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JPH0565808B2 - - Google Patents
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JPH0565808B2 - - Google Patents

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Publication number
JPH0565808B2
JPH0565808B2 JP59032496A JP3249684A JPH0565808B2 JP H0565808 B2 JPH0565808 B2 JP H0565808B2 JP 59032496 A JP59032496 A JP 59032496A JP 3249684 A JP3249684 A JP 3249684A JP H0565808 B2 JPH0565808 B2 JP H0565808B2
Authority
JP
Japan
Prior art keywords
disk
force
axis
relationship
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59032496A
Other languages
Japanese (ja)
Other versions
JPS60177232A (en
Inventor
Kunitoshi Nishimura
Haruhisa Kawasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP59032496A priority Critical patent/JPS60177232A/en
Publication of JPS60177232A publication Critical patent/JPS60177232A/en
Publication of JPH0565808B2 publication Critical patent/JPH0565808B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/164Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in inductance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/12Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
    • G01L1/122Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using permanent magnets

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明は、小形で安価な多分力検出器に関す
るものである。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a small and inexpensive multi-force detector.

〔従来技術〕[Prior art]

産業用ロボツトのような複雑な構造体におい
て、各関節等が受ける“力”や“モーメント”の
複合力を同時に高精度で検出するための多分力検
出器には、従来、歪ゲージや圧電素子を用いたも
のがあるが、いずれも高価であり、しかも大形で
あるので卓上形ロボツトのような小形のロボツト
には使用できないという欠点があつた。
In complex structures such as industrial robots, multi-force detectors that simultaneously and accurately detect the complex force and moment exerted on each joint have conventionally used strain gauges and piezoelectric elements. However, they are both expensive and large in size, so they cannot be used in small robots such as tabletop robots.

〔発明の概要〕[Summary of the invention]

この発明は、これらの欠点を解決するため、複
数の永久磁石とホール素子を結合させ、両者の相
対位置の変化により各方向に作用する力を検出す
るようにしたものであり、その目的は小形で安価
な多分力検出器を実現することにある。以下この
発明を図面について説明する。
In order to solve these drawbacks, this invention combines a plurality of permanent magnets and Hall elements, and detects the forces acting in each direction by changes in their relative positions.The purpose of this invention is to The objective is to realize an inexpensive multi-force detector. The present invention will be explained below with reference to the drawings.

〔発明の実施例〕[Embodiments of the invention]

第1図はこの発明の一実施例であり、多分力検
出器の外観を示している。この図で、1は筐体
で、円柱状をしており、円柱の軸と同軸上に軸2
が設けられている。なお、この明細書では、第1
図の軸2の軸心方向をz軸、これと直角をなす平
面上の直交方向をx軸、y軸と定義する。軸2は
筐体1に対し、半径方向および円周方向に移動可
能であり、軸2の軸心をz軸とした場合、z軸回
りのモーメントMz、およびx軸方向の力Fx、y
軸方向の力Fyが軸2に作用する場合、それに応
じた出力が信号線3より出力される構造となつて
いる。
FIG. 1 is an embodiment of the present invention, and shows the external appearance of a multi-force detector. In this figure, 1 is the housing, which has a cylindrical shape, and has an axis 2 coaxial with the axis of the cylinder.
is provided. In addition, in this specification, the first
The axial center direction of axis 2 in the figure is defined as the z-axis, and the orthogonal directions on a plane perpendicular to this are defined as the x-axis and the y-axis. The shaft 2 is movable in the radial and circumferential directions with respect to the housing 1, and when the axial center of the shaft 2 is the z-axis, the moment M z around the z-axis and the force F x in the x-axis direction, y
When an axial force F y acts on the shaft 2, a corresponding output is output from the signal line 3.

第2図に第1図の多分力検出器を分解した様子
を示す。軸2には円盤4が固定されており、円盤
4の円周上には等間隔に4個の永久磁石5a,5
b,5c,5d(以下総称するときは単に5とい
う。他の符号についても同様とする)および板ば
ね6a,6b,6c,6dが内側を固着して設け
られている。また、円盤4の上面には摩擦係数の
小さな材料よりなる板、例えば弗素樹脂板7があ
り、上部板8との間をすべり易くしている。円盤
4の外側には円盤4とほぼ同じ厚さをもつリング
9が位置し、板ばね6a〜6dの外側はリング9
の内側に固定され、リング9と円盤4は同心構造
となつている。また、リング9の内側にはホール
素子10a,10b,10c,10dが4個等間
隔に設けられており、永久磁石5a,5b,5
c,5dと対向してそれぞれ組をなしている。リ
ング9の下方には下部板11があり、下部板11
の上面には摩擦係数の小さな材料、例えば弗素樹
脂板12があり、円盤4が下部板11に対しすべ
り易くなつている。
FIG. 2 shows an exploded view of the multi-force detector shown in FIG. 1. A disk 4 is fixed to the shaft 2, and four permanent magnets 5a, 5 are arranged at equal intervals on the circumference of the disk 4.
b, 5c, 5d (hereinafter collectively referred to as 5. The same applies to other symbols) and plate springs 6a, 6b, 6c, 6d are provided with their inner sides fixed. Further, on the upper surface of the disk 4, there is a plate made of a material with a small coefficient of friction, such as a fluororesin plate 7, which makes it easy to slide between it and the upper plate 8. A ring 9 having approximately the same thickness as the disk 4 is located outside the disk 4, and the ring 9 is located outside the leaf springs 6a to 6d.
The ring 9 and the disk 4 have a concentric structure. Furthermore, four Hall elements 10a, 10b, 10c, 10d are provided at equal intervals inside the ring 9, and permanent magnets 5a, 5b, 5
c and 5d, each forming a pair. There is a lower plate 11 below the ring 9.
A material having a small coefficient of friction, for example, a fluororesin plate 12 is disposed on the upper surface of the disc 4, so that the disc 4 can easily slide against the lower plate 11.

上記のように、円盤4は弗素樹脂板7,12を
介して上部板8と下部板11に拘束されており、
z軸回りおよびx、y軸方向のみ運動可能となつ
ている。また、板ばね6a〜6dの作用により、
z軸回りおよびx、y軸方向の力に比例した変位
をするように構成されている。
As mentioned above, the disk 4 is restrained by the upper plate 8 and the lower plate 11 via the fluororesin plates 7 and 12,
It is movable only around the z-axis and in the x- and y-axis directions. In addition, due to the action of the leaf springs 6a to 6d,
It is configured to be displaced in proportion to the force around the z-axis and in the x- and y-axis directions.

第3図はz軸に直角な面での断面図である。永
久磁石5a〜5d、ホール素子10a〜10d、
板ばね6a〜6dの位置関係がより明確に示され
ている。板ばね6a〜6dは、前述のように力に
比例した変位を生ぜしめる役目であり、板ばねに
限ることなく、第4図に示すように円盤4とリン
グ9の間を埋める高分子材料からなる弾性材13
であつてもよい。
FIG. 3 is a cross-sectional view taken in a plane perpendicular to the z-axis. Permanent magnets 5a to 5d, Hall elements 10a to 10d,
The positional relationship of leaf springs 6a to 6d is more clearly shown. The leaf springs 6a to 6d have the role of producing a displacement proportional to the force as described above, and are not limited to leaf springs, but may be made of a polymeric material that fills the space between the disk 4 and the ring 9 as shown in FIG. elastic material 13
It may be.

次に、このような構成により力が検出できる原
理を説明する。
Next, the principle by which force can be detected with such a configuration will be explained.

第5図は永久磁石5とホール素子10を対向さ
せた1組の様子を示している。それぞれの向い合
つた面の中心をA、Bとする時、A点、B点間の
x軸方向の距離をp、y方向の距離をqとする。
永久磁石5をx軸方向にN極、S極となるように
着磁し、ホール素子10を適当な姿勢で対向させ
る時、y軸方向の距離qを一定に保つたまま距離
pを変化させるとホール電圧Vは第6図aの実線
14に示すように変化し、また、距離pを一定に
保つたまま距離qを変化させると第6図bの実線
15に示すように変化することはよく知られてい
る。実線14,15を図に示すように、それぞれ
点線16,17で近似する。点線16は原点にお
ける実線14の接線であり、点線17は実線15
のq=q0における接線である。q=q0は基準とな
る永久磁石5とホール素子10の間隔を意味す
る。
FIG. 5 shows a pair of permanent magnets 5 and Hall elements 10 facing each other. When the centers of the opposing surfaces are A and B, the distance between points A and B in the x-axis direction is p, and the distance in the y direction is q.
When the permanent magnet 5 is magnetized so as to have N pole and S pole in the x-axis direction, and the Hall element 10 is opposed in an appropriate posture, the distance p is changed while keeping the distance q in the y-axis direction constant. The Hall voltage V changes as shown by the solid line 14 in Fig. 6a, and if the distance q is changed while keeping the distance p constant, it changes as shown by the solid line 15 in Fig. 6b. well known. As shown in the figure, the solid lines 14 and 15 are approximated by dotted lines 16 and 17, respectively. Dotted line 16 is a tangent to solid line 14 at the origin, dotted line 17 is tangent to solid line 15
is the tangent at q=q 0 . q=q 0 means the distance between the permanent magnet 5 and the Hall element 10 which serve as a reference.

さて、点線16および17のようにホール電圧
を近似するとホール電圧Vは、 V={d(q0+q)+β}p で表わすことができる。こゝにα、βは定数であ
る。
Now, by approximating the Hall voltage as shown by dotted lines 16 and 17, the Hall voltage V can be expressed as follows: V={d(q 0 +q)+β}p. Here, α and β are constants.

第7図は、第3図または第4図に示す基準の位
置からθ方向にδだけ移動した状態を示したもの
である。
FIG. 7 shows a state in which the reference position shown in FIG. 3 or 4 has been moved by δ in the θ direction.

永久磁石5とホール素子10の対向面における
中心をA1,A2,A3,A4およびB1,B2,B3,B4
とおけば第4図に示す基準位置においては A1点とB1点の関係より p1=0、q1=q0 A2点とB2点の関係より p2=0、q2=q0 A3点とB3点の関係より p3=0、q3=q0 A4点とB4点の関係より p4=0、q4=q0 となつている。p1〜p4は第5図に示すp、q1〜q4
はqに相当している。
The centers of the opposing surfaces of the permanent magnet 5 and the Hall element 10 are A 1 , A 2 , A 3 , A 4 and B 1 , B 2 , B 3 , B 4
Then, at the reference position shown in Figure 4, from the relationship between 1 point A and 1 point B, p 1 = 0, q 1 = q 0 From the relationship between 2 points A and 2 points B, p 2 = 0, q 2 = From the relationship between q 0 A 3 points and B 3 points, p 3 = 0, and q 3 = q 0 From the relationship between A 4 points and B 4 points, p 4 = 0 and q 4 = q 0 . p 1 to p 4 are p and q 1 to q 4 shown in FIG.
is equivalent to q.

同様に第7図のように移動した時には A1とB1の関係より p1=−δcosθ、q1=q0−δsinθ A2とB2の関係より p2=−δsinθ、q2=q0+δcosθ A3とB3の関係より p3=δcosδ、q2=q0+δsinθ A4とB4の関係より p4=δsinθ、q2=q0−δcosθ また、第8図に示すように、θ′だけ回転した場
合は、rを円盤4の半径とすると、 A1とB1の関係より p1=rsinθ′、q1=q0+r(1−cosθ′) A2とB2の関係より p2=rsinθ′、q2=q0+r(1−cosθ′) A3とB3の関係より p3=rsinθ′、q3=q0+r(1−cosθ′) A4とB4の関係より p4=rsinθ′、q4=q0+r(1−cosθ′) となる。よつて、それぞれのホール電圧は第7図
のように変化した場合は V1=−(β+αδsinθ)δcosθ V2=−(β−αδcosθ)δsinθ V3=(β−αδsinθ)δcosθ V4=(β+αδcosθ)δsinθ となり、第8図のように変化した場合は V1′={β−αr(1−cosθ′)}rsinθ′ ×rβθ′ V2′={β−αr(1−cosθ′)}rsinθ′ ×rβθ′ V3′={β−αr(1−cosθ′)}rsinθ′ ×rβθ′ V4′={β−αr(1−cosθ′)}rsinθ′ ×rβθ′ となる。
Similarly, when moving as shown in Figure 7, from the relationship between A 1 and B 1 , p 1 = -δcosθ, q 1 = q 0 -δsinθ From the relationship between A 2 and B 2 , p 2 = -δsinθ, q 2 = q 0 + δcosθ From the relationship between A 3 and B 3 , p 3 = δcosδ, q 2 = q 0 + δsinθ From the relationship between A 4 and B 4 , p 4 = δsinθ, q 2 = q 0 −δcosθ Also, as shown in Figure 8, , θ', and if r is the radius of the disk 4, then from the relationship between A 1 and B 1 , p 1 = rsin θ', q 1 = q 0 + r (1 - cos θ') of A 2 and B 2 . From the relationship p 2 = rsin θ', q 2 = q 0 + r (1-cos θ') From the relationship between A 3 and B 3 , p 3 = rsin θ', q 3 = q 0 + r (1- cos θ') A 4 and B 4 , p 4 = rsin θ', q 4 = q 0 + r (1-cos θ'). Therefore, when each Hall voltage changes as shown in Figure 7, V 1 = - (β + α δ sin θ) δ cos θ V 2 = - (β - α δ cos θ) δ sin θ V 3 = (β - α δ sin θ) δ cos θ V 4 = (β + α δ cos θ ) δsinθ, and when it changes as shown in Figure 8, V 1 ′={β−αr(1−cosθ′)}rsinθ′ ×rβθ′ V 2 ′={β−αr(1−cosθ′)}rsinθ ′ ×rβθ′ V 3 ′={β−αr(1−cosθ′)}rsinθ′×rβθ′ V 4 ′={β−αr(1−cosθ′)}rsinθ′×rβθ′.

両者が混在する場合は和となり、それぞれのホ
ール電圧は、 E1=V1+V1′ E2=V2+V2′ E3=V3+V3′ E4=V4+V4′ で表される。
If both are mixed, the sum is the sum, and the respective Hall voltages are expressed as E 1 = V 1 + V 1 ′ E 2 = V 2 + V 2 ′ E 3 = V 3 + V 3 ′ E 4 = V 4 + V 4 ′ Ru.

さて、これ等の出力を用い、適宜の周知演算手
段により次の演算を行えば、それぞれの方向の変
位を検出できることになる。
Now, by using these outputs and performing the following calculations using appropriate well-known calculation means, displacement in each direction can be detected.

回転方向 Er=E1+E2+E3+E4=4rβθ′ y軸方向 Ey=E4−E2=2βδsinθ x軸方向 Ex=E3−E1=2βδcosθ すなわち、 θ′=Er/4rβ δ=1/2β√22 θ=tan-1Ex/Ey によりそれぞれの変位を検出できる。また、変位
はその方向に作用する力に比例するので、結局力
の大きさ、方向を検出できることになる。
Rotation direction E r =E 1 + E 2 +E 3 +E 4 =4rβθ′ Y-axis direction E y =E 4 −E 2 = 2βδsinθ Each displacement can be detected by 4rβ δ=1/2β√ 2 + 2 θ=tan -1 E x /E y . Furthermore, since the displacement is proportional to the force acting in that direction, the magnitude and direction of the force can be detected.

第9図はこの発明のさらに他の実施例を示すも
ので、永久磁石5とホール素子10とがずれて対
向している場合である。この実施例でも円盤4の
外周とリング9の内周との間に永久磁石5とホー
ル素子10が対向して配置されていることに変り
はない。
FIG. 9 shows still another embodiment of the present invention, in which the permanent magnet 5 and the Hall element 10 are offset and face each other. In this embodiment as well, the permanent magnet 5 and the Hall element 10 are disposed facing each other between the outer periphery of the disk 4 and the inner periphery of the ring 9.

なお、以上の説明ではリング9に永久磁石5
を、円盤4にホール素子10を配置した場合で説
明したが、逆の配置でもよいことはその原理より
みて明らかである。また、上記実施例では円盤4
とリング9を用いたが、円盤4に限らず他の形状
のものでもよく、一般的には盤体であればよい。
また、同様にリング9も他の形状のものでよく、
環状体であればよい。さらに、永久磁石5とホー
ル素子10との組は必ずしも等間隔である必要は
なく、不等間隔でも補正を加えればよい。
In addition, in the above explanation, the permanent magnet 5 is attached to the ring 9.
Although the case where the Hall element 10 is arranged on the disk 4 has been described, it is clear from the principle that the opposite arrangement is also possible. In addition, in the above embodiment, the disk 4
Although the ring 9 is used, it is not limited to the disk 4, but other shapes may be used, and in general, a disk body is sufficient.
Similarly, the ring 9 may also have other shapes.
Any cyclic body is sufficient. Furthermore, the pairs of permanent magnets 5 and Hall elements 10 do not necessarily have to be spaced at equal intervals, and may be corrected even if they are spaced at unequal intervals.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、この発明は盤体を環状体
の中に同心となるように力に比例した変位を生ず
る弾性体で支持し、盤体の外周と環状体の内周と
の間にホール素子と永久磁石を組合せたものを複
数組設け、両者の相対位置の変化から多方向に作
用する力を同時に検出できるようにしたので、安
価で、しかも小形な多分力検出器が実現できる利
点がある。
As explained above, the present invention supports a disc body concentrically within an annular body with an elastic body that generates a displacement proportional to force, and has a hole between the outer periphery of the disc body and the inner periphery of the annular body. By installing multiple sets of elements and permanent magnets, it is possible to simultaneously detect forces acting in multiple directions based on changes in the relative positions of the two, which has the advantage of creating an inexpensive and compact multi-force detector. be.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例の外観斜視図、第
2図はその内部の構成を示す分解状態の斜視図、
第3図は第1図の断面図、第4図はこの発明の他
の実施例を示す断面図、第5図はホール素子と永
久磁石の位置関係を示す図、第6図a,bはホー
ル電圧の出力特性をそれぞれ示す図、第7図、第
8図はリング状態と円盤の相対変位を示す図、第
9図はこの発明のさらに他の実施例を示す断面図
である。 図中、1は筐体、2は軸、3は信号線、4は円
盤、5は永久磁石、6は板ばね、7は弗素樹脂
板、8は上部板、9はリング、10はホール素
子、11は下部板、12は弗素樹脂板、13は弾
性体、14,15はホール電圧の特性を示す実
線、16,17はホール電圧の特性を近似する点
線である。
FIG. 1 is an external perspective view of an embodiment of the present invention, and FIG. 2 is an exploded perspective view showing the internal configuration.
FIG. 3 is a sectional view of FIG. 1, FIG. 4 is a sectional view showing another embodiment of the invention, FIG. 5 is a diagram showing the positional relationship between the Hall element and the permanent magnet, and FIGS. 6 a and b are FIGS. 7 and 8 are diagrams showing the output characteristics of the Hall voltage, respectively. FIGS. 7 and 8 are diagrams showing the ring state and the relative displacement of the disk, and FIG. 9 is a sectional view showing still another embodiment of the present invention. In the figure, 1 is a housing, 2 is a shaft, 3 is a signal line, 4 is a disk, 5 is a permanent magnet, 6 is a leaf spring, 7 is a fluororesin plate, 8 is an upper plate, 9 is a ring, and 10 is a Hall element , 11 is a lower plate, 12 is a fluororesin plate, 13 is an elastic body, 14 and 15 are solid lines showing the characteristics of the Hall voltage, and 16 and 17 are dotted lines approximating the characteristics of the Hall voltage.

Claims (1)

【特許請求の範囲】[Claims] 1 盤体を環状体の中に同心となるように力に比
例した変位を生ずる弾性体でz軸のまわりとx
軸、y軸方向に変位可能に支持するとともに、前
記盤体の外周と前記環状体の内周との間に永久磁
石およびホール素子をそれぞれ対向するように複
数組配置したことを特徴とする多分力検出器。
1 An elastic body that produces a displacement proportional to the force so that the disc is concentric with the annular body.
The magnet is supported so as to be displaceable in the axial and y-axis directions, and a plurality of sets of permanent magnets and Hall elements are arranged between the outer periphery of the disk body and the inner periphery of the annular body so as to face each other. force detector.
JP59032496A 1984-02-24 1984-02-24 Multiple force component detector Granted JPS60177232A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59032496A JPS60177232A (en) 1984-02-24 1984-02-24 Multiple force component detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59032496A JPS60177232A (en) 1984-02-24 1984-02-24 Multiple force component detector

Publications (2)

Publication Number Publication Date
JPS60177232A JPS60177232A (en) 1985-09-11
JPH0565808B2 true JPH0565808B2 (en) 1993-09-20

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP59032496A Granted JPS60177232A (en) 1984-02-24 1984-02-24 Multiple force component detector

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JP (1) JPS60177232A (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007009389A1 (en) * 2007-02-20 2008-08-21 Bizerba Gmbh & Co. Kg Force measuring device and method for signal evaluation
EP2513620B1 (en) * 2009-12-15 2020-05-13 Canon Kabushiki Kaisha Magnetic force sensor
JP4963134B2 (en) * 2010-11-25 2012-06-27 株式会社トライフォース・マネジメント Torque sensor
US8966996B2 (en) 2011-07-27 2015-03-03 Tri-Force Management Corporation Force sensor
JP5735882B2 (en) * 2011-08-02 2015-06-17 Ntn株式会社 Magnetic load sensor
US11287340B2 (en) 2018-07-02 2022-03-29 Flexiv Ltd. Multi-axis force and torque sensor and robot having the same
CN114144648A (en) * 2019-07-10 2022-03-04 三菱电机株式会社 Sensing device and sensing device system
CN110987244B (en) * 2019-10-08 2021-01-29 珠海格力电器股份有限公司 Flat disc type six-dimensional force sensor, detection method and intelligent equipment
JP7021174B2 (en) * 2019-11-28 2022-02-16 ファナック株式会社 Displacement detection type force detection structure and force sensor
US12042929B2 (en) 2021-06-17 2024-07-23 Shanghai Flexiv Robotics Technology Co., Ltd. Sensing assembly, force and torque sensor assembly, robot joint and robot

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