ケ所を照射するためのも
のであつて、上記欠点は防止できない。
本発明は以上の事情を鑑みてなされたものであ
り、一様な加熱により加工温度の設定と設定温度
の維持ができ、また処理にむらのない熱処理の可
能な装置と方法を提供する事を目的とする。
[課題を解決するための手段]
本発明の要旨は、レーザ本体とレーザビームを
反射し、スキヤンするためのポリゴンミラーから
なるレーザによる鋼材の加工装置において、レー
ザビームを複数本に分割する光学系と、前記分岐
光学系から分割された複数本のビームの方向をそ
れぞれ調整して反射する複数個のベンデイングミ
ラーと、分割し反射されたビーム数に対応した段
数で重ねられ、かつ表面ミラーの角度をお互いに
ずらして同軸で回転するポリゴンミラーと、レー
ザビームのスキヤン方向と直角方向に上記加工物
を移動する移動機構を備えたことを特徴とするレ
ーザ熱処理装置と、
ポリゴンミラーを用いてレーザビームを鋼材表
面上にスキヤンさせながら行う鋼材の加工方法に
於て、レーザビームを複数本に分割し、各ビーム
の反射角度をベンデイングミラーで調整し、多段
ポリゴンミラーの各段のミラー面に反射させ、複
数ビームで鋼材表面を照射することを特徴とする
レーザ熱処理方法と、
ポリゴンミラーを用いてレーザビームを鋼材表
面上にスキヤンさせながら行う鋼材の加工方法に
於て、レーザビームを複数本に分割し、各ビーム
の反射角度をベンデイングミラーで調整し、多段
ポリゴンミラーの各段のミラー面に反射させ、複
数ビームを鋼材表面の同一スキヤン上に振り分け
て照射する事を特徴とするレーザ熱処理方法と、
ポリゴンミラーを用いたレーザビームを鋼材表
面上にスキヤンさせながら行う鋼材の加工方法に
於て、レーザビームを複数本に分割し、各ビーム
の反射角度をベンデイングミラーで調整し、多段
ポリゴンミラーの各段のミラー面に反射させ、複
数ビームをスキヤン方向に対して角度を持たせて
振り分けて照射する事を特徴とするレーザ熱処理
方法とにある。
[作用]
以下に本発明を詳細に説明する。
第1図は本発明の装置の構成を示すた模式図で
ある。本発明は第1図で示される通り、レーザ本
体1から出射されたレーザビーム3を複数のレー
ザビームに分割する分岐光学系2、各々のレーザ
ビームの方法を調整する複数のベンデイングミラ
ー14とその角度調整器4、複数のレーザビーム
を各々集光するレンズ5、上記集光レンズ5から
の上記レーザビームを各々反射し被加工物9の表
面に上記レーザビームを照射する同軸の複数のポ
リゴンミラー6、上記複数のベンデイングミラー
を回転する回転駆動機構、及び上記ポリゴンミラ
ーの回転によつて上記レーザビームがスキヤンさ
れる方向と角度方向に上記被加工物を移動する移
動機構によつて構成される。
上記ポリゴンミラー6の回転駆動機構として
は、回転数制御の可能なコントローラ8を備えた
モータ7が、又被加工物の移動機構としては、コ
ントローラ11付きのX−Y−Zテーブル10が
一例として挙げられる。尚、12はスキヤンの遅
れ、13はスキヤンの行路を示す。
この装置においてレーザ本体1より射出したレ
ーザビーム3を分岐光学系2を用いて複数のレー
ザビームに分割し、各々のレーザビームの角度を
目標とするポリゴンミラーに入射し反射させて、
被加工物の目標個所を照射できるよう、ベンデイ
ングミラー14の角度調節器4により調整し、集
光レンズ5をとおし複数個のポリゴンミラー6に
各々を導く。ここでポリゴンミラーの軸方向まわ
りの角度に、第7図に示すように差(遅れ角)θ
を付ける。この結果、ポリゴンミラーの反射光
は、ある一定の遅れを保ちつつ、スキヤンの同一
の行路をたどる複数のレーザビームとなつて、被
加工物に照射される。この結果、被加工物上では
ビームは第8図eから順にhとなり、被加工物上
の温度はa〜dとなる。この時、ビームの数、
各々のビームのパワー、遅れを変化させる事によ
り、被加工物を順次加熱し、ポリゴンミラーの設
定角と、回転数の制御によつて、必要な温度領域
に、必要な時間だけ保持する事ができる。したが
つて一本のレーザビームのみで処理される時のよ
うな急加熱急冷却はなく、鋼材表面の熱処理後の
冷却速度を任意に制御する事ができる。なお、被
加工物は、ビームのスキヤンと同時に、スキヤン
の方向と垂直方向に動かす。
また、この装置を用いて、各々のビームを、先
頭のビームがスキヤンしている行路と、先頭のビ
ームが熱影響を与える領域に、後熱のためスキヤ
ン方向に角度をもたせて振り分け、先頭ビームが
熱影響を与える領域を、保温する。その後、先頭
ビームの熱影響が、無くなつた部分から、随時処
理を終えて行く。この結果被加工物の温度を、処
理とされた温度条件に、合わせる事が可能とな
り、再加熱による処理むらを無くす事も可能とな
る。
[実施例]
実施例 1
第1表に示す成分を有する板厚1.4mmの熱処理
強化型鋼板の熱処理を行つた。この時三枚のポリ
ゴンミラーを用いた。ポリゴンミラーは、鋼製で
六角柱、80mmφ、一片が20mmのミラー面を持つ物
を用いた。ポリゴンミラーの回転数は、0.5rpm、
角度差θを9.2度とした。使用レーザは、2kW炭
酸ガスレーザで、ビームをビームスプリツターに
よつて、三つに分割した。各々のパワーは、先頭
から1.5kW、0.25kW、0.25kWとした。集光レン
ズとして、焦点距離が1000mmの物を用いた。スキ
ヤンの長さは、300mm、幅は2mm、速さは、30
mm/sec、各々のビームの遅れは、100mmとした。
この時被加工物の、一点に於ける温度は、第5図
におけるΔ点を結んだ曲線となり、ビツカース硬
さは、第6図となつた。この結果、従来の方法よ
り、本発明による方法が、優れている事が解る。
[Industrial Field of Application] The present invention relates to a method and apparatus for heat treating steel materials using a laser. [Prior Art] In conventional laser heat treatment using a polygon mirror, a workpiece is processed by scanning a beam using a single polygon mirror. Furthermore, when surface treatment is performed, the workpiece is simultaneously scanned by the beam and moved perpendicularly to the scanning direction. [Problems to be Solved by the Invention] In conventional laser processing using a polygon mirror, heat treatment was performed by scanning one beam. In this case, the workpiece was subjected to rapid heating and rapid cooling, which are characteristics of laser heat treatment. For this reason, it is difficult to set the surface temperature and maintain the set temperature by uniformly heating the steel material. In addition, when surface treatment is performed on a workpiece by scanning with one beam, for example, in case of hardening treatment, the next scan beam passes close to the part that has already been heat treated, as shown in Figure 2. and heat treated. As a result, the surrounding areas, which have already been heat-treated to a high degree of hardness through rapid heating and cooling, are once again affected by heat and the hardness value decreases, resulting in a difference in hardness from areas that are not affected by heat, resulting in uneven processing. It was hot. As a laser beam processing method using a polygon mirror, there is a scratch processing device described in JP-A-62-13389, but this is designed to irradiate several locations at the same time in order to achieve uniform and high-speed processing. However, the above drawbacks cannot be prevented. The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide an apparatus and method that can set a processing temperature and maintain the set temperature by uniform heating, and that can perform heat treatment without unevenness. purpose. [Means for Solving the Problems] The gist of the present invention is to provide an optical system for dividing a laser beam into a plurality of beams in a laser processing apparatus for steel materials, which includes a laser body and a polygon mirror for reflecting and scanning the laser beam. a plurality of bending mirrors that respectively adjust and reflect the directions of the plurality of beams split from the branching optical system; A laser heat treatment apparatus characterized by comprising a polygon mirror that rotates coaxially with angles shifted from each other, and a movement mechanism that moves the workpiece in a direction perpendicular to the scan direction of a laser beam; In a steel processing method that involves scanning a beam over the steel surface, the laser beam is divided into multiple beams, the reflection angle of each beam is adjusted using a bending mirror, and the beam is scanned onto the mirror surface of each stage of a multi-stage polygon mirror. A laser heat treatment method characterized by reflecting and irradiating a steel surface with multiple beams, and a steel processing method in which the laser beam is scanned over the steel surface using a polygon mirror. A laser that divides the beam into two parts, adjusts the reflection angle of each beam with a bending mirror, reflects it on each stage mirror surface of a multi-stage polygon mirror, and distributes and irradiates multiple beams onto the same scan on the steel surface. In the heat treatment method and the steel processing method, which uses a polygon mirror to scan a laser beam over the surface of the steel material, the laser beam is divided into multiple beams, and the reflection angle of each beam is adjusted using a bending mirror. The laser heat treatment method is characterized in that the laser heat treatment method is characterized in that the laser beams are reflected on the mirror surfaces of each stage of a multi-stage polygon mirror and are distributed and irradiated with a plurality of beams at an angle with respect to the scan direction. [Function] The present invention will be explained in detail below. FIG. 1 is a schematic diagram showing the configuration of the apparatus of the present invention. As shown in FIG. 1, the present invention includes a branching optical system 2 that splits a laser beam 3 emitted from a laser main body 1 into a plurality of laser beams, and a plurality of bending mirrors 14 that adjust the method of each laser beam. The angle adjuster 4, a lens 5 that focuses a plurality of laser beams, and a plurality of coaxial polygons that reflect the laser beams from the focusing lens 5 and irradiate the surface of the workpiece 9 with the laser beams. A mirror 6, a rotation drive mechanism that rotates the plurality of bending mirrors, and a movement mechanism that moves the workpiece in an angular direction relative to the direction in which the laser beam is scanned by rotation of the polygon mirror. be done. The rotational drive mechanism for the polygon mirror 6 is a motor 7 equipped with a controller 8 capable of controlling the rotation speed, and the movement mechanism for the workpiece is an X-Y-Z table 10 with a controller 11, for example. Can be mentioned. Note that 12 indicates the scan delay, and 13 indicates the scan path. In this device, a laser beam 3 emitted from a laser main body 1 is divided into a plurality of laser beams using a branching optical system 2, and the angle of each laser beam is incident on a target polygon mirror and reflected.
The bending mirror 14 is adjusted by the angle adjuster 4 so that the target part of the workpiece can be irradiated, and the beam is guided to a plurality of polygon mirrors 6 through the condenser lens 5. Here, the angle around the axial direction of the polygon mirror has a difference (lag angle) θ as shown in Figure 7.
Add. As a result, the reflected light from the polygon mirror becomes a plurality of laser beams that follow the same scan path while maintaining a certain delay and is irradiated onto the workpiece. As a result, the beam on the workpiece becomes h in order from e to h in FIG. 8, and the temperature on the workpiece becomes a to d. At this time, the number of beams,
By changing the power and delay of each beam, the workpiece is heated in sequence, and by controlling the set angle and rotation speed of the polygon mirror, it is possible to maintain the required temperature range for the required time. can. Therefore, there is no rapid heating and rapid cooling unlike when processing with only one laser beam, and the cooling rate after heat treatment of the steel surface can be arbitrarily controlled. Note that the workpiece is moved simultaneously with the scanning of the beam in a direction perpendicular to the scanning direction. In addition, using this device, each beam is distributed to the path where the leading beam is scanning and the area where the leading beam has a thermal effect, with an angle in the scanning direction due to afterheating, and the leading beam is Insulates areas that are affected by heat. After that, the processing is finished as needed starting from the part where the thermal influence of the leading beam has disappeared. As a result, it is possible to match the temperature of the workpiece to the temperature conditions for processing, and it is also possible to eliminate processing unevenness due to reheating. [Examples] Example 1 A heat-treated strengthened steel plate having a thickness of 1.4 mm and having the components shown in Table 1 was heat-treated. At this time, three polygon mirrors were used. The polygon mirror used was a hexagonal column made of steel, 80 mmφ, and each piece had a mirror surface of 20 mm. The rotation speed of the polygon mirror is 0.5 rpm,
The angular difference θ was set to 9.2 degrees. The laser used was a 2kW carbon dioxide laser, and the beam was split into three by a beam splitter. The power of each was set to 1.5kW, 0.25kW, and 0.25kW from the beginning. A condensing lens with a focal length of 1000 mm was used. The scan length is 300mm, the width is 2mm, and the speed is 30mm.
mm/sec, and the delay of each beam was 100 mm.
At this time, the temperature at one point of the workpiece was a curve connecting the points Δ in FIG. 5, and the Vickers hardness was as shown in FIG. 6. As a result, it can be seen that the method according to the present invention is superior to the conventional method.
【表】
実施例 2
板厚3.2mmの炭素鋼S45Cに、三枚のポリゴンミ
ラーを用い、2kW炭酸ガスレーザで、面処理を
行つた。ポリゴンミラーは、銅製で六角柱、80mm
φ、一片が20mmのミラー面を持つ物を用いた。ポ
リゴンミラーの回転数は、0.5rpm、角度差を4.2
度とした。ビームスプリツターにより、ビームを
三つに分割し、各々のパワーを1kW、0.5kW、
0.5kWとした。レンズは、1000mmの焦点距離の物
を用いた。スキヤンの長さは300mm、幅は2mm、
速さは、30mm/sec、各々のビーム遅れは350mm
(スキヤンの行路一本と50mmの遅れ)とし、スキ
ヤン方向に直角方向には12mm/secとした。この
時の、スキヤンに垂直方向の、ビツカース硬さの
分布は、第4図に示すようになつた。この結果、
第3図に示す従来の一つのポリゴンミラーによる
処理の硬度分布と比べて、処理むらが、改善され
た事が解る。
[発明の効果]
実施例でも示した通り、本発明によれば、レー
ザを用いた入熱加工に於て、必要な温度条件に、
必要な時間、被加工物を維持する事が可能となつ
た。また、一個のポリゴンミラーを用いた熱処理
系の問題点でもあつた。スキヤン方向に垂直な方
向での処理むらも改善する事が可能となつた。[Table] Example 2 A 3.2 mm thick carbon steel S45C was subjected to surface treatment using three polygon mirrors and a 2 kW carbon dioxide laser. Polygon mirror is made of copper, hexagonal column, 80mm
A piece with a mirror surface of 20 mm in diameter was used. The rotation speed of the polygon mirror is 0.5 rpm, and the angle difference is 4.2
It was a degree. The beam splitter divides the beam into three parts, each with a power of 1kW, 0.5kW,
It was set to 0.5kW. The lens used had a focal length of 1000mm. The scan length is 300mm, the width is 2mm,
Speed is 30mm/sec, each beam delay is 350mm
(one scan path and 50mm delay), and 12mm/sec in the direction perpendicular to the scan direction. At this time, the distribution of the Vickers hardness in the direction perpendicular to the scan was as shown in FIG. As a result,
It can be seen that the processing unevenness has been improved compared to the hardness distribution of the conventional processing using one polygon mirror shown in FIG. [Effects of the Invention] As shown in the examples, according to the present invention, in heat input processing using a laser, the necessary temperature conditions are met.
It became possible to maintain the workpiece for the required time. Another problem was the heat treatment system using one polygon mirror. It has also become possible to improve processing unevenness in the direction perpendicular to the scan direction.
第1図は本発明の構成の一例を示す模式図、第
2図はスキヤンの概念図、第3図は従来のポリゴ
ンミラーを用いた熱処理装置による焼入れ後の被
加工物の硬度値のグラフ、第4図は本発明の装置
による焼入後の被加工物の硬度値のグラフ、第5
図は被加工物の定点における温度のプロフイー
ル、第6図は加工後の硬度のグラフ、第7図はポ
リゴンミラーの設定の概念図、第8図は加工物上
のビームの位置と温度分布の概念図である。
1……レーザ本体、2……分岐光学系、3……
レーザビーム、4……角度調整器、5……レン
ズ、6……ポリゴンミラー、7……モータ、8…
…コントローラ、9……被加工物、10……X−
Y−Zテーブル、11……コントローラ、12…
…スキヤンの遅れ、13……スキヤンの行路、1
4……ベンデイングミラー。
FIG. 1 is a schematic diagram showing an example of the configuration of the present invention, FIG. 2 is a conceptual diagram of scan, and FIG. 3 is a graph of the hardness value of a workpiece after quenching by a heat treatment apparatus using a conventional polygon mirror. Fig. 4 is a graph of the hardness value of the workpiece after quenching by the apparatus of the present invention;
The figure shows the temperature profile at a fixed point on the workpiece, Figure 6 is a graph of the hardness after processing, Figure 7 is a conceptual diagram of the polygon mirror settings, and Figure 8 shows the beam position and temperature distribution on the workpiece. It is a conceptual diagram. 1... Laser main body, 2... Branching optical system, 3...
Laser beam, 4... Angle adjuster, 5... Lens, 6... Polygon mirror, 7... Motor, 8...
...Controller, 9...Workpiece, 10...X-
Y-Z table, 11...controller, 12...
...Sukyan's delay, 13...Sukyan's route, 1
4...Bending mirror.
Claims (1)
ンするためのポリゴンミラーからなるレーザによ
る鋼材の加工装置において、レーザビームを複数
本に分割する光学系と、前記分岐光学系から分割
された複数本のビームの方向をそれぞれ調整して
反射する複数個のベンデイングミラーと、分割さ
れたレーザビームを集光するためのレンズと、分
割し反射されたビーム数に対応した段数で重ねら
れ、かつポリゴンミラーの反射面の角度をお互い
にずらした、同軸で回転するポリゴンミラーと、
レーザビームのスキヤン方向と直角方向に上記加
工物を移動する移動機構を備えたことを特徴とす
るポリゴンミラーを用いたレーザ熱処理装置。 2 ポリゴンミラーを用いてレーザビームを鋼材
表面上にスキヤンさせながら行う鋼材の加工方法
に於て、レーザビームを複数本に分割し、各ビー
ムの反射角度をベンデイングミラーで調整し、多
段ポリゴンミラーの各段のミラー面に反射させ、
複数ビームで鋼材表面を照射することを特徴とす
るポリゴンミラーを用いたレーザ熱処理方法。 3 ポリゴンミラーを用いてレーザビームを鋼材
表面上にスキヤンさせながら行う鋼材の加工方法
に於て、レーザビームを複数本に分割し、各ビー
ムの反射角度をベンデイングミラーで調整し、多
段ポリゴンミラーの各段のミラー面に反射させ、
複数ビームを鋼材表面の同一スキヤン上に振り分
けて照射する事を特徴とするポリゴンミラーを用
いたレーザ熱処理方法。 4 ポリゴンミラーを用いたレーザビームを鋼材
表面上にスキヤンさせながら行う鋼材の加工方法
に於て、レーザビームを複数本に分割し、各ビー
ムの反射角度をベンデイングミラーで調整し、多
段ポリゴンミラーの各段のミラー面に反射させ、
複数ビームをスキヤン方向に対して角度を持たせ
て振り分けて照射する事を特徴とするポリゴンミ
ラーを用いたレーザ熱処理方法。[Scope of Claims] 1. A laser processing device for steel materials comprising a laser main body and a polygon mirror for reflecting and scanning the laser beam, including an optical system that splits the laser beam into a plurality of beams, and an optical system that splits the laser beam from the branching optical system. multiple bending mirrors that adjust and reflect the directions of the multiple laser beams, a lens that focuses the divided laser beams, and a stack of stages corresponding to the number of divided and reflected beams. a polygon mirror that rotates coaxially, and the angles of the reflective surfaces of the polygon mirrors are shifted from each other;
A laser heat treatment apparatus using a polygon mirror, characterized by comprising a moving mechanism for moving the workpiece in a direction perpendicular to the scan direction of a laser beam. 2. In a steel processing method that uses a polygon mirror to scan a laser beam onto the steel surface, the laser beam is divided into multiple beams, the reflection angle of each beam is adjusted using a bending mirror, and a multi-stage polygon mirror is created. It is reflected on the mirror surface of each stage of
A laser heat treatment method using a polygon mirror, which is characterized by irradiating the steel surface with multiple beams. 3 In a steel processing method that uses a polygon mirror to scan a laser beam onto the steel surface, the laser beam is divided into multiple beams, the reflection angle of each beam is adjusted using a bending mirror, and a multi-stage polygon mirror is created. It is reflected on the mirror surface of each stage of
A laser heat treatment method using a polygon mirror, which is characterized by distributing and irradiating multiple beams onto the same scan on the surface of a steel material. 4 In a steel processing method that uses a polygon mirror to scan a laser beam over the steel surface, the laser beam is divided into multiple beams, the reflection angle of each beam is adjusted using a bending mirror, and a multi-stage polygon mirror is created. It is reflected on the mirror surface of each stage of
A laser heat treatment method using a polygon mirror, which is characterized by irradiating multiple beams at different angles to the scan direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63148342A JPH01316415A (en) | 1988-06-17 | 1988-06-17 | Laser heat treatment device and method using polygon mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63148342A JPH01316415A (en) | 1988-06-17 | 1988-06-17 | Laser heat treatment device and method using polygon mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01316415A JPH01316415A (en) | 1989-12-21 |
| JPH0557329B2 true JPH0557329B2 (en) | 1993-08-23 |
Family
ID=15450626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63148342A Granted JPH01316415A (en) | 1988-06-17 | 1988-06-17 | Laser heat treatment device and method using polygon mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01316415A (en) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2643031B2 (en) * | 1991-04-10 | 1997-08-20 | 動力炉・核燃料開発事業団 | Solid-state emission spectrometer |
| KR100938325B1 (en) * | 2001-06-13 | 2010-01-22 | 오르보테크 엘티디. | Multi-beam micro-machining system and method |
| DE10154508A1 (en) | 2001-11-07 | 2003-05-22 | Mlt Micro Laser Technology Gmb | Device for substrate treatment using laser radiation |
| KR100462359B1 (en) | 2004-08-18 | 2004-12-17 | 주식회사 이오테크닉스 | Laser Processing Apparatus and Method Using Polygon Mirror |
| KR100709171B1 (en) * | 2005-11-08 | 2007-04-18 | 주식회사 이오테크닉스 | Laser processing device using laser beam splitting |
| JP2008267598A (en) * | 2007-03-23 | 2008-11-06 | Yamaha Motor Co Ltd | CRANKSHAFT, INTERNAL COMBUSTION ENGINE, TRANSPORTATION EQUIPMENT AND CRANKSHAFT MANUFACTURING METHOD |
| WO2011060582A1 (en) * | 2009-11-19 | 2011-05-26 | 深圳市大族激光科技股份有限公司 | Multi-head laser processing method and device thereof |
| CN101804518A (en) * | 2010-04-02 | 2010-08-18 | 苏州市博海激光科技有限公司 | Laser boring method and equipment of multi-laser parallel cigarette tipping paper |
| JP5931341B2 (en) * | 2011-02-04 | 2016-06-08 | 三菱重工業株式会社 | Welding method |
| DE102016215847A1 (en) * | 2016-08-23 | 2018-03-01 | Carl Zeiss Microscopy Gmbh | Mirror tower, arrangement with mirror tower and microscope |
| US10981323B2 (en) | 2017-05-26 | 2021-04-20 | Applied Materials, Inc. | Energy delivery with rotating polygon and multiple light beams on same path for additive manufacturing |
| US10940641B2 (en) | 2017-05-26 | 2021-03-09 | Applied Materials, Inc. | Multi-light beam energy delivery with rotating polygon for additive manufacturing |
| US20180369914A1 (en) * | 2017-06-23 | 2018-12-27 | Applied Materials, Inc. | Additive manufacturing with multiple polygon mirror scanners |
| EP3810404A4 (en) | 2018-05-09 | 2022-02-09 | Applied Materials, Inc. | Additive manufacturing with a polygon scanner |
| CN110434470B (en) * | 2019-07-04 | 2020-06-12 | 中国科学院西安光学精密机械研究所 | Method and system for machining micro-nano structure with anti-reflection function of large-width transparent curved surface part |
| KR102703790B1 (en) * | 2021-10-22 | 2024-09-06 | 에이치씨에스테크놀로지 주식회사 | Laser roll patterning device for precision patterning |
| CN116604176B (en) * | 2023-06-28 | 2025-09-30 | 济南森峰激光科技股份有限公司 | A special dimming method for three-dimensional five-axis cutting head |
-
1988
- 1988-06-17 JP JP63148342A patent/JPH01316415A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01316415A (en) | 1989-12-21 |
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