JPH0616055B2 - Spring contact type probe - Google Patents
Spring contact type probeInfo
- Publication number
- JPH0616055B2 JPH0616055B2 JP60159625A JP15962585A JPH0616055B2 JP H0616055 B2 JPH0616055 B2 JP H0616055B2 JP 60159625 A JP60159625 A JP 60159625A JP 15962585 A JP15962585 A JP 15962585A JP H0616055 B2 JPH0616055 B2 JP H0616055B2
- Authority
- JP
- Japan
- Prior art keywords
- contact type
- probe
- type probe
- spring contact
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 title claims description 36
- 235000014676 Phragmites communis Nutrition 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000012360 testing method Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 description 26
- 238000005516 engineering process Methods 0.000 description 8
- 239000004020 conductor Substances 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明はスプリング・コンタクト式プローブ、詳しくは
各種回路基板の電気特性、斗に高周波電圧特性の測定に
用いられるスプリング・コンタクト式プローブの改良に
関する。Description: TECHNICAL FIELD The present invention relates to a spring contact type probe, and more particularly to an improvement of a spring contact type probe used for measuring electrical characteristics of various circuit boards and high frequency voltage characteristics. .
近年、ニューメディア、ＯＡ、光通信、半導体などの急
激な技術進歩が行われており、これに伴い所謂「部品と
部品の接点に係る接点技術（コンタクト・テクノロジ
ー）」ならびに「接点を接続する接続技術（コネクショ
ン・テクノロジー）」の高精密化、高性能化が各種新技
術に共通の基礎技術として強く要求されている。In recent years, rapid technological progress has been made in new media, OA, optical communication, semiconductors, etc., and so-called "contact technology related to the contact between parts (contact technology)" and "connection for connecting contacts". High precision and high performance of "connection technology" are strongly required as basic technology common to various new technologies.
具体例として、半導体、ＬＳＩ検査システム、中でもプ
リント基板やセラミックの多層基板など各種回路基板の
電気特性、例えば高周波電圧を測定する検査工程におい
て、検査装置の主要部分を構成するコンタクト式プロー
ブ、特にスプリング・コンタクト式プローブは、従来多
数の測定信号を上記電気特性を比較チェックして検査す
るという課題に対して、所謂接点技術並びに接続技術に
係わるものであるが、測定中に測定信号の入出力をプロ
ーブ自体で制御することが出来ず、配線が多数となり高
密度実装は困難であった。又、数多くのプローブを同時
に使用する測定の場合やプローブの測定信号の比較、チ
ェックなど論理処理を行う場合など大規模な計測システ
ム構成は、その実現が困難であった。しおおかも、１台
の測定装置で多目的測定、例えばプログラマブル・コン
トロールの実現に困難であった。また、スイッチ回路を
プローブのニードル近傍に設けることができず電気的特
性に悪影響を及ぼしていた。As a specific example, in a semiconductor or LSI inspection system, in particular, in an inspection process for measuring electrical characteristics of various circuit boards such as a printed circuit board and a ceramic multilayer board, for example, a high frequency voltage, a contact-type probe that constitutes a main part of the inspection device, particularly a spring. The contact probe is related to the so-called contact technology and connection technology for the conventional problem of inspecting a large number of measurement signals by comparing and checking the above electrical characteristics. It was difficult to control with the probe itself, and there were many wirings, making high-density mounting difficult. Further, it has been difficult to realize a large-scale measurement system configuration in the case of measurement using a large number of probes at the same time or in the case of performing logical processing such as comparison and check of measurement signals of the probes. It was difficult to realize multi-purpose measurement, for example, programmable control, with one measuring device. Further, the switch circuit cannot be provided near the needle of the probe, which adversely affects the electrical characteristics.
ところが最近、スプリング・コンタクト式のプローブに
対して測定中の入出力信号の自動処理，高密度実装，大
規模な計測システムの構成などの実現をはかりたいとい
う要望が高まり、この要望に応えるため、各種回路基板
など検査対象物の電気特性をくずさずにしかも測定中に
測定信号の入出力を制御可能としたスプリング・コンタ
クト式プローブが必要になる。Recently, however, there has been a growing demand for automatic processing of input / output signals during measurement, high-density mounting, and configuration of large-scale measurement systems for spring-contact type probes. A spring-contact probe that can control the input and output of measurement signals during measurement without compromising the electrical characteristics of test objects such as various circuit boards is required.
また、数多くのプローブを１台の測定装置で計測可能と
し、多目的測定の応用計測を実現できる前述したスプリ
ング・コンタクト式プローブが必要になる。In addition, the above-mentioned spring contact type probe that can measure a large number of probes with a single measuring device and can realize applied measurement of multipurpose measurement is required.
本発明は前記の如くスプリング・コンタクト式プローブ
のコネクタ部にスイッチング回路を内蔵して、該スイッ
チング回路、例えばリード・リレーのＯＮ−ＯＦＦ制御
によりプローブの測定信号をプローブ外部から入出力制
御できるようにし、かつ多数のプローブを逐次切り替え
ることにより１台の測定装置で自動計測できるように
し、遅延回路を用いて安定した測定信号が得られるま
で、誤測定信号の入力を遅延させることができ、しかも
測定信号に所定量以上の不安定要素が加わった場合にプ
ローブの動作を自動的にＯＦＦにできるようにするもの
である。As described above, according to the present invention, a switching circuit is built in the connector portion of the spring contact type probe, and the measurement signal of the probe can be input / output controlled from outside the probe by ON / OFF control of the switching circuit, for example, a reed relay. In addition, by sequentially switching a large number of probes, it is possible to perform automatic measurement with a single measuring device, and it is possible to delay the input of erroneous measurement signals until a stable measurement signal is obtained using a delay circuit. The operation of the probe can be automatically turned off when an unstable element of a predetermined amount or more is added to the signal.
以下、図面を用いて本発明の実施例を説明する。 Embodiments of the present invention will be described below with reference to the drawings.
図面は、本発明の一実施例を示す部分断面斜視図であ
る。The drawings are partial cross-sectional perspective views showing an embodiment of the present invention.
まず構成を説明すると、（１）はプローブ先端部であ
り、例えば先の尖ったコンタクト部（２ａ）が接触圧力
を受けるとバネの反発力を生じて圧着されるスプリング
（３）と、該スプリング（３）を冠装するスプリングプ
ローブ（４）とから成る軸芯部（１ａ）を有する。First, the structure will be described. (1) is a probe tip part, for example, a spring (3) which is pressed against the pointed contact part (2a) by the repulsive force of the spring when the contact pressure is applied, and the spring (3). It has a shaft core portion (1a) consisting of a spring probe (4) which is equipped with (3).
この軸芯部（１ａ）は上記ニードル（２）を突出された
状態でテフロン又は、ポリイミド・セラミックなどを素
材とする円筒型の誘導体（５）中心部に装着固定され、
更に該誘電体（５）の外部は銅又はステンレス・スチー
ル製の同軸状外部導体（６）により密着装着される。The shaft core portion (1a) is attached and fixed to the central portion of a cylindrical derivative (5) made of Teflon or polyimide ceramics with the needle (2) protruding.
Further, the outside of the dielectric (5) is closely attached by a coaxial outer conductor (6) made of copper or stainless steel.
（７）は一端に上記プローブ先端部（１）を、他端に同
軸ケーブル（１０）を配設して双方を電気的に接続する
コネクタ部であり、該コネクタ部（７）内部にはその中
心軸上に両端を内部導体（９）で直線状に接合されたリ
ードリレー（８）と、上記リードリレー（８）のリレー
接点（８ａ）を保護する保護ガラス（８ｂ）を隔てて上
記リレー接点（８ａ）に近接対峙したコイル（１０）と
が配設される。上記コイル（１０）は計測装置にてＯＮ
−ＯＦＦ動作可能に接続されている。（１１）は同軸ケ
ーブルで、上記コネクタ部（７）により上記プローブ先
端部（１）と一体に取り付けられ、電気的には上記リー
ドリレー（８）を含む内部導体（９）で接続される。
（１２）は上記リードリレー（８）のコイル（１０）の
駆動端子側に接続された遅延回路である。Reference numeral (7) denotes a connector portion for disposing the probe tip portion (1) at one end and the coaxial cable (10) at the other end to electrically connect the both, and the connector portion (7) is internally provided with the connector portion (1). The relay is separated by a reed relay (8) linearly joined at both ends by an inner conductor (9) on the central axis and a protective glass (8b) for protecting the relay contact (8a) of the reed relay (8). The contact (8a) and the coil (10) facing each other are arranged. The coil (10) is turned on by the measuring device.
-OFF Operationally connected. Reference numeral (11) is a coaxial cable, which is integrally attached to the probe tip portion (1) by the connector portion (7) and electrically connected by an internal conductor (9) including the reed relay (8).
(12) is a delay circuit connected to the drive terminal side of the coil (10) of the reed relay (8).
次に本実施例の作用を説明する。Next, the operation of this embodiment will be described.
ニードル（２）のコンタクト部（２ａ）が試験片（図示
せず）に接触した状態で保持され、リードリレー（８）
の駆動端子側に備えた遅延回路（１２）を用いて、安定
した測定信号が得られるまで、誤測定信号の入力を遅延
させることができる。一方、この遅延作用を利用して測
定装置（図示せず）の計測スピードに対応して、計測実
行プローブの切り替えを行わせることができる。The contact portion (2a) of the needle (2) is held in contact with a test piece (not shown), and the reed relay (8) is held.
By using the delay circuit (12) provided on the drive terminal side of, the input of the erroneous measurement signal can be delayed until a stable measurement signal is obtained. On the other hand, by utilizing this delay action, the measurement execution probe can be switched according to the measurement speed of the measurement device (not shown).
また、この実施例によれば、例えば１００本以上のプロ
ーブを用いた大規模な検査システムにおいて、各プロー
ブに備えられたリードリレー（８）のＯＮ／ＯＦＦ動作
によりそれぞれからの異なる測定信号を１台の測定装置
で処理される。In addition, according to this embodiment, in a large-scale inspection system using, for example, 100 or more probes, different measurement signals from the respective reed relays (8) provided on each probe It is processed by a single measuring device.
次に、上記実施例の遅延回路（１２）に、図示しない論
理回路を接続すれば、測定信号に所定量以上の不安定要
素が加わった場合に、回路によりプローブの動作を自動
的にＯＦＦにすることができる。Next, if a logic circuit (not shown) is connected to the delay circuit (12) of the above embodiment, the probe operation is automatically turned off by the circuit when an unstable element of a predetermined amount or more is added to the measurement signal. can do.
また、上記リードリレー（８）は半導体で構成されたス
イッチング回路であってもよく、従って、本発明の特許
請求の範囲に反することなく種々変更することができ
る。Further, the reed relay (8) may be a switching circuit made of a semiconductor, and therefore can be variously modified without violating the claims of the present invention.
以上説明したように、本発明によればスプリング・コン
タクト式プローブのコネクタ部にスイッチング回路を内
蔵したことにより、測定中に測定信号の入出力をプロー
ブ部から制御することができ、更に遅延回路を用いて安
定した測定信号が得られるまで、誤測定信号の入力を遅
延させることができ、しかも数多くのプローブを１台の
測定装置で、例えばプログラマブル・コントローラによ
り計測可能とし、多目的測定の応用計測を実現できるな
ど大なる効果が得られる。As described above, according to the present invention, by incorporating the switching circuit in the connector portion of the spring contact type probe, the input / output of the measurement signal can be controlled from the probe portion during the measurement, and the delay circuit can be further provided. It is possible to delay the input of erroneous measurement signals until a stable measurement signal is obtained, and it is possible to measure a large number of probes with one measuring device, for example, using a programmable controller. It is possible to achieve such a great effect.
図面は本発明の一実施例を示すスプリング・コンタクト
式プローブの部分断面斜視図である。 （２）……ニードル、（７）……コネクタ部 （８）……リードリレー、（９）……内部導体 (10)……コイル、(11)……同軸ケーブル (12)……遅延回路The drawing is a partial cross-sectional perspective view of a spring contact type probe showing an embodiment of the present invention. (2) …… Needle, (7) …… Connector section (8) …… Reed relay, (9) …… Inner conductor (10) …… Coil, (11) …… Coaxial cable (12) …… Delay circuit
Claims (3)
と、該ニードルに装着され上記コンタクト部と試験片と
の接触圧力によりバネの反発力が生じて圧着されるスプ
リングとを有するプローブ先端部と、同軸ケーブルとの
接続のためのコネクタ部と、上記コネクタ部を介して上
記プローブ先端部に一体に取り付けられ電気的に接続さ
れた同軸ケーブルとを備えたスプリング・コンタクト式
プローブにおいて、上記コネクタ部にスイッチング回路
を内蔵し、該スイッチング回路の駆動端子に遅延回路と
論理回路とを接続したことを特徴とするスプリング・コ
ンタクト式プローブ。1. A probe tip portion having a needle having a contact portion formed at its tip, and a spring attached to the needle and having a repulsive force generated by a contact pressure between the contact portion and a test piece to be crimped. In a spring contact type probe having a connector portion for connection with a coaxial cable, and a coaxial cable integrally attached and electrically connected to the probe tip through the connector portion, A spring contact type probe having a built-in switching circuit, wherein a delay circuit and a logic circuit are connected to a drive terminal of the switching circuit.
ることを特徴とする特許請求の範囲第１項記載のスプリ
ング・コンタクト式プローブ。2. The spring contact type probe according to claim 1, wherein the switching circuit is a reed relay.
たことを特徴とする特許請求の範囲第１項記載のスプリ
ング・コンタクト式プローブ。3. The spring contact type probe according to claim 1, wherein the switching circuit is made of a semiconductor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60159625A JPH0616055B2 (en) | 1985-07-19 | 1985-07-19 | Spring contact type probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60159625A JPH0616055B2 (en) | 1985-07-19 | 1985-07-19 | Spring contact type probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6221065A JPS6221065A (en) | 1987-01-29 |
| JPH0616055B2 true JPH0616055B2 (en) | 1994-03-02 |
Family
ID=15697807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60159625A Expired - Lifetime JPH0616055B2 (en) | 1985-07-19 | 1985-07-19 | Spring contact type probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0616055B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6417467U (en) * | 1987-07-21 | 1989-01-27 | ||
| US5225773A (en) * | 1992-02-26 | 1993-07-06 | Interconnect Devices, Inc. | Switch probe |
| DE102017004336A1 (en) * | 2017-05-05 | 2018-11-08 | Friedrich-Alexander-Universität Erlangen-Nürnberg | Device and method for contacting an electronic or electrical system |
| CN110726902B (en) * | 2019-11-01 | 2025-04-11 | 华北电力科学研究院有限责任公司 | A DC grounding protection line detector |
| CN111491432A (en) * | 2020-05-22 | 2020-08-04 | 安徽理工大学 | A Multi-Channel Switched Langmuir Probe Measurement System |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5216384B2 (en) * | 1972-05-02 | 1977-05-09 | ||
| JPS5613753U (en) * | 1979-07-11 | 1981-02-05 | ||
| JPS5890176A (en) * | 1981-11-26 | 1983-05-28 | Anritsu Corp | Probe |
| JPS59189168U (en) * | 1983-06-03 | 1984-12-15 | アンリツ株式会社 | logic data analyzer |
-
1985
- 1985-07-19 JP JP60159625A patent/JPH0616055B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6221065A (en) | 1987-01-29 |
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