JPH0565082B2 - - Google Patents
Info
- Publication number
- JPH0565082B2 JPH0565082B2 JP7813887A JP7813887A JPH0565082B2 JP H0565082 B2 JPH0565082 B2 JP H0565082B2 JP 7813887 A JP7813887 A JP 7813887A JP 7813887 A JP7813887 A JP 7813887A JP H0565082 B2 JPH0565082 B2 JP H0565082B2
- Authority
- JP
- Japan
- Prior art keywords
- flatness
- measured
- glossiness
- image
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006243 chemical reaction Methods 0.000 claims description 19
- 238000005259 measurement Methods 0.000 claims description 19
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000005337 ground glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、表面性状測定装置に係り、特に、塗
装面などの光沢度と平坦度とを同時に測定するた
めの表面性状測定装置に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a surface texture measuring device, and particularly relates to a surface texture measuring device for simultaneously measuring the glossiness and flatness of a painted surface, etc. be.
従来、例えば特公昭57−59490号に記載のよう
に光沢度を測定する装置と、特開昭56−76004号
に記載のように平坦度を測定する装置とが知られ
ている。これらはそれぞれ別個の装置であり、光
沢度と平坦度とを同時に測定する考え方は見られ
なかつた。
Conventionally, an apparatus for measuring glossiness, as described in Japanese Patent Publication No. 57-59490, and an apparatus for measuring flatness, as described in Japanese Patent Application Laid-Open No. 56-76004, have been known. These are separate devices, and there has been no idea to measure gloss and flatness at the same time.
上記従来技術は、光沢度と平坦度とを別々に測
定していたため、測定作業が繁雑になるほか、同
一場所の光沢度と平坦度とを測定するには、検出
ヘツドの位置を正確に再現することが必要とな
り、小型軽量化が困難であつた。したがつて、狭
い部分での使い勝手にも問題があつた。
The above conventional technology measures glossiness and flatness separately, which makes the measurement work complicated, and requires accurate reproduction of the position of the detection head to measure glossiness and flatness at the same location. This made it difficult to reduce the size and weight. Therefore, there was also a problem with ease of use in narrow areas.
また、光沢度測定値は、平坦度の影響を受け
る。すなわち、平坦度が悪いとき、光沢度の測定
値の誤差が大きくなる。従来は、この点に対する
配慮がなかつた。 Glossiness measurements are also affected by flatness. That is, when the flatness is poor, the error in the measured value of glossiness increases. Conventionally, no consideration was given to this point.
本発明の目的は、平坦度が悪いときにもその光
沢度に対する影響を排除して、光沢度と平坦度と
を同時に測定可能な小型軽量の表面性状測定装置
を提供することである。 An object of the present invention is to provide a small and lightweight surface texture measuring device that can simultaneously measure glossiness and flatness by eliminating the influence of poor flatness on glossiness.
本発明は、上記目的を達成するために、明暗が
少なくとも一対あるパターンをレンズ系により測
定対象面を介して投影結像させ、ピンホールを備
え投影像の光強度を光電変換する光電変換素子を
結像面に配置し、前記パターンをその明暗が光軸
を横切るように移動させ、明暗移動に伴う測定対
象面による投影像の変化から測定対象面の光沢度
を測定する光沢度測定系と、明暗が多数繰返され
る格子パターンをレンズ系により測定対象面を介
して投影結像させ、格子像の光強度を光電変換す
るイメージセンサを格子像面に配置し、イメージ
センサからの格子像のピツチと基準ピツチとから
測定対象面の平坦度を測定する平坦度測定系と、
平坦度の良否に応じて光沢度測定値に補正倍率を
乗じ、平坦度測定値と補正された光沢度測定値と
を出力する信号処理系とからなる表面性状測定装
置を提供するものである。
In order to achieve the above object, the present invention uses a lens system to project and image a pattern having at least one pair of bright and dark areas through a measurement target surface, and to provide a photoelectric conversion element equipped with a pinhole and photoelectrically converting the light intensity of the projected image. a glossiness measurement system that is placed on an image forming plane, moves the pattern so that its brightness crosses the optical axis, and measures the glossiness of the measurement target surface from changes in the projected image of the measurement target surface due to the movement of brightness; A grating pattern with repeated brightness and darkness is projected and imaged through the measurement target surface using a lens system, and an image sensor that photoelectrically converts the light intensity of the grating image is placed on the grating image plane. a flatness measurement system that measures the flatness of a surface to be measured from a reference pitch;
The present invention provides a surface texture measuring device comprising a signal processing system that multiplies the measured glossiness value by a correction magnification depending on the quality of the flatness and outputs the measured flatness value and the corrected measured glossiness value.
本発明においては、平坦度の良否に応じて、光
沢度の測定値に補正倍率を掛け、平坦度の影響を
取り除くので、同一個所の光沢度と平坦度の正確
な測定値が、一回の測定操作で得られる。
In the present invention, the measured value of glossiness is multiplied by a correction magnification depending on the quality of flatness, and the influence of flatness is removed. Obtained by measurement operation.
次に、図面を参照して、本発明による表面性状
測定装置の一実施例を説明する。
Next, an embodiment of the surface texture measuring device according to the present invention will be described with reference to the drawings.
第1図は、本発明による表面性状測定装置の検
出ヘツド内の光学系を示す斜視図である。図にお
いて、1a,1bはタングステンやハロゲン等の
ランプ、2a,2bはその光線の光強度分布を均
一にするスリガラス等の拡散板、3a,3bは拡
散され均一となつた光を集中させる単レンズまた
は複合レンズの集光レンズであり、これらはそれ
ぞれ、2つの光源a,bを形成している。 FIG. 1 is a perspective view showing an optical system within a detection head of a surface texture measuring device according to the present invention. In the figure, 1a and 1b are lamps made of tungsten or halogen, 2a and 2b are diffusion plates such as ground glass that make the light intensity distribution of the light uniform, and 3a and 3b are single lenses that concentrate the diffused and uniform light. Alternatively, it is a condensing lens of a compound lens, which forms two light sources a and b, respectively.
光源a側には、光を全透過する部分と全く透過
しない部分とを組合わせたナイフエツジパターン
4aと、このパターンを平行移動させるときのガ
イドとなる摺動テーブル4bと、パターン平行移
動の駆動源となるパルスモータ4cと、パルスモ
ータ4cの回転駆動力を摺動テーブル4bの平行
移動力に変えるボールねじ4dとからなり、ナイ
フエツジパターン4aを平行往復移動させるパタ
ーン移動ユニツト4を設置してある。一方、光源
b側には、光を全透過する部分と全く透過しない
部分が約0.2mm毎に反復する格子パターン5を設
置してある。 On the light source a side, there is a knife edge pattern 4a that combines a part that transmits all light and a part that does not transmit light at all, a sliding table 4b that serves as a guide when moving this pattern in parallel, and a drive for parallel movement of the pattern. A pattern moving unit 4 is installed to move the knife edge pattern 4a in parallel and reciprocating, consisting of a pulse motor 4c serving as a power source and a ball screw 4d that converts the rotational driving force of the pulse motor 4c into a parallel movement force of the sliding table 4b. be. On the other hand, on the light source b side, a grating pattern 5 is provided in which a portion that transmits all light and a portion that does not transmit light at all are repeated at intervals of about 0.2 mm.
6a,6bは、ナイフエツジパターン4a、格
子パターン5をそれぞれ通過した光線を、測定対
象面11を介して結像させる投影レンズである。 6a and 6b are projection lenses that image the light beams that have passed through the knife edge pattern 4a and the grating pattern 5 through the measurement target surface 11.
7は、投影レンズ6aから光源変換素子8に入
射する光の範囲を制限する絞りとしてのピンホー
ルで、孔の直径は0.2mm程度にしてある。9は、
投影レンズ6bによる像の光量分布を電気信号に
変換するイメージセンサである。 Reference numeral 7 designates a pinhole as an aperture that limits the range of light incident on the light source conversion element 8 from the projection lens 6a, and the diameter of the hole is approximately 0.2 mm. 9 is
This is an image sensor that converts the light intensity distribution of an image produced by the projection lens 6b into an electrical signal.
ランプ1a、拡散板2a、集光レンズ3a、パ
ターン移動ユニツト4、投影レンズ6a、ピンホ
ール7、光電変換素子8は、光沢度測定手段の光
学系であり、ランプ1b、拡散板2b、集光レン
ズ3b、格子パターン5、投影レンズ6b、イメ
ージセンサ9は、平坦度測定手段の光学系であ
る。 The lamp 1a, the diffuser plate 2a, the condensing lens 3a, the pattern moving unit 4, the projection lens 6a, the pinhole 7, and the photoelectric conversion element 8 are the optical system of the glossiness measuring means. The lens 3b, the grating pattern 5, the projection lens 6b, and the image sensor 9 are an optical system of the flatness measuring means.
これらの各部品1〜9は、図示しないマウント
によりケース10内に固定される。また、図示し
ていないが、ケース10には、デイスプレイ、ス
タートスイツチ、パルスモータ駆動回路、測定対
象面11とケース10とを一定間隔に保つための
突起等が取り付けられている。 Each of these parts 1 to 9 is fixed within the case 10 by a mount (not shown). Although not shown, the case 10 is equipped with a display, a start switch, a pulse motor drive circuit, a protrusion for maintaining a constant distance between the surface to be measured 11 and the case 10, and the like.
第2図は、光電変換素子8またはイメージセン
サ9から得られた信号を処理するための回路を示
すブロツク図である。図において、12は光電変
換素子8の信号を増幅する光電変換回路、13は
イメージセンサ9を走査し信号を得るためのイメ
ージセンサ駆動回路、14は光電変換回路12ま
たはイメージセンサ駆動回路13の出力を選択す
るスイツチ回路、15は選択されたアナログ信号
をデジタル信号に変換するA/D変換回路、16
はデジタル信号を処理するマイクロプロセツサ
(CPU)、17は図示しないスタートスイツチや
デイスプレイとの間で信号をやりとりし、読み込
み、表示等を行うためのパラレル入出力IC
(PIO)、18はCPU16のためのプログラムを収
納してあるメモリIC(ROM)、19はその内容を
書込み、読み出すとともに、得られたデータを蓄
積するメモリIC(RAM)である。 FIG. 2 is a block diagram showing a circuit for processing signals obtained from the photoelectric conversion element 8 or the image sensor 9. As shown in FIG. In the figure, 12 is a photoelectric conversion circuit that amplifies the signal of the photoelectric conversion element 8, 13 is an image sensor drive circuit that scans the image sensor 9 and obtains a signal, and 14 is the output of the photoelectric conversion circuit 12 or the image sensor drive circuit 13. 15 is an A/D conversion circuit for converting the selected analog signal into a digital signal; 16 is an A/D conversion circuit for converting the selected analog signal into a digital signal;
17 is a microprocessor (CPU) that processes digital signals, and 17 is a parallel input/output IC for exchanging signals with a start switch and display (not shown) for reading, displaying, etc.
(PIO), 18 is a memory IC (ROM) that stores a program for the CPU 16, and 19 is a memory IC (RAM) that writes and reads the contents and stores the obtained data.
さて、光沢度の測定値は、第3図に示すよう
に、平坦度の良否により影響を受け、平坦度が悪
い場合、真値よりも低い値しか得られない。そこ
で本発明では、第4図に示したように、光沢度を
求めるための演算式において、平坦度が悪い部分
では高くなるような補正倍率を、予めROM18
に入れておき、測定に当たつて、RAM19に読
み出し、測定した光沢度にその補正倍率を乗じ、
真の結果を得るようにしてある。 Now, as shown in FIG. 3, the measured value of the glossiness is affected by the quality of the flatness, and if the flatness is poor, only a value lower than the true value can be obtained. Therefore, in the present invention, as shown in FIG.
When measuring, read it out to RAM 19, multiply the measured glossiness by the correction magnification,
It's meant to give you real results.
以上のように構成した表面性状測定装置におい
て、図示しない測定スタートスイツチを押すと、
測定対象面11の平坦度の程度により、格子像の
ピツチが乱れた格子パターン5の像が、イメージ
センサ9で捕らえられ、イメージセンサ駆動回路
13およびスイツチ回路14を介して、A/D変
換回路15に加えられる。CPU16は、A/D
変換回路15からのデジタル信号をもとに、格子
像のピツチの乱れの度合から測定対象面11の平
坦度を求める。 In the surface texture measuring device configured as described above, when the measurement start switch (not shown) is pressed,
An image of the lattice pattern 5 whose pitch is disordered depending on the degree of flatness of the measurement target surface 11 is captured by the image sensor 9, and sent to the A/D conversion circuit via the image sensor drive circuit 13 and the switch circuit 14. Added to 15. CPU16 is A/D
Based on the digital signal from the conversion circuit 15, the flatness of the surface to be measured 11 is determined from the degree of pitch disturbance of the grating image.
その際に、平坦度には種々の定義を採用でき
る。例えば、上記特開昭56−76004号公報に示さ
れるように、ゆがみがないときの基準ピツチを
P0、測定されたピツチをPとし、両者の差の絶
対値|P0−P|を基準ピツチP0で割つたゆがみ
率δ=|P0−P|/P0を平坦度と定義する。 At this time, various definitions can be adopted for flatness. For example, as shown in the above-mentioned Japanese Patent Application Laid-Open No. 56-76004, the standard pitch when there is no distortion is
P 0 , the measured pitch is P, and the absolute value of the difference between the two |P 0 -P| is divided by the reference pitch P 0 , which is the distortion rate δ=|P 0 -P|/P 0 is defined as flatness. .
一方、測定対象面によるナイフエツジパターン
4aの像の明暗境界の鮮明度の変化を光電変換素
子8で検出し、光電変換回路12およびスイツチ
回路14を介して、A/D変換回路15に加え
る。CPU16は、A/D変換回路15からのデ
ジタル信号をもとに、鮮明度の変化から、測定対
象面11の光沢度を求める。 On the other hand, the photoelectric conversion element 8 detects changes in the sharpness of the bright and dark boundaries of the image of the knife edge pattern 4a due to the surface to be measured, and applies the detected changes to the A/D conversion circuit 15 via the photoelectric conversion circuit 12 and the switch circuit 14. Based on the digital signal from the A/D conversion circuit 15, the CPU 16 determines the glossiness of the surface to be measured 11 from changes in sharpness.
この際にも、光沢度には種々の定義を採用でき
る。例えば、上記特公昭57−59490号公報に示さ
れるように、ナイフエツジパターン像の明部の平
均振幅をX、暗部の平均振幅をYとし、コントラ
ストC=(X−Y)/(X+Y)を光沢度と定義
する。 Also in this case, various definitions can be adopted for glossiness. For example, as shown in the above-mentioned Japanese Patent Publication No. 57-59490, let the average amplitude of the bright part of the knife edge pattern image be X, the average amplitude of the dark part be Y, and the contrast C=(X-Y)/(X+Y). Defined as glossiness.
既に述べたように、測定対象面の平坦度がかな
り悪い場合、光沢度の測定値が、真値よりも小さ
くなり、誤差が増大する。これに対処するため、
本実施例では、真値よりも小さくなる度合いに応
じて、補正するようにしてある。具体的には、図
示しないスタートスイツチが押されると、スイツ
チ回路14がCPU16からの指令によつて切換
わり、CPU16は、平坦度と光沢度とを順次測
定し、平坦度はそのまま、光沢度は平坦度に対応
した補正倍率を測定光沢度に乗じて、図示しない
デイスプレイに測定結果として表示する。 As already mentioned, if the flatness of the surface to be measured is quite poor, the measured value of glossiness will be smaller than the true value and the error will increase. To deal with this,
In this embodiment, the correction is made depending on the degree to which the value becomes smaller than the true value. Specifically, when a start switch (not shown) is pressed, the switch circuit 14 is switched in response to a command from the CPU 16, and the CPU 16 sequentially measures the flatness and glossiness, leaving the flatness unchanged and the glossiness unchanged. The measured glossiness is multiplied by a correction magnification corresponding to the flatness and displayed as a measurement result on a display (not shown).
したがつて、塗装面等の測定対象面の平坦度の
影響を全く受けない光沢度を平坦度と同時に測定
表示する表面性状測定装置が得られる。 Therefore, it is possible to obtain a surface texture measuring device that measures and displays glossiness and flatness simultaneously, which is completely unaffected by the flatness of a surface to be measured such as a painted surface.
なお、第1図においては、理解しやすいよう
に、光沢度の測定光学系と平坦度の測定光学系と
を離して書いてあるが、実際は、光線が測定対象
面上でごく接近した面を照射するように、または
光線が同一測定点上でクロスするように、両光学
系を密接させたり、一定の角度をもつて配置して
ある。 Note that in Figure 1, the optical system for measuring glossiness and the optical system for flatness measurement are shown separated for ease of understanding, but in reality, the light rays cover a surface that is very close to each other on the surface to be measured. Both optical systems are placed close to each other or at a certain angle so that the light rays are irradiated or cross at the same measurement point.
本発明によれば、平坦度の良否に応じて、光沢
度の測定値に補正倍率を掛けるので、平坦度が悪
いときもその光沢度に対する影響を排除して、光
沢度と平坦度を同時に測定可能な小型軽量の表面
性状測定装置が得られる。
According to the present invention, the measured value of glossiness is multiplied by a correction magnification depending on whether the flatness is good or bad, so even if the flatness is poor, the influence on the glossiness is eliminated, and glossiness and flatness are measured simultaneously. A compact and lightweight surface texture measuring device is obtained.
第1図は本発明による表面性状測定装置の一実
施例の測定光学系の構成の一例を示す斜視図、第
2図は同測定装置の信号処理回路の一例を示すブ
ロツク図、第3図は平坦度の良否に対する光沢度
測定値の誤差の程度を定性的に示す図、第4図は
第3図特性から光沢度の真値を求めるための補正
倍率を示す図である。
1……ランプ、2……拡散板、3……集光レン
ズ、4……パターン移動ユニツト、4a……ナイ
フエツジパターン、4b……摺動テーブル、4c
……パルスモータ、4d……ボールねじ、5……
格子パターン、6……投影レンズ、7……ピンホ
ール、8……光電変換素子、9……イメージセン
サ、10……ケース、11……測定対象面、12
……光電変換回路、13……イメージセンサ駆動
回路、14……スイツチ回路、15……A/D変
換回路、16……CPU、17……PIO、18……
ROM、19……RAM。
FIG. 1 is a perspective view showing an example of the configuration of a measuring optical system of an embodiment of a surface texture measuring device according to the present invention, FIG. 2 is a block diagram showing an example of a signal processing circuit of the same measuring device, and FIG. FIG. 4 is a diagram qualitatively showing the degree of error in the glossiness measurement value with respect to the quality of the flatness, and FIG. 4 is a diagram showing the correction magnification for determining the true value of the glossiness from the characteristics shown in FIG. DESCRIPTION OF SYMBOLS 1... Lamp, 2... Diffusion plate, 3... Condensing lens, 4... Pattern moving unit, 4a... Knife edge pattern, 4b... Sliding table, 4c
...Pulse motor, 4d...Ball screw, 5...
Grid pattern, 6... Projection lens, 7... Pinhole, 8... Photoelectric conversion element, 9... Image sensor, 10... Case, 11... Measurement target surface, 12
...Photoelectric conversion circuit, 13 ... Image sensor drive circuit, 14 ... Switch circuit, 15 ... A/D conversion circuit, 16 ... CPU, 17 ... PIO, 18 ...
ROM, 19...RAM.
Claims (1)
系により測定対象面を介して投影結像させ、ピン
ホールを備え投影像の光強度を光電変換する光電
変換素子を前記結像面に配置し、前記パターンを
その明暗が光軸を横切るように移動させて、明暗
移動に伴う測定対象面による投影像の変化から測
定対象面の光沢度を測定する光沢度測定系と、 明暗が多数繰返される格子パターンをレンズ系
により測定対象面を介して投影結像させ、格子像
の光強度を光電変換するイメージセンサを前記格
子像面に配置し、前記イメージセンサからの格子
像のピツチと基準ピツチとから測定対象面の平坦
度を測定する平坦度測定系と、 前記平坦度の良否に応じて前記光沢度測定値に
補正倍率を乗じ、平坦度測定値と補正された光沢
度測定値とを出力する信号処理系と からなる表面性状測定装置。[Scope of Claims] 1. A pattern having at least one pair of bright and dark patterns is projected and imaged through a surface to be measured using a lens system, and a photoelectric conversion element having a pinhole and photoelectrically converting the light intensity of the projected image is provided on the image forming surface. a glossiness measurement system that measures the glossiness of a surface to be measured from a change in a projected image of the surface to be measured due to the movement of brightness by moving the pattern so that its brightness crosses the optical axis; A repeated grating pattern is projected and imaged through a surface to be measured using a lens system, an image sensor that photoelectrically converts the light intensity of the grating image is placed on the grating image plane, and the pitch and reference of the grating image from the image sensor are a flatness measurement system that measures the flatness of a surface to be measured from the pitch; A surface texture measuring device consisting of a signal processing system that outputs
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7813887A JPS63243711A (en) | 1987-03-31 | 1987-03-31 | Measuring apparatus for property of surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7813887A JPS63243711A (en) | 1987-03-31 | 1987-03-31 | Measuring apparatus for property of surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63243711A JPS63243711A (en) | 1988-10-11 |
| JPH0565082B2 true JPH0565082B2 (en) | 1993-09-17 |
Family
ID=13653518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7813887A Granted JPS63243711A (en) | 1987-03-31 | 1987-03-31 | Measuring apparatus for property of surface |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63243711A (en) |
-
1987
- 1987-03-31 JP JP7813887A patent/JPS63243711A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63243711A (en) | 1988-10-11 |
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