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JPH06106026B2 - Vibration wave motor - Google Patents
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JPH06106026B2 - Vibration wave motor - Google Patents

Vibration wave motor

Info

Publication number
JPH06106026B2
JPH06106026B2 JP60065459A JP6545985A JPH06106026B2 JP H06106026 B2 JPH06106026 B2 JP H06106026B2 JP 60065459 A JP60065459 A JP 60065459A JP 6545985 A JP6545985 A JP 6545985A JP H06106026 B2 JPH06106026 B2 JP H06106026B2
Authority
JP
Japan
Prior art keywords
vibration
contact
wave motor
vibration wave
vibrating body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60065459A
Other languages
Japanese (ja)
Other versions
JPS61224884A (en
Inventor
貴之 月本
卓夫 奥野
一郎 奥村
和弘 伊豆川
裕之 関
仁 向島
直也 金田
明 平松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP60065459A priority Critical patent/JPH06106026B2/en
Publication of JPS61224884A publication Critical patent/JPS61224884A/en
Publication of JPH06106026B2 publication Critical patent/JPH06106026B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163Motors with ring stator

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Description

【発明の詳細な説明】 <産業上の利用分野> 本発明は振動体の振動を駆動力として該振動体と接触体
とを相対移動させる振動波モータに関するものである。
Description: TECHNICAL FIELD The present invention relates to a vibration wave motor that uses a vibration of a vibrating body as a driving force to relatively move the vibrating body and a contact body.

<従来技術> 最近実用化されつつある、進行性振動波によって駆動す
る振動波モータの実施例の概略図が第1図に示してあ
る。同図で、1は電歪素子で例えばPZT(チタン酸ジル
コン鉛)で、2は振動体で弾性物質からなり、電歪素子
1を接着してある。振動体2は電歪素子1と共にステー
タ(不図示)側に保持されている。3は移動体で振動体
2に対し押圧接触されていてロータを形成する。電歪素
子1は複数個接着されておりそのうちの一部の群に対
し、他の群は振動波の波長λの1/4波長分だけずれたピ
ツチで配置される。群内での各電歪素子は1/2波長のピ
ツチで、相隣り合うものの極性が逆になるように配置さ
れている。
<Prior Art> FIG. 1 shows a schematic view of an embodiment of a vibration wave motor driven by a progressive vibration wave, which has recently been put into practical use. In the figure, reference numeral 1 is an electrostrictive element, for example PZT (lead zirconate titanate), and 2 is a vibrating body made of an elastic material, and the electrostrictive element 1 is bonded. The vibrating body 2 is held on the stator (not shown) side together with the electrostrictive element 1. A moving body 3 is in pressure contact with the vibrating body 2 and forms a rotor. A plurality of electrostrictive elements 1 are adhered, and a group of some of them is arranged, and the other group is arranged with a pitch shifted by 1/4 wavelength of the wavelength λ of the vibration wave. Each electrostrictive element in the group is a half-wave pitch, and is arranged so that the polarities of adjacent ones are opposite.

このような構成の振動波モータで一つの群の電歪素子に
V0SinωTの交流電圧を印加し、もう一方の群の電歪素
子にV0CosωTの交流電圧を印加する。従って各電歪素
子は相隣り合うものどうし極性が逆向きで二つの群どう
し90°位相のずれた交流電圧が印加されて振動をする。
この振動が伝えられて振動体2は電歪素子1の配置ピツ
チに従って曲げ振動をする。振動体2が一つおきの電歪
素子の位置で出っ張ると、他の一つおきの電歪素子の位
置が引っ込む。一方、前記の如く電歪素子の一群は他の
一群に対し、1/4波長ずれた位置にあるため曲げ振動が
進行する。交流電圧が印加されている間、次々と振動が
励起されて、進行性曲げ振動波となって振動体2を伝わ
ってゆく。
With a vibration wave motor with such a configuration,
Applying an AC voltage of V 0 sin (.omega.T), to apply an AC voltage V 0 cos (.omega.T) electrostrictive element of the other group. Therefore, each electrostrictive element oscillates when an alternating voltage having a polarity opposite to each other and having a phase difference of 90 ° is applied between the two groups.
When this vibration is transmitted, the vibrating body 2 causes bending vibration according to the arrangement pitch of the electrostrictive element 1. When the vibrating body 2 projects at the position of every other electrostrictive element, the position of every other electrostrictive element retracts. On the other hand, as described above, one group of electrostrictive elements is at a position shifted by 1/4 wavelength from the other group, and therefore bending vibration proceeds. While the AC voltage is being applied, vibrations are excited one after another to form a progressive bending vibration wave and propagate through the vibrating body 2.

このときの波の進行状態が第2図(a)(b)(c)
(d)に示してある。いま、進行性曲げ振動波が矢示X1
方向に進むとする。0を静止状態に於ける振動体の中心
面とすると振動状態では鎖線示の状態となり、この中立
面6は曲げによる応力が拮抗している。中立面6と直交
する断面71についてみると、これら二面の交線51では応
力がかからず上下振動しているだけである。同時に断面
71は交線51を中心として左右の振り子振動している。断
面72又は73についても同じように交線52又は53を中心と
して左右の振り子振動する。
The wave traveling state at this time is shown in FIGS. 2 (a), (b) and (c).
It is shown in (d). A progressive bending vibration wave is now indicated by X 1
Let's go in the direction. When 0 is the center plane of the vibrating body in the stationary state, the state shown by the chain line is in the vibrating state, and the neutral plane 6 is counteracted by the stress due to bending. As for section 71 perpendicular to the neutral plane 6, only the line of intersection 5 1 of these two surfaces stress is vertical vibration not applied. Cross section at the same time
7 1 has left and right pendulum vibrations centering on the intersection line 5 1 . Similarly, for the cross section 7 2 or 7 3 , pendulum vibrations on the left and right are centered around the intersection line 5 2 or 5 3 .

同図(a)に示す状態では断面71と振動体2の移動体3
側の表面との交線上の点P1は左右振動の右死点となって
おり上方向運動だけしている。この振り子振動は交線51
・52又は53が波の正側では(中心面0の上側にあるとき
左方向(波の進行方向X1と逆方向)の応力に加わり、波
の負側(同じく下側にあるとき)右方向の応力が加わ
る。即ち同図(a)に於て、交線52と断面72が前者のと
きの状態で、点P2は矢示方向の応力が加わる。交線53
断面73が後者のときの状態で、点P3は矢示方向の応力が
加わる。波が進行し、(b)に示すように波の正側に交
線51がくると点P1は左方向の運動をすると同時に上方向
の運動をする。(c)で点P1は上下振動の上死点で左方
向の運動だけする。(d)で点P1は左方向の運動と下方
向運動をする。さらに波が進行し、右方向と下方向の運
動、右方向と上方向の運動を経て(a)の状態に戻る。
この一連の運動を合成すると点P1は回転楕円運動をして
おりその回転半径は、振動体2の中立面6から移動体側
表面までの長さをtとすると、tの関数となる。一方、
移動体3は振動体2に加圧接触しており、同図(c)に
示すように、振動体2上の点P1の回転楕円運動が移動体
3をX2方向に摩擦駆動する。点P2・P3及びその他振動体
2上の全ての点が点P1と同じように移動体3を摩擦駆動
する。
Section 71 and the movable body 3 of the vibrator 2 in the state shown in the diagram (a)
The point P 1 on the line of intersection with the surface on the side is the right dead center of the left-right vibration and is only moving upward. This pendulum vibration is the intersection line 5 1
・ When 5 2 or 5 3 is on the positive side of the wave (when it is on the upper side of the center plane 0, it is added to the stress in the left direction (the direction opposite to the traveling direction X 1 of the wave), and on the negative side of the wave (also on the lower side) ) rightward stressed. that at a figure (a), in a state in intersection lines 5 2 and section 7 2 of the former, the point P 2 is applied is arrow direction of stress. intersection line 5 3 And the cross-section 7 3 is the latter, stress is applied in the direction of the arrow at point P 3. When the wave progresses and the intersection line 5 1 comes to the positive side of the wave as shown in (b), point P 3 1 moves to the left and at the same time moves upward.In (c), point P 1 moves only to the left at the top dead center of vertical vibration, and in (d) point P 1 moves to the left. The wave further progresses, moves to the right and downward, moves to the right and upward, and returns to the state of (a).
When this series of motions is combined, the point P 1 has a spheroidal motion, and its radius of rotation is a function of t, where t is the length from the neutral surface 6 of the vibrating body 2 to the surface of the moving body. on the other hand,
The moving body 3 is in pressure contact with the vibrating body 2, and the spheroidal motion of the point P 1 on the vibrating body 2 frictionally drives the moving body 3 in the X 2 direction, as shown in FIG. The points P 2 and P 3 and all other points on the vibrating body 2 frictionally drive the moving body 3 in the same manner as the point P 1 .

以上の様な原理で駆動する振動波モータにおいて従来、
移動体は第3図に断面を示すように接触部3cをフランジ
構造にしてバネ性をもたせることや第4図に示すように
接触部3b部を樹脂にして弾性をもたせ、振動体の面のう
ねりや進行波振幅値の場所によるうねりに追従させるよ
うにしていた。しかし、このような構造ではフランジ部
や樹脂部の弾性によるバネと接触体3a部を質量とした系
の共振を起こし、騒音発生や出力低下の原因になってい
た。
Conventionally, in the vibration wave motor driven by the above principle,
As shown in FIG. 3, the moving body has a contact portion 3c with a flange structure to have a spring property, and as shown in FIG. 4, the contact portion 3b has a resin to have elasticity, and The swell and the swell depending on the location of the traveling wave amplitude value were made to follow. However, in such a structure, the elasticity of the flange portion and the resin portion causes resonance of the system with the contact body 3a portion as a mass, which causes noise generation and output reduction.

<発明の目的> 本発明はこのような事態に鑑みなされたもので、移動体
と接触する接触体の構造を改良することにより、騒音が
なく駆動効率の高い振動波モーターを提供することを目
的とするものである。
<Objects of the Invention> The present invention has been made in view of such a situation, and an object thereof is to provide a vibration wave motor with high driving efficiency without noise by improving the structure of the contact body that contacts the moving body. It is what

<実施例> 以下図面を用いて本発明を詳述する。<Example> The present invention will be described in detail below with reference to the drawings.

第5図は本発明の一実施例の移動体の断面図である。FIG. 5 is a sectional view of a moving body according to an embodiment of the present invention.

第5図において第3図,第4図に示した要素と同じ機構
を有する要素については同じ符号を付し説明を省略す
る。3dは防振ゴム、3eは金属などで構成される付加質量
である。
In FIG. 5, elements having the same mechanism as the elements shown in FIGS. 3 and 4 are designated by the same reference numerals and the description thereof will be omitted. 3d is an anti-vibration rubber, and 3e is an additional mass composed of metal or the like.

かかる実施例において接触部3cに発生する共振を防止で
きる原理を第6図のモデルを用いて説明する。
The principle of preventing the resonance generated in the contact portion 3c in this embodiment will be described with reference to the model of FIG.

第6図においてmは質量部3eの質量、c,kは防振ゴム3d
の減衰定数、弾性係数、Mは接触体3aの質量を示してい
る。
In FIG. 6, m is the mass of the mass part 3e, and c and k are the vibration damping rubber 3d.
The damping constant, elastic coefficient, and M indicate the mass of the contact body 3a.

ここで接触部3cに発生する共振を防止するためには次の
式を満足する質量部3eの質量m、防振ゴムの減衰定数、
弾性係数を選択すればよい。
Here, in order to prevent the resonance generated in the contact portion 3c, the mass m of the mass portion 3e that satisfies the following equation, the damping constant of the vibration isolating rubber,
The elastic coefficient may be selected.

とすると (Ω:固有振動数,cc:臨界減衰定数,ζ:減衰比) 上記の式を満足する様に選択することによって接触部3c
で起きた振動はすみやかに吸収されて振動が起きること
を防止できる。
And (Omega: natural frequency, c c: critical damping constant, zeta: damping ratio) contact by selectively so as to satisfy the above equation portions 3c
The vibration that occurs at is quickly absorbed and can be prevented from occurring.

上記の式から明らかなように、防振ゴム3dは付加質量3e
及び接触体3aより減衰定数が大きく、弾性係数が小さい
ものとなる。
As is clear from the above formula, the anti-vibration rubber 3d has an additional mass of 3e
Also, it has a larger damping constant and a smaller elastic coefficient than the contact body 3a.

第7図は移動体下面にて振動吸収を行った振動波モータ
の断面図であるが、これも本発明中に含まれるかかる構
成にすれば振動波モータを薄くすることができる。また
振動波を利用した直線往復運動機構への適用も本発明中
に含まれるのは勿論である。
FIG. 7 is a cross-sectional view of a vibration wave motor in which vibration is absorbed on the lower surface of the moving body. This structure also included in the present invention makes it possible to reduce the thickness of the vibration wave motor. Further, it goes without saying that the present invention also includes application to a linear reciprocating motion mechanism utilizing an oscillating wave.

<発明の効果> 以上の様に本発明に依れば振動波モータの振動体と接触
する接触体の共振による騒音や効率低下を防止すること
ができるという効果を奏する。尚2が振動体、3aが弾性
体からなる移動体、3cが移動体の接触部、3dが防振材、
3eが付加質量部材の夫々を構成する。
<Effects of the Invention> As described above, according to the present invention, it is possible to prevent noise and a reduction in efficiency due to resonance of a contact body that contacts a vibration body of a vibration wave motor. 2 is a vibrating body, 3a is a moving body made of an elastic body, 3c is a contact portion of the moving body, 3d is a vibration damping material,
3e constitutes each of the additional mass members.

【図面の簡単な説明】[Brief description of drawings]

第1図は、振動波モータの主要部の概略図、第2図は振
動波モータの駆動原理を説明する図、第3図,第4図は
従来の移動体の縦断面図、第5図は本発明の一実施例の
振動波モータの断面図、第6図は本発明の力学的モデル
を示す図、第7図は本発明の他の実施例の振動波モータ
の断面図である。 1は電歪素子、2は振動体、3は移動体、3aは移動体の
接触体、3bは移動体接触部材、3cは移動体フランジ部、
3dは防振ゴム、3eは付加質量部。
FIG. 1 is a schematic diagram of a main part of a vibration wave motor, FIG. 2 is a diagram for explaining the driving principle of the vibration wave motor, and FIGS. 3 and 4 are vertical cross-sectional views of a conventional moving body, and FIG. Is a sectional view of a vibration wave motor according to an embodiment of the present invention, FIG. 6 is a view showing a mechanical model of the present invention, and FIG. 7 is a sectional view of a vibration wave motor according to another embodiment of the present invention. 1 is an electrostrictive element, 2 is a vibrating body, 3 is a moving body, 3a is a moving body contacting body, 3b is a moving body contacting member, 3c is a moving body flange portion,
3d is an anti-vibration rubber, and 3e is an additional mass part.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 伊豆川 和弘 東京都大田区下丸子3丁目30番2号 キヤ ノン株式会社内 (72)発明者 関 裕之 東京都大田区下丸子3丁目30番2号 キヤ ノン株式会社内 (72)発明者 向島 仁 神奈川県川崎市高津区下野毛770番地 キ ヤノン株式会社玉川事業所内 (72)発明者 金田 直也 神奈川県川崎市高津区下野毛770番地 キ ヤノン株式会社玉川事業所内 (72)発明者 平松 明 神奈川県川崎市高津区下野毛770番地 キ ヤノン株式会社玉川事業所内 (56)参考文献 特開 昭59−188381(JP,A) ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Kazuhiro Izugawa 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Hiroyuki Seki 3-30-2 Shimomaruko, Ota-ku, Tokyo Kya Non-Incorporated (72) Inventor Hitoshi Mukaijima, 770 Shimonoge, Takatsu-ku, Kawasaki-shi, Kanagawa Canon Inc. Tamagawa Works (72) Inventor Naoya Kaneda, 770, Shimonoge, Takatsu-ku, Kawasaki-shi, Kanagawa Canon Inc. (72) Inventor Akira Hiramatsu, 770 Shimonoge, Takatsu-ku, Kawasaki-shi, Kanagawa Canon Inc. Tamagawa Plant (56) Reference JP-A-59-188381 (JP, A)

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】振動を発生する振動体と、弾性を有し該振
動体と接触するように突出形成された接触部が設けら
れ、該振動体の振動を駆動力として該振動体と相対移動
するものであって所定の質量を有する接触体と、を有す
る振動波モータにおいて、前記接触体に前記振動体とは
非接触となるように、所定の質量を有する付加質量部材
と防振材を付加し、前記防振材は前記付加質量部材と前
記接触体との間に介挿したことを特徴とする振動波モー
タ。
1. A vibrating body that generates vibration and a contact portion that has elasticity and is formed to project so as to come into contact with the vibrating body are provided, and the vibration of the vibrating body is used as a driving force to move relative to the vibrating body. In a vibration wave motor having a contact body having a predetermined mass, an additional mass member having a predetermined mass and a vibration isolator are provided so that the contact body is not in contact with the vibration body. The vibration wave motor is characterized in that the vibration damping material is inserted between the additional mass member and the contact body.
JP60065459A 1985-03-29 1985-03-29 Vibration wave motor Expired - Lifetime JPH06106026B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60065459A JPH06106026B2 (en) 1985-03-29 1985-03-29 Vibration wave motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60065459A JPH06106026B2 (en) 1985-03-29 1985-03-29 Vibration wave motor

Publications (2)

Publication Number Publication Date
JPS61224884A JPS61224884A (en) 1986-10-06
JPH06106026B2 true JPH06106026B2 (en) 1994-12-21

Family

ID=13287735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60065459A Expired - Lifetime JPH06106026B2 (en) 1985-03-29 1985-03-29 Vibration wave motor

Country Status (1)

Country Link
JP (1) JPH06106026B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0724957Y2 (en) * 1989-03-10 1995-06-05 アルプス電気株式会社 Ultrasonic linear motor
ATE489734T1 (en) 2005-05-26 2010-12-15 Nikon Corp VIBRATING ACTUATOR AND METHOD OF OPERATING A VIBRATING ACTUATOR

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59148581A (en) * 1983-02-10 1984-08-25 Sony Corp Elastic wave motor
JPS59188381A (en) * 1983-04-06 1984-10-25 Shinsei Kogyo:Kk Improvement in rotor/movable element of surface wave motor
JPS6022479A (en) * 1983-07-18 1985-02-04 Shinsei Kogyo:Kk Stator of surface wave motor and improvement in movable element

Also Published As

Publication number Publication date
JPS61224884A (en) 1986-10-06

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