JPH0614501B2 - Porcelain capacitor and method of manufacturing the same - Google Patents
Porcelain capacitor and method of manufacturing the sameInfo
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- JPH0614501B2 JPH0614501B2 JP2163922A JP16392290A JPH0614501B2 JP H0614501 B2 JPH0614501 B2 JP H0614501B2 JP 2163922 A JP2163922 A JP 2163922A JP 16392290 A JP16392290 A JP 16392290A JP H0614501 B2 JPH0614501 B2 JP H0614501B2
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Description
【発明の詳細な説明】 [産業上の利用分野] 本発明は、誘電体磁器層を少なくとも2以上の内部電極
で挟持してなる単層または積層構造の磁器コンデンサ及
びその製造方法に関するものである。Description: TECHNICAL FIELD The present invention relates to a single-layer or multilayer-structured ceramic capacitor in which a dielectric ceramic layer is sandwiched by at least two or more internal electrodes, and a method for manufacturing the same. .
[従来の技術] 積層磁器コンデンサは、誘電体磁器原料粉末からなる未
焼結磁器シート(グリーンシート)に導電性ペーストを
所望パターンで印刷し、これを複数枚積み重ねて圧着
し、酸化性雰囲気中において1300℃〜1600℃で
焼成させて製造されている。[Prior Art] A laminated ceramic capacitor is manufactured by printing a conductive paste in a desired pattern on an unsintered porcelain sheet (green sheet) made of dielectric ceramic raw material powder, stacking a plurality of the pastes and press-bonding them in an oxidizing atmosphere. Is manufactured by firing at 1300 ° C to 1600 ° C.
この焼成により、前記未焼結磁器シートは誘電体磁器層
となり、前記導電性ペーストは内部電極となる。By this firing, the green ceramic sheet becomes a dielectric ceramic layer, and the conductive paste becomes an internal electrode.
ところで、従来、前記導電性ペーストとしては白金また
はパラジウム等の貴金属を主成分とするものが使用され
ていた。By the way, conventionally, as the conductive paste, a paste containing a noble metal such as platinum or palladium as a main component has been used.
これは、導電性ペーストとして白金またはパラジウム等
の貴金属を主成分とするものを使用すれば、酸化性雰囲
気中において1300℃〜1600℃という高温で焼成
させても、導電性ペーストを酸化させることなく、所望
の内部電極に変性させることができるからである。This is because if a conductive paste containing a noble metal such as platinum or palladium as a main component is used, the conductive paste is not oxidized even if it is fired at a high temperature of 1300 ° C. to 1600 ° C. in an oxidizing atmosphere. This is because the desired internal electrode can be modified.
しかし、白金やパラジウム等の貴金属は高価であるた
め、必然的に積層磁器コンデンサがコスト高になるとい
う問題があった。However, since precious metals such as platinum and palladium are expensive, the laminated ceramic capacitor inevitably has a problem of high cost.
この問題を解決することができるものとして、本件出願
人に係わる特公昭60−20851号公報には、{(BaXC
aySrzO}K(TinZr1-n)O2からなる基本成分と、Li2Oと
SiO2とMO(但し、MOはBaO,CaO及びSr
Oから選択された1種または2種以上の酸化物)からな
る添加成分とを含む誘電体磁器組成物が開示されてい
る。As a solution to this problem, Japanese Patent Publication No. 60-20851 relating to the applicant of the present invention describes {(Ba X C
a y Sr z O} K (Ti n Zr 1-n ) O 2 as a basic component and Li 2 O, SiO 2 and MO (where MO is BaO, CaO and Sr).
Disclosed is a dielectric ceramic composition containing an additive component composed of one or more oxides selected from O).
また、特開昭61−147404号公報には、{(Ba
1-x-yCaxSry)O}K(Ti1-zZrz)O2からなる基本成分と、B
2O3とSiO2とLi2Oからなる添加成分とを含む
誘電体磁器組成物が開示されている。In addition, in Japanese Patent Laid-Open No. 61-147404, {(Ba
1-xy Ca x Sr y ) O} K (Ti 1-z Zr z ) O 2 and B
A dielectric ceramic composition containing 2 O 3 , SiO 2, and an additive component composed of Li 2 O is disclosed.
また、特開昭61−147405号公報には、{(Ba
1-x-yCaxSry)O}K(Ti1-zZrz)O2からなる基本成分と、B
2O3とSiO2からなる添加成分とを含む誘電体磁器
組成物が開示されている。In addition, in Japanese Patent Laid-Open No. 61-147405, {(Ba
1-xy Ca x Sr y ) O} K (Ti 1-z Zr z ) O 2 and B
A dielectric ceramic composition containing 2 O 3 and an additive component made of SiO 2 is disclosed.
また、特開昭61−147406号公報には、{(Ba
1-x-yCaxSry)O}K(Ti1-zZrz)O2からなる基本成分と、B
2O3とSiO2とMO(但し、MOはBaO,CaO
及びSrOから選択された1種または2種以上の酸化
物)からなる添加成分とを含む誘電体磁器組成物が開示
されている。In addition, in Japanese Patent Laid-Open No. 61-147406, {(Ba
1-xy Ca x Sr y ) O} K (Ti 1-z Zr z ) O 2 and B
2 O 3 , SiO 2, and MO (where MO is BaO, CaO
And an additive component composed of one or more kinds of oxides selected from SrO) are disclosed.
これらの公報に開示されている誘電体磁器組成物は、還
元性雰囲気中における1200℃以下の比較的低い温度
の焼成で得ることができるものであるが、その比誘電率
εは5000以上、抵抗率ρは1×106MΩ・cm以
上である。The dielectric ceramic compositions disclosed in these publications can be obtained by firing at a relatively low temperature of 1200 ° C. or lower in a reducing atmosphere, but their relative permittivity ε is 5000 or higher and resistance is The rate ρ is 1 × 10 6 MΩ · cm or more.
[発明が解決しようとする課題] ところで、近年における電子回路の高密度化への進展は
著しく、積層磁器コンデンサの小型化の要求は非常に強
い。[Problems to be Solved by the Invention] By the way, in recent years, the progress toward higher density of electronic circuits is remarkable, and there is a strong demand for miniaturization of laminated ceramic capacitors.
このため、積層磁器コンデンサの誘電体層を構成する誘
電体磁器組成物の比誘電率εを、他の電気的特性を悪化
させることなく、上記各公報に開示されている誘電体磁
器組成物の比誘電率εよりも更に増大させることが望ま
れていた。Therefore, the relative permittivity ε of the dielectric ceramic composition that constitutes the dielectric layer of the laminated ceramic capacitor, the dielectric ceramic composition of the dielectric ceramic composition disclosed in the above publications without deteriorating other electrical characteristics. It has been desired to further increase the relative permittivity ε.
そこで、本発明の目的は、非酸化性雰囲気中における1
200℃以下の温度の焼成で得られるものであるにもか
かわらず、誘電体層を構成している誘電体磁器組成物の
比誘電率εが7000以上、誘電体損失tanδが2.
5%以下、抵抗率ρが1×106MΩ・cm以上と、そ
の電気的特性が従来のものより更に優れた磁器コンデン
サ及びその製造方法を提供することにある。Therefore, an object of the present invention is to provide 1 in a non-oxidizing atmosphere.
Despite being obtained by firing at a temperature of 200 ° C. or less, the dielectric ceramic composition constituting the dielectric layer has a relative permittivity ε of 7,000 or more and a dielectric loss tan δ of 2.
It is an object of the present invention to provide a porcelain capacitor having an electrical characteristic of 5% or less and a resistivity ρ of 1 × 10 6 MΩ · cm or more, which is more excellent than conventional ones, and a manufacturing method thereof.
[課題を解決するための手段] 本発明に係る磁器コンデンサは、誘電体磁器組成物から
なる誘電体磁器層と、この誘電体磁器層を挟持している
少なくとも2以上の内部電極とを備えた磁器コンデンサ
において、 前記誘電体磁器組成物が、100.0重量部の基本成分
と、0.2〜5.0重量部の添加成分との混合物を焼成
したものからなり、 前記基本成分が、 {(Ba1-W-XCaWSrX)0}K(Ti1-y-zZryRz)O2-z/2 (但し、Rは、Sc,Y,Gd,Dy,Ho,Er,Y
b,Tb,Tm及びLuから選択された1種または2種
以上の元素、 w,x,y,z,kは、 0≦w≦0.27 0<x≦0.37 0<y<0.26 0.05≦0.6x+y≦0.26 0.002≦z≦0.04 1.00≦k≦1.04 を満足する数値であり、 前記添加成分がB2O3とSiO2とLi2Oからな
り、 前記B2O3と前記SiO2と前記Li2Oとの組成範
囲が、これらの組成をモル%で示す三角図において、 前記B2O3が1モル%、前記SiO2が50モル%、
前記Li2Oが49モル%の組成を示す第1の点Aと、 前記B2O3が50モル%、前記SiO2が1モル%、
前記Li2Oが49モル%の組成を示す第2の点Bと、 前記B2O3が80モル%、前記SiO2が1モル%、
前記Li2Oが19モル%の組成を示す第3の点Cと、 前記B2O3が89モル%、前記SiO2が10モル
%、前記Li2Oが1モル%の組成を示す第4の点D
と、 前記B2O3が19モル%、前記SiO2が80モル
%、前記Li2Oが1モル%の組成を示す第5の点E
と、 前記B2O3が1モル%、前記SiO2が80モル%、
前記Li2Oが19モル%の組成を示す第6の点Fと をこの順に結ぶ6本の直線で囲まれた領域内にあるもの
である。[Means for Solving the Problems] A porcelain capacitor according to the present invention includes a dielectric porcelain layer made of a dielectric porcelain composition and at least two internal electrodes sandwiching the dielectric porcelain layer. In a porcelain capacitor, the dielectric porcelain composition is formed by firing a mixture of 100.0 parts by weight of a basic component and 0.2 to 5.0 parts by weight of an additive component, and the basic component is (Ba 1-WX Ca W Sr X ) 0} K (Ti 1-yz Zr y R z ) O 2-z / 2 (where R is Sc, Y, Gd, Dy, Ho, Er, Y
one or more elements selected from b, Tb, Tm and Lu, w, x, y, z, k are: 0 ≦ w ≦ 0.27 0 <x ≦ 0.37 0 <y <0 .26 0.05 ≦ 0.6x + y ≦ 0.26 0.002 ≦ z ≦ 0.04 1.00 ≦ k ≦ 1.04, and the additive components are B 2 O 3 and SiO 2 . Li 2 consists O, the composition range of the B 2 O 3 and said SiO 2 and said Li 2 O is, in a triangular diagram showing these compositions in mol%, the B 2 O 3 is 1 mol%, the SiO 2 is 50 mol%,
A first point A showing a composition of Li 2 O of 49 mol%, B 2 O 3 of 50 mol%, SiO 2 of 1 mol%,
A second point B showing a composition of 49 mol% of Li 2 O, 80 mol% of B 2 O 3 and 1 mol% of SiO 2 .
A third point C showing a composition of Li 2 O of 19 mol%, a third point C showing a composition of B 2 O 3 of 89 mol%, a content of SiO 2 of 10 mol%, and a composition of Li 2 O of 1 mol%. Point D of 4
And a fifth point E indicating a composition in which B 2 O 3 is 19 mol%, SiO 2 is 80 mol%, and Li 2 O is 1 mol%.
And B 2 O 3 is 1 mol%, SiO 2 is 80 mol%,
The Li 2 O is in a region surrounded by six straight lines connecting in this order with the sixth point F indicating the composition of 19 mol%.
ここで、基本成分の組成式中におけるCaの原子数の割
合、すなわちwの値を0≦w≦0.27としたのは、w
の値が、0≦w≦0.27の場合には、所望の電気的特
性を有するとともに、温度特性が平坦で、抵抗率ρの高
い焼結体を得ることができるが、0.27を越えた場合
には、焼成温度が1250℃を越えて高くなり、比誘電
率εsも7000未満となるからである。Here, the ratio of the number of Ca atoms in the composition formula of the basic component, that is, the value of w is 0 ≦ w ≦ 0.27,
When the value of 0 ≦ w ≦ 0.27, a sintered body having desired electrical characteristics, flat temperature characteristics, and high resistivity ρ can be obtained. This is because if it exceeds, the firing temperature becomes higher than 1250 ° C. and the relative dielectric constant ε s becomes less than 7,000.
なお、このCaは、上述したように磁器コンデンサの温
度特性を平坦にし、また抵抗率ρの向上を図るために使
用する元素であるため、あえて含有させなくても、すな
わちwの値を零としても所望の電気的特性を有する焼結
体を得ることはできる。Since Ca is an element used to flatten the temperature characteristics of the porcelain capacitor and to improve the resistivity ρ as described above, even if it is not contained, that is, the value of w is set to zero. Also, a sintered body having desired electrical characteristics can be obtained.
また、関係式0.6x+yの値を0.05≦0.6x+
y≦0.26としたのは、関係式0.6x+yの値がこ
の範囲にある場合は、所望の電気的特性を有する焼結体
を得ることができるが、関係式0.6x+yの値が0.
05未満となったり、0.26を越えたりした場合は、
いずれも比誘電率εsが7000未満となるからであ
る。In addition, the value of the relational expression 0.6x + y is 0.05 ≦ 0.6x +
y ≦ 0.26 means that when the value of the relational expression 0.6x + y is in this range, a sintered body having desired electrical characteristics can be obtained, but the value of the relational expression 0.6x + y is 0.
If it is less than 05 or exceeds 0.26,
This is because the relative permittivity ε s is less than 7,000 in both cases.
但し、関係式0.6x+yの値が0.26以下であって
も、xの値が0.37を越えると、比誘電率εsが70
00未満となる。従って、関係式0.6x+yの上限値
は0.26であるが、同時に、xの上限値は0.37と
しなければならない。However, even if the value of the relational expression 0.6x + y is 0.26 or less, if the value of x exceeds 0.37, the relative permittivity ε s becomes 70.
It is less than 00. Therefore, the upper limit of the relational expression 0.6x + y is 0.26, but at the same time, the upper limit of x must be 0.37.
なお、x,yで割合が示されたSr,Zrはいずれもキ
ュリー点を低温側にシフトさせ、室温における比誘電率
を増大させる作用を有する元素であり、0<x≦0.3
7及び0<y<0.26を満足する範囲で、且つ、0.
05≦0.6x+y≦0.26を満足させる範囲で使用
することができる。It should be noted that Sr and Zr, whose ratios are shown by x and y, are elements having an action of shifting the Curie point to the low temperature side and increasing the relative dielectric constant at room temperature, and 0 <x ≦ 0.3.
7 and 0 <y <0.26, and 0.
It can be used in a range satisfying 05 ≦ 0.6x + y ≦ 0.26.
また、基本成分の組成式中におけるRの原子数の割合、
すなわちzの値を0.002≦z≦0.04としたの
は、zの値が0.002≦z≦0.04の場合には所望
の電気的特性を有する焼結体を得ることができるが、
0.002未満になった場合には、誘電体損失tanδ
が大幅に悪化し、抵抗率ρも1×103MΩ・cm未満
となり、また、0.04を越えた場合には、焼成温度が
1250℃であっても緻密な焼結体を得ることができな
いからである。The ratio of the number of R atoms in the composition formula of the basic component,
That is, the value of z is set to 0.002 ≦ z ≦ 0.04, that is, when the value of z is 0.002 ≦ z ≦ 0.04, a sintered body having desired electrical characteristics can be obtained. I can, but
When it becomes less than 0.002, dielectric loss tan δ
And the resistivity ρ is less than 1 × 10 3 MΩ · cm, and when it exceeds 0.04, a dense sintered body can be obtained even if the firing temperature is 1250 ° C. Because you can't.
なお、R成分のSc,Y,Gd,Dy,Ho,Er,Y
b,Tb,Tm及びLuはほゞ同様に働き、これ等から
選択された1つを使用しても、または複数を使用しても
同様な結果が得られる。In addition, Sc, Y, Gd, Dy, Ho, Er, Y of R component
b, Tb, Tm and Lu work in much the same way, using one or more selected from them to obtain similar results.
基本成分の組成式中における {(Ba1-W-XCaWSrX)0} の割合、すなわちkの値を1.00≦k≦1.04とし
たのは、kの値が、1.00≦k≦1.04の場合に
は、所望の電気的特性を有する焼結体を得ることができ
るが、1.00未満になった場合には、抵抗率ρが1×
106MΩ・cm未満と、大幅に低くなり、1.04を
越えた場合には、緻密な焼結体を得ることができないか
らである。The ratio of {(Ba 1-WX Ca W Sr X ) 0} in the composition formula of the basic component, that is, the value of k is 1.00 ≦ k ≦ 1.04, is because the value of k is 1.00. When ≦ k ≦ 1.04, a sintered body having desired electrical characteristics can be obtained, but when it is less than 1.00, the resistivity ρ is 1 ×.
This is because it is significantly low at less than 10 6 MΩ · cm, and when it exceeds 1.04, a dense sintered body cannot be obtained.
なお、基本成分の組成式中におけるR成分のうちで、T
b,Tm及びLuは後記する第1表中に記載しなかった
が、これらも他のR成分と同様の作用効果を有するもの
である。Of the R components in the composition formula of the basic component, T
Although b, Tm and Lu are not shown in Table 1 described later, they also have the same action and effect as other R components.
また、基本成分の中には、本発明の目的を阻害しない範
囲で微量のMnO2(好ましくは0.05〜0.1重量
%)等の鉱化剤を添加し、焼結性を向上させてもよい。
また、その他の物質を必要に応じて添加してもよい。Further, a small amount of a mineralizing agent such as MnO 2 (preferably 0.05 to 0.1% by weight) is added to the basic components within a range that does not impair the object of the present invention to improve sinterability. May be.
Moreover, you may add another substance as needed.
また、基本成分を得るための出発原料としては、実施例
で示した以外の酸化物を使用してもよいし、水酸化物ま
たはその他の化合物を使用してもよい。In addition, as a starting material for obtaining the basic component, an oxide other than those shown in the examples may be used, or a hydroxide or another compound may be used.
次に、添加成分の添加量を、100重量部の基本成分に
対して0.2〜5.0重量部としたのは、添加成分の添
加量がこの範囲内にある場合は1180〜1190℃の
焼成で所望の電気的特性を有する焼結体を得ることがで
きるが、0.2重量部未満になると、焼成温度が125
0℃であっても緻密な焼結体を得ることができないし、
また、5.0重量部を越えると、比誘電率εsが700
0未満となるからである。Next, the addition amount of the additive component is set to 0.2 to 5.0 parts by weight with respect to 100 parts by weight of the basic component. The reason is that when the addition amount of the additive component is within this range, 1180 to 1190 ° C. Although a sintered body having the desired electrical characteristics can be obtained by firing, if the amount is less than 0.2 parts by weight, the firing temperature will be 125.
A dense sintered body cannot be obtained even at 0 ° C,
Further, if it exceeds 5.0 parts by weight, the relative permittivity ε s is 700.
This is because it becomes less than 0.
添加成分の組成を、B2O3とSiO2とLi2Oとの
組成をモル%で示す三角図において、前記した点A〜F
をこの順に結ぶ6本の直線で囲まれた範囲内としたの
は、添加成分の組成をこの範囲内のものとすれば、所望
の電気的特性を有する焼結体を得ることができるが、添
加成分の組成をこの範囲外とすれば、緻密な焼結体を得
ることができないからである。In the triangular diagram showing the composition of the additive component in terms of the composition of B 2 O 3 , SiO 2 and Li 2 O in mol%, points A to F described above
Within the range surrounded by the six straight lines connecting in this order, if the composition of the additive component is within this range, a sintered body having desired electrical characteristics can be obtained. This is because if the composition of the additive component is out of this range, a dense sintered body cannot be obtained.
次に、本発明に係る磁器コンデンサの製造方法は、前記
の基本成分と添加成分とからなる未焼結の磁器粉末から
なる混合物を調製する工程と、前記混合物からなる未焼
結磁器シートを形成する工程と、前記未焼結磁器シート
を少なくとも2以上の導電性ペースト膜で挟持させた積
層物を形成する工程と、前記積層物を非酸化性雰囲気中
において熱処理する工程と、前記熱処理を受けた積層物
を酸化性雰囲気中において熱処理する工程とを備えたも
のである。Next, the method for manufacturing a porcelain capacitor according to the present invention comprises a step of preparing a mixture of unsintered porcelain powder consisting of the basic component and the additive component, and a green porcelain sheet formed of the mixture. And a step of forming a laminate in which the green ceramic sheet is sandwiched by at least two or more conductive paste films, a step of heat-treating the laminate in a non-oxidizing atmosphere, and a step of receiving the heat treatment. And a step of heat-treating the laminated body in an oxidizing atmosphere.
ここで、非酸化性雰囲気としては、H2やCOなどの還
元性雰囲気のみならず、N2やArなどの中性雰囲気で
あってもよい。Here, the non-oxidizing atmosphere may be not only a reducing atmosphere such as H 2 or CO but also a neutral atmosphere such as N 2 or Ar.
また、非酸化性雰囲気中における熱処理の温度は、電極
材料を考慮して種々変更することができる。ニッケルを
内部電極とする場合には、1050℃〜1200℃の範
囲でニッケル粒子の凝集をほとんど生じさせることなく
熱処理することができる。Further, the temperature of the heat treatment in the non-oxidizing atmosphere can be variously changed in consideration of the electrode material. When nickel is used as the internal electrode, the heat treatment can be performed in the range of 1050 ° C to 1200 ° C with almost no agglomeration of nickel particles.
また、酸化性雰囲気中における熱処理の温度は、焼結温
度より低い温度であればよく、500〜1000℃の範
囲が好ましい。どのような温度にするかは、電極材料
(ニッケル等)の酸化と誘電体磁器層の酸化とを考慮し
て種々変更する必要がある。後述する実施例ではこの熱
処理の温度を600℃としたが、この温度に限定される
ものではない。The temperature of the heat treatment in the oxidizing atmosphere may be lower than the sintering temperature, and is preferably in the range of 500 to 1000 ° C. It is necessary to change the temperature in consideration of the oxidation of the electrode material (such as nickel) and the oxidation of the dielectric ceramic layer. Although the temperature of this heat treatment was set to 600 ° C. in the examples described later, the temperature is not limited to this temperature.
なお、本発明は積層磁器コンデンサ以外の一般的な単層
の磁器コンデンサにも勿論適用可能である。The present invention is of course applicable to general single-layer porcelain capacitors other than laminated porcelain capacitors.
[実施例] まず、第1表中の試料No.1の場合について説明す
る。[Example] First, the sample No. The case of 1 will be described.
基本成分の調製 配合1の化合物を各々秤量し、これらの化合物をポット
ミルに、複数個のアルミナボール及び2.5の水とと
もに入れ、15時間撹拌混合して、混合物を得た。Preparation of Basic Ingredients The compounds of Formulation 1 were each weighed, and these compounds were put in a pot mill together with a plurality of alumina balls and water of 2.5 and stirred and mixed for 15 hours to obtain a mixture.
ここで、配合1の各化合物の重量(g)は、前記基本成
分の組成式 {(Ba1-W-XCaWSrX)0}K(Ti1-y-zZryRz)O2-z/2が、 {(Ba0.85Ca0.07Sr0.08)O}1.01 (Ti0.88Zr0.10Ho0.02)O1.99…(1) となるように計算して求めた値である。 Here, the weight (g) of each compound of the formulation 1 is the compositional formula of the basic component {(Ba 1-WX Ca W Sr X ) 0} K (Ti 1-yz Zr y R z ) O 2-z / 2 is the value obtained by calculation so that {(Ba 0.85 Ca 0.07 Sr 0.08 ) O} 1.01 (Ti 0.88 Zr 0.10 Ho 0.02 ) O 1.99 (1).
次に、前記混合物をステンレスポットに入れ、熱風式乾
燥器を用い、150℃で4時間乾燥し、この乾燥した混
合物を粗粉砕し、この粗粉砕した混合物をトンネル炉を
用い、大気中において約1200℃で2時間仮焼し、前
記組成式(1)で表わされる組成の基本成分の粉末を得
た。Next, the mixture was placed in a stainless pot and dried at 150 ° C. for 4 hours using a hot air drier, the dried mixture was coarsely crushed, and the coarsely pulverized mixture was used in a tunnel furnace in the atmosphere to about The powder was calcined at 1200 ° C. for 2 hours to obtain powder of the basic component having the composition represented by the composition formula (1).
添加成分の調製 また、配合2の化合物を各々秤量し、これらの化合物を
ポリエチレンポットに、複数個のアルミナボール及び3
00mlのアルコールとともに加え、10時間撹拌混合
して、混合物を得た。Preparation of Additive Components In addition, the compounds of Formulation 2 were each weighed, and these compounds were placed in a polyethylene pot and a plurality of alumina balls and 3
It was added together with 00 ml of alcohol and mixed by stirring for 10 hours to obtain a mixture.
ここで、配合2の各化合物の重量(g)は、B2O3が
1モル%、SiO2が50モル%、Li2Oが49モル
%の組成となるように計算して求めた値である。 Here, the weight (g) of each compound of the formulation 2 is a value obtained by calculation so that the composition of B 2 O 3 is 1 mol%, SiO 2 is 50 mol%, and Li 2 O is 49 mol%. Is.
次に、前記混合物を大気中において約1000℃の温度
で2時間仮焼し、これをアルミナポットに複数個のアル
ミナボール及び300mlの水とともに入れ、15時間
粉砕し、その後、150℃で4時間乾燥させ、前記組成
の添加成分の粉末を得た。Next, the mixture is calcined in the atmosphere at a temperature of about 1000 ° C. for 2 hours, put in an alumina pot together with a plurality of alumina balls and 300 ml of water, pulverized for 15 hours, and then at 150 ° C. for 4 hours. It was dried to obtain powder of the additive component having the above composition.
スラリーの調製 次に、100重量部(1000g)の前記基本成分と、
2重量部(20g)の前記添加成分とをボールミルに入
れ、更に、これらの基本成分と添加成分との合計重量に
対して15重量%の有機バインダーと50重量%の水を
入れ、これらを混合及び粉砕して誘電体磁器組成物の原
料となるスラリーを得た。Preparation of Slurry Next, 100 parts by weight (1000 g) of the basic component,
2 parts by weight (20 g) of the above-mentioned additional components were put into a ball mill, and further, 15% by weight of an organic binder and 50% by weight of water were added to the total weight of these basic components and additional components, and these were mixed. And pulverized to obtain a slurry as a raw material of the dielectric ceramic composition.
ここで、有機バインダーとしては、アクリル酸エステル
ポリマー、グリセリン及び縮合リン酸塩の水溶液からな
るものを使用した。Here, the organic binder used was an aqueous solution of acrylic acid ester polymer, glycerin and condensed phosphate.
未焼結磁器シートの形成 次に、上記スラリーを真空脱泡機に入れて脱泡処理し、
この脱泡処理したスラリーをポリエステルフィルム上に
リバースコータを用いて所定の厚さで塗布し、この塗布
されたスラリーをこのポリエステルフィルムとともに1
00℃で加熱して乾燥させ、厚さ約25μmの長尺な未
焼結磁器シートを得た。そして、この長尺な未焼結磁器
シートを裁断して10cm角の未焼結磁器シートを得
た。Formation of unsintered porcelain sheet Next, the slurry was placed in a vacuum defoaming machine for defoaming treatment,
The defoamed slurry was applied on a polyester film with a reverse coater to a predetermined thickness, and the applied slurry was applied together with the polyester film to 1
It was heated at 00 ° C. and dried to obtain a long unsintered porcelain sheet having a thickness of about 25 μm. Then, this long unsintered porcelain sheet was cut to obtain a 10 cm square unsintered porcelain sheet.
導電性ペーストの調製と印刷 また、粒径平均1.5μmのニッケル粉末10gと、エ
チルセルロース0.9gをブチルカルビトール9.1g
に溶解させたものとを攪拌機に入れて10時間攪拌し、
内部電極用の導電性ペーストを得た。Preparation and Printing of Conductive Paste Also, 10 g of nickel powder having an average particle size of 1.5 μm, 0.9 g of ethyl cellulose and 9.1 g of butyl carbitol.
What was dissolved in was put in a stirrer and stirred for 10 hours,
A conductive paste for internal electrodes was obtained.
そして、前記未焼結磁器シートの片面にこの導電性ペー
ストからなるパターン(長さ14mm、幅7mm)を5
0個、スクリーン印刷法によって形成させ、乾燥させ
た。Then, a pattern (length 14 mm, width 7 mm) made of this conductive paste is formed on one surface of the green ceramic sheet.
0 pieces were formed by the screen printing method and dried.
未焼結磁器シートの積層 次に、この未焼結磁器シートを、導電性ペーストからな
るパターンが形成されている側を上にして2枚積層し
た。この積層の際、隣接する上下の未焼結磁器シート間
において、導電性ペーストからなるパターンが長手方向
に半分程ずれるようにした。Lamination of Unsintered Porcelain Sheet Next, two sheets of this unsintered porcelain sheet were laminated with the side on which the pattern made of the conductive paste was formed facing up. At the time of this lamination, the patterns made of the conductive paste were shifted by about half in the longitudinal direction between the adjacent upper and lower unsintered porcelain sheets.
そして、更に上記のようにして積層したものの上下両面
に厚さ60μmの未焼結磁器シートを各々4枚ずつ積層
して積層物を得た。Then, four unsintered porcelain sheets each having a thickness of 60 μm were laminated on each of the upper and lower surfaces of the laminated body as described above to obtain a laminated body.
積層物の圧着と裁断 次に、約50℃の温度下において、この積層物に厚さ方
向から約40トンの荷重を加えて、この積層物を構成し
ている未焼結磁器シート相互を圧着させた。そして、こ
の積層物を格子状に裁断して、50個の積層体チップを
得た。Next, at a temperature of about 50 ° C., a load of about 40 tons is applied to this laminate at a temperature of about 50 ° C. to bond the unsintered porcelain sheets constituting this laminate to each other. Let Then, this laminate was cut into a lattice shape to obtain 50 laminate chips.
積層体チップの焼成 次に、この積層体チップを雰囲気焼成が可能な炉に入
れ、この炉内を大気雰囲気にし、100℃/hの速度で
600℃まで昇温させ、未焼結磁器シート中の有機バイ
ンダーを燃焼除去させた。Firing of Laminated Chip Next, the laminated chip is put into a furnace capable of performing atmospheric firing, the inside of the furnace is set to an air atmosphere, the temperature is raised to 600 ° C. at a rate of 100 ° C./h, and the unsintered porcelain sheet is placed. The organic binder was removed by burning.
その後、炉内の雰囲気を大気雰囲気から還元雰囲気{H
2(2体積%)+N2(98体積%)}に変え、炉内の
温度を600℃から1120℃まで、100℃/hの速
度で昇温させ、1120℃の温度を3時間保持し、その
後、100℃/hの速度で降温させ、炉内の雰囲気を大
気雰囲気(酸化性雰囲気)に変え、600℃の温度を3
0分間保持して酸化処理を行い、その後、室温まで冷却
して積層焼結体チップを得た。After that, the atmosphere in the furnace is changed from the atmospheric atmosphere to the reducing atmosphere {H
2 (2% by volume) + N 2 (98% by volume)}, the temperature inside the furnace was raised from 600 ° C. to 1120 ° C. at a rate of 100 ° C./h, and the temperature of 1120 ° C. was maintained for 3 hours, After that, the temperature is lowered at a rate of 100 ° C./h, the atmosphere in the furnace is changed to an atmospheric atmosphere (oxidizing atmosphere), and the temperature of 600 ° C. is set to 3
Oxidation treatment was performed by holding for 0 minute, and then cooled to room temperature to obtain a laminated sintered body chip.
外部電極の形成 次に、この積層焼結体チップの対向する側面のうちで、
内部電極の端部が露出している側面に一対の外部電極を
形成し、第1図に示すような、3層の誘電体磁器層1
2,12,12と2層の内部電極14,14とからなる
積層焼結体チップ15の端部に一対の外部電極16,1
6が形成された積層磁器コンデンサ10が得られた。Formation of External Electrodes Next, among the opposite side surfaces of this laminated sintered body chip,
By forming a pair of external electrodes on the side surfaces where the ends of the internal electrodes are exposed, three dielectric ceramic layers 1 as shown in FIG. 1 are formed.
2, 12, 12 and a pair of external electrodes 16, 1 at the end of a laminated sintered body chip 15 composed of two layers of internal electrodes 14, 14.
A laminated ceramic capacitor 10 having No. 6 formed was obtained.
ここで、外部電極16は、前記側面に亜鉛とガラスフリ
ット(glass frit)とビヒクル(vehicle)とからなる導電
性ペーストを塗布し、この導電性ペーストを、乾燥後、
大気中において550℃の温度で15分間焼き付けて亜
鉛電極層18とし、更にこの亜鉛電極層18の上に無電
解メッキ法で銅層20を形成し、更にこの銅層20の上
に電気メッキ法でPb−Sn半田層22を設けることに
よって形成した。Here, the external electrode 16 is formed by applying a conductive paste composed of zinc, glass frit, and vehicle to the side surface, drying the conductive paste, and
The zinc electrode layer 18 is baked in the atmosphere at a temperature of 550 ° C. for 15 minutes to form a zinc electrode layer 18, and a copper layer 20 is formed on the zinc electrode layer 18 by an electroless plating method. The Pb—Sn solder layer 22 is formed by the above process.
なお、この積層磁器コンデンサ10の誘電体磁器層12
の厚さは0.02mm、一対の内部電極14,14の対
向面積は5mm×5mm=25mm2である。また、焼
結後の誘電体磁器層12の組成は、焼結前の基本成分及
び添加成分の混合物の組成と実質的に同じである。The dielectric ceramic layer 12 of the multilayer ceramic capacitor 10
Has a thickness of 0.02 mm, and the facing area of the pair of internal electrodes 14, 14 is 5 mm × 5 mm = 25 mm 2 . The composition of the dielectric ceramic layer 12 after sintering is substantially the same as the composition of the mixture of the basic component and the additive component before sintering.
電気的特性の測定 次に、積層磁器コンデンサ10の電気的特性を測定し、
その平均値を求めたところ、第1表に示すように、比誘
電率εsが17600、tanδが1.7%、抵抗率ρ
が2.36×106MΩ・cmであった。Measurement of Electrical Characteristics Next, the electrical characteristics of the laminated ceramic capacitor 10 are measured,
When the average value was obtained, as shown in Table 1, the relative permittivity ε s was 17,600, the tan δ was 1.7%, and the resistivity ρ.
Was 2.36 × 10 6 MΩ · cm.
なお、電気的特性は次の要領で測定した。The electrical characteristics were measured as follows.
(A)比誘電率εsは、温度20℃、周波数1kHz、電
圧(実効値)1.0Vの条件で静電容量を測定し、この
測定値と、一対の内部電極14,14の対向面積(25
mm2)と一対の内部電極14,14間の誘電体磁器層
12の厚さ(0.02mm)から計算で求めた。(A) The relative permittivity ε s is measured by measuring the capacitance under the conditions of a temperature of 20 ° C., a frequency of 1 kHz, and a voltage (effective value) of 1.0 V, and the measured value and the facing area of the pair of internal electrodes 14, 14. (25
mm 2 ) and the thickness (0.02 mm) of the dielectric ceramic layer 12 between the pair of internal electrodes 14, 14 and calculated.
(B)誘電体損失tanδ(%)は、上記した比誘電率ε
sの測定の場合と同一の条件で測定した。(B) Dielectric loss tan δ (%) is the dielectric constant ε described above.
It was measured under the same conditions as in the case of s measurement of.
(C)抵抗率ρ(MΩ・cm)は、温度20℃においてD
C100Vを1分間印加した後に、一対の外部電極1
6,16間の抵抗値を測定し、この測定値と寸法とに基
づいて計算で求めた。(C) Resistivity ρ (MΩ · cm) is D at 20 ℃
After applying C100V for 1 minute, a pair of external electrodes 1
The resistance value between Nos. 6 and 16 was measured and calculated based on the measured value and the dimension.
以上、No.1の試料について述べたが、No.2〜8
5の試料についても、基本成分及び添加成分の組成を第
1表の左欄に示すように変え、還元性雰囲気中における
焼成温度を第1表の右欄に示すように変えた他は、N
o.1の試料と全く同一の方法で積層磁器コンデンサを
作成し、同一の方法で電気的特性を測定した。No.1
〜85の試料の焼成温度及び電気的特性は第1表の右欄
に示す通りとなった。Above, No. Although the sample No. 1 was described, 2-8
Also for the sample of No. 5, except that the composition of the basic component and the additive component was changed as shown in the left column of Table 1 and the firing temperature in the reducing atmosphere was changed as shown in the right column of Table 1,
o. A laminated porcelain capacitor was prepared by the same method as that of Sample 1 and the electrical characteristics were measured by the same method. No. 1
The firing temperatures and the electrical characteristics of the samples Nos. To 85 are shown in the right column of Table 1.
第1表において、1−w−xの欄には基本成分の組成式
におけるBaの原子数の割合が、wの欄には基本成分の
組成式におけるCaの原子数の割合が、xの欄には基本
成分の組成式におけるSrの原子数の割合が1−y−z
の欄には基本成分の組成式におけるTiの原子数の割合
が、yの欄には基本成分の組成式におけるZrの原子数
の割合が、zの欄には基本成分の組成式におけるRの原
子数の割合が、kの欄には基本成分の組成式における
{(Ba1-xCaWSrX)O}の割合が示されている。In Table 1, the 1-w-x column shows the ratio of the number of Ba atoms in the composition formula of the basic component, the w column shows the ratio of the number of Ca atoms in the composition formula of the basic component, the column of x. Has a ratio of the number of Sr atoms in the composition formula of the basic component of 1-yz
In the column, the ratio of the number of Ti atoms in the composition formula of the basic component, in the column of y is the ratio of the number of atoms of Zr in the composition formula of the basic component, and in the column of z, the R ratio in the composition formula of the basic component. The ratio of the number of atoms is in the column of k in the composition formula of the basic component.
The proportion of {(Ba 1-x Ca W Sr X ) O} is shown.
また、zの欄のSc,Y,Gd,Dy,Ho,Er,Y
bは基本成分の組成式中におけるRの内容を示し、これ
等の元素の各欄にはこれ等の元素の原子数の割合が示さ
れ、合計の欄にはこれ等の元素の原子数の割合の合計値
(z値)が示されている。Also, Sc, Y, Gd, Dy, Ho, Er, Y in the column of z
b shows the content of R in the composition formula of the basic component, each element column shows the ratio of the number of atoms of these elements, and the total column shows the number of atoms of these elements. The sum of the proportions (z value) is shown.
また、添加成分の内容の欄の添加量は基本成分100重
量部に対する重量部で示されている。Further, the addition amount in the column of the content of the added component is shown in parts by weight with respect to 100 parts by weight of the basic component.
また、No.1〜15の試料による実験は添加成分であ
るガラスの適正範囲を明らかにし、No.16〜27の
試料による実験は添加成分であるガラスの添加量の適正
範囲を明らかにし、No.28〜39の試料による実験
はCaの原子数の割合であるw値の適正範囲を明らかに
し、No.40〜55の試料による実験はSrの原子数
の割合であるx値と、Zrの原子数の割合であるy値の
適正範囲を明らかにし、No.56〜64の試料による
実験はRの種類の違いによる影響を明らかにし、No.
65〜75の試料による実験はRの原子数の割合である
z値の適正範囲を明らかにし、No.76〜85の試料
による実験は{(Ba1-xCawSrx)O}の割合であるkの適正範
囲を明らかにするものである。In addition, No. Experiments using the samples 1 to 15 revealed the proper range of glass as an additive component, and No. Experiments using the samples of Nos. 16 to 27 clarified the appropriate range of the addition amount of glass as an additive component, and No. Experiments using the samples Nos. 28 to 39 revealed an appropriate range of the w value, which is the ratio of the number of Ca atoms, and No. Experiments using the samples of Nos. 40 to 55 revealed appropriate ranges of the x value, which is the ratio of the number of Sr atoms, and the y value, which is the ratio of the number of Zr atoms, and No. Experiments using the samples of Nos. 56 to 64 revealed the influence of the difference in the type of R.
Experiments using the samples Nos. 65 to 75 revealed an appropriate range of the z value, which is the ratio of the number of R atoms, and No. Experiments with samples 76-85 reveal the proper range of k, which is the proportion of {(Ba 1-x Ca w Sr x ) O}.
第1表から明らかなように、本発明に従う試料によれ
ば、非酸化性雰囲気中における1200℃以下の焼成
で、比誘電率εsが7000以上、誘電体損失tanδ
が2.5%以下、抵抗率ρが1×106MΩ・cm以上
の電気的特性を有する誘電体磁器組成物を備えた磁器コ
ンデンサを得ることができるものである。 As is clear from Table 1, according to the sample according to the present invention, the relative dielectric constant ε s is 7,000 or more and the dielectric loss tan δ is obtained by firing at 1200 ° C. or less in the non-oxidizing atmosphere.
Of 2.5% or less and a resistivity ρ of 1 × 10 6 MΩ · cm or more, a ceramic capacitor provided with a dielectric ceramic composition having electrical characteristics can be obtained.
これに対し、No.12〜16,21,22,27,3
3,39,40,45,53,55,65,70,7
1,75,76,80,81及び85の試料によれば、
所望の電気的特性を有する磁器コンデンサを得ることが
できない。従って、これらのNo.の試料は本発明の範
囲外のものである。On the other hand, No. 12-16, 21, 22, 22, 27, 3
3,39,40,45,53,55,65,70,7
According to the 1,75,76,80,81 and 85 samples,
It is not possible to obtain a porcelain capacitor having the desired electrical characteristics. Therefore, these No. Samples are outside the scope of the present invention.
次に、本発明に係る磁器コンデンサに用いられている誘
電体磁器組成物の組成範囲の限定理由について、第1表
に示す実験結果を参照しながら説明する。Next, the reasons for limiting the composition range of the dielectric ceramic composition used in the ceramic capacitor according to the present invention will be described with reference to the experimental results shown in Table 1.
まず、基本成分の組成式中におけるCaの原子数の割
合、すなわちwの値について説明する。First, the ratio of the number of Ca atoms in the composition formula of the basic component, that is, the value of w will be described.
wの値が、試料No.32及び38に示すように、0.
27の場合には、所望の電気的特性を有する焼結体を得
ることができるが、試料No.33及び39に示すよう
に、0.30の場合には、焼結温度が1250℃と高く
なり、比誘電率εsも7000未満となる。従って、w
の上限値は0.27である。The value of w is the sample No. 32 and 38, 0.
In the case of No. 27, it is possible to obtain a sintered body having desired electrical characteristics. As shown in 33 and 39, in the case of 0.30, the sintering temperature becomes as high as 1250 ° C., and the relative permittivity ε s becomes less than 7,000. Therefore, w
Has an upper limit of 0.27.
また、Caは温度特性を平坦にする作用及び抵抗率ρを
向上させる作用を有するが、wの値が零であっても所望
の電気的特性の焼結体を得ることができる。従って、w
の下限値は零である。Further, Ca has a function of flattening the temperature characteristics and a function of improving the resistivity ρ, but even if the value of w is zero, a sintered body having desired electrical characteristics can be obtained. Therefore, w
The lower limit of is zero.
次に、基本成分の組成式中におけるSrの原子数の割合
であるxの値と、Zrの原子数の割合であるyの値を、
関係式0.6x+yの値で表わした場合について説明す
る。Next, the value of x, which is the ratio of the number of atoms of Sr in the composition formula of the basic component, and the value of y, which is the ratio of the number of atoms of Zr, are
The case where the relational expression is represented by the value of 0.6x + y will be described.
関係式0.6x+yの値が、試料No.46に示すよう
に、0.05の場合には、所望の電気的特性を有する焼
結体を得ることができるが、試料No.40に示すよう
に、0.035の場合には、比誘電率εsが7000未
満となる。従って、関係式0.6x+yの下限値は0.
05である。The value of the relational expression 0.6x + y is the sample No. As shown in No. 46, when it is 0.05, it is possible to obtain a sintered body having desired electrical characteristics. As shown in 40, in the case of 0.035, the relative dielectric constant ε s becomes less than 7,000. Therefore, the lower limit value of the relational expression 0.6x + y is 0.
05.
一方、関係式0.6x+yの値が、試料No.52,5
4に示すように、0.260,0.258の場合は、所
望の電気的特性を有する焼結体を得ることができるが、
試料No.53,55に示すように、0.26を越えて
0.290,0.285になった場合には、比誘電率ε
sが7000未満となる。従って、関係式0.6x+y
の上限値は0.26である。On the other hand, the value of the relational expression 0.6x + y is the sample No. 52,5
As shown in Fig. 4, in the case of 0.260 and 0.258, a sintered body having desired electrical characteristics can be obtained,
Sample No. As shown in 53 and 55, when the value exceeds 0.26 and becomes 0.290 and 0.285, the relative permittivity ε
s is less than 7,000. Therefore, the relational expression 0.6x + y
Has an upper limit of 0.26.
但し、関係式0.6x+yの値が0.26以下であって
も、試料No.45に示すように、xの値が0.37を
越えて0.40になった場合は、比誘電率εsが700
0未満となる。従って、関係式0.6x+yの上限値は
0.26であるが、同時に、xの上限値は0.37とし
なければならない。However, even if the value of the relational expression 0.6x + y is 0.26 or less, the sample No. As shown in 45, when the value of x exceeds 0.37 and becomes 0.40, the relative permittivity ε s is 700.
It becomes less than 0. Therefore, the upper limit of the relational expression 0.6x + y is 0.26, but at the same time, the upper limit of x must be 0.37.
なお、x,yで示されるSr,Zrはキュリー点を低温
側にシフトさせ、室温における比誘電率を増大させる同
様の作用を有し、0<x≦0.37及び0<y<0.2
6を満足する範囲で、且つ、0.05≦0.6x+y≦
0.26を満足させる範囲で使用することができる。Note that Sr and Zr represented by x and y have the same effect of shifting the Curie point to the low temperature side and increasing the relative dielectric constant at room temperature, and 0 <x ≦ 0.37 and 0 <y <0. Two
Within the range of 6 and 0.05 ≦ 0.6x + y ≦
It can be used in a range satisfying 0.26.
次に、基本成分の組成式中におけるRの原子数の割合、
すなわちzの値について説明する。Next, the ratio of the number of R atoms in the composition formula of the basic component,
That is, the value of z will be described.
Zの値が、試料No.66及び72に示すように、0.
002の場合には所望の電気的特性を有する焼結体を得
ることができるが、試料No.65及び71に示すよう
に、0.001の場合には、誘電体損失tanδが大幅
に悪化し、抵抗率ρも1×103MΩ・cm未満とな
る。従って、zの下限値は0.002である。The value of Z is the sample No. 66 and 72, 0.
In the case of 002, a sintered body having desired electrical characteristics can be obtained. As shown by 65 and 71, in the case of 0.001, the dielectric loss tan δ is significantly deteriorated, and the resistivity ρ is also less than 1 × 10 3 MΩ · cm. Therefore, the lower limit value of z is 0.002.
一方、zの値が、試料No.69及び74に示すよう
に、0.04の場合には所望の電気的特性を有する焼結
体を得ることができるが、試料No.70及び75に示
すように、0.06の場合には、焼成温度が1250℃
であっても緻密な焼結体を得ることができない。従っ
て、zの上限値は0.04である。On the other hand, the value of z is the sample No. As shown in Nos. 69 and 74, in the case of 0.04, a sintered body having desired electrical characteristics can be obtained. As shown in 70 and 75, when 0.06, the firing temperature is 1250 ° C.
However, a dense sintered body cannot be obtained. Therefore, the upper limit of z is 0.04.
なお、R成分のSc,Y,Dy,Ho,Er,Ybはほ
ゞ同様に働き、これ等から選択された1つを使用して
も、または複数を使用しても同様な結果が得られる。The R components Sc, Y, Dy, Ho, Er, and Yb work almost in the same manner, and similar results can be obtained by using one selected from these or by using a plurality of them. .
次に、基本成分の組成式中における {(Ba1-W-XCaWSrX)O} の割合、すなわちkの値について説明する。Next, the ratio of {(Ba 1-WX Ca W Sr X ) O} in the composition formula of the basic component, that is, the value of k will be described.
kの値が、試料No.77及び82に示すように、1.
00の場合には、所望の電気的特性を有する焼結体を得
ることができるが、試料No.76及び81に示すよう
に、0.99の場合には、抵抗率ρが1×106MΩ・
cm未満と、大幅に低くなる。従って、kの下限値は
1.00である。The value of k is the sample No. As shown in 77 and 82, 1.
In the case of No. 00, it is possible to obtain a sintered body having desired electrical characteristics. As shown in 76 and 81, when 0.99, the resistivity ρ is 1 × 10 6 MΩ ·
If it is less than cm, it will be significantly lower. Therefore, the lower limit value of k is 1.00.
一方、kの値が、試料No.79及び84に示すよう
に、1.04の場合には所望の電気的特性の焼結体を得
ることができるが、試料No.80及び85に示すよう
に、1.05の場合には、緻密な焼結体を得ることがで
きない。従って、kの上限値は1.04である。On the other hand, the value of k is the sample No. As shown in Nos. 79 and 84, in the case of 1.04, a sintered body having desired electric characteristics can be obtained. As shown in 80 and 85, in the case of 1.05, a dense sintered body cannot be obtained. Therefore, the upper limit of k is 1.04.
次に、添加成分の添加量について説明する。Next, the addition amount of the additive component will be described.
添加成分の添加量が、試料No.17及び23に示すよ
うに、100重量部の基本成分に対して0.2重量部の
場合には、1190〜1200℃の焼成で所望の電気的
特性を有する焼結体を得ることができるが、添加成分の
添加量が零の場合には、試料No.16及び22に示す
ように、焼成温度が1250℃であっても緻密な焼結体
を得ることができない。従って、添加成分の下限値は、
100重量部の基本成分に対して0.2重量部である。The addition amount of the additive component is the same as the sample No. As shown in 17 and 23, when the amount of the basic component is 0.2 parts by weight with respect to 100 parts by weight, a sintered body having desired electrical characteristics can be obtained by firing at 1190 to 1200 ° C. If the addition amount of the additive component is zero, the sample No. As shown in 16 and 22, even if the firing temperature is 1250 ° C., a dense sintered body cannot be obtained. Therefore, the lower limit of the additive component is
It is 0.2 parts by weight with respect to 100 parts by weight of the basic component.
一方、添加成分の添加量が、試料No.20及び26に
示すように、100重量部の基本成分に対して5重量部
の場合には、所望の電気的特性を有する焼結体を得るこ
とができるが、添加成分の添加量が、試料No.21及
び27に示すように、100重量部の基本成分に対して
7重量部の場合には、比誘電率εsが7000未満とな
る。従って、添加成分の添加量の上限値は、100重量
部の基本成分に対して5重量部である。On the other hand, the addition amount of the additive component is the same as the sample No. As shown in 20 and 26, when 5 parts by weight is added to 100 parts by weight of the basic component, a sintered body having desired electrical characteristics can be obtained, but the addition amount of the additional component is No. 21 and 27, the relative permittivity ε s is less than 7,000 when the amount is 7 parts by weight with respect to 100 parts by weight of the basic component. Therefore, the upper limit of the added amount of the additive component is 5 parts by weight with respect to 100 parts by weight of the basic component.
次に添加成分の好ましい組成範囲について説明する。Next, a preferable composition range of the additive component will be described.
添加成分の好ましい組成範囲は、第2図のB2O3−S
iO2−Li2Oの組成比を示す三角図に基づいて決定
することができる。The preferable composition range of the additive component is B 2 O 3 -S in FIG.
It can be determined based on a triangular diagram showing the composition ratio of iO 2 —Li 2 O.
三角図の第1の点Aは、試料No.1のB2O3が1モ
ル%、SiO2が50モル%、Li2Oが49モル%の
組成を示し、第2の点Bは、試料No.2のB2O3が
50モル%、SiO2が1モル%、Li2Oが49モル
%の組成を示し、第3の点Cは、試料No.3のB2O
3が80モル%、SiO2が1モル%、Li2Oが19
モル%の組成を示し、第4の点Dは、試料No.4のB
2O3が89モル%、SiO2が10モル%、Li2O
が1モル%の組成を示し、第5の点Eは、試料No.5
のB2O3が19モル%、SiO2が80モル%、Li
2Oが1モル%の組成を示し、第6の点Fは、試料N
o.6のB2O3が1モル%、SiO2が80モル%、
Li2Oが19モル%の組成を示す。The first point A in the triangular diagram is the sample No. 1 has a composition of B 2 O 3 of 1 mol%, SiO 2 of 50 mol%, and Li 2 O of 49 mol%. No. 2 has a composition of B 2 O 3 of 50 mol%, SiO 2 of 1 mol%, and Li 2 O of 49 mol%. B 2 O of 3
3 is 80 mol%, SiO 2 is 1 mol%, Li 2 O is 19 mol%.
The fourth point D indicates the sample No. B of 4
89 mol% of 2 O 3, 10 mol% of SiO 2 , Li 2 O
Indicates a composition of 1 mol%, and the fifth point E is sample No. 5
B 2 O 3 of 19 mol%, SiO 2 of 80 mol%, Li
2 O shows a composition of 1 mol%, and the sixth point F is sample N
o. B 2 O 3 of 6 is 1 mol%, SiO 2 is 80 mol%,
Li 2 O has a composition of 19 mol%.
本発明の組成範囲に属する試料の添加成分は、第2図に
示す三角図の第1〜6の点A〜Fをこの順に結ぶ6本の
直線で囲まれた範囲内となっている。The additive components of the sample belonging to the composition range of the present invention are within a range surrounded by six straight lines connecting points A to F of the first to sixth points in the triangular diagram shown in FIG. 2 in this order.
添加成分の組成をこの範囲内のものとすれば、所望の電
気的特性を有する焼結体を得ることができる。一方、試
料No.12〜15のように、添加成分の組成を本発明
で特性した範囲外とすれば、緻密な焼結体を得ることが
できない。When the composition of the additive component is within this range, a sintered body having desired electrical characteristics can be obtained. On the other hand, sample No. If the composition of the additive component is outside the range specified by the present invention, as in Nos. 12 to 15, a dense sintered body cannot be obtained.
[発明の効果] 本発明によれば、磁器コンデンサの誘電体層を構成して
いる誘電体磁器組成物の組成を前述したように構成した
ので、非酸化性雰囲気中における1200℃以下の焼成
であるにもかかわらず、そ比誘電率εsを7000〜1
9400と飛躍的に向上させることができ、従って、磁
器コンデンサの小型大容量化を図ることが可能になっ
た。[Effects of the Invention] According to the present invention, the composition of the dielectric ceramic composition forming the dielectric layer of the ceramic capacitor is configured as described above. Therefore, it is possible to perform the firing at 1200 ° C. or less in a non-oxidizing atmosphere. Despite that, the relative permittivity ε s is 7000 to 1
It was possible to dramatically improve it to 9400, and thus it was possible to reduce the size and capacity of the porcelain capacitor.
そして、磁器コンデンサの小型大容量化を図ることがで
きるようになったので、ニッケル等の卑金属の導電性ペ
ーストを内部電極の形成に用いることと相まって、磁器
コンデンサの低コスト化を図ることが可能になった。Since it has become possible to reduce the size and capacity of the porcelain capacitor, it is possible to reduce the cost of the porcelain capacitor in combination with the use of a conductive paste of a base metal such as nickel for forming the internal electrodes. Became.
第1図は本発明の実施例に係る積層型磁器コンデンサの
断面図、第2図は添加成分の組成範囲を示す三角図であ
る。 12……誘電体磁器層、14……内部電極、15……積
層焼結体チップ、16……外部電極、18……亜鉛電極
層、20……銅層、22……Pb−Sn半田層FIG. 1 is a sectional view of a laminated ceramic capacitor according to an embodiment of the present invention, and FIG. 2 is a triangular diagram showing a composition range of additive components. 12 ... Dielectric porcelain layer, 14 ... Internal electrode, 15 ... Laminated sintered body chip, 16 ... External electrode, 18 ... Zinc electrode layer, 20 ... Copper layer, 22 ... Pb-Sn solder layer
Claims (2)
と、この誘電体磁器層を挟持している少なくとも2以上
の内部電極とを備えた磁器コンデンサにおいて、 前記誘電体磁器組成物が、100.0重量部の基本成分
と、0.2〜5.0重量部の添加成分との混合物を焼成
したものからなり、 前記基本成分が、 {(Ba1-W-XCaWSrX)0}K(Ti1-y-zZryRz)O2-z/2 (但し、Rは、Sc,Y,Gd,Dy,Ho,Er,Y
b,Tb,Tm及びLuから選択された1種または2種
以上の元素、 w,x,y,z,kは、 0≦w≦0.27 0<x≦0.37 0<y<0.26 0.05≦0.6x+y≦0.26 0.002≦z≦0.04 1.00≦k≦1.04 を満足する数値)であり、 前記添加成分がB2O3とSiO2とLi2Oからな
り、 前記B2O3と前記SiO2と前記Li2Oとの組成範
囲が、これらの組成をモル%で示す三角図において、 前記B2O3が1モル%、前記SiO2が50モル%、
前記Li2Oが49モル%の組成を示す第1の点Aと、 前記B2O3が50モル%、前記SiO2が1モル%、
前記Li2Oが49モル%の組成を示す第2の点Bと、 前記B2O3が80モル%、前記SiO2が1モル%、
前記Li2Oが19モル%の組成を示す第3の点cと、 前記B2O3が89モル%、前記SiO2が10モル
%、前記Li2Oが1モル%の組成を示す第4の点D
と、 前記B2O3が19モル%、前記SiO2が80モル
%、前記Li2Oが1モル%の組成を示す第5の点E
と、 前記B2C3が1モル%、前記SiO2が80モル%、
前記Li2Oが19モル%の組成を示す第6の点Fと をこの順に結ぶ6本の直線で囲まれた領域内にあること
を特徴とする磁器コンデンサ。1. A porcelain capacitor comprising a dielectric porcelain layer made of a dielectric porcelain composition and at least two internal electrodes sandwiching the dielectric porcelain layer, wherein the dielectric porcelain composition comprises: It is composed of a mixture of 100.0 parts by weight of the basic component and 0.2 to 5.0 parts by weight of the additive component, and the basic component is {(Ba 1-WX Ca W Sr X ) 0}. K (Ti 1-yz Zr y R z ) O 2-z / 2 (where R is Sc, Y, Gd, Dy, Ho, Er, Y
one or more elements selected from b, Tb, Tm and Lu, w, x, y, z, k are: 0 ≦ w ≦ 0.27 0 <x ≦ 0.37 0 <y <0 .26 0.05 ≦ 0.6x + y ≦ 0.26 0.002 ≦ z ≦ 0.04 1.00 ≦ k ≦ 1.04), wherein the additive components are B 2 O 3 and SiO 2 And Li 2 O, the composition range of B 2 O 3 , SiO 2, and Li 2 O is a triangle diagram showing these compositions in mol%, where B 2 O 3 is 1 mol%, SiO 2 is 50 mol%,
A first point A showing a composition of Li 2 O of 49 mol%, B 2 O 3 of 50 mol%, SiO 2 of 1 mol%,
A second point B showing a composition of 49 mol% of Li 2 O, 80 mol% of B 2 O 3 and 1 mol% of SiO 2 .
The third point c showing the composition of Li 2 O of 19 mol%, and the third point c showing the composition of B 2 O 3 of 89 mol%, the SiO 2 of 10 mol%, and the Li 2 O of 1 mol%. Point D of 4
And a fifth point E indicating a composition in which B 2 O 3 is 19 mol%, SiO 2 is 80 mol%, and Li 2 O is 1 mol%.
And B 2 C 3 is 1 mol%, SiO 2 is 80 mol%,
A ceramic capacitor characterized in that the Li 2 O is in a region surrounded by six straight lines connecting in this order with a sixth point F indicating a composition of 19 mol%.
る工程と、前記混合物からなる未焼結磁器シートを形成
する工程と、前記未焼結磁器シートを少なくとも2以上
の導電性ペースト膜で挟持させた積層物を形成する工程
と、前記積層物を非酸化性雰囲気中において熱処理する
工程と、前記熱処理を受けた積層物を酸化性雰囲気中に
おいて熱処理する工程とを備え、 前記未焼結の磁器粉末からなる混合物が、100.0重
量部の基本成分と、0.2〜5重量部の添加成分とから
なり、 前記基本成分が、 {(Ba1-W-XCaWSrX)0}K(Ti1-y-zZryRz)O2-z/2 (但し、Rは、Sc,Y,Gd,Dy,Ho,Er,Y
b,Tb,Tm及びLuから選択された1種または2種
以上の元素、 w,x,y,z,kは、 0≦w≦0.27 0<x≦0.37 0<y<0.26 0.05≦0.6x+y≦0.26 0.002≦z≦0.04 1.00≦k≦1.04 を満足する数値)であり、 前記添加成分がB2O3とSiO2とLi2Oからな
り、 前記B2O3と前記SiO2と前記Li2Oとの組成範
囲が、これらの組成をモル%で示す三角図において、 前記B2O3が1モル%、前記SiO2が50モル%、
前記Li2Oが49モル%の組成を示す第1の点Aと、 前記B2O3が50モル%、前記SiO2が1モル%、
前記Li2Oが49モル%の組成を示す第2の点Bと、 前記B2O3が80モル%、前記SiO2が1モル%、
前記Li2Oが19モル%の組成を示す第3の点Cと、 前記B2O3が89モル%、前記SiO2が10モル
%、前記Li2Oが1モル%の組成を示す第4の点D
と、 前記B2O3が19モル%、前記SiO2が80モル
%、前記Li2Oが1モル%の組成を示す第5の点E
と、 前記B2O3が1モル%、前記SiO2が80モル%、
前記Li2Oが19モル%の組成を示す第6の点Fと をこの順に結ぶ6本の直線で囲まれた領域内にあること
を特徴とする磁器コンデンサの製造方法。2. A step of preparing a mixture of unsintered porcelain powder, a step of forming an unsintered porcelain sheet of the mixture, and a step of forming at least two or more conductive paste films of the unsintered porcelain sheet. And a step of heat-treating the laminate in a non-oxidizing atmosphere, and a step of heat-treating the laminate subjected to the heat treatment in an oxidizing atmosphere. The mixture of the porcelain powder for binding comprises 100.0 parts by weight of the basic component and 0.2 to 5 parts by weight of the additional component, and the basic component is ((Ba 1-WX Ca W Sr X ) 0 } K (Ti 1-yz Zr y R z ) O 2-z / 2 (where R is Sc, Y, Gd, Dy, Ho, Er, Y
one or more elements selected from b, Tb, Tm and Lu, w, x, y, z, k are: 0 ≦ w ≦ 0.27 0 <x ≦ 0.37 0 <y <0 .26 0.05 ≦ 0.6x + y ≦ 0.26 0.002 ≦ z ≦ 0.04 1.00 ≦ k ≦ 1.04), wherein the additive components are B 2 O 3 and SiO 2 And Li 2 O, the composition range of B 2 O 3 , SiO 2, and Li 2 O is a triangle diagram showing these compositions in mol%, where B 2 O 3 is 1 mol%, SiO 2 is 50 mol%,
A first point A showing a composition of Li 2 O of 49 mol%, B 2 O 3 of 50 mol%, SiO 2 of 1 mol%,
A second point B showing a composition of 49 mol% of Li 2 O, 80 mol% of B 2 O 3 and 1 mol% of SiO 2 .
A third point C showing a composition of Li 2 O of 19 mol%, a third point C showing a composition of B 2 O 3 of 89 mol%, a content of SiO 2 of 10 mol%, and a composition of Li 2 O of 1 mol%. Point D of 4
And a fifth point E indicating a composition in which B 2 O 3 is 19 mol%, SiO 2 is 80 mol%, and Li 2 O is 1 mol%.
And B 2 O 3 is 1 mol%, SiO 2 is 80 mol%,
A method for manufacturing a porcelain capacitor, wherein the Li 2 O is in a region surrounded by six straight lines connecting in this order with a sixth point F having a composition of 19 mol%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2163922A JPH0614501B2 (en) | 1990-06-20 | 1990-06-20 | Porcelain capacitor and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2163922A JPH0614501B2 (en) | 1990-06-20 | 1990-06-20 | Porcelain capacitor and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0453216A JPH0453216A (en) | 1992-02-20 |
| JPH0614501B2 true JPH0614501B2 (en) | 1994-02-23 |
Family
ID=15783374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2163922A Expired - Fee Related JPH0614501B2 (en) | 1990-06-20 | 1990-06-20 | Porcelain capacitor and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0614501B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7049532B2 (en) | 2003-08-22 | 2006-05-23 | Kabushiki Kaisha Toshiba | Electric contacts, electric contact apparatus and method for detecting abrasion of the electric contacts |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0678189B2 (en) * | 1984-10-20 | 1994-10-05 | 京セラ株式会社 | Non-reducing high dielectric constant dielectric ceramic composition |
| JPS61147404A (en) * | 1984-12-18 | 1986-07-05 | 太陽誘電株式会社 | Dielectric ceramic composition |
-
1990
- 1990-06-20 JP JP2163922A patent/JPH0614501B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7049532B2 (en) | 2003-08-22 | 2006-05-23 | Kabushiki Kaisha Toshiba | Electric contacts, electric contact apparatus and method for detecting abrasion of the electric contacts |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0453216A (en) | 1992-02-20 |
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