JPH06100505B2 - Temperature sensor and temperature detector using the same - Google Patents
Temperature sensor and temperature detector using the sameInfo
- Publication number
- JPH06100505B2 JPH06100505B2 JP62014759A JP1475987A JPH06100505B2 JP H06100505 B2 JPH06100505 B2 JP H06100505B2 JP 62014759 A JP62014759 A JP 62014759A JP 1475987 A JP1475987 A JP 1475987A JP H06100505 B2 JPH06100505 B2 JP H06100505B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- pyroelectric
- temperature sensor
- current
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
- Inorganic Insulating Materials (AREA)
Description
【発明の詳細な説明】 (産業上の利用分野) 本発明は温度検知器、特に、ある一定温度を検出するの
に適した温度検知器に関する。Description: TECHNICAL FIELD The present invention relates to a temperature detector, and more particularly to a temperature detector suitable for detecting a certain constant temperature.
(従来技術) 焦電体を用いたセンサとしては赤外線センサが汎用され
ている。この赤外線センサの本体である焦電体の表面に
赤外線が照射されるとその赤外線は吸収され、焦電体自
体の表面温度が上昇する。このとき焦電体の自発分極の
大きさは温度上昇に対して減少する関係にあり、温度変
化によって自発分極の大きさは瞬間的に変化することに
なる。したがって、焦電体の表面の電荷は非平衡状態に
なり、この表面の非平衡分が高インピーダンス回路から
電圧の変化として取り出され、温度変化を検知するとい
うものである。(Prior Art) An infrared sensor is widely used as a sensor using a pyroelectric body. When the surface of the pyroelectric body, which is the body of the infrared sensor, is irradiated with infrared light, the infrared light is absorbed and the surface temperature of the pyroelectric body itself rises. At this time, the magnitude of the spontaneous polarization of the pyroelectric body has a relationship of decreasing with an increase in temperature, and the magnitude of the spontaneous polarization instantaneously changes due to the temperature change. Therefore, the charges on the surface of the pyroelectric body are in an unbalanced state, and the unbalanced portion of this surface is taken out from the high impedance circuit as a change in voltage to detect a change in temperature.
(発明が解決しようとする問題点) 焦電体を利用した赤外線センサは、焦電体表面の電荷の
非平衡状態を利用するため、赤外線を放射する物体が静
止しているものに対しては、センサの前にチョッパを設
置し、対象物から連続的に放射されている赤外線を断続
光として入射させる必要がある。(Problems to be Solved by the Invention) An infrared sensor using a pyroelectric body uses an unbalanced state of charges on the surface of the pyroelectric body. It is necessary to install a chopper in front of the sensor so that infrared rays continuously emitted from the object are incident as intermittent light.
また、このようにチョッパを用いた場合、センサに入射
される赤外線は赤外線を放射する物体からのものとチョ
ッパからの赤外線とからなる。センサの出力は、チョッ
パと物体の温度差に対応した信号であるため、物体の温
度を知るにはチョッパの温度を測定し、センサ出力から
求められた温度差に加えてやる必要がある。このため、
チョッパの近傍には金属抵抗体やIC温度センサを設置す
る必要がある。Further, when the chopper is used in this way, the infrared rays incident on the sensor are composed of an infrared ray emitted from an object and an infrared ray from the chopper. Since the output of the sensor is a signal corresponding to the temperature difference between the chopper and the object, in order to know the temperature of the object, the temperature of the chopper needs to be measured and added to the temperature difference obtained from the sensor output. For this reason,
It is necessary to install a metal resistor and an IC temperature sensor near the chopper.
従って、本発明の目的は、赤外線センサのようにチョッ
パを用いることなく、焦電体が有する焦電係数の極大変
曲点を利用した温度センサ及びそれを用いた温度検知器
を提供することにある。Therefore, it is an object of the present invention to provide a temperature sensor using a very inflection point of a pyroelectric coefficient of a pyroelectric body and a temperature detector using the same, without using a chopper like an infrared sensor. is there.
(問題点を解決するための手段) 本発明は、前記問題を解決する手段として、焦電係数の
極大変曲点が−50℃〜+130℃の範囲内にある菱面体晶
系チタン酸ジルコン酸鉛系磁器組成物からなる焦電体
と、該焦電体に相対する表面または同一表面に対向して
それぞれ形成された電極とからなり、焦電係数の急峻な
温度変化により発生する電荷によって、温度を検知する
温度センサを提供するものである。(Means for Solving Problems) As a means for solving the above problems, the present invention provides a rhombohedral zirconate titanate having an extremely inflection point of pyroelectric coefficient within a range of −50 ° C. to + 130 ° C. A pyroelectric body made of a lead-based porcelain composition, and a surface facing the pyroelectric body or electrodes formed facing the same surface, respectively, by electric charges generated by a sharp temperature change of the pyroelectric coefficient, A temperature sensor for detecting a temperature is provided.
また、本発明は、焦電係数の極大変曲点が−50℃〜+13
0℃の範囲内にある菱面体晶系チタン酸ジルコン酸鉛系
磁器組成物からなり、相対する表面にそれぞれ電極を有
する温度センサと、該温度センサの焦電流を電圧に変換
する電流電圧変換手段と、前記温度センサの焦電係数の
極大変曲点温度に対応する基準電圧を設定する基準電圧
設定手段と、前記電流電圧変換手段の出力電圧と基準電
圧設定手段からの基準電圧とを比較して被測定物の温度
を判別する比較器とからなることを特徴とする温度検知
器を提供するものである。Further, the present invention has an extremely inflection point of the pyroelectric coefficient of −50 ° C. to +13.
A temperature sensor made of a rhombohedral lead zirconate titanate porcelain composition in the range of 0 ° C., each having electrodes on opposite surfaces, and a current-voltage conversion means for converting a pyroelectric current of the temperature sensor into a voltage. And a reference voltage setting means for setting a reference voltage corresponding to the extremely extreme temperature of the pyroelectric coefficient of the temperature sensor, and an output voltage of the current-voltage converting means and a reference voltage from the reference voltage setting means. And a comparator for discriminating the temperature of the object to be measured.
(作用) 即ち、本発明は、焦電体の焦電効果に着目して種々研究
した結果、菱面体晶系チタン酸ジルコン酸鉛系強誘電体
磁器組成物においては、温度上昇に伴い菱面体晶系強誘
電体相の低温側安定相(FR(LT))と高温側安定相(FR
(HT))と間で相転移を生じるが、この相転移温度は組
成により一義的に定まり、低温側相転移点と高温側相転
移点との間で自発分極量(Ps)が急激に変化し、これに
伴い自発分極量の温度微分値である焦電係数(λ=△Ps
/△T)が鋭い極大変曲点を形成することを見出だし、
この相転移に伴う焦電係数のピーク値を利用して温度を
検知するようにしたものである。(Operation) That is, as a result of various studies focusing on the pyroelectric effect of the pyroelectric material, the present invention shows that in the rhombohedral lead titanate zirconate titanate-based ferroelectric ceramic composition, the rhombohedral shape is increased with increasing temperature. Low-temperature stable phase (FR (LT)) and high-temperature stable phase (FR) of crystalline ferroelectric phase
(HT)), but this phase transition temperature is uniquely determined by the composition, and the spontaneous polarization (Ps) changes rapidly between the low-temperature side phase transition point and the high-temperature side phase transition point. Then, along with this, the pyroelectric coefficient (λ = ΔPs), which is the temperature derivative of the spontaneous polarization
/ ΔT) found that it forms a very sharp inflection point,
The temperature is detected by using the peak value of the pyroelectric coefficient associated with this phase transition.
前記焦電体は、焦電係数の極大変曲点が−50℃〜+130
℃の温度範囲内にある真性または変性チタン酸ジルコン
酸鉛系磁器組成物であれば、任意のものを使用できる。
例えば、特公昭59-13803号公報や特開昭52-64700号公報
等に記載の、PbTiO3‐PbZrO3の2成分系、PbTiO3‐PbZr
O3にペロブスカイト型、複合ペロブスカイト型、パイロ
クロア型、ビスマス層状型、タングステン−ブロンズ型
結晶構造を有する他の酸化物の1種または2種以上を加
えた3成分系、4成分系、さらには前記2成分系、3成
分系、4成分系のものに添加物(例えば、マンガン、ニ
ッケル、コバルト、ケイ素、リチウム、鉄、タングステ
ン、インジウムの酸化物)を加えたもの、さらには前記
各成分系のPbの一部をBe,Ca,Srで置換したもの、および
各成分系のTiまたはZrの一部をSn,Hfなどで置換したも
のなどが挙げられる。これらはいずれもその菱面体晶系
強誘電体相の組成中で相転移[(FR(LT)‐(FR(H
T)]を有するものである。The pyroelectric body has a very inflection point of the pyroelectric coefficient of -50 ° C to +130
Any intrinsic or modified lead zirconate titanate porcelain composition within the temperature range of ° C can be used.
For example, according to JP-B 59-13803 and JP 52-64700 discloses such a two-component system of PbTiO 3 -PbZrO 3, PbTiO 3 -PbZr
A three-component system, a four-component system in which one or more oxides having a perovskite type, a complex perovskite type, a pyrochlore type, a bismuth layered type, or a tungsten-bronze type crystal structure is added to O 3 , and further the above Two-component system, three-component system, four-component system to which an additive (for example, manganese, nickel, cobalt, silicon, lithium, iron, tungsten, indium oxide) is added, and further each of the above-mentioned component systems Examples include those in which a part of Pb is replaced with Be, Ca, Sr, and those in which Ti or Zr in each component system is partly replaced with Sn, Hf and the like. Each of these has a phase transition [(FR (LT)-(FR (H
T)].
チタン酸ジルコン酸鉛系磁器組成物を焦電係数の極大変
曲点が−50℃〜+130℃の温度範囲内にある菱面体晶系
強誘電体磁器組成物に限定したのは、極大変曲点が−50
℃未満では低温側相転移点と高温側相転移点の温度差が
80℃〜100℃にもなるので、焦電流ピークが非常に平坦
となり、極大変曲点が正しく検出できず、+130℃を越
えると高温側相転移点が焦電体そのもののキュリー温度
に近づく可能性があり、焦電体の分極が減極されるか消
極される恐れがあるからである。The reason why the lead zirconate titanate-based porcelain composition is limited to the rhombohedral ferroelectric porcelain composition whose pyroelectric coefficient is within the temperature range of -50 ℃ to +130 ℃ is extremely curved. Point is -50
Below ℃, the temperature difference between the low-temperature side phase transition point and the high-temperature side phase transition point
Since the pyroelectric current peak becomes extremely flat as it reaches 80 ° C to 100 ° C, the inflection point cannot be detected very accurately, and if it exceeds + 130 ° C, the high temperature side phase transition point can approach the Curie temperature of the pyroelectric body itself. Therefore, the polarization of the pyroelectric material may be depolarized or depolarized.
以下、本発明の実施例を示す添付の図面を参照して説明
する。Embodiments of the present invention will be described below with reference to the accompanying drawings.
第1図は本発明に係る温度センサの一実施例を示し、1
は焦電体、2は焦電体の両面に形成された電極、3は各
電極に接続されたリード線、4は焦電体1及び電極2を
包囲する熱良伝導性絶縁材料からなる被膜で、前記焦電
体1は焦電係数の極大変曲点が−50℃〜+130℃の温度
範囲内にある菱面体晶系チタン酸ジルコン酸鉛系強誘電
体磁器組成物で形成されている。また、図示しないが、
電極2,3を焦電体1の一方表面に対向して形成してもよ
い。FIG. 1 shows an embodiment of the temperature sensor according to the present invention.
Is a pyroelectric body, 2 is an electrode formed on both surfaces of the pyroelectric body, 3 is a lead wire connected to each electrode, and 4 is a coating film surrounding the pyroelectric body 1 and the electrode 2, which is made of a highly heat-conductive insulating material. The pyroelectric material 1 is formed of a rhombohedral lead zirconate titanate-based ferroelectric ceramic composition having a very great inflection point of pyroelectric coefficient within a temperature range of -50 ° C to + 130 ° C. . Also, although not shown,
The electrodes 2 and 3 may be formed so as to face one surface of the pyroelectric body 1.
この温度センサ5は、その温度上昇に伴い焦電流を生
じ、その焦電流(i)は、温度センサ5の有効電極面積
をA、温度勾配をdT/dtとすると、i=λ×A×(dT/d
t)で与えられる。この温度と焦電流との関係は、第3
図に示すように、温度が低温側変曲点に達すると、焦電
流は急激に増大し始めるが、ある温度に達すると極大変
曲点に達し、以後は急激に減少する。そして、温度が高
温側変曲点に達すると、焦電流は低温側変曲点の時と同
程度にまで減少し、以後徐々に増大し始める。従って、
焦電流のピーク値を検出することにより一定温度を検出
できる。The temperature sensor 5 produces a pyroelectric current as its temperature rises. The pyroelectric current (i) is i = λ × A × (, where A is the effective electrode area of the temperature sensor 5 and dT / dt is the temperature gradient. dT / d
t). The relationship between this temperature and pyroelectric current is
As shown in the figure, when the temperature reaches the inflection point on the low temperature side, the pyroelectric current begins to increase sharply, but when it reaches a certain temperature, it reaches the extremely inflection point and then sharply decreases. Then, when the temperature reaches the inflection point on the high temperature side, the pyroelectric current decreases to the same extent as at the inflection point on the low temperature side, and thereafter gradually starts to increase. Therefore,
A constant temperature can be detected by detecting the peak value of the pyroelectric current.
また、焦電流(i)と焦電体の有効電極面積(A)は比
例関係にあるので、Aを増大させることにより、出力信
号を増大させることができる。Further, since the pyroelectric current (i) and the effective electrode area (A) of the pyroelectric body are in a proportional relationship, the output signal can be increased by increasing A.
第2図は前記温度センサを用いた温度検知器の一実施例
を示し、基本的には、温度センサ5と、電流電圧変換器
6と、比較器7と、基準電圧設定手段8とで構成される
が、電流電圧変換器6と比較器7との間に増幅器10が挿
入され、比較器7の出力でリレー等の駆動回路を駆動す
るようにしてある。なお、基準電圧設定手段8は、温度
センサ5の焦電流ピーク時に増幅器10から出力される電
圧Vmaxに対応する電圧を基準電圧として設定する。FIG. 2 shows an embodiment of a temperature detector using the temperature sensor, which basically comprises a temperature sensor 5, a current / voltage converter 6, a comparator 7, and a reference voltage setting means 8. However, an amplifier 10 is inserted between the current-voltage converter 6 and the comparator 7, and the output of the comparator 7 drives a drive circuit such as a relay. The reference voltage setting means 8 sets a voltage corresponding to the voltage Vmax output from the amplifier 10 at the peak of the pyroelectric current of the temperature sensor 5 as a reference voltage.
前記温度検知器の使用に際しては、温度センサ5の温度
が上昇すると、その焦電流が電流電圧変換器6で電圧に
変換され、その出力電圧が増幅器10で増幅された後、比
較器7の反転入力端子に入力される。この比較器7は、
基準電圧設定手段8により設定される基準電圧Voが入力
されており、増幅器10の出力電圧が基準電圧Voに達した
とき出力して駆動回路9を作動させ、圧電ブザー等の警
報器で警報を発する。When the temperature detector 5 is used, when the temperature of the temperature sensor 5 rises, the pyroelectric current is converted into a voltage by the current-voltage converter 6, the output voltage is amplified by the amplifier 10, and then the comparator 7 is inverted. It is input to the input terminal. This comparator 7
The reference voltage Vo set by the reference voltage setting means 8 is input, and when the output voltage of the amplifier 10 reaches the reference voltage Vo, it is output to operate the drive circuit 9, and an alarm is issued by an alarm device such as a piezoelectric buzzer. Emit.
なお、電流電圧変換器6からの出力電圧Vは、焦電係数
及び温度勾配の両者によって左右されるが、焦電係数の
ダイナミックレンジが高いため、2〜3倍の温度勾配の
揺れは基準電圧Voを適宜設定することにより除去でき、
焦電係数の極大変曲点温度を精度良く検知できる。The output voltage V from the current-voltage converter 6 depends on both the pyroelectric coefficient and the temperature gradient, but since the dynamic range of the pyroelectric coefficient is high, the fluctuation of the temperature gradient of 2 to 3 times is the reference voltage. It can be removed by setting Vo appropriately.
Extremely inflection point temperature of pyroelectric coefficient can be detected with high accuracy.
(実施例1) 原料として、PbO(またはPb3O4)、SnO2、Sb2O3、TiO2
を用い、これらを一般式: yPBTiO3‐zPbZrO3 …………(1) 及び xPb(Sn1/2Sb1/2)O3‐yPBTiO3‐zPbZrO3 …………
(2) で示される菱面体晶系強誘電体磁器組成物が得られるよ
うに秤量し、各原料混合物を20時間湿式混合し、乾燥
後、750℃〜850℃で2時間仮焼した。仮焼粉末を適量の
有機バインダと共に約10時間湿式粉砕し、乾燥して80メ
ッシュのふるいで整粒した。この粉末を750〜1000kg/cm
2の圧力で一辺が50℃mm、厚さ約12mmの正方形状の板に
成形し、1150℃〜1250℃の温度で焼成し、各磁器板を研
磨して厚み150μmの磁器板を得た。(Example 1) Raw material, PbO (or Pb 3 O 4), SnO 2 , Sb 2 O 3, TiO 2
By using the general formula: yPBTiO 3 -zPbZrO 3 ………… (1) and xPb (Sn 1/2 Sb 1/2 ) O 3 -yPBTiO 3 -zPbZrO 3 …………
The rhombohedral crystal porcelain composition represented by (2) was weighed so that each raw material mixture was wet mixed for 20 hours, dried, and then calcined at 750 ° C to 850 ° C for 2 hours. The calcined powder was wet-milled with an appropriate amount of organic binder for about 10 hours, dried, and sized with a 80-mesh sieve. 750-1000kg / cm of this powder
A square plate having a side of 50 ° C. mm and a thickness of about 12 mm was formed at a pressure of 2 and baked at a temperature of 1150 ° C. to 1250 ° C., and each porcelain plate was polished to obtain a porcelain plate having a thickness of 150 μm.
各磁器板の両面に銀ペーストを塗布後、焼き付けて銀電
極を形成し、これを20℃〜80℃の絶縁油中に浸漬し、約
3.0KV/mmの直流電圧を印加して分極処理をした。つい
で、両面の銀電極にリード線をハンダ付けして10×10mm
の有効電極面積を有する第1図の構造の温度センサを形
成した。After applying silver paste on both sides of each porcelain plate, bake it to form a silver electrode, dip it in insulating oil at 20 ° C-80 ° C, and
Polarization was performed by applying a DC voltage of 3.0 KV / mm. Then, solder the lead wires to the silver electrodes on both sides and 10 x 10 mm.
A temperature sensor having the structure shown in FIG.
各温度センサを試料として用い、菱面体晶系チタン酸ジ
ルコン酸鉛系強誘電体磁器組成物のキュリー点及び相転
移点を測定した。その結果を第4図に示す。図中、△、
▲は2成分系組成物の高温側及び低温側相転移点の変化
を、○、●は3成分系組成物の高温側及び低温側相転移
点の変化を組成に対してプロットしたものである。Curie points and phase transition points of rhombohedral lead titanate zirconate-based ferroelectric ceramic compositions were measured using each temperature sensor as a sample. The results are shown in FIG. In the figure, △,
▲ is a plot of changes in the high-temperature side and low-temperature side phase transition points of the two-component composition, and ○ and ● are plots of changes in the high-temperature side and low-temperature side phase transition points of the three-component system composition. .
この図から、2成分系または3成分系のチタン酸ジルコ
ン酸鉛系磁器組成物の組成を菱面体晶側で決定すると、
相転移点、従って、自発分極量の低温側変曲点及び高温
側変曲点が、それぞれ1点定まることが判る。From this figure, when the composition of the binary or ternary lead zirconate titanate porcelain composition is determined on the rhombohedral side,
It can be seen that the phase transition point, and hence the inflection point on the low temperature side and the inflection point on the high temperature side of the spontaneous polarization amount, are each set at one point.
また、前記温度センサの中から、0.05Pb(Sn1/2Sb1/2)
O3‐0.07PbTiO3‐0.88PbZrO3(試料1)、0.10Pb(Sn
1/2Sb1/2)O3‐0.04PbTiO3‐0.86PbZrO3(試料2)、及
び0.10Pb(Sn1/2Sb1/2)O3‐0.08PbTiO3‐0.82PbZrO
3(試料3)、の各組成を有する焦電体磁器からなるも
のを選び、それらの焦電係数の温度特性を測定した。そ
の結果を第5図〜第7図に示す。In addition, 0.05Pb (Sn 1/2 Sb 1/2 ) among the temperature sensors
O 3 -0.07PbTiO 3 -0.88PbZrO 3 (Sample 1), 0.10Pb (Sn
1/2 Sb 1/2 ) O 3 -0.04PbTiO 3 -0.86PbZrO 3 (Sample 2) and 0.10Pb (Sn 1/2 Sb 1/2 ) O 3 -0.08PbTiO 3 -0.82PbZrO
3 (Sample 3), which consisted of pyroelectric porcelain having each composition, were selected, and the temperature characteristics of their pyroelectric coefficients were measured. The results are shown in FIGS.
これらの図から、試料1〜3はいずれも低温側変曲点と
高温側変曲点との間、具体的には、それぞれ62℃、0
℃、61℃で焦電係数のピークを示し、そのピーク値は安
定相時の約4〜8倍の値であることが判る。From these figures, all of Samples 1 to 3 are between the low temperature side inflection point and the high temperature side inflection point, specifically, 62 ° C. and 0 ° C., respectively.
It can be seen that the peak of the pyroelectric coefficient is shown at 60 ° C. and 61 ° C., and the peak value is about 4 to 8 times that at the stable phase.
また、試料番号1の組成の温度センサについて、被測定
物温度と焦電流の変化を測定したところ第3図に示す結
果が得られた。なお、測定時の被測定物の温度勾配は3
℃/minで、温度センサの有効電極面積は1cm2である。Further, when the temperature sensor having the composition of Sample No. 1 was measured for changes in the temperature of the object to be measured and the pyroelectric current, the results shown in FIG. 3 were obtained. The temperature gradient of the measured object during measurement is 3
At ° C / min, the effective electrode area of the temperature sensor is 1 cm 2 .
第3図から明らかなように、被測定物の温度が62℃に達
すると、焦電流のピーク値を示すことが判る。As is clear from FIG. 3, when the temperature of the object to be measured reaches 62 ° C., it is understood that the peak value of the pyroelectric current is exhibited.
(実施例2) PbO(またはPb3O4)、MgO、Nb2O5、TiO2、ZrO2を原料と
して用い、実施例1と同様にして、0.10Pb(Mg1/3N
b2/3)O3‐0.05PbTiO3‐0.85PbZrO3からなる組成を有す
る焦電体からなる温度センサを製作し、その焦電係数の
温度特性を測定した。その結果を第8図に示す。(Example 2) PbO (or Pb 3 O 4), using MgO, the Nb 2 O 5, TiO 2, ZrO 2 as starting materials and in the same manner as in Example 1, 0.10Pb (Mg 1/3 N
A temperature sensor made of a pyroelectric material having a composition of b 2/3 ) O 3 -0.05PbTiO 3 -0.85PbZrO 3 was fabricated and the temperature characteristics of its pyroelectric coefficient were measured. The results are shown in FIG.
この図から、試料4の温度センサも低温側変曲点と高温
側変曲点との間、具体的には、50℃で焦電係数のピーク
を示し、そのピーク値は安定相時の約4倍の値であるこ
とが判る。From this figure, the temperature sensor of sample 4 also shows a peak of the pyroelectric coefficient between the inflection point on the low temperature side and the inflection point on the high temperature side, specifically, at 50 ° C., and the peak value is about the value in the stable phase. It can be seen that the value is four times.
(実施例3) 実施例1と同様の方法で0.05Pb(Sn1/2Sb1/2)O3‐0.07
PbTiO3‐0.88PbZrO3の組成を有する焦電体磁器を得た。
この磁器を粒径20〜70μmになるように粉砕した。この
磁器粉末と有機物であるNBRゴムを重量比94:6になるよ
うに混合した。この混合物を170℃、圧力926kg/cm2で30
分間ホットプレスしセラミック−有機物からなる複合焦
電体を得た。試料を大きさとして一辺10mm、厚み0.5mm
の正方形状板とした。この複合焦電体の両面に銀電極を
蒸着し、リード線を半田付けし、10×10mmの有効電極面
積を有する第1図の構造からなる温度センサを製作し
た。(Example 3) 0.05Pb in the same manner as in Example 1 (Sn 1/2 Sb 1/2) O 3 -0.07
To obtain a pyroelectric ceramic having a composition of PbTiO 3 -0.88PbZrO 3.
The porcelain was crushed to a particle size of 20 to 70 μm. This porcelain powder and NBR rubber, which is an organic substance, were mixed in a weight ratio of 94: 6. This mixture is heated at 170 ° C and pressure of 926 kg / cm 2 for 30
After hot pressing for a minute, a composite pyroelectric material composed of a ceramic-organic material was obtained. The size of the sample is 10 mm on a side and 0.5 mm in thickness.
It was a square plate. Silver electrodes were vapor-deposited on both surfaces of this composite pyroelectric body, and lead wires were soldered to manufacture a temperature sensor having an effective electrode area of 10 × 10 mm and having the structure shown in FIG.
この温度センサの焦電係数の温度特性を測定し、その結
果を第9図に示す。この図からセラミックのみからなる
ものと同様、62℃で焦電係数のピークを示していること
が判る。The temperature characteristic of the pyroelectric coefficient of this temperature sensor was measured, and the result is shown in FIG. From this figure, it can be seen that a peak of the pyroelectric coefficient is exhibited at 62 ° C. as in the case of only ceramics.
この複合焦電体からなる温度センサによれば、大面積化
が容易であり、出力電流の増大が容易に図れる。また柔
軟性に富み、形状の選択に自由度があり、さらには被測
定物との密着化などが容易となる。According to the temperature sensor including the composite pyroelectric body, the area can be easily increased and the output current can be easily increased. In addition, it is highly flexible, has a degree of freedom in selecting the shape, and can be easily attached to the object to be measured.
(発明の効果) 以上の説明から明らかなように、本発明は、菱面体晶径
チタン酸ジルコン酸鉛系強誘電体磁器焦電体の持つ低温
側安定相と高温側安定相間の相転移に伴う焦電体固有の
焦電係数のピーク値を利用して温度検知を行うようにし
たので、焦電体の組成だけで検知温度を決定できる。ま
た、その組成のキュリー点以下の温度であれば、焦電係
数の温度特性曲線はほぼ可逆的でヒステリシスが殆ど無
く、そのピーク値が焦電体の組成のみによって定まるた
め、電源電圧の変動などの外因があってもそれと無関係
に一定温度を精度良く検知できる。さらに、温度センサ
の焦電流、従って、電流電圧変換器の出力電圧は、温度
センサの有効電極面積に比例するため、任意の出力電圧
を有する温度センサを製造できるなど、優れた効果が得
られる。(Effects of the Invention) As is clear from the above description, the present invention is applicable to the phase transition between the low temperature side stable phase and the high temperature side stable phase possessed by the rhombohedral lead titanate zirconate titanate-based ferroelectric ceramic pyroelectric material. Since the temperature is detected using the peak value of the pyroelectric coefficient peculiar to the pyroelectric body, the detected temperature can be determined only by the composition of the pyroelectric body. Also, if the temperature is below the Curie point of the composition, the temperature characteristic curve of the pyroelectric coefficient is almost reversible and there is almost no hysteresis, and the peak value is determined only by the composition of the pyroelectric body, so fluctuations in the power supply voltage, etc. Even if there is an external cause, the constant temperature can be detected accurately regardless of it. Further, since the pyroelectric current of the temperature sensor, and hence the output voltage of the current-voltage converter, is proportional to the effective electrode area of the temperature sensor, excellent effects such as the production of the temperature sensor having an arbitrary output voltage can be obtained.
第1図は本発明に係る温度センサの構造を示す断面図、
第2図は第1図の温度センサを用いた温度検知器のブロ
ック図、第3図は本発明に係る温度センサの焦電流温度
特性を示すグラフ、第4図はチタン酸ジルコン酸鉛系磁
器組成物の相転移点及びキュリー点と組成との関係を示
すグラフ、第5図〜第9図はそれぞれ本発明に係る各種
温度センサの焦電係数温度特性を示すグラフである。 1……焦電体、2……電極、3……リード線、4……熱
良伝導性絶縁材料、5……温度センサ、6……電流電圧
変換器、7……比較器、8……基準電圧設定手段、9…
…駆動回路、10……増幅器。FIG. 1 is a sectional view showing the structure of a temperature sensor according to the present invention,
2 is a block diagram of a temperature detector using the temperature sensor of FIG. 1, FIG. 3 is a graph showing pyroelectric temperature characteristics of the temperature sensor according to the present invention, and FIG. 4 is a lead zirconate titanate porcelain. Graphs showing the relationship between the composition and the phase transition points and Curie points of the compositions, and FIGS. 5 to 9 are graphs showing the pyroelectric coefficient temperature characteristics of various temperature sensors according to the present invention. 1 ... Pyroelectric body, 2 ... Electrode, 3 ... Lead wire, 4 ... Thermally conductive insulating material, 5 ... Temperature sensor, 6 ... Current-voltage converter, 7 ... Comparator, 8 ... ... reference voltage setting means, 9 ...
… Drive circuit, 10… Amplifier.
Claims (2)
の範囲内にある菱面体晶系チタン酸ジルコン酸鉛系磁器
組成物からなる焦電体と、該焦電体に相対する表面また
は同一表面に対向してそれぞれ形成された電極とからな
り、焦電係数の急峻な温度変化により発生する電荷によ
って、温度を検知する温度センサ。1. The extremely inflection point of the pyroelectric coefficient is -50 ° C to + 130 ° C.
Of a rhombohedral lead zirconate titanate porcelain composition within the range of, and an electrode formed respectively on the surface facing the pyroelectric material or facing the same surface, A temperature sensor that detects temperature by the electric charge generated by a sharp temperature change in the electric coefficient.
の範囲内にある菱面体晶系チタン酸ジルコン酸鉛系磁器
組成物からなり、相対する表面にそれぞれ電極を有する
温度センサと、該温度センサの焦電流を電圧に変換する
電流電圧変換手段と、前記温度センサの焦電係数の極大
変曲点温度に対応する基準電圧を設定する基準電圧設定
手段と、前記電流電圧変換手段の出力電圧と基準電圧設
定手段からの基準電圧とを比較して被測定物の温度を判
別する比較器とからなることを特徴とする温度検知器。2. The extremely inflection point of the pyroelectric coefficient is -50 ° C to + 130 ° C.
Consisting of rhombohedral lead titanate zirconate titanate porcelain composition in the range of, and a temperature sensor having electrodes on the opposite surfaces, current-voltage conversion means for converting the pyroelectric current of the temperature sensor into a voltage, The reference voltage setting means for setting a reference voltage corresponding to the extremely inflection point temperature of the pyroelectric coefficient of the temperature sensor is compared with the output voltage of the current-voltage converting means and the reference voltage from the reference voltage setting means. A temperature detector comprising a comparator for discriminating the temperature of an object to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62014759A JPH06100505B2 (en) | 1987-01-23 | 1987-01-23 | Temperature sensor and temperature detector using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62014759A JPH06100505B2 (en) | 1987-01-23 | 1987-01-23 | Temperature sensor and temperature detector using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63182532A JPS63182532A (en) | 1988-07-27 |
| JPH06100505B2 true JPH06100505B2 (en) | 1994-12-12 |
Family
ID=11870012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62014759A Expired - Lifetime JPH06100505B2 (en) | 1987-01-23 | 1987-01-23 | Temperature sensor and temperature detector using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06100505B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10132811A1 (en) * | 2001-07-06 | 2003-01-23 | Enocean Gmbh | Voltage generator for semiconductor circuits |
| CN103558475B (en) * | 2013-11-08 | 2016-05-18 | 中国科学院上海硅酸盐研究所 | A kind of method for detection of ferroelectric ceramics energy storage characteristic |
| CN106289539A (en) * | 2016-09-06 | 2017-01-04 | 西安交通大学 | A kind of method and apparatus for real-time monitoring chemical reaction process |
-
1987
- 1987-01-23 JP JP62014759A patent/JPH06100505B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63182532A (en) | 1988-07-27 |
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