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JPH0580045B2 - - Google Patents
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JPH0580045B2 - - Google Patents

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Publication number
JPH0580045B2
JPH0580045B2 JP60032090A JP3209085A JPH0580045B2 JP H0580045 B2 JPH0580045 B2 JP H0580045B2 JP 60032090 A JP60032090 A JP 60032090A JP 3209085 A JP3209085 A JP 3209085A JP H0580045 B2 JPH0580045 B2 JP H0580045B2
Authority
JP
Japan
Prior art keywords
substrate
magnetic
magnetic head
zno
thermal expansion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60032090A
Other languages
Japanese (ja)
Other versions
JPS61192006A (en
Inventor
Osamu Inoe
Takeshi Hirota
Toshihiro Mihara
Mitsuo Satomi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60032090A priority Critical patent/JPS61192006A/en
Publication of JPS61192006A publication Critical patent/JPS61192006A/en
Publication of JPH0580045B2 publication Critical patent/JPH0580045B2/ja
Granted legal-status Critical Current

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  • Thin Magnetic Films (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Magnetic Heads (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、磁気ヘツドの構成の改良に関するも
のである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an improvement in the construction of a magnetic head.

従来の技術 従来、磁気ヘツドの構成として、磁気コア材料
に、軟磁性のパーマロイ・センダスト・アモルフ
アス合金・Mn−Zn−フエライト等を使用し、こ
れを基板に接合又は接着するか、基板上に蒸着・
スパツタ・CVD・メツキ等の方法で形成したも
のが用いられてきた。
Conventional technology Conventionally, magnetic heads have been constructed by using soft magnetic permalloy, sendust, amorphous alloy, Mn-Zn-ferrite, etc. as the magnetic core material, and bonding or adhering this to a substrate, or depositing it on the substrate.・
Materials formed by sputtering, CVD, plating, etc. have been used.

このような構成の磁気ヘツドでは、軟磁性材料
と基板材料の熱膨張係数が等しいか、又はその差
が極めて小さくなければ、温度変化によつて両材
料の界面に応力が生じ、亀裂発生の原因となつた
り、あるいは磁歪効果によつて軟磁性材料の磁気
特性が悪化する。このため、使用する軟磁性材料
の種類・組成による熱膨張係数に対応して、自由
に熱膨張係数を変える事のできる基板材料が必要
となり、結晶化ガラス,CaO−SrO−TiO2系セ
ラミツク基板(特開昭52−57218号公報)、
NiMnO2系セラミツク基板(特開昭53−16399号
公報)などが使用されていた。これらの基板材料
は、その組成を調整する事により、広い範囲で熱
膨張係数を選択できるものである。
In a magnetic head with such a configuration, unless the soft magnetic material and the substrate material have the same coefficient of thermal expansion, or the difference between them is extremely small, stress will be generated at the interface between the two materials due to temperature changes, causing cracks. or the magnetic properties of the soft magnetic material deteriorate due to the magnetostrictive effect. For this reason, a substrate material whose thermal expansion coefficient can be freely changed according to the type and composition of the soft magnetic material used is required, such as crystallized glass, CaO-SrO- TiO2 ceramic substrates (Japanese Unexamined Patent Publication No. 52-57218),
NiMnO 2 ceramic substrates (Japanese Unexamined Patent Publication No. 16399/1983) were used. The coefficient of thermal expansion of these substrate materials can be selected from a wide range by adjusting the composition.

発明が解決しょうとする問題点 しかしながら、結晶化ガラスやCaO−SrO−
TiO2系基板では、成分としてアルカリ金属、あ
るいはCaを含むために、使用時の環境条件、特
に湿度変化に対して化学的に不安定であり、これ
らの基板を用いて磁気ヘツドを構成した場合、耐
候・耐久性に関して問題を生じていた。一方、
NiMnO2系基板を用いた場合では、温度変化に対
する問題はないと考えられるが、MnOが空気中
で加熱されると酸化されてMn2O3になりやすい
ために、熱的安定性が充分でなく、また基板自体
に関して、焼成雰囲気を非酸化性にしなければな
らないために製造コストが高くなるという欠点が
あつた。
Problems to be solved by the invention However, crystallized glass and CaO−SrO−
Because TiO 2 -based substrates contain alkali metals or Ca as components, they are chemically unstable against environmental conditions during use, especially changes in humidity, and when these substrates are used to construct a magnetic head. However, there were problems with weather resistance and durability. on the other hand,
When using a NiMnO 2 -based substrate, there is no problem with temperature changes, but since MnO is easily oxidized to Mn 2 O 3 when heated in air, it may not have sufficient thermal stability. Moreover, since the firing atmosphere for the substrate itself must be non-oxidizing, the production cost is high.

問題点を解決するための手段 本発明は前記問題点を解決するために、岩塩型
結晶構造を持ち、複合酸化物ZnxNi1-xO(O<x
0.5)を主成分とする基板を用い、この基板上
に磁気コアとして軟磁性材料を形成した事を特徴
とする磁気ヘツドである。
Means for Solving the Problems In order to solve the above problems, the present invention has a rock salt type crystal structure and a complex oxide ZnxNi 1-x O (O<x
This magnetic head is characterized by using a substrate whose main component is 0.5) and having a soft magnetic material formed as a magnetic core on this substrate.

作 用 発明者等は研寄の結果、耐湿・耐熱性に優れた
NiOにZnOを固溶させる事により、熱膨張係数を
100〜140×10-7/℃の範囲内で調節可能な事を見
い出した。ZnOは六万晶系の結晶構造をもつが、
NiOとの固溶体ZnxNi1-xOとする事で、0<x
05の範囲内では、岩塩型結晶構造となる。
As a result of research, the inventors have developed a product with excellent moisture and heat resistance.
By dissolving ZnO in NiO, the coefficient of thermal expansion can be increased.
It has been found that the temperature can be adjusted within the range of 100 to 140×10 -7 /°C. ZnO has a hexagonal crystal structure,
By setting ZnxNi 1-x O as a solid solution with NiO, 0<x
Within the range of 05, it has a rock salt type crystal structure.

このZnxNi1-xO基板を用いて構成された磁気
ヘツドは優れた耐候・耐久特性を持ち、また基板
材料自体に関して焼成時の雰囲気を特に調整する
必要がないために製造が容易である。
A magnetic head constructed using this ZnxNi 1-x O substrate has excellent weather resistance and durability characteristics, and is easy to manufacture since there is no need to particularly adjust the atmosphere during firing regarding the substrate material itself.

実施例 以下実施例を示す。Example Examples are shown below.

試薬特級の酸化ニツケルと酸化亜鉛をそれぞれ
秤量し、湿式ボールミルにて16時間混合した後
150℃で乾燥し、NiOとZnOのモル比がNiO:
ZnO=1:0,4:1,2:1,1:1,1:
2,1:4,0:1の混合粉末を得た。この混合
粉末に10重量%の純水を加え、造粒し300Kg/cm2
の圧力で金型中で一軸加圧形成した。この形成体
をアルミナを圧力媒体としてSiCの型中に入れ、
1100℃〜1500℃の湿度で、300Kg/cm2の圧力で2
時間ホツトプレスした。得られた焼結体は、X線
回折により相の同定を、アルキメデス法により密
度測定を走査型電子顕微鏡により粒径観察を行な
い、又焼結体から5mm×5mm×10mmの試料を切り
出し、熱膨張率計により25℃〜400℃間における
熱膨張係数の測定を行なつた。その結果、X線回
折ではNiO:ZnO=1:0,4:1,2:1,
1:1の試料では岩塩型結晶構造の回折パターン
を示し、これらの焼結体は、ZnxNi1-xO(0<x
0.5)であることが確認された。一方、NiO:
ZnO=1:2,1:4の試料では岩塩型結晶構造
の回折パターンとともにZnOの回折パターンが、
NiO:ZnO=0:1の試料ではZnOの回折パター
ンがあらわれた。また密度測定結果は、NiOと
ZnOの混合化によつて変化するが、いずれの試料
においてもX線回折から求めた理論密度の99.5%
以上であつた。走査電子顕微鏡観察から焼結体の
粒径は5〜10μmであつた。熱膨張係数は第1図
に示したように、単一酸化物のNiOで140×10-7
程度と最大になり、Zn1/2Ni1/2Oで最小の100×
10-7/℃を示し、その間では連続的に変化した。
After weighing reagent-grade nickel oxide and zinc oxide, and mixing them in a wet ball mill for 16 hours,
Dry at 150℃, the molar ratio of NiO and ZnO is NiO:
ZnO=1:0, 4:1, 2:1, 1:1, 1:
A mixed powder of 2,1:4,0:1 was obtained. Add 10% by weight of pure water to this mixed powder and granulate it to 300Kg/cm 2
It was formed under uniaxial pressure in a mold at a pressure of . This formed body is placed in a SiC mold using alumina as a pressure medium,
2 at a humidity of 1100℃~1500℃ and a pressure of 300Kg/ cm2
Time hot pressed. The obtained sintered body was subjected to phase identification using X-ray diffraction, density measurement using Archimedes method, and particle size observation using a scanning electron microscope. The thermal expansion coefficient was measured between 25°C and 400°C using a dilatometer. As a result, in X-ray diffraction, NiO:ZnO=1:0, 4:1, 2:1,
The 1:1 samples showed a diffraction pattern with rock salt type crystal structure, and these sintered bodies were ZnxNi 1-x O (0<x
0.5). On the other hand, NiO:
In the samples with ZnO=1:2 and 1:4, the diffraction pattern of ZnO is
In the sample with NiO:ZnO=0:1, a ZnO diffraction pattern appeared. In addition, the density measurement results are similar to that of NiO.
Although it changes depending on the mixing of ZnO, all samples are 99.5% of the theoretical density determined from X-ray diffraction.
That's all. The grain size of the sintered body was found to be 5 to 10 μm as observed using a scanning electron microscope. As shown in Figure 1, the coefficient of thermal expansion is 140×10 -7 for single oxide NiO.
degree and the maximum, and the minimum for Zn 1/2 Ni 1/2 O is 100×
10 -7 /°C, and it varied continuously between them.

そこで熱膨張係数が120×10-7/℃であるZn1/5
Ni4/5O(ZnO:NiO=1:4)の焼結体をえら
び、切断・研磨して表面平滑度Rnax0.1μmの基板
とした。この基板と、熱膨張係数が120×10-7
℃のCoを主成分とする軟磁性アモルフアス合金
より、第2図に示すような磁気ヘツドを作成し
た。第2図中の1は基板、2は磁気ギヤツプ、3
はアモルフアス金属磁気膜、4は巻線用の窓であ
る。
Therefore, Zn 1/5 whose thermal expansion coefficient is 120×10 -7 /℃
A sintered body of Ni 4/5 O (ZnO:NiO=1:4) was selected, cut and polished to obtain a substrate with a surface smoothness R nax of 0.1 μm. This substrate has a thermal expansion coefficient of 120×10 -7 /
A magnetic head as shown in Fig. 2 was fabricated from a soft magnetic amorphous alloy containing Co as a main component at a temperature of 1.5°C. In Figure 2, 1 is the board, 2 is the magnetic gap, and 3
4 is an amorphous metal magnetic film, and 4 is a window for winding.

磁気ヘツド作成の工程を説明すると、よく洗浄
した基板の上にスパツタ装置で、SiO2を主成分
とする絶縁層を約1μmの厚さで形成し、次に軟磁
性アモルフアス合金薄膜を30μmの厚さで形成す
る。この上に基板を無機接着剤でつけて、第2図
中のA,Bをつくる。Bには5の巻き線用窓とな
る溝を形成し、また、ギヤツプ形成用ガラスを、
A,B両部分の磁気ギヤツプ形成面にスパツタで
つけ、最後にA,B部分を熱間接合する。この接
合体に巻き線をして磁気ヘツドとなす。
To explain the process of creating a magnetic head, an insulating layer mainly composed of SiO 2 is formed to a thickness of about 1 μm on a well-cleaned substrate using a sputtering device, and then a soft magnetic amorphous alloy thin film is formed to a thickness of 30 μm. to form. A substrate is attached on top of this using an inorganic adhesive to create A and B in Figure 2. In B, a groove is formed to serve as the window for winding wire 5, and a glass for gap formation is formed.
Sputter it onto the magnetic gap forming surfaces of both parts A and B, and finally hot-bond parts A and B. This bonded body is wound with wire to form a magnetic head.

このようにして作成したZn1/5Ni4/5O基板を用
いた磁気ヘツド以外に、比較のため熱膨張係数が
120×10-7/℃の結晶化ガラスおよびCaO−SrO
−TiO2系セラミツクスをそれぞれ基板として用
い、同様の方法で作成した磁気ヘツドを用意し
た。これらの三種の磁気ヘツドに対して、金属磁
性粉末を磁気記録媒体とした、いわゆる「メタル
テープ」を相対速度約3.8m/secで摺動させてヘ
ツドの出力変化・耐摩耗性・耐環境性をテストし
た。その結果、通常の環境下23℃、湿度50%では
基板の種類による磁気ヘツド特性の差は特に見ら
れなかつたが、環境条件が23℃,湿度50%では、
基板の種類による磁気ヘツド特性の差は特に見ら
れなかつたが、環境条件が23℃、湿度10%では、
結晶化ガラスおよびCaO−SrO−TiO2系セラミ
ツクスを基板とした磁気ヘツドでは、測定開始後
数時間でヘツド出力が数dB低下することが観察
された。そこでこれらの磁気ヘツドを詳しく観察
すると、基板表面上に磁気テープの金属粉が付着
し、凹凸が生じていた。一方、本発明のZn1/5
Ni4/5O基板には、このような付着は起こらず、
従つて磁気ヘツドの出力低下も生じなかつた。ま
た他の環境条件下、高温多湿、高温低湿、低温多
湿でも同様のテストを行なつたが、本発明の
Zn1/5Ni4/5O基板を用いた磁気ヘツドでは、磁気
ヘツド出力・耐摩耗性とも全く問題を生ぜず、安
定した特性を示した。一方、他の基板材料を用い
た磁気ヘツドでは前述のような出力低下や耐摩耗
性等で問題を生じた。
In addition to the magnetic head using the Zn 1/5 Ni 4/5 O substrate created in this way, we also prepared a magnetic head with a thermal expansion coefficient for comparison.
120×10 -7 /℃ crystallized glass and CaO−SrO
-Magnetic heads were prepared in the same manner using TiO 2 ceramics as the substrates. A so-called "metal tape," which uses metal magnetic powder as a magnetic recording medium, is slid against these three types of magnetic heads at a relative speed of approximately 3.8 m/sec to determine the output changes, wear resistance, and environmental resistance of the heads. was tested. As a result, under the normal environment of 23°C and 50% humidity, there were no particular differences in the magnetic head characteristics depending on the type of substrate, but when the environmental conditions were 23°C and 50% humidity,
There were no particular differences in magnetic head characteristics depending on the type of substrate, but under environmental conditions of 23°C and 10% humidity,
In magnetic heads with substrates made of crystallized glass and CaO-SrO- TiO2 ceramics, it was observed that the head output decreased by several dB within a few hours after the start of measurement. When we closely observed these magnetic heads, we found that metal powder from the magnetic tape had adhered to the surface of the substrate, creating irregularities. On the other hand, Zn 1/5 of the present invention
Such adhesion does not occur on the Ni 4/5 O substrate;
Therefore, no reduction in the output of the magnetic head occurred. Similar tests were also conducted under other environmental conditions, such as high temperature and high humidity, high temperature and low humidity, and low temperature and high humidity.
The magnetic head using the Zn 1/5 Ni 4/5 O substrate exhibited stable characteristics without any problems in magnetic head output or wear resistance. On the other hand, magnetic heads using other substrate materials have had problems such as decreased output and wear resistance as described above.

耐摩耗性の面から考えると、摩耗量の大きすぎ
る基板材料は問題があり、また結晶構造に異方性
があると、結晶方位によつて摩耗量が異なり、基
板に凹凸が生じる事が考えられる。この点から考
えても、その結晶構造が岩塩型である基板材料は
要求特性を満たしたものである。
From the perspective of wear resistance, substrate materials that wear too much are problematic, and if the crystal structure has anisotropy, the amount of wear will vary depending on the crystal orientation, causing unevenness on the substrate. It will be done. From this point of view, a substrate material whose crystal structure is a rock salt type satisfies the required characteristics.

以上の実施例では、熱膨張係数が120×10-7
℃のアモルフアス磁性薄膜を用いる場合を示した
が、軟磁性材料としてはこれに限らず、その熱膨
張係数が100×140×10-7/℃の範囲内のものであ
れば、それに応じてNiOとZnOの固溶比率を変え
る事により、最適の基板を提供する事ができるも
のである。また磁気ヘツドの作成法も実施例で述
べた方法のみに限定するものではない。
In the above example, the coefficient of thermal expansion is 120×10 -7 /
℃ is used, but the soft magnetic material is not limited to this, and as long as the thermal expansion coefficient is within the range of 100×140×10 -7 /℃, NiO By changing the solid solution ratio of ZnO and ZnO, an optimal substrate can be provided. Furthermore, the method of manufacturing the magnetic head is not limited to the method described in the embodiments.

又、本発明で用いる基板材料はZnxNi1-xOを
主成分とし、機械加工性を改善するためや、焼結
特性を改善するため、添加物を添加しても何ら問
題を生じるものではない。
Furthermore, the substrate material used in the present invention has ZnxNi 1-x O as its main component, and no problems will arise even if additives are added to improve machinability or sintering properties. .

発明の効果 本発明は、ZnxNi1-xO(0<x0.5)を主成
分とする熱膨張係数の調節された基板を用いた磁
気ヘツドであり、磁気ヘツドは磁気記録媒体との
摺動において問題を生じる事なく安定した性能を
有し、耐環境性,耐摩耗性に優れたものである。
Effects of the Invention The present invention is a magnetic head using a substrate containing ZnxNi 1-x O (0<x0.5) as a main component and having an adjusted coefficient of thermal expansion, and the magnetic head has a sliding contact with a magnetic recording medium. It has stable performance without causing any problems, and has excellent environmental resistance and abrasion resistance.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はZnxNi1-xO系材料の熱膨張係数と組
成比xの値の関係を示した図、第2図は本発明に
よる磁気ヘツドを示す図である。 1……基板、2……磁気ギヤツプ、3……アモ
ルフアス金属磁性膜、4……巻線用窓。
FIG. 1 is a diagram showing the relationship between the coefficient of thermal expansion of ZnxNi 1-x O-based material and the value of the composition ratio x, and FIG. 2 is a diagram showing a magnetic head according to the present invention. 1... Substrate, 2... Magnetic gap, 3... Amorphous metal magnetic film, 4... Winding window.

Claims (1)

【特許請求の範囲】[Claims] 1 岩塩型結晶構造を持ち、複合酸化物
ZnxNi1-xO(0<x0.5)を主成分とする基板
を用い、この基板に磁気コアとして軟磁性材料を
形成した事を特徴とする磁気ヘツド。
1 Composite oxide with rock salt type crystal structure
A magnetic head characterized by using a substrate containing ZnxNi 1-x O (0<x0.5) as a main component, and forming a soft magnetic material as a magnetic core on this substrate.
JP60032090A 1985-02-20 1985-02-20 magnetic head Granted JPS61192006A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60032090A JPS61192006A (en) 1985-02-20 1985-02-20 magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60032090A JPS61192006A (en) 1985-02-20 1985-02-20 magnetic head

Publications (2)

Publication Number Publication Date
JPS61192006A JPS61192006A (en) 1986-08-26
JPH0580045B2 true JPH0580045B2 (en) 1993-11-05

Family

ID=12349178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60032090A Granted JPS61192006A (en) 1985-02-20 1985-02-20 magnetic head

Country Status (1)

Country Link
JP (1) JPS61192006A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0330121B1 (en) * 1988-02-25 1994-06-01 Japan Energy Corporation Non-magnetic substrate of magnetic head, magnetic head and method for producing substrate
JP5649677B2 (en) * 2013-03-12 2015-01-07 株式会社東芝 Magnetoresistive element, magnetic head assembly, and magnetic recording apparatus

Also Published As

Publication number Publication date
JPS61192006A (en) 1986-08-26

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