JPH0580143B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a die repair device for a die bonder, tape bonder, etc.

[Prior Art] For example, in a die bonder, semiconductor pellets (hereinafter referred to as dies) on a wafer or dies housed in a tray are sucked one by one by a suction collet and transferred to a die position correction unit, and the die position correction device 4
A method is adopted in which the die is held from four directions by four positioning claws to correct its position, is sucked again by a suction collet, is transferred onto a lead frame, and is then bonded to the lead frame.

As a conventional die position correction device as described above, there is known, for example, the one shown in Japanese Patent Publication No. 42420/1983. This structure is shown in FIGS. 10 and 11.
FIG. 10 is a plan view, and FIG. 11 is a plan sectional view taken just below the top surface of FIG. As shown in FIG. 10, four sliders 11 are provided radially orthogonally to each other and are slidably provided on a slider guide stand 12 around the sample mounting section 10 on which the die is placed. A positioning claw 13 that projects toward the sample mounting section 10 is fixed to the slider 11 . Further, cam followers 14 are provided at the lower portions of the sliders 11, respectively. As shown in FIG. 11, a cam 15 is provided on the lower outer periphery of the slider guide table 12 and is rotated by a driving means (not shown).
is rotatably provided, and recesses are formed on the periphery of the cam 15 to correspond to the cam followers 14, respectively. And come follower 1
4 are configured to be pressed against the cam 15 by being biased by spring members 16 provided corresponding to the sliders 11, respectively.

[Problems to be Solved by the Invention] In the conventional die position correction device described above, the cam follower 14 falls into the recess of the cam 15 as the cam 15 rotates, and the four sliders 11 slide toward the center. The positioning claws 13 approach each other, and the die placed on the sample mounting section 10 is clamped by the biasing force of the spring member 16 to correct and position the die. At this time, since the die is held by the biasing force of the spring member 16, there is no variation in the holding force, and even if the shape and dimensions of the die vary, the die will not be damaged, which is convenient.

However, when the type of die changes, for example when the external dimensions become larger or smaller,
In some cases, the stroke of the positioning claws 13 in approaching and separating them was insufficient, making it impossible to clamp the die. Therefore, in the conventional die position correction device, in such a case, the positioning pawl 13 is replaced depending on the external dimensions of the die, or the cam 15 is given a concave shape that allows the stroke of the slider 11 to be sufficiently large. Therefore, methods such as changing the stroke range of the slider 11 using mechanical stopper means have been adopted. However, with these methods,
In the former case, the replacement work is troublesome, and in the latter case, there are problems in that the impact caused by the collision with the stopper means can lead to damage to the die.

An object of the present invention is to provide a die position correction device that can easily change the stroke range of the positioning pawl according to the type of die without replacing the positioning pawl or relying on stopper means. be.

[Means for Solving the Problems] The configuration of the present invention for achieving the above object includes a guide path provided along two directions orthogonal to each other, and a sample holder provided at the intersection of the guide paths. slidably used in the mounting portion and the guide path, respectively;
four sliders arranged radially around the sample placement part; four positioning claws each fixed to the slider and protruding directly above the sample placement part;
Two sets of mechanical locking means for causing two opposing sliders to move closer to or apart from each other as a set, and positioning the two sets of sliders independently, a power-driven and rotating cam, and a cam follower. a cam lever that is swingably provided, a biasing means that presses the cam follower against the outer periphery of the cam, and two sets of adjustment members that are rotatable together with the cam lever and rotatably attached to the cam lever; Two sets of adjusting means for independently rotating the two sets of adjusting members, and one end of the adjusting member and the mechanical locking means are connected, and the rocking of the cam lever is used as a forward/backward motion for the mechanical locking. a connecting member that transmits the movement to the moving means, and the mechanical engaging means converts the forward and backward movement transmitted by the connecting member into a positioning operation of the slider, and rotates the adjusting member by the adjusting means. The set of sliders is moved toward or away from each other via the mechanical locking means.

[Operation] When the adjustment member is rotated by the adjustment means, the sliders of the set are brought closer to each other or separated from each other via the mechanical engagement means. This makes it possible to change the stroke areas of the two sets of sliders separately without changing the total stroke amount itself, and since the opposing sliders in the set cooperate with each other, the opposing positions fixed to the sliders can be changed independently. The pawls can simultaneously change the area of movement towards and away from each other.

[Example] Hereinafter, an example of the present invention will be described with reference to the drawings.
FIG. 1 is a plan view showing an embodiment of the die position correction device according to the present invention, in which a table (sample placement part) 21 for correcting the die position is provided at the left end of the base member 20.
Then, the die is placed on the table 21 by a suction collet (not shown). This table 21
Positioning claws 22 to 2, which will be described later, toward the center of
5 are used radially so that the adjacent positioning claws are orthogonal to each other, and the positioning claws 2
A cover 26 is provided above the drive mechanisms 2 to 25 to cover these drive mechanisms.

2 is a plan view showing the die position correcting device shown in FIG. 1 with the cover 26 and positioning claws 22 to 25 removed, FIG. 3 is a front view of FIG. 2, and FIG. 4 is the same as that shown in FIG. Rear view, Figure 5 is a left side view, Figure 6 is a sectional view taken along line 6-6 in Figure 2, and Figure 7 is a sectional view taken along line 7-6 in Figure 2.
It is a 7-line sectional view.

As shown in FIG. 7, the table 21 is fitted into a supporter 27 fixed to the base member 20,
The die is floated by a coil spring 28, and the height can be adjusted when the die is placed on the table 21 by a suction collet (not shown). Four guide paths 29 to 32 using cross roller guides are provided radially around the table 21 along two directions orthogonal to each other with the center of the table 21 as an intersection point. These guide paths 29 to 32 are provided with four slidable sliders 33 to 36, respectively, and guide grooves 33a to 33 provided in the upper surfaces of these sliders 33 to 36
6a, as shown in FIG.
5 is fixed so as to protrude directly above the table 21.

A first support shaft 37 shown in the partial sectional view of FIG. 3 and a second support shaft 38 shown in FIG. 6 are fixed to the center of the base member 20. A first link lever 40 is swingably supported on the first support shaft 37 via a bearing 39, and a second link lever 42 is swingably supported on the second support shaft 38 via a similar bearing 41. has been done. A first connecting lever (first connecting member) 43 and a second connecting lever (second connecting member), which will be described later, are provided on the upper surface of one end of the first link lever 40 and the second link lever 42.
44 are each rotatably connected with a pin.

At the lower end of the second link lever 42 are arm parts 42a and 42b that extend on both sides (up and down in FIG. 2) around the second support shaft 38, and the arm part 42a is rotatable with the slider 33. Similarly to the slider 34, the arm portions 42b are connected by link rods 46 that are rotatably connected with pins.
As a result, when the second link lever 44 is pushed and the second link lever 42 swings counterclockwise in FIG.
move toward each other. Therefore, in this embodiment, members 42, 45, 46
corresponds to a set of mechanical locking means for moving the opposing set of sliders 34, 34 toward and away from each other for positioning operation. At this time, in order to eliminate mechanical play that occurs in the link mechanism, sliders 33 and 34 are
A tension coil spring 47 is applied to the .

On the other hand, on the outer periphery of the supporter 27, there are two arms 49a and 49 that are swingably opposed to each other via a bearing 48.
An arm member 49 is provided. Rollers 50a and 50b are rotatably supported on the arms 49a and 49b, respectively. A push rod 51 is fixed to the side surface of the slider 35, and the tip of the push rod 51 is pressed against the roller 50a by the biasing force of a tension coil spring 52 applied between the slider 35 and the base member 20. .
Similarly, the slider 35 has a push rod 53 fixed to the side surface of the slider 36, and the tip of the slider 35 is moved to the roller 50b by the biasing force of a tension coil spring 54 applied between the slider 36 and the base member 20.
is in pressure contact with. The arm member 49 is also provided with an arm 55, and the distal end of the arm 55 and the other end of the first link lever 40 are connected to each other by a link rod 56 rotatably connected with a pin. Therefore, when the first link lever 43 is pushed, the first link lever 40 rotates counterclockwise in FIG. 2, and the arm 55, that is, the arm member 49, swings and rotates clockwise. As a result, the arms 49a and 49b also swing clockwise at the same time, so that the slider 35 and the slider 36 that are in pressure contact with the arms 49a and 49b move toward the table 21 in a direction toward each other. Therefore, in this embodiment, members 40, 49, 50a, 50b, 51,
53 and 55 correspond to a set of mechanical engaging means for moving the opposing pair of sliders 35 and 36 toward and away from each other for positioning operation.

FIG. 8 is a plan view showing the drive mechanism of the first connecting lever 43 and the second connecting lever 44, and FIG. 9 is a front view of FIG. 8. Although the previously described mechanism for adjusting the die position is not shown here for simplicity, the base member 20 is attached to the main body 57 as shown in FIG.

A camshaft 58 is rotatably supported on the left side of the front wall of the main body 57. A cam 59 is fixed to the front end of the camshaft 58, and a timing pulley 60 is fixed adjacent to the cam 59.
A timing belt 62 is interposed between a timing pulley 61 fixed to the output shaft of a motor (not shown) supported by a motor, and is rotated by power driven by the motor. A cam lever 63 is swingably supported on the main body 57, and a cam follower 64 is provided at one end of the cam lever 63, and is applied to a tension coil spring (biasing means) 65 that is engaged with the main body 57 and one end of the cam lever 63. It is pressed against the outer periphery of the cam 59 by force. cam lever 6
A pin 66 is provided at the other end of 3.
Adjustment levers (adjustment members) 67 and 68 are swingably supported at 6 and are connected by pins to the first connection lever 43 and the second connection lever 44 at their lower ends, respectively. Further, adjustment screws (adjustment means) 69 and 70 supported by the cam lever 63 are provided on the upper end sides of the adjustment levers 67 and 68.
A tension coil spring 71, which is engaged between the lower side of each of 7 and 68 and the cam lever 63,
Due to the biasing force 72, the upper ends of the adjustment levers 67 and 68 are pressed against the tips of the adjustment screws 69 and 70, respectively.

Next, the effect will be explained. When the cam 59 rotates and the cam lever 63 swings clockwise in FIG. 9 due to the biasing force of the tension coil spring 65 according to its shape, the first and second connecting levers 43,
Reference numeral 44 swings the first and second link levers 40 and 42 counterclockwise in FIG. The positioned die is held from four sides by positioning claws 22 to 25 and its position is corrected. At this time, there is a slight gap (10 to 20 μm) between the die positioning claws 22 to 25.
to determine the position.

Now, if the type of die is changed and its external dimensions become larger, by rotating the adjusting screws 69, 70 and making the tips of the adjusting screws 69, 70 protrude further, the adjusting levers 67, 68 will be adjusted as shown in FIG. The first and second connecting levers 43, which respectively swing counterclockwise,
44 can be moved in the retracting direction.
This movement causes the first and second link levers 4 to
0 and 42 swing clockwise, and the sliders 33 to 36, that is, the positioning claws 22 to 25, move away from each other in the direction away from the table 21, contrary to the operating direction described above, and move the large die to the table 21. It can be adjusted so that it does not interfere when placed on top. This adjustment is performed using the sliders 33 and 34 facing each other, that is, the positioning claws 22 and 2.
One set of sliders 35 and 36, that is, one set of positioning claws 24 and 25, is connected to the first link lever 40 by an adjustment screw 69 connected to the second link lever 42.
It is possible to adjust the vertical and horizontal directions independently in order to correctly correct the position depending on the shape of the die. The positioning claws can be adjusted at the same time.

If the outer dimensions of the die become smaller, the operation described above may be completely reversed.

Even if the positions of the positioning pawls 22 to 25 are corrected in this way, the amount of movement of the cam lever 63 does not change at all, so there is no change in the total stroke of the positioning pawls 22 to 25 as they approach and leave, and both ends of the stroke Also, stoppers etc. are not used,
No impact is generated, and accidents such as damage to the die are not caused.

[Effects of the Invention] As is clear from the above description, according to the present invention, the stroke range of the positioning pawl can be easily adjusted according to the type of die without replacing the positioning pawl or relying on stopper means. Can be changed.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing an embodiment of the die position correction device according to the present invention, FIG. 2 is a plan view of FIG. 1 with the top cover removed, FIG. 3 is a front view of FIG. 2, and FIG.
The figure is a rear view of Fig. 3, Fig. 5 is a left side view, Fig. 6 is a sectional view taken along the line 6-6 of Fig. 2, and Fig. 7 is a 7 of Fig. 2.
-7 line sectional view, FIG. 8 is a plan view showing the drive mechanism of the connecting member, FIG. 9 is a front view of FIG. 8, FIG. 10 is a plan view of a conventional die position correction device, and FIG. 10 is a plan sectional view taken directly below the top surface of FIG. 10. FIG. 20: Base member, 21: Table, 22-2
5: Positioning claw, 29-32: Guide path, 33-3
6: Slider, 40: First link lever, 42:
Second link lever, 43: First link lever, 4
4: Second connection lever, 57: Main body, 59: Cam,
63: Cam lever, 65: Tension coil spring,
67, 68: Adjustment lever, 69, 70: Adjustment screw, 71, 72: Tension coil spring.

Claims (1)

[Claims] 1. A guide path provided along two directions orthogonal to each other, a sample holder provided at the intersection of the guide paths, and a sample holder provided slidably in each of the guide paths, with the sample holder provided as the center. Four sliders arranged radially, four positioning claws each fixed to the slider and protruding directly above the sample holder, and two opposing sliders work together as a set to approach each other or two sets of mechanical engagement means for separating the two sets of sliders and independently positioning them, and a power-driven rotating cam;
A cam lever including a cam follower and swingably provided; urging means for pressing the cam follower against the outer periphery of the cam;
A set of adjusting members, two sets of adjusting means for independently rotating the two sets of adjusting members, and one end of the adjusting member and the mechanical locking means are connected to each other to control the rocking of the cam lever. a connecting member that transmits the motion to the mechanical engaging means, and the mechanical engaging means converts the forward and backward motion transmitted by the connecting member into a positioning motion of the slider, and the adjusting means A die position adjusting device, characterized in that by rotating the adjustment member, the sliders of the set are brought closer to each other or separated from each other via the mechanical engagement means.