Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JPH0613429B2 - Method for manufacturing oxide superconductor - Google Patents
[go: Go Back, main page]

JPH0613429B2 - Method for manufacturing oxide superconductor - Google Patents

Method for manufacturing oxide superconductor

Info

Publication number
JPH0613429B2
JPH0613429B2 JP62122599A JP12259987A JPH0613429B2 JP H0613429 B2 JPH0613429 B2 JP H0613429B2 JP 62122599 A JP62122599 A JP 62122599A JP 12259987 A JP12259987 A JP 12259987A JP H0613429 B2 JPH0613429 B2 JP H0613429B2
Authority
JP
Japan
Prior art keywords
oxide superconductor
superconductor
current density
oxide
superconducting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62122599A
Other languages
Japanese (ja)
Other versions
JPS63288940A (en
Inventor
浩明 熊倉
一正 戸叶
勇二 吉田
恭治 太刀川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KAGAKU GIJUTSUCHO KINZOKU ZAIRYO GIJUTSU KENKYU SHOCHO
Original Assignee
KAGAKU GIJUTSUCHO KINZOKU ZAIRYO GIJUTSU KENKYU SHOCHO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KAGAKU GIJUTSUCHO KINZOKU ZAIRYO GIJUTSU KENKYU SHOCHO filed Critical KAGAKU GIJUTSUCHO KINZOKU ZAIRYO GIJUTSU KENKYU SHOCHO
Priority to JP62122599A priority Critical patent/JPH0613429B2/en
Publication of JPS63288940A publication Critical patent/JPS63288940A/en
Publication of JPH0613429B2 publication Critical patent/JPH0613429B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Description

【発明の詳細な説明】 (技術分野) この発明は、酸化物超電導体の製造方法に関するもので
ある。さらに詳しくは、この発明は、高温超電導体とし
て有用な、臨界電流密度の大きい複合酸化物の超電導体
の製造方法に関するものである。
TECHNICAL FIELD The present invention relates to a method for producing an oxide superconductor. More specifically, the present invention relates to a method for producing a composite oxide superconductor having a high critical current density, which is useful as a high temperature superconductor.

(従来の技術) 従来、Nb-Ti合金、Nb金属などの超電導材料は、ヘリウ
ム温度である4.2゜Kにおいて用いられてきた。たとえ
ばサイクロントロンに用いられている超電導磁石の線材
は、Nb-Ti合金を使用しており、その臨界電流密度は106
A/cm2と非常に大きく、消費電力の極小化と高磁界の実
現に大きな役割を果たしてきている。
(Prior Art) Conventionally, superconducting materials such as Nb-Ti alloy and Nb metal have been used at a helium temperature of 4.2 ° K. For example, the wire of the superconducting magnet used in cyclonetron uses Nb-Ti alloy, and its critical current density is 10 6
It is extremely large at A / cm 2, and has played a major role in minimizing power consumption and achieving high magnetic fields.

このように抵抗が極めて小さい超電導材料は、エネルギ
ー損失の少ない送電線、電力貯蔵、あるいは電磁石、リ
ニアモーターカー、船舶などの広範囲な技術分野に応用
が期待されているものである。
Such superconducting materials having extremely low resistance are expected to be applied to a wide range of technical fields such as power transmission lines with low energy loss, power storage, electromagnets, linear motor cars, and ships.

また、高集積化された超LSIでは、配線抵抗による遅
延時間が問題になっており、超電導体による配線が可能
になれば超高速化が実現される。また、ジョセフソン素
子による超高速スイッチング素子や超高感度磁気センサ
ー、高周波センサーへの応用も期待されている。
Further, in a highly integrated VLSI, a delay time due to wiring resistance becomes a problem, and if wiring by a superconductor becomes possible, ultra-high speed is realized. In addition, it is expected to be applied to ultra-high-speed switching devices using Josephson devices, ultra-sensitive magnetic sensors, and high-frequency sensors.

しかしながら、これまでの超電導材料の場合には、ヘリ
ウムを冷却剤としており、高価であるばかりか、取扱い
がめんどうで、しかも大型装置による応用に限定されて
いた。
However, in the case of conventional superconducting materials, helium is used as a coolant, which is not only expensive but also cumbersome to handle, and is limited to applications in large-scale equipment.

このような状況に対して、液体窒素温度(77゜K)、あ
るいは室温において動作する超電導材料の実現が強く望
まれていた。これらの温度で動作する超電導体が可能と
なれば、その使用環境条件は緩和され、さらに広範囲な
分野での応用が急速に進む。たとえば、液体窒素温度で
動作すると、冷却装置は2重構造が不要になり、かつ冷
却剤コストが1/40にも低減される。
Under these circumstances, it has been strongly desired to realize a superconducting material that operates at liquid nitrogen temperature (77 ° K) or room temperature. If superconductors that can operate at these temperatures become possible, the environmental conditions for their use will be alleviated, and their applications in a wider range of fields will rapidly progress. For example, operating at liquid nitrogen temperatures eliminates the need for double chillers and reduces coolant costs by as much as 1/40.

最近、このような高温で動作する酸化物超電導体が提案
されており、注目されている。これまでに提案されたも
のは、銅を含んだランタン系またはイットリウム系複合
酸化物からなるもので、77゜K以上の臨界温度(T
c)を持つものが登場してきている。また、90゜K以
上の臨界温度(Tc)を持つものも開発されはじめてい
る。
Recently, oxide superconductors that operate at such high temperatures have been proposed and are receiving attention. The ones that have been proposed so far are composed of lanthanum-based or yttrium-based mixed oxides containing copper and have a critical temperature (T
Those with c) are appearing. Also, a material having a critical temperature (Tc) of 90 ° K or higher is beginning to be developed.

これらの酸化物の超電導体の製造法には融液法による単
結晶成長法、YSZ(イットリウム安定化ジリコニア)
やSrTiO3結晶板を用いたスクリーン印刷法、スパッタリ
ング法による多結晶膜製造法、粉末を焼成する焼結法な
どがある。
A single crystal growth method by a melt method, YSZ (yttrium-stabilized zirconia) is used for manufacturing a superconductor of these oxides.
There are a screen printing method using a SrTiO 3 crystal plate, a polycrystalline film manufacturing method by a sputtering method, and a sintering method of firing powder.

しかしながら、これまでの単結晶成長法は0.1×1.5×2
mm2程度の小さな結晶しか得られず、臨界温度(Tc)
は30゜Kと低い。多結晶薄膜については、臨界温度で
60〜80゜Kまで実現しているが、、基板が限定され
ていること、製造条件のパラメーター制御が難しいとい
う欠点がある。
However, the conventional single crystal growth method is 0.1 × 1.5 × 2
Only a crystal as small as mm 2 can be obtained, and the critical temperature (Tc)
Is as low as 30 ° K. Polycrystalline thin films have been realized at a critical temperature of 60 to 80 ° K, but they have the drawbacks of limited substrates and difficulty in controlling the parameters of manufacturing conditions.

焼結法については、線材化やリボン状化が容易である
が、臨界電流密度(Jc)が小さいという問題がある。
Regarding the sintering method, it is easy to form a wire or ribbon, but there is a problem that the critical current density (Jc) is small.

たとえば線材化の場合には、粉末を900〜1000℃
で焼結後、Cu系合金に充填し、伸線加工して細線化す
ることができ、またリボン状への成形も容易であるが、
臨界電流密度(Jc)が小さいことが、今後の技術展開
の課題になっている。
For example, in the case of making a wire, the powder is 900 to 1000 ° C.
After sintering, it can be filled with Cu-based alloy and drawn into a fine wire, and can be easily formed into a ribbon.
The small critical current density (Jc) is an issue for future technological development.

(発明の目的) この発明は、以上の通りの事情を鑑みてなされたもので
あり、高温超電導体として期待されている複合酸化物超
電導体について、従来の製造方法の欠点を改善し、効率
的に臨界電流密度(Jc)の大きい酸化物超電導体を製
造する方法を提供することを目的としている。
(Objects of the Invention) The present invention has been made in view of the above circumstances, and it is possible to improve the efficiency of a complex oxide superconductor, which is expected as a high-temperature superconductor, by improving the drawbacks of the conventional manufacturing method. Another object of the present invention is to provide a method for producing an oxide superconductor having a large critical current density (Jc).

(発明の開示) この発明の製造方法は、M−L−Cu−O(ただし、M
=Ca,Sr,Ba,L=Sc,Y,La系元素)系酸
化物超電導体を製造するにあたって、超電導体が形成す
る所定配合割合の原料粉末を成形した後に、レーザービ
ームまたは電子ビームを照射し、臨界電流密度を増大さ
せることを特徴としている。
(Disclosure of the Invention) The manufacturing method of the present invention is based on M-L-Cu-O (provided that M
= Ca, Sr, Ba, L = Sc, Y, La-based element) -based oxide superconductor is manufactured, after forming a raw material powder having a predetermined mixing ratio formed by the superconductor, a laser beam or an electron beam is irradiated. It is characterized by increasing the critical current density.

レーザービームまたは電子ビームを照射することによ
り、極めて短時間のうちに、組成のずれの小さな、かつ
臨界電流密度の大きな複合酸化物の超電導体が得られ
る。
By irradiating with a laser beam or an electron beam, a composite oxide superconductor having a small composition shift and a large critical current density can be obtained in an extremely short time.

対象とする酸化物超電導体は、組成式M−L−Cu−O
(ただし、M=Ca,Sr,Ba,L=Sc,Y,La
系元素)で示される複合酸化物超電導体である。
The target oxide superconductor is a composition formula ML-Cu-O.
(However, M = Ca, Sr, Ba, L = Sc, Y, La
It is a complex oxide superconductor represented by a system element).

具体的には、Sr−La−Cu−O系酸化物、Ba−L
a−Cu−O系酸化物、Ca−La−Cu−O系酸化
物、Ba−Y−Cu−O系酸化物、Ba−Yb−Cu−
O系酸化物、Ba−Lu−Cu−O系酸化物、Ba−S
c−Cu−O系酸化物などが例示される。
Specifically, Sr-La-Cu-O-based oxide, Ba-L
a-Cu-O-based oxide, Ca-La-Cu-O-based oxide, Ba-Y-Cu-O-based oxide, Ba-Yb-Cu-
O-based oxide, Ba-Lu-Cu-O-based oxide, Ba-S
Examples thereof include c-Cu-O-based oxides.

この発明においては、以上の複合酸化物の所定の組成に
相当する原料粉末を用いて成形するが、その使用割合
は、目的とする超電導材料がペロプスカイト組成を有す
る範囲で選択することができる。
In the present invention, the raw material powder corresponding to the predetermined composition of the above complex oxide is used for molding, but the usage ratio can be selected within a range in which the target superconducting material has a perovskite composition.

たとえば、Sr−La−Cu−O系酸化物の場合には、
SrCO3:La2O3:CuO=0.5:1.75:2の割合とするこ
とができる。
For example, in the case of Sr-La-Cu-O-based oxide,
The ratio can be SrCO 3 : La 2 O 3 : CuO = 0.5: 1.75: 2.

原料粉末としては、酸化物、炭酸塩、硝酸塩、ハロゲン
化物などの適宜な化合物を用いることができる。
As the raw material powder, an appropriate compound such as oxide, carbonate, nitrate or halide can be used.

これらの原料粉末は、たとえば、加圧条件下で所定の形
状に成形する。形状には格別の限定はなく、板状、シー
ト状、ペレット状、テープ状、あるいは線状に成形する
ことができる。加圧成形する場合には、広範囲な圧力条
件を採用することができ、1〜10トン/cm2程度の圧
力も採用することができる。
These raw material powders are molded into a predetermined shape under pressure, for example. The shape is not particularly limited, and it can be formed into a plate shape, a sheet shape, a pellet shape, a tape shape, or a linear shape. In the case of pressure molding, a wide range of pressure conditions can be adopted, and a pressure of about 1 to 10 ton / cm 2 can also be adopted.

なお、成形前に原料粉末を予備熱処理することも有効で
ある。この場合には、500〜1500℃前後にまで、
たとえば、1〜100時間予備熱処理することができ
る。
It is also effective to preheat the raw material powder before molding. In this case, until around 500-1500 ℃,
For example, the preliminary heat treatment can be performed for 1 to 100 hours.

成形した後に、この発明の方法においては、レーザービ
ーム、または電子ビームを照射する。レーザービームと
しては、20W〜2KW程度のレーザービームが好まし
く用いられる。たとえば、炭酸ガスレーザーがある。電
子ビームの場合には、5W〜1KW程度の出力のものを
用いる。レーザービームの照射は、大気中、酸素雰囲気
中で行うのが好ましい。酸素圧としては、たとえば0.
1〜10気圧程度の範囲とすることができる。また電子
ビーム照射は真空中にて行うのが好ましい。
After molding, in the method of the present invention, a laser beam or an electron beam is irradiated. As the laser beam, a laser beam of about 20 W to 2 KW is preferably used. For example, there is a carbon dioxide laser. In the case of an electron beam, an electron beam having an output of about 5 W to 1 kW is used. Irradiation with the laser beam is preferably performed in the air or an oxygen atmosphere. The oxygen pressure is, for example, 0.
It can be set in the range of about 1 to 10 atm. The electron beam irradiation is preferably performed in vacuum.

ビーム照射時のビーム径は、0.1〜5mm程度また成形
物の送り速度は、ビームに対して0.1〜20m/毎分
とすることができる。
The beam diameter at the time of beam irradiation may be about 0.1 to 5 mm, and the feed rate of the molded product may be 0.1 to 20 m / min with respect to the beam.

また、ビーム照射後に、後熱処理を行うことも有効であ
る。この場合には、温度300〜1000℃前後、さら
には1500℃程度までで熱処理を行うことができる。
処理時間は1〜100時間程度でよい。
It is also effective to carry out post heat treatment after beam irradiation. In this case, the heat treatment can be performed at a temperature of about 300 to 1000 ° C., and further up to about 1500 ° C.
The processing time may be about 1 to 100 hours.

もちろん、以上の例示した諸条件は限定的なものではな
い。様々な態様が可能であることはいうまでもない。
Of course, the above-exemplified conditions are not limited. It goes without saying that various modes are possible.

この発明の方法によるレーザービームまたは電子ビーム
の照射によって極めて短時間に、急速加熱、急速冷却が
可能となる。このため、照射部分の溶融が瞬間的に起こ
り、蒸発による組成の変動を引き起こすことなしに、粉
末焼結体とは異なる、空隙が少く充填率の高い化合物を
得ることができる。
Irradiation with a laser beam or an electron beam according to the method of the present invention enables rapid heating and rapid cooling in an extremely short time. For this reason, it is possible to obtain a compound having few voids and a high filling rate, which is different from the powder sintered body, without instantaneously melting the irradiated portion and causing a change in composition due to evaporation.

このため、粉末焼結体と比較して微倍高い臨界電流密度
(Jc)が得られる。
Therefore, a critical current density (Jc) slightly higher than that of the powder sintered body can be obtained.

以下、実施例を示して、さらにこの発明について詳しく
説明する。
Hereinafter, the present invention will be described in more detail with reference to examples.

実施例 (1) La2O3:SrCO3:CuO=1.75:0.5:2の割合
の純度90%以上の原料粉末を混合し、700℃の温度
で12時間予備熱処理した。これを粉砕して粉末とし、
プレスにより加圧成形して、径20mm、厚さ2mmのペレ
ットを製造した。
Example (1) Raw material powders having a purity of 90% or more in a ratio of La 2 O 3 : SrCO 3 : CuO = 1.75: 0.5: 2 were mixed and preheated at a temperature of 700 ° C. for 12 hours. Crush this into powder,
The pellets having a diameter of 20 mm and a thickness of 2 mm were manufactured by press molding with a press.

このペレット状試料を毎分4mの速度で移動させ、ビー
ム径1mm、出力100〜500Wの範囲で炭酸ガスレー
ザーを照射した。照射は大気中において行った。
The pellet-shaped sample was moved at a speed of 4 m / min and irradiated with a carbon dioxide laser with a beam diameter of 1 mm and an output of 100 to 500 W. Irradiation was performed in the atmosphere.

出力300Wで照射した場合、超電導化合物になった領
域は、断面の幅約1mm、深さ約0.5mmであった。
When irradiated with an output of 300 W, the area of the superconducting compound had a width of about 1 mm and a depth of about 0.5 mm.

これらの照射後の試料について、超電導臨界温度(T
c)、4.2゜Kでの臨界電流密度(Jc)を測定し
た。その結果は表−1に示した。
The superconducting critical temperature (T
c) The critical current density (Jc) at 4.2 ° K was measured. The results are shown in Table-1.

この表−1には、あわせて、通常の粉末焼結法のデータ
も示した。
Table 1 also shows the data of the ordinary powder sintering method.

この表−1に示したように、レーザービーム照射した試
料は、通常の焼結法によるものに比べて、Jc値が約5
倍も上昇した。
As shown in Table 1, the sample irradiated with the laser beam had a Jc value of about 5 as compared with that obtained by the normal sintering method.
It doubled.

(2) なお、照射前に予備熱処理を行わない場合には、
Tcは2〜3゜K低くなる。さらに、照射後に700℃
前後で熱処理すると、Tcは1〜2゜K上昇する。
(2) If the preliminary heat treatment is not performed before irradiation,
Tc is lowered by 2-3 ° K. Furthermore, after irradiation 700 ° C
When heat-treated before and after, Tc rises by 1-2 ° K.

(3) 実施例(1)と同様にしてSr−La−Cu−O酸化
物ペレットを作製した。このペレットを毎分4mの速度
で移動させ、ビーム径1mm,出力20〜200Wの範囲
で電子ビームを真空中で照射した。出力100Wで照射
した場合、超電導化合物になった領域は、断面の幅約1.
2mm,深さ約1mmであった。照射後の試料について超電
導臨界温度(Tc),4.2Kでの臨界電流密度(J
c)を測定した。その結果は表−2に示す通りであっ
た。通常の粉末焼結法に比べて、約4.5倍も高いJc
値が得られた。
(3) Sr-La-Cu-O oxide pellets were prepared in the same manner as in Example (1). This pellet was moved at a speed of 4 m / min, and an electron beam was irradiated in a vacuum with a beam diameter of 1 mm and an output of 20 to 200 W. When irradiated with an output of 100 W, the area of the superconducting compound is about 1.
It was 2 mm and the depth was about 1 mm. Regarding the sample after irradiation, the superconducting critical temperature (Tc) and the critical current density (J
c) was measured. The results are as shown in Table-2. Jc about 4.5 times higher than that of ordinary powder sintering method
The value was obtained.

(4) Y−Ba−Cu−O系酸化物の超電導材料によっ
ても、上記と同様のJc増大の効果が確認された。
(4) The same effect of increasing Jc as described above was confirmed also by the Y-Ba-Cu-O-based oxide superconducting material.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭57−160975(JP,A) 特開 昭61−26571(JP,A) 特開 昭61−17471(JP,A) Physical Review Le tters Vol.58 No.9 P. 908〜912 ─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A-57-160975 (JP, A) JP-A-61-26571 (JP, A) JP-A-61-17471 (JP, A) Physical Review Letters Vol . 58 No. 9 P. 908 ~ 912

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】M−L−Cu−O(ただし、M=Ca,S
r,Ba,L=Sc,Y,La系元素)系酸化物超電導
体を製造するにあたって、超電導体が形成する所定配合
割合の原料粉末を成形した後に、レーザービームまたは
電子ビームを照射し、臨界電流密度を増大させることを
特徴とする酸化物超電導体の製造方法。
1. ML-Cu-O (where M = Ca, S
(r, Ba, L = Sc, Y, La-based element) -based oxide superconductor is manufactured by molding a raw material powder having a predetermined mixing ratio formed by the superconductor and then irradiating it with a laser beam or an electron beam to obtain criticality. A method for producing an oxide superconductor characterized by increasing a current density.
JP62122599A 1987-05-21 1987-05-21 Method for manufacturing oxide superconductor Expired - Lifetime JPH0613429B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62122599A JPH0613429B2 (en) 1987-05-21 1987-05-21 Method for manufacturing oxide superconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62122599A JPH0613429B2 (en) 1987-05-21 1987-05-21 Method for manufacturing oxide superconductor

Publications (2)

Publication Number Publication Date
JPS63288940A JPS63288940A (en) 1988-11-25
JPH0613429B2 true JPH0613429B2 (en) 1994-02-23

Family

ID=14839920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62122599A Expired - Lifetime JPH0613429B2 (en) 1987-05-21 1987-05-21 Method for manufacturing oxide superconductor

Country Status (1)

Country Link
JP (1) JPH0613429B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0816024B2 (en) * 1987-08-28 1996-02-21 住友電気工業株式会社 Manufacturing method of superconducting material

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PhysicalReviewLettersVol.58No.9P.908〜912

Also Published As

Publication number Publication date
JPS63288940A (en) 1988-11-25

Similar Documents

Publication Publication Date Title
JP2674979B2 (en) Superconductor manufacturing method
JPH01286902A (en) Production of oxide superconductor
WO1998057382A1 (en) ENHANCEMENT OF Jc IN OXIDE SUPERCONDUCTORS
JPH0643268B2 (en) Oxide high temperature superconductor
JP3089294B2 (en) Manufacturing method of superconducting tape material
EP0311337B1 (en) Method of producing a superconductive oxide conductor and a superconductive oxide conductor produced by the method
EP0764991A1 (en) Oxide superconductor and method of producing the same
US6444620B2 (en) High temperature superconductor having low superconducting anisotropy and method for producing the superconductor
US5591698A (en) Low temperature (T lower than 950° C.) preparation of melt texture YBCO superconductors
JPH0780710B2 (en) Manufacturing method of oxide high temperature superconductor
EP0305300B1 (en) A method for producing a superconducting article
JPH0613429B2 (en) Method for manufacturing oxide superconductor
US5244868A (en) Method of making high Tc superconductor material, and article produced by the method
EP0430568B1 (en) Method of making high Tc superconductor material, and article produced by the method
US5236892A (en) Method for manufacturing oxide superconducting article
JP2634187B2 (en) Method for producing thallium-based oxide superconductor
JPH0238359A (en) Production of superconductor
JP3394297B2 (en) Method for producing superconductive composition
JP2590370B2 (en) Superconducting material and manufacturing method thereof
JP4153651B2 (en) Seed crystal of oxide superconducting material and manufacturing method of oxide superconducting material using the same
JPH0816026B2 (en) Manufacturing method of superconducting material
JPH013063A (en) Method for manufacturing superconducting materials
JPH0764618B2 (en) Method for forming superconducting ceramic thick film
JPH0388716A (en) Production of oxide superconducting thin film
JPH06187848A (en) Oxide superconducting wire and method for producing the same

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term