JPH0558240B2 - - Google Patents
Info
- Publication number
- JPH0558240B2 JPH0558240B2 JP58222032A JP22203283A JPH0558240B2 JP H0558240 B2 JPH0558240 B2 JP H0558240B2 JP 58222032 A JP58222032 A JP 58222032A JP 22203283 A JP22203283 A JP 22203283A JP H0558240 B2 JPH0558240 B2 JP H0558240B2
- Authority
- JP
- Japan
- Prior art keywords
- quadrupole
- electrodes
- particle accelerator
- electrode
- frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000003990 capacitor Substances 0.000 claims description 13
- 230000005684 electric field Effects 0.000 claims description 11
- 239000002245 particle Substances 0.000 claims description 10
- 230000001133 acceleration Effects 0.000 claims description 8
- 239000012212 insulator Substances 0.000 claims description 4
- 238000005868 electrolysis reaction Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 20
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は四重極粒子加速器に係り、特に、
RFQ（Radio Freqnency Quadrupole）イオン加
速器の如く、種々のイオンを効率良く、任意のエ
ネルギーに加速することのできる四重極粒子加速
器に関する。[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a quadrupole particle accelerator, and in particular,
The present invention relates to a quadrupole particle accelerator, such as an RFQ (Radio Frequnency Quadrupole) ion accelerator, that can efficiently accelerate various ions to any energy.
従来のRFQイオン加速器の構造を第１図に示
す。該図の如く、四重極電極１，２，３，４は向
き合つた面が凹凸に波打つており、その様子を垂
直断面と水平断面で示したのが第２図ａ，ｂであ
る。これらの電極１，２，３，４には高周波が印
加され、電極１と３がのとき電極２と４はで
あり、電極１と３がのとき電極２と４はにな
る。又、第２図ａ，ｂからわかるように、電極
１，３と電極２，４は凹凸の位相が180°ずれてお
り、このため、例えば電極１，３がで電極２，
４がのとき、第２図ａ，ｂに示すように、中心
軸上に軸方向の電界が生ずる。矢印６，７，８の
電界の方向を示す。電極にかかる電圧の極性が逆
になつたときには、第２図ａ，ｂの電界の方向も
逆になる。今、第２図ａ，ｂの左からこの四重電
極電界の中に入つてきたイオンが、丁度、常に右
方向へ加速電界を受けるようなスピード、および
位相で入つてくると、そのままエネルギーが単調
に増加する。また、初め減速を受けるような位相
のときに入つたイオンは、次の加速電界のとき、
後から来た粒子の中にバンチングされ、あとは単
調に加速される。
Figure 1 shows the structure of a conventional RFQ ion accelerator. As shown in the figure, the opposing surfaces of the quadrupole electrodes 1, 2, 3, and 4 are undulating in an uneven manner, and FIGS. 2a and 2b show this in vertical and horizontal cross sections. A high frequency is applied to these electrodes 1, 2, 3, and 4. When electrodes 1 and 3 are , electrodes 2 and 4 are , and when electrodes 1 and 3 are , electrodes 2 and 4 are . Furthermore, as can be seen from Figures 2a and 2b, the phases of the unevenness of electrodes 1 and 3 and electrodes 2 and 4 are shifted by 180 degrees.
4, an axial electric field is generated on the central axis, as shown in FIGS. 2a and 2b. Arrows 6, 7, and 8 indicate the direction of the electric field. When the polarity of the voltage applied to the electrodes is reversed, the direction of the electric field in FIGS. 2a and 2b is also reversed. Now, if an ion enters this quadruple electrode electric field from the left in Figure 2 a and b at a speed and phase such that it is always subjected to an accelerating electric field in the right direction, it will lose energy as it is. Monotonically increasing. In addition, when an ion enters at a phase that is initially decelerated, when the next accelerating electric field is applied,
It is bunched into particles that come after it, and is then monotonically accelerated.
このように、RFQでは、どのような高周波位
相で入つてくるイオンも最終的には有効に加速で
き、また、垂直、および水平方向の高周波電界に
よる強収束作用が利用できる。そのため、非常に
高い透過率が得られる。 In this way, in RFQ, incoming ions with any high-frequency phase can be effectively accelerated in the end, and the strong focusing effect of vertical and horizontal high-frequency electric fields can be utilized. Therefore, extremely high transmittance can be obtained.
ところで、従来の装置では、加速管５は電極
１，２，３，４と共に高周波の空洞共振器を形成
していた。第３図に従来のRFQの断面を示す。
該図において、９は高周波電力をこの空洞共振器
へ供給するための高周波ケーブルで中心導体の先
端１０はループアンテナ状の結合器になつてい
る。この共振器の共振周波数は、その幾何学的な
寸法で決まつてしまうため、周波数を変えること
はできない。例えば、100MHzのH+加速器の例で
は流さ約1.5ｍ、直径0.5ｍ位である。もしこれを
使つて例の別のイオン種を加速する場合には、イ
オンのエネルギーはeV＝1/2mV2（ここで、ｅは
電子の電荷、Ｖはイオン加速電圧、ｍはイオン質
量、ｖはイオンのスピード）であるから、入射ス
ピードをH+の場合と同じにするには入射エネル
ギーを質量ｍに比例して増大してやる必要があ
り、また、出射エネルギーも質量ｍに比例して増
大する。つまり、H+を1MeVまで加速するRFQ
ではAs+は75MeVになつてしまう。 By the way, in the conventional device, the accelerating tube 5 forms a high-frequency cavity resonator together with the electrodes 1, 2, 3, and 4. Figure 3 shows a cross section of a conventional RFQ.
In the figure, reference numeral 9 denotes a high frequency cable for supplying high frequency power to this cavity resonator, and the tip 10 of the center conductor is a loop antenna-like coupler. The resonant frequency of this resonator is determined by its geometric dimensions and cannot be changed. For example, in the case of a 100MHz H + accelerator, the flow is about 1.5m and the diameter is about 0.5m. If we use this to accelerate another ion species in the example, the energy of the ion is eV = 1/2 mV 2 (where e is the electron charge, V is the ion acceleration voltage, m is the ion mass, and v is the ion speed), so to make the incident speed the same as for H + , the incident energy must be increased in proportion to the mass m, and the exit energy also increases in proportion to the mass m. . i.e. RFQ to accelerate H + to 1MeV
Then As + becomes 75MeV.
このような特性は、イオン打込器のように、色
色なエネルギーで色々なイオンを打込むという目
的には向かない。 Such characteristics are not suitable for the purpose of implanting various ions with different energies like an ion implanter.
また、観点を変えて、As+専用の1MeV加速器
をRFQで作るためには、周波数はそのままで、
流さを1/75にするか、または長さそのままで高周
波の周波数を1/75にするしかない。前者の場合
は、電極表面の凹凸の周期長が1/75になるため、
電極加工上の問題がある。また、後者の場合は、
空洞共振器の共振条件を合わせるために、加速管
の直径を約75倍にする必要があり、いずれも非現
実的である。 Also, from a different perspective, in order to create a 1MeV accelerator exclusively for As + by RFQ, the frequency remains the same,
The only option is to reduce the flow rate to 1/75, or leave the length unchanged and reduce the high frequency frequency to 1/75. In the former case, the periodic length of the irregularities on the electrode surface is 1/75, so
There are problems with electrode processing. Also, in the latter case,
In order to match the resonance conditions of the cavity resonator, it is necessary to increase the diameter of the accelerating tube by about 75 times, which is unrealistic.
また、第１図の従来方式の構造では、長時間運
転中にイオンスパツタなどで加速管内壁が汚れて
きた場合、空洞共振器のＱ値が下がり、所定の高
周波電圧が発生できなくなることがある。 Furthermore, in the conventional structure shown in FIG. 1, if the inner wall of the accelerator tube becomes contaminated with ion spatter during long-term operation, the Q value of the cavity resonator may decrease, making it impossible to generate a predetermined high-frequency voltage.
本発明の目的は、種々のイオンを数百KeVか
ら数MeVまでの任意のエネルギーに加速でき、
これにより高電圧、大電流のイオン打込器が実現
可能な四重極粒子加速器を提供するにある。
The purpose of the present invention is to accelerate various ions to any energy from several hundred KeV to several MeV,
This provides a quadrupole particle accelerator that can realize a high-voltage, large-current ion implanter.
本発明は互いに向き合つた面を波打たせた構造
の四重極電極を絶縁物を介して加速管から絶縁す
ると共に、この加速管の近傍に共振回路を設置
し、前記四重極電極のうち、互いに隣り合わない
２つの電極を組とする２組に分け、そのうちの一
つの組を、前記共振回路を構成するコンデンサの
一つの極に電気的に接続し、他の極にもう１つの
電極の組を電気的に接続するようにしたことによ
り、所期の目的を達成するようになしたものであ
る。
In the present invention, quadrupole electrodes having a structure in which opposing surfaces are corrugated are insulated from an acceleration tube via an insulator, and a resonant circuit is installed near the acceleration tube, and the quadrupole electrodes have a corrugated structure. The electrodes are divided into two groups, each consisting of two electrodes that are not adjacent to each other, one of which is electrically connected to one pole of the capacitor constituting the resonant circuit, and the other electrode is electrically connected to the other electrode. The intended purpose is achieved by electrically connecting a set of electrodes.
以下、本発明の一実施例を第４図を用いて説明
する。
Hereinafter, one embodiment of the present invention will be described using FIG. 4.
該図に示す如く、本実施例では、四重極電極
１′，２′，３′，４′は、絶縁物１１を介して加速
管５から絶縁されている。また、加速管５の外部
近傍には、インダクタンスＬのコイル１２と容量
C1の可変コンデンサ１３とから成る共振回路が
設置され、互いに隣り合わない四重極電極１′と
３′、及び２′と４′とをそれぞれ１つの組とし、
そして、四重極電極１′と３′とからなる組を可変
コンデンサ１３の一方に電気的に接続し、四重極
電極２′と４′からなる組を可変コンデンサ１３の
他方に電気的に接続されている。 As shown in the figure, in this embodiment, the quadrupole electrodes 1', 2', 3', and 4' are insulated from the accelerator tube 5 via an insulator 11. In addition, near the outside of the acceleration tube 5, a coil 12 with an inductance L and a capacitance
A resonant circuit consisting of a variable capacitor 13 of C 1 is installed, and quadrupole electrodes 1' and 3', which are not adjacent to each other, and 2' and 4' are each set as one set,
Then, the set consisting of quadrupole electrodes 1' and 3' is electrically connected to one side of the variable capacitor 13, and the set consisting of quadrupole electrodes 2' and 4' is electrically connected to the other side of the variable capacitor 13. It is connected.
この場合の等価回路を第５図に示す。この等価
回路において、コンデンサ１７は四重極電極１′，
３′と２′，４′間の浮遊容量C2である。したがつ
て、この共振回路の共振周波数は
１／2π√Ｌ（C1＋C2）であり、発振器１６の出力周波
数に同調されている。また、発振器１６の出力は
増幅器１５で増幅されたあと、カツプリングコイ
ル１４を通してこの共振回路に供給される。これ
により、イオン種が変わつても、それに応じて周
波数を変えてやれば、出力エネルギーを任意に決
めることができる。 An equivalent circuit in this case is shown in FIG. In this equivalent circuit, the capacitor 17 is connected to the quadrupole electrode 1',
This is the stray capacitance C 2 between 3' and 2' and 4'. Therefore, the resonant frequency of this resonant circuit is 1/2π√L(C 1 +C 2 ) and is tuned to the output frequency of the oscillator 16. Further, the output of the oscillator 16 is amplified by the amplifier 15 and then supplied to this resonant circuit through the coupling coil 14. As a result, even if the ion species changes, the output energy can be determined arbitrarily by changing the frequency accordingly.
更に、この方式の改良として、発振器１６の周
波数設定と、コイル１２と可変コンデンサ１３、
および電極間容量１７から成る共振回路の周波数
設定を連動して行なわれる機構にすることができ
る。 Furthermore, as an improvement to this method, the frequency setting of the oscillator 16, the coil 12 and the variable capacitor 13,
A mechanism can be used in which the frequency setting of the resonant circuit consisting of the capacitance 17 and the interelectrode capacitance 17 is performed in conjunction with each other.
また、外部共振回路から増幅器１５に正帰還を
かけることにより、発振回路を構成することがで
きるので、この場合は発振器１６を省略すること
ができる。 Further, since an oscillation circuit can be constructed by applying positive feedback to the amplifier 15 from the external resonant circuit, the oscillator 16 can be omitted in this case.
また、外部回路を複数個設けることにより、複
数個の周波数の正弦波を電極に重畳できるので、
その結果として、例えば矩形波に近い波形にする
こともでき、加速効率を上げることができる。 In addition, by providing multiple external circuits, sine waves of multiple frequencies can be superimposed on the electrodes.
As a result, the waveform can be made close to a rectangular wave, for example, and acceleration efficiency can be improved.
本発明の別の実施例を第６図に示す。 Another embodiment of the invention is shown in FIG.
該図に示す本実施例は、共振回路の前に直流絶
縁用のコンデンサ１８，１９を設け、このコンデ
ンサ１８，１９で直流電源２０により、電極１′，
３′と電極２′，４′の間に直流電圧を与えるよう
にしたものである。コンデンサ１８，１９の容量
は、高周波電圧を電極１′，２′，３′，４′に与え
るになんら支承ないよう十分大きい値を選んでい
る。これらにより電極１′，３′と電極２′，４′の
間には直流電圧と高周波電圧を重畳して印加する
ことができる。 In the present embodiment shown in the figure, capacitors 18 and 19 for DC insulation are provided in front of the resonant circuit, and these capacitors 18 and 19 are used to connect electrodes 1' and
A DC voltage is applied between the electrode 3' and the electrodes 2' and 4'. The capacitances of the capacitors 18, 19 are selected to be sufficiently large so as not to support the high frequency voltage applied to the electrodes 1', 2', 3', 4'. With these, a DC voltage and a high frequency voltage can be applied in a superimposed manner between the electrodes 1', 3' and the electrodes 2', 4'.
従つて、軸方向の高周波電界の他に、軸と直角
方向には四重極マスフイルターと同じ電界が生じ
るため、イオンの加速と質量分析を同時に行なう
ことができる。 Therefore, in addition to the high-frequency electric field in the axial direction, an electric field similar to that of a quadrupole mass filter is generated in the direction perpendicular to the axis, so that ion acceleration and mass analysis can be performed simultaneously.
なお、第４図、および第６図の外部共振回路の
周波数同調用として可変コンデンサかわりに可変
インダクタンスを使つても同様の効果が得られる
ことは、電気回路理論から明らかである。 It is clear from electric circuit theory that the same effect can be obtained even if a variable inductance is used instead of a variable capacitor for frequency tuning of the external resonant circuits shown in FIGS. 4 and 6.
以上説明した本発明の四重極粒子加速器によれ
ば、RFQ加速器の高効率を維持したままで、種
種のイオンを任意のエネルギーに加速できるた
め、高電圧、大電流のイオン打込器としての応用
が可能となる。
According to the quadrupole particle accelerator of the present invention described above, various types of ions can be accelerated to arbitrary energy while maintaining the high efficiency of the RFQ accelerator, so it can be used as a high voltage, large current ion implanter. Application becomes possible.
第１図は従来のRFQ加速器の構造を示す図、
第２図ａは第１図の電極の垂直断面図、第２図ｂ
は第１図の電極の水平断面図、第３図は従来の
RFQ加速器の電気回路的構造および高周波の供
給方法を示す図、第４図は本発明の一実施例を示
す図、第５図は本発明の電気的等価回路を示す
図、第６図は別の実施例を示す図である。
１，２，３，４，１′，２′，３′，４′……四重
極電極、５……加速管、６，７，８……軸上の軸
方向電界成分を示す矢印、９……同軸ケーブル、
１０……ループアンテナ、１１……絶縁物、１２
……インダクタンス、１３……可変コンデンサ、
１４……カツプリングコイル、１５……増幅器、
１６……発振器、１７……電極間の浮遊容量、１
８，１９……コンデンサ、２０……直流電源。
Figure 1 shows the structure of a conventional RFQ accelerator.
Figure 2a is a vertical cross-sectional view of the electrode in Figure 1, Figure 2b
is a horizontal cross-sectional view of the electrode in Fig. 1, and Fig. 3 is a horizontal cross-sectional view of the electrode in Fig. 1.
A diagram showing the electrical circuit structure of the RFQ accelerator and a high frequency supply method, FIG. 4 is a diagram showing an embodiment of the present invention, FIG. 5 is a diagram showing the electrical equivalent circuit of the present invention, and FIG. 6 is a separate diagram. It is a figure showing an example of. 1, 2, 3, 4, 1', 2', 3', 4'...quadrupole electrode, 5...acceleration tube, 6,7,8...arrow indicating the axial electric field component on the axis, 9...Coaxial cable,
10...Loop antenna, 11...Insulator, 12
...Inductance, 13...Variable capacitor,
14...Coupling coil, 15...Amplifier,
16... Oscillator, 17... Stray capacitance between electrodes, 1
8, 19... Capacitor, 20... DC power supply.
Claims (1)
極電極と、該四重極電極の周囲を覆う加速管とを
備えた四重極粒子加速器において、前記四重極電
極を絶縁物を介して前記加速管から絶縁すると共
に、この加速管の近傍に共振回路を設置し、か
つ、前記四重極電極のうち、互いに隣り合わない
２つの電極を組とする２組に分け、そのうちの一
つの組を、前記共振回路を構成するコンデンサの
一つの極に電気的に接続し、他の極にもう１つの
電極の組を電気的に接続するようにしたことを特
徴とする四重極粒子加速器。 ２ 特許請求の範囲第１項において、前記共振回
路を複数個設け、これら複数個の共振回路の異な
つた周波数の高周波電解を重畳して電界に印加す
ることを特徴とする四重極粒子加速器。 ３ 特許請求の範囲第１項、または第２項におい
て、前記共振回路の共振周波数を可変としたこと
を特徴とする四重極粒子加速器。 ４ 特許請求の範囲第１項において、前記四重極
電極に直流と交流を重畳して印加できるようにし
たことを特徴とする四重極粒子加速器。[Scope of Claims] 1. A quadrupole particle accelerator comprising a quadrupole electrode having a structure in which mutually facing surfaces are corrugated, and an acceleration tube surrounding the quadrupole electrode, wherein the quadrupole A polar electrode is insulated from the accelerating tube via an insulator, a resonant circuit is installed near the accelerating tube, and two of the quadrupole electrodes that are not adjacent to each other form a set. one set is electrically connected to one pole of the capacitor constituting the resonant circuit, and the other set of electrodes is electrically connected to the other pole. Features of the quadrupole particle accelerator. 2. The quadrupole particle accelerator according to claim 1, characterized in that a plurality of the resonant circuits are provided, and high-frequency electrolysis of different frequencies of the plurality of resonant circuits is superimposed and applied to an electric field. 3. The quadrupole particle accelerator according to claim 1 or 2, characterized in that the resonant frequency of the resonant circuit is variable. 4. The quadrupole particle accelerator according to claim 1, characterized in that direct current and alternating current can be applied in a superimposed manner to the quadrupole electrodes.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58222032A JPS60115199A (en) | 1983-11-28 | 1983-11-28 | Quadruple pole particle accelerator |
| PCT/JP1984/000557 WO1985002489A1 (en) | 1983-11-28 | 1984-11-22 | Quadrupole particle accelerator |
| DE8484904176T DE3477528D1 (en) | 1983-11-28 | 1984-11-22 | Quadrupole particle accelerator |
| US06/763,133 US4801847A (en) | 1983-11-28 | 1984-11-22 | Charged particle accelerator using quadrupole electrodes |
| EP84904176A EP0163745B1 (en) | 1983-11-28 | 1984-11-22 | Quadrupole particle accelerator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58222032A JPS60115199A (en) | 1983-11-28 | 1983-11-28 | Quadruple pole particle accelerator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60115199A JPS60115199A (en) | 1985-06-21 |
| JPH0558240B2 true JPH0558240B2 (en) | 1993-08-26 |
Family
ID=16776012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58222032A Granted JPS60115199A (en) | 1983-11-28 | 1983-11-28 | Quadruple pole particle accelerator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60115199A (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0714020B2 (en) * | 1987-02-04 | 1995-02-15 | 株式会社日立製作所 | Electronic device cooling method |
| JPH0824076B2 (en) * | 1987-02-04 | 1996-03-06 | 株式会社日立製作所 | Quadrupole particle accelerator |
| JPH0697640B2 (en) * | 1988-07-15 | 1994-11-30 | 株式会社島津製作所 | Acceleration energy control method in high frequency quadrupole accelerator |
| US5796219A (en) * | 1988-07-15 | 1998-08-18 | Shimadzu Corp | Method and apparatus for controlling the acceleration energy of a radio-frequency multipole linear accelerator |
| EP0439554A4 (en) * | 1988-10-24 | 1992-02-26 | The Brinkmann Corporation | Switch for portable light source |
| JPH061678B2 (en) * | 1988-11-24 | 1994-01-05 | 工業技術院長 | External resonance circuit type RFQ accelerator |
| JPH0831359B2 (en) * | 1990-02-21 | 1996-03-27 | 株式会社日立製作所 | Quadrupole particle accelerator and operating method thereof |
| JPH04120400U (en) * | 1991-04-11 | 1992-10-28 | 東芝機械株式会社 | electrostatic deflector |
-
1983
- 1983-11-28 JP JP58222032A patent/JPS60115199A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60115199A (en) | 1985-06-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5504341A (en) | Producing RF electric fields suitable for accelerating atomic and molecular ions in an ion implantation system | |
| US4350927A (en) | Means for the focusing and acceleration of parallel beams of charged particles | |
| WO1996025757A9 (en) | Producing rf electric fields suitable for accelerating atomic and molecular ions in an ion implantation system | |
| US4596946A (en) | Linear charged particle accelerator | |
| US4801847A (en) | Charged particle accelerator using quadrupole electrodes | |
| US4093856A (en) | Method of and apparatus for the electrostatic excitation of ions | |
| US2834908A (en) | Traveling wave tube | |
| JPH0558240B2 (en) | ||
| US2407298A (en) | Electron discharge apparatus | |
| US3013173A (en) | Magnetic beam focusing method and apparatus | |
| Potter et al. | Radio frequency quadrupole accelerating structure research at Los Alamos | |
| US3718865A (en) | Device for accelerating charged atomic particles including a pair of high frequency resonators | |
| US2673928A (en) | Apparatus for imparting high energy to charged particles | |
| US3255369A (en) | Variable polarization saturable magnetic circuits | |
| JP2909794B2 (en) | RFQ linear accelerator | |
| JPH0562798A (en) | External resonance type quadrupole particle accelerator | |
| US5483130A (en) | Structure for accelerating heavy ions with uniformly spaced quadrupole focusing (USQF) | |
| US3238465A (en) | D. c. focused and pumped parametric amplifier | |
| RU2352015C1 (en) | Microwave device | |
| US2567406A (en) | Electric discharge device for highfrequency oscillations | |
| JPH07302700A (en) | High frequency quadrupole accelerator | |
| JP3098856B2 (en) | Variable energy 4-vane high-frequency quadrupole cavity and variable energy split-coaxial high-frequency quadrupole cavity | |
| US2611882A (en) | Electron discharge device | |
| Barnett et al. | A wideband fundamental mode millimeter gyrotron TWA experiment | |
| JPH05501632A (en) | Fan-shaped concentrated cyclotron |