JPH06100426B2 - Hot isostatic pressing equipment - Google Patents
Hot isostatic pressing equipmentInfo
- Publication number
- JPH06100426B2 JPH06100426B2 JP62109855A JP10985587A JPH06100426B2 JP H06100426 B2 JPH06100426 B2 JP H06100426B2 JP 62109855 A JP62109855 A JP 62109855A JP 10985587 A JP10985587 A JP 10985587A JP H06100426 B2 JPH06100426 B2 JP H06100426B2
- Authority
- JP
- Japan
- Prior art keywords
- heating furnace
- cylindrical body
- hot isostatic
- isostatic pressing
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001513 hot isostatic pressing Methods 0.000 title claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 46
- 239000007789 gas Substances 0.000 claims description 28
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
- 230000035939 shock Effects 0.000 claims description 14
- 239000000919 ceramic Substances 0.000 claims description 11
- 230000003647 oxidation Effects 0.000 claims description 9
- 238000007254 oxidation reaction Methods 0.000 claims description 9
- 239000011810 insulating material Substances 0.000 claims description 8
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 7
- 229910001882 dioxygen Inorganic materials 0.000 claims description 7
- 239000011261 inert gas Substances 0.000 claims description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000008646 thermal stress Effects 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000005343 cylinder glass Substances 0.000 description 1
- 238000004031 devitrification Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000000462 isostatic pressing Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B11/00—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses
- B30B11/001—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using a flexible element, e.g. diaphragm, urged by fluid pressure; Isostatic presses
- B30B11/002—Isostatic press chambers; Press stands therefor
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Powder Metallurgy (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、加熱炉内に収納した被処理物を同加熱炉に設
けた加熱装置により加熱するとともに圧力媒体ガス容器
から同加熱炉へ供給した圧力媒体ガスにより加圧して、
熱間静水圧加圧処理を行う熱間静水圧加圧処理装置に関
するものである。DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention heats an object to be treated housed in a heating furnace by a heating device provided in the heating furnace and supplies the same from a pressure medium gas container to the heating furnace. Pressurized with the selected pressure medium gas,
The present invention relates to a hot isostatic pressing device that performs hot isostatic pressing.
（従来の技術） 従来の熱間静水圧加圧処理装置を第２図により説明する
と、（11）が耐圧円筒体、（12）が同耐圧円筒体（11）
の上端開口部を閉じる上蓋、（13）が同耐圧円筒体（1
1）の下端開口部を閉じる下蓋、（14）がヨークフレー
ム、（15）が上記上蓋（12）と上記耐圧円筒体（11）と
の間をシールする上蓋ガスシール、（16）が上記下蓋
（13）と上記耐圧円筒体（11）との間をシールする下蓋
ガスシール、（17）が上記耐圧円筒体（11）と上記上蓋
（12）と上記下蓋（13）との間に形成された高圧室、
（18）が同高圧室（17）内に収納される加熱炉ユニツト
で、同加熱炉ユニツト（18）が断熱材製円筒体（19）と
同断熱材製円筒体（19）を取り囲む炉体ケーシング（2
0）とにより構成されている。また（21）が同加熱炉ユ
ニツト（18）内側部に配設した側面ヒータ、（22）が同
加熱炉ユニツト（18）内底部に配設した炉床ヒータ、
（23）が上記側面ヒータ（21）及び上記炉床ヒータ（2
2）の接点に接離自在に接触する下蓋（13）側の電極、
（24）が同電極（23）に接続した給電ケーブルを収納し
た給電配管、圧力媒体ガスを上記高圧室（17）内及び上
記加熱炉ユニツト（18）内に給排するガス給排気管で、
加熱炉ユニツト（18）がヨークフレーム（14）外にあっ
て、上蓋（12）が開いているときに、被処理物と同被処
理物を収納した加熱炉ユニツト（18）とを耐圧円筒体
（11）内に収容し、次いで上蓋（12）により耐圧円筒体
（11）の上端開口部を気密的に閉じ、次いで耐圧円筒体
（11）をヨークフレーム（14）内へ送り込み、次いで圧
力媒体ガスを圧力媒体ガス容器（図示せず）からガス給
排気管（24）を経て高圧室（17）内及び加熱炉ユニツト
（18）へ供給して、同高圧室（17）内及び同加熱炉ユニ
ツト（18）内を加圧する一方、給電ケーブルから電極
（23）を経て側面ヒータ（21）及び炉床ヒータ（22）へ
給電して、加熱炉ユニツト（18）内の被処理物を加熱
し、また加熱炉ユニツト（18）内のガス圧力及び温度が
所定の処理条件に到達したら、その状態を一定時間保持
して、その間に被処理物の熱間静水圧加圧処理を行い、
また一定時間経過したら、上記給電を停止して、加熱炉
ユニツト（18）内を冷却し、また高圧室（17）内及び加
熱炉ユニツト（18）内の圧力媒体ガスをガス給排気管
（24）を経て大気中へ排気し、次いで耐圧円筒体（11）
をヨークフレーム（14）外へ取り出し、次いで上蓋（1
2）を取り外して、加熱炉ユニツト（18）を被処理物と
ともに耐圧円筒体（11）外へ取り出すようにしている。(Prior Art) A conventional hot isostatic pressurizing apparatus will be described with reference to FIG. 2. (11) is a pressure-proof cylinder, (12) is the same pressure-proof cylinder (11).
The upper lid that closes the upper opening of the
The lower lid closing the lower end opening of 1), (14) the yoke frame, (15) the upper lid gas seal that seals between the upper lid (12) and the pressure-resistant cylindrical body (11), and (16) the above. A lower lid gas seal that seals between the lower lid (13) and the pressure-resistant cylindrical body (11), and (17) includes the pressure-resistant cylindrical body (11), the upper lid (12), and the lower lid (13). A high pressure chamber formed between
(18) is a heating furnace unit housed in the high-pressure chamber (17), and the heating furnace unit (18) surrounds the heat insulating material cylindrical body (19) and the heat insulating material cylindrical body (19). Casing (2
0) and. Further, (21) is a side heater disposed inside the heating furnace unit (18), and (22) is a hearth heater disposed inside the heating furnace unit (18).
(23) is the side heater (21) and the hearth heater (2)
The electrode on the side of the lower lid (13) that comes into contact with and separates from the contact of 2),
(24) is a power supply pipe containing a power supply cable connected to the electrode (23), and a gas supply / exhaust pipe for supplying / discharging the pressure medium gas into the high pressure chamber (17) and the heating furnace unit (18).
When the heating furnace unit (18) is outside the yoke frame (14) and the upper lid (12) is open, the object to be treated and the heating furnace unit (18) containing the object to be treated are pressure-resistant cylindrical bodies. (11), then the upper lid (12) hermetically closes the upper end opening of the pressure-resistant cylindrical body (11), then sends the pressure-resistant cylindrical body (11) into the yoke frame (14), and then the pressure medium. Gas is supplied from a pressure medium gas container (not shown) through the gas supply / exhaust pipe (24) into the high pressure chamber (17) and into the heating furnace unit (18), and inside the high pressure chamber (17) and the heating furnace. While pressurizing the unit (18), power is supplied from the power supply cable to the side heater (21) and hearth heater (22) through the electrode (23) to heat the object to be processed in the heating furnace unit (18). When the gas pressure and temperature in the heating furnace unit (18) reach the specified processing conditions, The holding period of time, subjected to hot isostatic pressure treatment of the workpiece during,
After a certain time, the power supply is stopped to cool the heating furnace unit (18), and the pressure medium gas in the high pressure chamber (17) and the heating furnace unit (18) is supplied to the gas supply / exhaust pipe (24). ) And exhaust to the atmosphere, and then the pressure-resistant cylindrical body (11)
To the outside of the yoke frame (14) and then the top lid (1
2) is removed and the heating furnace unit (18) is taken out of the pressure resistant cylindrical body (11) together with the object to be treated.
（発明が解決しようとする課題） 前記第２図に示す従来の熱間静水圧加圧処理装置では、
圧力媒体ガスにアルゴンガス、ヘリウムガス等の不活性
ガスを使用しているので、加熱炉ユニツト（18）の炉体
ケーシング（20）等に金属材料（ステンレス綱、モリブ
デン等）やグラフアイトを使用しているが、圧力媒体ガ
スに、酸素ガスまたは不活性ガスに酸素ガスを含む圧力
媒体ガスを使用する場合には、上記金属材料が酸化する
ので、セラミツクス材料を使用せざるを得ない。しかし
セラミツクス材料は、熱衝撃、熱応力により、割れ易く
て、熱間静水圧加圧処理を継続的に行うことができない
という問題があった。(Problems to be Solved by the Invention) In the conventional hot isostatic pressing apparatus shown in FIG.
Since an inert gas such as argon gas or helium gas is used as the pressure medium gas, a metal material (stainless steel, molybdenum, etc.) or graphite is used for the furnace casing (20) of the heating furnace unit (18). However, when a pressure medium gas containing oxygen gas or an inert gas containing oxygen gas is used as the pressure medium gas, the metal material is oxidized, so that the ceramic material must be used. However, the ceramic material has a problem that it is easily cracked due to thermal shock and thermal stress, and hot isostatic pressing cannot be continuously performed.
本発明は前記の問題点に鑑み提案するのであり、その目
的とする処は、加熱炉内の温度を均一に保持できる上
に、加熱炉の熱衝撃、熱応力による割れを防止できて、
熱間静水圧加圧処理を継続的に実施できる熱間静水圧加
圧処理装置を提供しようとする点にある。The present invention is proposed in view of the above problems, the object of the purpose is to be able to uniformly maintain the temperature in the heating furnace, thermal shock of the heating furnace, it is possible to prevent cracking due to thermal stress,
Another object is to provide a hot isostatic pressing apparatus capable of continuously performing hot isostatic pressing.
（課題を解決するための手段） 上記の目的を達成するために、本発明は、加熱炉内に収
納した被処理物を同加熱炉に設けた加熱装置により加熱
するとともに、同加熱炉内へ供給した酸素ガスまたは不
活性ガスに酸素ガスを含む圧力媒体ガスにより加圧し
て、熱間静水圧加圧処理を行う熱間静水圧加圧処理装置
において、前記加熱炉壁を、耐熱性と耐酸化性、耐熱衝
撃性とを有し且つ一端部が閉じられた最内層の多孔質セ
ラミツクス製の円筒体と、ガス不透過性と耐酸化性、耐
熱衝撃性とを有し且つ一端部が閉じられた中間の石英ガ
ラス製の円筒体と、同中間の円筒体を取り囲む最外層の
断熱材製円筒体とにより構成している。(Means for Solving the Problems) In order to achieve the above-mentioned object, the present invention heats an object to be treated stored in a heating furnace by a heating device provided in the heating furnace, In a hot isostatic pressurizing apparatus for pressurizing a supplied oxygen gas or an inert gas with a pressure medium gas containing oxygen gas, the hot isostatic pressurizing apparatus performs heat isostatic pressing with heat resistance and acid resistance. A cylindrical body made of a porous ceramic having an innermost layer, which has chemical compatibility and thermal shock resistance, and has gas impermeability, oxidation resistance, thermal shock resistance, and one end closed. The intermediate cylindrical body made of quartz glass and the cylindrical body made of the heat insulating material of the outermost layer surrounding the intermediate cylindrical body.
（作用） 本発明の熱間静水圧加圧処理装置は前記のように構成さ
れており、ガス不透過性と耐酸化性、耐熱衝撃性とを有
し且つ一端部が閉じられた中間の石英ガラス製円筒体
と、加熱炉内に配設した側面ヒータとの間に、耐熱性と
耐酸化性、耐熱衝撃性とを有し且つ一端部が閉じられた
最内層の多孔質セラミツクス製の円筒体があり、同最内
層の円筒体が上記側面ヒータから上記中間の円筒体に向
かう熱を遮断する一方、最外層の断熱材製円筒体が上記
中間の円筒体から高圧室への熱の放散を防止する。(Operation) The hot isostatic pressing apparatus of the present invention is configured as described above, and is an intermediate quartz having gas impermeability, oxidation resistance, and thermal shock resistance and having one end closed. A cylindrical innermost layer made of porous ceramics, which has heat resistance, oxidation resistance, and thermal shock resistance between the glass cylindrical body and the side heater arranged in the heating furnace and whose one end is closed. The innermost cylindrical body blocks the heat from the side heater to the intermediate cylindrical body, while the outermost insulating cylindrical body dissipates the heat from the intermediate cylindrical body to the high pressure chamber. Prevent.
（実施例） 次に本発明の熱間静水圧加圧処理装置の加熱炉を第１図
に示す一実施例により説明すると、(1)が加熱炉で、同
加熱炉(1)が、耐熱性と耐酸化性、耐熱衝撃性とを有し
且つ上端部が閉じられた最内層の多孔質セラミツクス製
の円筒体(2)と、ガス不透過性と耐酸化性、耐熱衝撃性
とを有し且つ上端部が閉じられた中間の石英ガラス製円
筒体(3)と、同中間の円筒体(3)を取り囲む最外層の断熱
材製円筒体(4)とにより構成されている。なお(5)は上記
断熱材製円筒体(4)を取り囲む炉体ケーシング、(6)は同
炉体ケーシング(5)に固定した断熱材固定フランジであ
る。(Example) Next, a heating furnace of the hot isostatic pressing apparatus of the present invention will be described with reference to an example shown in FIG. 1. (1) is a heating furnace, and the heating furnace (1) is heat resistant. Of the innermost layer made of porous ceramics (2), which has gas resistance, oxidation resistance, and thermal shock resistance, and is closed at the upper end, and has gas impermeability, oxidation resistance, and thermal shock resistance. In addition, it is composed of an intermediate quartz glass cylindrical body (3) whose upper end is closed, and an outermost heat insulating material cylindrical body (4) surrounding the intermediate cylindrical body (3). In addition, (5) is a furnace casing surrounding the heat insulating cylinder (4), and (6) is a heat insulating material fixing flange fixed to the furnace casing (5).
上記中間の円筒体(3)は、石英ガラスにより構成されて
いるが、石英ガラスは、耐熱性が高い。しかも熱膨脹率
が例えば５×10-7／℃、０〜1000℃と低く、熱衝撃に対
する抵抗力が高くて、断熱シエルとして使用した場合に
割れることがない。但し石英ガラスは、1300℃以上の温
度で長時間使用すると、透明性が失われて、徐々に破損
するので、中間の石英ガラス製円筒体(3)の内側表面温
度を1300℃以下、好ましくは1100℃以下に保持する必要
がある。The intermediate cylindrical body (3) is made of quartz glass, which has high heat resistance. Moreover, the coefficient of thermal expansion is as low as 5 × 10 −7 / ° C. and 0 to 1000 ° C., respectively, and the resistance to thermal shock is high, so that it does not crack when used as an adiabatic shell. However, quartz glass loses transparency and gradually breaks when used for a long time at a temperature of 1300 ° C. or higher, so that the inner surface temperature of the intermediate quartz glass cylindrical body (3) is 1300 ° C. or lower, preferably Must be kept below 1100 ° C.
また上記最内層の多孔質セラミツクス製円筒体(2)は、
上記条件を満足させるために、中間の石英ガラス製円筒
体(3)の内側に配設しており、多孔質セラミツクス材に
より構成されて、側面ヒータ(7)からの熱を遮断して、
中間の石英ガラス製円筒体(3)を上記温度に保持する。Further, the innermost layer made of porous ceramics cylindrical body (2),
In order to satisfy the above conditions, it is arranged inside the intermediate quartz glass cylindrical body (3), is made of a porous ceramics material, shuts off the heat from the side heater (7),
The intermediate quartz glass cylinder (3) is maintained at the above temperature.
また上記中間の石英ガラス製円筒体(3)を取り囲む最外
層の断熱材製円筒体(4)は、セラミツクスフアイバーに
より構成されている。Further, the outermost heat insulating material cylindrical body (4) surrounding the intermediate quartz glass cylindrical body (3) is composed of a ceramic fiber.
次に前記第１図に示す加熱炉の使用例を説明する。加熱
炉(1)内の温度を1500℃に保持し、且つ酸素ガス濃度20
％のアルゴン・酸素混合ガスを加熱炉(1)内へ供給し、
熱間静水圧加圧処理に使用したところ、中間の石英ガラ
ス製円筒体(3)の温度が石英ガラスの失透温度（透明性
を失う温度）以下の1050℃に抑えられて、中間の円筒体
(3)の破損が防止された。また加熱炉(1)内の温度分布が
±１℃になって、均熱性が得られた。Next, an example of using the heating furnace shown in FIG. 1 will be described. The temperature in the heating furnace (1) is maintained at 1500 ° C and the oxygen gas concentration is 20
% Argon / oxygen mixed gas is supplied into the heating furnace (1),
When used for hot isostatic pressing, the temperature of the intermediate quartz glass cylinder (3) was suppressed to 1050 ° C, which is below the devitrification temperature (the temperature at which it loses transparency) of the quartz glass, and the intermediate cylinder body
Damage of (3) was prevented. Further, the temperature distribution in the heating furnace (1) became ± 1 ° C, and uniform heat distribution was obtained.
なお実験的に、中間の石英ガラス製円筒体(3)を除去し
て、加熱炉(1)を最内層の多孔質セラミツクス製円筒体
(2)と最外層の断熱材製円筒体(4)とにより構成したとこ
ろ、円筒体と圧力媒体ガスが透過するため、断熱材製円
筒体(4)を含む加熱炉(1)壁の全体に対流が生じ、加熱炉
(1)内の上下部に100℃程度の温度差が発生して、均熱性
が得られなかった。Experimentally, the intermediate quartz glass cylinder (3) was removed, and the heating furnace (1) was replaced by the innermost porous ceramic cylinder.
(2) and the outermost heat insulating cylinder (4), the cylinder and the pressure medium gas permeate, the heating furnace including the heat insulating cylinder (4) (1) the entire wall Convection occurs in the heating furnace
A temperature difference of about 100 ° C. occurred in the upper and lower parts of (1), and uniform heating was not obtained.
（発明の効果） 本発明の熱間静水圧加圧処理装置は前記のようにガス不
透過性と耐酸化性、耐熱衝撃性とを有し且つ一端部が閉
じられた中間の石英ガラス製の円筒体と、加熱炉内に配
設した側面ヒータとの間に、耐熱性と耐酸化性、耐熱衝
撃性とを有し且つ一端部が閉じられた最内層の多孔質セ
ラミツクス製の円筒体があり、同最内層の多孔質セラミ
ツクス製円筒体が上記側面ヒータから上記中間の石英ガ
ラス製円筒体に向かう熱を遮断する一方、最外層の断熱
材製円筒体が上記中間の石英ガラス製円筒体から高圧室
への熱の放散を防止するので、石英ガラスにより構成さ
れた中間の円筒体の熱衝撃、熱応力による割れを防止で
きて、これにより中間の円筒体内、外での圧力媒体ガス
の対流を発生させることがなく、加熱炉内の温度を均一
に保持でき、熱間静水圧加圧処理を継続的に実施できる
効果がある。(Effects of the Invention) As described above, the hot isostatic pressing apparatus of the present invention is made of an intermediate quartz glass having gas impermeability, oxidation resistance, and thermal shock resistance and having one end closed. Between the cylindrical body and the side heater arranged in the heating furnace, there is a cylindrical body made of porous ceramics which has heat resistance, oxidation resistance, and thermal shock resistance and has one end closed. Yes, while the porous ceramics cylinder of the innermost layer blocks heat directed from the side heater to the intermediate quartz glass cylindrical body, while the outermost heat insulating material cylindrical body is the intermediate quartz glass cylindrical body. Since the heat is prevented from being dissipated to the high-pressure chamber from the inside, the intermediate cylinder made of quartz glass can be prevented from cracking due to thermal shock and thermal stress, which can prevent the pressure medium gas inside and outside the middle cylinder. Uniform temperature in the heating furnace without generating convection There is an effect that it can be held and the hot isostatic pressing process can be continuously performed.
第１図は本発明に係わる熱間静水圧加圧処理装置の加熱
炉の一実施例を示す縦断側面図、第２図は従来の熱間静
水圧加圧処理装置を示す縦断側面図である。 (1)……加熱炉、(2)……最内層のセラミツクス製の円筒
体、(3)……中間の石英ガラス製の円筒体、(4)……最外
層の断熱材製円筒体、(7)……加熱装置。FIG. 1 is a vertical sectional side view showing an embodiment of a heating furnace of a hot isostatic pressing apparatus according to the present invention, and FIG. 2 is a vertical side view showing a conventional hot isostatic pressing apparatus. . (1) …… Heating furnace, (2) …… Ceramics cylinder in the innermost layer, (3) …… Cylinder glass cylinder in the middle, (4) …… Insulator cylinder in the outermost layer, (7) …… Heating device.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 鴛海 和彦 広島県広島市西区観音新町４丁目６番22号 三菱重工業株式会社広島研究所内 (56)参考文献 特開 昭61−289287（ＪＰ，Ａ) 特公 昭62−29706（ＪＰ，Ｂ２) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kazuhiko Oki 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima City, Hiroshima Prefecture Mitsubishi Heavy Industries, Ltd. Hiroshima Research Laboratory (56) Reference JP-A-61-289287 (JP, A) Japanese Patent Publication Sho 62-29706 (JP, B2)
Claims (1)
設けた加熱装置より加熱するとともに、同加熱炉内へ供
給した酸素ガスまたは不活性ガスに酸素ガスを含む圧力
媒体ガスにより加圧して、熱間静水圧加圧処理を行う熱
間静水圧加圧処理装置において、前記加熱炉壁を、耐熱
性と耐酸化性、耐熱衝撃性とを有し且つ一端部が閉じら
れた最内層の多孔質セラミツクス製の円筒体と、ガス不
透過性と耐酸化性、耐熱衝撃性とを有し且つ一端部が閉
じられた中間の石英ガラス製の円筒体と、同中間の円筒
体を取り囲む最外層の断熱材製円筒体とにより構成した
ことを特徴とする熱間静水圧加圧処理装置。1. An object to be treated contained in a heating furnace is heated by a heating device provided in the heating furnace, and oxygen gas or an inert gas supplied into the heating furnace is heated by a pressure medium gas containing oxygen gas. In a hot isostatic pressing apparatus that pressurizes and performs hot isostatic pressing, the heating furnace wall has heat resistance, oxidation resistance, and thermal shock resistance, and one end is closed. Cylindrical body made of porous ceramics of the innermost layer, an intermediate quartz glass cylindrical body having gas impermeability, oxidation resistance, and thermal shock resistance and closed at one end, and the intermediate cylinder body An outermost layer of a heat insulating material cylindrical body that surrounds the hot isostatic pressing apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62109855A JPH06100426B2 (en) | 1987-05-07 | 1987-05-07 | Hot isostatic pressing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62109855A JPH06100426B2 (en) | 1987-05-07 | 1987-05-07 | Hot isostatic pressing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63279091A JPS63279091A (en) | 1988-11-16 |
| JPH06100426B2 true JPH06100426B2 (en) | 1994-12-12 |
Family
ID=14520898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62109855A Expired - Lifetime JPH06100426B2 (en) | 1987-05-07 | 1987-05-07 | Hot isostatic pressing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06100426B2 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS566736A (en) * | 1979-06-27 | 1981-01-23 | Kobe Steel Ltd | Hot hydrostatic press device |
| JPH076745B2 (en) * | 1985-06-18 | 1995-01-30 | 三菱重工業株式会社 | Hot isostatic pressing equipment |
-
1987
- 1987-05-07 JP JP62109855A patent/JPH06100426B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63279091A (en) | 1988-11-16 |
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