JPH0587180B2 - - Google Patents
Info
- Publication number
- JPH0587180B2 JPH0587180B2 JP63230612A JP23061288A JPH0587180B2 JP H0587180 B2 JPH0587180 B2 JP H0587180B2 JP 63230612 A JP63230612 A JP 63230612A JP 23061288 A JP23061288 A JP 23061288A JP H0587180 B2 JPH0587180 B2 JP H0587180B2
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- lower substrate
- cavity recess
- adhesive layer
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
Description
本発明は、電子部品をパツケージするために用
いられる多層プラスチツクチツプキヤリアに関す
るものである。
The present invention relates to multilayer plastic chip carriers used for packaging electronic components.
ICチツプなど電子部品をパツケージするため
に用いられるプラスチツクピングリツドアレイ
(PPGA)やプラスチツクリードレスチツプキヤ
リア(PLCC)などのチツプキヤリアとして、積
層板などで形成した基板を多層に積層した多層プ
ラスチツクチツプキヤリアがある。
この多層プラスチツクチツプキヤリアAは、第
7図に示すように、中央部にキヤビテイ凹所2を
凹設した下基板3と中央部にキヤビテイ凹所2よ
りも大きな開口部8を設けた上基板9(一枚乃至
複数枚)を接着層7によつて積層接着して形成さ
れるものであり、下基板3の上面には内層回路と
なる回路5が、下基板3の下面や上基板9の上面
には外層回路11がそれぞれ銅箔のエツチング加
工などによつて形成してある。下基板3の上面に
形成される回路5は、第6図に示すようにキヤビ
テイ凹所2を中心とする放射状に多数本形成され
るものであり、この回路5のキヤビテイ凹所2側
の端部はインナーリード部4としてキヤビテイ凹
所2の縁部に沿つて並ぶように配置し、また反対
側の端部はスルーホール部を設けてランド部16
として下基板3の端部に位置するようにしてある
(第6図においては回路5を下基板3の一部にお
いてのみ図示し、他の部分は図示を省略してい
る)。そしてこのように形成される多層プラスチ
ツクチツプキヤリアAにあつて、キヤビテイ凹所
2にICチツプなどの電子部品1を実装し、下基
板3の回路5のインナーリード部4と電子部品1
との間にワイヤーボンデング14等を施すことに
よつて、電子部品1と回路5とを電気的に接続す
るものである。この回路5は外部への接続部とな
る端子ピンなどと接続されており、マザーボード
などに多層プラスチツクチツプキヤリアAを搭載
する際に回路5を介して電子部品1をマザーボー
ドに電気的に接続することができる。
Multi-layer plastic chip carriers are used as chip carriers such as plastic pin grid arrays (PPGAs) and plastic cleedless chip carriers (PLCCs) used to package electronic components such as IC chips. There is. As shown in FIG. 7, this multilayer plastic chip carrier A consists of a lower substrate 3 with a cavity recess 2 in the center and an upper substrate 9 with an opening 8 larger than the cavity 2 in the center. It is formed by laminating and adhering (one or more sheets) using an adhesive layer 7, and a circuit 5 serving as an inner layer circuit is on the upper surface of the lower substrate 3, and a circuit 5 that is an inner layer circuit is formed on the lower surface of the lower substrate 3 and the upper substrate 9. Outer layer circuits 11 are formed on the upper surface by etching copper foil or the like. A large number of circuits 5 formed on the upper surface of the lower substrate 3 are formed radially around the cavity recess 2 as shown in FIG. 6, and the end of the circuit 5 on the cavity recess 2 side The inner lead portion 4 is arranged along the edge of the cavity recess 2, and the opposite end is provided with a through hole portion and a land portion 16.
(In FIG. 6, the circuit 5 is shown only in a part of the lower board 3, and the other parts are omitted). In the multilayer plastic chip carrier A formed in this manner, an electronic component 1 such as an IC chip is mounted in the cavity recess 2, and the inner lead portion 4 of the circuit 5 of the lower board 3 and the electronic component 1 are mounted.
The electronic component 1 and the circuit 5 are electrically connected by performing wire bonding 14 or the like between them. This circuit 5 is connected to terminal pins etc. that serve as connections to the outside, and when the multilayer plastic chip carrier A is mounted on a motherboard etc., the electronic component 1 is electrically connected to the motherboard via the circuit 5. I can do it.
この多層プラスチツクチツプキヤリアAにおい
て問題となるのは、上下の基板3,9間の密着性
が悪いということである。すなわち、上下の基板
3,9はボンデイング用プリプレグなど接着層7
をはさんで加熱加圧成形することによつて、接着
層7を介して第6図のように積層接着されてい
る。しかし下基板3の上面に回路5を形成するに
あたつて、キヤビテイ凹所2は平面形状が角形に
形成されていて回路5のインナーリード部4がキ
ヤビテイ凹所2の縁部に沿つて配置されるように
してあるために、第7図に示すようにキヤビテイ
凹所2の角部の近傍の部分には回路5が設けられ
ないスぺース12が形成されることになる。そし
て加熱加圧成形して接着層7で上下の基板3,9
を積層接着するにあたつて、回路5は下基板3の
上面に厚みを有して形成されているために、回路
5が形成されていないスペース12では加圧力が
あまり作用せず、この回路5が形成されていない
スペース12の箇所で接着層7と基板3,9との
間に接着不良が生じて隙間が発生し、この隙間に
不純物や異物などが入り込んで性能が低下したり
信頼性が低下したりするおそれがあるという問題
が生じるのである。
そこで、接着層7と基板3,9の間の密着性を
高めて隙間が生じることを防ぐために、接着層7
の厚みを厚く設定することがさなれているが、こ
のように接着層7の厚みを厚くすると接着層7の
接着樹脂がはみ出して回路5のインナーリード部
4の全面が覆われ、電子部品1との間でワイヤー
ボンデング14を施すことが不可能になるおそれ
がある。
本発明は上記の点に鑑みて為されたものであ
り、接着層7を厚く設定する必要なく、接着層7
と上下の基板3,9との間の隙間が生じることを
防止することができる多層プラスチツクチツプキ
ヤリアを提供することを目的とするものである。
A problem with this multilayer plastic chip carrier A is that the adhesion between the upper and lower substrates 3 and 9 is poor. That is, the upper and lower substrates 3 and 9 are coated with an adhesive layer 7 such as prepreg for bonding.
By heat-pressing molding with the two layers in between, they are laminated and bonded via the adhesive layer 7 as shown in FIG. However, when forming the circuit 5 on the upper surface of the lower substrate 3, the cavity recess 2 has a rectangular planar shape, and the inner lead portion 4 of the circuit 5 is arranged along the edge of the cavity recess 2. Therefore, as shown in FIG. 7, a space 12 in which the circuit 5 is not provided is formed near the corner of the cavity recess 2. Then, the upper and lower substrates 3 and 9 are bonded with adhesive layer 7 by heating and pressure molding.
When laminating and bonding the circuits, since the circuit 5 is formed thickly on the upper surface of the lower substrate 3, the pressure force does not act much in the space 12 where the circuit 5 is not formed, and this circuit Poor adhesion occurs between the adhesive layer 7 and the substrates 3 and 9 at the space 12 where the space 5 is not formed, resulting in a gap, and impurities and foreign matter enter this gap, resulting in decreased performance and reliability. A problem arises in that there is a risk that the Therefore, in order to improve the adhesion between the adhesive layer 7 and the substrates 3 and 9 and prevent gaps from forming, the adhesive layer 7
However, when the thickness of the adhesive layer 7 is increased in this way, the adhesive resin of the adhesive layer 7 protrudes, covering the entire surface of the inner lead portion 4 of the circuit 5, and the electronic component 1 There is a possibility that it may become impossible to perform wire bonding 14 between the two. The present invention has been made in view of the above points, and there is no need to make the adhesive layer 7 thick.
It is an object of the present invention to provide a multilayer plastic chip carrier that can prevent the formation of a gap between the upper and lower substrates 3 and 9.
本発明に係る多層プラスチツクチツプキヤリア
は、電子部品1を収容する平面形状が角型のキヤ
ビテイ凹所2を下基板3の上面の中央部に設ける
と共に一端のインナーリード部4をキヤビテイ凹
所2の縁部に臨ませて多数本の回路5,5…を下
基板3の上面に放射状の配置で形成し、キヤビテ
イ凹所2の角部の近傍において下基板3の上面に
回路部6を設け、下基板3の上面に接着層7を介
してキヤビテイ凹所2よりも大きな平面形状の開
口部8を中央部に形成した上基板9を積層接着し
て成ることを特徴とするものである。
In the multilayer plastic chip carrier according to the present invention, a cavity recess 2 having a rectangular planar shape for accommodating an electronic component 1 is provided in the center of the upper surface of a lower substrate 3, and an inner lead portion 4 at one end is provided in the cavity recess 2. A large number of circuits 5, 5, . It is characterized in that an upper substrate 9 having a planar opening 8 larger than the cavity recess 2 formed in the center thereof is laminated and bonded to the upper surface of the lower substrate 3 via an adhesive layer 7.
本発明にあつては、キヤビテイ凹所2の角部の
近傍において下基板3の上面に回路部6を設ける
ことによつて、キヤビテイ凹所2の角部の近傍に
回路が設けられないスペースが形成されないよう
にし、この部分で接着層7と上下の基板3,9と
の間に接着不良が生じることを防止することがで
きる。
In the present invention, by providing the circuit section 6 on the upper surface of the lower substrate 3 near the corner of the cavity recess 2, a space where no circuit is provided near the corner of the cavity recess 2 can be created. It is possible to prevent the occurrence of poor adhesion between the adhesive layer 7 and the upper and lower substrates 3 and 9 at this portion.
以下本発明を実施例によつて詳述する。
下基板3や上基板9は銅張りエポキシ積層板な
ど金属箔を張つた樹脂積層板等で形成されるもの
であり、金属箔をエツチング加工などすることに
よつて各基板3,9には多数本の回路が形成して
ある。ここで、多層プラスチツクチツプキヤリア
Aの下層に位置することになる下基板3の上面の
中央部には平面形状が四角形のキヤビテイ凹所2
が凹設してある。この下基板3の上面に形成した
回路5は第6図において既述したように、キヤビ
テイ凹所2を中心とする放射状のパターンで設け
られているものであり、各回路5の一方の端部は
インナーリード部4としてキヤビテイ凹所2の縁
部に沿つて配置され、他方の端部はスルーホール
を設けたランド16として下基板3の端部に配置
されている。また下基板3の下面や上基板9の上
面には外層回路11が形成してある。
ここで、上記のように下基板3に回路5を設け
るにあたつて、回路5のインナーリード部4がキ
ヤビテイ凹所2の縁部に沿つて配置されるように
してあると、既述のようにキヤビテイ凹所2の角
部の近傍の部分には回路5が設けられないスペー
ス12が形成されることになる。そこで本発明で
は銅箔などの金属箔をエツチング加工して回路5
を形成する際に、回路5が不要なスペース12の
部分においても金属箔を除去せず回路部6として
残しておくことによつて、回路が設けられないス
ペース12が形成されないようにしてある。この
回路部6としては、第1図aや第1図bに示すよ
うに回路5とは独立した独立回路として形成する
ことができる他、第1図cに示すように回路5を
太くしてスペース12の箇所に回路部6を形成す
ることもできる。
そして下基板3と上基板9とを積層接着するに
あたつては、まず下基板3の上面に絶縁層13を
形成させる。絶縁層13はソルダーレジストなど
を用いて形成することができるものであり、液状
のソルダーレジストを下基板3の上面に塗布して
必要に応じて加熱して硬化させることによつて絶
縁層13を形成することができる。このように絶
縁層13を塗布して形成することによつて、下基
板3の上面に形成した回路5の隣合うものの間の
ギヤツプや回路5と回路部6との間のギヤツプを
絶縁層13で埋めることができ、下基板3の上面
を平滑にすることができる。ここで、回路5間や
回路5と回路部6の間の間隔が狭い程ギヤツプは
小さくなるため、絶縁層13によつてギヤツプを
確実に埋めることができるものであり、これらの
間隔lは2mm以下(好ましくは1.7mm以下)に設
定するのがよい。
上記のように下基板3の上面に絶縁層13を塗
布して形成したのち、この下基板3の上に接着層
7を介して開口部8を設けた上基板9を積層接着
する。接着層7は例えばボンデイング用のプリプ
レグ(樹脂含浸乾燥基材)によつて形成すること
ができ、プリプレグを上下の基板3,9間に挟み
込んで加熱加圧成形することによつて、上下の基
板3,9を接着層7で積層接着して第2図aに示
すような多層プラスチツクチツプキヤリアAを得
ることができるものである。下基板3のスペース
12の箇所には回転圧縮要素けられているために
積層する際の加圧力は均一に作用し、しかも下基
板3の表面は絶縁層13の塗布で平滑になつてい
るために、接着層7と上下の基板3,9との間で
密着が不十分になつて接着不良が発生して隙間が
生じるようなおそれはない。またこのように接着
層7と上下の基板3,9との間に隙間が生じるこ
とを防止できるために接着層7として厚みの厚い
ものを用いる必要がなく、上基板9の開口部8内
に突出する回路5のインナーリード部4が全面に
亘つて接着層7のはみ出しで覆われてしまうよう
なおそれもない。
尚、上記第1図a,b,cの実施例では、回路
部6は上基板9の開口部8の端縁よりも若干引つ
込むように形成したが(引つ込み寸法mは2mm以
下、好ましくは1.7mm以下がよい。)、第3図a,
b,cに示すように逆に回路部6を開口部8内に
若干突出させるようにしてもよい。また、第2図
bに示すように上基板9の下面に回路を形成する
と、この回路は上下の基板3,9間に挟まれる内
層回路17となるので、上下の基板3,9を積層
する前に上基板9の下面にも絶縁層13を塗布し
て形成して上基板9の下面を平滑にしておくよう
にするのがよい。第4図及び第5図の実施例は、
下基板3の上面に塗布形成する絶縁層13を上基
板9の開口部8内に若干はみ出させるようにした
ものである。第5図aは上基板9に内層回路17
を設けていないものを、第5図bは上基板9に内
層回路17を設けたものをそれぞれ示す。また上
記各実施例では、電子部品1を上向きに取り付け
るようにした多層プラスチツクピングリツドアレ
イAを示したが、電子部品1を下向きに取り付け
るように多層プラスチツクピングリツドアレイA
を形成するようにしてもよいのはいうまでもない
(第2図についていえば上下逆の状態のもの)。
The present invention will be explained in detail below using examples. The lower substrate 3 and the upper substrate 9 are made of a resin laminate covered with metal foil, such as a copper-clad epoxy laminate, and each substrate 3, 9 has a large number of etchings formed by etching the metal foil. The circuit of the book is formed. Here, in the center of the upper surface of the lower substrate 3 located below the multilayer plastic chip carrier A, there is a cavity recess 2 having a rectangular planar shape.
is recessed. As already described in FIG. 6, the circuits 5 formed on the upper surface of the lower substrate 3 are provided in a radial pattern centered on the cavity recess 2, and one end of each circuit 5 is arranged as an inner lead part 4 along the edge of the cavity recess 2, and the other end is arranged at the end of the lower substrate 3 as a land 16 provided with a through hole. Further, an outer layer circuit 11 is formed on the lower surface of the lower substrate 3 and the upper surface of the upper substrate 9. Here, when providing the circuit 5 on the lower substrate 3 as described above, the inner lead portion 4 of the circuit 5 is arranged along the edge of the cavity recess 2, as described above. Thus, a space 12 in which the circuit 5 is not provided is formed near the corner of the cavity recess 2. Therefore, in the present invention, metal foil such as copper foil is etched to form the circuit 5.
When forming the circuit 5, the metal foil is not removed even in the space 12 where the circuit 5 is not required, but is left as the circuit part 6, so that the space 12 where no circuit is not provided is not formed. This circuit section 6 can be formed as an independent circuit independent of the circuit 5 as shown in FIGS. 1a and 1b, or by making the circuit 5 thicker as shown in FIG. The circuit section 6 can also be formed in the space 12. When laminating and bonding the lower substrate 3 and the upper substrate 9, the insulating layer 13 is first formed on the upper surface of the lower substrate 3. The insulating layer 13 can be formed using a solder resist or the like, and the insulating layer 13 is formed by applying a liquid solder resist to the upper surface of the lower substrate 3 and heating and curing it as necessary. can be formed. By coating and forming the insulating layer 13 in this way, the gap between adjacent circuits 5 formed on the upper surface of the lower substrate 3 and the gap between the circuit 5 and the circuit section 6 can be removed by the insulating layer 13. The upper surface of the lower substrate 3 can be made smooth. Here, the narrower the gap between the circuits 5 or between the circuit 5 and the circuit part 6, the smaller the gap, so the gap can be reliably filled with the insulating layer 13, and the gap l between these is 2 mm. It is best to set it below (preferably 1.7 mm or below). After the insulating layer 13 is applied and formed on the upper surface of the lower substrate 3 as described above, the upper substrate 9 in which the opening 8 is provided is laminated and bonded on the lower substrate 3 via the adhesive layer 7. The adhesive layer 7 can be formed of, for example, prepreg (resin-impregnated dry base material) for bonding, and is formed by sandwiching the prepreg between the upper and lower substrates 3 and 9 and molding it under heat and pressure. By laminating and adhering 3 and 9 with an adhesive layer 7, a multilayer plastic chip carrier A as shown in FIG. 2a can be obtained. Since the space 12 of the lower substrate 3 is provided with a rotary compression element, the pressure force applied during lamination is uniform, and the surface of the lower substrate 3 is smoothed by the application of the insulating layer 13. In addition, there is no risk of insufficient adhesion between the adhesive layer 7 and the upper and lower substrates 3 and 9, resulting in poor adhesion and the creation of a gap. In addition, since it is possible to prevent gaps from forming between the adhesive layer 7 and the upper and lower substrates 3 and 9 in this way, there is no need to use a thick adhesive layer 7, and it is possible to prevent the formation of gaps between the adhesive layer 7 and the upper and lower substrates 3 and 9. There is no fear that the entire surface of the protruding inner lead portion 4 of the circuit 5 will be covered by the protruding adhesive layer 7. In the embodiments shown in FIGS. 1a, b, and c, the circuit section 6 is formed to be slightly retracted from the edge of the opening 8 of the upper substrate 9 (the retraction dimension m is 2 mm or less). , preferably 1.7 mm or less), Figure 3a,
Conversely, the circuit portion 6 may be slightly protruded into the opening 8 as shown in b and c. Furthermore, when a circuit is formed on the lower surface of the upper substrate 9 as shown in FIG. It is preferable to apply and form the insulating layer 13 on the lower surface of the upper substrate 9 beforehand to make the lower surface of the upper substrate 9 smooth. The embodiments shown in FIGS. 4 and 5 are as follows:
The insulating layer 13 coated on the upper surface of the lower substrate 3 is made to slightly protrude into the opening 8 of the upper substrate 9. FIG. 5a shows an inner layer circuit 17 on the upper substrate 9.
FIG. 5b shows one in which the inner layer circuit 17 is provided on the upper substrate 9. Furthermore, in each of the above embodiments, the multilayer plastic pingrid array A is shown in which the electronic component 1 is mounted facing upward, but the multilayer plastic pingrid array A is designed such that the electronic component 1 is mounted downward.
Needless to say, it is also possible to form a structure in which the structure is upside down (as shown in FIG. 2, it is upside down).
上述のように本発明にあつては、角形に形成さ
れるキヤビテイ凹所の角部の近傍において下基板
の上面に回路部を設けるようにしたので、キヤビ
テイ凹所の角部の近傍に回路が設けられないスペ
ースが形成されないようにすることができ、この
箇所で接着層と上下の基板との間に密着不良が生
じることを防止して隙間が生じることを防ぐこと
ができるものである。
As described above, in the present invention, the circuit portion is provided on the upper surface of the lower substrate near the corner of the cavity recess formed in a rectangular shape, so that the circuit is provided near the corner of the cavity recess. It is possible to prevent the formation of spaces that are not provided, and it is possible to prevent poor adhesion between the adhesive layer and the upper and lower substrates at this location, thereby preventing the formation of gaps.
第1図a,b,cはそれぞれ本発明の各実施例
の一部の平面図、第2図a,bは同上の実施例の
一部の断面図、第3図a,b,cはそれぞれ本発
明の他の実施例の一部の平面図、第4図は本発明
のさらに他の実施例の一部の平面図、第5図a,
bは同上の実施例の断面図、第6図は従来例の平
面図、第7図は同上の従来例の断面図である。
1は電子部品、2はキヤビテイ凹所、3は下基
板、4はインナーリード部、5は回路、6は回路
部、7は接着層、8は開口部、9は上基板であ
る。
Figures 1a, b, and c are plan views of a portion of each embodiment of the present invention, Figures 2a and b are sectional views of a portion of the same embodiment, and Figures 3a, b, and c are sectional views of a portion of the same embodiment. FIG. 4 is a plan view of a part of another embodiment of the invention, FIG. 4 is a plan view of a part of still another embodiment of the invention, and FIGS.
FIG. 6 is a plan view of the conventional example, and FIG. 7 is a sectional view of the conventional example. 1 is an electronic component, 2 is a cavity recess, 3 is a lower substrate, 4 is an inner lead portion, 5 is a circuit, 6 is a circuit portion, 7 is an adhesive layer, 8 is an opening, and 9 is an upper substrate.
Claims (1)
テイ凹所を下基板の上面の中央部に設けると共に
一端のインナーリード部をキヤビテイ凹所の縁部
に臨ませて多数本の回路を下基板の上面に放射状
の配置で形成し、キヤビテイ凹所の角部の近傍に
おいて下基板の上面に回路部を設け、下基板の上
面に接着層を介してキヤビテイ凹所よりも大きな
平面形状の開口部を中央部に形成した上基板を積
層接着して成ることを特徴とする多層プラスチツ
クチツプキヤリア。 2 隣合う回路の間隔寸法を2mm以下に形成して
成ることを特徴とする請求項1記載の多層プラス
チツクチツプキヤリア。[Scope of Claims] 1. A cavity recess with a rectangular planar shape for accommodating an electronic component is provided in the center of the upper surface of the lower substrate, and a plurality of inner leads at one end are made to face the edge of the cavity recess. A circuit section is formed on the upper surface of the lower substrate in a radial arrangement, a circuit section is provided on the upper surface of the lower substrate near the corner of the cavity recess, and a circuit section larger than the cavity recess is formed on the upper surface of the lower substrate via an adhesive layer. A multilayer plastic chip carrier characterized by being formed by laminating and bonding an upper substrate with a planar opening formed in the center. 2. The multilayer plastic chip carrier according to claim 1, wherein the distance between adjacent circuits is 2 mm or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23061288A JPH0278252A (en) | 1988-09-14 | 1988-09-14 | Multilayer plastic chip carrier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23061288A JPH0278252A (en) | 1988-09-14 | 1988-09-14 | Multilayer plastic chip carrier |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0278252A JPH0278252A (en) | 1990-03-19 |
| JPH0587180B2 true JPH0587180B2 (en) | 1993-12-15 |
Family
ID=16910491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23061288A Granted JPH0278252A (en) | 1988-09-14 | 1988-09-14 | Multilayer plastic chip carrier |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0278252A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5818114A (en) * | 1995-05-26 | 1998-10-06 | Hewlett-Packard Company | Radially staggered bond pad arrangements for integrated circuit pad circuitry |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4630172A (en) * | 1983-03-09 | 1986-12-16 | Printed Circuits International | Semiconductor chip carrier package with a heat sink |
| JPS614456U (en) * | 1984-06-13 | 1986-01-11 | イビデン株式会社 | Plug-in package board |
-
1988
- 1988-09-14 JP JP23061288A patent/JPH0278252A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0278252A (en) | 1990-03-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5064210B2 (en) | Electronic module and manufacturing method thereof | |
| JP4208631B2 (en) | Manufacturing method of semiconductor device | |
| JP3198796B2 (en) | Mold module | |
| CA1116308A (en) | Tape automated bonding test board | |
| US20030183418A1 (en) | Electrical circuit and method of formation | |
| KR20010087268A (en) | Method for producing printed wiring board | |
| JPWO2000070677A1 (en) | Semiconductor device and manufacturing method thereof, circuit board and electronic device | |
| US20040007770A1 (en) | Semiconductor-mounting substrate used to manufacture electronic packages, and production process for producing such semiconductor-mounting substrate | |
| KR100608610B1 (en) | Printed circuit board, manufacturing method thereof and semiconductor package using same | |
| JP2715934B2 (en) | Multilayer printed wiring board device and method of manufacturing the same | |
| JPH11121527A (en) | Bare chip mounting method, ceramic substrate manufacturing method, ceramic substrate, and semiconductor device | |
| KR100498470B1 (en) | Multi chip package and method for manufacturing the same | |
| JPH0587180B2 (en) | ||
| CN113556884B (en) | Embedded circuit board and manufacturing method thereof | |
| JP3624512B2 (en) | Manufacturing method of electronic component mounting board | |
| CN112492777B (en) | Circuit board and manufacturing method thereof | |
| JP5221682B2 (en) | Printed circuit board and manufacturing method thereof | |
| JPH0278253A (en) | Multilayer plastic chip carrier | |
| CN113838829B (en) | Packaging substrate and manufacturing method thereof | |
| JP2001144445A (en) | Manufacturing method of multilayer printed wiring board | |
| JP3959697B2 (en) | Semiconductor device, semiconductor device manufacturing method, and wiring board | |
| CN119521536A (en) | Circuit board and method for manufacturing the same | |
| TW202610359A (en) | Circuit board assembly and manufacturing method thereof | |
| KR20000059562A (en) | Flexible Substrates of Multi Metal Layer | |
| JPS63255996A (en) | Multilayer board for semiconductor chip mounting |