JPH0585504B2 - - Google Patents
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- JPH0585504B2 JPH0585504B2 JP1076969A JP7696989A JPH0585504B2 JP H0585504 B2 JPH0585504 B2 JP H0585504B2 JP 1076969 A JP1076969 A JP 1076969A JP 7696989 A JP7696989 A JP 7696989A JP H0585504 B2 JPH0585504 B2 JP H0585504B2
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- boron nitride
- particle size
- sintering
- weight
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Description
〔産業上の利用分野〕
本発明は、耐酸化性に優れ、かつ機械加工性が
良好な易加工性セラミツクスに関する。
〔従来の技術及び発明が解決しようとする課題〕
従来、旋盤によるハイス鋼での加工といつた機
械加工が可能な易加工性セラミツクスとしては、
窒化硼素（BN）成形体が知られている。この窒
化硼素成形体は、例えば、特公昭49−40124号公
報に記載されたように窒化硼素にアルカリ土類ホ
ウ酸塩を添加し、これを熱間加圧成形（ホツトプ
レス）法で成形・焼結したり、特公昭49−37093
号公報に記載されたように微粉状の窒化硼素粉末
を使用して成形・焼結するなどの方法で製造され
ている。
しかしながら、このようにして得られる窒化硼
素成形体は高温下でも使用可能な優れた材料であ
るが、空気中などの酸化性雰囲気で900〜1200℃
の高温下に連続して使用すると、酸化によりホウ
酸ガラスが生成し、このホウ酸ガラスが流出して
窒化硼素成形体が軟化したり、この成形体と他の
部材とが融着するなど、種々のトラブルが発生す
るという問題がある。このため、酸化性雰囲気で
900℃以上の高温下においてもガラス質の流出な
く好適に使用し得、耐酸化性に優れていると共
に、機械加工性の高い成形体の開発が望まれてい
た。
本発明は上記事情に鑑みなされたもので、酸化
性雰囲気で高温下に使用してもガラス質の流出な
どのトラブル発生がなく、耐酸化性に優れ、しか
も機械加工性の良好な易加工性セラミツクスを提
供することを目的とする。
〔課題を解決するための手段及び作用〕
本発明者は、上記目的を達成するため鋭意検討
を重ねた結果、六方晶窒化硼素粉末20〜70重量部
と、窒化珪素粉末30〜80重量部とを含有すると共
に、イツトリアとアルミナとを５：５〜９：１の
重量比で混合してなる焼結助剤粉末を窒化珪素に
対して１〜10重量％含有する粉末組成物を例えば
1600℃〜2100℃の温度で60〜210Kg／cm2の圧力条
件において不活性ガス雰囲気下に熱間加圧成形す
るか、あるいは加圧成形した後に不活性ガス雰囲
気下に1700℃〜2100℃の温度で焼結する等の焼結
を行なうことにより、易加工性セラミツクスが得
られ、このセラミツクスは空気等に酸化性雰囲気
で1200℃程度の高温下に連続使用してもガラス質
の流出が極めて少なく、酸化性雰囲気下における
使用上限温度を約1200℃程度まで高めることがで
き、耐酸化性に優れている上、窒化硼素由来の易
加工性が維持されて機械加工性が良好であること
を知見し、本発明をなすに至つた。
従つて、本発明は、六方晶窒化硼素粉末20〜70
重量部と、窒化珪素粉末30〜80重量部とを含有す
ると共に、イツトリアとアルミナとを５：５〜
９：１の重量比で混合してなる焼結助剤粉末を窒
化珪素に対して１〜10重量％含有する粉末組成物
を焼結してなることを特徴とする易加工性セラミ
ツクスを提供する。
以下、本発明につき更に詳述する。
本発明の易加工性セラミツクスは六方晶窒化硼
素粉末、窒化珪素粉末及び焼結助剤粉末をそれぞ
れ特定の割合で含有した粉末組成物を焼結してな
るものである。
ここで、六方晶窒化硼素粉末、窒化珪素粉末と
しては特に制限はなく、それぞれの市販粉末を使
用することができるが、好ましくはその平均粒子
径が、それぞれ六方晶窒化硼素粉末は30μｍ以
下、特に10μｍ以下、窒化珪素粉末は1μｍ以下、
特に0.8μｍ以下であるものが使用され、本発明に
おいては窒化硼素粉末の粒径を従来より広い範囲
とすることができる。
また、焼結助剤粉末としては、イツトリア
（Y2O3）粉末とアルミナ（Al2O3）粉末の混合物
が焼結性、安定性、強度、耐酸化性の付与効果に
優れているために使用される。この場合、これら
の粉末の市販粉末を使用でき、好ましくはその平
均粒径がイツトリア粉末は10μｍ以下、特に5μｍ
以下、アルミナ粉末は10μｍ以下、特に5μｍ以下
のものが使用され、それらの配合割合をイツトリ
ア粉末とアルミナ粉末の比を５：５〜９：１とす
る。
本発明の易加工性セラミツクスにおいては、上
記粉末の配合量は、六方晶窒化硼素粉末が20〜70
重量部、好ましくは40〜60重量部、窒化珪素粉末
が30〜80重量部、好ましくは40〜60重量部、焼結
助剤粉末は窒化珪素粉末に対し１〜10重量％、好
ましくは、５〜10重量％とするものである。各粉
末のいずれかの配合量が上記範囲外であると、成
形体の耐酸化性や機械加工性が低下して、本発明
の目的を達成することができない。
本発明においては、上記粉末、必要に応じ他の
化合物を含有する粉末組成物を焼結することによ
り、耐酸化性に優れた易加工性セラミツクスを得
ることができる。
ここで、焼結は、熱間加圧成形法で行なうこと
ができ、例えばボールミル等で十分に混合した粉
末組成物を黒鉛製モールド等に充填し、1600℃〜
2100℃、好ましくは1700℃〜1800℃の温度で、60
Kg／cm2〜210Kg／cm2、好ましくは120Kg／cm2〜210
Kg／cm2の圧力下において成形する方法が採用し得
る。この場合、処理温度が1600℃より低かつたり
圧力が60Kg／cm2より低いと、耐酸化性が悪くなる
場合がある。また、2100℃より高温にすると黒鉛
モールドの消耗が激しく、圧力が210Kg／cm2より
大きいと黒鉛モールドが破壊され易くなる。
なお、熱間加圧成形は、窒素ガス等の不活性ガ
ス雰囲気において上記条件で30〜90分間行なうこ
とが望ましい。
また、本発明に係る易加工性セラミツクスは、
上記粉末組成物を加圧成形した後、これを焼結す
ることによつても得ることができる。
この場合、成形体用組成物の加圧成形方法は別
に制限されないが、原料粉末をゴム型に詰め、常
温下で100〜5000Kg／cm2、特に1000〜5000Kg／cm2
の加圧条件で静水圧加圧成形する方法が好適に採
用される。
次いで、加圧成形後の焼結は、1700℃〜2100℃
以下、好ましくは1700℃〜1800℃以下の温度で行
なうことが望ましい。焼結の温度が1700℃より低
いと、耐酸化性が悪くなる場合があり、2100℃よ
り高いと窒化硼素の分解が始まる。なお、焼結は
常圧でも100〜2000Kg／cm2程度の加圧下に行なつ
てもよいが、窒素ガス等の不活性ガス雰囲気で１
〜５時間行なうことが好ましい。
〔発明の効果〕
以上説明したように、本発明の易加工性セラミ
ツクスは、上述した構成としたことにより、900
℃以上の高温、特に1200℃程度の高温下におい
て、酸化性雰囲気であつてもガラス質の流出が極
めて少なく、他の部材と融着するといつたトラブ
ルがないため、酸化性雰囲気下で1200℃程度の高
温下においても連続使用することができる上、機
械加工性が良好であり、このため機械加工可能な
耐熱・耐酸化性のセラミツクスとして幅広い分野
に利用できるものである。
以下、実施例及び比較例を示して本発明を具体
的に説明するが、本発明は下記実施例に制限され
るものでなない。
なお、各例に先立ち、各例で採用した成形体の
耐酸化性、加工性の測定方法を下記に示す。
〔耐酸化性（流出付着物量）〕
成形体を厚さ１mm、半径100mmの円盤状に加工
し、これを第１、２図に示す半リング板状で内周
壁面中央部に半リング状のスリツト２（スリツト
幅1.1mm）を有する治具１に垂直に立てた後、直
径140mmの石英製炉芯管中に治具ごと挿入し、外
部から1200℃に加熱した。この炉芯管に３／
minの流量で５％酸素−95％窒素混合ガスを流
し、この状態で48時間保持した後、冷却した。冷
却後、管外に治具を取り出して治具から成形体を
取り外し、治具に付着したガラス量を流出付着物
量として測定し、耐酸化性を評価した。この場
合、付着物量が２mg以下のものを耐酸化性良好で
合格品とした。
〔加工性〕
円柱状成形体を旋盤のチヤツクに固定し、光速
度鋼バイトを挿着して回転速度300rpmで成形体
を回転させながら切削深さ0.5mmにバイト先端を
固定し、横送り速度１cm／分で切削したときの切
削面の表面粗度を測定した。この場合、表面粗度
が25μｍ以下のものを加工性良好で合格品とし
た。
〔実施例 １，２〕
平均粒径10μｍの六方晶窒化硼素粉末200ｇ、
平均粒径0.5μｍの窒化珪素粉末800ｇ、平均粒径
4μｍのイツトリア粉末55ｇ、平均粒径2μｍのア
ルミナ粉末25ｇを水４と共に10のアルミナ製
ボールミルに入れて２時間混合した後、スラリー
を取り出して乾燥し、原料粉末を得た。
次いで、この原料粉末400ｇを黒鉛製モールド
に充填し、窒素雰囲気下に1800℃、150Kg／cm2で
１時間熱間加圧成形し、成形体を得た（実施例
１）。
また、この原料粉末400ｇをゴム型に詰め、
2000Kg／cm2の静水圧加圧を行ない、続いて窒素雰
囲気下に1800℃で１時間加熱焼結し、成形体を
得た（実施例２）。
〔実施例 ３，４〕
平均粒径10μｍの六方晶窒化硼素粉末700ｇ、
平均粒径0.5μｍの窒化珪素粉末300ｇ、平均粒径
4μｍのイツトリア粉末25ｇ、平均粒径2μｍのア
ルミナ粉末５ｇを実施例１と同様に混合、乾燥
し、原料粉末を得た。
次いで、この原料粉末400ｇを黒鉛製モールド
に充填し、窒素雰囲気下に1800℃、150Kg／cm2で
30分間熱間加圧成形し、成形体を得た（実施例
３）。
また、この原料粉末400ｇをゴム型に詰め、
2000Kg／cm2の静水圧加圧を行ない、続いて窒素雰
囲気下に9.5気圧の等方圧下、1700℃で２時間加
熱焼結し、成形体を得た（実施例４）。
〔比較例 １〕
平均粒径10μｍの六方晶窒化硼素粉末100ｇ、
平均粒径0.5μｍの窒化珪素粉末900ｇ、平均粒径
4μｍのイツトリア粉末55ｇ、アルミナ粉末25ｇ
を実施例１と同様に混合、乾燥し、原料粉末を得
た。
次いで、この原料粉末を実施例１と同様の方法
で熱間加圧成形し、成形体を得た。
〔比較例 ２〕
平均粒径10μｍの六方晶窒化硼素粉末900ｇ、
平均粒径0.5μｍの窒化珪素粉末100ｇ、平均粒径
4μｍのイツトリア粉末5.5ｇ、平均粒径2μｍのア
ルミナ粉末2.5ｇを実施例１と同様に混合、乾燥
し、原料粉末を得た。
次いで、この原料粉末を実施例１と同様の方法
で熱間加圧成形し、成形体を得た。
〔比較例 ３〕
平均粒径10μｍの六方晶窒化硼素粉末400ｇを
黒鉛製モールド中に充填し、実施例１と同様の方
法で熱間加圧成形し、成形体を得た。
次に、上記各成形体の密度、耐酸化性（付着物
量）、加工性（表面粗度）を測定した結果を第１
表に示す。
[Industrial Application Field] The present invention relates to easily processable ceramics that have excellent oxidation resistance and good machinability. [Prior art and problems to be solved by the invention] Conventionally, easy-to-work ceramics that can be machined, such as processing with high-speed steel using a lathe, are as follows:
Boron nitride (BN) molded bodies are known. This boron nitride molded body is produced by adding an alkaline earth borate to boron nitride as described in Japanese Patent Publication No. 49-40124, and then molding and sintering it by hot pressing. Special Publication Showa 49-37093
As described in the above publication, it is manufactured by molding and sintering using fine boron nitride powder. However, although the boron nitride molded product obtained in this way is an excellent material that can be used even at high temperatures, it
If used continuously at high temperatures, boric acid glass will be generated due to oxidation, and this boric acid glass will flow out, softening the boron nitride molded body, or causing the molded body and other parts to fuse together. There is a problem that various troubles occur. Therefore, in an oxidizing atmosphere
There has been a desire to develop a molded article that can be suitably used without glassy outflow even at high temperatures of 900°C or higher, has excellent oxidation resistance, and has high machinability. The present invention has been developed in view of the above circumstances.Even when used in an oxidizing atmosphere at high temperatures, troubles such as outflow of glass do not occur, and the present invention has excellent oxidation resistance, and is easy to process with good machinability. The purpose is to provide ceramics. [Means and effects for solving the problem] As a result of intensive studies to achieve the above object, the inventor of the present invention has developed 20 to 70 parts by weight of hexagonal boron nitride powder and 30 to 80 parts by weight of silicon nitride powder. For example, a powder composition containing 1 to 10% by weight of sintering aid powder, which is a mixture of ittria and alumina in a weight ratio of 5:5 to 9:1, based on silicon nitride, is used.
Hot pressure molding under an inert gas atmosphere at a temperature of 1600℃~2100℃ and a pressure condition of 60~210Kg/ cm2 , or after pressure molding under an inert gas atmosphere at a temperature of 1700℃~2100℃ By performing sintering such as sintering at a high temperature, easy-to-process ceramics can be obtained, and even if these ceramics are used continuously at high temperatures of around 1200℃ in an oxidizing atmosphere such as air, there is no significant loss of glassy material. The upper limit temperature for use in an oxidizing atmosphere can be raised to approximately 1200°C, and it has excellent oxidation resistance and maintains the ease of processing derived from boron nitride, resulting in good machinability. These findings led to the present invention. Therefore, the present invention provides hexagonal boron nitride powder of 20 to 70
parts by weight, 30 to 80 parts by weight of silicon nitride powder, and 5:5 to 5:5 to alumina of ittria and alumina.
To provide easily processable ceramics characterized by sintering a powder composition containing 1 to 10% by weight of sintering aid powder based on silicon nitride mixed at a weight ratio of 9:1. . The present invention will be explained in more detail below. The easily processable ceramic of the present invention is obtained by sintering a powder composition containing hexagonal boron nitride powder, silicon nitride powder, and sintering aid powder in specific proportions. Here, there are no particular restrictions on the hexagonal boron nitride powder and the silicon nitride powder, and commercially available powders can be used, but preferably the average particle size of the hexagonal boron nitride powder is 30 μm or less, especially 10μm or less, silicon nitride powder is 1μm or less,
In particular, boron nitride powder having a particle size of 0.8 μm or less is used, and in the present invention, the particle size of the boron nitride powder can be set in a wider range than conventional ones. In addition, as a sintering aid powder, a mixture of ittria (Y 2 O 3 ) powder and alumina (Al 2 O 3 ) powder has excellent sinterability, stability, strength, and oxidation resistance. used for. In this case, commercially available powders of these powders can be used, preferably with an average particle size of 10 μm or less, especially 5 μm.
Hereinafter, alumina powder having a diameter of 10 μm or less, particularly 5 μm or less, is used, and the mixing ratio of itria powder to alumina powder is 5:5 to 9:1. In the easily processable ceramics of the present invention, the blending amount of the above powder is 20 to 70% hexagonal boron nitride powder.
Parts by weight, preferably 40 to 60 parts by weight, silicon nitride powder 30 to 80 parts by weight, preferably 40 to 60 parts by weight, sintering aid powder 1 to 10 parts by weight, preferably 5 parts by weight based on the silicon nitride powder. ~10% by weight. If the blending amount of any of the powders is outside the above range, the oxidation resistance and machinability of the molded article will deteriorate, making it impossible to achieve the object of the present invention. In the present invention, easily processable ceramics with excellent oxidation resistance can be obtained by sintering a powder composition containing the above powder and other compounds as necessary. Here, sintering can be carried out by hot pressing, for example, by filling a powder composition sufficiently mixed in a ball mill etc. into a graphite mold etc. and heating it at 1600℃~
At a temperature of 2100℃, preferably 1700℃-1800℃, 60
Kg/ cm2 to 210Kg/ cm2 , preferably 120Kg/ cm2 to 210
A method of molding under a pressure of Kg/cm 2 can be adopted. In this case, if the treatment temperature is lower than 1600° C. and the heating pressure is lower than 60 Kg/cm 2 , oxidation resistance may deteriorate. Furthermore, if the temperature is higher than 2100°C, the graphite mold will be severely consumed, and if the pressure is higher than 210Kg/cm 2 , the graphite mold will be easily destroyed. Note that the hot press forming is preferably carried out under the above conditions for 30 to 90 minutes in an inert gas atmosphere such as nitrogen gas. Furthermore, the easily processable ceramics according to the present invention are
It can also be obtained by press-molding the powder composition and then sintering it. In this case, the method of pressure molding the composition for a molded object is not particularly limited, but the raw material powder is packed into a rubber mold and the molding temperature is 100 to 5000 Kg/cm 2 , particularly 1000 to 5000 Kg/cm 2 at room temperature.
A method of isostatic pressure molding under the following pressure conditions is preferably employed. Next, sintering after pressure forming is performed at 1700℃~2100℃
Hereinafter, it is desirable to carry out the reaction preferably at a temperature of 1700°C to 1800°C or lower. If the sintering temperature is lower than 1700°C, oxidation resistance may deteriorate, and if it is higher than 2100°C, boron nitride begins to decompose. Incidentally, sintering may be carried out at normal pressure or under a pressure of about 100 to 2000 kg/ cm2 , but sintering may be carried out under an atmosphere of an inert gas such as nitrogen gas.
It is preferable to carry out the treatment for up to 5 hours. [Effects of the Invention] As explained above, the easily processable ceramics of the present invention has a 900
Even in an oxidizing atmosphere, there is very little vitreous outflow at high temperatures above 1200°C, and there is no problem of fusion with other parts, so even at high temperatures of 1200°C or higher, even in an oxidizing atmosphere. It can be used continuously even at moderately high temperatures and has good machinability, so it can be used in a wide range of fields as a heat-resistant and oxidation-resistant ceramic that can be machined. EXAMPLES Hereinafter, the present invention will be specifically explained with reference to Examples and Comparative Examples, but the present invention is not limited to the following Examples. In addition, prior to each example, the methods for measuring the oxidation resistance and processability of the molded article adopted in each example are shown below. [Oxidation resistance (amount of spilled deposits)] The molded body was processed into a disk shape with a thickness of 1 mm and a radius of 100 mm, and this was shaped into a half-ring plate as shown in Figures 1 and 2. After standing vertically on a jig 1 having a slit 2 (slit width 1.1 mm), the jig and the jig were inserted into a quartz furnace core tube with a diameter of 140 mm, and heated to 1200° C. from the outside. This furnace core tube has 3/
A mixed gas of 5% oxygen and 95% nitrogen was flowed at a flow rate of min, and this state was maintained for 48 hours, followed by cooling. After cooling, the jig was taken out of the tube, the molded body was removed from the jig, and the amount of glass adhering to the jig was measured as the amount of outflowing deposits to evaluate oxidation resistance. In this case, those with a deposit amount of 2 mg or less were considered to have good oxidation resistance and were passed. [Workability] Fix the cylindrical compact to the chuck of a lathe, insert a light speed steel cutting tool, rotate the compact at a rotation speed of 300 rpm, and fix the tip of the cutting tool to a cutting depth of 0.5 mm. The surface roughness of the cut surface was measured when cutting at 1 cm/min. In this case, those with a surface roughness of 25 μm or less were considered to have good workability and were accepted as acceptable products. [Example 1, 2] 200 g of hexagonal boron nitride powder with an average particle size of 10 μm,
800g of silicon nitride powder with an average particle size of 0.5μm, average particle size
55 g of ittria powder of 4 .mu.m and 25 g of alumina powder of 2 .mu.m in average particle size were placed in a 10 alumina ball mill with 4 of water and mixed for 2 hours, and then the slurry was taken out and dried to obtain a raw powder. Next, 400 g of this raw material powder was filled into a graphite mold and hot-pressed at 1800° C. and 150 Kg/cm 2 for 1 hour in a nitrogen atmosphere to obtain a molded body (Example 1). Also, pack 400g of this raw material powder into a rubber mold,
Hydrostatic pressure of 2000 Kg/cm 2 was applied, followed by heating and sintering at 1800° C. for 1 hour in a nitrogen atmosphere to obtain a molded body (Example 2). [Example 3, 4] 700 g of hexagonal boron nitride powder with an average particle size of 10 μm,
300g of silicon nitride powder with an average particle size of 0.5μm, average particle size
25 g of ittria powder with a particle size of 4 μm and 5 g of alumina powder with an average particle size of 2 μm were mixed and dried in the same manner as in Example 1 to obtain a raw material powder. Next, 400g of this raw material powder was filled into a graphite mold and heated at 1800℃ and 150Kg/ cm2 in a nitrogen atmosphere.
Hot pressure molding was performed for 30 minutes to obtain a molded product (Example 3). Also, pack 400g of this raw material powder into a rubber mold,
Hydrostatic pressurization of 2000 Kg/cm 2 was performed, followed by heating and sintering at 1700° C. for 2 hours under an isostatic pressure of 9.5 atmospheres in a nitrogen atmosphere to obtain a molded body (Example 4). [Comparative Example 1] 100 g of hexagonal boron nitride powder with an average particle size of 10 μm,
900g of silicon nitride powder with an average particle size of 0.5μm, average particle size
4μm ittria powder 55g, alumina powder 25g
were mixed and dried in the same manner as in Example 1 to obtain a raw material powder. Next, this raw material powder was hot-pressed in the same manner as in Example 1 to obtain a compact. [Comparative Example 2] 900 g of hexagonal boron nitride powder with an average particle size of 10 μm,
100g of silicon nitride powder with an average particle size of 0.5μm, average particle size
5.5 g of ittria powder with a particle size of 4 μm and 2.5 g of alumina powder with an average particle size of 2 μm were mixed and dried in the same manner as in Example 1 to obtain a raw material powder. Next, this raw material powder was hot-pressed in the same manner as in Example 1 to obtain a compact. [Comparative Example 3] 400 g of hexagonal boron nitride powder with an average particle size of 10 μm was filled into a graphite mold and hot-pressed in the same manner as in Example 1 to obtain a molded body. Next, the results of measuring the density, oxidation resistance (amount of deposits), and workability (surface roughness) of each of the above molded bodies were
Shown in the table.
【表】
第１表の結果より、本発明に係る成形体（実施
例１〜４）は加工性及び耐酸化性に優れているこ
とが確認された。これに対し、窒化硼素粉末及び
窒化珪素粉末の配合量が本発明の範囲外では、表
面粗度が大きく加工性が悪かつたり（比較例１）、
流出付着物量が大きく耐酸化性が悪かつたり（比
較例２）、従来の窒化硼素のみによるものは流出
付着物量が大きく、耐熱性が劣る（比較例３）も
のであつた。[Table] From the results in Table 1, it was confirmed that the molded articles according to the present invention (Examples 1 to 4) were excellent in workability and oxidation resistance. On the other hand, when the blending amounts of boron nitride powder and silicon nitride powder are outside the range of the present invention, the surface roughness is large and the workability is poor (Comparative Example 1).
The amount of deposits flowing out was large and the oxidation resistance was poor (Comparative Example 2), and the conventional product using only boron nitride had a large amount of deposits flowing out and poor heat resistance (Comparative Example 3).
第１図及び第２図はそれぞれ成形体試料を支持
する治具を示し、第１図は正面図、第２図は側面
図である。
１……治具、２……スリツト。
FIGS. 1 and 2 each show a jig for supporting a molded body sample, with FIG. 1 being a front view and FIG. 2 being a side view. 1... jig, 2... slit.
Claims (1)
素粉末30〜80重量部とを含有すると共に、イツト
リアとアルミナとを５：５〜９：１の重量比で混
合してなる焼結助剤粉末を窒化珪素に対して１〜
10重量％含有する粉末組成物を焼結してなること
を特徴とする易加工性セラミツクス。1. A sintering aid containing 20 to 70 parts by weight of hexagonal boron nitride powder and 30 to 80 parts by weight of silicon nitride powder, and mixed with ittria and alumina at a weight ratio of 5:5 to 9:1. agent powder to silicon nitride
Easily processable ceramics characterized by being made by sintering a powder composition containing 10% by weight.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1076969A JPH02255571A (en) | 1989-03-29 | 1989-03-29 | Easy-to-process ceramics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1076969A JPH02255571A (en) | 1989-03-29 | 1989-03-29 | Easy-to-process ceramics |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02255571A JPH02255571A (en) | 1990-10-16 |
| JPH0585504B2 true JPH0585504B2 (en) | 1993-12-07 |
Family
ID=13620614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1076969A Granted JPH02255571A (en) | 1989-03-29 | 1989-03-29 | Easy-to-process ceramics |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02255571A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6494250B1 (en) | 2001-05-14 | 2002-12-17 | Howmet Research Corporation | Impregnated alumina-based core and method |
| JP4484665B2 (en) * | 2004-10-27 | 2010-06-16 | 電気化学工業株式会社 | Method for manufacturing member for group 3-5 compound semiconductor manufacturing apparatus |
| JP7042555B2 (en) * | 2017-02-01 | 2022-03-28 | 株式会社フェローテックマテリアルテクノロジーズ | Ceramic biomaterials and methods for manufacturing ceramic biomaterials |
| CN108117396A (en) * | 2017-12-11 | 2018-06-05 | 陕西科技大学 | The preparation method of biomedical ceramics material based on silicon nitride |
| JP7026904B2 (en) * | 2018-08-01 | 2022-03-01 | 株式会社フェローテックマテリアルテクノロジーズ | Ceramic antibacterial materials, antibacterial parts, manufacturing methods of antibacterial parts and ceramic composite materials |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5895661A (en) * | 1981-11-30 | 1983-06-07 | 京セラ株式会社 | Silicon nitride high tenacity ceramics |
| JPH01131062A (en) * | 1987-11-14 | 1989-05-23 | Denki Kagaku Kogyo Kk | Complex compact calcined under ordinary pressure |
-
1989
- 1989-03-29 JP JP1076969A patent/JPH02255571A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02255571A (en) | 1990-10-16 |
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