JPH0573700B2 - - Google Patents
Info
- Publication number
- JPH0573700B2 JPH0573700B2 JP60241930A JP24193085A JPH0573700B2 JP H0573700 B2 JPH0573700 B2 JP H0573700B2 JP 60241930 A JP60241930 A JP 60241930A JP 24193085 A JP24193085 A JP 24193085A JP H0573700 B2 JPH0573700 B2 JP H0573700B2
- Authority
- JP
- Japan
- Prior art keywords
- glass
- pair
- disk
- molds
- guide grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
- C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
- C03B11/086—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor of coated dies
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
- C03B11/082—Construction of plunger or mould for making solid articles, e.g. lenses having profiled, patterned or microstructured surfaces
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/14—Die top coat materials, e.g. materials for the glass-contacting layers
- C03B2215/16—Metals or alloys, e.g. Ni-P, Ni-B, amorphous metals
- C03B2215/17—Metals or alloys, e.g. Ni-P, Ni-B, amorphous metals comprising one or more of the noble meals, i.e. Ag, Au, platinum group metals
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/40—Product characteristics
- C03B2215/41—Profiled surfaces
- C03B2215/412—Profiled surfaces fine structured, e.g. fresnel lenses, prismatic reflectors, other sharp-edged surface profiles
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/40—Product characteristics
- C03B2215/44—Flat, parallel-faced disc or plate products
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing Optical Record Carriers (AREA)
Description
産業上の利用分野
本発明は、非接触で読みとりが可能な高密度メ
モリメデイアである光デイスク（光熱記録デイス
クおよび光磁気デイスク）に用いる光デイスク基
板の製造方法に関するものである。
従来の技術
光デイスクは長期保存に対する信頼性の確保が
重要点の一つであるが、それにはデイスク基板と
して変形のない基板を用いることが必要であり、
ガラス基板を採用することが望まれる。基板にガ
ラスを用いる場合、従来から紫外線硬化樹脂を用
いたフオトポリマー法により案内溝を設けること
が一般的であつた。また、最近では、これを更に
改善した反応エツチング法により、ガラス基板に
直接凹凸の案内溝を設ける方法も開発されている
（太田賢司他、真空、28（２），77（1985））。
代表的なガラス基板に案内溝を作製する工程を
以下に示す。ガラス円板を洗浄した後、ポジ形レ
ジストをスピンコータで200〜300nmの厚さに塗
布し、プリベークした後、アルゴンレーザ光を集
光し、円板を一定速度で回転させながら、レーザ
光を円板の半径方向に移動させる方法で、幅約
0.8μm、ピツチ1.6μmの螺旋状の案内溝を記録す
る。次いてこの案内溝を現像して、その後残つた
レジストをマスクして、CHF3ガス中で反応性イ
オンエツチングを行なう。約70nmの深さまでガ
ラスをエツチングした後、不要になつたレジスト
は酸素ガスで灰化し、除去することによつて、光
デイスク用ガラス基板に案内溝が作製されてい
る。
発明が解決しようとする問題点
このようなプロセスでは、レジスト上の案内溝
パターンの現像工程や反応性イオンエツチング工
程などに高い精度が要求され、かつ、工程が長い
欠点があつた。
本発明は、このような欠点を克服すべくなされ
たものであり、極めて少ない工程で容易に光デイ
スク用ガラス基板の案内溝を作製する方法を提供
することを目的としている。
問題点を解決するための手段
本発明は上記問題点を解決するために、案内溝
形状の凹凸を設けた耐熱性材料の一対の押し型を
加熱し、これらの一対の間にあらかじめ加熱した
ガラス材料塊状物をはさみ、上記の一対の押し型
でプレスし、そのまま、ガラス材料塊状物のガラ
ス転移温度よりも低い温度まで冷却する方法でも
つて、光デイスク用ガラス基板の案内溝を作製す
るものである。
作 用
本発明は、ガラス材料塊状物をあたかもレコー
ドデイスクのプレス成形のように、一対の案内溝
パターンをもつ押し型で加熱プレス成形して案内
溝を形成する方法であるので、製造工程が少なく
なると同時に高精度で案内溝のパターンを形成さ
れた押し型を用うれば、容易に高精度の案内溝が
形成できるという作用がなされる。
実施例
以下、本発明の一実施例の光デイスク基板の製
造方法について、説明する。
直径170mmで高さ60mmのタングステンカーバイ
ド（WC）（組成；WC／Co／Cr3C2＝91／８／１
（wt％））の稠密な焼結体の円柱を準備し、一方
の底面を鏡面研磨した後、高周波スパツタ装置を
用いて厚み3μmの白金−イリジウム合金膜を形成
した。合金膜形成後、スパツタ膜表面を鏡面加工
した。このようにして作製した鏡面加工面をもつ
白金−イリジウム合金コーテイングタングステン
カーバイド焼結体ブロツクを２ケ準備した。その
一方のブロツクの鏡面加工表面上に幅0.8μmピツ
チ1.6μmの螺旋状で高さ0.1μmに精密加工した凸
形状部分を設けた。このようにして螺旋状の凸形
状パターンをもつ白金−イリジウム合金コーテイ
ングタングステンカーバイド焼結体ブロツクと、
鏡面加工面をもつ白金−イリジウム合金コーテイ
ングタングステンカーバイド焼結体ブロツクの２
個からなる一対の押し型１，２を作製した。
この一対の型１，２を、図に示すプレスマシン
にセツトして、あらかじめ、600℃に加熱した組
成がSiO2 68wt％，K2Ｏ 8wt％，B2O3 11wt
％，BaO 2wt％，Na2Ｏ 10wt％の光学ガラス
の塊状物（直径150.0mm、厚み4.3mmの円板形状）
３を700℃に加熱した一対の型の間に設置し、圧
力２Kg・cm2で上下に位置した一対の型のすきまが
4.0mmになるようにして２分間保持したのち、円
板形状ガラス材を型にはさんだまま450℃まで10
分間で冷却して、成形後のガラス円板をとり出し
た。
得られたガラス円板はプレス型の中心にあらか
じめ用けた凸部によつてドーナツ形状に成形され
ていた。この中心の凸部を基準に直径150.0mmに
なるように成形後のガラス円板の側面を切断加工
して、案内溝をもつ光デイスクの円板形状のガラ
ス基板を作製した。
得られたガラス基板の表面の案内溝がプレス型
そのまま転写されて、精度高く形成されているか
どうかを成形後のガラス円板表面を走査型電子顕
微鏡を用いて評価した。その結果、上述のプレス
条件で成形して作製したガラス円板は、正確に幅
0.80±0.02μm、ピツチ1.60±0.02μmで高さ0.10±
0.02μmの凹部分として案内溝が形成されている
ことがわかつた。
ただし、この案内溝の形状が適切なものかどう
かは不明であるが、本プレス方法を用い、本プレ
ス条件を用うれば、押し型を正確に転写したガラ
ス円板が作製できるので、光デイスクの案内溝と
して最適のパターンをもつプレス押し型を使え
ば、容易に良好な案内溝をもつ光デイスク用ガラ
ス基板が製造できることがわかる。
なお、押し型の母材として、上述の実施例のか
わりにタングステンカーバイド焼結体のかわり
に、高密度のチタンカーバイド焼結体（組成；
TiC／Ni／TaC＋Cr3C2＝83／15／2wt％）を用
いた場合も同様の結果を得ることができた。
また、型表面に設ける白金系合金膜として、別
の組成の白金−イリジウム合金や白金−ロジウム
合金、白金−オスミウム合金などを用いた場合も
押し型の作製のための加工性がやや異なるが、同
様の方法で同様のガラス基板が得られた。以上の
実施例の結果を表１にまとめて示す。
INDUSTRIAL APPLICATION FIELD The present invention relates to a method for manufacturing an optical disk substrate used for optical disks (photothermal recording disks and magneto-optical disks), which are high-density memory media that can be read without contact. Conventional Technology One of the important points for optical disks is to ensure reliability during long-term storage, but this requires the use of a substrate that does not deform as the disk substrate.
It is desirable to use a glass substrate. When using glass as a substrate, it has conventionally been common to provide guide grooves by a photopolymer method using an ultraviolet curing resin. In addition, recently, a method has been developed that uses a further improved reactive etching method to form uneven guide grooves directly on a glass substrate (Kenji Ota et al., Vacuum, 28 (2), 77 (1985)). The steps for producing guide grooves on a typical glass substrate are shown below. After cleaning the glass disk, a positive resist is applied to a thickness of 200 to 300 nm using a spin coater, prebaked, and then an argon laser beam is focused and the laser beam is circularly rotated while rotating the disk at a constant speed. By moving the plate in the radial direction, the width is approximately
Record a spiral guide groove with a pitch of 0.8 μm and a pitch of 1.6 μm. Next, this guide groove is developed, and the remaining resist is then masked and reactive ion etching is performed in CHF 3 gas. After etching the glass to a depth of about 70 nm, the unnecessary resist is ashed with oxygen gas and removed, thereby creating guide grooves on the glass substrate for optical disks. Problems to be Solved by the Invention In such a process, high precision is required in the development process of the guide groove pattern on the resist, the reactive ion etching process, etc., and the process is long. The present invention has been made to overcome these drawbacks, and an object of the present invention is to provide a method for easily producing a guide groove for a glass substrate for an optical disk with extremely few steps. Means for Solving the Problems In order to solve the above-mentioned problems, the present invention heats a pair of pressing molds of a heat-resistant material provided with unevenness in the shape of guide grooves, and places a pre-heated glass between the pair of molds. A guide groove for a glass substrate for an optical disk is produced by sandwiching a lump of material, pressing it with the pair of press dies described above, and cooling it as it is to a temperature lower than the glass transition temperature of the lump of glass material. be. Effects The present invention is a method of forming guide grooves by heating and press-molding a glass material block using a press die having a pair of guide groove patterns, just like press-molding of a record disc, so the manufacturing process is reduced. At the same time, by using a press mold in which a pattern of guide grooves is formed with high precision, it is possible to easily form guide grooves with high precision. Example Hereinafter, a method for manufacturing an optical disk substrate according to an example of the present invention will be described. Tungsten carbide (WC) with a diameter of 170 mm and a height of 60 mm (composition: WC/Co/Cr 3 C 2 = 91/8/1
(wt%)) was prepared, one bottom surface was mirror-polished, and a platinum-iridium alloy film with a thickness of 3 μm was formed using a high-frequency sputtering device. After forming the alloy film, the surface of the sputtered film was mirror-finished. Two platinum-iridium alloy coated tungsten carbide sintered blocks having mirror-finished surfaces prepared in this manner were prepared. On the mirror-finished surface of one of the blocks, a precision-machined convex portion was provided in a spiral shape with a width of 0.8 μm and a pitch of 1.6 μm, and a height of 0.1 μm. In this way, a platinum-iridium alloy coated tungsten carbide sintered body block having a spiral convex pattern,
Platinum-iridium alloy coated tungsten carbide sintered block with mirror-finished surface 2
A pair of press molds 1 and 2 were produced. The pair of molds 1 and 2 were set in the press machine shown in the figure and heated to 600°C in advance so that the composition was 68wt% SiO 2 , 8wt% K 2 O, 11wt% B 2 O 3
%, BaO 2wt%, Na 2 O 10wt% optical glass lump (disk shape with diameter 150.0mm and thickness 4.3mm)
3 was placed between a pair of molds heated to 700℃, and the gap between the pair of molds placed above and below was
After keeping the glass material at 4.0 mm for 2 minutes, the disk-shaped glass material was heated to 450℃ for 10 minutes while being sandwiched between the molds.
After cooling for a few minutes, the molded glass disk was taken out. The obtained glass disk was formed into a donut shape by a convex portion previously provided at the center of the press die. The side surface of the formed glass disk was cut to have a diameter of 150.0 mm based on the central convex portion, thereby producing a disk-shaped glass substrate for an optical disk having guide grooves. The surface of the glass disk after molding was evaluated using a scanning electron microscope to determine whether the guide grooves on the surface of the obtained glass substrate were directly transferred to the press mold and formed with high precision. As a result, the glass disk formed by forming under the above-mentioned pressing conditions has an accurate width.
0.80±0.02μm, pitch 1.60±0.02μm, height 0.10±
It was found that the guide groove was formed as a concave portion of 0.02 μm. However, it is unclear whether the shape of this guide groove is appropriate, but if this pressing method and pressing conditions are used, a glass disk with an accurate transfer of the stamping die can be produced, so it is possible to make an optical disc. It can be seen that a glass substrate for optical disks with good guide grooves can be easily manufactured by using a press die with an optimal pattern for the guide grooves. In addition, as the base material for the press mold, instead of the tungsten carbide sintered body in the above-mentioned embodiment, a high-density titanium carbide sintered body (composition;
Similar results were obtained when TiC/Ni/TaC+Cr 3 C 2 =83/15/2wt%) was used. Furthermore, when a platinum-iridium alloy, platinum-rhodium alloy, platinum-osmium alloy, etc. with a different composition is used as the platinum-based alloy film provided on the mold surface, the processability for making the press mold will be slightly different. A similar glass substrate was obtained in a similar manner. The results of the above examples are summarized in Table 1.
【表】
発明の効果
以上に述べてきたように、本発明によれば、極
めて容易に高精度な案内溝をもつた光デイスク用
のガラス基板の製造が可能になり、かつ、製造工
程数も少なくすむので、光デイスク用ガラス基板
の低コスト化が可能となる。[Table] Effects of the Invention As described above, according to the present invention, it is possible to extremely easily manufacture a glass substrate for an optical disk having highly accurate guide grooves, and the number of manufacturing steps can be reduced. Since the number of glass substrates can be reduced, it is possible to reduce the cost of the glass substrate for optical disks.
図は本発明の一実施例で用いたプレスマシンの
概略図である。
１，２……押し型、３……原料光学ガラス円
板、４，５……押し型加熱ヒータ、６……原料ガ
ラス円板供給治具、７……上型用ピストンシリン
ダー、８……下型用ピストンシリンダー、９……
原料ガラス円板予備加熱トンネル炉、１０……成
形デイスクとり出し口。
The figure is a schematic diagram of a press machine used in an embodiment of the present invention. 1, 2...Press mold, 3...Raw material optical glass disc, 4, 5...Press mold heater, 6...Raw material glass disc supply jig, 7...Piston cylinder for upper mold, 8... Piston cylinder for lower mold, 9...
Raw material glass disk preheating tunnel furnace, 10...molding disk outlet.
Claims (1)
し型であり、かつ金属Coを結合材として添加し
たタングステンカーバイド焼結体あるいは金属
Niを結合材として添加したチタンカーバイド焼
結体を母材とし白金系貴金属合金のコーテイング
膜を設けた構造の押し型を加熱し、これらの一対
の間にあらかじめ加熱したガラス材料塊状物をは
さみ、前記一対の押し型でプレスし、その状態で
前記ガラス材料塊状物のガラス転移温度より低い
温度まで冷却することを特徴とする光デイスク基
板の製造方法。1 A pair of pressed molds with guide groove-shaped unevenness on the mold surface, and a tungsten carbide sintered body or metal to which metal Co is added as a binder.
A pressing mold having a structure of a titanium carbide sintered body with Ni added as a binder as a base material and a coating film of a platinum-based noble metal alloy is heated, and a pre-heated glass material block is sandwiched between a pair of these molds. A method for manufacturing an optical disk substrate, characterized in that the glass material block is pressed with the pair of pressing dies and cooled in that state to a temperature lower than the glass transition temperature of the glass material lump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60241930A JPS62100429A (en) | 1985-10-29 | 1985-10-29 | Production of optical disk substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60241930A JPS62100429A (en) | 1985-10-29 | 1985-10-29 | Production of optical disk substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62100429A JPS62100429A (en) | 1987-05-09 |
| JPH0573700B2 true JPH0573700B2 (en) | 1993-10-14 |
Family
ID=17081680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60241930A Granted JPS62100429A (en) | 1985-10-29 | 1985-10-29 | Production of optical disk substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62100429A (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2641192B2 (en) * | 1986-03-04 | 1997-08-13 | キヤノン株式会社 | Method for manufacturing glass optical element having fine pattern on surface |
| DE3719200A1 (en) * | 1987-06-09 | 1988-12-29 | Ibm Deutschland | OPTICAL DISK AND METHOD FOR THEIR PRODUCTION |
| JPS6426807A (en) * | 1987-07-23 | 1989-01-30 | Canon Kk | Production of light guide |
| JP2577055B2 (en) * | 1988-07-13 | 1997-01-29 | ホーヤ株式会社 | Glass mold |
| JP2925553B2 (en) * | 1988-08-15 | 1999-07-28 | ホーヤ株式会社 | Glass press mold |
| JPH0444640A (en) * | 1990-06-11 | 1992-02-14 | Matsushita Electric Ind Co Ltd | Stationary magnetic disk and production thereof |
| JP4228801B2 (en) * | 2003-06-30 | 2009-02-25 | ソニー株式会社 | Recording medium substrate, recording medium, manufacturing method thereof, and recording medium substrate molding apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60176930A (en) * | 1984-02-21 | 1985-09-11 | Matsushita Electric Ind Co Ltd | Mold for press molding glass lens |
-
1985
- 1985-10-29 JP JP60241930A patent/JPS62100429A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62100429A (en) | 1987-05-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3565784B2 (en) | Glass substrate molding die and glass substrate manufacturing method | |
| JPH0736239B2 (en) | Optical storage disk manufacturing method and manufacturing apparatus | |
| US4953385A (en) | Information storage stamper and method of manufacturing disks using the same | |
| JPH0573700B2 (en) | ||
| JP2002226219A5 (en) | ||
| JPS63153747A (en) | Production of optical recording medium | |
| US7811077B2 (en) | Stamper, imprinting method, and method of manufacturing an information recording medium | |
| TW480475B (en) | Recording medium and process for manufacturing the medium | |
| JPS62180541A (en) | Stamper for injection molding | |
| JP2507034B2 (en) | Original plate for information storage disk and method for manufacturing substrate for information storage disk | |
| JPH0261837A (en) | Stamper for injection molding | |
| JPH0243380A (en) | Metallic mold for forming optical disk substrate and production thereof | |
| JPH02235620A (en) | Substrate forming roller for optical information recording media | |
| JPH0758564B2 (en) | Original plate for information storage disk and method for manufacturing substrate for information storage disk | |
| JPH05298745A (en) | Original plate for information memory disk and manufacture of substrate for the same disk | |
| JPH0758563B2 (en) | Information storage original plate and disk manufacturing method using the same | |
| JP3681103B2 (en) | Glass substrate manufacturing method and glass substrate manufacturing apparatus | |
| JP2000311397A (en) | Substrate molding die and substrate manufacturing method | |
| JP3018470B2 (en) | Manufacturing method of stamper | |
| TWI262497B (en) | Preparation method of disc master | |
| JPS63302440A (en) | Manufacture of stamper for optical disk | |
| JPH09123223A (en) | Injection mold equipment and resin molding process | |
| JPH11291292A (en) | Mold | |
| JPH06342534A (en) | Optical disk stamper and manufacturing method thereof | |
| JP3087136B2 (en) | Stamper master |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |