JPH0614081B2 - Short circuit detector - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Object of the Invention (Industrial field of application) The present invention provides a method for inspecting in a manufacturing process of a liquid crystal display device having lead electrodes arranged in a matrix, for example. The present invention relates to a short-circuit detecting device that is most suitable for detecting a short-circuited portion.

(Prior Art) In recent years, liquid crystal display devices have features such as reduced power consumption and reduced thickness and weight as compared with displays such as CRTs.
It is being put to practical use as a display for V receivers, microcomputers, word processors and the like.

As such a liquid crystal display device, for example, an image display device having an image area of about 3 cm × 5 cm by the active matrix driving system has been put into practical use, and a device having an image area of about 25 cm × 35 cm has been prototyped.

Generally, a liquid crystal display device based on the above-mentioned active matrix driving method has a first glass substrate on which a transparent electrode film is formed and a first glass substrate on which a pixel having a memory function such as a transparent display electrode and a TFT is formed for each vertical and horizontal pixel. It is composed of two glass substrates. Further, lead electrodes insulated from each other are formed vertically and horizontally on the second glass substrate, and these lead electrodes are connected to respective terminals of respective elements. The first glass substrate and the second glass substrate are arranged so that the transparent electrode film and the lead electrode face each other with a predetermined gap, and liquid crystal is sealed in this gap.

By the way, since the gap between the vertical and horizontal lead electrodes insulated from each other is very small, a short circuit may occur. Therefore, conventionally, a short circuit inspection is required in the manufacturing process.

As an example of such an inspection, before encapsulating the liquid crystal, a worker puts a tester or the like into contact with a prober pin on all pins, one by one, to each connection terminal for connection with the drive circuit where the lead electrode is exposed. A short circuit defect inspection is performed for each pixel.

(Problems to be solved by the invention) By the way, in a liquid crystal display device having an image area of about 3 cm × 5 cm, the number of pixels is limited. In the case of a large image of about 35 cm, for example, the number of pixels becomes 2 million, so that such an inspection method requires a huge amount of time, which causes a cost increase.

Further, in recent years, the pixel density tends to further increase for the purpose of improving the image quality. In this case, as the pixels are miniaturized, the above-mentioned connection terminals are also miniaturized, and the interval between the adjacent connection terminals is also miniaturized, so that the worker brings the prober pin into contact with a predetermined connection terminal. Can't do it. Therefore, it is necessary to actually operate the product after the completion of the product to perform the short circuit inspection, which causes a decrease in yield.

Furthermore, a large-image liquid crystal display device has a very high frequency of short-circuit defects as compared with a practically used image area of about 3 cm × 5 cm. There is a strong demand for the development of a method and device capable of automating the above-mentioned short circuit defect inspection.

The present invention has been conceived in view of the above circumstances, and an object thereof is to provide a short-circuit detection device capable of automatically and reliably detecting a short-circuit defect in a short time.

[Structure of the Invention] (Means for Solving Problems) That is, the short-circuit detection device of the present invention includes a first electrode group arranged in multiple rows at a predetermined pitch in the X direction, and a first electrode group. An electric contact is brought into contact between the first electrode and the second electrode of an electronic component including a plurality of second electrodes arranged in a row at a predetermined pitch in the Y direction so as to be insulated and cross each other. In a short-circuit detecting device for detecting the presence or absence of a short circuit, the pitch is a multiple of the pitch of the first electrodes corresponding to the first electrode group and is equal to or less than the length of the connection terminal portion of the second electrode. The electrical contacts arranged in the X direction at a pitch, and a connection terminal of the first electrode, which has a plurality of pitches of the second electrode group corresponding to the second electrode group. Contact holding provided with the electric contacts arranged in the Y direction at a pitch equal to or less than the length of the portion A member, a moving means for relatively moving the contact holding member and the electronic component in the X and Y directions, each contact arranged along the first electrode group, and the second electrode group. And a short-circuit detecting means for detecting the presence / absence of a short circuit between the contacts arranged along the line.

(Operation) In the short-circuit detection device of the present invention, a test for short-circuit between all electrodes arranged in a matrix with a relatively small number of contacts is performed.
It is possible to automatically and reliably detect a short circuit defect in a short time.

That is, if the prober pins corresponding to the total number of electrodes of the electronic component are provided, the inspection can be completed with a single contact instantly, but it is extremely difficult to contact all the integrated electrodes having high density. Focusing on this point, the present invention provides a short-circuit detection device that can be accurately inspected in a relatively short time.

(Example) Hereinafter, details of an example in which the present invention is applied to a matrix type liquid crystal display device will be described with reference to the drawings.

FIG. 1 is a diagram showing a short-circuit detecting device according to an embodiment of the present invention.

As shown in the figure, in this device, an XY table 2 on which the liquid crystal display device 1 is placed at a predetermined position, and a first drive unit 3 for driving the XY table 2 in the X and Y directions in the drawing.
And a base 4 having a large number of prober pins arranged on the XY table 2 at a predetermined interval, a second drive unit 5 for driving the base 4 in the vertical direction (direction of arrow 7 in the figure), and whether or not there is a short circuit. The main part is composed of the determination unit 6 for detecting and the first and second drive units 3, 5 and a control device (not shown) for controlling the determination unit 6.

Further, the liquid crystal display device 1 mounted on the XY table 2 is
As shown in FIG. 2 and FIG.
A rectangular first glass substrate 8 having a height of 50 mm and a height of 250 mm and having a transparent electrode film (not shown) formed thereon, and a transparent display electrode (not shown) and a memory function such as a TFT for each vertical and horizontal pixel. A rectangular second element having an element (not shown)
It is composed of a glass substrate 10. Further, transparent lead electrodes 7 and 9 insulated from each other are formed on the second glass substrate 10 vertically and horizontally (X direction, Y direction), and these lead electrodes 7 and 9 are connected to respective terminals of each element. Has been done. The lead electrodes 7 have a predetermined pitch, for example, 80 μm,
A large number of, for example, 1000 pads are arranged in the position direction, for example, the Y direction, with a lead wire width of 80 μm, and a large number of, for example, 2000 pads are arranged in the direction orthogonal to the lead electrodes 7 at a predetermined pitch, for example, the above-mentioned pitch. In addition, TF
Since the structure of T is well known to those skilled in the art, its explanation is omitted.

In addition, the second glass substrate 10 includes the display unit 10 a and the connection unit 1.
0b, and the transparent electrode film of the first glass substrate 8 and the lead electrodes 7 and 9 of the second glass substrate 10 face each other in the display portion 10a so that a small gap is provided via the spacer 11. The first glass substrate 8 is mounted on the second glass substrate 10, and the connection portion 10b is exposed near the rectangular side to be connected to the lead electrode 9 of the second glass substrate 10 for connection with the drive circuit. A large number of connected X-direction connection terminals 9a are arranged in a row, and a large number of similar Y-direction connection terminals 7a respectively connected to the lead electrodes 7 are arranged in a row near the other side orthogonal to each other.

The connecting terminals 7a and 9a have a length L and are arranged in a row with the same pitch L / 5.

This liquid crystal display device is a completed product in which liquid crystal is filled in the gap between the first glass substrate 8 and the second glass substrate 10, but in this embodiment, a semi-finished product before liquid crystal filling is used. Has been.

On the other hand, as shown in FIG. 4, the base 4 has a rectangular shape substantially the same as that of the liquid crystal display device 1, and the connection terminals 7a and 9a formed on the second glass substrate 10 of the liquid crystal display device 1 are connected.
In the X direction, Y in the vicinity of one side corresponding to
A large number of prober pins 4x ... 4x, 4y ... 4y in the direction are embedded and fixed at an interval of a pitch L toward the XY table 2, for example, at a pitch of every five connection terminals as can be seen from the connection terminal row in FIG. .

In addition, the determination unit 6 is provided with the prober pin 4 in the X and Y directions.
A crossing circuit 6a connected to x and 4y, for judging whether or not each prober pin 4x in the X direction and the prober pin 4y in the Y direction are electrically connected, and outputting the result as a binarized signal, and the connection terminal of the liquid crystal display device 1. A memory circuit 6b for storing the binarized signal corresponding to the device and a display device 6c for displaying the result output from the memory circuit 6b. The presence or absence of conduction increases the current between the prober pins 4x and y,
Judge by detecting whether or not it flows.

Next, a method of detecting a short circuit of the device configured in this way
Description will be given based on a partially enlarged view of the liquid crystal display device 1 shown in FIG.

First, the liquid crystal display device 1 is placed at a predetermined position on the XY table 2.
Is placed and the short-circuit detection device is turned on.

Then, the following operation is performed under the control of the control unit.

The XY table 2 is driven by the first driving unit 3 so that the X-direction connection terminal 9a of the liquid crystal display device 1 mounted on the XY table 2 is connected.
, (A) position and connection terminal 7a in the Y direction
, So that the respective prober pins 4x, 4y of the base 4 are located on the (f) position of.

Next, by driving the second drive unit 5, the base 4 is lowered to a position where the tips of the prober pins 4x, 4y come into contact with the connection terminals 7a, 9a, and then the determination unit 6 determines whether or not there is a short circuit. Done.

In this case, in the determination unit 6, the X-direction connection terminal 9a
The determination circuit 6a determines whether or not there is a short circuit at a position where the connection terminal 7a in the Y direction intersects with the connection terminal 7a in the Y direction, and the binarized signal obtained as a result is input to and stored in the memory circuit 6b.

Next, the base 4 is raised to a predetermined position by driving the second driving unit 5, and the XY is driven by driving the first driving unit 3.
The table 2 has the same amount as the pitch L / 5 between the connection terminals 9a and 9a in the arrow X direction in the figure, that is, the connection terminals 9 in the X direction.
Prober pin 4x in the X direction on the (a) position of, ...
Is moved, and the prober pin 4y in the Y direction is moved to the position (g) of the connection terminals 7a in the Y direction.

After that, the base 4 is lowered by the driving of the second drive unit 5 to a position where the tips of the prober pins 4x and 4y come into contact with the connection terminals 7a and 9a, and thereafter, in this case, in the X direction, as in the case described above. The determination circuit 6 determines whether or not there is a short circuit at the position where the connection terminal 9a of FIG.
The binarized signal obtained as a result of the determination by a is input to and stored in the memory circuit 6b.

By sequentially performing such operations, the connection terminal 9a in the X direction
The determination circuit 6a determines whether or not there is a short-circuit at a position where ~ and the connection terminal 7a in the Y direction intersect, and the resulting binarized signal is input to and stored in the memory circuit 6b.

In this case, the position where the Y-direction prober pin 4y comes into contact with the Y-direction connection terminal 7a is sequentially moved from (F) to (F).

After such a determination is completed, the XY table 2 is driven by the first drive unit 3 so that the prober pin 4x in the X direction is located on the initial position in the X direction of the arrow, that is, the position of the connection terminal 9a in the X direction. Thus, the prober pin 4y in the Y direction is moved in the same direction as the pitch L / 5 between the connecting terminals 7a, 7a in the direction of the arrow Y in the figure, that is, the prober pin 4y in the Y direction is located on the position of the connecting terminal 7a in the Y direction.

After that, the base 4 is lowered to the position where the tips of the prober pins 4x and 4y come into contact with the connection terminals 7a and 9a by the driving of the second drive unit 5, and the connection terminal 9a in the X direction and the connection terminal 7a in the Y direction are separated. The presence or absence of a short circuit at the intersecting position is determined by the determination circuit 6a, and the resulting binarized signal is input to and stored in the memory circuit 6b.

Then, by the same operation as described above, the determination circuit 6a determines whether or not there is a short circuit at the position where the connection terminals 9 to 7 in the X direction and the connection terminal 7a in the Y direction intersect, and the resulting binarized signal is the memory circuit. 6b is input and stored.

In this case, the position where the prober pin 4x in the X direction comes into contact with the connection terminals 9a through 9 in the X direction is the position (b), and the position with which the connection terminal 7a in the Y direction comes into contact is (f) through (n). Will be moved to.

Similarly, the presence / absence of a short circuit at the position where the X-direction connection terminal 9a to the Y-direction connection terminal 7a intersect is determined in the same manner, and the presence / absence of a short circuit at all intersection positions is stored in the memory circuit 6b.

In this case, the position where the prober pin 4x in the X direction contacts the connection terminals 9a to 9a in the X direction are (C), (D),
Move in the order of (e).

Then, this result is displayed on the display device 6c.

When it is discovered from the display of the display device 6c that the liquid crystal display device 1 has a short circuit, it is treated as a defective product, or the short circuit portion is repaired by a conventional method.

Therefore, according to the present embodiment, for example, the image area is 25 cm ×
Even in a large image liquid crystal display device with a pixel size of 35 cm and 2 million pixels, the XY table 2 is moved 5 times in the X direction at a predetermined pitch.
It is possible to determine the presence / absence of a short circuit at all crossing positions by moving the Y direction 5 times, that is, 25 times, and it is possible to reduce the measurement time to a practical level.

Further, even when the pixels are miniaturized, the connection terminals 7a, 9a are miniaturized, and the intervals thereof are also miniaturized, the prober pins 4x, 4y are miniaturized, and the intervals are also miniaturized.
Further, if the driving of the XY table 2 is made more precise, the same operation can be performed.

Furthermore, if the number or pitch of the connection terminals 7a, 9a changes, the base 4 can be similarly replaced by replacing the base 4 with one having the prober pins 4x, 4y according to the number or pitch. Very expensive.

In the present embodiment, the prober pins 4x and 4y are made of conductive rubber, or the base 4 and the prober pins 4x and 4y are used.
By inserting an elastic member such as a spring between the prober pins 4x and 4y, and contacting the prober pins 4x and 4y elastically with the connection terminals 7a and 9a, the conduction between the prober pins 4x and 4y and the connection terminals 7a and 9a is ensured. In addition, a more reliable inspection can be performed.

Further, the drive system in this embodiment can use a drive system such as a wire bond machine which has been conventionally used, and does not require special equipment introduction.

Furthermore, according to the present embodiment, the liquid crystal display device as the DUT is a semi-finished product before the liquid crystal is filled, but the present invention is not limited to this, and the same applies after the liquid crystal is injected or after the liquid crystal is sealed. Can be carried out.

Further, according to this embodiment, the connection terminals 9a to
After the determination of the presence or absence of a short circuit at the position where the connection terminal 7a and the connection terminal 7a in the Y direction cross is completed, the first drive unit 3 drives the X unit.
The Y table 2 is provided with a prober pin 4x in the X direction on the initial position in the X direction of the figure, that is, a position of the connection terminal 9 in the X direction.
However, the present invention is not limited to this, and the connecting terminals 9 to Y and the Y in the X direction are not limited to this.
After the determination of the presence / absence of a short circuit at the position where the connection terminal 7a in the direction intersects, the XY table 2 is driven by the first drive unit 3 to move the XY table 2 in the opposite direction of the arrow X in the drawing, that is, the connection terminal 9a in the X direction. , ... Prober pin 4x in the X direction on the position
The detection time can be further shortened by sequentially moving so as to position and determining whether or not there is a short circuit with the connection terminal 7a in the Y direction.

Further, in the above-described embodiment, the presence or absence of a short circuit between the intersecting connection terminals is detected. However, a new blower pin is embedded and fixed at a pitch between the connection terminals so as to be adjacent to the blower pin of the base 4 in this embodiment. By doing
It is possible to detect not only the presence / absence of a short circuit between the intersecting connection terminals but also the presence / absence of a short circuit between the adjacent connection terminals at the same time. In this case, when a short circuit between adjacent connection terminals is detected, it can be repaired by irradiating the short-circuited portion with, for example, a YAG laser.

Further, in the above-described embodiment, an example in which the liquid crystal display device is applied as an electronic component has been described, but any device can be applied as long as it is an inspection of devices arranged in a matrix with a high degree of integration.

[Effects of the Invention] As described above, according to the short-circuit detection device of the present invention, even when the number of electrodes is large, or when the electrodes are miniaturized and the pitch is further miniaturized,
It is possible to automatically and reliably detect a short circuit defect in a short time.

[Brief description of drawings]

1 is a perspective view showing the structure of a short-circuit detection device according to an embodiment of the present invention, FIG. 2 is a perspective view showing a liquid crystal display device shown in FIG. 1, FIG. 3 is a plan view shown in FIG. 2, and FIG. 1 is a perspective view showing the base of FIG. 1, and FIG. 5 is a partially enlarged plan view of a liquid crystal display device for explaining short circuit detection by the device of FIG. 1 ... Liquid crystal display device, 2 ... XY table, 3 ... 1st
Drive unit, 4 ... base, 4x, 4y ... prober pin, 5 ... second drive unit, 6 ... determination unit, 7,7 ... 7,
9, 9 ... 9 ... Lead electrodes, 7a, 7a ... 7a, 9a,
9a ... 9a ... Connection terminal

Claims (4)

[Claims] 1. A first electrode group arranged in a large number in a predetermined pitch in the X direction and a first electrode group arranged in a large number in a Y direction so as to insulate and intersect with the first electrode group. A short circuit detection device for detecting the presence or absence of a short circuit by contacting an electrical contact between the first electrode and the second electrode of an electronic component including two electrodes, which corresponds to the first electrode group. Then, the electrical contacts arranged in the X direction at a pitch that is a multiple of the pitch of the first electrode and is less than or equal to the length of the connection terminal portion of the second electrode, and the second contact. Electrical contacts arranged in the Y direction at a pitch that is a multiple of the pitch of the second electrode group and is less than or equal to the length of the connection terminal portion of the first electrode corresponding to And a contact holding member including the contact holding member and the electronic component in the X and Y directions. Moving means for moving, and a short-circuit detecting means for detecting the presence or absence of a short circuit between each contact arranged along the first electrode group and each contact arranged along the second electrode group. A short circuit detection device characterized by being provided. 2. The relative movement of the contact holding member and the electronic component in the X and Y directions is carried out by sequentially moving the electrode group in the X or Y direction by one pitch for one pitch to determine whether or not there is a short circuit in one direction. The short-circuit detecting device according to claim 1, wherein the detecting means and the presence or absence of a short circuit in the other direction are detected by selectively moving the detecting means in other directions by one pitch after the completion of the means. 3. The contactor is removably provided on the contactor holding member and is replaceable with one that matches the number and pitch of the electrode groups. The short-circuit detection device according to item 1. 4. A short-circuit detection device according to claim 1, further comprising laser irradiation means for irradiating the short-circuited portion of the electronic component with a laser to repair the short-circuited portion based on the output of the short-circuiting detection device. apparatus.