JPH0614262B2 - Liquid crystal display manufacturing method - Google Patents
Liquid crystal display manufacturing methodInfo
- Publication number
- JPH0614262B2 JPH0614262B2 JP59092270A JP9227084A JPH0614262B2 JP H0614262 B2 JPH0614262 B2 JP H0614262B2 JP 59092270 A JP59092270 A JP 59092270A JP 9227084 A JP9227084 A JP 9227084A JP H0614262 B2 JPH0614262 B2 JP H0614262B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- spacer material
- resin
- glass substrate
- filter substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 34
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 125000006850 spacer group Chemical group 0.000 claims description 52
- 239000000463 material Substances 0.000 claims description 48
- 239000000758 substrate Substances 0.000 claims description 43
- 229920005989 resin Polymers 0.000 claims description 23
- 239000011347 resin Substances 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 17
- 239000011521 glass Substances 0.000 claims description 16
- 239000002904 solvent Substances 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000013459 approach Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000010790 dilution Methods 0.000 description 2
- 239000012895 dilution Substances 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 229920006332 epoxy adhesive Polymers 0.000 description 2
- 239000005304 optical glass Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13392—Gaskets; Spacers; Sealing of cells spacers dispersed on the cell substrate, e.g. spherical particles, microfibres
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、アレイガラス基板上にカラーフィルタ基板を
装着する工程において、アレイガラス基板とカラーフィ
ルタ基板のギャップを制御し、液晶感度を均一にするた
めのスペーサ形成法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention controls the gap between the array glass substrate and the color filter substrate in the step of mounting the color filter substrate on the array glass substrate to make the liquid crystal sensitivity uniform. The present invention relates to a spacer forming method.
従来例の構成とその問題点 液晶表示装置は、時計、電卓、ポケットコンピュータ、
テレビ等の表示装置として用いられ、今後の普及が期待
されている。Configuration of conventional example and its problems Liquid crystal display devices include clocks, calculators, pocket computers,
It is used as a display device for televisions and the like, and is expected to spread in the future.
次に、現在開発されている液晶テレビを従来例として説
明する。第1図はその概略断面図を示したものである。Next, a liquid crystal television currently being developed will be described as a conventional example. FIG. 1 shows a schematic sectional view thereof.
アレイガラス基板1の表面には、パターン形成された透
明電極2と、配向剤を用いて配向膜3が形成されてい
る。一方カラーフィルタ基板4は、光学ガラス基板5上
に、モザイク状もしくはストライプ状のフィルタ膜6が
形成されており、さらにその膜上に透明電極2および配
向膜3が形成されている。On the surface of the array glass substrate 1, a patterned transparent electrode 2 and an alignment film 3 using an alignment agent are formed. On the other hand, in the color filter substrate 4, a mosaic or striped filter film 6 is formed on an optical glass substrate 5, and a transparent electrode 2 and an alignment film 3 are further formed on the filter film 6.
現在前記カラーフィルタ基板4のカラーフィルタ膜に相
当するフィルタ材料としては、有機フィルタが多く用い
られており、これは第1図に示すように、アレイガラス
基板とは別に光学ガラス基板上に形成され、液晶材7を
介してアレイガラス基板上に双方の透明電極が対向する
状態でアライメント保持されている。Currently, an organic filter is often used as a filter material corresponding to the color filter film of the color filter substrate 4, which is formed on an optical glass substrate separately from the array glass substrate as shown in FIG. The transparent electrodes are aligned and held on the array glass substrate with the liquid crystal material 7 in between.
この場合、用いる液晶材料に応じて諧調度とコントラス
ト等を等しくするためには対向する電極間の液晶層ギャ
ップを均一にする必要がある。In this case, it is necessary to make the liquid crystal layer gap between the opposing electrodes uniform in order to equalize the gradation and contrast depending on the liquid crystal material used.
液晶層ギャップ8を設ける手段としては、次の第2図に
示す方法がある。a図のごとく一定径(例えば6〜7μ
mφ)で円柱状もしくは球状のスペーサ材9を添加した
例えばエポキシ系接着剤10を用いて、カラーフィルタ
基板の端部とアレイガラス基板の端部のシール部をあら
かじめ溶着固定したのち(b図参照)、液晶材7を注入
するくc図参照)。この場合、フィルタ基板上部より加
圧することで接着剤10は圧せられ、スペーサ材9が液
晶層ギャップ制御材となって、スペーサ材9の径である
6〜7μmφに相当する6〜7μmのギャップが得られ
る。As a means for providing the liquid crystal layer gap 8, there is a method shown in FIG. As shown in Fig. a, a constant diameter (for example, 6 to 7μ)
mφ) with a columnar or spherical spacer material 9 added, for example, an epoxy adhesive 10 is used to weld and fix the end portions of the color filter substrate and the end portion of the array glass substrate by welding (see FIG. b). ), And inject the liquid crystal material 7 (see FIG. C). In this case, the adhesive 10 is pressed by applying pressure from the upper portion of the filter substrate, and the spacer material 9 serves as a liquid crystal layer gap control material, and a gap of 6 to 7 μm corresponding to the diameter of the spacer material 9 of 6 to 7 μm φ. Is obtained.
この方法によれば、大面積の基板であると、接着固定さ
れるのは端部であるためカラーフィルタ基板の中央部に
外部より圧せられた場合には第3図aのごとくアレイガ
ラス基板側の透明電極とカラーフィルタ基板側の透明電
極がショートして誤動作を生じる原因となる。また、こ
のとき表示は第3図bのごとく表示むらとなる。According to this method, in the case of a large-area substrate, the ends are bonded and fixed, so that when it is pressed from the outside to the center of the color filter substrate, as shown in FIG. The transparent electrode on the side and the transparent electrode on the side of the color filter substrate are short-circuited, which causes malfunction. Further, at this time, the display becomes uneven as shown in FIG. 3b.
そこで、第4図に示すように、アレイガラス基板とフィ
ルタ基板を接着する前にアレイガラス基板1もしくはフ
ィルタ基板4上のいずれかに前記スペーサ材9と同径も
しくは小径(例えば5〜6μmφ)のスペーサ材11を
分散塗布したのち(a図参照)、前記同様の工程でアレ
イガラス基板とカラーフィルタ基板を接着固定し(b,
c図参照)、液晶材を注入する方法が行われている(d
図参照)。この場合、液晶層内のスペーサ材11がアレ
イガラス基板もしくはカラーフィルタ基板上に不均一に
存在したり、また液晶材注入時に移動したり、気泡12
が残存するなどの問題があった。Therefore, as shown in FIG. 4, before adhering the array glass substrate and the filter substrate, either the array glass substrate 1 or the filter substrate 4 has the same diameter or a small diameter (for example, 5 to 6 μmφ) as the spacer material 9. After the spacer material 11 is dispersed and applied (see FIG. A), the array glass substrate and the color filter substrate are bonded and fixed in the same process as described above (b,
(See FIG. c), a method of injecting a liquid crystal material is used (d)
See figure). In this case, the spacer material 11 in the liquid crystal layer is non-uniformly present on the array glass substrate or the color filter substrate, or moves when the liquid crystal material is injected, and bubbles 12
There was a problem such as remaining.
発明の目的 本発明はこれら問題点を解決すべく発明されたもので、
特に大型液晶表示装置に関して固定スペーサを設けるこ
とで、均一で安定した液晶ギャップを得、スペーサ材に
よるムラや対向する電極間のショートを防ぐことができ
るとともに、液晶の配向性を損なわずかつ液晶注入時の
気泡残存を防ぐことを目的とする。OBJECT OF THE INVENTION The present invention has been invented to solve these problems,
Especially for large liquid crystal display devices, by providing fixed spacers, a uniform and stable liquid crystal gap can be obtained, unevenness due to the spacer material and short circuit between opposing electrodes can be prevented, and liquid crystal orientation is not impaired and liquid crystal injection is performed. The purpose is to prevent remaining bubbles.
発明の構成 本発明は、アレイガラス基板と、液晶層と、モザイク状
もしくはストライプ状のカラーフィルタ基板を有する液
晶表示装置を製造するに際し、前記アレイガラス基板上
もしくはフィルタ基板上に、あらかじめスペーサ材を添
加し、溶剤で希釈された紫外線硬化型樹脂を塗布し、ホ
トマスクを介して紫外線を照射する工程と、前記樹脂の
紫外線未照射部分を取り除くことにより、所定位置に液
晶層ギャップを制御するためのスペーサ材をストライプ
状に残存させるとともに前記スペーサ材よりも薄く、側
部に近づくにつれて厚くなる前記樹脂の膜を形成する工
程と、前記樹脂上に配向膜を形成する工程とを備えたこ
とを特徴とする液晶表示装置の製造方法。Structure of the Invention The present invention, when manufacturing a liquid crystal display device having an array glass substrate, a liquid crystal layer, and a mosaic or stripe color filter substrate, on the array glass substrate or the filter substrate, a spacer material in advance. Addition, applying a UV-curable resin diluted with a solvent, irradiating UV through a photomask, and removing the UV-unirradiated portion of the resin to control the liquid crystal layer gap at a predetermined position. A step of forming a film of the resin that is thinner than the spacer material and becomes thicker toward a side portion while leaving the spacer material in a stripe shape; and a step of forming an alignment film on the resin. A method for manufacturing a liquid crystal display device.
実施例の説明 フィルタ基板に設けたスペーサ形成についての本発明の
一実施例を第5図で説明する。Description of Embodiments An embodiment of the present invention for forming spacers provided on a filter substrate will be described with reference to FIG.
カラーフィルタ4上にシール部に用いるスペーサ材より
小径(例えば5〜6μmφ)のスペーサ材11をあらか
じめ添加し、希釈した紫外線硬化型樹脂13を塗布する
(a図参照)。前記希釈は硬化後の樹脂がスペーサ材よ
りも薄く、残存樹脂量がスペーサ材の下方周辺を埋め、
かつスペーサ材の側部に近づくにつれて厚くなるように
行うもので、これは例えば希釈程度を調整しフォトソリ
工程のプリベークによって前記希釈樹脂の溶剤を蒸発さ
せることで、実現できる。ホトマスク14を介して光と
して例えば紫外線15を照射する(b図参照)。次に現
像によって紫外線未照射部分を除去することにより紫外
線照射部分がスペーサとして残存する(c図参照)。露
光現像工程は所定位置にスペーサを形成するために施す
ものである。第5図cのA部拡大図を第5図dに示す。
このようにいて溶剤によって希釈された樹脂13はスペ
ーサ材固着膜としてスペーサ材11の側部に沿って形成
されるとともに、樹脂13はスペーサ材11の下方を確
実に埋め、かつスペーサ材11の側部に近づくにつれて
厚くなる形状に形成される。しかるのち、第5図dに示
されるような樹脂13上に配向膜3が形成される。この
ため、配向膜はスペーサ材を除く基板上全面に形成でき
る。On the color filter 4, a spacer material 11 having a smaller diameter (for example, 5 to 6 μmφ) than the spacer material used for the seal portion is added in advance, and the diluted ultraviolet curable resin 13 is applied (see FIG. A). In the dilution, the resin after curing is thinner than the spacer material, and the residual resin amount fills the lower periphery of the spacer material,
In addition, the thickness of the spacer material is increased as it approaches the sides of the spacer material. This can be realized by adjusting the degree of dilution and evaporating the solvent of the diluent resin by prebaking in the photo-slurry process. For example, ultraviolet rays 15 are emitted as light through the photomask 14 (see FIG. B). Next, the portions not irradiated with ultraviolet rays are removed by development, and the portions irradiated with ultraviolet rays remain as spacers (see FIG. C). The exposure and development process is performed to form a spacer at a predetermined position. An enlarged view of part A of FIG. 5c is shown in FIG. 5d.
The resin 13 thus diluted with the solvent is formed along the side portion of the spacer material 11 as a spacer material fixing film, and the resin 13 surely fills the lower portion of the spacer material 11 and the spacer material 11 side. It is formed in a shape that becomes thicker as it approaches the portion. Then, the alignment film 3 is formed on the resin 13 as shown in FIG. 5d. Therefore, the alignment film can be formed on the entire surface of the substrate except the spacer material.
そして、カラーフィルタ基板4上のスペーサは、カラー
フィルタのパターンにかかわらず、ストライプ状に形成
する。このようにストライプ状のスペーサ形成と残存樹
脂の上記形状のため、液晶材の注入が容易できるととも
に、気泡が除去されやすくこの残存を少なくすることが
できる。The spacers on the color filter substrate 4 are formed in stripes regardless of the color filter pattern. Due to the formation of the stripe-shaped spacers and the above-described shape of the residual resin, the liquid crystal material can be easily injected, and the bubbles can be easily removed, and the residual can be reduced.
このようにして所定位置にスペーサを形成したカラーフ
ィルタ基板4を用いて、前記従来例で記したようにスペ
ーサ材9を添加したエポキシ系接着剤10を用いてフィ
ルタ基板端部とアレイガラス基板端部を接着シールす
る。その後液晶材7の注入を行い液晶表示装置が完成す
る。(第6図参照) 発明の効果 本発明は大面積の基板において生じていたアレイガラス
基板側の透明電極とフィルタ基板側の透明電極のショー
トによる誤動作や、ギャップむらによる表示むら、また
液晶層内のスペーサ材分散の不均一性、さらには液晶材
注入時のスペーサ材移動による表示不良を防ぐことがで
きるなど従来の問題点を解決する上、さらにスペーサ形
成において任意径のスペーサ材と希釈した紫外線硬化型
樹脂を用いることにより所定位置に所定厚のスペーサを
設けることができる。また、所定厚の液晶層ギャップを
得るためには前記スペーサ材の径を選択することで所定
厚のスペーサを形成することが容易にできる。さらに本
発明は、希釈樹脂塗布を用いているため、残存樹脂厚を
薄くできるとともに樹脂の膜厚制御が容易で、少量の紫
外線硬化型樹脂はスペーサ材固着剤としてスペーサ材側
部に沿ってスペーサ材の下方に確実に充填され、かつス
ペーサ材の側部に近づくにつれ厚い形状とできる。この
ような樹脂形状およびストライプ状にスペーサ材を残存
させていることから、良好な液晶注入が可能でかつ液晶
注入における気泡が残らず、高性能な液晶表示装置の実
現が可能となる。Using the color filter substrate 4 thus formed with spacers at predetermined positions, using the epoxy adhesive 10 with the spacer material 9 added as described in the conventional example, the filter substrate end and the array glass substrate end are used. The part is adhesively sealed. Then, the liquid crystal material 7 is injected to complete the liquid crystal display device. (See FIG. 6) Effect of the Invention The present invention is erroneous due to a short circuit between the transparent electrode on the side of the array glass substrate and the transparent electrode on the side of the filter substrate, which has occurred in a large-area substrate, display unevenness due to uneven gap, In addition to solving the conventional problems such as non-uniformity of spacer material dispersion and prevention of display defects due to movement of spacer material when injecting liquid crystal material, further, the spacer material of arbitrary diameter and diluted ultraviolet light are used in forming the spacer. A spacer having a predetermined thickness can be provided at a predetermined position by using a curable resin. Further, in order to obtain the liquid crystal layer gap having a predetermined thickness, the spacer having a predetermined thickness can be easily formed by selecting the diameter of the spacer material. Further, since the present invention uses the dilute resin coating, the residual resin thickness can be made thin and the resin film thickness can be easily controlled. A small amount of the ultraviolet curable resin is used as a spacer material fixing agent along the spacer material side portions along the spacer material. It can be reliably filled below the material and can be thicker as it approaches the sides of the spacer material. Since the spacer material is left in such a resin shape and stripe shape, good liquid crystal injection is possible, and no bubbles remain in the liquid crystal injection, so that a high-performance liquid crystal display device can be realized.
第1図は従来の液晶表示装置の概略断面図、第2図a〜
cは従来法によるシール部のみのスペーサ形成法を示す
工程断面図、第3図a、bはその問題点の一例を示す断
面図、平面図、第4図a〜dはスペーサ材分散法と従来
のシール部スペーサ形成法を用いた方法の工程断面図、
第5図a〜dは本発明の一実施例による固定スペーサの
形成工程断面図、第6図は本発明の方法でスペーサを形
成したカラーフィルタを用いて装着した液晶表示装置の
概略断面図である。 3……配向膜、4……フィルタ基板 11……スペーサ材、13……紫外線硬化型樹脂 14……ホトマスク、15……紫外線FIG. 1 is a schematic sectional view of a conventional liquid crystal display device, and FIGS.
c is a process sectional view showing a spacer forming method only for a seal portion by a conventional method, FIGS. 3A and 3B are sectional views showing an example of the problem, a plan view, and FIGS. 4A to 4D are spacer material dispersion methods. Process sectional views of a method using a conventional seal portion spacer forming method,
5A to 5D are sectional views showing a process of forming a fixed spacer according to an embodiment of the present invention, and FIG. 6 is a schematic sectional view of a liquid crystal display device mounted by using a color filter having a spacer formed by the method of the present invention. is there. 3 ... Alignment film, 4 ... Filter substrate 11 ... Spacer material, 13 ... UV curable resin 14 ... Photomask, 15 ... UV ray
Claims (1)
状もしくはストライプ状のカラーフィルタ基板を有する
液晶表示装置を製造するに際し、前記アレイガラス基板
上もしくはフィルタ基板上に、あらかじめスペーサ材を
添加し、溶剤で希釈された紫外線硬化型樹脂を塗布し、
ホトマスクを介して紫外線を照射する工程と、前記樹脂
の紫外線未照射部分を取り除くことにより、所定位置に
液晶層ギャップを制御するためのスペーサ材をストライ
プ状に残存させるとともに、前記スペーサ材の側部に前
記スペーサ材よりも薄く、前記側部に近づくにつれて厚
くなる前記樹脂の膜を形成する工程と、前記樹脂上に配
向膜を形成する工程とを備えたことを特徴とする液晶表
示装置の製造方法。1. When manufacturing a liquid crystal display device having an array glass substrate, a liquid crystal layer, and a mosaic or striped color filter substrate, a spacer material is added in advance on the array glass substrate or the filter substrate. , Apply UV curable resin diluted with solvent,
The step of irradiating ultraviolet rays through a photomask and the removal of the portion of the resin not irradiated with ultraviolet rays leave the spacer material for controlling the liquid crystal layer gap in a stripe shape at a predetermined position, and the side portions of the spacer material. And a step of forming a film of the resin that is thinner than the spacer material and becomes thicker toward the side portion, and a step of forming an alignment film on the resin. Method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59092270A JPH0614262B2 (en) | 1984-05-08 | 1984-05-08 | Liquid crystal display manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59092270A JPH0614262B2 (en) | 1984-05-08 | 1984-05-08 | Liquid crystal display manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60235119A JPS60235119A (en) | 1985-11-21 |
| JPH0614262B2 true JPH0614262B2 (en) | 1994-02-23 |
Family
ID=14049697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59092270A Expired - Lifetime JPH0614262B2 (en) | 1984-05-08 | 1984-05-08 | Liquid crystal display manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0614262B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61160722A (en) * | 1985-01-09 | 1986-07-21 | Semiconductor Energy Lab Co Ltd | Manufacture of liquid crystal display device |
| JPH07117665B2 (en) * | 1986-01-22 | 1995-12-18 | キヤノン株式会社 | Chiral smectic liquid crystal element |
| JPS62158428U (en) * | 1986-03-31 | 1987-10-08 | ||
| JPS6341827A (en) * | 1986-08-07 | 1988-02-23 | Stanley Electric Co Ltd | liquid crystal display element |
| JPH0833544B2 (en) * | 1986-09-12 | 1996-03-29 | キヤノン株式会社 | Liquid crystal element |
| JPH0792571B2 (en) * | 1987-04-22 | 1995-10-09 | シャープ株式会社 | Liquid crystal display cell structure |
| JPH08201819A (en) * | 1995-01-30 | 1996-08-09 | Nec Corp | Liquid crystal panel |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5050054A (en) * | 1973-09-03 | 1975-05-06 | ||
| JPS59222817A (en) * | 1983-06-02 | 1984-12-14 | Asahi Glass Co Ltd | Liquid crystal display device |
-
1984
- 1984-05-08 JP JP59092270A patent/JPH0614262B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60235119A (en) | 1985-11-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |