JPH0577466B2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention provides at least 70.63 million particles per cubic meter of air, preferably at least 176.57 million particles, more preferably at least 176.57 million particles per cubic meter of air.
This paper relates to a method for producing ultrafine water droplets containing 353.14 million or more.

[Conventional technology]

Hospitals, drug manufacturing plants, food manufacturing plants, food refrigerated rooms, laboratories, laboratories, etc. require clean gas that does not contain dust or microorganisms, and for this purpose air filters are used to supply purified air. Or,
Measures such as installing air curtains at entrances and exits are being taken.

[Problem to be solved by the invention]

However, the above method cannot obtain sufficiently purified gas, and even if an air shower room is used, the purpose cannot be fully achieved. Furthermore, LSI, super LSI manufacturing factories,
Under strict conditions such as biological drug manufacturing factories, operating rooms, precision machinery cleaning factories, sterile food manufacturing factories, refrigerator rooms, etc., where not only bacteria and viruses but also dust of 0.5μ or less are not allowed to enter. It is currently impossible to deliver ultra-clean gas on an industrial scale.

Therefore, it is widely desired in various industries to obtain such a highly purified refrigerating room, room, or factory, and the present invention was made to meet the demands of this era.

[Means to solve the problem]

The applicant has conducted extensive research into obtaining ultra-clean clean gas on an industrial scale, and discovered a phenomenon in which water droplets mixed in the air purify the air by adsorbing dust mixed in the air. Focusing on this, the water droplets are further reduced to ultra-fine water droplets of substantially 0.5 microns or less, at least 70.63 million, preferably at least 176.57 million, per cubic meter of air.
More preferably, if the air is supplied with at least 353,140,000 particles, not only fine dust particles in the air but also bacteria,
It has been found that it is possible to attach not only filamentous fungi and spores but also viruses to clean and sterilize them. In a gaseous atmosphere in which such ultrafine water droplets are suspended, not only can the atmosphere be purified, but also, quite unexpectedly, objects can become wet despite the presence of ultrafine water droplets. It has been found that this phenomenon has a remarkable effect in that this phenomenon does not occur. As a result of further investigation, we found that when normal gas was passed through a gas atmosphere containing suspended fine water droplets, the normal gas was highly purified to an ultra-clean state. We also found that it can be applied directly to rooms, departments, and other related areas.

The present invention provides a gauge pressure of 0.3 to 5.5 Kg/cm 2 , preferably 0.5 to 5.0 kg/cm ² , from a number of nozzles with a diameter of 0.2 to 8 mm, preferably 0.5 to 3 mm, provided in an injection pipe in a water injection device.
Spray water at 2.5Kg/ ^cm2 , 10-150cm from the nozzle.
A very large number of ultra-fine water droplets are generated by colliding with the separated side, and the air is blown here at a wind speed of 15 to 50 m/s.
sec, air volume ^3-3000m3 /min, particle size
Ultrafine water droplets of 0.5 microns or less per cubic meter of 70.63 million or more, preferably 176.57 million or more,
More preferably, the method for producing ultrafine water droplets is characterized by obtaining air containing 353.14 million or more.

[Effect]

In the present invention, the injection pipe in the water injection device has a large number of, for example, 30 to 1500 pieces with a diameter of 0.2 to 8 mm,
Preferably a 0.5-3 mm nozzle is provided. Water is pumped at high pressure, gauge pressure
Water is injected from each nozzle at 0.3 to 5.5 Kg/cm ² , preferably 0.5 to 2.5 Kg/cm ² , and a large amount of water is injected from 1 to 3 minutes per nozzle. .
The water collides with the side wall 10 to 150 cm away from the nozzle, generating an extremely large number of ultra-fine water droplets.
Air is pumped here at a wind speed of 15 to 50 m/sec and a flow rate of 3 to 50 m/sec.
The air is fed at a rate of 3000 m ³ /min to obtain air containing 70.63 million or more, preferably 176.57 million or more, more preferably 353.14 million or more ultrafine water droplets with a particle size of 0.5 microns or less per cubic meter.

〔Example〕

The method of the invention will now be described in detail with reference to the drawings, which illustrate some examples of apparatus for carrying out the method of the invention.

Please refer to FIG. 1 first. This device is the most basic device for implementing the present invention, and
An injection pipe 2 is provided near the wall of a water injection device 1, and a large number of water injection nozzles 3 are provided therein. It is preferable that these nozzles 3 are arranged alternately so as to be slightly shifted from the positions of the nozzles provided on the opposing sides, so that the opposing nozzles are not arranged on a straight line. The nozzle is
There are 30 to 1500 pieces, the diameter is 0.2 to 8 mm, preferably 0.5 to 3 mm, and the water gauge pressure is 0.3 to 5.5 kg/
cm ² , preferably 0.5 to 2.5 Kg/cm ² , is sprayed onto the opposite wall at a distance of 10 to 150 cm.

The jetted water collides with the opposing side surfaces and becomes ultrafine water droplets, and the inside of the water injection device 1 is filled with these ultrafine water droplets. Air is supplied into the water injection device 1 from the inlet 4 at a wind speed of about 15 to 50 m/sec, with an air volume of 3 to 3000.
The ultrafine water droplets with a particle size of 0.5 microns or less are fed at a rate of about m ³ /min, and 70.63 million or more, preferably 176.57 million or more, and more preferably 176.57 million or more per cubic meter.
The air contains 353,140,000 or more particles, and is taken out from the outlet 5. Since the air containing ultrafine water droplets leaving the outlet 5 may contain large water droplets, it is fed into the cyclone 6 from the tangential inlet 7 of the cyclone 6, large water droplets are removed, and the air is taken out from the air pipe 8. be. The extracted air containing ultrafine water droplets is sent to each chamber, returned to the water injection device, and circulated.

FIGS. 4 to 9 show an apparatus for producing gas suspended in ultrafine water droplets more efficiently and with temperature control.

In the cylindrical portion 41 of the water injection device 40, an evaporation pipe 47 of the refrigeration device is arranged. The positional relationship between the evaporation pipe 47 and the nozzle 45 may be completely shifted from each other, or may be slightly shifted from each other, and the water from the injection nozzle 45 may be sprayed perpendicularly to the evaporation pipe 47 in a spray state. It is located in Approximately 30 to 1500 nozzles are provided, and the diameter is 0.2 to 1,500.
8mm, preferably 0.5-3mm, water at gauge pressure 0.3
~5.5Kg/ ^cm2 , preferably 0.5-2.5Kg/ ^cm2 , and the amount of water is injected at a rate of 1-3/min per nozzle. The distance from the nozzle to the side wall is 10 to 150 cm. A filtration device 48, a water tank 48, and a pump 50 are sequentially provided at the lower end of the conical portion 51 of the water injection device. Therefore, the cold water flows in the direction of arrow B, that is, the pump 50, the circulation pipe 45, and the injection pipe 4.
4. The water is circulated in the order of the cylindrical part 41, conical part 51, filtration device 48, water tank 49, and pump 50 of the water injector. Refrigerants, especially high temperature refrigerants (1℃-5℃)
circulates within the evaporation tube 47 in the direction of arrow C. The air is fed into the water injection device through the inlet 42 according to the direction of arrow A, contains fine water droplets in the water injection device, is simultaneously cooled and becomes the desired air, and is then passed through the outlet pipe 43. used for their respective purposes. A gauge pressure of 0.3 to 5.5 Kg/cm ² , preferably 0.5 to 2.5 is applied from the nozzle 45 provided in the injection pipe 44.
The evaporator tube 47 and/or the cylindrical part 4 of the refrigeration device is 10 to 150 cm away from the nozzle and injects water at Kg/cm ² .
1 (E), ultrafine water droplets are generated (at the same time, the water flow that collided with the evaporation tube 47 exchanges heat with the refrigerant passing through this tube 47 and is cooled), and the water droplets cooled down. The air in such an atmosphere is blown at a wind speed of 15 to 50 m/sec and the air volume is 3.
When the air is allowed to pass according to arrow A at a rate of ~3000m ³ /min, it contains ultrafine water droplets and exchanges heat with the cooled water droplets to cool itself, resulting in ultrafine particles of 0.5 microns or less. 1 drop of water
70.63 million pieces per cubic meter or more, preferably
The air contains 176.57 million or more, more preferably 353.14 million or more. At this time, particles larger than 0.5 microns are substantially separated by centrifugal action due to air circulation. If necessary, water can be removed using a cyclone.

FIG. 7 is a schematic diagram showing a total system for actually applying the method of the present invention to a 64 kilobit RAM mass production factory. According to the above-described process, the ultrafine water droplets suspended in the air produced by the water injection device 40 are fed into the drip removal cyclone 50 in the direction of arrow A. In other words, the gas coming out of the drip removing cyclone 50 enters the inside of the cyclone through an inlet provided tangentially to the side wall of the cyclone 50, and while circulating inside the cyclone, excess water droplets and large water droplets are removed and reduced to 0.5μ or less. A gas in which 90% or more of ultrafine water droplets are suspended is prepared and taken out from an outlet pipe provided in the center of the cyclone 50.

The ultrafine water droplets suspended in the air taken out in this way are sent to the air shower room 60 through a pipe P having a filter F to remove particles substantially larger than 0.5 microns, and further to the adjacent ultra clean room. 70 to clean the people working there. Further, a part of the air floating in ultra-fine water droplets is directly sent to the ultra-clean room 70 to introduce clean air that does not contain dust into the room, and is also used to clean silicon plates used in LSIs. The air used in the super clean room 70 is taken out from there and returned to the water injection device 40 via the pipe P and fan F, and this cycle is repeated. Using this method, it was found that the ultra-clean room was maintained in an ultra-clean state with less than 35 pieces of dust larger than 0.5 micrometers per cubic meter of space. Incidentally, tens of thousands of pieces of dust are floating in a typical factory, and this fact should show how superior the method according to the present invention is.

Further, as shown in FIGS. 8 and 9, a heat exchanger 100 is provided next to the drip removal cyclone 50,
By passing ultrafine water droplets suspended gas through this,
It can bring the air to the optimum temperature.
Heat exchanger 100 will now be described. That is, can body 1
An air discharge pipe 105 is provided in the center of the pipe body 101 in the vertical direction, and an air conduit pipe 10 provided outside the pipe body 101
It communicates with 5'. Therefore, the air from the air intake pipe 104 reaches the bottom while swirling inside the can body 101, rises from the lower part of the air discharge pipe 105, and moves in the direction of the arrow. Furthermore, an outer pipe 106 and an inner pipe 107 are provided inside the can body 101.
The lower end of each pipe 106, 107 communicates with a pump 108 provided outside the can body 101, and hot or cold water is passed through and drained from upper drain ports 109, 110. Washing water pipes 11 are installed at the upper and lower parts of the can body 101.
A large number of water injection outlets 111a, 111b, etc. are provided, and are arranged above or below the upper and lower rows of pipes 106 and 107. It is designed so that cleaning water can be sprayed towards it. Further, a drain pipe 112' is provided below the cone portion 102 so that cleaning water or drain from gas cooling inside the can can be discharged. Therefore, the air from the air intake port 104 separates dust etc. in the can body 101 by the cyclone effect, and then flows into the pipes 106, 1.
The air that has been heated or cooled to an appropriate temperature by 07 is sent out through an air discharge pipe 105. Further, the separated dust can be further washed away by passing water through the washing water pipe 111 and spraying water from the nozzles 111a, 111b, . . . .

The air treated in this way is almost completely made up of a large amount of ultra-fine water droplets of 0.5 microns or less suspended, so by treating the room with these, you can clean everything. It is.

〔Effect of the invention〕

The surface tension of the ultra-fine water droplets of 0.5 microns or less used in the method of the present invention is extremely low, and the ultra-fine water droplets easily attach to objects or dust floating in the air, and furthermore, these ultra-fine water droplets can interact with each other. The dust gathers, becomes larger, noticeably increases in mass, and is removed along with the air blowing. In particular, since this method uses ultra-fine water droplets, it is possible to remove not only extremely fine dust but also bacteria and viruses, cleaning the room both physically and biologically. This effect is achieved. Viruses have conventionally been removed using air filters, but since viruses are only 0.5 to 0.01 microns in size, it has been impossible to remove them sufficiently with air filters. Therefore, if you use the present invention to clean your room, you will be much less likely to actually experience a draft.
It is extremely suitable for use in hospitals, pharmacies, laboratories, maternity hospitals, etc.

In addition, because the method of the present invention has the feature of being free of germs, it can be used in food manufacturing factories for cleaning food and cleaning equipment, such as thawing frozen meat, salads, vegetables, fresh fish, and meat. It is also extremely suitable for use in food stores, supermarkets, etc., such as preservation of raw ham, and can also freely produce raw ham, which has been subject to restrictions due to the risk of contamination with bacteria.

[Brief explanation of the drawing]

FIG. 1 shows an embodiment of an apparatus for producing ultra-fine water droplets, FIG. 2 is a sectional view taken through the center of the apparatus shown in FIG. 1, and FIG.
4 is a cyclone of water removal droplets, FIG. 4 is a diagram illustrating another device for producing ultra-fine water droplets, FIG. 5 is a cross-sectional view of the upper part of the device in FIG. 4, and FIG.
This figure is a sectional view taken through the center of the apparatus shown in FIG. 4, and FIG. 7 schematically shows the total system when applied in an actual semiconductor manufacturing factory. Moreover, FIG. 8 is a diagram showing a heat exchanger that can be attached after the ultrafine water droplet production apparatus, and FIG. 9 is a cross-sectional view of the upper part thereof. 1,40...Water injection device, 3,45...Nozzle, 43...Ultrafine water droplet suspended gas outlet pipe, 50...
...Drop removal cyclone, 60...Air shower room, 70...Super clean room, 100...Heat exchanger.

Claims (1)

[Claims] 1. Diameters of multiple injection pipes in a water injection device
A gauge pressure of 0.3 to 5.5 Kg/cm 2 , preferably 0.5 to 2.5 Kg/cm ² from a 0.2 to 8 mm, preferably 0.5 to 3 mm nozzle.
cm ² and collides with the side 10 to 150 cm away from the nozzle to generate an ^extremely large number of ultra-fine water droplets. 7063 ultra-fine water droplets with a particle size of 0.5 microns or less per cubic meter
A method for producing ultrafine water droplets, characterized by obtaining air containing 10,000 or more, preferably 176.57 million or more, more preferably 353.14 million or more.