JPH0569679B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a semiconductor lead frame cleaning device that removes resin burrs from a molded portion of a semiconductor lead frame by jetting ultra-high pressure water.

(Prior art) Conventional semiconductor frame cleaning equipment of this type includes a loading device that intermittently loads lead frames onto pallets that can position lead frames, and a loading device that intermittently loads multiple pallets with lead frames in position. A cleaning device that cleans and removes burrs on the top and bottom surfaces of the lead frame by spraying ultra-high pressure water during the lead frame transportation process; It is equipped with an air blow device that drains and dries the cleaning water remaining on the upper and lower surfaces of the frame, and an unloading device that intermittently unloads the cleaning agent lead frame from the pallet in the conveying device. A so-called inversion return system is known in which a pallet with a frame positioned thereon is conveyed linearly and then a used pallet is returned linearly to its original position.

(Problems to be Solved by the Invention) However, the conventional device has the following problems.

In other words, in the conventional device, since the direction in which the pallets are conveyed in the conveying device is linear, the length of the device itself becomes long, and the distance between the loading device and the unloading device is large, so it is difficult for one worker to The problem was that it could not be managed.

In addition, since the transport system used in the transport device was a so-called reverse return method in which pallets were returned along the transport direction, almost the same number of pallets were required on the return side as on the transport side, resulting in an increase in costs. The dot was hot.

Furthermore, in the conventional apparatus, since the lead frame was cleaned while being transported, there was a problem in that it was not possible to target the required location.

(Means for Solving the Problems) The present invention has been made to solve the above-mentioned problems, and its main purpose is to reduce the line size, improve manageability, and improve efficiency by targeting. An object of the present invention is to provide a semiconductor lead frame cleaning device capable of cleaning semiconductor lead frames in a variety of ways. A cleaning system that cleans and removes burrs on the upper and lower surfaces of lead frames by using a conveying device that intermittently transports multiple positioned pallets, and by jetting ultra-high pressure water while the pallets with positioned lead frames are stationary. and an air blowing device that drains and dries the cleaning water remaining on the top and bottom surfaces of the lead frame by blowing air while the pallet with the lead frame positioned is stationary.
A semiconductor lead frame cleaning apparatus is provided with an unloading device that intermittently unloads cleaned lead frames from a pallet in a conveying device, wherein a turntable is used as the conveying device, and the turntable has a rotary arc along its rotational arc. A plurality of pallets are arranged at regular intervals along the pallet, and each pallet is intermittently rotated and conveyed using the interval between each pallet as a unit of rotation. The cleaning device and the air blow device are arranged so that after the burrs on the upper and lower surfaces of the lead frame are removed by the cleaning device, water is drained and dried by the air blow device.

(Function) In the semiconductor lead frame cleaning device of the present invention,
As mentioned above, by using a turntable as the conveyance device, the length of the device itself can be shortened to the minimum, and most of the rotational circumference of the turntable can be used for the pallet conveyance process, making it possible to Since the number of pallets can be reduced to the minimum, pallets are not wasted and costs can be reduced.

Furthermore, since the distance between the carrying-in device and the discharging device can be shortened, both devices can be managed by only one worker, making it possible to improve work efficiency and reduce manpower.

In addition, multiple pallets with lead frames in position can be transported intermittently and cleaned while they are stationary, making it possible to accurately aim the spray to the required areas and increasing cleaning efficiency. become.

(Example) Hereinafter, an example of the present invention will be described in detail based on the drawings.

First, the configuration of the embodiment will be explained.

Semiconductor lead frame cleaning apparatus A of this embodiment
As shown in FIGS. 1 to 5, the transport device 1
, the carrying-in device 2, the carrying-out device 3, the first cleaning device 4, the first reversing device 5, the second cleaning device 6, the second reversing device 7, the air blow device 8, and the pallet cleaning device 9. The main components are:

The conveyance device 1 is a device that intermittently rotates and conveys a plurality of pallets 10 on which the lead frames R can be positioned.
A turntable 12 is provided at the center of the top surface of the device.

The turntable 12 is provided in such a manner that its outer rotating portion 12a is rotatable about its central fixed portion 13, and a rotating shaft 14 along the rotation radius is mounted on the outer rotating portion 12a. A total of eight pallets are provided at equal intervals along the direction, and the proximal end surface of the pallet 10 is removably attached to the tip flange 15 of each rotating shaft 14, and the proximal end of each rotating shaft 14 is removably attached. A rotation prevention piece 16 that projects in a direction parallel to the rotational direction of the turntable 12 is connected to the side protrusion, and a guide roller 17 is provided at the tip of the rotation prevention piece 16 .

Further, a guide groove 18 is provided on the outer circumferential surface of the central fixing portion 13 of the turntable 12 for guiding the rotation prevention piece 16 while maintaining it in a horizontal state. By moving the rotating shaft 14, rotation of the rotating shaft 14 is prevented.

The turntable 12 is rotated intermittently in a counterclockwise direction in plan view, with the rotation unit being 45 degrees, which is the opening angle between the pallets 10, 10, as shown by the arrows in FIG. It's becoming like that.

The carrying-in device 2 carries an unprocessed lead frame R.
This is a device for intermittently transporting magazine racks 20 one by one onto a pallet 10, and in this embodiment, a conveyor table 21 capable of horizontally and vertically moving a plurality of magazine racks 20 arranged side by side, and The pallet 10 includes a carrying means 22 for feeding a large number of lead frames R stacked and housed in the pallet 10 one by one.

The carrying means 22 moves horizontally between the conveyor table 21 and the turntable 12.
An axis transfer means 22a, a Y-axis transfer means 22b that moves in the vertical direction, and a lead frame chuck means 22 provided at the lower end of the Y-axis transfer means 22b.
c, and a rotary actuator 22 that rotates the chuck means 22c horizontally by 45 degrees in order to correct the angular deviation between the longitudinal line of the magazine rack 20 and the longitudinal line of the pallet 10 serving as the loading section.
d.

The unloading device 3 carries out the processed lead frame R.
This is a device for carrying out pallets 10 from each pallet 10, and in this embodiment, it is constituted by a conveyance table 31, which is substantially the same as the structural members of the carrying-in device 2, and a carrying-out means 32.

That is, the unloading means 32 is an X-axis transporting means 3 that horizontally moves between the turntable 12 and the conveyance table 31.
Y-axis transfer means 32b that moves in a direction perpendicular to 2a.
, a lead frame chuck means 32c provided at the lower end of the Y-axis transfer means 32b, and a rotary actuator 32d for horizontally rotating the chuck means 32c by 45 degrees.

In this embodiment, the X-axis transfer means 22a constituting the carry-in means 22 and the X-axis transfer means 32a constituting the carry-out means 32 are arranged on one horizontal frame 100 so that they are both aligned in a straight line. It is set up.

Further, each pallet 10 is formed so that both longitudinal edges of the lead frame R can be locked to the left and right edges of the central opening 10a, and the upper surface side of each pallet 10 is provided with the lead frame R loaded from the loading means 22. A clamping means 10b for positioning and fixing the lead frame R and releasing the same is provided, and by interlocking the operation of the clamping means 10b and the respective chuck means 22c and 32c in the carrying-in device 2 and the carrying-out device 3, the lead frame can be fixed. The exchange of R is now taking place. In addition, in FIG. 6, 10c is
The clamping means 10b is connected to the clamping spring 1.
The cylinder is opened against the repulsive force of 0d, and 10e indicates a pin for positioning the lead frame R.

The first cleaning device 4 is a device for cleaning and removing burrs on the upper surface side of the lead frame R by jetting ultra-high pressure water during the conveyance process of the lead frame R. , a frame 101 passing on the diameter line of the turntable 12
A horizontal transfer means 40 provided along the back surface of a horizontal frame 102 disposed perpendicularly to the leading end of the carry-in device 2 in It is comprised of an ultra-high pressure water injection nozzle device 41 that moves along the width direction.

The first reversing device 5 is a device for reversing the entire pallet so that the lower surface side of the lead frame R can be cleaned from above. In this embodiment, the pallet 10 is located at the position of the first cleaning device 4. Central fixing part 13 at a position rotated 45 degrees in the transport direction from
It is provided inside.

That is, a part of the central fixing part 13 provided with the guide groove 18 is connected to the reversing actuator 5 provided behind it.
0 so that it can freely rotate 180 degrees coaxially with the rotating shaft 14, and is provided with a guide roller 17 in the guide groove 18 of the reversing section 51. By rotating the rotation prevention piece 16 together with the reversing section 51 by 180 degrees. The pallet 10 is configured to be inverted.

The second cleaning device 6 is a device for cleaning and removing burrs on the lower surface side of the lead frame R by jetting ultra-high pressure water during the conveyance process of the lead frame R. , 45 in the transport direction from the position of the reversing device 5 on the back surface of a horizontal frame 104 that passes along the diameter line of the turntable 12 and is disposed at right angles to the tip of the frame 103 that is orthogonal to the frame 101.
A horizontal transfer means 60 is provided along the width direction of the rotated pallet 10, and an ultra-high pressure is moved along the width direction over the lead frame (lower surface side) located at the bottom by the horizontal transfer means 60. It is composed of a water injection nozzle device 61.

The second reversing device 7 is a device for further reversing the lead frame R reversed by the first reversing device 5 and returning it to its original state. In this embodiment, the pallet 10 is In the central fixing part 13 at a position rotated 45 degrees in the transport direction from the position,
A device having the same structure as the first reversing device 5 is provided.

The air blow device 8 is a device for draining and drying the cleaning water remaining on the upper and lower surfaces of the lead frame R, and in this embodiment, the pallet 10 is moved from the position of the second reversing device 7 in the conveying direction. It is mounted in a position rotated 45 degrees. That is,
In this embodiment, an upper air blow nozzle 80 that blows air from the upper surface side of the lead frame R is suspended from the back surface of the tip of the horizontal portion of the frame 101 on the side of the unloading device 3, and a lower air blow nozzle 81 is placed on the side of the base 11. It has been erected since.

The pallet cleaning device 9 is a device for shower-cleaning the empty pallet 10 from which the processed lead frames R have been discharged by the carrying-out device 3, and is a device for washing the empty pallet 10 from which the processed lead frames R are discharged. A shower nozzle 90 is provided at the upper part of the pallet 10 located at the midpoint between the pallet 10 and the pallet 10 of the carry-in section into which unprocessed lead frames are carried.

Next, the operation of this embodiment will be explained.

Since the semiconductor lead frame cleaning apparatus A of the present invention has the above-mentioned configuration, the following operations are sequentially performed during the intermittent rotational conveyance process of the lead frame by the turntable 12 that constitutes the conveyance apparatus 1. become. In addition, due to the intermittent rotation of the turntable 12, each pallet 10 is intermittently rotated and conveyed in a counterclockwise direction in a plan view, with the rotation unit being 45 degrees, which is the opening angle between the pallets 10, 10. will be done.

First, in the carry-in device 2, a large number of unprocessed lead frames R stacked and housed in the magazine rack 20 on the conveyance table 21 are loaded one by one onto the pallet 10 of the carry-in section of the turntable 12 by the carry-in means 22.
They will be brought in one by one.

That is, the clamping and lifting of the lead frame R from within the magazine rack 20 is performed by the chuck means 22c.
and is carried out by the Y-axis transfer means 22b, and the transfer in the direction of the pallet 10 is carried out by the Correcting the angular deviation with respect to the longitudinal direction of the pallet 10 is performed by the rotary actuator 22d, and the transfer from the carrying means 22 to the pallet 10 is performed by lowering the pallet 10 by the Y-axis transfer means 22b and opening the chuck means 22c. Clamping means 1 on pallet 10
This is done in conjunction with the clamping operation of 0b.

The lead frame R is moved by the chuck means 22c due to the vertical movement and lateral movement of the conveyance table 21.
The clamping will always be done at a fixed position.

Next, in the first cleaning device 4, the horizontal transfer means 40
Ultra-high pressure water is injected from the ultra-high pressure water injection nozzle device 41 that moves along the width direction on the lead frame R located at the lower part of the lead frame R, and this water pressure causes the burr on the upper surface side of the lead frame R to be sprayed. is washed away.

Next, in the first reversing device 5, the reversing actuator 50 rotates the reversing section 51 by 180 degrees, so that the pallet 10 is reversed, and the lower surface side of the lead frame R is set upward.

Next, in the second cleaning device 6, the horizontal transfer means 60
Ultra-high pressure water is injected from an ultra-high pressure water injection nozzle device 61 that moves along the width direction of the lead frame R located at the lower part of the lead frame R, and the burrs on the lower surface side of the lead frame R are sprayed by this water pressure. is washed away.

Next, in the second reversing device 7, the pallet 10 is reversed using a device having the same structure as the first reversing device 5, so that the lead frame R is returned to its original state.

Next, in the air blowing device 8, air blowing from the upper air blow nozzle 80 and the lower air blow nozzle 81 drains and dries the cleaning water remaining on the upper and lower surfaces of the lead frame R.

Next, in the unloading device 3, the processed lead frame R, which has been washed, drained and dried, is unloaded from the pallet 10 of the unloading section by the unloading means 32.

That is, the delivery of the lead frame R from the pallet 10 to the unloading means 32 is performed by the Y-axis transport means 32b.
, the clamp release operation of the clamp means 32c on the pallet 10, and the chuck means 32
The movement in the direction of the magazine rack 20 is performed by the X-axis transfer means 32 in conjunction with the clamping operation of c.
The longitudinal direction line of the pallet 10 (the longitudinal direction line of the lead frame 10) which is carried out by a and serves as the unloading section
The rotary actuator 32d corrects the angular deviation between the magazine rack 20 and the longitudinal direction of the magazine rack 20, and the lead frame R is housed in the magazine rack 20 by lowering by the Y-axis transfer means 32b and by chuck means 32c. This will be done by opening the In this case as well, the chuck means 32 is
c will always be opened at a fixed position.

Next, in the pallet cleaning device 9, the pallet 10
The shower water from the shower nozzle 90 provided at the upper part of the pallet 10 washes away burrs and the like remaining on the pallet 10. Then, in this state, it is transported to the next loading section, and the above-mentioned process is repeated.

As explained above, in the semiconductor lead frame cleaning apparatus A of this embodiment, the length of the apparatus itself is shortened to the minimum by using the turntable 12 as the conveyance apparatus 1, as described above. At the same time, most of the rotational circumference of the turntable 12 can be used for the conveyance process of the pallet 10, and the return side can be minimized, so pallets are not wasted and costs can be reduced.

Furthermore, since the distance between the carrying-in device 2 and the carrying-out device 3 can be reduced, both devices can be managed by only one worker, making it possible to improve work efficiency and reduce manpower.

Furthermore, since a plurality of pallets 10 with lead frames R positioned thereon can be transported intermittently and cleaned while they are stationary, it is possible to accurately target the spray to the required location, increasing cleaning efficiency. become able to.

Further, in the embodiment, by providing the rotary actuators 22d and 32d in the carrying-in device 2 and the carrying-out device 3, respectively, the entire circumference of the turntable 12 can be used without waste, and the carrying-in direction and the carrying-out direction You will be able to connect them with a straight line.

Further, in the embodiment, by providing the first reversing device 5 and the second reversing device 7, both the upper and lower surfaces of the lead frame R can be cleaned from the upper surface side, and therefore, it is possible to prevent washing water and burrs from scattering over a wide range. It becomes like this.

Although the embodiments of the present invention have been described above in detail with reference to the drawings, the specific configuration is not limited to these embodiments, and the present invention may be modified without departing from the gist of the present invention. include.

For example, in the embodiment, the case was shown in which the lead frame was reversed by the reversing device and both the upper and lower surfaces were cleaned from the top surface side, but it may be cleaned from the bottom surface side without being reversed.

Further, even in the case of reversing, the first reversing device and the first cleaning device, and the second reversing device and the second cleaning device may be made to coincide in location, and further,
By matching the cleaning equipment and reversing equipment in the same location, it becomes possible to clean both the upper and lower sides of the lead frame with just one cleaning equipment, and the reversing equipment can also be shared, resulting in significant cost savings. down is possible.

(Effects of the Invention) As explained above, in the semiconductor lead frame cleaning device of the present invention, by using a turntable as its conveyance device, the length of the device itself can be shortened to the minimum, and the turntable can be shortened to the minimum. Most of the rotational circumference of the table can be used for the pallet conveyance process, and the return side can be minimized, so pallets are not wasted and costs can be reduced.

Furthermore, since the distance between the carry-in device and the carry-out device can be shortened, both devices can be managed by only one worker, making it possible to improve work efficiency and reduce manpower.

In addition, multiple pallets with lead frames in position can be transported intermittently and cleaned while they are stationary, making it possible to accurately aim the spray to the required areas and increasing cleaning efficiency. Effects such as becoming

[Brief explanation of drawings]

FIG. 1 is a plan view showing a semiconductor lead frame cleaning apparatus according to an embodiment of the present invention, FIG. 2 is a front view of the same, and FIG.
4 is a plan view showing details of the reversing device portion, FIG. 5 is a side view of the same, and FIG. 6 is a longitudinal sectional view showing details of the pallet. 1: Conveyance device, 2: Carrying-in device, 3: Carrying-out device,
4: first cleaning device, 6: second cleaning device, 8: air blow device, 10: pallet, 12: turntable, R: lead frame.

Claims (1)

[Claims] 1. A loading device that intermittently transports lead frames to each pallet in which the lead frames can be positioned; a conveyance device that intermittently transports a plurality of pallets on which lead frames are positioned; A cleaning device that cleans and removes burrs on the upper and lower surfaces of the lead frame by spraying ultra-high pressure water while the pallet that has been positioned is stationary; A semiconductor lead frame cleaning device comprising: an air blow device that drains and dries cleaning water remaining on the semiconductor lead frame; and a carry-out device that intermittently carries out cleaned lead frames from a pallet in a conveyance device, the device comprising: A turntable is used as the device, and a plurality of pallets are arranged on the turntable at regular intervals along the rotational arc of the turntable, and
Each pallet is intermittently rotated and conveyed using the interval between each pallet as a rotation unit, and further,
The cleaning device and the air blowing device are arranged so that burrs on the upper and lower surfaces of the lead frame carried into the pallet from the carrying device are cleaned and removed by the cleaning device, and then drained and dried by the air blowing device. Semiconductor lead frame cleaning equipment.