JPH0579605B2 - - Google Patents
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- Publication number
- JPH0579605B2 JPH0579605B2 JP62111615A JP11161587A JPH0579605B2 JP H0579605 B2 JPH0579605 B2 JP H0579605B2 JP 62111615 A JP62111615 A JP 62111615A JP 11161587 A JP11161587 A JP 11161587A JP H0579605 B2 JPH0579605 B2 JP H0579605B2
- Authority
- JP
- Japan
- Prior art keywords
- superconducting material
- oxide superconducting
- oxygen
- fluorine
- added
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Description
【発明の詳細な説明】
「発明の利用分野」
本発明は酸化物超電導（超伝導ともいうがここ
では超電導という）材料に関する。DETAILED DESCRIPTION OF THE INVENTION Field of Application of the Invention The present invention relates to oxide superconducting (also referred to as superconducting, but hereinafter referred to as superconducting) materials.
本発明は、酸化物超電導材料の表面を用いるデ
イバイスにおいて、特に重要な表面近傍の物性の
改良を施さんとするものである。さらにバルク
（内部）利用の超電導マグネツト等への応用を図
る酸化物超電導材料に対し、安定化、特に酸素ベ
イカンシに関する安定化を図らんとするものであ
る。 The present invention aims to improve the physical properties near the surface, which are particularly important in devices using the surface of an oxide superconducting material. Furthermore, the present invention aims to stabilize oxide superconducting materials intended for use in bulk (internal) superconducting magnets, etc., particularly with respect to oxygen vacancy.
「従来の技術」
最近、酸化物超電導材料が注目されている。こ
れはIBMチユーリツヒ研究所においてなされた
Ba−La−Cu−Ｏ系の酸化物超電導材料の開発に
その端を発している。これに加えて、イツトリユ
ーム系の酸化物超電導材料も知られ、液体窒素温
度での固体電子デイバイスの応用の可能性が明ら
かになつた。"Prior Art" Recently, oxide superconducting materials have been attracting attention. This was done at the IBM Zurich Research Institute
Its origins lie in the development of Ba-La-Cu-O-based oxide superconducting materials. In addition, yttrium-based oxide superconducting materials have become known, and their potential for application in solid-state electronic devices at liquid nitrogen temperatures has become clear.
他方、Nb3Ge等の金属を用いた超電導材料が
これまでによく知られている。そしてこの金属の
超電導材料を用いて、ジヨセフソン素子等の固体
電子デイバイスを構成させる試みがなされてい
る。 On the other hand, superconducting materials using metals such as Nb 3 Ge are well known. Attempts have been made to construct solid-state electronic devices such as Josephson devices using this metallic superconducting material.
この金属を用いたジヨセフソン素子は十数年の
研究によりほぼ実用化が近くなつた。しかし、こ
の超電導体はTco（電気抵抗が零となる温度）が
23Kときわめて低く、液体ヘリユームを用いなけ
ればならず、実用性は十分ではない。 After more than ten years of research, Josephson devices using this metal are almost ready for practical use. However, this superconductor has a Tco (temperature at which electrical resistance becomes zero)
The temperature is extremely low at 23K, and liquid helium must be used, so it is not practical.
他方、この金属の超電導材料は、材料のすべて
が金属であるため、その材料の成分を表面におい
ても、また内部（バルク）においてもまつたく均
一に作ることができる。 On the other hand, since this metallic superconducting material is made entirely of metal, the components of the material can be made uniform both on the surface and in the interior (bulk).
「従来の問題点」
しかし、最近注目されている酸化物超電導材料
は、その特性を調べていくと、表面近傍（表面よ
り概略200Åまでの深さ）が内部に比べて特性の
劣化（信頼性の低下）がおきやすいことがわかつ
た。``Conventional problems'' However, when investigating the properties of oxide superconducting materials, which have been attracting attention recently, it was found that the properties near the surface (approximately 200 Å deep from the surface) deteriorated compared to the inside (reliability). It was found that a decrease in
その原因として、酸化物超電導材料における酸
素が、表面近傍においてはきわめて容易に脱気し
てしまうことが判明した。さらに真空中で250〜
500℃で加熱すると、内部の酸素すら容易に脱気
し、必要以上に酸素ベイカンシ（原子レベルにお
ける原子が正規の配置より抜け出るあなを空口ま
たはベイカンシという）を発生させてしまうこと
が判明した。この酸素が理想状態にあるかまたは
不足状態にあるかは、その材料にとつて、超電導
特性を有せしめ得るか、または単に常電導特性を
有するにすぎないかの根本的な問題であることが
判明した。 It has been found that the reason for this is that oxygen in the oxide superconducting material is extremely easily degassed near the surface. Further in vacuum 250~
It was discovered that when heated to 500℃, even the oxygen inside easily degassed, creating more oxygen vacancies than necessary. Whether this oxygen is in an ideal state or in a deficient state is the fundamental question of whether the material can have superconducting properties or merely normal conducting properties. found.
本発明はこのため、この酸化物超電導材料の表
面または表面近傍においても、また内部において
も、超電導特性を有せしめ、さらに理想状態の酸
素ベイカンシの濃度を有し、耐熱性、耐プロセス
性（真空中の保存でも安定である等）を有すべく
なされたものである。 For this reason, the present invention provides superconducting properties on or near the surface of this oxide superconducting material, as well as inside the material, and also has an ideal oxygen vacancy concentration, heat resistance, process resistance (vacuum resistance), etc. It was designed to be stable even when stored inside a container.
「問題を解決する手段」
本発明は、酸化物超電導材料中にハロゲン元素
を添加せしめ、酸素ベイカンシの一部または全部
に充填し相殺せしめんとする。特にこの酸素ベイ
カンシをある程度を有し、Tcoの最も高い超電導
特性を有する状態でこのベイカンシに対し弗素等
のハロゲン元素を添加し、埋めることにより、こ
の分子がペロブスカイト構造をより安定にするこ
とが可能である。その結果、耐熱性、耐プロセス
性を有し、特に表面面積の大きい薄膜材料に対し
て有効である。本発明はイオン注入法等の方法に
よりハロゲン元素特に弗素を添加するとともに、
これら全体を熱処理せしめ、添加された弗素を適
正な原子配置に配設せしめる。"Means for Solving the Problem" According to the present invention, a halogen element is added to an oxide superconducting material, and the halogen element is filled into part or all of the oxygen vacancy to offset it. In particular, by adding a halogen element such as fluorine to this vacancy in a state where it has a certain degree of oxygen vacancy and has the highest Tco superconducting property and filling it, it is possible for this molecule to make the perovskite structure more stable. It is. As a result, it has heat resistance and process resistance, and is particularly effective for thin film materials with a large surface area. In the present invention, a halogen element, particularly fluorine, is added by a method such as ion implantation, and
The entire structure is heat treated to arrange the added fluorine in a proper atomic arrangement.
本発明では、酸化物超電導材料としてタブレツ
ト構成を有するもの、また薄膜構成を有するもの
のいずれに対しても有効である。特にこれらのう
ち薄膜構成を有せしめる場合、その酸化物超電導
材料はスクリーン印刷法、スパツタ法、MBE（モ
レキユラ・ビーム・エピタキシヤル）法、CVD
（気相反応）法、光CVD法等を用いて形成させ
る。 The present invention is effective for both oxide superconducting materials having a tablet structure and those having a thin film structure. Particularly in the case of having a thin film structure among these, the oxide superconducting material can be used by screen printing method, sputtering method, MBE (Molecular Beam Epitaxial) method, CVD method, etc.
(gas phase reaction) method, optical CVD method, etc.
酸化物超電導材料の成分の１例としてここでは
（A1-xBx）yCuzOw（ｘ＝０〜１，ｙ＝2.0〜4.0好
ましくは2.5〜3.5，ｚ＝１〜４好ましくは1.5〜
3.5，Ｗ＝４〜10好ましくは６〜８を有する）を
あげる。ＡはＹ（イツトリウム），Gu（ガドリニウ
ム）、Yb（イツテルビウム）、Tb（テルビウム）、
Dy（ジスプロシウム）、Ho（ホルミウム）、Er（エ
ルビウム）、Tm（（ツリウム）、Lu（ルテチウム）、
Sc（スカンジウム）またはその他の元素周期表
ａ族の１つまたは複数種類より選ばれる。Ｂは
Ra（ラジウム）、Ba（バリウム）、Sr（ストロンチ
ウム）、Ca（カルシウム）、Mg（マグネシウム）、
Be（ベリリウム）の元素周期表ａ族より選ばれ
る。特にその具体例として（YBa2）Cu3O6〜8を
用いた。またＡとして元素周期表における前記し
た元素以外のランタニド元素またはアクチニド元
素を用い得る。 As an example of the components of the oxide superconducting material, (A 1-x Bx)yCuzOw (x=0-1, y=2.0-4.0 preferably 2.5-3.5, z=1-4 preferably 1.5-
3.5, W=4 to 10, preferably 6 to 8). A is Y (yttrium), Gu (gadolinium), Yb (ytterbium), Tb (terbium),
Dy (dysprosium), Ho (holmium), Er (erbium), Tm ((thulium), Lu (lutetium),
Selected from Sc (scandium) and one or more other elements in group a of the periodic table. B is
Ra (radium), Ba (barium), Sr (strontium), Ca (calcium), Mg (magnesium),
Selected from group a of the periodic table of elements Be (beryllium). In particular , ( YBa2 ) Cu3O6-8 was used as a specific example. Further, as A, a lanthanide element or an actinide element other than the above-mentioned elements in the periodic table of elements can be used.
本発明においては、弗素の如きハロゲン元素を
前記した酸化物超電導材料中にベイカンシの１／
100〜200％の濃度添加し、耐熱性、耐プロセス性
の向上を図るに加え、この材料中からさらに本来
材料中に存在すべき酸素の脱気を防ぐため、劣化
防止膜（パツシベイシヨン膜）をこの表面に形成
させる。 In the present invention, a halogen element such as fluorine is added to 1/2 of the vacancy in the above-mentioned oxide superconducting material.
In addition to improving heat resistance and process resistance by adding a concentration of 100 to 200%, we also add a deterioration prevention film (passivation film) to prevent the degassing of oxygen that should originally exist in the material. formed on this surface.
絶縁膜として、５〜50Åのトンネル電流を流し
得る厚さとすると、この絶縁膜の上面に他の超電
導材料を配設してジヨフセソン素子を構成せしめ
得る。 If the thickness of the insulating film is such that a tunneling current of 5 to 50 Å can flow, another superconducting material can be disposed on the top surface of the insulating film to form a Josephson element.
またパツシベイシヨン用被膜として100〜20000
Åの厚さとして、劣化防止用被膜ともし得る。 100~20000 as a coating for patushibasion.
It can also be used as a deterioration prevention coating with a thickness of 1.5 Å.
即ち、本発明は弗素の如きハロゲン元素も酸化
物超電導材料中に添加した後、これらを不活性気
体、空気または酸素中に250〜500℃例えば500℃
に加熱処理を２〜50時間例えば５時間施す。かく
することにより、イオン注入法により添加された
弗素または弗素に加えて添加された酸素を適正な
配位に配置させ得、表面をも安定な超電導材料と
し得る。このように比較的低温に設定したのはか
かる低温度において超電導材料中より脱酸素化が
おきやすく、ひいては酸素が抜ける空口（ベイカ
ンシ）中に弗素が配設されやすいためである。 That is, in the present invention, a halogen element such as fluorine is also added to an oxide superconducting material, and then these are heated in an inert gas, air, or oxygen at 250 to 500°C, for example, 500°C.
Heat treatment is performed for 2 to 50 hours, for example, 5 hours. By doing so, fluorine added by ion implantation or oxygen added in addition to fluorine can be arranged in an appropriate coordination, and the surface can also be made into a stable superconducting material. The reason why the temperature is set at such a relatively low temperature is that deoxygenation occurs more easily in the superconducting material at such a low temperature, and fluorine is more likely to be disposed in the vacancies through which oxygen escapes.
その結果、液体窒素温度に保持した際、この表
面の酸素濃度も理想状態を保持し得る。即ちパツ
シベイシヨンフイルムを作り得る。 As a result, when the temperature is maintained at liquid nitrogen temperature, the oxygen concentration on this surface can also be maintained at an ideal state. That is, it is possible to make a durable film.
「作用」
以上のごとく、これまで酸化物超電導材料の表
面近傍で原因不明で超電導状態が消えてしまうと
いう信頼性低下問題がなくなり、長期間安定に表
面の超電導状態を有効利用することができるよう
になつた。``Effect'' As described above, the problem of deterioration in reliability, where the superconducting state disappears for unknown reasons near the surface of oxide superconducting materials, has been eliminated, and the superconducting state on the surface can be effectively used stably for a long period of time. It became.
また内部にまで均一に添加することにより、そ
れ以前に得られていた超電導特性を固定できる。
超電導特性としてはTcoがより高く、かつ電流密
度のより高い状態での使用が可能であることが重
要である。しかしかかる十分に高いTco、電流密
度を得ても、これまでは真空中での放置、大電流
を流し続けることによる劣化が起きてしまう。本
発明に示すハロゲン元素を酸素ベイカンシを相殺
する程度（ベイカンシの１／100〜200％の濃度）
にハロゲン元素を添加することにより、Tcoの安
定化を図ることができた。また電流密度も
500A／cm2以上と無添加の３倍にまで高め、それ
を保存させることができた。 Furthermore, by uniformly adding it to the inside, the superconducting properties previously obtained can be fixed.
As for superconducting properties, it is important to have a higher Tco and to be able to use it at higher current densities. However, even if such sufficiently high Tco and current density are obtained, deterioration occurs due to being left in a vacuum or continuing to flow a large current. The halogen element shown in the present invention is used to an extent that offsets oxygen vacancy (concentration of 1/100 to 200% of vacancy)
We were able to stabilize Tco by adding a halogen element to. Also, the current density
We were able to increase the power to 500A/cm 2 or more, three times that without additives, and preserve it.
その結果、この表面を用いるデイバイス特にジ
ヨセフソン素子を長期間安定して高信頼性を有し
て動作させることができるようになつた。 As a result, it has become possible to operate devices using this surface, particularly Josephson devices, stably and with high reliability for a long period of time.
以下に図面に従つて本発明を説明する。 The present invention will be explained below with reference to the drawings.
「実施例 １」
第１図は本発明の実施例の製造工程およびそれ
に関する酸素濃度分布の相対特性を示す。"Example 1" FIG. 1 shows the manufacturing process of an example of the present invention and the relative characteristics of the oxygen concentration distribution related thereto.
第１図Ａでは酸化物超電導材料の一例として
YBa2Cu3O6〜8を示す。銅の成分は３またはそれ
以下になり得る。かかる超電導性材料をタブレツ
トまたは薄膜上に単結晶または多結晶構造を有し
て形成し、出発材料（第１図Ａ１）とした。 Figure 1A shows an example of oxide superconducting material.
Indicates YBa2Cu3O6-8 . _ The copper content can be 3 or less. Such a superconducting material was formed on a tablet or a thin film to have a single crystal or polycrystalline structure, and was used as a starting material (FIG. 1 A1).
これを真空装置に保持し、雰囲気を真空引きす
ると、その表面近傍１′の酸素が脱気し、概略200
Åまでの範囲の電気特性に劣化がおきてしまう。 When this is held in a vacuum device and the atmosphere is evacuated, the oxygen near the surface 1' is degassed, and approximately 200
Deterioration occurs in the electrical characteristics in the range up to 100 Å.
即ち、第１図Ａと対応した酸素濃度を第１図Ｄ
に示す。図面において、領域１は正常の酸素濃度
を有する。また領域１′は不足の領域を示す。こ
の深さは超電導材料の種類、構造、緻密さにもよ
るが、50〜1000Å、一般には約200Å程度である。 That is, the oxygen concentration corresponding to Figure 1A is shown in Figure 1D.
Shown below. In the figure, region 1 has normal oxygen concentration. Furthermore, area 1' indicates a shortage area. This depth depends on the type, structure, and density of the superconducting material, but is generally about 50 to 1000 Å, and generally about 200 Å.
これらの上面に窒化珪素膜を光CVD法（紫外
光またはレーザ光を用いて反応性気体を光により
励起して被形成面上に被膜形成をさせる）により
５〜50Å例えば20Åの厚さに形成した。さらにこ
れに対し、イオン注入を行つた。加速電圧を10〜
30KVと弱くし、酸素濃度が一定となるように添
加した。ここで熱処理を350℃で２時間行つた。
さらに本発明のハロゲン元素である弗素を加速電
圧を10〜500KVと可変し、平均添加濃度として
酸素ベイカンシの１／100〜200％例えば３×1021
cm-3ドープした。 A silicon nitride film is formed on these upper surfaces to a thickness of 5 to 50 Å, e.g. 20 Å, by optical CVD method (exciting a reactive gas using ultraviolet light or laser light to form a film on the surface to be formed). did. Furthermore, ion implantation was performed on this. Acceleration voltage 10~
The voltage was set to 30KV and added to keep the oxygen concentration constant. Here, heat treatment was performed at 350°C for 2 hours.
Furthermore, the acceleration voltage of fluorine, which is the halogen element of the present invention, is varied from 10 to 500 KV, and the average concentration of fluorine added is 1/100 to 200% of the oxygen vacancy, for example, 3×10 21
cm -3 doped.
さらにこれら全体を酸素中で250〜500℃、例え
ば350℃で加熱処理を約30分行つた。 Furthermore, the whole was heat-treated in oxygen at 250 to 500°C, for example, 350°C, for about 30 minutes.
かかる加熱処理を行うことにより、第１図Ｅに
示す如く、内部においても酸素ベイカンシに弗素
が進入し、このペロブスカイト構造の酸化物超電
導材料の構造劣化をより起きにくくさせることが
できた。 By performing such heat treatment, as shown in FIG. 1E, fluorine entered the oxygen vacancy inside the material, making it more difficult for structural deterioration of the perovskite-structured oxide superconducting material to occur.
この実施例で作られた試料を加熱状態より取り
出し、再び真空中に350℃、５時間保存してみた。 The sample prepared in this example was removed from the heated state and stored again in a vacuum at 350°C for 5 hours.
するとこの弗素の添加により超電導材料の表面
近傍およびバルクにおいて、酸素が欠乏すること
がなく、高信頼性の素子を作ることができた。 The addition of fluorine prevented oxygen depletion near the surface and in the bulk of the superconducting material, making it possible to create a highly reliable device.
「効果」
本発明に示す如く、作製した酸化物超電導材料
の表面は電子顕微鏡的にはきわめてミクロな凹部
を有し、その凹部は内部まで空〓が存在してしま
つている。そのため見掛け上表面がきわめて大き
くなつてしまう。この表面の不動態化をさせるた
め、電気陰性度の最も大きい弗素を単層に、また
散在させて、コーテイングすることは耐熱性の向
上のためきわめて有効であつた。加えて、これら
表面上およびミクロなイバカンシにハロゲン元素
を充填させることができる。それに密接した超電
導材料の改質を行う方法は、その製造工程をより
簡単にできるため、きわめて有効であつた。"Effects" As shown in the present invention, the surface of the produced oxide superconducting material has extremely microscopic recesses under an electron microscope, and the recesses have voids deep inside. Therefore, the surface becomes extremely large in appearance. In order to passivate the surface, coating with fluorine, which has the highest electronegativity, either in a single layer or in a scattered manner has been extremely effective in improving heat resistance. In addition, halogen elements can be filled on the surface and in the microscopic layers. A method of modifying superconducting materials closely related to this has been extremely effective because it can simplify the manufacturing process.
この結果、かかる弗素が添加された酸化物超電
導材料を真空中に300℃で５時間放置した。弗素
が添加されていない酸化物材料にあつては、超電
導特性がまつたくなくなつてしまつた。しかし本
発明の弗素が添加された被膜においては、Tcoを
79Kとして安定して超電導を保持していた。 As a result, the oxide superconducting material to which fluorine was added was left in vacuum at 300° C. for 5 hours. In the case of oxide materials to which fluorine is not added, the superconducting properties are no longer strong. However, in the fluorine-doped film of the present invention, Tco
It maintained stable superconductivity at 79K.
本発明において、酸化物超電導材料という言葉
を用いた。しかしその結晶構造は多結晶であつて
も、また単結晶であつてもよいことは、本発明の
技術思想において明らかである。 In the present invention, the term oxide superconducting material is used. However, it is clear from the technical idea of the present invention that the crystal structure may be polycrystalline or single crystalline.
本発明の実施例において、ハロゲン元素として
弗素の例を示した。しかしヨウ素、臭素において
も弗素と同様に添加してよい。 In the examples of the present invention, fluorine was shown as an example of the halogen element. However, iodine and bromine may also be added in the same way as fluorine.
なお、これまでは被膜を形成した後にイオン注
入法等により酸素を超電導材料に注入した。しか
し逆に、予め超電導材料の表面またはその近傍に
酸素をイオン注入法等により添加し、その後に被
膜を形成し、さらに加熱酸化処理により添加され
た酸素を超電導を構成するに適性な原子配位に配
設することも有効である。 Note that in the past, oxygen was injected into the superconducting material by ion implantation or the like after forming a film. However, on the contrary, oxygen is added to the surface of the superconducting material in advance by ion implantation, etc., then a film is formed, and then the added oxygen is heated and oxidized to form an atomic coordination suitable for forming superconductivity. It is also effective to place the
本発明において、弗素はすでに形成されてしま
つている材料に新たに加える例を示した。しかし
この超電導材料を作製するに際し、一般には酸化
イツトリウム、炭酸バリウム、酸化銅の微細粒材
料を用い、これをブレンドし焼成を繰り返し、タ
ブレツトとする。また薄膜にする場合はこのタブ
レツトをスパツタ法のターゲツトとして被形成面
に形成する。しかしかかる出発材料中にYF3，
YbF3，TbF3，LaF3を一部または全部に用いて
弗素を予め添加してもよい。またこの弗化物の替
わりに塩化物、臭素化物を用いてもよい。 In the present invention, an example is shown in which fluorine is newly added to a material that has already been formed. However, when producing this superconducting material, fine grain materials of yttrium oxide, barium carbonate, and copper oxide are generally used, which are blended and repeatedly fired to form tablets. When forming a thin film, this tablet is used as a sputtering target to form a thin film on the surface to be formed. However, such starting materials contain YF 3 ,
Fluorine may be added in advance using YbF 3 , TbF 3 or LaF 3 in part or in whole. Moreover, chloride or bromide may be used instead of this fluoride.
しかし本発明は超電導を構成するのに必要な酸
素ベイカンシを必要な濃度に作り、それに対しハ
ロゲン元素を添加することを思想としている。こ
のため、Tcoを高くするためには酸化物超電導材
料を形成した後に添加する方がより好ましい。 However, the idea of the present invention is to create the oxygen vacancy necessary to form superconductivity at the required concentration, and then add a halogen element to it. Therefore, in order to increase Tco, it is more preferable to add it after forming the oxide superconducting material.
第１図は本発明の作製方法および酸素濃度の分
布を示す。
FIG. 1 shows the manufacturing method of the present invention and the distribution of oxygen concentration.
Claims (1)
材料よりなり、該材料の表面に接して劣化防止膜
が設けられたことを特徴とする酸化物超電導材
料。 ２ 酸化物超電導材料の作製方法であつて、酸化
物超電導材料中にハロゲン元素を添加する工程
と、前記ハロゲン元素が添加された酸化物超電導
材料に接して劣化防止膜を設ける工程とを有する
ことを特徴とする酸化物超電導材料の作製方法。 ３ 酸化物超電導材料の作製方法であつて、酸化
物超電導材料の表面に接して劣化防止膜を設ける
工程と、前記劣化防止膜が設けられた酸化物超電
導材料中にハロゲン元素を添加する工程とを有す
ることを特徴とする酸化物超電導材料の作製方
法。[Scope of Claims] 1. An oxide superconducting material characterized in that it is made of a material in which halogen is added, and a deterioration prevention film is provided in contact with the surface of the material. 2. A method for producing an oxide superconducting material, comprising the steps of adding a halogen element to the oxide superconducting material, and providing a deterioration prevention film in contact with the oxide superconducting material to which the halogen element has been added. A method for producing an oxide superconducting material characterized by: 3. A method for producing an oxide superconducting material, which includes a step of providing a deterioration preventing film in contact with the surface of the oxide superconducting material, and a step of adding a halogen element into the oxide superconducting material provided with the deterioration preventing film. A method for producing an oxide superconducting material, characterized by having the following.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62111615A JPS63274657A (en) | 1987-05-06 | 1987-05-06 | Oxide superconductive material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62111615A JPS63274657A (en) | 1987-05-06 | 1987-05-06 | Oxide superconductive material |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3094823A Division JP2709379B2 (en) | 1991-04-01 | 1991-04-01 | Deterioration prevention film for oxide superconducting materials |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63274657A JPS63274657A (en) | 1988-11-11 |
| JPH0579605B2 true JPH0579605B2 (en) | 1993-11-04 |
Family
ID=14565822
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62111615A Granted JPS63274657A (en) | 1987-05-06 | 1987-05-06 | Oxide superconductive material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63274657A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2629450B1 (en) * | 1988-04-01 | 1992-04-30 | Rhone Poulenc Chimie | STABILIZED SUPERCONDUCTING MATERIALS AND PROCESS FOR OBTAINING SAME |
| DE69312199T2 (en) * | 1992-09-29 | 1997-10-30 | Canon Kk | Process for producing metal oxide and metal oxide thus obtained |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63233066A (en) * | 1987-03-20 | 1988-09-28 | Fujikura Ltd | Production of superconductive body |
| JPS63241825A (en) * | 1987-03-30 | 1988-10-07 | Fujikura Ltd | Manufacture of superconductor |
| JPS63241824A (en) * | 1987-03-30 | 1988-10-07 | Fujikura Ltd | Manufacture of superconductor |
-
1987
- 1987-05-06 JP JP62111615A patent/JPS63274657A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63274657A (en) | 1988-11-11 |
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