JPH06105082B2 - Dust prevention mechanism - Google Patents

Description

Description: TECHNICAL FIELD OF THE INVENTION The present invention relates to a dust generation prevention mechanism.

[Technical Background and Problems of the Invention] The development of the semiconductor industry is remarkable, and as a result, in memory, 16 Kbits, 64 Kbits, and 256 Kbits are remarkable. As such miniaturization progresses, a clean room with high cleanliness is required. It is said that the cleanliness is affected by, for example, the dirt hairs of the human skin and the lye. Therefore, it is required that one person, two persons, or an unmanned person work. If humans cannot enter the room, automation is considered, and practical applications such as automated equipment tobots will be considered.

However, it cannot be used if dust is generated from these devices. Therefore, the equipment to be used is dust-free by surrounding it. However, there is a limit to the siege,
There is a part that cannot be executed. For example, a piston rod opening such as a cylinder. Various proposals have heretofore been made as measures against dust generation at the piston rod opening. For example, there is a technique in which an intake portion is provided in the opening portion, and a seal structure is provided inside and outside the intake portion to discharge dust generated inside the container to the outside of the clean room to prevent dust generation. However, this technology discharges the dust generated inside the container, but some of the dust generated at the outer seal is scattered by the sliding of the piston rod into the outside world, for example, in the clean room, and reduces the cleanliness of the clean room. I will end up.

Therefore, there is a problem that the dust generation amount cannot be suppressed below a certain value.

[Object of the Invention] The present invention has been made in consideration of the above points, and provides a dust generation preventing mechanism that reduces the emission of dust to the outside in the dust generation prevention measure by intake air.

[Summary of the Invention] That is, a moving body, a container having an opening through which the moving body penetrates, a hollow portion provided on an opening surface facing the moving body, and a gas flowing into the hollow portion from outside the container. And a discharge hole for discharging the gas flowing out of the container by suction, and a throttle means for reducing the flow rate of the gas flowing out of the container into the hollow portion from the flow rate of the gas flowing in from the outside of the container. A dust prevention mechanism is obtained.

In other words, the position where the discharge means communicates is outside the gas outflow portion from the inside of the container and inside the gas inflow portion from the outside of the container, and the outflow gas flow rate from the inside of the container is outside the container. By making the flow rate smaller than the inflowing gas flow rate, dust inside the container is prevented from being discharged to the outside.

[Embodiment of the Invention] Next, an embodiment in which the dust prevention mechanism of the present invention is applied to an arm of a robot hand will be described with reference to the drawings.

An actuator 1 is provided for executing a rotating or sliding movement, a mechanism portion 2 for performing a rotating or sliding movement, for example, sliding is provided by the actuator 1, and a case 3 for accommodating the actuator 1 and the mechanism portion 2 is provided, An intake hole 4 is provided in a part of the case 3, and a shaft 5 extending left and right is provided to transmit the movement of the mechanism section 2 to the outside.
The fingers F having a gripping action are provided at both ends of the shaft 5,
An opening 6 is provided in the side wall of the case 3 so that the shaft 5 penetrates.

In the arm configured as described above, the gap between the opening 6 and the shaft 5 is repetitively exercised by repeatedly sliding the shaft 5 in the horizontal direction to narrow or widen the space between the fingers F to grip the article. Therefore, dust generation in the case 3 is released. Against this dust generation, the structure of FIG. 1B is used in the opening 6 as a prevention mechanism to prevent the dust from being emitted. That is, a hollow portion 9 is formed in the opening surface 8 facing the side wall 7 of the shaft 5, and a conduit 11 is connected outward from a deep portion 10 of the hollow portion 9 to form a discharge hole 12 to form a discharge hole outside the clean room. To discharge. When the air is discharged from the discharge hole 12, the outflow gas flow path 13 is generated against dust in the case 3.
At the same time, the inflow gas flow path 14 is formed outside the case 3, that is, inward from the outside, for example, a clean room.

The gas in the case 3 flowing out from the outflow gas flow path 13 and the gas flowing in from the inflow gas flow path 14 are mixed in the hollow portion 9 and discharged from the discharge hole 12. At this time, the outflow gas flow path 13 Since the seal ring 15, which is the throttle mechanism, is provided in the gap between the side opening surface 8 on the side and the side wall 7 of the shaft 5, the gas flowing out from the case 3 becomes less than the gas flowing from the outside of the case 3. . Therefore, the gas flowing out of the case 3 is not released to the clean room. Further, the dust generated by the movement of the shaft 5 and the sliding movement of the seal ring 15, which is the throttle mechanism, is discharged through the hollow portion 9 together with the gas flowing out of the case 3 and the gas flowing in from the outside of the case 3 to the exhaust hole 12. Emitted into the clean room and not into the clean room.

As shown in FIG. 2, another example of the throttling mechanism is that the shaft 5 of the outflow gas flow path 13 and the opening surface 8 are formed from the gap 16 between the shaft 5 of the inflow gas flow path 14 and the opening surface 8. Gap between 17
May be formed narrowly. Furthermore,
The mechanism of the present invention can also be applied to an air cylinder as shown in FIG. That is, the piston rod shaft is placed in the cylindrical container 31.
32 is provided, a piston 33 is provided at the tip of the rod shaft 32, and an air introduction pipe is provided outside the moving range 34 of the piston 33.
35 and 36 are provided. The following means are taken to prevent the dust generated by the sliding of the piston 33 from being emitted to the outside.

That is, the discharge hole 37 is provided, and a pipe (not shown) is connected to the discharge hole 37 to discharge the clean room.

In this configuration, when intake is performed from the discharge hole 37, the container 31
An outflow gas flow path 38 for air from the inside and an inflow gas flow path 39 for air from the outside are generated. In this case, the outflow gas flow path
38 is equipped with a diaphragm mechanism. For example, the seal ring 40 is provided.

With such a structure, the gas flow rate from the outside of the container 31 becomes larger than the gas flow rate from the inside of the container 13, so that the gas flowing out from the outflow gas flow channel 38 is an external environment, for example. It is not discharged into the clean room but is sucked and discharged through the discharge hole 37.

Further, dust generated by the sliding of the rod shaft 32 and the seal ring 40 is also discharged from the discharge hole 37 together with the gas flowing out from the outflow gas flow path 38, and is not discharged to the clean room.

[Effects of the Invention] As described above, according to the present invention, in a structure in which dust is collected in a container by suction, the gas flow rate flowing out of the container is relatively smaller than the gas flow rate flowing in from the outside of the container. With such a structure, there is an effect that the gas flowing out from the outflow gas flow channel can be greatly reduced from being discharged to the outside world, for example, a clean room.

That is, it is particularly effective as a dust-prevention structure for a device used in an ultra-clean room.

[Brief description of drawings]

1A and 1B are explanatory views of an embodiment of the device of the present invention, and FIG.
FIG. 3 is an explanatory view of another embodiment of the figure, and FIG. 3 is an explanatory view of another embodiment of FIG. 12,37 …… Discharge hole, 13,38 …… Outflow gas flow path, 14,39 ……
Incoming gas flow path, 15,40 ... Seal ring.

Claims (3)

[Claims] 1. A moving body, a container having an opening through which the moving body penetrates, a hollow portion provided on a surface of the opening facing the moving body, and a gas and a container flowing into the hollow portion from outside the container. A discharge means for discharging the gas flowing out from the inside by suction, and a throttle means for reducing the flow rate of the gas flowing out of the container into the hollow portion from the flow rate of the gas flowing in from the outside of the container. Dust prevention mechanism that does. 2. The squeezing means forms an outflow gas flow path formed between a surface inside the hollow portion of the opening surface and the moving body, and connects the surface outside the hollow portion and the moving body. The dust-prevention mechanism according to claim 1, characterized in that the dust-prevention mechanism is formed so as to be narrower than the inflowing gas passage formed between them. 3. The throttle means is an O-ring interposed in an outflow gas flow passage formed between a surface of the opening surface inside the hollow portion and the moving body. The dust generation preventing mechanism according to claim 1.