JPH0566014B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention provides a method for placing each chip separated from a semiconductor wafer at a predetermined position on a lead frame in a predetermined direction in a semiconductor device manufacturing process. Used in devices to position and align chips.

B. Prior Art In the manufacturing process of semiconductor devices, semiconductor elements formed on a semiconductor wafer are separated into pellets and made into chips. After being made into chips, each chip is placed at a predetermined position on a lead frame. The pellet is then mounted.

In this way, when each chip is mounted on a lead frame, for example, conventionally,
After positioning the chips 2 by placing them in the positioning base 1 whose inner surface is approximately in the shape of a truncated inverted pyramid as shown in Figure c, each chip 2 is suctioned by a suction head and placed on the lead frame one after another. I'll leave it there. The positioning table 1 is replaced for each type of chip 2, and in order to change the direction of the chip 2 and control its posture, the positioning table 1 must be freely rotated through 360 degrees. Conventionally, such a positioning table 1 is formed into one piece by hardening and precision polishing individual parts and then combining them.

However, polishing of such individual parts is micrometer
Processing is difficult because unit accuracy is required, and as a result, manufacturing the positioning table 1 is time-consuming and expensive, and there are several positioning tables 1 of different dimensions for each type of chip 2. This requires manufacturing, which causes an increase in costs. Furthermore, even if chips 2 are of the same type, their dimensions may vary in micrometers, and they may not match the storage dimensions of the corresponding positioning table 1, resulting in inaccurate positioning or chip 2 not being inserted. There are things to do.

C. Object of the Invention The object of the present invention is to process chips of all types using one device, in which, after cutting a semiconductor wafer into chips, each chip is positioned, controlled in posture, and placed on a lead frame. The system performs positioning and attitude control.

D. Structure of the Invention The chip orienter according to the present invention includes a rotating block rotatably supported on a support, and a chip mounting table attached to the rotating block and rotatable together with the rotating block with respect to the support. and four T-shaped levers rotatably supported on a rotating block and provided with first, second, and third arms;
It is attached to the rotating block via a spring so that it can be opened and closed on the mounting table, and a second arm of the lever faces a part of the chip, and the chip is pressed and positioned on the mounting table from all sides by the biasing force of the spring. the first one to rotate the lever.
a reciprocating mechanism provided on the rotary block facing the third arm of the lever; four micrometer heads supported on the rotary block facing the third arm of the lever; and a reciprocating mechanism provided integrally with the support body. and a rotary positioning mechanism connected to a rotary block to control the attitude of the chips on the chip mounting table by rotating the rotary block until it faces in a predetermined direction; The reciprocating mechanism is provided corresponding to the four claws so as to rotate around the intersection of the arms, and the reciprocating mechanism presses and rotates the first arm of the four levers, and the second arm rotates the lever. 4 above against the biasing force of the spring.
The reciprocating mechanism causes the micrometer head to release the first arm of the lever from the pressed state and press the second arm with the biasing force of the spring. The third arm of the lever rotated in the opposite direction also comes into contact with the lever, thereby setting the position where the claw closes.

Embodiment An embodiment of the present invention is shown below in Figs. 2, 3,
The explanation will start from the tip orienter 3 shown in FIG. 4. In the figure, 4, 4, . . . are four claws that press and position the chips placed on the chip mounting table 5 from all sides, and four guides 7, 7, . . . are attached to the rotating block 6. The four claws 4, 4... move at once in the direction of the chip mounting table 5, for example in the A direction, and in the direction opposite to the chip mounting table 5, for example in the A' direction, opening and closing on the chip mounting table 5. do. Compression springs 8, 8... are fitted into the four guides 7, 7..., and claws 4, 4...
are pressed in the 5 directions of the chip mounting table. or,
The chip mounting table 5 is attached to four support brackets 9, 9, . . . fixed to the rotating block 6, and rotates together with the rotating block 6. The rotating block 6 is mounted on the support 10 with bearings 11 and 1.
1..., and is further connected to a pulse motor 13 via a pelofram coupling 12, and rotates with each step.
The rotational speed of the pulse motor 13 is measured by the number of pulses generated, and the starting point of rotation is determined by the rotary encoder 14 and photointerrupter 15. Next, 16 is a reciprocating mechanism provided on the rotating block 6, and is, for example, a piston mechanism fitted into a recess formed in the center of the rotating block 6. That is, a compression spring 17 is attached around the piston mechanism 16, and the compression spring 17 is locked to the piston mechanism 16 and the rotating block 6, so that when the piston mechanism 16 is driven upward, compression spring 17
is compressed, and in response to the elastic expansion force of the compression spring 17, the piston mechanism 16 is lowered. The upward driving force of the piston mechanism 16 is provided by air. That is, from a hole 18 that communicates with the bottom 6' of the recess at the center of the rotating block 6 into which the piston mechanism 16 is inserted and that passes through the rotating block 6, and a hole 19 that passes through the support 10. Air is pumped in, and the pressure causes the piston mechanism 16 to move upward. Here, since the hole 18 rotates together with the rotating block 6, an annular air passage hole 20 is formed in the support body 10 over the entire circumference of the rotating block 6, so that the hole 18 rotates,
Even if it is not on the same straight line as the hole 19, the air sent into the hole 19 once passes through the annular air passage hole 20, enters the hole 18, and reaches the bottom 6' of the recess in the center of the rotating block 6. It is fed in and drives the piston mechanism 16 upward.

Reference numeral 21 denotes a lever in which a first arm 21a, a second arm 21b, and a third arm 21e form a substantially T-shape, and the first, second, and third arms 21a,
It is pivotally supported by the support bracket 9 so as to be rotatable about the intersection of 21b and 21c, and is provided on each of the four claws 4, 4.... Furthermore, each first arm 21 of the four T-shaped levers 21, 21...
a, 21a... face the piston mechanism 16, and each second arm 21b, 21b... faces each locking end of the four claws 4, 4.... Therefore, the piston mechanism 1
6 is driven upward, the four first arms 21
In order to push up a, 21a... at once, four T
The letter-shaped levers 21, 21... are also rotated at once in the direction away from the chip mounting table 5, for example, in the direction B in FIG. 2, and the four second arms 21b, 21b... against the four claws 4,
4... at once to open them on the chip mounting table 5. At this time, a stopper 2 is placed above the piston mechanism 16 as shown in FIGS. 5 and 3.
3 is provided, and by coming into contact with this when the piston mechanism 16 rises, the rising position of the piston mechanism 16 is regulated. That is, as shown in FIG. 5, this stopper 23 is pivotally supported by a support frame 24 fixed to the rotating block 6, and a screw 25 that abuts the support frame 24 is screwed into the end. By moving the screws 25 in and out, the stopper 23 is raised or lowered, and its vertical position is set. Then, when the compressed air is removed by switching the solenoid valve, the piston mechanism 16 is lowered by the compression spring 17, and when it is separated from each first arm 21a, 21a..., the compression springs 8, 8... within the guides 7, 7... moves each of the four claws in the five directions of the chip mounting table, for example, as shown in Figure 2.
Press in direction A' to close it on the chip mounting table 5.

That is, by rotating the four T-shaped levers 21, 21, . . . in accordance with the reciprocating motion of the piston mechanism 16, the four claws 4, 4, . And the T-shaped lever 21,
The four third arms 21c, 21c... of 21... are
It faces four micrometer heads 22, 22... supported by the rotating block 6, and
The claws 4, 4... press the respective second arms 21b, 21b... in the direction of the chip mounting table 5, that is, in the closing direction, by the compression springs 8, 8..., and the four T
The letter-shaped levers 21, 21... are in the same direction, for example, the fourth
When rotated in direction B' in the figure, each third arm 21c,
21c... for each of the four micrometer heads 2
2, 22..., and determines the closing position of the four claws 4, 4.... Here, once the closing position of the claws 4, 4... set by the micrometer heads 22, 22... is determined, the position is determined by the four setscrews 33, 33... as shown in FIG. It will be fixed.

Next, the support 1 supporting the rotating block 6
0 is held by a vertical movement block 26 and attached to a frame 27 fixed to the main body of the pulse motor 13. and pulse motor 1
3 and the vertically movable block 26 are supported by guides 28 and 29 that are vertically installed on the base, and the convex portion 26' of the vertically movable block 26 abuts against the micrometer head 30 that is pivotally supported by the guide 29. The height of the vertical movement block 26 is adjusted by the micrometer head 30. At this time,
Support body 1 held by vertical movement block 26
0 and the height of the pulse motor 13 body are also adjusted. Further, as shown in FIGS. 2, 3, and 4, two arms 10', 10' are formed protruding from the support body 10, and the two arms 10' are opposed to each other.
Micrometer head 3 is installed horizontally at 0' and 10'.
1 and the compression spring 32 are in contact with each other. That is, the micrometer head 31 and compression spring 32 finely adjust the relative position of the support 10 with respect to the rotation axis of the pulse motor 13. Therefore, if the position at which the rotating block 6 should be stopped is an intermediate position of the pulse motor 13 rotating in steps, the main body of the pulse motor 13 relative to the rotating block 6 can be rotated by a predetermined amount by adjusting the micrometer head 31. It can be adjusted. Based on the above configuration, the operation of the chip orienter 3 according to the present invention is as follows. That is, first, when air is sent through the hole 19, the air passage hole 20, and the hole 18, the piston mechanism 16
4 to the stop position regulated by the stopper 23.
Each first arm 2 of T-shaped levers 21, 21...
While pressing 1a, 21a..., rise and
Arms 21b, 21b... provide four claws 4, 4.
... against the urging force of compression springs 8, 8...,
It is opened on the chip mounting table 5. Next, the chip 2 is placed on the chip mounting table 5, and at this time, chips 2 of any size can be placed on the chip placing table 5. Then, when the supply of air is stopped, the piston mechanism 16 is lowered by the urging force of the compression spring 17, and each of the first arms 21a, 21a
The compression springs 8, 8... in the guides 7, 7... press the four claws 4, 4... at once, and the four claws 4, 4... move away from the chip mounting base. 5 to position the tip 2. At this time, the closing positions of the four claws 4, 4... are the positions of the respective third arms 21 of the four T-shaped levers 21, 21...
It is set by four micrometer heads 22, 22, . and,
In order to control the attitude of the chip 2, the pulse motor 13 is rotated until the rotary block 6 connected to its rotating shaft and the chip mounting table 5 attached to the rotary block 6 are oriented in a predetermined direction. Just let it happen.

In this way, the chip 2 is positioned on the chip mounting table 5 by the four claws 4, 4, . . . and its posture is controlled by the rotating block 6. Then, the chip 2 may be suctioned by the suction head.

F. Effects of the Invention According to the present invention, in the process of positioning and aligning chips in order to place each chip separated from a semiconductor wafer on a lead frame,
Since the chips are positioned on the chip mounting table by opening and closing the four claws, it is possible to position chips of any size with one device. Moreover, the opening and closing of the four claws is driven by air,
Since no electric drive such as a motor or solenoid is required, there is no need for a mechanism for supplying energy such as a brush, and the device becomes compact. Furthermore, since the four claws and the chip mounting table are attached to the rotating block so that they can freely rotate and stop through 360 degrees, the posture of the chips on the chip mounting table can be freely controlled.

[Brief explanation of the drawing]

FIG. 1a is a perspective view of a conventional chip positioning stand;
Figure 1b is a sectional view thereof, Figure 1c is a plan view thereof,
Fig. 2 is a sectional side view of the main part of the tip orienter according to the present invention, Fig. 3 is a plan view thereof, Fig. 4 is a front view thereof, and Fig. 5 is a main part of the stopper of the tip orienter according to the invention. FIG. 2...Tip, 3...Chip orienter, 4...
Claw, 5... Chip mounting table, 6... Rotating block, 7...
Guide, 8... Spring, 10... Support, 13...
Pulse motor, 16... Reciprocating mechanism, 21... Lever, 21a... First arm, 21b... Second arm, 21c... Third arm, 22... Micrometer head.

Claims (1)

[Claims] 1. A rotating block rotatably supported on a support, a chip mounting table attached to the rotating block and rotatable together with the rotating block relative to the support, and a chip mounting table rotatably supported on the rotating block. ,
There are four T-shaped levers each having a first, second, and third arm, and the second arm of the lever is attached to a rotating block via a spring so as to be openable and closable on the mounting table. , four claws that press and position the chip from all sides on the mounting table by the biasing force of a spring, and a reciprocating mechanism provided on the rotary block facing the first arm of the lever so as to rotate the lever. a moving mechanism, four micrometer heads supported on the rotating block so as to face the third arm of the lever, and a micrometer head provided integrally with the support body and connected to the rotating block to move the rotating block in a predetermined direction. a rotational positioning mechanism that controls the attitude of the chip on the chip mounting table by rotating the chip until the chip faces toward the
The reciprocating mechanism presses and rotates the first arm of the four levers, and the reciprocating mechanism rotates the first arm of the four levers, and the reciprocating mechanism rotates the first arm of the four levers, The second arm opens the four claws in all directions against the biasing force of the spring, and the micrometer head releases the pressed state of the first arm of the lever by the reciprocating mechanism.
A tip orienter characterized in that the third arm of the lever rotated in the opposite direction comes into contact with the second arm by pressing the second arm with the biasing force of a spring, thereby setting the position where the claw closes.