JPH0614012B2 - Appearance inspection device - Google Patents
Appearance inspection deviceInfo
- Publication number
- JPH0614012B2 JPH0614012B2 JP59010860A JP1086084A JPH0614012B2 JP H0614012 B2 JPH0614012 B2 JP H0614012B2 JP 59010860 A JP59010860 A JP 59010860A JP 1086084 A JP1086084 A JP 1086084A JP H0614012 B2 JPH0614012 B2 JP H0614012B2
- Authority
- JP
- Japan
- Prior art keywords
- axis
- inspected
- light receiving
- light
- inspection head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 title claims description 48
- 230000003287 optical effect Effects 0.000 claims description 39
- 230000007246 mechanism Effects 0.000 claims description 21
- 230000001427 coherent effect Effects 0.000 claims description 5
- 230000036544 posture Effects 0.000 description 11
- 238000001514 detection method Methods 0.000 description 5
- 238000011179 visual inspection Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
【発明の詳細な説明】 技術分野 この発明は、走査コヒーレント光を被検面に投光し、そ
の直反射光を受けて被検面を自動的に検査する外観検査
装置に関する。Description: TECHNICAL FIELD The present invention relates to a visual inspection apparatus that projects scanning coherent light onto a surface to be inspected and receives the directly reflected light to automatically inspect the surface to be inspected.
従来技術 従来、この種の装置では、投光系および受光系に対する
被検面の向きの関係が、被検物に応じて固定化され、一
定の幾何学的配置をなすのを特徴としている。このよう
な方式を自動車ボディのように、各種の異なる傾斜、曲
率を持つ面の外観検査に適用しようとした場合、投光系
および受光系に対する被検面受光部の向きが一定しない
ため、直反射光による良好な信号を得ることができず、
自動検査実現の妨げとなっている。2. Description of the Related Art Conventionally, this type of device is characterized in that the relationship of the orientation of the surface to be inspected with respect to the light projecting system and the light receiving system is fixed according to the object to be inspected, and a fixed geometrical arrangement is made. When such a method is applied to the appearance inspection of a surface having various inclinations and curvatures such as an automobile body, the direction of the light receiving part of the surface to be inspected with respect to the light projecting system and the light receiving system is not constant, and thus the I could not get a good signal due to the reflected light,
This is an obstacle to the realization of automatic inspection.
目的 この発明は、従来通りの検査光学系に簡単な２次元位置
センサーを組合せて被検面受光部の投光系および受光系
に対する傾きを検出し、それによる傾き信号に応じて被
検物および光学検査ヘッドの少なくとも一方に、走査方
向をｙ軸、被検面を含みｙ軸と直交する方向をｘ軸とし
たときに、ｙ軸まわり回転機構およびｘ軸まわり回転機
構よりなる支持姿勢調節手段を設けて姿勢を制御し、被
検面受光部の投光系および受光系に対する向きを一定に
保つようにして、簡単な改良で前記従来の欠点を解消し
得る外観検査装置を提供することを目的とする。An object of the present invention is to combine a conventional inspection optical system with a simple two-dimensional position sensor to detect an inclination of a light receiving portion of a surface to be inspected with respect to a light projecting system and a light receiving system, and to detect an object to be inspected according to an inclination signal. At least one of the optical inspection heads has a y-axis as a scanning direction and a x-axis as a direction including the surface to be inspected and orthogonal to the y-axis. By providing a posture control device to maintain the orientation of the light receiving portion of the surface to be examined constant with respect to the light projecting system and the light receiving system, it is possible to provide a visual inspection apparatus capable of solving the above-mentioned conventional defects with a simple improvement. To aim.
構成 そこでこの発明では、被検面に走査コヒーレント光を当
てその直反射光を受けて被検面を検査する光学検査ヘッ
ドに、前記反射光の受光位置により被検面受光部の傾き
を検出する２次元位置センサが設けられ、前記光学検査
ヘッドまたは被検物の少なくとも一方に、前記コヒーレ
ント光の走査方向をｙ軸、前記被検面を含みｙ軸と直交
する方向をｘ軸、ｘ軸とｙ軸に直交する方向をｚ軸とし
たときの、ｙ軸回りの回転機構と、ｘ軸回りの回転機構
と、前記３軸のそれぞれの方向への移動機構とを備える
調整手段が設けられ、この調整手段が前記２次元位置セ
ンサからの出力信号に応じて制御され、前記光学検査ヘ
ッドにおける投光系および受光系に対する前記被検面受
光部の向きが相対的に一定に保たれるようにしている。Therefore, in the present invention, in the optical inspection head for inspecting the surface to be inspected by applying scanning coherent light to the surface to be inspected and receiving the directly reflected light, the inclination of the surface light receiving portion of the surface to be inspected is detected by the light receiving position of the reflected light. A two-dimensional position sensor is provided, and a scanning direction of the coherent light is defined as a y-axis on at least one of the optical inspection head and the test object, and a direction including the test surface and orthogonal to the y-axis is defined as an x-axis and an x-axis. An adjusting means is provided, which includes a rotating mechanism around the y axis, a rotating mechanism around the x axis, and a moving mechanism in each of the three axes, when the direction orthogonal to the y axis is the z axis. The adjusting means is controlled in accordance with the output signal from the two-dimensional position sensor so that the orientation of the test surface light receiving portion with respect to the light projecting system and the light receiving system in the optical inspection head can be kept relatively constant. ing.
実施例 第１図に、この発明の一実施例として、自動車ボディを
外観検査する場合が示されており、光学検査ヘッド１
が、被検物としての自動車ボディ２の被検面３に向け得
るよう設けられている。自動車ボディ２が図示しない支
持手段によって所定位置に支持されるのに対し、光学検
査ヘッド１は、ｘ軸周りの回転機構４およびｙ軸周りの
回転機構５を有するロボットアーム６に連結され、それ
ら回転機構４および５が光学検査ヘッド１の支持姿勢調
節手段７をなすようにしている。ロボットアーム６は、
ｘ軸方向に移動可能なよう支持された駆動函８に対しｚ
軸方向に移動可能なよう支持されている。駆動函８は、
それをｘ軸方向に駆動する機構、ロボットアーム６を駆
動函８に対しｚ軸方向に駆動する機構、およびロボット
アーム６の各回転機構４，５を駆動する各機構を内蔵し
ており、図示しないが、ロボットアーム６をｙ軸方向に
移動させる手段も別に設けられ、それらの各駆動機構を
ＮＣ制御部９により制御する。Embodiment FIG. 1 shows, as an embodiment of the present invention, a case where the appearance of an automobile body is inspected.
Are provided so as to face the surface 3 to be inspected of the automobile body 2 as an object to be inspected. The automobile body 2 is supported at a predetermined position by a support means (not shown), while the optical inspection head 1 is connected to a robot arm 6 having a rotation mechanism 4 around the x axis and a rotation mechanism 5 around the y axis. The rotating mechanisms 4 and 5 form a support posture adjusting means 7 of the optical inspection head 1. The robot arm 6 is
For a drive box 8 supported so as to be movable in the x-axis direction, z
It is supported so as to be movable in the axial direction. The drive box 8 is
A mechanism for driving it in the x-axis direction, a mechanism for driving the robot arm 6 in the z-axis direction with respect to the drive box 8, and a mechanism for driving each rotating mechanism 4, 5 of the robot arm 6 are built-in, and are illustrated. Although not provided, a means for moving the robot arm 6 in the y-axis direction is also provided separately, and each drive mechanism thereof is controlled by the NC control unit 9.
光学検査ヘッド１は、第２図に示されるような検査光学
系を内蔵している。この光学系では、従来の場合同様Ｈ
ｅ−Ｎｅレーザー管１０を出たレーザー光が、全反射ミ
ラー１１，１２で反射されて振動ミラー１３に達し、振
動ミラー１３により扇状に拡がるビームとされる。この
扇状ビームは、振動ミラー１３上レーザー光反射点に対
して自身の焦点距離にほぼ等しくなる位置に置かれたレ
ンズ１４により平行走査ビームに変換され、被検面３を
ｙ軸方向に走査する（第３図）。被検面３受光部から反
射光は、直反射成分と、被検面３受光部の表面粗さによ
る拡散反射成分との合成からなるが、疵検出上、直反射
成分を全反射ミラー１５を経て集光レンズ１６により集
め、干渉フィルター１７により外光の影響を除去して受
光素子１８で受ける。被検面３受光部に疵があると、直
反射成分が減り、拡散反射成分が増えるから、前記受光
素子１８への受光量をモニターして外観検査がなされ
る。この検査は、光学検査ヘッド１が、ｘ軸方向の移動
に加え、ｙ軸方向にも移動されることによって、被検面
３の所望範囲に及び、その際の被検面３受光部の位置変
化に伴う、光学検査ヘッド１と被検面３受光部との距離
変化が、ロボットアーム６のｚ軸方向移動により是正さ
れる。The optical inspection head 1 has a built-in inspection optical system as shown in FIG. In this optical system, H
The laser light emitted from the e-Ne laser tube 10 is reflected by the total reflection mirrors 11 and 12 to reach the vibrating mirror 13, and the vibrating mirror 13 forms a fan-shaped beam. This fan-shaped beam is converted into a parallel scanning beam by the lens 14 placed at a position on the vibrating mirror 13 where the focal point of the laser beam is substantially equal to the laser beam reflection point, and the surface 3 to be inspected is scanned in the y-axis direction. (Fig. 3). The light reflected from the light receiving portion of the surface 3 to be inspected is composed of a direct reflection component and a diffuse reflection component due to the surface roughness of the light receiving portion of the surface 3 to be inspected. After that, the light is collected by the condenser lens 16, removed by the interference filter 17 by the external light, and received by the light receiving element 18. If the light receiving portion of the surface 3 to be inspected has a flaw, the direct reflection component decreases and the diffuse reflection component increases, so that the appearance inspection is performed by monitoring the amount of light received by the light receiving element 18. In this inspection, the optical inspection head 1 is moved not only in the x-axis direction but also in the y-axis direction to reach a desired range of the surface 3 to be inspected, and the position of the light receiving portion of the surface 3 to be inspected at that time. The change in the distance between the optical inspection head 1 and the light receiving portion of the surface 3 to be inspected due to the change is corrected by the movement of the robot arm 6 in the z-axis direction.
前記検査光学系に対し、被検面３受光部からの直反射光
を、受光素子１８へ向う光路から一部分割して取出すビ
ームスプリッター１９と、該ビームスプリッター１９に
より分割して取出されたビームを受ける２次元位置セン
サー２０と、ビームスプリッター１９による分割取出し
ビームの２次元位置センサー２０に対する結像倍率調節
用のレンズ２１とが、さらに設けられており、ビームス
プリッター１９は集光レンズ１６と干渉フィルター１７
との間に配置されている。For the inspection optical system, a beam splitter 19 for extracting a part of the directly reflected light from the light receiving portion of the surface to be inspected 3 from the optical path toward the light receiving element 18 and a beam split by the beam splitter 19 and extracted. A two-dimensional position sensor 20 for receiving and a lens 21 for adjusting an imaging magnification of the split extraction beam by the beam splitter 19 with respect to the two-dimensional position sensor 20 are further provided, and the beam splitter 19 includes a condenser lens 16 and an interference filter. 17
It is located between and.
２次元位置センサー２０は、光学検査ヘッド１に内蔵さ
れる投光系および受光系に対する被検面３受光部の傾き
に対応して、前記分割検出ビームの受光位置が受光面上
で変化することにより、前記被検面３受光部のｘ軸周り
およびｙ軸周りの傾きを検出することができ、この２次
元位置センサー２０からの出力信号に応じて、前記支持
姿勢調節手段７としての各回転機構４，５を適宜制御
し、被検面３受光部が投光系および受光系に対し常に一
定の向きとなるようにする。これによって、被検面３が
自動車ボディのように種々の傾きや曲率を持つ被検物で
あっても、その所望被検範囲全域で、直反射光による良
好な検査信号が自動的に得られ、高精度な自動外観検査
が可能となる。The two-dimensional position sensor 20 is such that the light receiving position of the divided detection beam changes on the light receiving surface according to the inclination of the light receiving portion of the surface 3 to be inspected with respect to the light projecting system and the light receiving system built in the optical inspection head 1. Thus, the tilts of the light receiving portion of the surface 3 to be inspected about the x-axis and the y-axis can be detected, and each rotation as the support attitude adjusting means 7 can be performed according to the output signal from the two-dimensional position sensor 20. The mechanisms 4 and 5 are appropriately controlled so that the light receiving portion of the surface 3 to be inspected is always oriented in a fixed direction with respect to the light projecting system and the light receiving system. As a result, even if the surface 3 to be inspected is an object having various inclinations and curvatures such as an automobile body, a good inspection signal due to the direct reflected light is automatically obtained in the entire desired area to be inspected. Highly accurate automatic visual inspection is possible.
以下、２次元位置センサー２０による被検面３受光部の
傾き検出について詳述する。Hereinafter, the detection of the inclination of the light receiving portion of the surface to be inspected 3 by the two-dimensional position sensor 20 will be described in detail.
ｙ軸周りの傾きについて、 第４図に、等価光路で示されているように、光学検査ヘ
ッド投光系からのレーザー光は、被検面３に対し左方か
ら入射し、被検面３でスネルの法則に従って反射される
が、投光系および受光系に対する被検面３の適正なｙ軸
周りの向きを(ロ)の状態に設定する場合、そのときの被
検面３からの直反射光が２次元位置センサー２０受光面
のｘ軸方向中央点Ｏｘに結像するように調整されてい
る。被検面３が(ロ)の状態から(ハ)の状態に傾くと、被検
面３からの直反射光は破線で示されているように、２次
元位置センサー２０受光面の中央点Ｏｘから外れた位置
に結像される。Regarding the inclination around the y-axis, as shown by the equivalent optical path in FIG. 4, the laser light from the optical inspection head projection system is incident on the surface to be inspected 3 from the left side, and the surface to be inspected 3 Is reflected according to Snell's law, but when setting the proper orientation of the surface to be inspected 3 around the y-axis with respect to the light projecting system and the light receiving system to the state of (b), The reflected light is adjusted so as to form an image at the center point Ox in the x-axis direction on the light receiving surface of the two-dimensional position sensor 20. When the surface 3 to be inspected is tilted from the state (b) to the state (c), the directly reflected light from the surface 3 to be inspected is, as indicated by the broken line, the central point Ox of the light receiving surface of the two-dimensional position sensor 20. An image is formed at a position deviating from.
結局、第５図に示される如く被検面３受光部の光学検査
ヘッド１の投受光系に対する向きが、ｙ軸周りに(イ),
(ロ),(ハ)と変化した場合、その傾き状態(イ),(ロ),(ハ)に従
って、２次元位置センサー２０のｘ軸方向位置信号出力
Ｖｘが、第６図(イ),(ロ),(ハ)のように変化する。なお、
走査レーザー光は、ｙ軸に平行に走査されているため
に、前記ｘ軸方向位置信号出力Ｖｘは直流となってい
る。After all, as shown in FIG. 5, the direction of the light receiving portion of the surface 3 to be inspected with respect to the light emitting and receiving system of the optical inspection head 1 is around the y axis (b),
6B, the x-axis direction position signal output Vx of the two-dimensional position sensor 20 is changed in accordance with the inclination states (A), (B), and (C) when changing to (B) and (C). It changes like (b) and (c). In addition,
Since the scanning laser light is scanned in parallel with the y-axis, the x-axis direction position signal output Vx is DC.
以上によって、２次元位置センサー２０からのｘ軸方向
位置信号出力Ｖｘをモニターすることにより、被検面３
受光部のｙ軸周りの適正向きに対する傾きを自動的に連
結検出することができる。By monitoring the x-axis direction position signal output Vx from the two-dimensional position sensor 20 as described above, the test surface 3
It is possible to automatically detect the inclination of the light receiving portion about the y-axis with respect to the proper direction.
ｘ軸周りの傾きについて、 被検面３のｘ軸周りの傾き変化は、ｘ軸方向から、つま
り正面側から見た光学検査ヘッド１に対し、第７図に示
される(ニ),(ホ),(ヘ)のように表わされる。ここで、投光
系および受光系に対する被検面３の適正なｘ軸周りの向
きを(ホ)の状態に設定した場合、第８図に等価光路で示
されているように、そのときの被検面３からの直反射光
が、２次元位置センサー２０受光面上の、ｙ軸方向中央
点Ｏｙを中心とする対称な位置に結像するように調整さ
れている。第８図において被検面３が(ホ)の状態から(ヘ)
の状態に傾いたとき、２次元位置センサー２０受光面へ
の直反射光結像位置が、破線で示されているようにｙ軸
方向中央点Ｏｙから変化する。Regarding the inclination about the x-axis, the inclination change about the x-axis of the surface 3 to be inspected is shown in FIG. 7 for the optical inspection head 1 viewed from the x-axis direction, that is, from the front side. ), (F). Here, when the proper orientation of the surface 3 to be inspected with respect to the light projecting system and the light receiving system around the x axis is set to the state of (e), as shown by the equivalent optical path in FIG. The directly reflected light from the surface 3 to be inspected is adjusted so as to form an image at a symmetrical position on the light receiving surface of the two-dimensional position sensor 20 about the center point Oy in the y-axis direction. In Fig. 8, the surface 3 to be tested is changed from (e) to (f)
When tilted to the state of, the image forming position of the directly reflected light on the light receiving surface of the two-dimensional position sensor 20 changes from the center point Oy in the y-axis direction as shown by the broken line.
結局、第７図に示されるように、被検面３受光部の光学
検査ヘッド１の投受光系に対する向きが、ｘ軸周りに
(ニ),(ホ),(ヘ)と変化した場合、その傾き状態(ニ),(ホ),(ヘ)
に従って、２次元位置センサー２０のｙ軸方向位置信号
出力Ｖｙが、第９図(ニ),(ホ),(ヘ)のように変化する。な
お、走査レーザー光は、その走査方向がｙ軸方向に一致
しているために、前記ｙ軸方向位置信号出力Ｖｙは、第
９図に示されているように、交流成分と直流成分の２成
分を含んでいる。After all, as shown in FIG. 7, the direction of the light receiving portion of the surface 3 to be detected is around the x axis with respect to the light emitting and receiving system of the optical inspection head 1.
If it changes to (d), (e), (f), the inclination state (d), (e), (f)
Accordingly, the y-axis direction position signal output Vy of the two-dimensional position sensor 20 changes as shown in FIGS. 9 (d), (e), and (f). Since the scanning direction of the scanning laser light coincides with the y-axis direction, the y-axis direction position signal output Vy is, as shown in FIG. Contains ingredients.
以上によって、２次元位置センサー２０からのｙ軸方向
位置信号出力をモニターすることによって、被検面３受
光部のｘ軸周りの適正向きに対する傾きを自動的に連続
検出することができる。As described above, by monitoring the y-axis direction position signal output from the two-dimensional position sensor 20, it is possible to automatically and continuously detect the inclination of the light receiving portion of the surface 3 to be inspected with respect to the proper direction around the x axis.
２次元位置センサー２０から得られる前記ｘ軸方向、ｙ
軸方向の各位置信号出力は、被検面３受光部の適正向き
に対するｙ軸およびｘ軸周りの各傾き信号として、第１
図におけるＮＣ制御部９にフィードバックされ、その信
号に応じて、光学検査ヘッド１の支持姿勢調節手段７を
なす各回転機構４，５を制御し、光学検査ヘッド１の投
光系および受光系に対する被検面３受光部の向きが常に
一定であるよう、光学検査ヘッド１の支持姿勢が調節さ
れる。この結果、被検物２の所望被検面３の全域で、被
検面３各部の傾きや曲率の違いにかかわりなく、走査レ
ーザー光が所定の方向から入射し所定の方向に直反射す
ることによる良好なS/N比の信号が自動的に得られ、高
精度な自動外観検査が達成される。The x-axis direction obtained from the two-dimensional position sensor 20, y
The respective position signal outputs in the axial direction are output as first tilt signals about the y-axis and the x-axis with respect to the proper orientation of the light receiving portion of the surface 3 to be inspected.
It is fed back to the NC control unit 9 in the figure, and in response to the signal, it controls the rotating mechanisms 4 and 5 that form the support posture adjusting means 7 of the optical inspection head 1 to control the light projecting system and the light receiving system of the optical inspection head 1. The support posture of the optical inspection head 1 is adjusted so that the orientation of the light receiving portion of the surface 3 to be inspected is always constant. As a result, the scanning laser light is incident from a predetermined direction and is directly reflected in a predetermined direction on the entire desired surface 3 to be inspected of the object 2 regardless of the difference in inclination and curvature of each part of the surface 3 to be inspected. A signal with a good S / N ratio is automatically obtained, and highly accurate automatic visual inspection is achieved.
もっとも、被検面３受光部の傾き検出による光学検査ヘ
ッド１の支持姿勢調節は、その傾きが検出された被検面
３受光部に対してであり、その受光中心点Ｐを中心とし
てなされなければならない。それには、光学検査ヘッド
１のｘ軸周りおよびｙ軸周りの支持姿勢調節と共に、そ
の調節に伴う前記受光中心点Ｐに対するｘ軸、ｙ軸、ｚ
軸方向の位置ズレが補正されればよい。このような補正
は、ＮＣ制御部９でなされる。However, the adjustment of the support posture of the optical inspection head 1 by detecting the inclination of the light receiving portion of the surface 3 to be inspected is performed with respect to the light receiving portion of the surface 3 to be inspected in which the inclination is detected, and must be performed with the light receiving center point P as the center. I have to. For this purpose, the support posture of the optical inspection head 1 around the x-axis and the y-axis is adjusted, and the x-axis, the y-axis, and the z-axis with respect to the light receiving center point P associated with the adjustment.
It suffices if the positional deviation in the axial direction is corrected. Such correction is performed by the NC control unit 9.
前記のような投光系および受光系に対する被検面受光部
の向き調節は、被検物側の支持姿勢を調節してもなされ
るし、光学検査ヘッドおよび被検物双方の各支持姿勢を
相互調節するようにしてもよい。被検物側だけか光学検
査ヘッドと共にｘ，ｙ，ｚ軸方向移動機構が設けられて
もよい。The orientation adjustment of the test surface light receiving part with respect to the light projecting system and the light receiving system as described above is performed even by adjusting the supporting posture on the side of the test object, and the support postures of both the optical inspection head and the test object are adjusted. You may make it adjust mutually. An x-, y-, and z-axis moving mechanism may be provided only on the object side or together with the optical inspection head.
前記２次元位置センサーとしては、半導体型のものや、
ビジコン、エアリアセンサー等種々のものを利用するこ
とができる。As the two-dimensional position sensor, a semiconductor type one,
Various things such as a vidicon and an air rear sensor can be used.
効果 この発明によれば、被検面が自動車ボディのように各種
の傾きや曲率を持つものであっても投光系および受光系
に対する被検面受光部の適正向きに対する傾きが連続検
出され、その検出信号に応じた光学検査ヘッドおよび被
検物の少なくとも一方の支持姿勢調節によって前記傾き
が相対的に是正されるから、被検物の所望被検面全域
で、被検面各部の傾きや曲率の違いにかかわりなく、直
反射光による良好なＳ／Ｎ比の信号が得られ、高精度な
自動外観検査が達成される。Effect According to the present invention, even if the surface to be inspected has various inclinations and curvatures such as an automobile body, the inclination with respect to the proper orientation of the surface to be inspected with respect to the light projecting system and the light receiving system is continuously detected, Since the inclination is relatively corrected by the support posture adjustment of at least one of the optical inspection head and the inspection object according to the detection signal, the inclination of each portion of the inspection surface is desired in the entire desired inspection surface of the inspection object. Regardless of the difference in curvature, a signal with a good S / N ratio due to the direct reflected light is obtained, and highly accurate automatic visual inspection is achieved.
しかも光学検査ヘッドに２次元位置センサーが設けら
れ、この光学検査ヘッドおよび被検物の支持手段の少な
くとも一方に、走査方向をｙ軸とし、被検面を含みｙ軸
と直交する方向をｘ軸としたときの、ｙ軸周りの回転機
構およびｘ軸周りの回転機構からなる支持姿勢調節手段
が設けられ、該支持姿勢調節手段が前記２次元位置セン
サーからの出力信号に応じて制御されるので、ｘ軸或い
はｙ軸周りの被検面の傾きを検知でき、ロボットアーム
による制御を可能とし、自動外観検査を可能とする。Moreover, the optical inspection head is provided with a two-dimensional position sensor, and the scanning direction is set to the y-axis, and the direction including the surface to be inspected and orthogonal to the y-axis is set to the x-axis on at least one of the optical inspection head and the support means for the inspection object. In this case, the supporting attitude adjusting means including the rotating mechanism around the y-axis and the rotating mechanism around the x-axis is provided, and the supporting attitude adjusting means is controlled according to the output signal from the two-dimensional position sensor. , The inclination of the surface to be inspected around the x-axis or the y-axis can be detected, control by the robot arm becomes possible, and automatic appearance inspection becomes possible.
第１図は一実施例の検査状態を示すｙ軸方向から見た側
面図、第２図は光学検査ヘッドの内部光学系を示す第１
図と同じ向きの側面図、第３図は光学検査ヘッドおよび
その支持姿勢調節手段を持つロボットアームの斜面図、
第４図は被検面受光部のｙ軸周りの傾き検出状態を示す
等価光路図、第５図は投受光系に対する被検面のｙ軸周
りの傾き変化状態を示すｙ軸方向から見た側面図、第６
図は第５図の被検面各傾き状態に対応した２次元位置セ
ンサーのｘ軸方向位置信号出力を示す線図、第７図は投
受光系に対する被検面のｘ軸周りの傾き変化状態を示す
ｘ軸方向から見た正面図、第８図は被検面受光部のｘ軸
周りの傾き検出状態を示す等価光路図、第９図は第７図
の各傾き状態に対応した２次元位置センサーのｙ軸方向
位置信号出力を示す線図である。 １…光学検査ヘッド、２…自動車ボディ（被検物）、３
…被検面、 ４…ｘ軸周り回転機構（７…支持姿勢調節手段）、 ５…ｙ軸周り回転機構（７…支持姿勢調節手段）、 ６…ロボットアーム（支持手段）、８…駆動函、 ９…ＮＣ制御部、 １０…Ｈｅ−Ｎｅレーザー管（投光系）、 １１，１２…全反射ミラー（投光系）、 １３…振動ミラー（投光系）、 １４…レンズ（投光系）、 １５…全反射ミラー（受光系）、 １６…集光レンズ（受光系）、 １７…干渉フィルター（受光系）、 １８…受光素子（受光系）、 ２０…２次元位置センサーFIG. 1 is a side view showing an inspection state of one embodiment as seen from the y-axis direction, and FIG. 2 is a first view showing an internal optical system of an optical inspection head.
FIG. 3 is a side view in the same direction as that of FIG. 3, and FIG. 3 is a perspective view of a robot arm having an optical inspection head and its supporting attitude adjusting means.
FIG. 4 is an equivalent optical path diagram showing a tilt detection state around the y axis of the light receiving section of the surface to be inspected, and FIG. 5 is a view from the y axis direction showing a tilt change state around the y axis of the surface to be inspected with respect to the light emitting and receiving system. Side view, 6th
FIG. 7 is a diagram showing the position signal output in the x-axis direction of the two-dimensional position sensor corresponding to each inclination state of the surface to be inspected in FIG. 5, and FIG. 7 is the inclination change state of the surface to be inspected with respect to the light emitting and receiving system around the x axis. FIG. 8 is a front view as seen from the x-axis direction, FIG. 8 is an equivalent optical path diagram showing a tilt detection state around the x-axis of the light receiving section of the surface to be inspected, and FIG. 9 is a two-dimensional view corresponding to each tilt state of FIG. It is a diagram which shows the y-axis direction position signal output of a position sensor. 1 ... Optical inspection head, 2 ... Car body (inspection object), 3
... Surface to be inspected, 4 ... Rotation mechanism around x-axis (7 ... Support posture adjusting means), 5 ... Rotation mechanism around y-axis (7 ... Support posture adjusting means), 6 ... Robot arm (supporting means), 8 ... Drive box , 9 ... NC control unit, 10 ... He-Ne laser tube (projection system), 11, 12 ... Total reflection mirror (projection system), 13 ... Vibration mirror (projection system), 14 ... Lens (projection system) ), 15 ... Total reflection mirror (light receiving system), 16 ... Condensing lens (light receiving system), 17 ... Interference filter (light receiving system), 18 ... Light receiving element (light receiving system), 20 ... Two-dimensional position sensor
Claims (1)
反射光を受けて被検面を検査する光学検査ヘッドに、前
記反射光の受光位置により被検面受光部の傾きを検出す
る２次元位置センサが設けられ、 前記光学検査ヘッドまたは被検物の少なくとも一方に、
前記コヒーレント光の走査方向をｙ軸、前記被検面を含
みｙ軸と直交する方向をｘ軸、ｘ軸とｙ軸に直交する方
向をｚ軸としたときの、ｙ軸回りの回転機構と、ｘ軸回
りの回転機構と、前記３軸のそれぞれの方向への移動機
構とを備える調整手段が設けられ、 この調整手段が前記２次元位置センサからの出力信号に
応じて制御され、前記光学検査ヘッドにおける投光系お
よび受光系に対する前記被検面受光部の向きが相対的に
一定に保たれることを特徴とする外観検査装置。1. An optical inspection head for inspecting a surface to be inspected by applying scanning coherent light to the surface to be inspected and receiving directly reflected light thereof, and detecting the inclination of a light receiving portion of the surface to be inspected 2 by the light receiving position of the reflected light. A dimensional position sensor is provided, and at least one of the optical inspection head or the object to be inspected,
A rotation mechanism around the y axis, where the scanning direction of the coherent light is the y axis, the direction including the surface to be inspected and orthogonal to the y axis is the x axis, and the direction orthogonal to the x axis and the y axis is the z axis. , Adjusting means provided with a rotating mechanism around the x-axis and a moving mechanism in each of the three axes, the adjusting means being controlled according to an output signal from the two-dimensional position sensor, An appearance inspection apparatus, characterized in that the orientation of the surface-to-be-inspected light receiving part is kept relatively constant with respect to the light projecting system and the light receiving system in the inspection head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59010860A JPH0614012B2 (en) | 1984-01-23 | 1984-01-23 | Appearance inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59010860A JPH0614012B2 (en) | 1984-01-23 | 1984-01-23 | Appearance inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60154145A JPS60154145A (en) | 1985-08-13 |
| JPH0614012B2 true JPH0614012B2 (en) | 1994-02-23 |
Family
ID=11762108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59010860A Expired - Lifetime JPH0614012B2 (en) | 1984-01-23 | 1984-01-23 | Appearance inspection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0614012B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0210249A (en) * | 1988-06-29 | 1990-01-16 | Kanto Auto Works Ltd | Apparatus for checking defect on applied surface |
| JPH0210250A (en) * | 1988-06-29 | 1990-01-16 | Kanto Auto Works Ltd | Method and apparatus for controlling attitude of defect-checking-apparatus for applied surface |
| JP4889544B2 (en) * | 2007-03-30 | 2012-03-07 | 本田技研工業株式会社 | Sphere center calculation method |
| KR20230017247A (en) * | 2020-05-26 | 2023-02-03 | 신 어드밴스드 시스템스 그룹 에스.엘. | Surface defect inspection device, vehicle body surface defect inspection line, and surface defect inspection process |
| DE102021205659B4 (en) * | 2021-06-03 | 2023-08-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Process for testing component surfaces for defects and/or determining properties of component coatings |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6035608B2 (en) * | 1980-09-13 | 1985-08-15 | 松下電工株式会社 | Position/attitude control device |
| JPS58118740A (en) * | 1982-01-08 | 1983-07-14 | アロカ株式会社 | Scanner of ultrasonic scanner |
-
1984
- 1984-01-23 JP JP59010860A patent/JPH0614012B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60154145A (en) | 1985-08-13 |
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