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JPH0583137B2 - - Google Patents
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JPH0583137B2 - - Google Patents

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Publication number
JPH0583137B2
JPH0583137B2 JP29676487A JP29676487A JPH0583137B2 JP H0583137 B2 JPH0583137 B2 JP H0583137B2 JP 29676487 A JP29676487 A JP 29676487A JP 29676487 A JP29676487 A JP 29676487A JP H0583137 B2 JPH0583137 B2 JP H0583137B2
Authority
JP
Japan
Prior art keywords
diaphragm
diaphragm seal
measuring
fluid
calibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP29676487A
Other languages
Japanese (ja)
Other versions
JPH01138435A (en
Inventor
Hayama Kawanami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Doryokuro Kakunenryo Kaihatsu Jigyodan
Original Assignee
Doryokuro Kakunenryo Kaihatsu Jigyodan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Doryokuro Kakunenryo Kaihatsu Jigyodan filed Critical Doryokuro Kakunenryo Kaihatsu Jigyodan
Priority to JP29676487A priority Critical patent/JPH01138435A/en
Publication of JPH01138435A publication Critical patent/JPH01138435A/en
Publication of JPH0583137B2 publication Critical patent/JPH0583137B2/ja
Granted legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、測定流体の圧力をダイヤフラムシー
ル内の封入液に伝達し、それによる測定用ダイヤ
フラムの変位を対向する固定電極との間のギヤツ
プ変位による静電容量変化として検出する方式の
差圧検出器に関し、更に詳しくは、ダイヤフラム
シールを二重構造にして、両ダイヤフラムシール
間に二次封入液の充填もしくは校正用流体の導入
を可能とし、測定流体を抜き取りなしに校正でき
るようにした二重ダイヤフラムシール式差圧検出
器に関するものである。
Detailed Description of the Invention [Industrial Application Field] The present invention transmits the pressure of a measuring fluid to a sealed liquid in a diaphragm seal, and the resulting displacement of a measuring diaphragm is applied to a gap between an opposing fixed electrode. Regarding the differential pressure detector that detects capacitance changes due to displacement, in more detail, the diaphragm seal has a double structure, and it is possible to fill the space between the two diaphragm seals with a secondary filling liquid or introduce a calibration fluid. , relates to a double diaphragm seal type differential pressure detector that allows calibration without drawing out the fluid to be measured.

[従来の技術] 測定用ダイヤフラムの変位を、それと対向した
固定電極との間のギヤツプ変位による静電容量変
化として検出する方式の差圧検出器は従来公知で
ある。この場合、測定用ダイヤフラムと固定電極
との間は誘電率が既知の高絶縁流体で満たす必要
があり、そのため測定流体を直接導入しないで封
入液を介して圧力を伝達するダイヤフラムシール
方式を採用することが多い。
[Prior Art] A differential pressure detector of a type that detects the displacement of a measuring diaphragm as a capacitance change due to a gap displacement between the measuring diaphragm and a fixed electrode facing the diaphragm is conventionally known. In this case, the space between the measurement diaphragm and the fixed electrode needs to be filled with a highly insulating fluid with a known dielectric constant, so a diaphragm seal method is used that transmits pressure through the sealed liquid without directly introducing the measurement fluid. There are many things.

このような差圧検出器は、重水を減速材として
使用している圧力管型原子炉や化学プラント等で
有害物質を使用しているライン等に用いられてい
る。
Such differential pressure detectors are used in pressure tube nuclear reactors that use heavy water as a moderator, chemical plants, and other lines that use hazardous substances.

従来の差圧検出器の一例と、それを圧力管型原
子炉における重水系計装配管に組み込んだ例を第
2図に示す。差圧検出器10は、中央に位置する
測定用ダイヤフラム12と、その両側に設ける固
定電極14a,14bと、更にそれらの外側に設
けるダイヤフラムシール16a,16bを備え、
中央の測定用ダイヤフラム12に関して対称的な
構造をなし、筐体18に組み込まれている。
FIG. 2 shows an example of a conventional differential pressure detector and an example in which it is incorporated into heavy water system instrumentation piping in a pressure tube nuclear reactor. The differential pressure detector 10 includes a measuring diaphragm 12 located at the center, fixed electrodes 14a, 14b provided on both sides of the measuring diaphragm 12, and diaphragm seals 16a, 16b provided outside of these electrodes.
It has a symmetrical structure with respect to the central measuring diaphragm 12 and is incorporated into a housing 18 .

固定電極14a,14bは、例えばガラス等の
ブロツク20の内側球面に形成した金属被覆であ
る。測定用ダイヤフラム12とダイヤフラムシー
ル16a,16bとの間にはシリコンオイル等の
封入液22a,22bが充填される。そしてダイ
ヤフラムシール16a,16bの外側から測定流
体を導入し得るように構成される。更に前記測定
用ダイヤフラム12と固定電極14a,14bか
らのリード線が伝送部24に導かれ出力信号を生
じる。筐体18の両端にはそれぞれ計器校正用の
プラグ26a,26bが設けられている。
The fixed electrodes 14a and 14b are metal coatings formed on the inner spherical surface of a block 20 made of glass, for example. A sealing liquid 22a, 22b such as silicone oil is filled between the measuring diaphragm 12 and the diaphragm seals 16a, 16b. The measuring fluid is configured to be introduced from the outside of the diaphragm seals 16a and 16b. Further, lead wires from the measurement diaphragm 12 and fixed electrodes 14a, 14b are guided to a transmission section 24 to generate an output signal. Plugs 26a and 26b for meter calibration are provided at both ends of the housing 18, respectively.

通常の動作状態においては、低圧側プロセス元
弁28と高圧側プロセス元弁30が開かれてい
て、重水タンク32に入れられている重水の圧力
と基準面器34による圧力との差圧を検出する。
In normal operating conditions, the low-pressure side process valve 28 and the high-pressure side process valve 30 are open, and the pressure difference between the pressure of heavy water contained in the heavy water tank 32 and the pressure measured by the reference level gauge 34 is detected. do.

計器の校正は次のような手順で行う。低圧側プ
ロセス元弁28よびび高圧側プロセス元弁30を
閉とする。ドレン用加圧口36にヘリウム・ボン
ベ(図示せず)を接続する。そして低圧側ベント
元弁38aと高圧側ベント元弁38bを開とし、
低圧側ドレン元弁40aと高圧側ドレン元弁40
bを開とする。ヘリウム・ボンベからのヘリウム
ガスで加圧しドレン用加圧元弁42を開として差
圧検出器10内の重水を重水ドレンタンク44へ
排出する。排出後ドレン用加圧元弁42を閉じ
る。更に低圧側と高圧側のベント元弁38a,3
8bおよびドレン元弁40a,40bを閉とす
る。
Calibration of instruments is performed in the following steps. The low pressure side process main valve 28 and the high pressure side process main valve 30 are closed. A helium cylinder (not shown) is connected to the drain pressurizing port 36. Then, open the low pressure side vent valve 38a and the high pressure side vent valve 38b,
Low pressure side drain source valve 40a and high pressure side drain source valve 40
Let b be open. It is pressurized with helium gas from a helium cylinder, and the drain pressure source valve 42 is opened to discharge the heavy water in the differential pressure detector 10 to the heavy water drain tank 44. After discharging, the drain pressure source valve 42 is closed. Furthermore, the vent source valves 38a, 3 on the low pressure side and high pressure side
8b and drain source valves 40a, 40b are closed.

そして低圧側および高圧側の校正用プラグ26
a,26bを開放し、高圧側プラグ開口部に加圧
ポンプおよびデジタルマノメータ(何れも図示せ
ず)を接続し校正を開始する。校正は差圧検出器
のゼロ校正、スパン校正であり、通常5点で行
う。
And calibration plugs 26 on the low pressure side and high pressure side
a, 26b are opened, a pressure pump and a digital manometer (both not shown) are connected to the high pressure side plug opening, and calibration is started. Calibration is zero calibration and span calibration of the differential pressure detector, and is usually performed at five points.

校正終了後、低圧側および高圧側の校正用プラ
グ26a,26bを復旧する。そして低圧側プロ
セス元弁28および高圧側プロセス元弁30を開
とし、順次ベント元弁38a,38bを開にして
ガス抜き、水張り作業を実施する。この時ベント
−ドレン連絡弁46を使用する。水張り終了後、
低圧側および高圧側のベント元弁38a,38b
を閉とし復旧が完了する。
After the calibration is completed, the low-pressure side and high-pressure side calibration plugs 26a and 26b are restored. Then, the low-pressure side process main valve 28 and the high-pressure side process main valve 30 are opened, and the vent main valves 38a and 38b are sequentially opened to perform degassing and water filling work. At this time, the vent-drain communication valve 46 is used. After water filling is completed,
Vent source valves 38a, 38b on the low pressure side and high pressure side
is closed and the recovery is completed.

[発明が解決しようとする問題点] ところがこのような差圧検出器では、校正を行
う際には必ず筐体18内の測定流体(この場合は
重水)を抜かなければならず、それに伴つて様々
な問題が生じる。先ず空気圧による校正のために
プラグを開き大気開放状態となるから、重水中の
トリチウムが空気中に拡散し作業員のトリチウム
被曝を生じる問題がある。またガス溜まりができ
易く計器ドリフトが生じ易い。その上、計装ルー
プ1台を校正するのに長い時間がかかる問題もあ
る。
[Problems to be Solved by the Invention] However, in such a differential pressure detector, when performing calibration, the measurement fluid (in this case, heavy water) must be removed from the housing 18, and as a result, the fluid to be measured (heavy water in this case) must be removed. Various problems arise. First, for calibration using air pressure, the plug is opened and exposed to the atmosphere, which poses the problem of tritium in heavy water diffusing into the air and exposing workers to tritium. Additionally, gas accumulation is likely to occur and instrument drift is likely to occur. Additionally, there is the problem that it takes a long time to calibrate one instrumentation loop.

また計装元弁のシート面で塵等を噛み込んだ場
合にはシート面に傷が発生し測定不能となる可能
性があるし、計装元弁にシートパスがあつた場合
には校正不可能となる。
Furthermore, if dust or the like gets caught on the seat surface of the instrumentation valve, the seat surface may be damaged and measurement may become impossible, and if the instrumentation valve has a seat pass, it may cause calibration failure. It becomes possible.

本発明の目的は、上記のような従来技術の欠点
を解消し、系統重水のような測定流体を検出器か
ら抜き取ることなく容易に校正できるような構造
の差圧検出器を提供することにある。
An object of the present invention is to eliminate the above-mentioned drawbacks of the prior art and to provide a differential pressure detector having a structure that allows easy calibration without removing a measuring fluid such as system heavy water from the detector. .

[問題点を解決するための手段] 本発明は、中央に位置する測定用ダイヤフラム
と、その両側に設ける固定電極と、それらの更に
外側に設けるダイヤフラムシールとを備え、測定
用ダイヤフラムとダイヤフラムシールとの間に封
入液を充填し、ダイヤフラムシールの外側から測
定流体を導入する構成の静電容量型ダイヤフラム
方式差圧検出器を前提としている。
[Means for Solving the Problems] The present invention includes a measuring diaphragm located at the center, fixed electrodes provided on both sides of the measuring diaphragm, and diaphragm seals provided further outside of the measuring diaphragm. This is based on a capacitive diaphragm type differential pressure detector configured to fill a sealed liquid between the diaphragm seal and introduce the measuring fluid from the outside of the diaphragm seal.

そして前記のような目的を達成することのでき
る本発明は、ダイヤフラムシールがそれぞれ第1
のダイヤフラムシールと第2のダイヤフラムシー
ルとの二重構造をなし、測定用ダイヤフラムと第
1のダイヤフラムシールとの間に一次封入液を充
填し、第1および第2のダイヤフラムシール間の
空間と連通するプラグ付き流通口を該空間の上部
と下部にそれぞれ設け、該空間への二次封入液の
充填・排出と校正用流体の導入・排出を可能と
し、測定流体は第2のダイヤフラムシールの外側
から導入するように構成されている。
In the present invention, which can achieve the above objects, the diaphragm seals each have a first
It has a double structure of a diaphragm seal and a second diaphragm seal, and the space between the measurement diaphragm and the first diaphragm seal is filled with a primary liquid, and communicates with the space between the first and second diaphragm seals. Flow ports with plugs are provided at the upper and lower parts of the space, respectively, to enable filling and discharging of the secondary filled liquid and introduction and discharging of the calibration fluid, and the measurement fluid is placed outside the second diaphragm seal. It is configured to be installed from

[作用] 通常の差圧測定状態においては第1のダイヤフ
ラムシールと第2のダイヤフラムシールとの間に
は二次封入液が充填されている。そして測定流体
の圧力は第2のダイヤフラムシールを介して二次
封入液に伝達され、更に第1のダイヤフラムシー
ルを介して一次封入液に伝達されて測定用ダイヤ
フラムを変位させる。これによつて固定電極との
間で静電容量変化か生じ、それを検出することで
差圧が求められる。
[Operation] In a normal differential pressure measurement state, a secondary sealed liquid is filled between the first diaphragm seal and the second diaphragm seal. The pressure of the measuring fluid is then transmitted to the secondary filled liquid via the second diaphragm seal, and further transmitted to the primary filled liquid via the first diaphragm seal, thereby displacing the measuring diaphragm. This causes a change in capacitance with the fixed electrode, and by detecting this change, the differential pressure can be determined.

計器の校正を行う場合には、第1のダイヤフラ
ムシールと第2のダイヤフラムシールとの空間か
ら二次封入液をドレンし、校正用流体を導入す
る。校正用流体の一方は大気であつてよい。測定
流体を検出器から抜き出す必要は全くない。抜き
出すのは二次封入液であるから、例え測定流体が
原子炉で用いられている重水等であつてもそれが
大気中に開放されることはない。
When calibrating the instrument, the secondary fill liquid is drained from the space between the first diaphragm seal and the second diaphragm seal, and a calibration fluid is introduced. One of the calibration fluids may be atmospheric air. There is no need to draw the measuring fluid out of the detector. Since it is the secondary sealed liquid that is extracted, even if the measured fluid is heavy water used in nuclear reactors, it will not be released into the atmosphere.

このように本発明では測定流体を抜き取ること
なく校正できるため作業能率が向上するのは勿論
のこと、例え測定流体が有害な物質を含んでいて
もそれに汚染される可能性が極めて薄くなる。
In this way, in the present invention, calibration can be performed without drawing out the fluid to be measured, which not only improves work efficiency, but also greatly reduces the possibility of contamination even if the fluid to be measured contains harmful substances.

[実施例] 第1図は本発明に係る二重ダイヤフラムシール
式差圧検出器の一実施例を示す断面図である。こ
の差圧検出器50は、中心に位置する測定用ダイ
ヤフラム52と、その両側に設けられる固定電極
54a,54bを有する。そして本発明では、固
定電極54a,54bの更に外側に設けられるダ
イヤフラムシールが、第1のダイヤフラムシール
56a,56bと第2のダイヤフラムシール58
a,58bとの二重構造になつている。この点に
本発明の一つの顕著な特徴がある。
[Embodiment] FIG. 1 is a sectional view showing an embodiment of a double diaphragm seal type differential pressure detector according to the present invention. This differential pressure detector 50 has a measuring diaphragm 52 located at the center and fixed electrodes 54a and 54b provided on both sides of the measuring diaphragm 52. In the present invention, the diaphragm seals provided further outside the fixed electrodes 54a, 54b are the first diaphragm seals 56a, 56b and the second diaphragm seal 58.
It has a double structure with a and 58b. This point is one of the outstanding features of the present invention.

固定電極54a,54bは、セラミツク・ブロ
ツク60の内側球面に形成した金属被膜であり、
セラミツク・ブロツク60は中央部で仕切りを兼
ねるサポート部材62により筐体64内で支持さ
れている。測定用ダイヤフラム52および固定電
極54a,54bからはそれぞれリード線が引き
出され、伝送部65を介して外部に検出信号が出
力される。測定用ダイヤフラム52と第1のダイ
ヤフラムシール56a,56bとでそれぞれ区切
られた領域にはシリコンオイル等からなる一次封
入液66a,66bが充填される。
The fixed electrodes 54a and 54b are metal coatings formed on the inner spherical surface of the ceramic block 60,
The ceramic block 60 is supported within a housing 64 by a support member 62 which also serves as a partition at the center. Lead wires are drawn out from the measurement diaphragm 52 and the fixed electrodes 54a and 54b, respectively, and a detection signal is outputted to the outside via the transmission section 65. Areas separated by the measuring diaphragm 52 and the first diaphragm seals 56a, 56b are filled with primary liquids 66a, 66b made of silicone oil or the like.

第2のダイヤフラムシール58a,58bの外
側にはそれぞれ外側筐体68a,68bが取り付
けられ、それらの中央には測定流体を導入するた
めのプロセス配管70a,70bが連結されてお
り、それらにはそれぞれ計器元弁72a,72b
が取り付けられている。
Outer housings 68a and 68b are attached to the outsides of the second diaphragm seals 58a and 58b, respectively, and process piping 70a and 70b for introducing the measurement fluid are connected to the centers of the outer housings 68a and 68b, respectively. Instrument main valves 72a, 72b
is installed.

本発明では、第1のダイヤフラムシール56
a,56bと第2のダイヤフラムシール58a,
58bで区切られたそれぞれの空間には、それと
連通するようにプラグ付きの流通口が設けられ、
該空間内部への流体の充填や導入と排出を可能に
している。この点にも本発明の特徴がある。
In the present invention, the first diaphragm seal 56
a, 56b and a second diaphragm seal 58a,
Each space divided by 58b is provided with a communication port with a plug to communicate therewith,
This allows filling, introducing, and discharging fluid into the space. This point is also a feature of the present invention.

この実施例では、前記空間の上方にエアー抜き
配管74a,74bとそれを閉塞させるエアー抜
き用プラグ76a,76bが設けられ、また下方
にはそれぞれドレン配管78a,78bがドレン
用プラグ80a,80bが設けられている。
In this embodiment, air bleed pipes 74a, 74b and air bleed plugs 76a, 76b for closing the spaces are provided above the space, and drain pipes 78a, 78b and drain plugs 80a, 80b are provided below, respectively. It is provided.

実際の差圧測定状態においては、第1のダイヤ
フラムシール56a,56bと第2のダイヤフラ
ムシール58a,58bとの間の密閉空間(エア
ー抜き用プラグ76a,76bおよびドレン用プ
ラグ80a,80bは密閉されている)内にシリ
コンオイルや新重水等からなる二次封入液82
a,82bが充填されており、計器元弁72a,
72bを開いた状態でそれぞれプロセス配管70
a,70bから測定流体が導入される。測定流体
の圧力は第2のダイヤフラムシール58a,58
bを介して二次封入液82a,82bに伝達さ
れ、更に第1のダイヤフラムシール56a,56
bを介して一次封入液66a,66bに伝達さ
れ、両者の差圧によつて測定用ダイヤフラム52
が変位する。それに伴つて測定用ダイヤフラム5
2と固定電極54a,54bとのギヤツプが変化
し、それが静電容量変化となつて差圧が検出され
る。
In the actual differential pressure measurement state, the airtight space between the first diaphragm seals 56a, 56b and the second diaphragm seals 58a, 58b (the air vent plugs 76a, 76b and the drain plugs 80a, 80b are sealed) A secondary filling liquid 82 consisting of silicone oil, fresh heavy water, etc.
a, 82b are filled, and the instrument main valves 72a,
72b in the open state, respectively, the process piping 70
The measuring fluid is introduced from ports a and 70b. The pressure of the fluid to be measured is determined by the second diaphragm seals 58a, 58.
b to the secondary fill liquid 82a, 82b, and further to the first diaphragm seals 56a, 56.
b to the primary sealed liquid 66a, 66b, and the measuring diaphragm 52 due to the differential pressure between the two.
is displaced. Along with this, the measuring diaphragm 5
The gap between the fixed electrodes 54a and 54b changes, which results in a change in capacitance, and a differential pressure is detected.

本発明ではダイヤフラムシールが二重構造をな
しているため、測定流体(プロセス側)と接触す
ることなく中間の二次封入液82a,82bを抜
き取ることができる。つまり校正の際には計器元
弁72a,72bを閉じ、エアー抜き用プラグ7
6a,76bを開放し、ドレン用プラグ80a,
80bを開放することで二次封入液82a,82
bをドレン配管78a,78bからドレンでき
る。ここでドレンするのは二次封入液82a,8
2bであり測定流体とは異なるため、測定流体が
例え有害な物質を含んでいたとしてもそれによつ
て汚染される虞れはない。
In the present invention, since the diaphragm seal has a double structure, the intermediate secondary sealed liquids 82a and 82b can be extracted without coming into contact with the measurement fluid (process side). In other words, during calibration, the instrument main valves 72a and 72b are closed, and the air bleed plug 7 is closed.
6a, 76b, and drain plug 80a,
By opening 80b, the secondary filling liquid 82a, 82
b can be drained from the drain pipes 78a and 78b. What is drained here is the secondary filling liquid 82a, 8
2b and is different from the measurement fluid, so even if the measurement fluid contains harmful substances, there is no risk of contamination by them.

校正手順としては、高圧側のエアー抜き用プラ
グ76bを締めた後、高圧側のドレン配管78b
に加圧ポンプ(図示せず)を接続し、校正用流体
を供給しつつ従来と同様に校正を行えばよい。
In the calibration procedure, after tightening the high-pressure side air bleed plug 76b, the high-pressure side drain pipe 78b
A pressurizing pump (not shown) may be connected to the calibrator, and calibration may be performed in the same manner as in the past while supplying calibration fluid.

[発明の効果] 本発明は上記のようにダイヤフラムシールを二
重構造とし、それらの間に二次封入液を充填し、
それをドレン配管から抜き取ることができるよう
に構成したから、検出器から測定流体を抜き取ら
なくても校正できるため、測定流体中に有害な物
質が含まれていてもそれにより汚染が生じるのを
防止できる。従つて特に測定流体が重水減速炉で
用いられる重水のような場合には、従来技術では
重水の抜き取りに伴う大気開放作業の際、局所排
風装置によるトリチウムの拡散防止をしながら作
業を実施していたが、本発明によつてこれら一連
の作業が簡素化でき被曝の低減化を図ることがで
きる。
[Effects of the Invention] As described above, the present invention has a diaphragm seal having a double structure, filling the space between them with a secondary filling liquid,
Since it is constructed so that it can be extracted from the drain pipe, calibration can be performed without removing the measuring fluid from the detector, thereby preventing contamination even if the measuring fluid contains harmful substances. can. Therefore, especially when the fluid to be measured is heavy water used in a heavy water moderation reactor, conventional technology requires that when the heavy water is removed and the work is opened to the atmosphere, the work is carried out while preventing the diffusion of tritium using a local ventilation device. However, according to the present invention, this series of operations can be simplified and radiation exposure can be reduced.

また本発明によれば各種流体のドレンやベント
のためのバルブ数を少なくでき、例えば従来技術
では通常7台のバルブを必要としていたものが本
発明によれば3台で済み、計器ラツクも小型化で
きる効果がある。
Furthermore, according to the present invention, the number of valves for draining and venting various fluids can be reduced. For example, the conventional technology normally requires seven valves, but according to the present invention, only three valves are required, and the instrumentation rack is also small. It has the effect of making it more effective.

更に従来の差圧検出器では校正の際にドレン抜
きや水張り作業に長時間を要していたが、本発明
によつて作業工程を大幅に合理化でき、校正作業
を能率よく行うことができるし、そのため例えば
測定流体が原子炉の重水のような場合でも外部被
曝を低減できる効果がある。
Furthermore, with conventional differential pressure detectors, it took a long time to drain and fill with water during calibration, but with the present invention, the work process can be significantly streamlined, making it possible to perform calibration work more efficiently. Therefore, even if the measured fluid is heavy water from a nuclear reactor, for example, it is effective in reducing external exposure.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る二重ダイヤフラムシール
式差圧検出器の一実施例を示す断面図、第2図は
従来のダイヤフラムシール式差圧検出器とそれを
用いた重水系計装配管の説明図である。 50……差圧検出器、52……測定用ダイヤフ
ラム、54a,54b……固定電極、56a,5
6b……第1のダイヤフラムシール、58a,5
8b……第2のダイヤフラムシール、60……セ
ラミツク・ブロツク、66a,66b……一次封
入液、74a,74b……エアー抜き配管、76
a,76b……エアー抜き用プラグ、78a,7
8b……ドレン配管、80a,80b……ドレン
用プラグ、82a,82b……二次封入液。
Fig. 1 is a sectional view showing an embodiment of the double diaphragm seal type differential pressure detector according to the present invention, and Fig. 2 shows a conventional diaphragm seal type differential pressure detector and heavy water system instrumentation piping using the same. It is an explanatory diagram. 50... Differential pressure detector, 52... Measuring diaphragm, 54a, 54b... Fixed electrode, 56a, 5
6b...first diaphragm seal, 58a, 5
8b...Second diaphragm seal, 60...Ceramic block, 66a, 66b...Primary filled liquid, 74a, 74b...Air vent piping, 76
a, 76b...Air bleeding plug, 78a, 7
8b...Drain piping, 80a, 80b...Drain plug, 82a, 82b...Secondary sealed liquid.

Claims (1)

【特許請求の範囲】[Claims] 1 中央に位置する測定用ダイヤフラムと、その
両側に設けられる固定電極と、それらの外側に設
けられるダイヤフラムシールとを備え、測定用ダ
イヤフラムとダイヤフラムシールとの間に封入液
を充填し、ダイヤフラムシールの外側から測定流
体を導入する静電容量型差圧検出器において、前
記ダイヤフラムシールはそれぞれ第1のダイヤフ
ラムシールと第2のダイヤフラムシールとの二重
構造をなし、測定用ダイヤフラムと第1のダイヤ
フラムシールとの間に一次封入液を充填し、第1
および第2のダイヤフラムシール間の空間と連通
するプラグ付き流通口を該空間の上部と下部にそ
れぞれ設け、該空間への二次封入液の充填・排出
と校正用流体の導入・排出を可能とし、第2のダ
イヤフラムシールの外側から測定流体を導入する
ことを特徴とする二重ダイヤフラムシール式差圧
検出器。
1.Equipped with a measuring diaphragm located in the center, fixed electrodes provided on both sides of the measuring diaphragm, and a diaphragm seal provided on the outside thereof, a sealed liquid is filled between the measuring diaphragm and the diaphragm seal, and the diaphragm seal is In a capacitive differential pressure sensor that introduces a measuring fluid from the outside, each of the diaphragm seals has a double structure of a first diaphragm seal and a second diaphragm seal, and the measuring diaphragm and the first diaphragm seal Fill the primary filling liquid between the
A communication port with a plug that communicates with the space between the second diaphragm seal is provided at the upper and lower parts of the space, respectively, to enable the filling and discharging of the secondary filled liquid and the introduction and discharging of the calibration fluid into the space. , a double diaphragm seal type differential pressure detector, characterized in that a measuring fluid is introduced from the outside of the second diaphragm seal.
JP29676487A 1987-11-25 1987-11-25 Double diaphragm seal type differential pressure detector Granted JPH01138435A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29676487A JPH01138435A (en) 1987-11-25 1987-11-25 Double diaphragm seal type differential pressure detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29676487A JPH01138435A (en) 1987-11-25 1987-11-25 Double diaphragm seal type differential pressure detector

Publications (2)

Publication Number Publication Date
JPH01138435A JPH01138435A (en) 1989-05-31
JPH0583137B2 true JPH0583137B2 (en) 1993-11-24

Family

ID=17837823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29676487A Granted JPH01138435A (en) 1987-11-25 1987-11-25 Double diaphragm seal type differential pressure detector

Country Status (1)

Country Link
JP (1) JPH01138435A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE1008508A3 (en) * 1994-07-19 1996-05-07 Bogerd Navtec Naamloze Vennoot Separating membrane
JP5661543B2 (en) * 2011-04-11 2015-01-28 中国電力株式会社 Diaphragm pressure gauge calibration device

Also Published As

Publication number Publication date
JPH01138435A (en) 1989-05-31

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