JPH0569164B2 - - Google Patents
Info
- Publication number
- JPH0569164B2 JPH0569164B2 JP59280506A JP28050684A JPH0569164B2 JP H0569164 B2 JPH0569164 B2 JP H0569164B2 JP 59280506 A JP59280506 A JP 59280506A JP 28050684 A JP28050684 A JP 28050684A JP H0569164 B2 JPH0569164 B2 JP H0569164B2
- Authority
- JP
- Japan
- Prior art keywords
- receiving element
- light
- light receiving
- tracking
- cylindrical object
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は振動する物体の表面検査装置、特に
検査開始同期信号を簡単に得ることができ、しか
も同期外れ現象を有効に防止できる表面検査装置
に関するものである。[Detailed Description of the Invention] [Field of Industrial Application] This invention relates to a surface inspection device for a vibrating object, particularly a surface inspection device that can easily obtain an inspection start synchronization signal and can effectively prevent out-of-synchronization phenomena. It is related to.
一般に、例えば円筒形状物体の全表面を検査す
る手段としては、この円筒形状物体を回転させる
とともに、その母線にそつて光を走査する方法が
採られている。
Generally, as a means for inspecting the entire surface of a cylindrical object, for example, a method is adopted in which the cylindrical object is rotated and light is scanned along its generatrix.
ところでこの種の方法においては、検査開始の
同期信号を安定して得ることおよび円筒形状物体
の振動に伴なう反射光の位置変動の影響をなくす
ることが重要であり、後者については、反射光の
位置変動を吸収するためのトラツキング装置に関
する発明として先に本出願人達により提案されて
いる。 By the way, in this type of method, it is important to stably obtain a synchronization signal for starting the inspection and to eliminate the influence of positional fluctuations of the reflected light due to vibrations of the cylindrical object. This invention was previously proposed by the present applicants as an invention relating to a tracking device for absorbing positional fluctuations of light.
第２図は上記先行発明を示すもので、図中１は
図示しない円筒形状物体からの反射光、２はこの
反射光１を受ける検査用の光電素子あるいはオプ
テイカルフアイバ束等の主受光素子、３，４ａ，
５はトラツキング用の複数の光電素子等の受光素
子で、好ましくは上記受光素子２，４ａは一直線
上に配置され、また受光素子３，５はこの直線を
挟んでその両側に配置される。 FIG. 2 shows the above-mentioned prior invention, in which 1 is reflected light from a cylindrical object (not shown), 2 is a main light-receiving element such as a photoelectric element for inspection or an optical fiber bundle, which receives this reflected light 1; 3, 4a,
Reference numeral 5 designates a plurality of light receiving elements such as photoelectric elements for tracking. Preferably, the light receiving elements 2 and 4a are arranged on a straight line, and the light receiving elements 3 and 5 are arranged on both sides of this straight line.
以上の構成において、反射光素子３あるいは５
に入射すれば、この反射光１は検査用の主受光素
子２から外れるため、受光素子群２，３，４ａ，
５全体を移動させて反射光１が受光素子２，４ａ
に入射するようにする。そしてこれにより、円筒
形状物体の回転振動に無関係に検査が可能とな
る。 In the above configuration, the reflective light element 3 or 5
If the reflected light 1 is incident on the main light receiving element 2 for inspection, the light receiving element groups 2, 3, 4a,
The reflected light 1 is transmitted to the light receiving elements 2 and 4a by moving the entire 5.
Make it incident on . This makes it possible to inspect the cylindrical object regardless of its rotational vibration.
ところでこの種の検査装置において、表面の検
査に際して検査位置を特定するための同期信号に
ついては、円筒形状物体の端部を光が横切る瞬間
を検出する検出素子を専用に設け、この検出素子
の出力変化点を検出することにより同期信号を得
る方法が採られている。このため、上記受光素子
２，３，４ａ，５に加えてさらに同期信号用の受
光素子が必要となつて全体で５種類の素子を要
し、装置構成が非常に複雑となるという問題があ
つた。 By the way, in this type of inspection equipment, a detection element is dedicated to detect the moment when light crosses the edge of a cylindrical object, and the output of this detection element is used to generate a synchronization signal for specifying the inspection position when inspecting a surface. A method is used to obtain a synchronization signal by detecting a change point. Therefore, in addition to the above-mentioned light receiving elements 2, 3, 4a, and 5, a light receiving element for synchronizing signals is required, resulting in a total of five types of elements, resulting in a very complicated device configuration. Ta.
そこで本出願人達は、第２図に示す各受光素子
３，４ａ，５の中で、トラツキングが正常に動作
している際に反射光１を常時受光する中央の受光
素子４ａを、第３図に示すようにトラツキング用
のみならず同期検出用としても用いることができ
る受光素子４とし、この受光素子４の出力変化点
を検出して検査開始同期信号とする基本発明を創
案した。そしてこの基本発明により、同期信号検
出用の素子を省略して装置構成を簡素化すること
が可能となつた。 Therefore, among the light-receiving elements 3, 4a, and 5 shown in FIG. 2, the present applicants designed the central light-receiving element 4a, which always receives the reflected light 1 when tracking is operating normally, as shown in FIG. As shown in Fig. 2, a basic invention was created in which a light-receiving element 4 is used not only for tracking but also for synchronization detection, and a point of change in the output of this light-receiving element 4 is detected and used as an inspection start synchronization signal. With this basic invention, it has become possible to omit elements for detecting synchronizing signals and simplify the device configuration.
ところでこの基本発明において、受光素子群
２，３，４，５の移動に際しては、受光素子３，
５が反射光１を検出した時点から図示しないトラ
ツキング信号処理回路が作動し実際に機構が動い
て受光素子群２，３，４，５が移動を開始するま
でに時間遅れが生じる。そしてこの時間遅れによ
り、反射光１が一瞬でも完全に受光素子２，４か
ら外れて検査不能になるおそれがある。
By the way, in this basic invention, when moving the light receiving element groups 2, 3, 4, 5, the light receiving elements 3,
A tracking signal processing circuit (not shown) is activated from the time when 5 detects the reflected light 1, and a time delay occurs until the mechanism actually moves and the light receiving element groups 2, 3, 4, and 5 start moving. Due to this time delay, there is a risk that the reflected light 1 will be completely removed from the light receiving elements 2 and 4 even for a moment, making the inspection impossible.
このうち、主受光素子２からの反射光１の外れ
現象については、上記先行発明において、主受光
素子２の幅よりも短かい距離で受光素子３，５を
配置することで事前に検出することができること
が開示されている。ところが、受光素子４からの
反射光１の外れ現象、すなわち同期外れ現象につ
いては、有効な対策が全くないのが現状である。 Among these, the phenomenon of deviation of the reflected light 1 from the main light receiving element 2 can be detected in advance by arranging the light receiving elements 3 and 5 at a distance shorter than the width of the main light receiving element 2 in the above-mentioned prior invention. It has been disclosed that this can be done. However, at present, there is no effective countermeasure against the phenomenon of the reflected light 1 from the light receiving element 4 becoming out of synchronization, that is, the phenomenon of being out of synchronization.
この発明はかかる問題点を解決するためになさ
れたもので、同期外れ現象を有効に防止できると
ともに、トラツキング遅れも有効に防止できる振
動する物体の表面検査装置を得ることを目的とす
る。 The present invention has been made to solve these problems, and an object of the present invention is to provide a surface inspection device for a vibrating object that can effectively prevent out-of-synchronization phenomena and also effectively prevent tracking delays.
この発明に係る振動する物体の表面検査装置
は、振動する被検査物体からの反射光を受ける検
査用の主受光素子と、反射光を受けるトラツキン
グ用および同期検査用の第１受光素子と、第１受
光素子の両側にそれぞれ配置され上記反射光の幅
より狭幅に形成されたトラツキング用の第２受光
素子および第３受光素子と、上記第２受光素子の
外側に配置されたトラツキング用および同期検査
用の第４受光素子と、上記第３受光素子の外側に
配置されたトラツキング用および同期検査用の第
５受光素子とを備え、上記第４受光素子の外側か
ら第５受光素子の外側までの寸法を上記受光素子
よりも狭幅に設定したものである。
A surface inspection device for a vibrating object according to the present invention includes a main light receiving element for inspection that receives reflected light from a vibrating object to be inspected, a first light receiving element for tracking and synchronous inspection that receives reflected light, and a first light receiving element for tracking and synchronous inspection that receives reflected light. A second light receiving element and a third light receiving element for tracking are arranged on both sides of the first light receiving element and are formed to have a width narrower than the width of the reflected light, and a tracking and synchronizing light receiving element are arranged on the outside of the second light receiving element. A fourth light receiving element for inspection, and a fifth light receiving element for tracking and synchronous inspection arranged outside the third light receiving element, from the outside of the fourth light receiving element to the outside of the fifth light receiving element. The dimensions of the light-receiving element are set to be narrower than those of the light-receiving element.
この発明においては、トラツキング用および同
期検査用の第１受光素子の両側に、反射光の幅よ
り狭幅のトラツキング用の第２受光素子および第
３受光素子をそれぞれ介してトラツキング用およ
び同期検査用の第４受光素子および第５受光素子
を配しているので、反射光が第１受光素子から外
れても第４あるいは第５受光素子でこれを受光し
て同期外れ現象を防止でき、しかも第４受光素子
の外側から第５受光素子の外側までの寸法が主受
光素子よりも狭幅に設定されているのでトラツキ
ング遅れも防止できる。
In this invention, a second light receiving element for tracking and a third light receiving element for tracking and a third light receiving element each having a width narrower than the width of the reflected light are provided on both sides of the first light receiving element for tracking and synchronization test. Since the fourth light receiving element and the fifth light receiving element are arranged, even if the reflected light deviates from the first light receiving element, it can be received by the fourth or fifth light receiving element and an out-of-synchronization phenomenon can be prevented. Since the dimension from the outside of the fourth light receiving element to the outside of the fifth light receiving element is set narrower than that of the main light receiving element, tracking delays can also be prevented.
第１図はこの発明の一実施例に係る円筒形状物
体の表面検査装置を示すもので、第２図および第
３図と同一符号は同一又は相当部分を示す。３′，
５′はトラツキング用として追加された受光素子、
４′，４″はトラツキング用および同期検出用とし
て追加された受光素子である。またＤは主受光素
子２の幅、Ｗは反射光１の幅、Ｌは受光素子４′
の外側から受光素子４″の外側までの幅、Ｍは受
光素子４の幅、ｄは受光素子３′，５′の各幅であ
り、トラツキング遅れを解決するためにＤ＞Ｍに
設定され、またｄ≒Ｗ／２，Ｄ＞Ｌにそれぞれ設
定されている。また、受光素子３′の出力は受光
素子３の出力とともに同一のトラツキング用処理
回路（図示せず）に入力され、また受光素子４′，
４″の出力は受光素子４の出力とともに同一の同
期、トラツキング用の処理回路（図示せず）に入
力され、さらに受光素子５′の出力は受光素子５
の出力とともに同一のトラツキング用処理回路
（図示せず）に入力されるようになつている。
FIG. 1 shows a surface inspection apparatus for a cylindrical object according to an embodiment of the present invention, and the same reference numerals as in FIGS. 2 and 3 indicate the same or corresponding parts. 3',
5' is a light receiving element added for tracking,
4' and 4'' are light receiving elements added for tracking and synchronization detection. Also, D is the width of the main light receiving element 2, W is the width of the reflected light 1, and L is the light receiving element 4'.
M is the width of the light-receiving element 4, d is the width of each of the light-receiving elements 3' and 5', and in order to solve the tracking delay, D>M is set, Further, d≒W/2 and D>L are set, respectively.The output of the light receiving element 3' is input to the same tracking processing circuit (not shown) together with the output of the light receiving element 3, and the output of the light receiving element 3' is input to the same tracking processing circuit (not shown). 4',
The output of the light receiving element 5' is input to the same synchronization and tracking processing circuit (not shown) together with the output of the light receiving element 4, and the output of the light receiving element 5'
It is designed to be input to the same tracking processing circuit (not shown) together with the output of .
以上の構成において、反射光１が例えば受光素
子４からの受光素子３の方向に外れていくと、ま
ずこの反射光１は受光素子３′で検出されるが、
この際反射光１の一部は受光素子４でも同時に検
知されているので、同期外れは発生しない。そし
てこの状態で、受光素子３′の出力を受けてトラ
ツキング動作が開始され、反射光１が受光素子４
でのみ受光されるように受光素子群２，３，３′，
４，４′，４″，５，５′が移動することになる。 In the above configuration, when the reflected light 1 deviates from the light receiving element 4 in the direction of the light receiving element 3, the reflected light 1 is first detected by the light receiving element 3'.
At this time, since a part of the reflected light 1 is also detected by the light receiving element 4 at the same time, no synchronization occurs. In this state, the tracking operation is started upon receiving the output of the light receiving element 3', and the reflected light 1 is transmitted to the light receiving element 4.
The light receiving element groups 2, 3, 3',
4, 4', 4'', 5, 5' will move.
ところでこの際、トラツキング遅れにより反射
光１が受光素子４から次第に外れていく場合には
この反射光１は受光素子３′で受光されることに
なる。ところが受光素子３′の幅ｄは、反射光１
の幅Ｗの1/2の寸法に設定されているので、受光
素子３′で受光される反射光１のうちの半分、す
なわち残りＷ／２に相当する部分は受光素子４あ
るいは４′の少なくともいずれか一方では必ず検
知されることになる。このため、受光素子４から
反射光１が外れると同時に同期外れが発生すると
いうことがなくなり、これにより確実に同期外れ
現象を防止することが可能となる。またこの際、
Ｄ＞Ｌに設定されているので、上記動作中常に主
受光素子２に入射しており、これにより反射光１
が主受光素子２から外れる、いわゆる完全なトラ
ツキング遅れを防止することが可能となる。 By the way, at this time, if the reflected light 1 gradually leaves the light receiving element 4 due to tracking delay, this reflected light 1 will be received by the light receiving element 3'. However, the width d of the light receiving element 3' is
Since the dimension is set to 1/2 of the width W of the light receiving element 3', half of the reflected light 1 received by the light receiving element 3', that is, the remaining portion corresponding to W/2 is at least the width W of the light receiving element 4 or 4'. One or the other will definitely be detected. Therefore, synchronization does not occur at the same time that the reflected light 1 is removed from the light-receiving element 4, and it is thereby possible to reliably prevent the synchronization phenomenon. Also at this time,
Since D>L is set, the reflected light 1 is always incident on the main light receiving element 2 during the above operation.
This makes it possible to prevent so-called complete tracking delay in which the main light-receiving element 2 is removed.
一方、反射光１が受光素子４から受光素子５の
方向に外れていく場合には、受光素子５′，４″に
より前記同様の走査が行なわれ、同期外れ、トラ
ツキング遅れが防止される。 On the other hand, when the reflected light 1 deviates from the light receiving element 4 in the direction of the light receiving element 5, the light receiving elements 5', 4'' perform the same scanning as described above, and loss of synchronization and tracking delay are prevented.
なお、最外側の受光素子３，５は、新しい被検
査物体としての円筒形状物体等が投入された際、
トラツキング位置から大幅にずれた反射光１の位
置を検出するために用いられる。 Note that the outermost light receiving elements 3 and 5 are used when a cylindrical object or the like as a new object to be inspected is inserted.
It is used to detect the position of reflected light 1 that is significantly deviated from the tracking position.
しかして、上記構成によりトラツキング遅れが
防止できるとともに、受光素子４を同期検出用と
して用いて装置構成を簡素化しても同期外れのお
それが全くなくなる。 Therefore, with the above configuration, a tracking delay can be prevented, and even if the device configuration is simplified by using the light receiving element 4 for synchronization detection, there is no possibility of loss of synchronization.
なお上記実施例では、円筒形状物体を例に採つ
て説明したが、シート状物体その他一般の振動す
る物体の表面検査にも同様に適用できる。また受
光素子２，３，３′，４，４′，４″，５，５′は、
図示する場所に設置せず、光伝達機能を有するオ
プテイカルフアイバを利用して別の場所に設置す
るようにしても同様の効果が得られる。 Although the above embodiments have been explained using a cylindrical object as an example, the invention can be similarly applied to surface inspection of sheet-like objects and other general vibrating objects. In addition, the light receiving elements 2, 3, 3', 4, 4', 4'', 5, 5' are
The same effect can be obtained even if the device is not installed at the location shown in the figure but is installed at another location using an optical fiber having a light transmission function.
以上説明したように、この発明によれば、円筒
物体からの反射光を入射しその円筒物体の表面検
査を行う主受光素子と、その主受光素子と同一直
線上に配された第１の受光素子と、その第１の受
光素子の両側に配され円筒物体からの反射光に応
じてその反射光が常時その第１の受光素子上にく
るようにトラツキングする第２、第３の受光素子
と、その第２、第３の受光素子の外側に配された
第４、第５の受光素子とを備え、第４の受光素子
の外側から第５の受光素子の外側までの幅を主受
光素子の幅よりも小さく設定すると共に、第１、
第４、第５の受光素子の出力の変化点に基づい
て、円筒物体の端部情報を表面検査の検査開始同
期信号として検出するように構成したので、同期
外れを有効に防止することができ、また、第１、
第４、第５の受光素子により、トラツキング制御
状態が検査開始同期信号に基づいて確認でき、さ
らに、円筒物体の表面検査を行うのは主受光素子
であり、表面検査の検査開始同期信号は第１、第
４、第５の受光素子の出力に基づいて行うように
２つの受光素子に分担しているので、円筒物体の
端部に欠陥が生じていても、主受光素子の表面検
査により欠陥を検出するか、または、第１、第
４、第５の受光素子の出力による検査開始同期信
号の未発生により表面検査不能にすることがで
き、したがつて、欠陥部の誤検出を防止すること
ができる。
As explained above, according to the present invention, there is a main light-receiving element that receives reflected light from a cylindrical object and inspects the surface of the cylindrical object, and a first light-receiving element arranged on the same straight line as the main light-receiving element. a second and third light-receiving element arranged on both sides of the first light-receiving element and tracking the reflected light from the cylindrical object so that the reflected light always falls on the first light-receiving element; , fourth and fifth light receiving elements arranged outside the second and third light receiving elements, and the width from the outside of the fourth light receiving element to the outside of the fifth light receiving element is defined as the main light receiving element. In addition to setting the width smaller than the width of the first
Since the configuration is configured to detect the edge information of the cylindrical object as the inspection start synchronization signal for surface inspection based on the change point of the output of the fourth and fifth light receiving elements, it is possible to effectively prevent out of synchronization. , also, the first
The tracking control state can be confirmed based on the inspection start synchronization signal by the fourth and fifth light receiving elements.Furthermore, the main light receiving element performs the surface inspection of the cylindrical object, and the inspection start synchronization signal for surface inspection is the first one. Since the outputs of the first, fourth, and fifth light receiving elements are shared between the two light receiving elements, even if a defect occurs at the end of the cylindrical object, the surface inspection of the main light receiving element will detect the defect. , or the surface inspection can be made impossible due to the non-generation of the inspection start synchronization signal by the output of the first, fourth, and fifth light-receiving elements, thus preventing erroneous detection of defective parts. be able to.
第１図はこの発明の一実施例を示す表面検査装
置の構成図、第２図は先行発明を示す第１図相当
図、第３図は基本発明を示す第１図相当図であ
る。
１……反射光、２……受光素子、３，３′５，
５′……トラツキング用の受光素子、４，４′，
４″……トラツキング用および同期検出用の受光
素子、なお、各図中同一符号は同一又は相当部分
を示すものとする。
FIG. 1 is a block diagram of a surface inspection apparatus showing an embodiment of the present invention, FIG. 2 is a view corresponding to FIG. 1 showing the prior invention, and FIG. 3 is a view corresponding to FIG. 1 showing the basic invention. 1... Reflected light, 2... Light receiving element, 3, 3'5,
5'... Light receiving element for tracking, 4, 4',
4''... Light receiving element for tracking and synchronization detection. Note that the same reference numerals in each figure indicate the same or equivalent parts.
Claims (1)
その円筒物体の表面の検査を行う振動する物体の
表面検査装置において、上記円筒物体からの反射
光を入射しその円筒物体の表面検査を行う主受光
素子と、その主受光素子と同一直線上に配された
第１の受光素子と、その第１の受光素子の両側に
配され上記円筒物体からの反射光に応じてその反
射光が常時その第１の受光素子上にくるようにト
ラツキングする第２、第３の受光素子と、その第
２、第３の受光素子の外側に配された第４、第５
の受光素子とを備え、上記第４の受光素子の外側
から第５の受光素子の外側までの幅を上記主受光
素子の幅よりも小さく設定すると共に、上記第
１、第４、第５の受光素子の出力の変化点に基づ
いて、上記円筒物体の端部情報を表面検査の検査
開始同期信号として検出することを特徴とする振
動する物体の表面検査装置。1 In a surface inspection device for a vibrating object that scans light along the generatrix of a rotating cylindrical object to inspect the surface of the cylindrical object, the surface of the cylindrical object is inspected by inputting reflected light from the cylindrical object. A main light-receiving element, a first light-receiving element disposed on the same straight line as the main light-receiving element, and a first light-receiving element disposed on both sides of the first light-receiving element, the reflected light of which always changes according to the reflected light from the cylindrical object. A second and third light receiving element that tracks on top of the first light receiving element, and a fourth and fifth light receiving element that are arranged on the outside of the second and third light receiving element.
The width from the outside of the fourth light receiving element to the outside of the fifth light receiving element is set to be smaller than the width of the main light receiving element, and the first, fourth and fifth light receiving elements are provided. A surface inspection device for a vibrating object, characterized in that information on the end of the cylindrical object is detected as an inspection start synchronization signal for surface inspection based on a change point of the output of a light receiving element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28050684A JPS61149816A (en) | 1984-12-24 | 1984-12-24 | Inspecting instrument for surface of vibrating body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28050684A JPS61149816A (en) | 1984-12-24 | 1984-12-24 | Inspecting instrument for surface of vibrating body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61149816A JPS61149816A (en) | 1986-07-08 |
| JPH0569164B2 true JPH0569164B2 (en) | 1993-09-30 |
Family
ID=17626039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28050684A Granted JPS61149816A (en) | 1984-12-24 | 1984-12-24 | Inspecting instrument for surface of vibrating body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61149816A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7094618B2 (en) | 2000-08-25 | 2006-08-22 | Micron Technology, Inc. | Methods for marking a packaged semiconductor die including applying tape and subsequently marking the tape |
| US7169685B2 (en) | 2002-02-25 | 2007-01-30 | Micron Technology, Inc. | Wafer back side coating to balance stress from passivation layer on front of wafer and be used as die attach adhesive |
| US7361862B2 (en) | 1998-12-21 | 2008-04-22 | Micron Technology, Inc. | Laser marking system for dice carried in trays and method of operation |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5834011B2 (en) * | 1976-03-17 | 1983-07-23 | 日本ビクター株式会社 | Contactless pick-up |
| JPS5932804A (en) * | 1982-08-18 | 1984-02-22 | Chino Works Ltd | Length measuring device |
-
1984
- 1984-12-24 JP JP28050684A patent/JPS61149816A/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7361862B2 (en) | 1998-12-21 | 2008-04-22 | Micron Technology, Inc. | Laser marking system for dice carried in trays and method of operation |
| US7094618B2 (en) | 2000-08-25 | 2006-08-22 | Micron Technology, Inc. | Methods for marking a packaged semiconductor die including applying tape and subsequently marking the tape |
| US7238543B2 (en) | 2000-08-25 | 2007-07-03 | Micron Technology, Inc. | Methods for marking a bare semiconductor die including applying a tape having energy-markable properties |
| US7169685B2 (en) | 2002-02-25 | 2007-01-30 | Micron Technology, Inc. | Wafer back side coating to balance stress from passivation layer on front of wafer and be used as die attach adhesive |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61149816A (en) | 1986-07-08 |
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