JPH0571479B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a device for transferring various chemical liquids used in chemical liquid processing processes for electronic materials such as semiconductors and precision equipment parts, and more specifically, for transferring chemical liquids from open returnable containers. The present invention relates to a chemical liquid transfer device from an open type chemical liquid communication container that is capable of sending safe and clean chemical liquid to a chemical liquid processing process using a suction method.

BACKGROUND TECHNOLOGY Advances in microfabrication technology for integrated circuits, transistors, etc. are remarkable, and requirements for quality control of the various chemicals used in their manufacture and prevention of accidents to the human body are becoming increasingly strict. Contamination with fine particles and foreign substances that directly affect the yield of the product is contraindicated, so the chemical solution is usually subjected to precision filtration and filled into a clean container in a clean environment to become a product. After passing through the distribution stage, these products require the user to take the trouble of transferring them to a chemical treatment process installed in a clean room. This results in the problem of contamination with foreign matter.
In even more serious cases, there is a risk of splashing chemicals on the human body or inhaling the generated gas during the work.

Problems to be Solved by the Invention Therefore, as a result of intensive research to solve the above-mentioned problems, the present inventors have devised a method to transfer a chemical solution from an open chemical solution container filled with a clean chemical solution that has undergone precision filtration to a chemical solution processing process. To this end, we have completed a chemical liquid transfer device from an open chemical liquid container that prevents dirt and foreign matter from entering the contents, transfers clean chemical liquid to the chemical liquid processing process, and avoids danger to the human body. I came to the point.

Means for Solving the Problems This object of the present invention is to provide a clean room 1 equipped with an air intake port 2 having an air filter, an air outlet 3, and a returnable container entrance/exit door 4. A liquid suction pipe 5 that is inserted to the bottom of the returnable container is provided, and a drive device 6 that connects to the liquid suction pipe and inserts and withdraws the liquid suction pipe into the returnable container is installed, and a drive device 6 is installed that connects the liquid suction pipe to the bottom of the returnable container. 9, an elastic connecting pipe 7 is connected between the terminal in the clean room and the terminal of the liquid suction pipe to accommodate the insertion and withdrawal strokes of the liquid suction pipe into the container. It is achieved by doing so.

An embodiment of the apparatus of the present invention will be explained based on the drawings. FIG. 1 is a flowchart showing the flowchart. A container entrance/exit door 4 is provided, and a commonly used Hepa filter can be used as an air filter. A liquid suction pipe 5 for a chemical solution hangs down from the top of the clean room, and this liquid suction pipe 5 is supported by a cylinder 11 of a drive device 6 through an arm 10. 5 is inserted into the container through the upper end opening of the open type drug solution container 21 (indicated by the broken line in the figure) that has been carried and installed at a predetermined location, and passed through the liquid suction port to reach the bottom of the container, or from the container. It is designed to be pulled out. As the drive device, one using a gas such as air as a drive source, or a general cylinder elevating device such as an electric type can be used. The upper end of the liquid suction pipe 5 and the end of the chemical solution feeding line 9 in the clean room are connected by an elastic connecting pipe 7. This elastic connecting pipe 7 has a flexible structure that can reduce the distance between the liquid suction pipe terminal and the transport line terminal as the liquid suction pipe 5 rises, and extend the distance as it descends. As shown in the figure, an elastic tube is wound spirally to utilize the expansion and contraction caused by the spring effect, or as another method, a highly flexible oil-resistant rubber hose or the like is connected by loosening it in an arc shape.
An appropriate method can be taken, such as making it expandable and contractible.

The chemical liquid feed line 9 transports the chemical liquid in a returnable container placed in the clean room to the chemical liquid tank and the chemical liquid processing device, and the chemical liquid amount detector 8, liquid feed pump 12, and chemical liquid filter 13 are connected as necessary. It is arranged. The chemical liquid amount detector is generally installed in the chemical liquid feeding line 9 or in the returnable container, and has the function of detecting the remaining amount of the chemical liquid in the returnable container and stopping the operation of the pump in conjunction with the operation of the liquid feeding line. Any type of capacitance type, electrode type, phototube type, etc. can be used. Note that it is of course possible to visually check the amount of chemical solution remaining in the returnable container without providing this detector. The liquid feeding pump can be either a pressurized type or a depressurized type, and a diaphragm type, a bellows type, etc. can be used. As the chemical liquid filter 13, a membrane filter that is generally used for filtering chemical liquids can be used, but the type thereof is not particularly limited. Note that although it is not necessary to provide a chemical filter, it is preferable to provide one to ensure complete safety.

In addition, the material used for the purpose of the present invention must not generate foreign substances such as rust due to corrosion, and must not be contaminated by being eroded by a chemical solution and eluted or dispersed in the chemical solution. When selecting the drug, it must be confirmed that it can be used by conducting tests using the target drug solution in a conventional manner. Common examples include SUS304, SUS316, Teflon,
Examples include plastics such as polypropylene, polyethylene, polyvinyl chloride, SUS304 and SUS316 with Teflon lining, and fiber-reinforced polypropylene, but as mentioned above, they can be used depending on the properties of the chemical. It is obvious that the material does not limit the present invention in any way.

Function The chemical liquid transfer device of the present invention is used as follows. A returnable container 21 (indicated by a broken line in FIG. 1) is carried into a clean room filled with clean air passed through an air filter through the air intake port 2, set in a predetermined position, and the stopper at the top end is removed. , drive device 6
and insert the liquid suction pipe 5 to the bottom of the container.
Stop the drive device and close the entrance/exit door.Pump 1 for pumping chemical liquid
Operate 2. The chemical liquid in the returnable container is transferred to the chemical liquid treatment process through a chemical liquid filter 13 provided in the liquid feeding line. When the chemical solution in the returnable container becomes empty, if a drug solution amount detector is provided in the solution delivery line or in the returnable container, this detects the empty state and stops the solution pump 12 and starts the drive device 6. Then, the liquid suction pipe 5 is pulled out from the container and stopped. Thereafter, after a predetermined period of time has elapsed for the chemical solution to stop dripping, the container enters the clean room, caps the returnable container, and takes it out of the clean room. Furthermore, when transferring a newly filled chemical solution container to a chemical solution treatment process, the above method can be repeated.

Effects of the Invention In the device of the present invention, by providing a liquid suction pipe, a liquid suction pipe drive device, and an elastic connecting pipe in a clean room, the chemical liquid is transferred from the returnable container to the contents in a clean air atmosphere. In addition to preventing dust and foreign matter from getting mixed in, even if foreign matter does get mixed in, it can be removed by providing a filter for passing through the chemical liquid, and clean chemical liquid can be supplied to the chemical liquid treatment process. Furthermore, since the returnable container is opened in a clean room and the medicinal solution is transferred from the open returnable container within the clean room, the generated gas is removed through the exhaust port and does not expose the human body to harmful gases. It is safe without any problems.

In addition, since the stoppers of open returnable containers are opened and closed in a clean air atmosphere, there is no contamination caused by dirt or foreign matter getting into the returnable containers.
The container can be maintained in a clean state.
A series of transfer operations can be performed automatically by using a chemical liquid amount detector, and the labor required for the operation can be significantly reduced.

[Brief explanation of drawings]

FIG. 1 shows a flowchart of an embodiment of the chemical liquid transfer device of the present invention. 1...Clean room, 2...Air intake port, 3...Air outlet, 4...Returnable container entrance/exit door, 5...Liquid suction pipe,
6... Drive device, 7... Elastic connecting tube, 8... Chemical liquid amount detector, 9... Chemical liquid feeding line, 12... Liquid feeding pump, 13... Chemical liquid filter, 21...
Returnable container.

Claims (1)

[Claims] 1. In a clean room 1 equipped with an air intake port 2 having an air filter, an air outlet 3, and a returnable container entrance/exit door 4, a liquid suction pipe 5 is provided which is inserted to the bottom of a returnable container carried into a predetermined position. , a drive device 6 connected to the liquid suction pipe for inserting and pulling out the liquid suction pipe through the container is installed, and the liquid suction pipe is connected between the upper end of the liquid suction pipe and the end of the chemical liquid feeding line 9 in the clean room. A drug solution transfer device from an open type drug solution container, characterized in that an elastic connecting tube 7 is connected to the container to accommodate the insertion and withdrawal strokes of the container.