JPH0612693B2 - Ceramic heater and method of manufacturing the same - Google Patents
Ceramic heater and method of manufacturing the sameInfo
- Publication number
- JPH0612693B2 JPH0612693B2 JP62280428A JP28042887A JPH0612693B2 JP H0612693 B2 JPH0612693 B2 JP H0612693B2 JP 62280428 A JP62280428 A JP 62280428A JP 28042887 A JP28042887 A JP 28042887A JP H0612693 B2 JPH0612693 B2 JP H0612693B2
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- metal
- ceramic heater
- heating element
- firing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Resistance Heating (AREA)
Description
【発明の詳細な説明】 「産業上の利用分野」 本発明は、ディーゼル機関に装着されるグロープラグ用
のセラミックヒータ及びその製造方法に関するものであ
る。TECHNICAL FIELD The present invention relates to a ceramic heater for a glow plug mounted on a diesel engine and a method for manufacturing the same.
「従来の技術」 従来一般に用いられているセラミックヒータは、アルミ
ナ質又は窒化珪素質セラミック焼結体の中に櫛歯状、渦
巻状など任意の形状で、任意の長さや幅を有する発熱抵
抗体を設け、これにリード端子を取りつけて、リード端
子から通電するようにしたセラミックヒータが知られて
いる。(特開昭57−67296号公報) このセラミックヒータの中でも窒化珪素質のものやサイ
アロンの如き非酸化物セラミックは例えばディーゼルエ
ンジン用のグロープラグなど高温でくり返し使用するよ
うな場合でも熱衝撃による破損もなく安定な高温特性を
有するものとして評価されている。"Prior Art" A ceramic heater generally used conventionally is a heating resistor having an arbitrary shape such as a comb tooth shape or a spiral shape in an alumina or silicon nitride ceramic sintered body and having an arbitrary length and width. There is known a ceramic heater which is provided with a lead terminal and is attached with a lead terminal so that electricity is supplied from the lead terminal. (Japanese Patent Application Laid-Open No. 57-67296) Among these ceramic heaters, a silicon nitride material and a non-oxide ceramic such as sialon are damaged by thermal shock even when repeatedly used at a high temperature such as a glow plug for a diesel engine. It is evaluated as having stable high temperature characteristics.
しかしながら、従来非酸化物セラミック材料は原料粉末
を混合粉砕する際に使用するポットミル等の摩耗により
微量不純物が混入する。さりとて鉄あるいはステンレス
製のポットミルやボールを使用すれば、それらの金属不
純物が混入するが、混入量を制御することは甚だ困難で
あり、またポットミルやボールからの摩耗粒子が原料粒
子中に均一に分散したりコーティングすることは不可能
であるので期待した一様の特性のものを得ることはでき
ない。However, in the conventional non-oxide ceramic material, trace impurities are mixed due to wear of a pot mill or the like used when mixing and pulverizing raw material powders. If a pot mill or ball made of iron or stainless steel is used, those metal impurities are mixed, but it is extremely difficult to control the amount mixed, and wear particles from the pot mill or ball are evenly distributed in the raw material particles. It is not possible to disperse or coat, so it is not possible to obtain the expected uniform properties.
また、本出願人は窒化珪素焼結体を製造する場合に、成
形用バインダー除去によって生ずる脱脂体の強度低下を
防ぐために、Fe,Cr,Ni,Co,W,Ti,Ta,Mo,Nb等の
金属元素を窒化珪素材料にコーティングする方法を生み
出した(特願昭61−206892号)。Further, in the case of producing a silicon nitride sintered body, the present applicant has made Fe, Cr, Ni, Co, W, Ti, Ta, Mo, Nb, etc. in order to prevent a decrease in strength of the degreased body caused by removal of the molding binder. We have developed a method for coating a silicon nitride material with the above metal element (Japanese Patent Application No. 61-206892).
この方法は具体的には金属分を10rpm〜2000rpmの範囲
で薄膜状にコーティングするものでメカノケミカル反
応、化学反応のいずれでも採用し得る。This method specifically coats the metal component in the form of a thin film in the range of 10 rpm to 2000 rpm and can be employed in either mechanochemical reaction or chemical reaction.
「発明が解決しようとする問題点」 上記従来の技術において窒化珪素材料粉末に遷移金属元
素を含まない粉末を用いるときには (1)仮焼、脱脂後の強度が低く、作業性が劣る。[Problems to be Solved by the Invention] When powders containing no transition metal element are used as the silicon nitride material powders in the above conventional technique, (1) the strength after calcination and degreasing is low and the workability is poor.
(2)セラミックヒータに用いた場合焼結後の発熱体とセ
ラミックとの密着強度が低く、電極取り出し部で断線を
生じる。(2) When used for a ceramic heater The adhesion strength between the heating element after sintering and the ceramic is low, and a wire breakage occurs at the electrode extraction portion.
(3)焼成に伴なう抵抗変化率が比較的大きい。(3) The resistance change rate due to firing is relatively large.
上記に対し、鉄もしくはステンレス性のポットミルを使
い、金属元素を摩耗混入するようにした場合は前記した
(1),(2)の問題は解決するが焼成に伴なう抵抗変化率が
極めて大きく、必然的にバラツキが大となり、良品の歩
留が低下するという問題があり、また、混入量のコント
ロールが困難である。In contrast to the above, in the case of using an iron or stainless steel pot mill and mixing in metal elements by abrasion,
Although the problems of (1) and (2) are solved, there is a problem that the rate of change in resistance due to firing is extremely large, which inevitably causes large variations, which reduces the yield of non-defective products. It is difficult to control.
「問題点を解件するための手段」 高融点金属もしくはその合金よりなる発熱体と窒化珪
素、サイアロン等の非酸化物系セラミック焼結体中に遷
移金属を0.06〜1.5重量%混入させたものであって、そ
の添加手段は、前記非酸化物セラミック原料粉末中に遷
移金属の有機金属塩溶液を添加混合して成形し、焼成す
ることによって達成される。"Means for solving the problem" A heating element made of a high melting point metal or its alloy and a non-oxide ceramic sintered body such as silicon nitride or sialon mixed with 0.06 to 1.5% by weight of a transition metal. The adding means is achieved by adding and mixing an organic metal salt solution of a transition metal into the non-oxide ceramic raw material powder, shaping the mixture, and firing.
「作用」 窒化珪素、サイアロン等の非酸化物セラミックに焼結助
剤である金属酸化物例えばAl2O3,Y2O3,MgO等を添加す
るとともに、エチルアルコール、トリクロルエタンの如
き有機溶剤に可溶性の有機金属塩(遷移金属)を金属元
素換算で0.06〜1.5重量%添加し混合することによっ
て、有機金属塩は溶剤中に溶解希釈し、セラミック原料
粒子の表面を当該金属で均一にコーティングすることが
可能となり、金属塩の添加量の制御が容易に行なわれ、
また、混合粉砕したセラミック泥漿はその後、スプレー
ドライ、減圧乾燥等により溶剤分を取り除き乾燥粉末が
得られる。"Function" In addition to adding metal oxides such as Al 2 O 3 , Y 2 O 3 and MgO which are sintering aids to non-oxide ceramics such as silicon nitride and sialon, organic solvents such as ethyl alcohol and trichloroethane are added. A soluble organic metal salt (transition metal) of 0.06 to 1.5% by weight in terms of metal element is added and mixed to dissolve and dilute the organic metal salt in the solvent, and the surface of the ceramic raw material particles is uniformly coated with the metal. It is possible to control the addition amount of the metal salt easily,
Further, the mixed and pulverized ceramic sludge is then subjected to spray drying, reduced pressure drying or the like to remove the solvent content to obtain a dry powder.
このようにして得られたセラミック粉末中に高融点金属
の発熱体を埋設し、ポットプレス法にて焼成すると、 1)焼成中の発熱体とセラミックとの過剰な化学反応を抑
止するため抵抗変化率が極めて小さく、その結果抵抗値
のバラツキも極小となり、歩留りが向上する。When a heating element made of a high melting point metal is embedded in the ceramic powder obtained in this way and fired by the pot press method, 1) the resistance change is caused because the excessive chemical reaction between the heating element and the ceramic during firing is suppressed. The rate is extremely small, and as a result, the variation in resistance value is minimized, and the yield is improved.
2)高融点金属とセラミックとの密着性が向上するため、
電極取り出し部のセラミック−金属間の接合強度が高く
なり、ヒータとしての信頼性が向上する。2) Since the adhesion between the refractory metal and the ceramic is improved,
The bonding strength between the ceramic and the metal at the electrode extraction portion is increased, and the reliability as a heater is improved.
3)脱脂後の生強度が向上するため、製造過程における取
り扱いや、生加工が容易となる。3) Since the green strength after degreasing is improved, handling in the manufacturing process and raw processing become easier.
「実施例」 以下実施例について述べる。[Examples] Examples will be described below.
実施例1 平均粒径0.5μmのSi3N4920g、平均粒径1.2μmのY
2O340g、平均粒径0.3μmのAl2O340gに、エチル
アルコール800ccを加え、更にFeメトキシドをFe換算
で0%(無添加)0.06%,0.2%,0.5%,1.5%に変化
させて添加し、アルミナ球石、アルミナトロンメル中で
16Hr混合し、湯煎乾燥した。なお、比較のために、Fe
メトキシドを添加することなく、鉄ポットと鉄ボールを
用いて16Hr混合し、湯煎乾燥した粉末を作製した。こ
の粉末には鉄ポット、ボールよりFeが0.56%摩耗混入に
より含まれている。得られた調合粉末を支持体として、
これにW90重量%/Re10重量%の合金の発熱体を埋
設して、プレス成形、脱脂及びH.P焼成試験を行なっ
た。Example 1 920 g of Si 3 N 4 having an average particle size of 0.5 μm and Y having an average particle size of 1.2 μm
2 O 3 40 g, Al 2 O 3 40 g with an average particle size of 0.3 μm, 800 cc of ethyl alcohol was added, and Fe methoxide was converted to 0% (no addition) 0.06%, 0.2%, 0.5%, and 1.5% in terms of Fe. Then, the mixture was added, mixed for 16 hours in alumina ball stone and alumina trommel, and dried in hot water. For comparison, Fe
Without adding methoxide, the mixture was mixed for 16 hours using an iron pot and an iron ball, and dried by boiling to prepare a powder. This powder contains 0.56% Fe from the iron pot and balls due to wear and contamination. Using the obtained powder mixture as a support,
A heating element made of an alloy of W90 wt% / Re10 wt% was embedded in this, press molding, degreasing and H. A P firing test was performed.
なお、試験条件は下記のとおりである。The test conditions are as follows.
プレス成形 600kg/cm2 脱脂 400℃×1Hr(50℃/Hr 昇温、N2雰囲気) ホットプレス(H.P)焼成 1850℃×30分 圧力200kg/cm2 その試験結果を表示すれば、第1表のとおりである。Press molding 600kg / cm 2 Degreasing 400 ℃ × 1Hr (50 ℃ / Hr heating, N 2 atmosphere) Hot press (HP) firing 1850 ℃ × 30 minutes Pressure 200kg / cm 2 If the test result is displayed, It is as shown in Table 1.
この表から判るように本発明によれば脱脂後の強度が向
上し、焼成抵抗変化率のバラツキが低下し、リード密着
強度が向上するなど顕著な効果が認められた。 As can be seen from this table, according to the present invention, remarkable effects such as improvement in strength after degreasing, reduction in variation in firing resistance change rate, and improvement in lead adhesion strength were recognized.
なお、Feの添加量は0.06〜1.50%、好ましくは0.06〜0.
2%の範囲であることが判る。The addition amount of Fe is 0.06 to 1.50%, preferably 0.06 to 0.
It can be seen that the range is 2%.
(注)リード密着強度は第1図に示すように、高融点金
属発熱体1と高融点金属リード2とをセラミック3中に
埋設してなるヒータ4を作り該リード2の露出端にNiワ
イヤ5をL字状にして銀ろう付6し、Niワイヤを引張す
ることによって測定した。(Note) As shown in FIG. 1, the lead adhesion strength is such that a heater 4 is prepared by embedding a high melting point metal heating element 1 and a high melting point metal lead 2 in a ceramic 3 and forming a Ni wire on the exposed end of the lead 2. 5 was L-shaped, was brazed with silver 6, and was measured by pulling a Ni wire.
実施例2 平均粒径0.5μmのSi3N47200gと平均粒径1.2μm
のY2O3320gと平均粒径0.3μmのAl2O3480gにト
リクロルエタン11を加え、更に鉄の有機塩をFe換算
で16gと分散剤30gとを加えてアルミナ球石を使用
してアトライター混合を5Hr行ない、スプレードライし
た。Example 2 7200 g of Si 3 N 4 having an average particle size of 0.5 μm and an average particle size of 1.2 μm
Trichloroethane 11 was added to 320 g of Y 2 O 3 and 480 g of Al 2 O 3 having an average particle size of 0.3 μm, and 16 g of an organic salt of iron in terms of Fe and 30 g of a dispersant were added, and an alumina ball was used. The mixture was mixed with an attritor for 5 hours and spray dried.
ここにFe有機塩としてはFeブトキシド0.2%、プロピオ
ン酸鉄0.2%及び比較用としてFe0%、及びFe0.56%
(摩耗材料より混入)とを用意した。Here, as the organic Fe salt, Fe butoxide 0.2%, iron propionate 0.2%, and Fe 0% and Fe 0.56% for comparison.
(Mixed from wear material) was prepared.
実施例1と同様の条件でプレス−脱脂−焼成を行ない特
性を調査した。その結果を表示すれば第2表に示すとお
りである。The press-degreasing-firing was performed under the same conditions as in Example 1 to investigate the characteristics. The results are shown in Table 2.
この結果、Feを含む有機塩の種類は関係なく一様に期待
される効果が得られることが判った。 As a result, it was found that the expected effect was obtained regardless of the type of organic salt containing Fe.
実施例3 実施例1のFeメトキシドに代えて、Niメトキシド、Crメ
トキシド、Coメトキシドを金属元素換算で0.2%用いた
外は調合及びプレス−脱脂−H.P焼成の試験条件は実
施例1と同様にして試料を作成し試験を行なった。Example 3 In place of using Fe methoxide of Example 1, Ni methoxide, Cr methoxide, and Co methoxide were used at 0.2% in terms of metal element, except for compounding and pressing-degreasing-H. The test conditions for P firing were the same as in Example 1 except that a sample was prepared and tested.
その結果は第3表に示すとおりである。The results are shown in Table 3.
上表によればCrを添加した材料では抵抗変化率がかなり
高いが、バラツキは小さくおさえられている。Ni,Coを
添加した材料はどちらも良好な結果が得られた。 According to the above table, the resistance change rate is considerably high in the material with Cr added, but the variation is suppressed. Good results were obtained for both materials containing Ni and Co.
等の効果を奏するものである。And so on.
第1図はリード密着強度測定方法の簡略説明図である。 1……高融点金属発熱体、2……高融点金属リード、3
……セラミック、4……セラミックヒータ、5……Niワ
イヤ、6……銀ロー付FIG. 1 is a simplified explanatory diagram of a lead adhesion strength measuring method. 1 ... Refractory metal heating element, 2 ... Refractory metal lead, 3
…… Ceramic, 4 …… Ceramic heater, 5 …… Ni wire, 6 …… With silver braze
Claims (2)
よりなる発熱体を窒化珪素、サイアロン等の非酸化物系
セラミック焼結体中に埋設してなるセラミックヒータに
おいて、セラミック材料中に遷移金属を0.06〜1.
5重量%含有していることを特徴とするセラミックヒー
タ。1. A ceramic heater in which a heating element made of a high melting point metal such as W or Mo or an alloy thereof is embedded in a non-oxide ceramic sintered body such as silicon nitride or sialon. 0.06 to 1.
A ceramic heater containing 5% by weight.
よりなる発熱体を埋設するセラミック原料粉末中に遷移
金属の有機金属塩溶液を添加混合して成形、焼成するこ
とを特徴とするセラミックヒータの製造方法。2. A ceramic characterized by adding and mixing an organic metal salt solution of a transition metal to a ceramic raw material powder for embedding a heating element made of a high melting point metal such as W or Mo or an alloy thereof, and shaping and firing. Heater manufacturing method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62280428A JPH0612693B2 (en) | 1987-11-06 | 1987-11-06 | Ceramic heater and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62280428A JPH0612693B2 (en) | 1987-11-06 | 1987-11-06 | Ceramic heater and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01122590A JPH01122590A (en) | 1989-05-15 |
| JPH0612693B2 true JPH0612693B2 (en) | 1994-02-16 |
Family
ID=17624915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62280428A Expired - Fee Related JPH0612693B2 (en) | 1987-11-06 | 1987-11-06 | Ceramic heater and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0612693B2 (en) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5749189A (en) * | 1980-09-08 | 1982-03-20 | Matsushita Electric Industrial Co Ltd | Sheathed heater and method of producing same |
| JPS581991A (en) * | 1981-06-25 | 1983-01-07 | 松下電器産業株式会社 | Sea heater |
| JPS6037598B2 (en) * | 1981-06-25 | 1985-08-27 | 松下電器産業株式会社 | Sea heater |
| JPS58186190A (en) * | 1982-04-23 | 1983-10-31 | 京セラ株式会社 | Annular heater and method of producing same |
| JPS5986181A (en) * | 1982-11-08 | 1984-05-18 | 日本特殊陶業株式会社 | Method of producing ceramic heater |
| JPS6065492A (en) * | 1983-09-20 | 1985-04-15 | 株式会社日立ホームテック | Sheathed heater |
| JPH0697631B2 (en) * | 1984-12-22 | 1994-11-30 | 京セラ株式会社 | Ceramic heater and method for producing the same |
-
1987
- 1987-11-06 JP JP62280428A patent/JPH0612693B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01122590A (en) | 1989-05-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |