JPH0614495B2 - Method for manufacturing laminated electronic component - Google Patents
Method for manufacturing laminated electronic componentInfo
- Publication number
- JPH0614495B2 JPH0614495B2 JP2119353A JP11935390A JPH0614495B2 JP H0614495 B2 JPH0614495 B2 JP H0614495B2 JP 2119353 A JP2119353 A JP 2119353A JP 11935390 A JP11935390 A JP 11935390A JP H0614495 B2 JPH0614495 B2 JP H0614495B2
- Authority
- JP
- Japan
- Prior art keywords
- laminated
- conductor
- paste
- electronic component
- firing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Ceramic Capacitors (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
- Coils Or Transformers For Communication (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、積層インダクタや積層複合部品のような積層
電子部品の製造方法に係るもので、特に外部接続用の端
子電極の形成方法に関するものである。Description: TECHNICAL FIELD The present invention relates to a method for manufacturing a laminated electronic component such as a laminated inductor or a laminated composite component, and more particularly to a method for forming a terminal electrode for external connection. Is.
電子部品の小型化、薄形化等の要求に伴い、積層コンデ
ンサに続いて、積層インダクタやそれらの複合部品が実
用化されつつある。このような積層電子部品は、内部に
導体パターンが形成された誘電体や磁性体セラミックの
積層体を印刷やシート法によって形成したものである。Along with demands for miniaturization and thinning of electronic components, multilayer inductors and composite components thereof are being put to practical use after multilayer capacitors. Such a laminated electronic component is one in which a laminated body of a dielectric or magnetic ceramic having a conductor pattern formed therein is formed by printing or a sheet method.
内部の導体パターンは積層体の端面に引き出され、その
端面に外部回路と接続するための端子電極が形成され
る。端子電極の形成は、同時に多数の素子を形成するグ
リーンシート等の積層−分割−焼成の後に、銀等の導体
を塗布して焼付による方法が採られている。The internal conductor pattern is drawn out to the end face of the laminate, and a terminal electrode for connecting to an external circuit is formed on the end face. The terminal electrode is formed by stacking, dividing, and firing green sheets or the like that form a large number of elements at the same time, and then applying a conductor such as silver and baking.
しかし、素子に分割してから焼成するので、焼成時に内
部の導体が蒸発し易く、特に導体パターンの幅の狭い積
層インダクタにおいては、抵抗の増加によるQの低下、
甚だしい場合には断線等を引き起こす。However, since firing is performed after the element is divided, the internal conductor is likely to evaporate during firing, and particularly in a laminated inductor having a narrow conductor pattern width, Q decreases due to an increase in resistance.
In severe cases, it may cause wire breakage.
また、端子電極用のペーストにはガラスフリットを混入
させて焼付を行うが、ガラスフリットと積層体との反応
が十分でないと電極の強度が十分に得られない。また、
ガラス層が端子電極の表面に形成されてしまうこともあ
る。Further, glass frit is mixed in the paste for the terminal electrode and baking is performed, but if the reaction between the glass frit and the laminated body is not sufficient, the strength of the electrode cannot be sufficiently obtained. Also,
The glass layer may be formed on the surface of the terminal electrode.
本発明は、このような課題を解決して、少ない工数で、
導体材料の蒸発を防止し、十分な強度の端子電極を形成
しようとするものである。The present invention solves such a problem, and with a small man-hour,
It is intended to prevent evaporation of the conductor material and form a terminal electrode having sufficient strength.
本発明は、セラミック絶縁体内に含まれたガラスを、焼
成時に端子電極の形成に利用することによって、上記の
課題を解決するものである。The present invention solves the above problem by utilizing glass contained in a ceramic insulator for forming a terminal electrode during firing.
すなわち、ガラスを含む絶縁体セラミックペーストと導
体ペーストを印刷により積層して、絶縁体内に導体パタ
ーンが形成され、その導体パターンの端部が積層体の端
面に引き出され、その端面に外部接続用の端子電極が形
成される積層電子部品の製造方法において、ペーストを
印刷して積層した後に素子に分割し、それらの素子をバ
レル研磨した後、それぞれの素子の端面に導体ペースト
を塗布し、積層体の焼成と端子電極の焼付を同時に行う
ことに特徴を有するものである。That is, an insulating ceramic paste containing glass and a conductive paste are laminated by printing to form a conductor pattern in the insulator, and the end portion of the conductor pattern is pulled out to the end face of the laminate, and the end face is used for external connection. In a method of manufacturing a laminated electronic component in which terminal electrodes are formed, paste is printed and laminated, then divided into elements, and after barrel polishing these elements, a conductor paste is applied to the end faces of each element to form a laminated body. This is characterized in that the firing of 1) and the firing of the terminal electrode are performed simultaneously.
また、ガラスを含む絶縁体セラミックグリーンシート上
に導体ペーストを印刷し、そのシートを積層して、絶縁
体内に導体パターンが形成され、その導体パターンの端
部が積層体の端面に引き出され、その端面に外部接続用
の端子電極が形成される積層電子部品の製造方法におい
て、シートを積層した後に素子に分割し、それらの素子
をバレル研磨した後、それぞれの素子の端面に導体ペー
ストを塗布し、積層体の焼成と端子電極の焼付を同時に
行うことに特徴を有するものである。Further, a conductor paste is printed on an insulator ceramic green sheet containing glass, the sheets are laminated, a conductor pattern is formed in the insulator, and the end portion of the conductor pattern is drawn out to the end face of the laminate body. In a method for manufacturing a laminated electronic component in which terminal electrodes for external connection are formed on end faces, sheets are laminated and then divided into elements, and after barrel polishing these elements, a conductor paste is applied to the end surfaces of each element. It is characterized in that the laminated body and the terminal electrodes are simultaneously fired.
低温焼成などの目的のために絶縁体セラミックペースト
や絶縁体セラミックグリーンシートに添加されたホウケ
イ酸ガラス等のガラスが、従来のガラスフリットと同じ
役割を果たす。焼成時に内部から端面に施した銀等の電
極材料内に拡散され、積層体本体と端子電極を強固に接
着させる。Glass such as borosilicate glass added to an insulating ceramic paste or an insulating ceramic green sheet for the purpose of low temperature firing plays the same role as a conventional glass frit. During firing, it is diffused from the inside into the electrode material such as silver applied to the end faces, and firmly adheres the laminated body and the terminal electrode.
バレル研磨することによって電極を形成する端面に丸み
が形成され、焼成時の収縮等による応力の集中も緩和で
きる。The barrel polishing forms a roundness on the end face forming the electrode, and the concentration of stress due to shrinkage during firing can be alleviated.
以下、本発明の実施例について説明する。 Examples of the present invention will be described below.
フェライト等の磁性体ペーストと銀を主成分とする導体
ペーストを印刷積層して積層インダクタを形成する例で
説明する。An example of forming a laminated inductor by printing and laminating a magnetic paste such as ferrite and a conductor paste containing silver as a main component will be described.
マイラーフィルム等の基材上にホウケイ酸ガラスを添加
した磁性体ペーストを印刷して所定の厚さとし、その上
に導体ペーストを約半ターン分印刷する。一枚の磁性体
ウェーハ上に多数の同じパターンが同時に形成される。
次に磁性体ペーストが導体パターンの端部を残して他の
導体パターンを覆うように形成される。A magnetic paste containing borosilicate glass is printed on a base material such as mylar film to have a predetermined thickness, and a conductive paste is printed thereon for about half a turn. A large number of the same patterns are simultaneously formed on one magnetic wafer.
Next, a magnetic paste is formed so as to cover the other conductor patterns while leaving the ends of the conductor patterns.
次の約半ターン分の導体パターンが端部を接続されて形
成される。A conductor pattern for the next about half a turn is formed with the ends connected.
この工程を繰り返して、所定のターン数の導体パターン
が形成され、最後に磁性体ペーストが所定の厚さに形成
される。これによって、磁性体内に周回するコイルパタ
ーンが形成されたことになる。By repeating this process, the conductor pattern having a predetermined number of turns is formed, and finally the magnetic paste is formed to have a predetermined thickness. As a result, a coil pattern that circulates inside the magnetic body is formed.
周回する導体パターンの両端は、素子に分割されたとき
に、その端面に露出するように形成しておく。すなわ
ち、最初の導体パターンと最後の導体パターンはスクラ
イブラインまで伸びるように形成されている。なお、中
間タップ等が必要な場合は、その部分も端面に引き出し
て形成しておく必要がある。Both ends of the conductor pattern that circulates are formed so as to be exposed at the end faces when divided into elements. That is, the first conductor pattern and the last conductor pattern are formed so as to extend to the scribe line. If an intermediate tap or the like is required, that portion also needs to be drawn out to the end face.
素子に分割した後に、バレル研磨によって未焼成体を研
磨し、整形する。その後、導体パターンの端部の露出し
た端面に、銀を主成分とする導体ペーストを塗布する。
導体ペーストはその端面とその端面に隣接する面に一部
が掛かるように形成しておくと良い。After dividing into the elements, the unfired body is polished and shaped by barrel polishing. Then, a conductor paste containing silver as a main component is applied to the exposed end surface of the conductor pattern.
It is advisable to form the conductor paste so that a part thereof is applied to the end face and the face adjacent to the end face.
その後、焼成炉で素子を焼成する。ホウケイ酸ガラス等
のガラスを含む磁性体セラミックであるので、比較的低
温で焼成することができる。900℃程度で数時間焼成し
て、焼結体が得られる。この焼成時に、端面に塗布した
銀等の導体の焼付も同時に行われる。上記の温度であれ
ば、銀等の焼付には十分な温度である。Then, the element is fired in a firing furnace. Since it is a magnetic ceramic containing glass such as borosilicate glass, it can be fired at a relatively low temperature. A sintered body is obtained by firing at 900 ° C. for several hours. During this firing, the conductor such as silver applied to the end face is also baked at the same time. The above temperature is a sufficient temperature for baking silver or the like.
このようにして焼付された端子電極は、積層体内から導
体内に拡散されたガラスによって、強固に積層体と接続
されていることが確認された。しかも、焼成時間が余り
長くならなければ、ガラスが端子電極表面に析出するこ
ともなかった。It was confirmed that the terminal electrode baked in this manner was firmly connected to the laminated body by the glass diffused from the laminated body into the conductor. Moreover, glass did not deposit on the surface of the terminal electrode unless the firing time was too long.
この銀の電極の表面に、必要に応じて銅、ニッケル、錫
等の金属をめっきすることができる。端子電極の表面が
金属層であるので、電極材料を容易にめっきすることが
できる。The surface of this silver electrode can be plated with a metal such as copper, nickel or tin, if necessary. Since the surface of the terminal electrode is the metal layer, the electrode material can be easily plated.
上記の例は、磁性体と導体のペーストを交互に印刷する
例であるが、磁性体シートを積層するものであってもよ
い。その場合、磁性体のセラミックグリーンシートは、
ホウケイ酸ガラス等のガラスを添加したフェライトのス
ラリーをドクターブレード法等によって形成する。The above example is an example in which the paste of the magnetic material and the paste of the conductor are alternately printed, but the magnetic material sheets may be laminated. In that case, the magnetic ceramic green sheet
A slurry of ferrite to which glass such as borosilicate glass is added is formed by a doctor blade method or the like.
シートの表面に約半ターンずつの導体パターンを印刷し
て形成する。その端部は、シートに形成したスルーホー
ルによって接続する。前記の例と同じように、両端と必
要に応じてタップ端子とをスクライブラインまで引き出
して形成し、素子分割時に端面に露出するようにしてお
く。It is formed by printing a conductor pattern for each half turn on the surface of the sheet. The ends are connected by through holes formed in the sheet. Similar to the above example, both ends and, if necessary, tap terminals are formed to extend to the scribe line so as to be exposed on the end faces when the elements are divided.
素子の分割の後の工程は前記の例と全く同じである。The steps after the division of the element are exactly the same as the above example.
また、積層インダクタに限らず、積層コンデンサやその
両方を含む積層LC複合部品等においても利用できる。
また、多層回路基板等のスルーホールの電極形成ならび
に端子電極形成にも有効である。Further, the present invention can be applied not only to the laminated inductor but also to a laminated capacitor or a laminated LC composite component including both of them.
It is also effective for forming electrodes of through holes and terminal electrodes of a multilayer circuit board or the like.
〔効果〕 本発明によれば、端子電極の工程を積層体の焼成と同時
に行うことができるので、工数の大幅な低減が可能とな
る。[Effect] According to the present invention, since the step of forming the terminal electrode can be performed simultaneously with the firing of the laminated body, the number of steps can be significantly reduced.
また、導体パターンの端部の露出する端面を導体で覆っ
て焼成するので、内部導体の焼成時の蒸発を防止するこ
とができる。これは、細い導体パターンから成る積層イ
ンダクタなどでは特に有利な点である。Further, since the exposed end surface of the end portion of the conductor pattern is covered with the conductor and fired, it is possible to prevent evaporation of the inner conductor during firing. This is a particularly advantageous point in a laminated inductor or the like having a thin conductor pattern.
さらに、端子電極の強度が大幅に向上することが確認さ
れた。密着性が改善されるだけでなく、めっきが可能と
なることとも相まって、半田食われ等が防止できる利点
もある。Furthermore, it was confirmed that the strength of the terminal electrode was significantly improved. Not only is the adhesion improved, but plating is also possible, which has the advantage of preventing solder erosion.
その上、積層インダクタでは従来蒸発の防止のために引
き出し部を広く形成していたが、本発明によれば内部の
パターンと同じ幅でよい。したがって、導体パターン間
に生じていた浮遊容量を大幅に減少させることができ
る。Moreover, in the laminated inductor, the lead-out portion is conventionally formed wide to prevent evaporation, but according to the present invention, it may have the same width as the internal pattern. Therefore, the stray capacitance generated between the conductor patterns can be significantly reduced.
Claims (3)
導体ペーストを印刷により積層して、絶縁体内に導体パ
ターンが形成され、その導体パターンの端部が積層体の
端面に引き出され、その端面に外部接続用の端子電極が
形成される積層電子部品の製造方法において、ペースト
を印刷して積層した後に素子に分割し、それらの素子を
バレル研磨した後、それぞれの素子の端面に導体ペース
トを塗布し、積層体の焼成と端子電極の焼付を同時に行
うことを特徴とする積層電子部品の製造方法。1. An insulating ceramic paste containing glass and a conductive paste are laminated by printing to form a conductive pattern in the insulating body, the end portion of the conductive pattern is drawn out to the end face of the laminated body, and the end face is externally exposed. In a method for manufacturing a laminated electronic component in which terminal electrodes for connection are formed, paste is printed and laminated, then divided into elements, and after barrel polishing these elements, a conductor paste is applied to the end faces of each element. A method for manufacturing a laminated electronic component, comprising simultaneously firing a laminate and a terminal electrode.
ート上に導体ペーストを印刷し、そのシートを積層し
て、絶縁体内に導体パターンが形成され、その導体パタ
ーンの端部が積層体の端面に引き出され、その端面に外
部接続用の端子電極が形成される積層電子部品の製造方
法において、シートを積層した後に素子に分割し、それ
らの素子をバレル研磨した後、それぞれの素子の端面に
導体ペーストを塗布し、積層体の焼成と端子電極の焼付
を同時に行うことを特徴とする積層電子部品の製造方
法。2. A conductor paste is printed on an insulating ceramic green sheet containing glass, the sheets are laminated to form a conductor pattern in the insulator, and an end portion of the conductor pattern is drawn out to an end face of the laminate. In the method of manufacturing a laminated electronic component in which terminal electrodes for external connection are formed on the end faces of the laminated electronic components, the sheets are laminated and then divided into elements, and the elements are barrel-polished. Is applied, and the firing of the laminated body and the firing of the terminal electrode are performed at the same time.
ペーストが銀を主成分とするものであり、端子電極を形
成する導体ペーストがガラスを含まない銀を主成分とす
る請求項第1項または第2項記載の積層電子部品の製造
方法。3. The conductor paste forming a conductor pattern inside the laminate is mainly composed of silver, and the conductor paste forming the terminal electrode is mainly composed of silver not containing glass. Alternatively, the method for manufacturing a laminated electronic component according to the second aspect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2119353A JPH0614495B2 (en) | 1990-05-09 | 1990-05-09 | Method for manufacturing laminated electronic component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2119353A JPH0614495B2 (en) | 1990-05-09 | 1990-05-09 | Method for manufacturing laminated electronic component |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0415906A JPH0415906A (en) | 1992-01-21 |
| JPH0614495B2 true JPH0614495B2 (en) | 1994-02-23 |
Family
ID=14759394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2119353A Expired - Lifetime JPH0614495B2 (en) | 1990-05-09 | 1990-05-09 | Method for manufacturing laminated electronic component |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0614495B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR970008754B1 (en) * | 1994-12-23 | 1997-05-28 | Korea Inst Sci & Tech | Multilayer ceramic capacitor and production thereof |
| CN102012086A (en) * | 2010-05-21 | 2011-04-13 | 李耀强 | Water evaporator |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54140959A (en) * | 1978-04-25 | 1979-11-01 | Nippon Electric Co | Method of producing laminated ceramic capacitor |
| JPS5678114A (en) * | 1979-11-29 | 1981-06-26 | Fujitsu Ltd | Method of manufacturing laminated ceramic chip condenser |
| JPS5917232A (en) * | 1982-07-20 | 1984-01-28 | 日本電気株式会社 | Composite laminated ceramic part and method of producing same |
| JPS5992512A (en) * | 1982-11-18 | 1984-05-28 | 松下電器産業株式会社 | Manufacturing method of multilayer ceramic capacitor |
| JPS6417417A (en) * | 1987-07-10 | 1989-01-20 | Murata Manufacturing Co | Laminated capacitor |
| JPS6480007A (en) * | 1987-09-19 | 1989-03-24 | Taiyo Yuden Kk | Electrode paste for ceramic capacitor |
| JPH01175218A (en) * | 1987-12-28 | 1989-07-11 | Murata Mfg Co Ltd | Manufacture of ceramic electronic component |
-
1990
- 1990-05-09 JP JP2119353A patent/JPH0614495B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0415906A (en) | 1992-01-21 |
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