JPH058479B2 - - Google Patents
Info
- Publication number
- JPH058479B2 JPH058479B2 JP4952886A JP4952886A JPH058479B2 JP H058479 B2 JPH058479 B2 JP H058479B2 JP 4952886 A JP4952886 A JP 4952886A JP 4952886 A JP4952886 A JP 4952886A JP H058479 B2 JPH058479 B2 JP H058479B2
- Authority
- JP
- Japan
- Prior art keywords
- smoke
- equipment
- fire
- sampling
- room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005070 sampling Methods 0.000 claims description 25
- 239000000779 smoke Substances 0.000 claims description 20
- 238000001514 detection method Methods 0.000 claims description 17
- 230000007613 environmental effect Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Fire-Detection Mechanisms (AREA)
Description
【発明の詳細な説明】
技術分野
この発明は吸引口を備えたサンプリング管式の
火災検出装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to a sampling tube type fire detection device equipped with a suction port.
<従来技術>
サンプリング管を用いた火災検出装置として
は、第2図に示される船などに使用される煙管式
煙探知機が知られていた。この装置は、各船艙1
1,12,13にその一端が開口されたサンプリ
ング管21,22,23を設け、このサンプリン
グ管21,22,23を通じて各船艙11,1
2,13の煙を含んだ空気を基端部に設けられた
散乱光式の煙検出部30に導き火災を検出するよ
うにしていた。なお40はフアンなどの吸引装
置、51,52,53は弁で火災が検出される
と、弁51〜53を順次閉めるなどして火災が発
生した船艙を検出する。<Prior Art> As a fire detection device using a sampling tube, a smoke tube type smoke detector used in ships and the like as shown in FIG. 2 has been known. This device is installed in each hold.
1, 12, 13 are provided with sampling tubes 21, 22, 23 with one end open, and through these sampling tubes 21, 22, 23, each hold 11, 1
The smoke-containing air of Nos. 2 and 13 was guided to a scattered light type smoke detection section 30 provided at the base end to detect a fire. Note that 40 is a suction device such as a fan, and 51, 52, and 53 are valves. When a fire is detected, the valves 51 to 53 are sequentially closed to detect the hold where the fire has occurred.
<従来技術の問題点>
このような装置は貨物船の船艙のように、いず
れの船艙においてもほぼ同じ温度、同じ埃の状態
では、共通の一定感度の煙検出器、あるいは船艙
が高温の場合は共通の冷却装置を煙検出器に設け
て使用することができた。<Problems with the prior art> When the temperature and dust are almost the same in all holds, such as in the hold of a cargo ship, such a device cannot be used with a smoke detector with a common fixed sensitivity, or when the hold is high temperature. could be used by providing a common cooling device to the smoke detector.
さらにこの方式を半導体工場のクリーンルーム
などの火災検出装置に使用すると、クリーンルー
ム自体に埃が少ないことから煙検出部を高感度に
設定することができるので、室内に気流の流れが
あつても煙を早期に検出でき初期対応が可能とな
り損失が少なくなる。 Furthermore, if this method is used in a fire detection device in a clean room of a semiconductor factory, etc., the smoke detection section can be set to high sensitivity because there is little dust in the clean room itself, so even if there is airflow inside the room, smoke will not be detected. It can be detected early, allowing initial response and reducing losses.
しかし室内に設けられる製造用機器には内部が
高温度で微量な燃焼生成物が発生することもあ
り、これ自体の火災検出には別個に小型で高温度
に耐える火災感知器を内臓させていたので、設備
全体として高価となる欠点があつた。 However, manufacturing equipment installed indoors has high internal temperatures and can generate small amounts of combustion products, so to detect fires, a separate small fire detector that can withstand high temperatures is built in. Therefore, the drawback was that the equipment as a whole was expensive.
<問題点を解決するための手段>
この発明は上記欠点にかんがみ高温を発生する
機器内の火災監視にもサンプリング管式を使用す
るようにしたもので、室内あるいは機器内の煙を
含んだ空気を吸引口を備えたサンプリング管を通
じて煙検出部に導き火災を検出する装置におい
て、上記サンプリング管を複数個設け、他方はク
リーンルームなど常温で環境ノイズの少ない場所
に設けるようにしたものである。<Means for Solving the Problems> In view of the above-mentioned drawbacks, the present invention uses a sampling tube system to monitor fires in equipment that generates high temperatures. In this device, a plurality of the above-mentioned sampling tubes are installed, and the other one is installed in a place such as a clean room where there is room temperature and little environmental noise.
<作用>
製造用機器内の空気が高温に加熱されていて
も、他方のクリーンルームなどに設けられた吸引
口を通じてサンプリング管に流入する冷たい空気
により煙検出部に達成するまでに冷却され、煙検
出部において、結露などが生ずることがなく正常
に監視および火災検出を行なう。<Function> Even if the air inside the manufacturing equipment is heated to a high temperature, the cold air that flows into the sampling tube through the suction port installed in the other clean room cools it down by the time it reaches the smoke detection section, making it impossible to detect smoke. Monitoring and fire detection shall be performed normally without any condensation occurring in the area.
<実施例> この発明の一実施例を第1図により説明する。<Example> An embodiment of this invention will be explained with reference to FIG.
図において、1は半導体工場などのクリーンル
ーム、2はクリーンルーム1に設けられ内部にお
いて高温を発生するバーンイン装置などの半導体
製造用機器内で、クリーンルーム1内の空気は換
気装置3とフイルタ4とによつてクリーンな状態
に保たれる。51は吸引口61がクリーンルーム
1のリターンダクト内に設けられ、室1全体を監
視するサンプリング管、52は吸引口62が製造
用機器2中に設けられたサンプリング管で、それ
ら管51,52は共通のサンプリング管7を通じ
て散乱光式の煙検出部8に接続される。9はフア
ンなどの吸引装置である。 In the figure, 1 is a clean room such as a semiconductor factory, and 2 is semiconductor manufacturing equipment such as a burn-in device that is installed in the clean room 1 and generates high temperature inside. It is kept in a clean condition. Reference numeral 51 denotes a sampling pipe whose suction port 61 is provided in the return duct of the clean room 1 and monitors the entire room 1; 52 is a sampling pipe whose suction port 62 is provided in the manufacturing equipment 2; It is connected to a scattered light type smoke detector 8 through a common sampling tube 7. 9 is a suction device such as a fan.
次にこの装置の動作を説明する。 Next, the operation of this device will be explained.
クリーンルーム1内の空気は吸引口61および
サンプリング管51を通じて共通のサンプリング
管7へ、そして煙検出部8へと流れる。また半導
体製造用機器2内の高温の空気も吸引口62より
サンプリング管52を通じて共通のサンプリング
管7へと流れ、冷たいクリーンルーム1中の空気
と合流し、冷却されて煙検出部8へと流れる。 Air in the clean room 1 flows through the suction port 61 and the sampling pipe 51 to the common sampling pipe 7 and then to the smoke detection section 8. Further, the high temperature air inside the semiconductor manufacturing equipment 2 also flows from the suction port 62 through the sampling pipe 52 to the common sampling pipe 7, joins with the air in the cold clean room 1, is cooled, and flows to the smoke detection section 8.
またクリーンルーム1においてあるいは機器2
内で火災が発生し煙が生ずると、吸引口61,6
2よりサンプリング管51,52および共通のサ
ンプリング管7を通じて煙検出部8に運ばれここ
で煙が検出され、火災が発生したことが報知され
る。 Also, in clean room 1 or equipment 2
If a fire breaks out inside and smoke is generated, the suction ports 61, 6
2 through sampling tubes 51, 52 and the common sampling tube 7 to the smoke detection section 8, where smoke is detected and the occurrence of a fire is notified.
なお上記装置において、クリーンルーム1のサ
ンプリング管51と機器2のサンプリング管52
との吸引量の関係を前者を大と後者を小とすれ
ば、更に冷却および充分な結露防止効果が得られ
る。また煙検出部8をイオン化式にすることもで
きる。 In addition, in the above apparatus, the sampling pipe 51 of the clean room 1 and the sampling pipe 52 of the equipment 2
If the relationship between the suction amounts is set such that the former is large and the latter is small, further cooling and sufficient dew condensation prevention effects can be obtained. Further, the smoke detection section 8 can also be of an ionization type.
<効果>
この発明の装置は以上のように構成され作用す
るので、装置に冷却装置を設けなくとも高温を発
生する機器などの火災検出を共通のサンプリング
管式で行なうことができるので、設備全体として
安価な火災検出装置が得られる効果がある。<Effects> Since the device of the present invention is configured and operates as described above, it is possible to detect fires in equipment that generates high temperatures using a common sampling pipe type without installing a cooling device in the device. This has the effect of providing an inexpensive fire detection device.
第1図はこの発明のサンプリング管による火災
検出装置の概略図、第2図は従来の火災検出装置
の概略図。
1……クリーンルーム、2……半導体製造用機
器、3……換気装置、4……フイルタ、51,5
2……サンプリング管、61,62……吸引口、
7……共通のサンプリング管、8……煙検出部、
9……吸引装置。
FIG. 1 is a schematic diagram of a fire detection device using a sampling tube according to the present invention, and FIG. 2 is a schematic diagram of a conventional fire detection device. 1... Clean room, 2... Semiconductor manufacturing equipment, 3... Ventilation system, 4... Filter, 51, 5
2... Sampling tube, 61, 62... Suction port,
7... common sampling tube, 8... smoke detection section,
9...Suction device.
Claims (1)
口を備えたサンプリング管を通じて煙検出部に導
き火災を検出する装置において、上記サンプリン
グ管を複数個設け、その一方は高温度を発生する
室または機器内に設け、他方はクリーンルームな
ど常温で環境ノイズの少ない場所に設けたことを
特徴とするサンプリング管による火災検出装置。1. In a device that detects a fire by guiding smoke-containing air from a room or equipment to a smoke detection unit through a sampling pipe equipped with a suction port, a plurality of the above-mentioned sampling pipes are provided, and one of them is installed in a room or equipment where high temperatures are generated. A fire detection device using a sampling tube, which is characterized by being installed inside the equipment, and the other end being installed in a place with room temperature and low environmental noise, such as a clean room.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4952886A JPS62208196A (en) | 1986-03-08 | 1986-03-08 | Fire detector by sampling tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4952886A JPS62208196A (en) | 1986-03-08 | 1986-03-08 | Fire detector by sampling tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62208196A JPS62208196A (en) | 1987-09-12 |
| JPH058479B2 true JPH058479B2 (en) | 1993-02-02 |
Family
ID=12833648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4952886A Granted JPS62208196A (en) | 1986-03-08 | 1986-03-08 | Fire detector by sampling tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62208196A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04248698A (en) * | 1991-02-05 | 1992-09-04 | Ohbayashi Corp | Smoke sensing equipment |
| DE102013207605A1 (en) * | 2013-04-25 | 2014-10-30 | safetec Brandes und Niehoff GmbH | Smoke detection unit, smoke detection system and smoke detector device |
-
1986
- 1986-03-08 JP JP4952886A patent/JPS62208196A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62208196A (en) | 1987-09-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |