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JPH0566034B2 - - Google Patents
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JPH0566034B2 - - Google Patents

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Publication number
JPH0566034B2
JPH0566034B2 JP2314662A JP31466290A JPH0566034B2 JP H0566034 B2 JPH0566034 B2 JP H0566034B2 JP 2314662 A JP2314662 A JP 2314662A JP 31466290 A JP31466290 A JP 31466290A JP H0566034 B2 JPH0566034 B2 JP H0566034B2
Authority
JP
Japan
Prior art keywords
squid
coil
metal layer
input
magnetically coupled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2314662A
Other languages
Japanese (ja)
Other versions
JPH04184983A (en
Inventor
Akira Kamishiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP2314662A priority Critical patent/JPH04184983A/en
Publication of JPH04184983A publication Critical patent/JPH04184983A/en
Publication of JPH0566034B2 publication Critical patent/JPH0566034B2/ja
Granted legal-status Critical Current

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  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) この発明は、入力信号を超伝導量子干渉素子
(以下、SQUIDと記す)へ磁気的に結合するため
の入力コイルを備えた磁気結合型超伝導量子干渉
素子(以下、磁気結合型SQUIDと記す)に関す
るものである。
Detailed Description of the Invention (Field of Industrial Application) This invention relates to a magnetically coupled superconductor equipped with an input coil for magnetically coupling an input signal to a superconducting quantum interference device (hereinafter referred to as SQUID). This relates to conduction quantum interference devices (hereinafter referred to as magnetically coupled SQUIDs).

(従来の技術) 従来、この種の素子としては第2図に示すもの
が知られているが、同図に示すようにこれらの素
子では、その中枢部であるジヨセフソン素子1と
電気的に接続された幅広い厚み0.3μm程度の超伝
導薄膜で作製されたSQUIDコイル2と、信号電
流の流れる同じく幅広い厚み0.3μm程度の超伝導
薄膜で作製された入力コイル3とが絶縁層を介し
て積層する構造が採用され、これにより約100PH
(ピコヘンリー)のインダクタンス値しか持たな
いSQIDコイル2と約10nH(ナノヘンリー)もの
インダクタンス値を持つ入力コイル3とを効率良
く磁気的に結合することができ、このため磁気結
合型SQUIDは、入力感度を高める利点を有して
いた。
(Prior Art) Conventionally, as this type of element, the one shown in Fig. 2 is known. A SQUID coil 2 made of a superconducting thin film with a thickness of about 0.3 μm over a wide range, and an input coil 3 made of a superconducting thin film with a thickness of about 0.3 μm over a wide range, through which a signal current flows, are stacked with an insulating layer in between. structure is adopted, which allows approximately 100PH
It is possible to efficiently magnetically couple the SQID coil 2, which has an inductance value of only about 10 nH (nano-Henry), with the input coil 3, which has an inductance value of about 10 nH (nano-Henry). It had the advantage of increasing sensitivity.

(発明が解決しようとする問題点) しかしながら、上記従来の磁気結合型SQUID
においては、以下に説明するような重大な問題点
を有している。
(Problem to be solved by the invention) However, the above conventional magnetically coupled SQUID
However, there are serious problems as explained below.

即ち、SQUIDに加えられる信号電流の周波数
は通常100KHz(キロヘルツ)以下の低周波の電
流であるが、従来磁気結合型SQUIDには20μV程
度の駆動電圧(V)が印加されており、このため第2
図に示したジヨセフソン素子1からf=V/Φ0
(Φ0は磁束量子)で表わされる周波数fの交流電
流がSQUIDコイル2へ流れ込む。この場合、Φ0
=2×10-15Wb(ウエーバ)とすると、SQUIDコ
イル2へはf=10GHz(ギガヘルツ)程度の高周
波電流が流れ込むことになる。
In other words, the frequency of the signal current applied to the SQUID is usually a low-frequency current of 100KHz (kilohertz) or less, but a drive voltage (V) of about 20 μV is applied to conventional magnetically coupled SQUIDs, so 2
From Josephson element 1 shown in the figure, f=V/Φ 0
An alternating current with a frequency f expressed as (Φ 0 is a magnetic flux quantum) flows into the SQUID coil 2. In this case, Φ 0
=2×10 -15 Wb (Waver), a high frequency current of approximately f=10 GHz (gigahertz) flows into the SQUID coil 2.

このような高周波電流に対しては、第2図に示
す入力コイル3とSQUIDコイル2の積層構造は
電力損失の非常に少ない共振器として動作し、そ
のため入力コイル3とSQUIDコイル2とからな
る共振器内を周波数約10GHzの電磁波がほぼ無損
失で通過すると、共振器内部に周波数約10GHzの
定在波が立つことになる。
For such high-frequency currents, the stacked structure of the input coil 3 and SQUID coil 2 shown in Fig. 2 operates as a resonator with very low power loss, and therefore the resonance consisting of the input coil 3 and SQUID coil 2 When an electromagnetic wave with a frequency of about 10 GHz passes through the cavity with almost no loss, a standing wave with a frequency of about 10 GHz will be created inside the resonator.

このため、ジヨセフソン素子1からSQUIDコ
イル2側を見たインピーダンスが定在波の周波数
周辺で、ほぼ0Ωから無限大の値まで大きく変動
する結果となる。
For this reason, the impedance seen from the Josephson element 1 to the SQUID coil 2 side greatly fluctuates from approximately 0Ω to an infinite value around the frequency of the standing wave.

このことは、SQUIDの内部状態が動作電圧V
に大きく依存することを意味し、本来なら第3図
aに示すようにスムーズな入出力特性となるべき
ところが第3図bに示すような歪を生じ、
SQUIDの不安定動作の原因となつていた。
This means that the internal state of the SQUID is at the operating voltage V
This means that the input/output characteristics that should normally be smooth as shown in Figure 3a result in distortion as shown in Figure 3b.
This was causing unstable operation of the SQUID.

(問題点を解決するための手段) 以上の問題点を解決するため、この発明では入
力コイルとSQUIDコイルとの間に、両者と電気
(直流)的に絶縁された常伝導金属層を介在させ
た磁気結合型SQUIDを提案するものである。
(Means for Solving the Problems) In order to solve the above problems, the present invention interposes a normal conductive metal layer between the input coil and the SQUID coil, which is electrically (direct current) insulated from both. This paper proposes a magnetically coupled SQUID.

(作用) 上述のように、従来のSQUIDの不安定動作の
原因となるインピーダンスの大きな変動は、
20μV程度の動作電圧に対して入力コイルと
SQUIDコイルとからなる共振器内を約10GHzの
周波数の電磁波がほぼ無損失で通過した結果、共
振器内部に定在波が立つために生ずるものであつ
たが、この発明のように入力コイルとSQUIDコ
イルとの間に常伝導金属層を介在させると、共振
器内を通過する電磁波が常伝導金属層内にうず電
流を誘起し、電磁波のエネルギーの一部が常伝導
金属層の抵抗によつて発生するジユール損失に変
換される。その結果定在波が立ちにくくなり、イ
ンピーダンスの変動は小さく抑えられる。
(Function) As mentioned above, large fluctuations in impedance, which cause unstable operation of conventional SQUIDs,
The input coil and
This was caused by standing waves being created inside the resonator as a result of electromagnetic waves with a frequency of approximately 10 GHz passing through the resonator consisting of the SQUID coil with almost no loss. When a normal metal layer is interposed between the SQUID coil and the electromagnetic wave passing through the resonator, an eddy current is induced in the normal metal layer, and part of the energy of the electromagnetic wave is absorbed by the resistance of the normal metal layer. This is converted into a joule loss. As a result, standing waves are less likely to arise, and impedance fluctuations are kept small.

一方、SQUIDに加えられる信号電流の周波数
は通常100KHz(キロヘルツ)以下であり、この
ような低周波数の電流に対しては常伝導金属層は
何等作用しない。即ち、常伝導金属層は入力信号
とSQUIDとの磁気結合を何等妨げるものではな
い。
On the other hand, the frequency of the signal current applied to the SQUID is usually below 100 KHz (kilohertz), and the normal metal layer has no effect on such low-frequency current. That is, the normal metal layer does not interfere with the magnetic coupling between the input signal and the SQUID.

なお、この発明で入力コイルとSQUIDコイル
との間に介在させる常伝導金属層はその厚みが厚
くなると、磁気結合効率が悪くなり、且つ薄膜化
された入力コイルに対して剥れ易くなる等の理由
から例えば1μm以下の厚みに薄膜化することが好
ましい。このように容易に薄膜化でき、且つ上述
のように10GHz程度の電磁波に対して損失効果の
大きな常伝導金属の材料としては、金、銀、銅、
アルミニウム等を挙げることができる。これは次
の理由によるものである。
In addition, when the normal conductive metal layer interposed between the input coil and the SQUID coil in this invention becomes thicker, the magnetic coupling efficiency deteriorates, and the thinner input coil tends to peel off, etc. For this reason, it is preferable to reduce the thickness to, for example, 1 μm or less. Examples of normal metal materials that can be easily made into thin films and have a large loss effect against electromagnetic waves of about 10 GHz as mentioned above include gold, silver, copper,
Aluminum etc. can be mentioned. This is due to the following reason.

即ち、常伝導金属表面に電磁波が照射された場
合、電磁波は表面からδ(表皮深さ)まで侵入す
る。この表皮深さδと常伝導金属の抵抗率ρとの
間には次の関係がある。
That is, when the surface of a normal metal is irradiated with electromagnetic waves, the electromagnetic waves penetrate from the surface to δ (skin depth). The following relationship exists between the skin depth δ and the resistivity ρ of the normal conducting metal.

δ=[ρ/(π×μ0×f)]1/2 …(1) 但し、式中μ0は透磁率で、μ0=4π×10-7H/m 即ち、ρが小さい材料に対してはδも小さい。
一方、常伝導金属層による電磁波の損失効果は、
常伝導層の厚みtがδと同程度になつたところで
最大となる。
δ=[ρ/(π×μ 0 ×f)] 1/2 …(1) However, in the formula, μ 0 is magnetic permeability, and μ 0 =4π×10 -7 H/m.In other words, for materials with small ρ δ is also small.
On the other hand, the electromagnetic wave loss effect due to the normal metal layer is
The maximum value is reached when the thickness t of the normal conductive layer becomes approximately the same as δ.

そこで、上述のt<1μmからf=10GHzに対し
て、δ<1μmとなるような常伝導金属の抵抗率ρ
を(1)の関係式から求めると、ρ<4×10-8Ω・m
となるが、SQUIDの動作温度[Nbを材料とする
SQUIDでは通常4.2K]で、上述のような低い抵
抗率の値を有し、容易に薄膜化できる材料として
は金、銀、銅、アルミニウムを挙げることができ
る。
Therefore, for the above-mentioned t < 1 μm and f = 10 GHz, the resistivity ρ of the normal conductive metal such that δ < 1 μm
is obtained from the relational expression (1), ρ<4×10 -8 Ω・m
However, the operating temperature of SQUID [when Nb is used as material]
For SQUIDs, the resistivity is usually 4.2K], and examples of materials that have the above-mentioned low resistivity values and can be easily made into thin films include gold, silver, copper, and aluminum.

(実施例) 以下、この発明を図示の実施例に基づいて具体
的に説明する。
(Examples) Hereinafter, the present invention will be specifically described based on illustrated examples.

第1図は、この発明の一実施例を示すもので、
1はジヨセフソン素子、2はジヨセフソン素子1
と電気的に接続された幅広い厚み0.3μm程度の超
伝導薄膜で作製されたSQUIDコイル、3は同じ
く幅広い厚み0.3μm程度の超伝導薄膜で作製され
た入力コイルであり、SQUIDコイル2と入力コ
イル3との間には厚み1μm以下の幅広い常伝導金
属層4を介在させる。
FIG. 1 shows an embodiment of this invention.
1 is a Josephson element, 2 is a Josephson element 1
SQUID coil 3 is made of a superconducting thin film with a wide range of thickness of about 0.3 μm and is electrically connected to SQUID coil 2. A wide normal conductive metal layer 4 having a thickness of 1 μm or less is interposed between the metal layer 3 and the metal layer 3 .

このような磁気結合型SQUIDに対して動作電
圧20μVを印加するとともに、入力コイル3には
100KHz以下の信号電流を流したところ、SQUID
は正常動作を示す入出力特性が得られた。
An operating voltage of 20 μV is applied to such a magnetically coupled SQUID, and the input coil 3 is
When a signal current of 100KHz or less was applied, the SQUID
Input/output characteristics indicating normal operation were obtained.

(発明の効果) 以上要するに、この発明によれば従来不可能で
あつた磁気結合型SQUIDの不安定動作を入力信
号とSQUIDとの磁気結合を何等妨げることなく
改善ができる。
(Effects of the Invention) In summary, according to the present invention, the unstable operation of a magnetically coupled SQUID, which was previously impossible, can be improved without interfering with the magnetic coupling between the input signal and the SQUID.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、この発明の一実施例を示す磁気結合
型SQUIDの分解斜視図、第2図は従来の磁気結
合型SQUIDの分解斜視図、第3図は磁気結合型
SQUIDの入出力特性図であり、第3図aは共振
が起こらずに正常な動作をする場合の入出力特性
図、第3図bは共振が起こつた場合の入出力特性
図である。 図中、1はジヨセフソン素子、2はSQUIDコ
イル、3は入力コイル、4は常伝導金属層。
Fig. 1 is an exploded perspective view of a magnetically coupled SQUID showing an embodiment of the present invention, Fig. 2 is an exploded perspective view of a conventional magnetically coupled SQUID, and Fig. 3 is a magnetically coupled SQUID.
These are input/output characteristic diagrams of the SQUID; FIG. 3a is an input/output characteristic diagram when normal operation occurs without resonance, and FIG. 3b is an input/output characteristic diagram when resonance occurs. In the figure, 1 is a Josephson element, 2 is a SQUID coil, 3 is an input coil, and 4 is a normal conductive metal layer.

Claims (1)

【特許請求の範囲】 1 超伝導量子干渉素子コイルと入力コイルとの
間に両者と電気(直流)的に絶縁された常伝導金
属層を介在させたことを特徴とする磁気結合型超
伝導量子干渉素子。 2 常伝導金属層として金、銀、銅、アルミニウ
ムの薄膜を使用する特許請求の範囲第1項記載の
磁気結合型超伝導量子干渉素子。
[Claims] 1. A magnetically coupled superconducting quantum device characterized by interposing a normal conducting metal layer electrically (direct current) insulated between the superconducting quantum interference element coil and the input coil. interference element. 2. The magnetically coupled superconducting quantum interference device according to claim 1, wherein a thin film of gold, silver, copper, or aluminum is used as the normal conducting metal layer.
JP2314662A 1990-11-20 1990-11-20 Magnetic coupling type superconducting quantum interference device Granted JPH04184983A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2314662A JPH04184983A (en) 1990-11-20 1990-11-20 Magnetic coupling type superconducting quantum interference device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2314662A JPH04184983A (en) 1990-11-20 1990-11-20 Magnetic coupling type superconducting quantum interference device

Publications (2)

Publication Number Publication Date
JPH04184983A JPH04184983A (en) 1992-07-01
JPH0566034B2 true JPH0566034B2 (en) 1993-09-20

Family

ID=18056032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2314662A Granted JPH04184983A (en) 1990-11-20 1990-11-20 Magnetic coupling type superconducting quantum interference device

Country Status (1)

Country Link
JP (1) JPH04184983A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5338943A (en) * 1993-09-01 1994-08-16 The United States Of America As Represented By The Secretary Of The Army Magnetic flux-enhanced control line for superconducting flux flow transistor
CN105277109B (en) * 2015-09-02 2017-01-25 西南交通大学 A Displacement Sensor with Digital Frequency Output
US11929197B2 (en) * 2021-11-08 2024-03-12 Honeywell Federal Manufacturing & Technologies, Llc Geometrically stable nanohenry inductor

Also Published As

Publication number Publication date
JPH04184983A (en) 1992-07-01

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