JPH0575973B2 - - Google Patents
Info
- Publication number
- JPH0575973B2 JPH0575973B2 JP63238231A JP23823188A JPH0575973B2 JP H0575973 B2 JPH0575973 B2 JP H0575973B2 JP 63238231 A JP63238231 A JP 63238231A JP 23823188 A JP23823188 A JP 23823188A JP H0575973 B2 JPH0575973 B2 JP H0575973B2
- Authority
- JP
- Japan
- Prior art keywords
- static pressure
- pressure bearing
- support shaft
- table support
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） この発明は振動発生機に関するものである。[Detailed description of the invention] (Industrial application field) This invention relates to a vibration generator.
（従来の技術及びその問題点）
テーブルを直交する３軸方向に振動させる振動
発生機の従来例としては、例えば特開昭62−
152580号公報を挙げることができる。この装置
は、Ｚ方向加振台上にテーブル支持軸を、Ｘ−Ｙ
平面内で移動可能に支持したものであつて、テー
ブル支持軸の内部を中空にし、この中空部に適当
数の静圧軸受を配置すると共に、これら静圧軸受
でテーブル支持軸をＸ，Ｙ，Ｚの各方向に移動可
能に支持し、静圧軸受をＸ，Ｙ各方向に加振台に
接続した構造のものである。(Prior art and its problems) As a conventional example of a vibration generator that vibrates a table in three orthogonal axes directions, for example,
Publication No. 152580 can be mentioned. This device has a table support shaft on a Z-direction vibration table,
The table support shaft is supported movably within a plane, and the inside of the table support shaft is hollow, and an appropriate number of static pressure bearings are arranged in this hollow part, and these static pressure bearings move the table support shaft in X, Y, It is supported movably in each direction of Z, and has a structure in which static pressure bearings are connected to an excitation table in each direction of X and Y.
ところで従来の上記構造の振動発生機では、上
記のようにテーブル支持軸の内側中空部に静圧軸
受を配置してあることに起因して次のような欠点
が生ずる。まず第１には、構造が複雑になつてコ
ストアツプを招くということであり、また第２に
は、中空部の存在により剛性の低下を招くという
ことである。 However, in the conventional vibration generator having the above structure, the following drawbacks arise due to the fact that the static pressure bearing is disposed in the inner hollow part of the table support shaft as described above. Firstly, the structure becomes complicated, leading to an increase in cost, and secondly, the presence of the hollow portion causes a decrease in rigidity.
この発明は上記した従来の欠点を解決するため
になされたものであつて、その目的は、構造の簡
素化が可能であると共に、充分な剛性を確保する
ことの可能な振動発生機を提供することにある。 This invention was made to solve the above-mentioned conventional drawbacks, and its purpose is to provide a vibration generator that can simplify the structure and ensure sufficient rigidity. There is a particular thing.
（問題点を解決するための手段）
そこでこの発明の振動発生機では、Ｚ軸方向の
振動台に静圧軸受を介してテーブル支持軸をＸ−
Ｙ平面内でのみ移動自在に支持し、上記テーブル
支持軸の外周部には、このテーブル支持軸をＺ軸
方向に移動可能に支持するテーブル支持軸用静圧
軸受を取着する一方、上記テーブル支持軸用静圧
軸受の相対向する一対の側部において、一方には
第１静圧軸受を、他方には第２静圧軸受をそれぞ
れ取着すると共に、上記テーブル支持軸用静圧軸
受を、上記第１静圧軸受でＸ−Ｙ平面内でのみ移
動可能に、また第２静圧軸受でＹ軸方向にのみ移
動可能に支持すべく構成し、上記第２静圧軸受を
Ｘ方向加振台に接続する一方、上記テーブル支持
軸用静圧軸受の相対向する他方の一対の側部にお
いて、一方には第１静圧軸受を、他方には第２静
圧軸受をそれぞれ取着すると共に、上記テーブル
支持軸用静圧軸受を、上記第１静圧軸受でＸ−Ｙ
平面内でのみ移動可能に、また第２静圧軸受でＸ
方向にのみ移動可能に支持すべく構成し、上記第
２静圧軸受をＹ方向加振台に接続してある。(Means for solving the problem) Therefore, in the vibration generator of the present invention, the table support shaft is connected to the vibration table in the Z-axis direction via a static pressure bearing.
A hydrostatic bearing for the table support shaft is attached to the outer periphery of the table support shaft to support the table support shaft so as to be movable only in the Y plane. At a pair of opposing sides of the hydrostatic bearing for the support shaft, a first static pressure bearing is installed on one side, and a second static pressure bearing is installed on the other side, and the hydrostatic bearing for the table support shaft is installed. , configured to be supported movably only in the X-Y plane by the first hydrostatic pressure bearing and movably only in the Y-axis direction by the second hydrostatic pressure bearing, and the second hydrostatic pressure bearing is supported movably in the X-direction. At the other pair of opposite sides of the static pressure bearing for the table support shaft connected to the shaking table, a first static pressure bearing is installed on one side, and a second static pressure bearing is installed on the other side. At the same time, the static pressure bearing for the table support shaft is connected to the first static pressure bearing in the X-Y direction.
It is possible to move only within a plane, and the second hydrostatic bearing allows
The second static pressure bearing is connected to a Y-direction vibration table.
（作用）
上記振動発生機では、テーブル支持軸の外周部
にテーブル支持軸用静圧軸受を取着し、このテー
ブル支持軸用静圧軸受を適数個の静圧軸受でＸ，
Ｙの各方向に移動可能に支持する構造を採用して
いるので、従来のように中空部内に静圧軸受を配
置する構造に比較して、その構造が簡素となる。
また中空部の存在に起因する剛性低下という不具
合も生じない。(Function) In the above vibration generator, a static pressure bearing for the table support shaft is attached to the outer periphery of the table support shaft, and this static pressure bearing for the table support shaft is connected to X,
Since the structure is supported movably in each direction of Y, the structure is simpler than the conventional structure in which a hydrostatic bearing is disposed in a hollow portion.
Further, the problem of decreased rigidity due to the presence of the hollow portion does not occur.
（実施例）
次にこの発明の振動発生機の具体的な実施例に
ついて、図面を参照しつつ詳細に説明する。(Embodiments) Next, specific embodiments of the vibration generator of the present invention will be described in detail with reference to the drawings.
第１図において、１はベースであつて、このベ
ース１上に、Ｚ軸方向（図において上下方向）の
振動発生機構２が配置されている。この振動発生
機構２は、基部３と、この基部３の軸心部の位置
において、静圧軸受４を介してＺ方向移動自在に
支持された加振台５とを有しており、基部３の周
囲に配置した励磁コイル６と、加振台５に取着し
た駆動コイル７とによつて加振台５をＺ方向に振
動し得るようになされている。 In FIG. 1, reference numeral 1 denotes a base, on which a vibration generating mechanism 2 in the Z-axis direction (vertical direction in the figure) is arranged. The vibration generating mechanism 2 includes a base 3 and a vibration table 5 supported movably in the Z direction via a static pressure bearing 4 at the axial center of the base 3. The vibration table 5 can be vibrated in the Z direction by an excitation coil 6 disposed around the vibration table 5 and a drive coil 7 attached to the vibration table 5.
上記加振台５の上部には、静圧軸受８を介して
テーブル支持軸９の下端部が支持されているが、
このテーブル支持軸９は静圧軸受８にてＺ方向に
のみ拘束され、Ｘ−Ｙ平面内で自由に移動し得る
ようになされている。上記テーブル支持軸９の外
周部には、このテーブル支持軸９をＺ方向に移動
可能に支持するテーブル支持軸用静圧軸受１０が
取着されている。なおテーブル支持軸９は断面四
角形に形成され、その上端部には、補助テーブル
１１が一体的に形成されている。 The lower end of the table support shaft 9 is supported on the upper part of the vibration table 5 via a static pressure bearing 8.
This table support shaft 9 is restrained only in the Z direction by a static pressure bearing 8, and is configured to be able to move freely within the XY plane. A table support shaft hydrostatic bearing 10 is attached to the outer circumference of the table support shaft 9 to support the table support shaft 9 so as to be movable in the Z direction. Note that the table support shaft 9 is formed to have a rectangular cross section, and an auxiliary table 11 is integrally formed at its upper end.
上記テーブル支持軸用静圧軸受１０において
は、四側部のうち、相対向する一対の側部に第１
及び第２支持杆１２，１３が固着され、第１支持
杆１２の先端部には第１静圧軸受１４が、また第
２支持杆１３の先端部には第２静圧軸受１５がそ
れぞれ接続されている。上記第１静圧軸受１４
は、その支持側１４ａがベース１に対して固定さ
れたものであつて、上記テーブル支持軸用静圧軸
受１０を、Ｚ方向には拘束するものの、Ｘ−Ｙ平
面内で移動自在に支持している。一方、第２静圧
軸受１５は、Ｖ型静圧軸受であつて、その支持側
１５ａがＸ方向加振台１６に接続され、上記テー
ブル支持軸用静圧軸受１０をＸ，Ｚ方向に対して
は拘束するものの、Ｙ方向には移動自在に支持し
ている。Ｘ方向振動発生機構１７は、上記Ｚ方向
振動発生機構２と同一構造のものであつて、基部
１８に静圧軸受１９を介してＸ方向移動自在に支
持されたＸ方向加振台１６を有し、振動発生用の
励磁コイル２０と駆動コイル２１とを備えたもの
である。そして前述の通り、Ｘ方向加振台１６に
第２静圧軸受１５の支持側１５ａが接続されてい
るのである。なおＹ方向に対する振動発生のメカ
ニズム及び各部支持構造は、第２図に示すよう
に、Ｘ方向に対するものと全く同一で、第１及び
第２静圧軸受２４，２５、Ｙ方向加振台２６、Ｙ
方向振動発生機構２７を備えたものであるため、
その詳細は説明は省略する。 In the table support shaft static pressure bearing 10, a first
A first static pressure bearing 14 is connected to the tip of the first support rod 12, and a second static pressure bearing 15 is connected to the tip of the second support rod 13. has been done. The first static pressure bearing 14
The support side 14a is fixed to the base 1, and although the static pressure bearing 10 for the table support shaft is restrained in the Z direction, it is supported movably within the XY plane. ing. On the other hand, the second static pressure bearing 15 is a V-type static pressure bearing, and its support side 15a is connected to the X-direction vibration table 16, and the table support shaft static pressure bearing 10 is Although it is restrained in both directions, it is supported so that it can move freely in the Y direction. The X-direction vibration generation mechanism 17 has the same structure as the Z-direction vibration generation mechanism 2, and includes an X-direction vibration table 16 supported on a base 18 via a static pressure bearing 19 so as to be movable in the X direction. However, it is equipped with an excitation coil 20 and a drive coil 21 for generating vibrations. As described above, the support side 15a of the second static pressure bearing 15 is connected to the X-direction vibration table 16. Note that the mechanism of vibration generation in the Y direction and the supporting structure of each part are exactly the same as those in the X direction, as shown in FIG. Y
Since it is equipped with a directional vibration generation mechanism 27,
The detailed explanation will be omitted.
上記した振動発生機では、Ｘ方向の振動に関し
ては、Ｘ方向側の第２静圧軸受１５が剛体継手と
して機能し、Ｙ方向側の第１及び第２静圧軸受２
４，２５がガイド軸受となり、この状態で、テー
ブル支持軸９はＸ方向両端部を、第１静圧軸受１
４と、Ｘ方向振動発生機構１７の静圧軸受１９と
によつて支持されることになり、一体的な振動構
造となる。この結果、剛性が向上し、またＸ方向
への動きがスムーズになる。なお上記は、Ｙ方向
に関しても全く同様である。 In the vibration generator described above, regarding the vibration in the X direction, the second static pressure bearing 15 on the X direction side functions as a rigid joint, and the first and second static pressure bearings 2 on the Y direction side function as a rigid joint.
4 and 25 serve as guide bearings, and in this state, the table support shaft 9 has both ends in the X direction connected to the first static pressure bearing 1.
4 and the static pressure bearing 19 of the X-direction vibration generating mechanism 17, resulting in an integrated vibration structure. As a result, rigidity is improved and movement in the X direction becomes smoother. Note that the above also applies to the Y direction.
一方、Ｚ方向に関しては、補助テーブル１１と
Ｚ方向加振台５とを連結する静圧軸受８が剛体継
手として機能し、上部をテーブル支持軸用静圧軸
受１０、下部をＺ方向振動発生機構２の静圧軸受
４にてそれぞれ支持された一体的な振動構造とな
り、この結果、剛性が向上すると共に、Ｚ方向へ
の動きもスムーズになる。 On the other hand, regarding the Z direction, the static pressure bearing 8 that connects the auxiliary table 11 and the Z direction vibration table 5 functions as a rigid joint, the upper part is the static pressure bearing 10 for the table support shaft, and the lower part is the Z direction vibration generation mechanism. An integrated vibrating structure supported by two hydrostatic bearings 4 is obtained, resulting in improved rigidity and smooth movement in the Z direction.
以上のように上記振動発生機では、テーブル支
持軸９の外周部にテーブル支持軸用静圧軸受１０
を取着し、このテーブル支持軸用静圧軸受１０を
適数個の静圧軸受１４，１５，２４，２５でＸ，
Ｙの各方向に移動可能に支持する構造を採用して
いるので、従来のように中空部内に静圧軸受を配
置する構造に比較して、その構造が簡素となる。
また中空部の存在に起因する剛性低下という不具
合も生じない。 As described above, in the vibration generator, the table support shaft static pressure bearing 10 is attached to the outer circumference of the table support shaft 9.
This table support shaft static pressure bearing 10 is connected to an appropriate number of static pressure bearings 14, 15, 24, 25.
Since a structure is adopted in which the support is movable in each direction of Y, the structure is simpler than the conventional structure in which a hydrostatic bearing is disposed in a hollow portion.
Further, the problem of decreased rigidity due to the presence of a hollow portion does not occur.
以上にこの発明の振動発生機の一実施例の説明
をしたが、この発明は上記実施例に限定されるも
のではなく、例えば各第２静圧軸受として、Ｖ型
静圧軸受に代えてＴ型静圧軸受を使用する等、
種々変更して実施することが可能である。また
Ｘ，Ｙ，Ｚの各方向も図示した実施例に限られ
ず、任意の方向に選択可能である。 Although one embodiment of the vibration generator of the present invention has been described above, the present invention is not limited to the above embodiment. For example, each second static pressure bearing may be replaced with a T Using type hydrostatic bearings, etc.
It is possible to implement it with various changes. Furthermore, the X, Y, and Z directions are not limited to the illustrated embodiments, and any direction can be selected.
（発明の効果）
この発明の振動発生機は上記のように構成され
たものであり、そのためこの発明の振動発生機で
は、従来よりもその構造を簡素にし、かつ充分な
剛性を確保することが可能となる。(Effects of the Invention) The vibration generator of the present invention is configured as described above, and therefore, the vibration generator of the present invention has a simpler structure than the conventional one and can ensure sufficient rigidity. It becomes possible.
第１図はこの発明の振動発生機の一実施例の概
略構成の縦断面図、第２図はその平面図である。
５……Ｚ方向加振台、９……テーブル支持軸、
１０……テーブル支持軸用静圧軸受、１４，２４
……第１静圧軸受、１５，２５……第２静圧軸
受、１６……Ｘ方向加振台、２６……Ｙ方向加振
台。
FIG. 1 is a vertical sectional view of a schematic configuration of an embodiment of a vibration generator of the present invention, and FIG. 2 is a plan view thereof. 5... Z direction vibration table, 9... Table support shaft,
10...Static pressure bearing for table support shaft, 14, 24
...First static pressure bearing, 15, 25... Second static pressure bearing, 16... X direction vibration table, 26... Y direction vibration table.
Claims (1)
振動させる振動発生機において、Ｚ軸方向の振動
台に静圧軸受を介してテーブル支持軸をＸ−Ｙ平
面内でのみ移動自在に支持し、上記テーブル支持
軸の外周部には、このテーブル支持軸をＺ軸方向
に移動可能に支持するテーブル支持軸用静圧軸受
を取着する一方、上記テーブル支持軸用静圧軸受
の相対向する一対の側部において、一方には第１
静圧軸受を、他方には第２静圧軸受をそれぞれ取
着すると共に、上記テーブル支持軸用静圧軸受
を、上記第１静圧軸受でＸ−Ｙ平面内でのみ移動
可能に、また第２静圧軸受でＹ軸方向にのみ移動
可能に支持すべく構成し、上記第２静圧軸受をＸ
方向加振台に接続する一方、上記テーブル支持軸
用静圧軸受の相対向する他方の一対の側部におい
て、一方には第１静圧軸受を、他方には第２静圧
軸受をそれぞれ取着すると共に、上記テーブル支
持軸用静圧軸受を、上記第１静圧軸受でＸ−Ｙ平
面内でのみ移動可能に、また第２静圧軸受でＸ方
向にのみ移動可能に支持すべく構成し、上記第２
静圧軸受をＹ方向加振台に接続したことを特徴と
する振動発生機。1 In a vibration generator that vibrates a table in the three orthogonal directions of X, Y, and Z, the table support shaft is supported movably only within the X-Y plane via a static pressure bearing on the vibration table in the Z-axis direction. A table support shaft static pressure bearing that supports the table support shaft movably in the Z-axis direction is attached to the outer circumference of the table support shaft, while the relative orientation of the table support shaft static pressure bearing is one side has a first
A static pressure bearing is mounted on the other side, and a second static pressure bearing is mounted on the other, and the table support shaft static pressure bearing is movable only within the X-Y plane by the first static pressure bearing, and the second static pressure bearing is mounted on the other side. The second static pressure bearing is configured to be supported movably only in the Y-axis direction, and the second static pressure bearing is
A first static pressure bearing is installed on one side and a second static pressure bearing is installed on the other side of the opposite pair of sides of the static pressure bearing for the table support shaft, which is connected to the directional vibration table. At the same time, the static pressure bearing for the table support shaft is supported so as to be movable only in the X-Y plane by the first static pressure bearing, and movable only in the X direction by the second static pressure bearing. and the second above
A vibration generator characterized by connecting a static pressure bearing to a Y-direction vibration table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63238231A JPH0287038A (en) | 1988-09-22 | 1988-09-22 | Vibration generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63238231A JPH0287038A (en) | 1988-09-22 | 1988-09-22 | Vibration generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0287038A JPH0287038A (en) | 1990-03-27 |
| JPH0575973B2 true JPH0575973B2 (en) | 1993-10-21 |
Family
ID=17027098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63238231A Granted JPH0287038A (en) | 1988-09-22 | 1988-09-22 | Vibration generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0287038A (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS497171A (en) * | 1972-05-12 | 1974-01-22 | ||
| JPS5444461A (en) * | 1977-09-14 | 1979-04-07 | Nec Corp | Generation circuit of multi-pulse |
| JPS5855836A (en) * | 1981-09-30 | 1983-04-02 | Shinken:Kk | Multidimensional vibration testing machine and coupler therefor |
-
1988
- 1988-09-22 JP JP63238231A patent/JPH0287038A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0287038A (en) | 1990-03-27 |
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| LAPS | Cancellation because of no payment of annual fees |