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JPH058580B2 - - Google Patents
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JPH058580B2 - - Google Patents

Info

Publication number
JPH058580B2
JPH058580B2 JP59252667A JP25266784A JPH058580B2 JP H058580 B2 JPH058580 B2 JP H058580B2 JP 59252667 A JP59252667 A JP 59252667A JP 25266784 A JP25266784 A JP 25266784A JP H058580 B2 JPH058580 B2 JP H058580B2
Authority
JP
Japan
Prior art keywords
etching
cut pieces
resist ink
boundary
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP59252667A
Other languages
Japanese (ja)
Other versions
JPS61131473A (en
Inventor
Mamoru Onda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP59252667A priority Critical patent/JPS61131473A/en
Publication of JPS61131473A publication Critical patent/JPS61131473A/en
Publication of JPH058580B2 publication Critical patent/JPH058580B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01Manufacture or treatment
    • H10W70/04Manufacture or treatment of leadframes
    • H10W70/042Etching

Landscapes

  • Lead Frames For Integrated Circuits (AREA)
  • ing And Chemical Polishing (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野] この発明は、エツチングによるリードフレーム
パターンの形成方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of forming a lead frame pattern by etching.

[従来の技術] 従来、リードフレームパターンをエツチングに
より製造する場合には第4図に示すように開口さ
せる部分2を除く金属箔全面にレジストインクを
塗布し、次いでエツチング液に浸漬する方法が採
られていた。
[Prior Art] Conventionally, when manufacturing a lead frame pattern by etching, a method has been adopted in which resist ink is applied to the entire surface of the metal foil except for the portion 2 to be opened, as shown in FIG. 4, and then the resist ink is immersed in an etching solution. It was getting worse.

[発明が解決しようとする問題点] しかしながら、かかる従来技術は高価な金属材
料の開口すべき部分を溶解法により100%除去す
るという極めて不経済でかつエネルギー消費的な
方法である。
[Problems to be Solved by the Invention] However, this conventional technique is an extremely uneconomical and energy-consuming method in which 100% of the portion of an expensive metal material to be opened is removed by a melting method.

この発明の目的は、前記した従来技術の欠点を
解消しエツチングにより切断技術を利用して経済
的かつ省エネルギー的な方法でリードフレームの
パターンを形成することにある。
SUMMARY OF THE INVENTION It is an object of the present invention to overcome the drawbacks of the prior art described above and to form a lead frame pattern in an economical and energy-saving manner using etching-cutting technology.

[問題点を解決するための手段] この発明の要旨とするところは、(a)エツチング
により除去すべき部分と残存せしめる部分との境
界部分を除いた全面をレジスト印刷法によりコー
テイングし、(b)次いでこれをエツチング液に浸漬
して該コーテイングのされていない境界部分のみ
を溶解除去し、(c)最後にその切断片を超音波振
動、ジエツト水流、揺動等により除去することに
よつてパターンを形成することにある。
[Means for Solving the Problems] The gist of the present invention is to (a) coat the entire surface except for the boundary between the portion to be removed by etching and the portion to be left by resist printing; ) Next, this is immersed in an etching solution to dissolve and remove only the uncoated boundary portion, and (c) finally, the cut piece is removed by ultrasonic vibration, jet water flow, shaking, etc. It consists in forming a pattern.

[実施例] 以下、この発明を実施例により更に詳細に説明
する。
[Examples] The present invention will be explained in more detail below using Examples.

幅45mm、長さ205mmの銅製の厚板を用意し、エ
ツチングにより開口させる部分を残す部分との境
界部分すなわちパターンの部分をわずかに残して
他の部分全面をレジスト印刷した。これを第1図
に基づいて説明すると、4はレジストインク塗布
部、2は開口部となる部分、3はレジストインク
が塗布しれていない部分である。なお、フレーム
の大きさは幅40mm、長さ200mm、板厚0.25mmであ
り、正方形のパターンの大きさは5.7mm平方であ
る。また、レジストインクが塗布されていない部
分3の幅はわずかに0.2mmであり、この部分のみ
がエツチング薬液に触れることになる。銅板1は
レジストインクが塗布されていない部分3の両面
からエツチングを受け、開口部分の切り離しが完
全に終了した時の断面はほぼ第2図のごとき状況
になる。更にエツチングが進行すると図示した断
面は左右に完全に貫通されるが自然状態では開口
部分の切断片は落下しない。第3図はこの実施例
で使用したエツチング装置の断面図であり、超音
波振動子6からの振動エネルギーの伝播によりエ
ツチングの終了した開口部分の切断片が落下す
る。なお、この実施例では切断片を落下させる手
段として超音波振動を用いたが、ジエツト水流や
フレーム7の揺動等の手段を用いてもよい。9は
落下した切断片の槽外搬送コンベヤであり、該切
断片は連続的に貯蔵タンク14に送り込まれる。
貯蔵タンク14には水洗水供給パイプ11が連続
されており、送り込まれた切断片は連続的に水洗
される。
A thick copper plate with a width of 45 mm and a length of 205 mm was prepared, and the entire surface of the plate was printed with resist, leaving only a small portion of the border between the portion to be etched and the pattern portion, and the other portions were printed with resist. This will be explained based on FIG. 1: 4 is a resist ink coated portion, 2 is a portion that will become an opening, and 3 is a portion to which resist ink is not applied. The size of the frame is 40 mm in width, 200 mm in length, and 0.25 mm in thickness, and the size of the square pattern is 5.7 mm square. Further, the width of the portion 3 to which the resist ink is not applied is only 0.2 mm, and only this portion comes into contact with the etching chemical solution. The copper plate 1 is etched from both sides of the portion 3 to which the resist ink is not applied, and when the opening portion is completely separated, the cross section will be approximately as shown in FIG. 2. As the etching progresses further, the cross section shown in the figure is completely penetrated from side to side, but in a natural state, the cut pieces at the openings do not fall. FIG. 3 is a cross-sectional view of the etching apparatus used in this embodiment, and the cut pieces at the openings that have been etched fall due to the propagation of vibrational energy from the ultrasonic vibrator 6. In this embodiment, ultrasonic vibration is used as a means for dropping the cut pieces, but means such as jet water flow or swinging of the frame 7 may also be used. Reference numeral 9 denotes a conveyor for transporting the fallen cut pieces outside the tank, and the cut pieces are continuously fed into the storage tank 14.
A washing water supply pipe 11 is connected to the storage tank 14, and the cut pieces fed therein are continuously washed with water.

[発明の効果] 以上説明したようにこの発明によれば金属箔の
開口させる部分と残す部分との境界部分のみがエ
ツチング液に触れることになるので、エツチング
液の使用量が少なくて済み、従つてエツチング老
化液の処理経費を節減することができ、しかも切
断片の回収を効果的に行うことができる。
[Effects of the Invention] As explained above, according to the present invention, only the boundary between the part of the metal foil to be opened and the part to be left comes into contact with the etching solution, so the amount of etching solution used can be reduced, which is different from the conventional etching solution. As a result, the cost of processing the aging etching solution can be reduced, and cut pieces can be collected more effectively.

【図面の簡単な説明】[Brief explanation of the drawing]

第1〜3図は、この発明の実施例を示す説明図
であり、第1図は銅板にレジストインクを塗布し
た状態を示す平面図、第2図はエツチングにより
開口部分の切り離しが完全に終了した状態を示す
断面図、第3図はエツチング装置の断面図、第4
図は従来例を示す平面図である。 1…銅板、2…開口させる部分、3…レジスト
インクの無い部分、4…レジストインク塗布部
分、5…エツチング槽、6…超音波振動子、7…
フレーム、8…コンベヤローラ、9…コンベヤ、
10…エツチング液、11…水洗水供給パイプ、
12…水洗水、13…オーバーフロー槽、14…
貯蔵タンク、15…水洗水出口。
Figures 1 to 3 are explanatory diagrams showing an embodiment of the present invention. Figure 1 is a plan view showing a state in which resist ink has been applied to a copper plate, and Figure 2 is a plan view showing the state in which the opening portion has been completely separated by etching. Fig. 3 is a sectional view of the etching device;
The figure is a plan view showing a conventional example. DESCRIPTION OF SYMBOLS 1... Copper plate, 2... Portion to be opened, 3... Portion without resist ink, 4... Portion coated with resist ink, 5... Etching tank, 6... Ultrasonic vibrator, 7...
Frame, 8...conveyor roller, 9...conveyor,
10... Etching liquid, 11... Washing water supply pipe,
12...Washing water, 13...Overflow tank, 14...
Storage tank, 15...Washing water outlet.

Claims (1)

【特許請求の範囲】[Claims] 1 (a)エツチングにより除去すべき部分と残存せ
しめる部分との境界部分を除いて全面をレジスト
印刷法によりコーテイングする工程、(b)これをエ
ツチング液に浸漬して前記コーテイングのされて
いない境界部分のみを溶解除去する工程、及び(c)
切断片を超音波振動、ジエツト水流、揺動等によ
り除去する工程から成ることを特徴とするエツチ
ングによるリードフレームパターンの形成方法。
1. (a) Coating the entire surface by resist printing except for the boundary between the part to be removed by etching and the part to be left; (b) immersing this in an etching solution to coat the uncoated boundary part. a step of dissolving and removing only the
A method for forming a lead frame pattern by etching, comprising a step of removing cut pieces by ultrasonic vibration, jet water flow, rocking, etc.
JP59252667A 1984-11-29 1984-11-29 Forming method for lead frame pattern by etching Granted JPS61131473A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59252667A JPS61131473A (en) 1984-11-29 1984-11-29 Forming method for lead frame pattern by etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59252667A JPS61131473A (en) 1984-11-29 1984-11-29 Forming method for lead frame pattern by etching

Publications (2)

Publication Number Publication Date
JPS61131473A JPS61131473A (en) 1986-06-19
JPH058580B2 true JPH058580B2 (en) 1993-02-02

Family

ID=17240552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59252667A Granted JPS61131473A (en) 1984-11-29 1984-11-29 Forming method for lead frame pattern by etching

Country Status (1)

Country Link
JP (1) JPS61131473A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6217187A (en) * 1985-07-17 1987-01-26 Hitachi Cable Ltd Production of lead frame

Also Published As

Publication number Publication date
JPS61131473A (en) 1986-06-19

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