JPH0575914B2 - - Google Patents
Info
- Publication number
- JPH0575914B2 JPH0575914B2 JP24703386A JP24703386A JPH0575914B2 JP H0575914 B2 JPH0575914 B2 JP H0575914B2 JP 24703386 A JP24703386 A JP 24703386A JP 24703386 A JP24703386 A JP 24703386A JP H0575914 B2 JPH0575914 B2 JP H0575914B2
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- alloy plating
- nickel
- rotor
- screw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007747 plating Methods 0.000 claims description 26
- 239000012530 fluid Substances 0.000 claims description 25
- 229910045601 alloy Inorganic materials 0.000 claims description 15
- 239000000956 alloy Substances 0.000 claims description 15
- XLLNQZKHYSHONN-UHFFFAOYSA-N [Sn].[P].[Ni] Chemical compound [Sn].[P].[Ni] XLLNQZKHYSHONN-UHFFFAOYSA-N 0.000 claims description 4
- 229910000521 B alloy Inorganic materials 0.000 claims description 3
- 229910001096 P alloy Inorganic materials 0.000 claims description 3
- QDWJUBJKEHXSMT-UHFFFAOYSA-N boranylidynenickel Chemical compound [Ni]#B QDWJUBJKEHXSMT-UHFFFAOYSA-N 0.000 claims description 3
- 230000007797 corrosion Effects 0.000 description 11
- 238000005260 corrosion Methods 0.000 description 11
- 239000007789 gas Substances 0.000 description 7
- 229910009038 Sn—P Inorganic materials 0.000 description 6
- 229910018104 Ni-P Inorganic materials 0.000 description 5
- 229910018536 Ni—P Inorganic materials 0.000 description 5
- 230000007547 defect Effects 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 229910001018 Cast iron Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 2
- ACVSDIKGGNSZDR-UHFFFAOYSA-N [P].[W].[Ni] Chemical compound [P].[W].[Ni] ACVSDIKGGNSZDR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- IGLTYURFTAWDMX-UHFFFAOYSA-N boranylidynetungsten nickel Chemical compound [Ni].B#[W] IGLTYURFTAWDMX-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2201/00—Metals
- F05C2201/04—Heavy metals
- F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
- F05C2201/0466—Nickel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2201/00—Metals
- F05C2201/04—Heavy metals
- F05C2201/0469—Other heavy metals
- F05C2201/0493—Tin
Landscapes
- Applications Or Details Of Rotary Compressors (AREA)
- Compressor (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、例えば、真空ポンプなどの流体機械
に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a fluid machine such as a vacuum pump.
（従来の技術）
流体機械の圧縮機、真空ポンプなどには往復動
式のものと回転式のものとがある。(Prior Art) There are two types of fluid machine compressors, vacuum pumps, etc.: reciprocating type and rotary type.
往復動式のものは、シリンダ内のピストンを往
復動させて、気体を吸気口からシリンダ内に吸引
し、さらに吸引した気体を吐出口から圧送させる
ようにしたものであり、また、回転式のものに
は、ベーンを取付けたロータをシリンダ内で回転
させて気体の吸入と圧送を行なうようにしたもの
と、一対のロータを互いに位相をずらした状態で
回転させて気体の吸入と圧送を行なうようにした
ものとがある。 The reciprocating type moves the piston inside the cylinder back and forth to suck gas into the cylinder from the intake port, and then force-feeds the sucked gas from the discharge port. There are two types of rotors, one in which a rotor with vanes attached is rotated within a cylinder to suck in and pump gas, and the other is to rotate a pair of rotors out of phase with each other to suck in and pump gas. There are some that are made like this.
そして、従来、流体機械のシリンダ、ピスト
ン、ケーシング、ロータなどの流体と接触する部
分は、鋳鉄（FC）で作られている。 Conventionally, parts of fluid machines that come into contact with fluid, such as cylinders, pistons, casings, and rotors, are made of cast iron (FC).
（発明が解決しようとする問題点）
しかしながら、従来の流体機械では、腐食性の
高い気体や水分を含んだ気体を扱つた場合、シリ
ンダ、ピストン、ケーシング、ロータなどの流体
との接触部が腐食し、性能が低下したり故障した
りするという問題点があつた。(Problem to be solved by the invention) However, in conventional fluid machines, when handling highly corrosive gases or gases containing moisture, parts that come into contact with the fluid, such as cylinders, pistons, casings, and rotors, corrode. However, there were problems with performance deterioration and breakdowns.
また、流体との接触部を耐腐食性の高い素材で
製作して腐食させないようにするとコストが高く
なるという問題点があつた。 Another problem is that if the parts that come into contact with the fluid are made of a highly corrosion-resistant material to prevent corrosion, the cost will increase.
本発明は、以上の問題点に鑑みてなされたもの
で、流体機械の流体との接触部を腐食させないよ
うにすることを目的とする。 The present invention has been made in view of the above problems, and an object of the present invention is to prevent the parts of a fluid machine that come into contact with fluid from corroding.
（問題点を解決するための手段）
以上の問題点を解決し目的を達成するための手
段として、流体機械内の、協働して流体を給排す
る一の部材と他の部材の流体との接触部表面にニ
ツケル−すず−りんの合金めつきを施し、さらに
その上にニツケル−りん系またはニツケル−ボロ
ン系の合金めつきを施したものである。(Means for solving the problem) As a means to solve the above problem and achieve the purpose, one member and the other member that cooperate to supply and discharge fluid in a fluid machine. A nickel-tin-phosphorus alloy plating is applied to the surface of the contact portion, and a nickel-phosphorus or nickel-boron alloy plating is further applied thereon.
（作用）
まず、流体機械の流体との接触部表面にニツケ
ル−すず−りん（以下Ni−Sn−Ｐとする）の合
金めつきを施す。このNi−Sn−Ｐ合金めつきは、
生成速度が遅いため、ち密で平滑なめつきが得ら
れるものである。さらに、この上に耐腐食性の高
いニツケル−りん（以下Ni−Ｐとする）系また
はニツケル−ボロン（以下Ni−Ｂとする）系の
合金めつきを施す。(Function) First, a nickel-tin-phosphorus (hereinafter referred to as Ni-Sn-P) alloy plating is applied to the surface of the fluid-contacting part of the fluid machine. This Ni-Sn-P alloy plating is
Since the formation speed is slow, a dense and smooth plating can be obtained. Furthermore, a highly corrosion-resistant nickel-phosphorus (hereinafter referred to as Ni-P) or nickel-boron (hereinafter referred to as Ni-B) alloy plating is applied thereon.
このように、流体の接触部表面にNi−Sn−Ｐ
の合金めつきを施し、さらに、その上からNi−
Ｐ系またはNi−Ｂ系の合金めつきを施すことに
より、ピンホールなどの欠陥が少なく且つ耐腐食
性の高い表面処理が行なえるものである。 In this way, Ni-Sn-P is added to the surface of the fluid contact area.
alloy plating, and then Ni-
By applying P-based or Ni-B-based alloy plating, surface treatment with fewer defects such as pinholes and high corrosion resistance can be achieved.
（実施例）
つぎに、本発明の実施例を図面に基づいて説明
する。(Example) Next, an example of the present invention will be described based on the drawings.
第１図は、本実施例の真空ポンプ１の横断面図
を示し、第２図は、真空ポンプ１内のロータ部２
を示す縦断面図である。 FIG. 1 shows a cross-sectional view of the vacuum pump 1 of this embodiment, and FIG. 2 shows a rotor section 2 in the vacuum pump 1.
FIG.
真空ポンプ１は、筒状のケーシング３と、該ケ
ーシング３の両端を吸込側のカバー４と吐出側の
カバー５とで覆つて形成される真空室６と、真空
室６の内部に、ベアリング７，８，９で軸１０，
１１の部分を回転自在に支持されたスクリユー雄
ロータ１２およびスクリユー雌ロータ１３とで大
略構成される。 The vacuum pump 1 includes a cylindrical casing 3, a vacuum chamber 6 formed by covering both ends of the casing 3 with a suction side cover 4 and a discharge side cover 5, and a bearing 7 inside the vacuum chamber 6. , 8, 9 for axis 10,
It is roughly composed of a screw male rotor 12 and a screw female rotor 13, which are rotatably supported at a portion 11.
吸込側カバー４には、吸込口４ａが設けられて
あつて、図示しない被真空体と真空室６とを連通
している。吐出側のカバー５内にはモータ等の駆
動源の駆動軸１４に電磁クラツチ１５を介して軸
１０が結合しており、さらに、軸１０と軸１１と
はスクリユー雄ロータ１２とスクリユー雌ロータ
１３を同調させるためのタイミングギヤ１６によ
り連結されている。なお、１７は吐出側カバー５
に固定されているオイルシールである。吐出側カ
バー５の真空室６側には、吐出ポート１８が形成
されてあつて、吐出通路１９に接続されている。 The suction side cover 4 is provided with a suction port 4a, which communicates the vacuum chamber 6 with an object to be evacuated (not shown). Inside the cover 5 on the discharge side, a shaft 10 is coupled to a drive shaft 14 of a drive source such as a motor via an electromagnetic clutch 15, and the shafts 10 and 11 are connected to a screw male rotor 12 and a screw female rotor 13. They are connected by a timing gear 16 for synchronizing the two. In addition, 17 is the discharge side cover 5
This is an oil seal that is fixed to the A discharge port 18 is formed on the vacuum chamber 6 side of the discharge side cover 5 and is connected to a discharge passage 19 .
スクリユー雄ロータ１２とスクリユー雌ロータ
１３のそれぞれの外周には、ロータ歯１２ａ，１
２ｂとして、例えば、らせん形のスクリユー歯が
数条形成されており、このスクリユー歯は相互に
かみ合つている。そして、このスクリユー雄ロー
タ１２とスクリユー雌ロータ１３が回転させられ
ることにより気体が吸込口４ａから真空室６内に
入り、真空室６内で圧縮されて吐出通路１９から
圧送される。 On the outer periphery of each of the screw male rotor 12 and the screw female rotor 13, rotor teeth 12a, 1
As 2b, for example, several spiral screw teeth are formed, and these screw teeth mesh with each other. When the screw male rotor 12 and the screw female rotor 13 are rotated, gas enters the vacuum chamber 6 from the suction port 4a, is compressed within the vacuum chamber 6, and is pumped out from the discharge passage 19.
ここで、本発明の要部であるめつき処理につい
て説明する。 Here, the plating process, which is the main part of the present invention, will be explained.
ケーシング３およびスクリユー雄ロータ１２、
スクリユー雌ロータ１３は、鋳鉄（FC）製であ
り、ケーシング３の内側表面３ａおよびスクリユ
ー雄ロータ１２とスクリユー雌ロータ１３の外表
面１２ａ，１３ａには、ち密でピンホールなどの
欠陥の少ないNi−Sn−Ｐの合金めつきが施され
てあつて、さらにその上に耐腐食性の高いNi−
Ｗ−Ｐ（ニツケル−タングステン−りん）または、
Ni−Ｗ−Ｂ（ニツケル−タングステン−ボロン）
の合金めつきが施されている。この合金めつきの
表面処理状態を第３図に模式図的に示すと、流体
の接触部表面２０にNi−Sn−Ｐの合金めつき２
１が施され、その上にNi−Ｗ−ＰまたはNi−Ｗ
−Ｂの合金めつき２２が施されている。 casing 3 and screw male rotor 12,
The screw female rotor 13 is made of cast iron (FC), and the inner surface 3a of the casing 3 and the outer surfaces 12a and 13a of the screw male rotor 12 and the screw female rotor 13 are made of Ni--Ni, which is dense and has few defects such as pinholes. It is coated with Sn-P alloy plating, and on top of that is Ni-P, which has high corrosion resistance.
W-P (nickel-tungsten-phosphorus) or
Ni-W-B (nickel-tungsten-boron)
Alloy plating is applied. The surface treatment state of this alloy plating is schematically shown in FIG.
1 is applied, and then Ni-W-P or Ni-W
-B alloy plating 22 is applied.
なお、耐腐食性のめつきとしてNi−Ｗ−Ｐま
たはNi−Ｗ−Ｂとしたが、Ni−Ｐ系、Ni−Ｂ
系、Ni−Ｗ系であれば上記の組成以外のめつき
を用いてもよい。 In addition, although Ni-W-P or Ni-W-B was used as the corrosion-resistant plating, Ni-P type, Ni-B
Plating other than the above-mentioned composition may be used as long as it is Ni-W type or Ni-W type.
以上のように、流体の接触部にピンホールなど
の欠陥が少なく且つ耐腐食性のよい合金めつきを
施して、確実に腐食を防止することができる。 As described above, it is possible to reliably prevent corrosion by applying alloy plating that has few defects such as pinholes and has good corrosion resistance to the fluid contact portion.
本実施例では、一対のロータを用いた回転式の
真空ポンプについて説明したが、他の回転式また
は往復動式の真空ポンプおよび圧縮機にも適用し
てもよい。 In this embodiment, a rotary vacuum pump using a pair of rotors has been described, but the present invention may also be applied to other rotary or reciprocating vacuum pumps and compressors.
（発明の効果）
以上詳細に説明したように、本発明は流体の接
触部にNi−Sn−Ｐの合金めつきを施し、さらに
その上にNi−Ｐ系またはNi−Ｐ系の合金めつき
を施すようにしたため、流体機械内の流体との接
触部の腐食を確実に防止し、故障の低減および寿
命の向上が図れる。(Effects of the Invention) As explained in detail above, the present invention provides Ni-Sn-P alloy plating on the fluid contact portion, and furthermore Ni-P or Ni-P alloy plating on the fluid contact portion. As a result, it is possible to reliably prevent corrosion of the parts that come into contact with the fluid in the fluid machine, thereby reducing failures and improving the service life.
また、耐腐食性のよい素材を用いる必要がない
ため、耐腐食性にかかるコストを低減することが
できる。 Furthermore, since it is not necessary to use a material with good corrosion resistance, the cost for corrosion resistance can be reduced.
さらに、流体の接触部をめつき処理でち密で平
滑な面にしたため、流体の流体機械内での吸着が
少なくなり真空度が向上し、それにより所定真空
度到達時間が短縮できるという効果も奏する。 Furthermore, since the fluid contact area has been made into a dense and smooth surface by plating, the adsorption of fluid within the fluid machine is reduced and the degree of vacuum is improved, which has the effect of shortening the time it takes to reach a specified degree of vacuum. .
第１図は、本発明に係る真空ポンプの横断面
図、第２図は、第１図のＩ−Ｉ線断面図、第３図
は、合金めつきの表面処理を模式的に示した断面
図である。
３ａ……ケーシング内側表面（接触部表面）、
１２ａ，１３ａ……ロータ外表面（接触部表面）、
２１……Ni−Sn−Ｐ合金めつき、２２……Ni−
Ｐ系またはNi−Ｂ系合金めつき。
FIG. 1 is a cross-sectional view of a vacuum pump according to the present invention, FIG. 2 is a cross-sectional view taken along line II in FIG. 1, and FIG. 3 is a cross-sectional view schematically showing surface treatment of alloy plating. It is. 3a...Casing inner surface (contact part surface),
12a, 13a...Rotor outer surface (contact part surface),
21...Ni-Sn-P alloy plating, 22...Ni-
P-based or Ni-B-based alloy plating.
Claims (1)
の流体との接触部表面にニツケル−すず−りんの
合金めつきを施し、さらにその上にニツケル−り
ん系またはニツケル−ボロン系の合金めつきを施
したことを特徴とする流体機械。1 Nickel-tin-phosphorus alloy plating is applied to the surface of the fluid-contacting part of one member that cooperates to supply and discharge fluid with another member, and then nickel-tin-phosphorus alloy plating or nickel-boron alloy plating is applied on the surface of the fluid contacting part of one member and another member that cooperate to supply and discharge fluid. A fluid machine characterized by having been subjected to alloy plating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24703386A JPS63100284A (en) | 1986-10-17 | 1986-10-17 | fluid machinery |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24703386A JPS63100284A (en) | 1986-10-17 | 1986-10-17 | fluid machinery |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63100284A JPS63100284A (en) | 1988-05-02 |
| JPH0575914B2 true JPH0575914B2 (en) | 1993-10-21 |
Family
ID=17157410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24703386A Granted JPS63100284A (en) | 1986-10-17 | 1986-10-17 | fluid machinery |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63100284A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0877824A (en) * | 1994-09-01 | 1996-03-22 | Sentak Kk | Lighting fixture mounting device and lighting fixture |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03290086A (en) * | 1990-04-06 | 1991-12-19 | Hitachi Ltd | Screw type rotary machine, its rotor surface treatment, and dry system screw type rotary machine and its rotor surface treatment |
| US5573390A (en) * | 1993-03-25 | 1996-11-12 | Surtec Kariya Co., Ltd. | Coated sliding material |
| JP3561929B2 (en) * | 1993-08-23 | 2004-09-08 | 株式会社豊田自動織機 | Scroll compressor |
-
1986
- 1986-10-17 JP JP24703386A patent/JPS63100284A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0877824A (en) * | 1994-09-01 | 1996-03-22 | Sentak Kk | Lighting fixture mounting device and lighting fixture |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63100284A (en) | 1988-05-02 |
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