JPH0618856B2 - Liquid photosensitive resin composition and image forming method using the same - Google Patents
Liquid photosensitive resin composition and image forming method using the sameInfo
- Publication number
- JPH0618856B2 JPH0618856B2 JP61030574A JP3057486A JPH0618856B2 JP H0618856 B2 JPH0618856 B2 JP H0618856B2 JP 61030574 A JP61030574 A JP 61030574A JP 3057486 A JP3057486 A JP 3057486A JP H0618856 B2 JPH0618856 B2 JP H0618856B2
- Authority
- JP
- Japan
- Prior art keywords
- weight
- photosensitive resin
- resin composition
- liquid photosensitive
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007788 liquid Substances 0.000 title claims description 66
- 239000011342 resin composition Substances 0.000 title claims description 66
- 238000000034 method Methods 0.000 title claims description 29
- 238000000576 coating method Methods 0.000 claims description 46
- 239000011248 coating agent Substances 0.000 claims description 45
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 claims description 18
- 150000001875 compounds Chemical class 0.000 claims description 18
- 239000007864 aqueous solution Substances 0.000 claims description 14
- 229930185605 Bisphenol Natural products 0.000 claims description 11
- 125000003700 epoxy group Chemical group 0.000 claims description 8
- 239000004593 Epoxy Substances 0.000 claims description 7
- 150000008065 acid anhydrides Chemical class 0.000 claims description 7
- 238000013007 heat curing Methods 0.000 claims description 7
- 239000003999 initiator Substances 0.000 claims description 7
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 claims description 7
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 6
- 239000003054 catalyst Substances 0.000 claims description 6
- 239000007795 chemical reaction product Substances 0.000 claims description 6
- 239000010408 film Substances 0.000 description 48
- -1 polyethylene terephthalate Polymers 0.000 description 39
- OISVCGZHLKNMSJ-UHFFFAOYSA-N 2,6-dimethylpyridine Chemical compound CC1=CC=CC(C)=N1 OISVCGZHLKNMSJ-UHFFFAOYSA-N 0.000 description 16
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 16
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 15
- 239000003795 chemical substances by application Substances 0.000 description 15
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 14
- 238000000016 photochemical curing Methods 0.000 description 14
- 229910000679 solder Inorganic materials 0.000 description 14
- 229920002120 photoresistant polymer Polymers 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 11
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 10
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 10
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 9
- 150000001412 amines Chemical class 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 9
- 239000010949 copper Substances 0.000 description 9
- 239000000243 solution Substances 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 8
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 8
- 238000001723 curing Methods 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 7
- 239000002202 Polyethylene glycol Substances 0.000 description 7
- 239000002270 dispersing agent Substances 0.000 description 7
- 239000003822 epoxy resin Substances 0.000 description 7
- 150000002148 esters Chemical class 0.000 description 7
- 239000003960 organic solvent Substances 0.000 description 7
- 229920000647 polyepoxide Polymers 0.000 description 7
- 229920001223 polyethylene glycol Polymers 0.000 description 7
- 229910000029 sodium carbonate Inorganic materials 0.000 description 7
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 6
- VVJKKWFAADXIJK-UHFFFAOYSA-N Allylamine Chemical compound NCC=C VVJKKWFAADXIJK-UHFFFAOYSA-N 0.000 description 6
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 6
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 239000002518 antifoaming agent Substances 0.000 description 6
- HQABUPZFAYXKJW-UHFFFAOYSA-N butan-1-amine Chemical compound CCCCN HQABUPZFAYXKJW-UHFFFAOYSA-N 0.000 description 6
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 6
- 239000004014 plasticizer Substances 0.000 description 6
- 238000007665 sagging Methods 0.000 description 6
- 239000000600 sorbitol Substances 0.000 description 6
- 229910015900 BF3 Inorganic materials 0.000 description 5
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 5
- 239000002253 acid Substances 0.000 description 5
- 238000012644 addition polymerization Methods 0.000 description 5
- 239000003063 flame retardant Substances 0.000 description 5
- 239000003112 inhibitor Substances 0.000 description 5
- 229920000768 polyamine Polymers 0.000 description 5
- UWFRVQVNYNPBEF-UHFFFAOYSA-N 1-(2,4-dimethylphenyl)propan-1-one Chemical compound CCC(=O)C1=CC=C(C)C=C1C UWFRVQVNYNPBEF-UHFFFAOYSA-N 0.000 description 4
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 4
- XWKFPIODWVPXLX-UHFFFAOYSA-N 2-methyl-5-methylpyridine Natural products CC1=CC=C(C)N=C1 XWKFPIODWVPXLX-UHFFFAOYSA-N 0.000 description 4
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 4
- LCFVJGUPQDGYKZ-UHFFFAOYSA-N Bisphenol A diglycidyl ether Chemical compound C=1C=C(OCC2OC2)C=CC=1C(C)(C)C(C=C1)=CC=C1OCC1CO1 LCFVJGUPQDGYKZ-UHFFFAOYSA-N 0.000 description 4
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 4
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 4
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 description 4
- 244000028419 Styrax benzoin Species 0.000 description 4
- 235000000126 Styrax benzoin Nutrition 0.000 description 4
- 235000008411 Sumatra benzointree Nutrition 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 125000001931 aliphatic group Chemical group 0.000 description 4
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 4
- 229960002130 benzoin Drugs 0.000 description 4
- WGQKYBSKWIADBV-UHFFFAOYSA-N benzylamine Chemical compound NCC1=CC=CC=C1 WGQKYBSKWIADBV-UHFFFAOYSA-N 0.000 description 4
- PAFZNILMFXTMIY-UHFFFAOYSA-N cyclohexylamine Chemical compound NC1CCCCC1 PAFZNILMFXTMIY-UHFFFAOYSA-N 0.000 description 4
- 229940052303 ethers for general anesthesia Drugs 0.000 description 4
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 4
- 235000019382 gum benzoic Nutrition 0.000 description 4
- NAQMVNRVTILPCV-UHFFFAOYSA-N hexane-1,6-diamine Chemical compound NCCCCCCN NAQMVNRVTILPCV-UHFFFAOYSA-N 0.000 description 4
- 239000000178 monomer Substances 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 4
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- BMVXCPBXGZKUPN-UHFFFAOYSA-N 1-hexanamine Chemical compound CCCCCCN BMVXCPBXGZKUPN-UHFFFAOYSA-N 0.000 description 3
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 3
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 3
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 3
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 3
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical class N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 3
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 3
- 125000000217 alkyl group Chemical group 0.000 description 3
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 239000003086 colorant Substances 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 150000002170 ethers Chemical class 0.000 description 3
- 235000011187 glycerol Nutrition 0.000 description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 3
- 229940014800 succinic anhydride Drugs 0.000 description 3
- 150000005846 sugar alcohols Polymers 0.000 description 3
- 229920002554 vinyl polymer Polymers 0.000 description 3
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 2
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 2
- ORTVZLZNOYNASJ-UPHRSURJSA-N (z)-but-2-ene-1,4-diol Chemical compound OC\C=C/CO ORTVZLZNOYNASJ-UPHRSURJSA-N 0.000 description 2
- MYRTYDVEIRVNKP-UHFFFAOYSA-N 1,2-Divinylbenzene Chemical compound C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 2
- TXVWTOBHDDIASC-UHFFFAOYSA-N 1,2-diphenylethene-1,2-diamine Chemical compound C=1C=CC=CC=1C(N)=C(N)C1=CC=CC=C1 TXVWTOBHDDIASC-UHFFFAOYSA-N 0.000 description 2
- FRASJONUBLZVQX-UHFFFAOYSA-N 1,4-naphthoquinone Chemical compound C1=CC=C2C(=O)C=CC(=O)C2=C1 FRASJONUBLZVQX-UHFFFAOYSA-N 0.000 description 2
- BWZVCCNYKMEVEX-UHFFFAOYSA-N 2,4,6-Trimethylpyridine Chemical compound CC1=CC(C)=NC(C)=C1 BWZVCCNYKMEVEX-UHFFFAOYSA-N 0.000 description 2
- AOBIOSPNXBMOAT-UHFFFAOYSA-N 2-[2-(oxiran-2-ylmethoxy)ethoxymethyl]oxirane Chemical compound C1OC1COCCOCC1CO1 AOBIOSPNXBMOAT-UHFFFAOYSA-N 0.000 description 2
- YIWUKEYIRIRTPP-UHFFFAOYSA-N 2-ethylhexan-1-ol Chemical compound CCCCC(CC)CO YIWUKEYIRIRTPP-UHFFFAOYSA-N 0.000 description 2
- SZNYYWIUQFZLLT-UHFFFAOYSA-N 2-methyl-1-(2-methylpropoxy)propane Chemical compound CC(C)COCC(C)C SZNYYWIUQFZLLT-UHFFFAOYSA-N 0.000 description 2
- SVTBMSDMJJWYQN-UHFFFAOYSA-N 2-methylpentane-2,4-diol Chemical compound CC(O)CC(C)(C)O SVTBMSDMJJWYQN-UHFFFAOYSA-N 0.000 description 2
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 2
- KUDUQBURMYMBIJ-UHFFFAOYSA-N 2-prop-2-enoyloxyethyl prop-2-enoate Chemical compound C=CC(=O)OCCOC(=O)C=C KUDUQBURMYMBIJ-UHFFFAOYSA-N 0.000 description 2
- ZAXCZCOUDLENMH-UHFFFAOYSA-N 3,3,3-tetramine Chemical compound NCCCNCCCNCCCN ZAXCZCOUDLENMH-UHFFFAOYSA-N 0.000 description 2
- AYKYXWQEBUNJCN-UHFFFAOYSA-N 3-methylfuran-2,5-dione Chemical compound CC1=CC(=O)OC1=O AYKYXWQEBUNJCN-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- NTPLXRHDUXRPNE-UHFFFAOYSA-N 4-methoxyacetophenone Chemical compound COC1=CC=C(C(C)=O)C=C1 NTPLXRHDUXRPNE-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 2
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 2
- NIQCNGHVCWTJSM-UHFFFAOYSA-N Dimethyl phthalate Chemical compound COC(=O)C1=CC=CC=C1C(=O)OC NIQCNGHVCWTJSM-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- YNQLUTRBYVCPMQ-UHFFFAOYSA-N Ethylbenzene Chemical compound CCC1=CC=CC=C1 YNQLUTRBYVCPMQ-UHFFFAOYSA-N 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical compound C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- FQYUMYWMJTYZTK-UHFFFAOYSA-N Phenyl glycidyl ether Chemical compound C1OC1COC1=CC=CC=C1 FQYUMYWMJTYZTK-UHFFFAOYSA-N 0.000 description 2
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 2
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 2
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 2
- 239000007983 Tris buffer Substances 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
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- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000001632 sodium acetate Substances 0.000 description 1
- 235000017281 sodium acetate Nutrition 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- WSWCOQWTEOXDQX-MQQKCMAXSA-N sorbic acid group Chemical class C(\C=C\C=C\C)(=O)O WSWCOQWTEOXDQX-MQQKCMAXSA-N 0.000 description 1
- 229920003048 styrene butadiene rubber Polymers 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- AUHHYELHRWCWEZ-UHFFFAOYSA-N tetrachlorophthalic anhydride Chemical compound ClC1=C(Cl)C(Cl)=C2C(=O)OC(=O)C2=C1Cl AUHHYELHRWCWEZ-UHFFFAOYSA-N 0.000 description 1
- FAGUFWYHJQFNRV-UHFFFAOYSA-N tetraethylenepentamine Chemical compound NCCNCCNCCNCCN FAGUFWYHJQFNRV-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- GTZCVFVGUGFEME-UHFFFAOYSA-N trans-aconitic acid Natural products OC(=O)CC(C(O)=O)=CC(O)=O GTZCVFVGUGFEME-UHFFFAOYSA-N 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- 239000001069 triethyl citrate Substances 0.000 description 1
- VMYFZRTXGLUXMZ-UHFFFAOYSA-N triethyl citrate Natural products CCOC(=O)C(O)(C(=O)OCC)C(=O)OCC VMYFZRTXGLUXMZ-UHFFFAOYSA-N 0.000 description 1
- 235000013769 triethyl citrate Nutrition 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- QXJQHYBHAIHNGG-UHFFFAOYSA-N trimethylolethane Chemical compound OCC(C)(CO)CO QXJQHYBHAIHNGG-UHFFFAOYSA-N 0.000 description 1
- XZZNDPSIHUTMOC-UHFFFAOYSA-N triphenyl phosphate Chemical compound C=1C=CC=CC=1OP(OC=1C=CC=CC=1)(=O)OC1=CC=CC=C1 XZZNDPSIHUTMOC-UHFFFAOYSA-N 0.000 description 1
- ODHXBMXNKOYIBV-UHFFFAOYSA-N triphenylamine Chemical compound C1=CC=CC=C1N(C=1C=CC=CC=1)C1=CC=CC=C1 ODHXBMXNKOYIBV-UHFFFAOYSA-N 0.000 description 1
- KJIOQYGWTQBHNH-UHFFFAOYSA-N undecanol Chemical compound CCCCCCCCCCCO KJIOQYGWTQBHNH-UHFFFAOYSA-N 0.000 description 1
- UGCDBQWJXSAYIL-UHFFFAOYSA-N vat blue 6 Chemical compound O=C1C2=CC=CC=C2C(=O)C(C=C2Cl)=C1C1=C2NC2=C(C(=O)C=3C(=CC=CC=3)C3=O)C3=CC(Cl)=C2N1 UGCDBQWJXSAYIL-UHFFFAOYSA-N 0.000 description 1
- ZTWTYVWXUKTLCP-UHFFFAOYSA-N vinylphosphonic acid Chemical class OP(O)(=O)C=C ZTWTYVWXUKTLCP-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003911 water pollution Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Epoxy Resins (AREA)
Description
【発明の詳細な説明】 (産業上の利用分野) 本発明は、液状感光性樹脂組成物およびそれを用いる画
像形成法に関し、さらに詳しくはプリント回路基板用ホ
トレジストとして好適であり、紫外線露光に対して高純
度、高解像度で、しかも光硬化後の塗膜の電気特性や機
械的特性にも優れた、熱硬化および光硬化がともに可能
な液状感光性樹脂組成物およびそれを用いる画像形成法
に関する。Description: TECHNICAL FIELD The present invention relates to a liquid photosensitive resin composition and an image forming method using the same, and more specifically, it is suitable as a photoresist for printed circuit boards and is suitable for exposure to ultraviolet light. Relates to a liquid photosensitive resin composition capable of both thermosetting and photocuring, which has high purity, high resolution, and excellent electrical and mechanical properties of a coating film after photocuring, and an image forming method using the same .
(従来の技術) 現在、プリント回路基板製造技術の分野では、超LSI
の高密度実装化に伴って導体間隔の縮小化が要求されて
おり、そのため高感度、高解像度で、かつ基板との密着
性に優れ、しかも光硬化後の塗膜の電気特性や機械的特
性にも優れた感光性樹脂組成物からなるプリント回路基
板用ホトレジストの出現が要望されている。(Prior Art) Currently, in the field of printed circuit board manufacturing technology, VLSI
Higher density packaging requires smaller conductor spacing, which results in high sensitivity, high resolution, excellent adhesion to the substrate, and electrical and mechanical properties of the coating film after photocuring. In particular, the advent of photoresists for printed circuit boards, which are composed of an excellent photosensitive resin composition, has been demanded.
また近年作業環境、水質汚濁等の問題から、アルカリ性
水溶液または水で現像できる感光性樹脂組成物からなる
プリント回路基板用ホトレジストの開発が望まれてい
る。In recent years, due to problems such as working environment and water pollution, it has been desired to develop a photoresist for a printed circuit board, which is composed of a photosensitive resin composition that can be developed with an alkaline aqueous solution or water.
従来、プリント回路基板用ホトレジストとしては、感光
性樹脂組成物の溶媒溶液を支持体、例えばポリエチレン
テレフタレートフィルム等の支持体上に塗布し、乾燥し
て得られるフィルムまたはシート状のホトレジストが開
発されている。しかしながら、これらのフィルムまたは
シート状のホトレジストの製造には、感光性樹脂組成物
の溶液を支持体上に塗布し、乾燥する操作が必要なた
め、経済的に高価となり、またラミネーターによるプリ
ント回路基板上への熱圧着時に気泡の巻き込み等により
プリント回路基板との密着不良が生じるという問題もあ
り、さらにフィルムまたはシートを作製する工程におい
て、有機溶剤を使用することから、作業環境の面におい
ても問題点を有する。Conventionally, as a photoresist for a printed circuit board, a film- or sheet-shaped photoresist obtained by applying a solvent solution of a photosensitive resin composition onto a support, for example, a support such as a polyethylene terephthalate film, and drying it has been developed. There is. However, the production of these film- or sheet-shaped photoresists requires an operation of applying a solution of a photosensitive resin composition onto a support and drying the solution, which is economically expensive and a printed circuit board using a laminator. There is also the problem of poor adhesion to the printed circuit board due to the inclusion of air bubbles during thermocompression bonding to the top, and also because of the use of an organic solvent in the process of making the film or sheet, there is also a problem in terms of the working environment. Have a point.
一方、プリント回路基板用ホトレジストとして液状感光
性樹脂組成物も知られている。この液状感光性樹脂組成
物は使用直前にプリント回路基板上に液状のままで直接
塗布されるため工程数が少なく、また液状であるため、
凹凸の激しい基板に対しても優れた画像を形成すること
ができ、例えば導体間隔の狭いプリント回路基板のため
のホトレジストとして好適である。On the other hand, liquid photosensitive resin compositions are also known as photoresists for printed circuit boards. Since this liquid photosensitive resin composition is directly applied on the printed circuit board in a liquid state immediately before use, the number of steps is small, and since it is a liquid,
An excellent image can be formed even on a substrate having severe irregularities, and is suitable as a photoresist for a printed circuit board having a narrow conductor interval, for example.
しかしながら、この液状感光性樹脂組成物も、プリント
回路基板上に液状感光性樹脂組成物を塗布した後、直接
パターンマスクを塗膜面に密着させて露光するとパター
ンマスクが汚れるという欠点を有する。However, this liquid photosensitive resin composition also has a defect that the pattern mask becomes dirty when the liquid photosensitive resin composition is applied onto the printed circuit board and then the pattern mask is directly brought into close contact with the surface of the coating film to be exposed.
このパターンマスク汚れを解決する方法として、従来、
液状感光性樹脂組成物の塗膜表面を、活性光線が透過す
ることのできる透明性フィルムでおおった後、透明性フ
ィルムの上にパターンマスクを密着させて露光する方
法、液状感光性樹脂組成物をプリント回路基板上に塗布
した後、露光前に化学的処理を施して塗膜表面の粘着性
をなくした後パターンマスクを塗膜表面に密着させて露
光する方法などが知られている。As a method for solving this pattern mask stain,
A method in which a coating film surface of a liquid photosensitive resin composition is covered with a transparent film capable of transmitting actinic rays, and then a pattern mask is brought into close contact with the transparent film to expose the liquid photosensitive resin composition. There is known a method in which after coating the composition on a printed circuit board, a chemical treatment is performed before the exposure to remove tackiness of the coating film surface, and then a pattern mask is brought into close contact with the coating film surface for exposure.
例えば特開昭58−24144号公報および同59−1
6396号公報には、活性光線を透過する透明な可撓性
支持体に、液状感光性樹脂組成物を均一な厚さに塗布
し、直ちに該可撓性支持体を移動して該液状感光性樹脂
組成物の塗布面をプリント回路基板に向けて一定圧で押
圧することにより、該プリント回路基板上に該液状感光
性樹脂組成物を一定厚に積層し、次いで露光し、可撓性
支持体を剥離し、現像することによるソルダーマスクの
製造方法が開示されている。この方法では、透明な可撓
性支持体上に液状感光性樹脂組成物を均一な厚さで塗布
した後、プリント回路基板に向けて一定圧で押圧すると
きに、プリント回路基板に凹凸があるために気泡の巻き
込みが生じ、画像中に気泡が少なからず生成し、半田付
け時の膨れや剥がれの原因になるという問題を生じる。
しかもこの方法は製造するプリント回路基板の面積と同
じ面積の活性光線を透過する透明な可撓性支持体を必要
とし、かかる支持体は繰返し使用できないため経済的で
ないという欠点もある。For example, JP-A-58-24144 and 59-1
No. 6396 discloses that a liquid photosensitive resin composition is applied to a transparent flexible support that transmits actinic rays to a uniform thickness, and the flexible support is immediately moved to move the liquid photosensitive resin composition. By pressing the coated surface of the resin composition toward the printed circuit board with a constant pressure, the liquid photosensitive resin composition is laminated on the printed circuit board to a constant thickness and then exposed to light to form a flexible support. There is disclosed a method for manufacturing a solder mask by peeling and developing. In this method, when the liquid photosensitive resin composition is applied on the transparent flexible support with a uniform thickness and then pressed at a constant pressure toward the printed circuit board, the printed circuit board has irregularities. As a result, air bubbles are entrapped, a large number of air bubbles are generated in the image, and this causes a problem of swelling or peeling during soldering.
Moreover, this method has the drawback that it is not economical because it requires a transparent flexible support that transmits actinic radiation in the same area as the area of the printed circuit board to be manufactured, and such a support cannot be used repeatedly.
例えば特開昭56−99339号公報、特開昭57−1
17139号公報、同57−173140号公報、同5
8−25630号公報および同58−61110号公報
には、露光前に紫外線照射による化学的処理により液状
感光性樹脂組成物の塗膜表面を硬化し粘着性をなくした
後、さらに紫外線照射を行なう方法が開示されている。
しかしながらこの方法は、紫外線照射時間により前硬化
時の露光と画像形成時の露光とのバランスをとるため
に、露光条件により光硬化後の塗膜の性質が微妙に変化
しやすく、また露光装置の微妙な変化により前硬化時の
硬化不足を起こし、パターンマスク汚れの原因になりや
すいという問題がある。For example, JP-A-56-99339 and JP-A-57-1
No. 17139, No. 57-173140, No. 5
In JP-A-8-25630 and JP-A-58-61110, after the coating film surface of the liquid photosensitive resin composition is cured by a chemical treatment by UV irradiation before exposure to remove tackiness, UV irradiation is further performed. A method is disclosed.
However, this method balances the exposure at the time of pre-curing and the exposure at the time of image formation by the ultraviolet irradiation time, so that the properties of the coating film after photo-curing are liable to change subtly depending on the exposure conditions, and There is a problem that a slight change causes insufficient curing at the time of pre-curing, which easily causes contamination of the pattern mask.
また特開昭59−147349号公報には、特定の液状
感光性樹脂組成物を用い、前硬化を熱重合で行ない、画
像形成を光架橋で行なう画像形成法が開示されている
が、この方法も露光前硬化における硬化度が操作条件に
より微妙な影響を受け、パターンマスク汚れの問題が完
全に解決されていない。Further, JP-A-59-147349 discloses an image forming method in which a specific liquid photosensitive resin composition is used, pre-curing is carried out by thermal polymerization, and image formation is carried out by photo-crosslinking. However, the degree of curing in the pre-exposure curing is slightly affected by the operating conditions, and the problem of pattern mask contamination has not been completely solved.
またシクロヘキサノン等の有機溶剤で現像しなければな
らないため作業環境上の問題も有する。Further, since it has to be developed with an organic solvent such as cyclohexanone, there is a problem in working environment.
(発明が解決しようとする問題点) 本発明の目的は、前記従来の技術的課題を解決し、プリ
ント回路基板上に泡のない均一な厚みの感光性樹脂層を
形成することができ、また感光性樹脂を塗布したプリン
ト回路基板を露光前に加熱硬化することにより感光性樹
脂塗膜表面の粘着性をなくして、塗膜表面とマスクとを
密着して露光することのできる、熱硬化および光硬化が
ともに可能で、しかもアルカリ性水溶液により現像可能
な液状感光性樹脂組成物およびそれを用いる画像形成法
を提供することにある。(Problems to be Solved by the Invention) An object of the present invention is to solve the above-mentioned conventional technical problems and to form a photosensitive resin layer having a uniform thickness without bubbles on a printed circuit board, and By removing the tackiness of the photosensitive resin coating film surface by heating and curing the printed circuit board coated with the photosensitive resin before exposure, it is possible to expose the coating film surface and the mask in close contact with each other. It is an object of the present invention to provide a liquid photosensitive resin composition which is both photocurable and can be developed with an alkaline aqueous solution, and an image forming method using the same.
(問題点を解決するための手段) 本発明は、(A)少なくとも1個のカルボキシル基を有
するビスフェノール型エポキシアクリレートと酸無水物
との反応生成物5〜60重量%、(B)少なくとも1個
のエポキシ基を有する液状エポキシ化合物(但し前記
(A)成分を除く。)5〜40重量%、(C)少なくと
も1個のエチレン性不飽和二重結合を有する光重合性化
合物10〜60重量%、(D)エポキシ基を熱反応させ
ることができる熱反応性触媒0.01〜10重量%および
(E)光重合開始剤0.001〜15重量%を含有してなる
液状感光性樹脂組成物に関する。(Means for Solving Problems) The present invention includes (A) 5 to 60% by weight of a reaction product of a bisphenol epoxy acrylate having at least one carboxyl group and an acid anhydride, and (B) at least one. 5 to 40% by weight of a liquid epoxy compound having an epoxy group (excluding the component (A)), and (C) 10 to 60% by weight of a photopolymerizable compound having at least one ethylenically unsaturated double bond. , (D) 0.01 to 10% by weight of a heat-reactive catalyst capable of thermally reacting an epoxy group, and (E) a photopolymerization initiator of 0.001 to 15% by weight.
また本発明は、前記液状感光性樹脂組成物を、基板上に
塗布し、加熱硬化して非粘着性となし、次いで硬化塗膜
にパターンマスクを密着させて露光し、アルカリ性水溶
液により現像することを特徴とする画像形成法に関す
る。In the present invention, the liquid photosensitive resin composition is applied on a substrate and cured by heating to make it non-tacky, and then a pattern mask is brought into close contact with the cured coating film to be exposed to light and developed with an alkaline aqueous solution. The present invention relates to an image forming method.
本発明における少なくとも1個のカルボキシル基を有す
るビスフェノール型エポキシアクリレートと酸無水物と
の反応生成物(A成分)としては、 例えば一般式(I) または一般式(II) 〔式中、Xは (qは2〜6の整数)、 (pは4もしくは5の整数)、 (R1およびR2は水素原子、炭素数1〜6のアルキル
基もしくはフェニル基を示す)、 −S−、−CONR3−(R3は水素原子、炭素数1〜
6のアルキル基もしくはフェニル基を示す)、 または (R4は炭素数1〜6のアルキル基もしくはフェニル基
を示す)を、Rは水素原子またはメチル基を、mは1〜
300の整数を、nは0〜300の整数を意味する〕で
表わされるビスフェノール型エポキシアクリレートの脂
肪族水酸基の一部または全てを、酸無水物と触媒の存在
下に、反応させて生成する化合物が挙げられる。Examples of the reaction product (component A) of the bisphenol type epoxy acrylate having at least one carboxyl group and the acid anhydride in the present invention include general formula (I) Or general formula (II) [Where X is (Q is an integer of 2 to 6), (P is an integer of 4 or 5), (R 1 and R 2 represent a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or a phenyl group), —S—, —CONR 3 — (R 3 is a hydrogen atom, having 1 to 1 carbon atoms.
6 represents an alkyl group or a phenyl group), Or (R 4 represents an alkyl group having 1 to 6 carbon atoms or a phenyl group), R is a hydrogen atom or a methyl group, and m is 1
A compound produced by reacting a part or all of the aliphatic hydroxyl groups of the bisphenol type epoxy acrylate represented by the integer of 300, n is an integer of 0 to 300] in the presence of an acid anhydride and a catalyst. Is mentioned.
一般式(I)または(II)で表わされるビスフェノール
型エポキシアクリレートと反応させる酸無水物として
は、例えば無水コハク酸、無水メチルコハク酸、無水
2,3−ジメチルコハク酸、無水2,2−ジメチルコハ
ク酸、無水エチルコハク酸、無水ドデセニルコハク酸、
無水ノネニルコハク酸、無水マレイン酸、無水メチルマ
レイン酸、無水2,3−ジメチルマレイン酸、無水2−
クロロマレイン酸、無水2,3−ジクロロマレイン酸、
無水ブロモマレイン酸、無水イタコン酸、無水シトラコ
ン酸、無水シスアコニット酸、無水フタル酸、無水テト
ラクロロフタル酸、無水シス−△4−テトラヒドロフタ
ル酸、無水テトラブロモフタル酸、無水3−ニトロフタ
ル酸、無水ヘキサヒドロフタル酸、無水トリメリット
酸、無水1,8−ナフタレンジカルボン酸等が挙げられ
る。Examples of the acid anhydride to be reacted with the bisphenol type epoxy acrylate represented by the general formula (I) or (II) include succinic anhydride, methylsuccinic anhydride, 2,3-dimethylsuccinic anhydride and 2,2-dimethylsuccinic anhydride. Acid, ethylsuccinic anhydride, dodecenylsuccinic anhydride,
Nonenylsuccinic anhydride, maleic anhydride, methylmaleic anhydride, 2,3-dimethylmaleic anhydride, 2-anhydride
Chloromaleic acid, 2,3-dichloromaleic anhydride,
Anhydride bromo maleic acid, itaconic anhydride, citraconic anhydride, cis-aconitic acid, phthalic anhydride, tetrachlorophthalic anhydride, cis - △ 4 - tetrahydrophthalic anhydride, tetrabromophthalic anhydride, 3-nitrophthalic acid, Hexahydrophthalic anhydride, trimellitic anhydride, 1,8-naphthalenedicarboxylic anhydride, etc. may be mentioned.
この際用いられる触媒としては、例えば硫酸、塩化ス
ズ、酢酸クロリド等の酸、酢酸ナトリウム、ピリジン、
ルチジン、コリジン等の塩基が用いられる。Examples of the catalyst used at this time include acids such as sulfuric acid, tin chloride and acetic acid chloride, sodium acetate, pyridine,
Bases such as lutidine and collidine are used.
一般式(I)または(II)で表わされる化合物中の下記
式(III)の繰返し単位は、 例えばビスフェノール系化合物とエピクロルヒドリンと
の反応により生成する。ここにおけるビスフェノール系
化合物としては、例えば4,4′−イソプロピリデンジ
フェノール、4,4′−(ヘキサフルオロイソプロピリ
デン)ジフェノール、ビス(4−ヒドロキシフェニル)
メタン、4,4′−スルホキシド、4,4′−スルホニ
ルジフェノール、4,4′−チオジフェノール、p,
p′−ジヒドロキシベンズアニリド、4,4′−ジヒド
ロキシベンゾフェノン、p,p′−ジヒドロキシジフェ
ニルジメチルシラン等が挙げられる。The repeating unit of the following formula (III) in the compound represented by the general formula (I) or (II) is For example, it is produced by the reaction of a bisphenol compound and epichlorohydrin. Examples of the bisphenol compound here include 4,4'-isopropylidenediphenol, 4,4 '-(hexafluoroisopropylidene) diphenol, and bis (4-hydroxyphenyl).
Methane, 4,4'-sulfoxide, 4,4'-sulfonyldiphenol, 4,4'-thiodiphenol, p,
Examples thereof include p'-dihydroxybenzanilide, 4,4'-dihydroxybenzophenone and p, p'-dihydroxydiphenyldimethylsilane.
前記A成分の化合物は、単独でまたは2種以上混合して
用いられる。The compounds of the component A may be used alone or in admixture of two or more.
本発明における前記A成分の配合量は、5〜60重量
%、好ましくは10〜40重量%である。この配合量が
5重量%未満の場合にはアルカリ性水溶液による現像性
が低下し、60重量%を超える場合には液状感光性樹脂
組成物の粘度が高くなり、塗布性が低下する。The blending amount of the component A in the present invention is 5 to 60% by weight, preferably 10 to 40% by weight. When the content is less than 5% by weight, the developability with an alkaline aqueous solution is lowered, and when it is more than 60% by weight, the viscosity of the liquid photosensitive resin composition is increased and the coating property is lowered.
本発明に用いらる少なくとも1個のエポキシ基を有する
液状エポキシ化合物(B成分)としては、例えばn−ブ
チルグリシジルエーテル、アリルグリシジルエーテル、
フェニルグリシジルエーテル、エチレングリコールジグ
リシジルエーテル、エチレングリコールフェニルグリシ
ジルエーテル、ポリエチレングリコールジグリシジルエ
ーテル、ポリエチレングリコールフェニルグリシジルエ
ーテル、ポリプロピレングリコールジグリシジルエーテ
ル、ネオペンチルグリコールジグリシジルエーテル、ス
テアリルグリシジルエーテル、デシルグリシジルエーテ
ル、ビスフェノールA−ジグリシジルエーテル、ビスフ
ェノールS−ジグリシジルエーテル、グリセロールモノ
グリシジルエーテル、グリセロールポリグリシジルエー
テル、トリメチロールプロパンモノグリシジルエーテ
ル、トリメチロールプロパントリグリシジルエーテル、
ジグリセロールポリグリシジルエーテル、ポリグリセロ
ールポリグリシジルエーテル、ソルビトールポリグリシ
ジルエーテル等のグリシジル基を有するエーテル類、ジ
ブロムネオペンチルグリコールジグリシジルエーテル、
ジブロムフェニルグリシジルエーテル等のハロゲン原子
とグリシジル基を有するエーテル類、N,N−ジグリシ
ジルアニリン、N,N−ジグリシジルトルイジン等のグ
リシジル基を有するアミン類、およびフタル酸ジグリシ
ジルエステル、ソルビック酸グリシジルエステル、リノ
レイン酸グリシジルエステル、オレイン酸グリシジルエ
ステル、安息香酸グリシジルエステル等のグリシジル基
を有するエステル類およびグリシジルメタクリレート、
グリシジルアクリレート、クロトニルグリシジルエーテ
ル、マレイン酸モノアルキルエステルモノグリシジルエ
ステル等のエチレン性不飽和結合を有するエポキシ類が
挙げられる。これらの化合物は単独でまたは2種以上混
合して用いられる。Examples of the liquid epoxy compound (component B) having at least one epoxy group used in the present invention include n-butyl glycidyl ether, allyl glycidyl ether,
Phenyl glycidyl ether, ethylene glycol diglycidyl ether, ethylene glycol phenyl glycidyl ether, polyethylene glycol diglycidyl ether, polyethylene glycol phenyl glycidyl ether, polypropylene glycol diglycidyl ether, neopentyl glycol diglycidyl ether, stearyl glycidyl ether, decyl glycidyl ether, bisphenol A-diglycidyl ether, bisphenol S-diglycidyl ether, glycerol monoglycidyl ether, glycerol polyglycidyl ether, trimethylolpropane monoglycidyl ether, trimethylolpropane triglycidyl ether,
Ethers having a glycidyl group such as diglycerol polyglycidyl ether, polyglycerol polyglycidyl ether, sorbitol polyglycidyl ether, dibromoneopentyl glycol diglycidyl ether,
Ethers having a halogen atom and a glycidyl group such as dibromophenylglycidyl ether, amines having a glycidyl group such as N, N-diglycidylaniline, N, N-diglycidyltoluidine, and diglycidyl phthalate ester, sorbic acid Esters having a glycidyl group such as glycidyl ester, linoleic acid glycidyl ester, oleic acid glycidyl ester, benzoic acid glycidyl ester and glycidyl methacrylate,
Examples thereof include glycidyl acrylate, crotonyl glycidyl ether, and epoxy having an ethylenically unsaturated bond such as maleic acid monoalkyl ester monoglycidyl ester. These compounds may be used alone or in admixture of two or more.
B成分の配合量は5〜40重量%、好ましくは10〜3
0重量%である。この配合量が5重量%未満の場合には
液状感光性樹脂組成物の粘度が上昇し、プリント回路基
板上に均一な塗膜を形成することが困難となり、40重
量%を超える場合には露光前の熱硬化条件として高温か
つ長時間の加熱が必要となり、実用性が低下する。The amount of component B is 5-40% by weight, preferably 10-3.
It is 0% by weight. If the amount is less than 5% by weight, the viscosity of the liquid photosensitive resin composition increases, making it difficult to form a uniform coating film on the printed circuit board. As the previous thermosetting conditions, high temperature and long time heating are required, and the practicality is lowered.
本発明に用いられる少なくとも1個のエチレン性不飽和
二重結合を有する光重合性化合物(C成分)としては、
まず1価または多価アルコールのアクリル酸またはメタ
クリル酸のエステルが挙げられる。Examples of the photopolymerizable compound (component C) having at least one ethylenically unsaturated double bond used in the present invention include:
First, esters of acrylic acid or methacrylic acid of monohydric or polyhydric alcohols can be mentioned.
1価または多価アルコールのアクリル酸またはメタクリ
ル酸のエステルにおける1価アルコールとしては、例え
ばメタノール、エタノール、プロパノール、イソプロパ
ノール、n−ブタノール、イソブタノール、t−ブタノ
ール、シクロヘキシルアルコール、ベンジルアルコー
ル、オクチルアルコール、2−エチルヘキサノール、ラ
ウリルアルコール、n−デカノール、ウンデカノール、
セチルアルコール、ステアリルアルコール、メトキシエ
チルアルコール、エトキシエチルアルコール、ブトキシ
エチルアルコール、ポリエチレングリコールモノメチル
アルコール、ポリエチレングリコールモノエチルアルコ
ール、2−ヒドロキシエチルアルコール、2−ヒドロキ
シプロピルアルコール、2−ヒドロキシ−3−クロロプ
ロパン、ジメチルアミノエタノール、ジエチルアミノエ
タノール、グリシドール、2−トリメトキシシリルエタ
ノール、エチレンクロルヒドリン、エチレンブロムヒド
リン、2,3−ジブロムプロパノール、アリルアルコー
ル、オレイルアルコール、エポキシステアリルアルコー
ル、フェノール、ナフトール等が挙げられる。また多価
アルコールとしては、例えばエチレングリコール、1,
3−プロパンジオール、1,4−ブタンジオール、1,
5−ペンタンジオール、ヘキサンジオール、ヘプタンジ
オール、オクタンジオール、ノナンジオール、ドデカン
ジオール、ネオペンチルグリコール、1,10−デカン
ジオール、2−ブテン−1,4−ジオール、2−n−ブ
チル−2−エチルプロパンジオール、2−ブテン−1,
4−ジオール、シクロヘプタンジオール、1,4−シク
ロヘキサンジメタノール、3−シクロヘキセン−1,1
−ジエタノール、ポリエチレングリコール(ジエチレン
グリコール、トリエチレングリコール等)、ポリプロピ
レングリコール(ジプロピレングリコール、トリプロピ
レングリコール等)、ポリスチレンオキシドグリコー
ル、ポリテトラヒドロフラングリコール、キシリレンジ
オール、ビス(β−ヒドロキシエトキシ)ベンゼン、3
−クロル−1,2−プロパンジオール、2,2−ジメチ
ル−1,3−プロパンジオール、2,2−ジエチル−
1,3−プロパンジオール、2,2−ジフェニル−1,
3−プロパンジオール、デカリンジオール、1,5−ジ
ヒドロキシ−1,2,3,4−テトラヒドロナフタレ
ン、2,5−ジメチル−2,5−ヘキサンジオール、2
−エチル−1,3−ヘキサンジオール、2−エチル−2
−(ヒドロキシメチル)−1,3−プロパンジオール、
2−エチル−2−メチル−1,3−プロパンジオール、
3−ヘキセン−2,5−ジオール、ヒドロキシベンジル
アルコール、2−メチル−1,4−ブタンジオール、2
−メチル−2,4−ペンタンジオール、1−フェニル−
1,2−エタンジオール、2,2,4,4−テトラメチ
ル−1,3−シクロブタンジオール、2,3,5,6−
テトラメチル−p−キシレン−α,α′−ジオール、
1,1,4,4−テトラフェニル−2−ブチン−1,4
−ジオール、1,1′−ビ−2−ナフトール、ジヒドロ
キシナフタレン、1,1′−メチレン−ジ−2−ナフト
ール、ビフェノール、2,2−ビス(4−ヒドロキシフ
ェニル)ブタン、1,1−ビス(4−ヒドロキシフェニ
ル)シクロヘキサン、ビス(ヒドロキシフェニル)メタ
ン、カテコール、レゾルシノール、2−メチルレゾルシ
ノール、4−クロルレゾルシノール、ヒドロキノン、フ
ロログルシノール、ピロガロール、α−(1−アミノエ
チル)−p−ヒドロキシベンジルアルコール、2−アミ
ノ−2−エチル−1,3−プロパンジオール、2−アミ
ノ−2−メチル−1,3−プロパンジオール、3−アミ
ノ−1,2−プロパンジオール、N−(3−アミノプロ
ピル)−ジエタノールアミン、N,N−ビス(2−ヒド
ロキシエチル)ピペラジン、1,3−ビス(ヒドロキシ
メチル)ウレア、1,2−ビス(4−ピリジル)−1,
2−エタンジオール、N−n−ブチルジエタノールアミ
ン、ジエタノールアミン、N−エチルジエタノールアミ
ン、3−メルカプト−1,2−プロパンジオール、3−
ピペリジン−1,2−プロパンジオール、2−(2−ピ
リジル)−1,3−プロパンジオール、α−(1−アミ
ノエチル)−p−ヒドロキシベンジルアルコール、グリ
セリン、トリメチロールエタン、トリメチロールプロパ
ン、ペンタエリスリトール、ジペンタエリスリトール、
トリペンタエリスリトール、ソルビトール、グルコー
ス、α−マンニトール、ブタントリオール、1,2,6
−トリヒドロキシヘキサン、1,2,4−ベンゼントリ
オール、トリエタノールアミン、2,2−ビス(ヒドロ
キシメチル)−2,2′,2″−ニトリロトリエタノー
ル等が挙げられる。これらの1価または多価アルコール
のアクリル酸またはメタクリル酸のエステルのうち、エ
チレングリコールジアクリレート、エチレングリコール
ジメタクリレート、ポリエチレングリコールジアクリレ
ート、ポリエチレングリコールジメタクリレート、ペン
タエリオスリトールトリアクリレート、ペンタエリスリ
トールトリメタクリレート、ジペンタエリスリトールヘ
キサアクリレート、ジペンタエリスリトールヘキサメタ
クリレート、ジペンタエリスリトールペンタアクリレー
ト、ジペンタエリスリトールペンタメタクリレート、グ
リセリントリアクリレート、グリセリントリメタクリレ
ート、トリメチロールプロパントリアクリレート、トリ
メチロールプロパントリメタクリレート、トリメチロー
ルエタントリアクリレート、トリメチロールエタントリ
メタクリレート、ネオペンチルグリコールジアクリレー
ト、ネオペンチルグリコールジメタクリレート、ソルビ
トールヘキサアクリレート、ソルビトールヘキサメタク
リレート、ソルビトールペンタアクリレート、ソルビト
ールペンタメタクリレート等が特に好ましい。Examples of the monohydric alcohol in the ester of acrylic acid or methacrylic acid of monohydric or polyhydric alcohol include, for example, methanol, ethanol, propanol, isopropanol, n-butanol, isobutanol, t-butanol, cyclohexyl alcohol, benzyl alcohol, octyl alcohol, 2-ethylhexanol, lauryl alcohol, n-decanol, undecanol,
Cetyl alcohol, stearyl alcohol, methoxyethyl alcohol, ethoxyethyl alcohol, butoxyethyl alcohol, polyethylene glycol monomethyl alcohol, polyethylene glycol monoethyl alcohol, 2-hydroxyethyl alcohol, 2-hydroxypropyl alcohol, 2-hydroxy-3-chloropropane, dimethyl. Aminoethanol, diethylaminoethanol, glycidol, 2-trimethoxysilylethanol, ethylene chlorohydrin, ethylene bromohydrin, 2,3-dibromopropanol, allyl alcohol, oleyl alcohol, epoxystearyl alcohol, phenol, naphthol and the like can be mentioned. . Examples of the polyhydric alcohol include ethylene glycol, 1,
3-propanediol, 1,4-butanediol, 1,
5-pentanediol, hexanediol, heptanediol, octanediol, nonanediol, dodecanediol, neopentyl glycol, 1,10-decanediol, 2-butene-1,4-diol, 2-n-butyl-2-ethyl. Propanediol, 2-butene-1,
4-diol, cycloheptanediol, 1,4-cyclohexanedimethanol, 3-cyclohexene-1,1
-Diethanol, polyethylene glycol (diethylene glycol, triethylene glycol, etc.), polypropylene glycol (dipropylene glycol, tripropylene glycol, etc.), polystyrene oxide glycol, polytetrahydrofuran glycol, xylylene diol, bis (β-hydroxyethoxy) benzene, 3
-Chloro-1,2-propanediol, 2,2-dimethyl-1,3-propanediol, 2,2-diethyl-
1,3-propanediol, 2,2-diphenyl-1,
3-propanediol, decalin diol, 1,5-dihydroxy-1,2,3,4-tetrahydronaphthalene, 2,5-dimethyl-2,5-hexanediol, 2
-Ethyl-1,3-hexanediol, 2-ethyl-2
-(Hydroxymethyl) -1,3-propanediol,
2-ethyl-2-methyl-1,3-propanediol,
3-hexene-2,5-diol, hydroxybenzyl alcohol, 2-methyl-1,4-butanediol, 2
-Methyl-2,4-pentanediol, 1-phenyl-
1,2-ethanediol, 2,2,4,4-tetramethyl-1,3-cyclobutanediol, 2,3,5,6-
Tetramethyl-p-xylene-α, α'-diol,
1,1,4,4-tetraphenyl-2-butyne-1,4
-Diol, 1,1'-bi-2-naphthol, dihydroxynaphthalene, 1,1'-methylene-di-2-naphthol, biphenol, 2,2-bis (4-hydroxyphenyl) butane, 1,1-bis (4-hydroxyphenyl) cyclohexane, bis (hydroxyphenyl) methane, catechol, resorcinol, 2-methylresorcinol, 4-chlororesorcinol, hydroquinone, phloroglucinol, pyrogallol, α- (1-aminoethyl) -p-hydroxybenzyl Alcohol, 2-amino-2-ethyl-1,3-propanediol, 2-amino-2-methyl-1,3-propanediol, 3-amino-1,2-propanediol, N- (3-aminopropyl ) -Diethanolamine, N, N-bis (2-hydroxyethyl) pi Rajin, 1,3-bis (hydroxymethyl) urea, 1,2-bis (4-pyridyl) -1,
2-ethanediol, Nn-butyldiethanolamine, diethanolamine, N-ethyldiethanolamine, 3-mercapto-1,2-propanediol, 3-
Piperidine-1,2-propanediol, 2- (2-pyridyl) -1,3-propanediol, α- (1-aminoethyl) -p-hydroxybenzyl alcohol, glycerin, trimethylolethane, trimethylolpropane, penta Erythritol, dipentaerythritol,
Tripentaerythritol, sorbitol, glucose, α-mannitol, butanetriol, 1,2,6
-Trihydroxyhexane, 1,2,4-benzenetriol, triethanolamine, 2,2-bis (hydroxymethyl) -2,2 ', 2 "-nitrilotriethanol and the like. Among the esters of acrylic acid or methacrylic acid of alcohol, ethylene glycol diacrylate, ethylene glycol dimethacrylate, polyethylene glycol diacrylate, polyethylene glycol dimethacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, dipentaerythritol hexaacrylate, Dipentaerythritol hexamethacrylate, dipentaerythritol pentaacrylate, dipentaerythritol pentamethacrylate, glycerin triac Rate, glycerin trimethacrylate, trimethylolpropane triacrylate, trimethylolpropane trimethacrylate, trimethylolethane triacrylate, trimethylolethane trimethacrylate, neopentyl glycol diacrylate, neopentyl glycol dimethacrylate, sorbitol hexaacrylate, sorbitol hexamethacrylate, Sorbitol pentaacrylate, sorbitol pentamethacrylate and the like are particularly preferable.
またC成分として、モノアミンもしくはポリアミンのア
クリルアミドまたはメタクリルアミドも使用することが
できる。ここにおけるモノアミンとしては、例えばエチ
ルアミン、ブチルアミン、アミルアミン、ヘキシルアミ
ン、オクチルアミン、シクロヘキシルアミン、9−アミ
ノデカリン等のモノアルキルアミン、アリルアミン、メ
タアリルアミン、ベンジルアミン等のモノアルケニルア
ミン、およびアニリン、トルイジン、p−アミノスチレ
ン等の芳香族アミンが挙げられる。またポリアミンとし
ては、例えばエチレンジアミン、トリメチレンジアミ
ン、テトラメチレンジアミン、ペンタメチレンジアミ
ン、ヘキサメチレンジアミン、オクタメチレンジアミ
ン、ヘキサメチレンビス(2−アミノプロピル)アミ
ン、ジエチレントリアミン、トリエチレンテトラアミ
ン、ポリエチレンポリアミン、トリス(2−アミノエチ
ル)アミン、4,4′−メチレンビス(シクロヘキシル
アミン)、N,N′−ビス(2−アミノエチル)−1,
3−プロパンジアミン、N,N′−ビス(3−アミノプ
ロピル)−1,4−ブタンジアミン、N,N′−ビス
(3−アミノプロピル)エチレンジアミン、N,N′−
ビス(3−アミノプロピル)−1,3−プロパンジアミ
ン、1,3−シクロヘキサンビス(メチルアミン)、フ
ェニレンジアミン、キシリレンジアミン、β−(4−ア
ミノフェニル)エチルアミン、ジアミノトルエン、ジア
ミノアントラセン、ジアミノナフタレン、ジアミノスチ
ルベン、メチレンジアニリン、2,4−ビス(4−アミ
ノベンジル)アニリン、アミノフェニルエーテル等が挙
げられる。As the C component, acrylamide or methacrylamide of monoamine or polyamine can also be used. Examples of the monoamine here include ethylamine, butylamine, amylamine, hexylamine, octylamine, cyclohexylamine, monoalkylamines such as 9-aminodecalin, allylamine, methallylamine, monoalkenylamines such as benzylamine, and aniline, toluidine, Aromatic amines such as p-aminostyrene may be mentioned. Examples of polyamines include ethylenediamine, trimethylenediamine, tetramethylenediamine, pentamethylenediamine, hexamethylenediamine, octamethylenediamine, hexamethylenebis (2-aminopropyl) amine, diethylenetriamine, triethylenetetraamine, polyethylenepolyamine, tris. (2-aminoethyl) amine, 4,4'-methylenebis (cyclohexylamine), N, N'-bis (2-aminoethyl) -1,
3-propanediamine, N, N'-bis (3-aminopropyl) -1,4-butanediamine, N, N'-bis (3-aminopropyl) ethylenediamine, N, N'-
Bis (3-aminopropyl) -1,3-propanediamine, 1,3-cyclohexanebis (methylamine), phenylenediamine, xylylenediamine, β- (4-aminophenyl) ethylamine, diaminotoluene, diaminoanthracene, diamino Examples thereof include naphthalene, diaminostilbene, methylenedianiline, 2,4-bis (4-aminobenzyl) aniline and aminophenyl ether.
さらにC成分として、アリル化合物、例えばギ酸、酢
酸、プロピオン酸、酪酸、ラウリン酸、安息香酸、クロ
ル安息香酸、マロン酸、シュウ酸、グルタル酸、アジピ
ン酸、セバシン酸、フタル酸、テレフタル酸、ヘキサヒ
ドロフタル酸、クロレンド酸等のモノまたはジカルボン
酸のモノまたはジアリルエステル、トリメリット酸トリ
アリル、ベンゼンジスルホン酸、ナフタレンジスルホン
酸等のジスルホン酸のモノまたはジアリルエステル、ジ
アリルアミン、N,N′−ジアリルシュウ酸ジアミド、
1,3−ジアリル尿素、ジアリルエーテル等も用いられ
る。Further, as a C component, an allyl compound such as formic acid, acetic acid, propionic acid, butyric acid, lauric acid, benzoic acid, chlorobenzoic acid, malonic acid, oxalic acid, glutaric acid, adipic acid, sebacic acid, phthalic acid, terephthalic acid, hexa Mono- or diallyl esters of mono- or dicarboxylic acids such as hydrophthalic acid and chlorendic acid, triallyl trimellitic acid, mono- or diallyl esters of disulfonic acids such as benzenedisulfonic acid and naphthalenedisulfonic acid, diallylamine, N, N'-diallyl oxalic acid Diamide,
1,3-diallyl urea, diallyl ether and the like are also used.
またC成分として、例えばジビニルベンゼン、p−アリ
ルスチレン、p−イソプロペニルスチレン、ジビニルス
ルホン、エチレングリコールジビニルエーテル、グリセ
ロールトリビニルエーテル、ジビニルスフシネート、ジ
ビニルフタレート、ジビニルテレフタレート等のポリビ
ニル化合物、2−ヒドロキシ−3−メタクリロイルオキ
シプロピルトリメチルアンモニウムクロリド、メタクリ
ロイルオキシフェニルトリメチルアンモニウムクロリド
等のイオン性基を有するアクリル酸またはメタクリル酸
のエステル化合物も用いられる。As the C component, for example, polyvinyl compounds such as divinylbenzene, p-allylstyrene, p-isopropenylstyrene, divinylsulfone, ethylene glycol divinyl ether, glycerol trivinyl ether, divinyl succinate, divinyl phthalate and divinyl terephthalate, 2-hydroxy. An ester compound of acrylic acid or methacrylic acid having an ionic group such as -3-methacryloyloxypropyltrimethylammonium chloride and methacryloyloxyphenyltrimethylammonium chloride can also be used.
さらにC成分として市販の光重合性モノマーまたはオリ
ゴマー、例えば東亜合成化学工業社製アロニックスM5
700、M6100、M8030、M152、M20
5、M215、M315、M325等のアクリレート系
モノマー、新中村化学工業社製NKエステル2G、4
G、9G、14G、ABPE−4、A−TMPT、U−
4HA、CB−1、CBX−1、日本化薬社製KAYA
RAD R604、DPCA−30、DPCA−66、
KAYAMER PM−1、PM−2、サンノプコ社製
フォトマー4061、5007等のアクリレートまたは
メタクリレート系モノマー、昭和高分子社製エポキシV
R60、VR90、SP1509等のエポキシアクリレ
ート、同社製スピラックE−4000X、U3000等
のスピロアセタール構造とアクリル基またはメタクリル
基とを有するスピラン樹脂等も用いられる。Further, as the C component, a commercially available photopolymerizable monomer or oligomer, for example, Aronix M5 manufactured by Toagosei Kagaku Kogyo
700, M6100, M8030, M152, M20
5, M215, M315, M325, and other acrylate-based monomers, Shin Nakamura Chemical Co., Ltd. NK ester 2G, 4
G, 9G, 14G, ABPE-4, A-TMPT, U-
4HA, CB-1, CBX-1, KAYA manufactured by Nippon Kayaku Co., Ltd.
RAD R604, DPCA-30, DPCA-66,
KAYAMER PM-1, PM-2, acrylate or methacrylate monomers such as Sannopco's Photomer 4061, 5007, Showa High Polymer Epoxy V
Epoxy acrylates such as R60, VR90 and SP1509, and spirane resins having a spiro acetal structure such as Spyrac E-4000X and U3000 manufactured by the same company and an acrylic group or a methacrylic group are also used.
これらの化合物は単独で、または2種以上混合して用い
られる。These compounds may be used alone or in combination of two or more.
C成分の配合量は10〜60重量%、好ましくは20〜
50重量%である。この配合量が10重量%未満の場合
には液状感光性樹脂組成物の光硬化性が低下し、光硬化
後の塗膜の耐溶剤性および機械的強度を十分に高めるこ
とができず、60重量%を超える場合には光硬化後の塗
膜の耐冷熱衝撃性および耐溶剤性の低下を来す。The amount of component C is 10 to 60% by weight, preferably 20 to
It is 50% by weight. If the blending amount is less than 10% by weight, the photocurability of the liquid photosensitive resin composition is deteriorated, and the solvent resistance and mechanical strength of the coating film after photocuring cannot be sufficiently increased. If it exceeds 5% by weight, the thermal shock resistance and solvent resistance of the coating film after photocuring will be deteriorated.
本発明に用いられるエポキシ基を熱反応させることがで
きる熱反応性触媒(D成分)としては、例えばブチルア
ミン、アミルアミン、n−ヘキシルアミン等の脂肪族ア
ミン、シクロヘキシルアミン、アミノデカリン等の脂環
式アミン、ピリジン、ルチジン、コリジン、アニリン、
トルイジン、N,N−ジメチル−α−ナフチルアミン、
ジフェニルアミン、アミノアントラセン、トリフェニル
アミン等の芳香族アミン、フルフリルアミン、アミノピ
リジン、アミノピコリン、アミノキノリン、アミノイソ
キノリン、アミノジベンゾフラン、アミノジベンゾチオ
フェン、アミノアクリジン等のヘテロ環状アミン、エチ
レンジアミン、ジエチレントリアミン、トリエチレンテ
トラアミン、テトラエチレンペンタアミン、ジエチルア
ミノプロピルアミン、メタキシリレンジアミン、ポリエ
チレンアミン等の脂肪族ポリアミン、メタフェニレンジ
アミン、トリアミノベンゼン、ジアミノトルエン、ジア
ミノジフェニルメタン、ジアミノジフェニルスルホン等
の芳香族ポリアミン、1,3−ジアミノシクロヘキサ
ン、N,N−ジエチル−1,4−シクロヘキサンジアミ
ン、イソホロンジアミン、N−アミノエチルピペラジ
ン、ピペラジン等の脂環式ジアミン、アリルアミン、ジ
アリルアミン、アリルジエチルアミン、ジアミノスチル
ベン等の不飽和脂肪族アミン、前記アミン類と三フッ化
ホウ素、三塩化ホウ素、三臭化ホウ素等のホウ素ハロゲ
ン化物との錯体、ジシアンジアミド等のシアノ基を含む
アミン、ポリアミド樹脂、イミダゾール等のイミダゾー
ル類、ベンジルテトラメチレンスルホニウムイオン、ベ
ンジルジエチルスルホニウムイオン等のベンジルスルホ
ニウムイオン類、および無水フタル酸、ヘキサヒドロ無
水フタル酸、テトラヒドロ無水フタル酸、エントメチレ
ンテトラヒドロ無水フタル酸、ドデシル無水コハク酸、
無水ピロメリット酸、無水クロレン酸等の酸無水物が挙
げられる。これらの化合物は単独でまたは2種以上混合
して用いられる。Examples of the thermoreactive catalyst (component D) capable of thermally reacting the epoxy group used in the present invention include aliphatic amines such as butylamine, amylamine and n-hexylamine, alicyclic compounds such as cyclohexylamine and aminodecalin. Amine, pyridine, lutidine, collidine, aniline,
Toluidine, N, N-dimethyl-α-naphthylamine,
Aromatic amines such as diphenylamine, aminoanthracene and triphenylamine, furfurylamine, aminopyridine, aminopicoline, aminoquinoline, aminoisoquinoline, aminodibenzofuran, aminodibenzothiophene, aminoacridine and other heterocyclic amines, ethylenediamine, diethylenetriamine, triethylene. Aliphatic polyamines such as tetraamine, tetraethylenepentamine, diethylaminopropylamine, metaxylylenediamine, polyethyleneamine, etc., aromatic polyamines such as metaphenylenediamine, triaminobenzene, diaminotoluene, diaminodiphenylmethane, diaminodiphenylsulfone, 1, 3-diaminocyclohexane, N, N-diethyl-1,4-cyclohexanediamine, isophoronedia Alicyclic diamines such as amine, N-aminoethylpiperazine, piperazine, etc., unsaturated aliphatic amines such as allylamine, diallylamine, allyldiethylamine, diaminostilbene, the amines and boron trifluoride, boron trichloride, boron tribromide Such as a complex with a boron halide, a cyano group-containing amine such as dicyandiamide, a polyamide resin, imidazoles such as imidazole, benzyltetramethylenesulfonium ion, benzylsulfonium ions such as benzyldiethylsulfonium ion, and phthalic anhydride, hexahydro Phthalic anhydride, tetrahydrophthalic anhydride, entmethylene tetrahydrophthalic anhydride, dodecyl succinic anhydride,
Examples thereof include acid anhydrides such as pyromellitic dianhydride and chlorenic anhydride. These compounds may be used alone or in admixture of two or more.
D成分の配合量は0.01〜10重量%、好ましくは0.05〜
5重量%である。この配合量が0.01重量%未満の場合に
はB成分を十分に熱反応させることができず、半田耐熱
性の高い硬化膜を得ることができず、10重量%を超え
る場合には硬化膜の吸湿性が高くなり、硬化膜の絶縁抵
抗が低下する。The amount of the component D is 0.01 to 10% by weight, preferably 0.05 to
It is 5% by weight. When the content is less than 0.01% by weight, the component B cannot be sufficiently thermally reacted, and a cured film having high solder heat resistance cannot be obtained. The hygroscopicity is increased and the insulation resistance of the cured film is reduced.
本発明に用いられる光重合開始剤(E成分)としては、
例えばベンジル、ジアセチル等のα−ジケトン類、ベン
ゾイン等のアシロイン類、ベンゾインジメチルエーテ
ル、ベンゾインジエチルエーテル、ベンゾインジイソプ
ロピルエーテル等のアシロインエーテル類、チオキサン
トン、2,4−ジエチルチオキサントン、チオキサント
ン−1−スルホン酸、チオキサントン−4−スルホン酸
等のチオキサントン類、ベンゾフェノン、4,4′−ジ
メチルアミノベンゾフェノン(ミヒラーズケトン)等の
ベンゾフェノン類、アセトフェノン、p−ジメチルアミ
ノアセトフェノン、α,α′−ジメトキシアセトキシア
セトフェノン、2,2−ジメトキシ−2−フェニルアセ
トフェノン、p−メトキシアセトフェノン等のアセトフ
ェノン類、およびアントラキノン、1,4−ナフトキノ
ン等のキノン類が挙げられる。As the photopolymerization initiator (component E) used in the present invention,
For example, benzyl, α-diketones such as diacetyl, acyloins such as benzoin, benzoin dimethyl ether, benzoin diethyl ether, acyloin ethers such as benzoin diisopropyl ether, thioxanthone, 2,4-diethylthioxanthone, thioxanthone-1-sulfonic acid, Thioxanthones such as thioxanthone-4-sulfonic acid, benzophenones, benzophenones such as 4,4′-dimethylaminobenzophenone (Michler's ketone), acetophenone, p-dimethylaminoacetophenone, α, α′-dimethoxyacetoxyacetophenone, 2,2- Examples include acetophenones such as dimethoxy-2-phenylacetophenone and p-methoxyacetophenone, and quinones such as anthraquinone and 1,4-naphthoquinone. It is.
これらの光重合開始剤は単独で、または2種以上混合し
て用いられる。These photopolymerization initiators may be used alone or in combination of two or more.
E成分の配合量は0.001〜15重量%、好ましくは0.5〜
10重量%である。この配合量が0.001重量%未満の場
合には液状感光性樹脂組成物に十分な光硬化性を与える
ことができず、15重量%を超える場合には光硬化時に
全ての光重合開始剤を反応に関与させることができない
ため、光硬化後の塗膜の保存安定性を悪化させたり、ま
た光重合開始剤が硬化前の液状感光性樹脂組成物から析
出したりすることがある。The amount of component E is 0.001 to 15% by weight, preferably 0.5 to
It is 10% by weight. If the content is less than 0.001% by weight, the liquid photosensitive resin composition cannot be provided with sufficient photocurability, and if it exceeds 15% by weight, all photopolymerization initiators are reacted during photocuring. Therefore, the storage stability of the coating film after photocuring may be deteriorated, and the photopolymerization initiator may be precipitated from the liquid photosensitive resin composition before curing.
本発明の液状感光性樹脂組成物には、加熱硬化前の重合
防止のための熱付加重合禁止剤を配合することが好まし
い。熱付加重合禁止剤としては、例えばヒドロキノン、
p−メトキシフェノール、p−t−ブチルカテコール、
2,6−ジ−t−ブチル−p−クレゾール、β−ナフト
ール、ピロガロール等の芳香族ヒドロキシ化合物、ベン
ゾキノン、p−トルキノン等のキノン類、ナフチルアミ
ン、ピリジン、p−トルイジン、フェノチアジン等のア
ミン類、N−ニトロソフェニルヒドロキシルアミンのア
ルミニウム塩またはアンモニア塩、フロラニール、ニト
ロベンゼン等が挙げられる。これらの熱付加重合禁止剤
は単独で、または2種以上混合して用いられる。The liquid photosensitive resin composition of the present invention preferably contains a thermal addition polymerization inhibitor for preventing polymerization before heat curing. Examples of the thermal addition polymerization inhibitor include hydroquinone,
p-methoxyphenol, pt-butylcatechol,
Aromatic hydroxy compounds such as 2,6-di-t-butyl-p-cresol, β-naphthol and pyrogallol, quinones such as benzoquinone and p-toluquinone, amines such as naphthylamine, pyridine, p-toluidine and phenothiazine, Aluminum salts or ammonia salts of N-nitrosophenylhydroxylamine, floranyl, nitrobenzene and the like can be mentioned. These thermal addition polymerization inhibitors may be used alone or in admixture of two or more.
熱付加重合禁止剤の添加量は上記A成分からE成分まで
の総量100重量部に対して好ましくは0.001〜15重
量部、特に好ましくは0.005〜5重量部である。The addition amount of the thermal addition polymerization inhibitor is preferably 0.001 to 15 parts by weight, and particularly preferably 0.005 to 5 parts by weight, based on 100 parts by weight of the total amount of the above components A to E.
さらに本発明の液状感光性樹脂組成物には、粘着付与
剤、密着助剤、分散剤、可塑剤、垂れ防止剤、レベリン
グ剤、消泡剤、難燃化剤、光沢剤、着色剤等の補助的添
加剤を必要に応じて配合してもよい。Furthermore, in the liquid photosensitive resin composition of the present invention, a tackifier, an adhesion aid, a dispersant, a plasticizer, an anti-sagging agent, a leveling agent, a defoaming agent, a flame retardant, a brightener, a coloring agent, etc. Auxiliary additives may be added as needed.
粘着付与剤または密着助剤としては、例えばアルキルフ
ェノール/ホルムアルデヒドノボラック樹脂、ポリビニ
ルエチルエーテル、ポリビニルイソブチルエーテル、ポ
リビニルブチラール、ポリイソブチレン、スチレン−ブ
タジエン共重合ゴム、ブチルゴム、塩化ビニル−酢酸ビ
ニル共重合体、塩化ゴム、アクリル系粘着剤、芳香族
系、脂肪族系または脂環族系の石油樹脂等が挙げられ
る。これらの化合物は単独で、または2種以上混合して
用いられる。Examples of the tackifier or the adhesion aid include alkylphenol / formaldehyde novolac resin, polyvinyl ethyl ether, polyvinyl isobutyl ether, polyvinyl butyral, polyisobutylene, styrene-butadiene copolymer rubber, butyl rubber, vinyl chloride-vinyl acetate copolymer, and chloride. Examples thereof include rubber, acrylic adhesives, aromatic, aliphatic or alicyclic petroleum resins. These compounds may be used alone or in combination of two or more.
粘着付与剤または密着助剤の配合量は、上記A成分から
E成分までの総量100重量部に対して好ましくは0.05
〜40重量部、特に好ましくは0.05〜30重量部であ
る。The compounding amount of the tackifier or the adhesion aid is preferably 0.05 based on 100 parts by weight of the total amount of the above components A to E.
To 40 parts by weight, particularly preferably 0.05 to 30 parts by weight.
粘着付与剤または密着助剤の添加により、光硬化後の液
状感光性樹脂組成物の基板との密着性が高まり、特に銅
装着積層板および半田装着積層板にラミネートするとき
にその効果が大きく発揮される。Addition of a tackifier or adhesion aid enhances the adhesion of the liquid photosensitive resin composition after photo-curing to the substrate, especially when it is laminated on a copper-attached laminate or a solder-attached laminate. To be done.
分散剤は液状感光性樹脂組成物の分散性、保存安定性等
を向上させるために使用される。可塑剤、垂れ防止剤、
レベリング剤および消泡剤の配合の必要性は、液状感光
性樹脂組成物の使用方法、すなわち液状感光性樹脂組成
物の塗膜の作成方法に依存し、使用する種類と配合量は
適宜選択される。The dispersant is used to improve the dispersibility, storage stability and the like of the liquid photosensitive resin composition. Plasticizer, anti-sagging agent,
The necessity of blending the leveling agent and the defoaming agent depends on the method of using the liquid photosensitive resin composition, that is, the method of forming the coating film of the liquid photosensitive resin composition, and the type and amount to be used are appropriately selected. It
これらの補助的添加剤は、単一の化合物が一種類の性質
(分散性、可塑性、垂れ防止性、レベリング性または消
泡性)を示すのみでなく、複数の添加効果を示すことが
ある。例えば分散剤は、液状感光性樹脂組成物の可塑
剤、レベリング剤および消泡剤としても働くことがあ
り、また分散剤、可塑剤、垂れ防止剤、レベリング剤お
よび消泡剤は、光硬化後の液状感光性樹脂組成物の光沢
性にも効果を示し、光沢剤として働くことがある。In these auxiliary additives, not only a single compound exhibits one type of property (dispersibility, plasticity, anti-sagging property, leveling property or defoaming property), but also a plurality of addition effects may be exhibited. For example, the dispersant may also function as a plasticizer, a leveling agent and an antifoaming agent for the liquid photosensitive resin composition, and the dispersant, the plasticizer, the anti-sagging agent, the leveling agent and the antifoaming agent may be used after photocuring. It also has an effect on the glossiness of the liquid photosensitive resin composition, and may act as a brightener.
分散剤としては、例えばフッ素含有高分子化合物、界面
活性剤、改質レシチン、非シリコン系の長鎖カルボン酸
アミン塩、有機モントモリライト等が用いられる。Examples of the dispersant include fluorine-containing polymer compounds, surfactants, modified lecithin, non-silicon long-chain carboxylic acid amine salts, organic montmorillonite, and the like.
可塑剤としては、例えばエチレングリコールジフタレー
ト、ジエチレングリコールジフタレート、エチレングリ
コールジカプリン酸エステル、ジエチレングリコールジ
カルプリン酸エステル等のグリコールエステル類、ジメ
チルフタレート、ジエチレンフタレート、ジブチルフタ
レート、ジオクチルフタレート、ジアリールフタレー
ト、ブチルベンジルフタレート等のフタル酸エステル
類、トリフェニルホスフェート等のリン酸エステル類、
ジエチルマレート、ジブチルアジペート、クエン酸トリ
エチル、ラウリル酸エチル等が用いられる。Examples of the plasticizer include ethylene glycol diphthalate, diethylene glycol diphthalate, ethylene glycol dicapric acid ester, glycol esters such as diethylene glycol dicarpuric acid ester, dimethyl phthalate, diethylene phthalate, dibutyl phthalate, dioctyl phthalate, diaryl phthalate, butyl benzyl. Phthalates such as phthalate, phosphates such as triphenyl phosphate,
Diethyl maleate, dibutyl adipate, triethyl citrate, ethyl laurate and the like are used.
垂れ防止剤としては、例えばタルク、マイカ二酸化ケイ
素、二酸化チタン、炭酸カルシウム、炭酸マグネシウ
ム、炭酸バリウム等の無機質の微粉末等が用いられる。Examples of the anti-sagging agent include talc, mica silicon dioxide, titanium dioxide, calcium carbonate, magnesium carbonate, barium carbonate, and other inorganic fine powders.
レベリング剤としては、例えばシュウエグマン社(西ド
イツ)性のANTIGELやBLISTER FREE
84等が用いられる。Examples of the leveling agent include ANTIGEL and BLISTER FREE manufactured by Schwegmann (West Germany).
84 or the like is used.
消泡剤としては、例えばシリコンオイル等が用いられ
る。さらに例えばビー・エム・ヘミー社(西ドイツ)製
分散剤BM1000、BM1100、沈降防止剤および
増粘垂れ防止剤BM−TX、消泡剤BM1200、流動
性改善剤BM1000、接着向上剤BMS40等を用い
ることもできる。As the defoaming agent, for example, silicone oil or the like is used. Further, for example, the dispersant BM1000, BM1100, anti-settling agent and thickening-preventing agent BM-TX, antifoaming agent BM1200, fluidity improving agent BM1000, adhesion improving agent BMS40, etc. manufactured by BM Chemie (West Germany) may be used. You can also
光沢剤としては、例えばシュウエグマン社(西ドイツ)
性のANTIGELが用いられる。これらの分散剤、可
塑剤、垂れ防止剤、レベリング剤、消泡剤および光沢剤
の配合量は、液状感光性樹脂組成物100重量部に対し
て好ましくは合計量で40重量部以下、特に好ましくは
合計量で20重量部以下である。Examples of brighteners include Schwegmann (West Germany)
Antigen is used. The amount of these dispersants, plasticizers, anti-sagging agents, leveling agents, defoamers and brighteners is preferably 40 parts by weight or less, particularly preferably a total amount of 100 parts by weight of the liquid photosensitive resin composition. Is 20 parts by weight or less in total.
また難燃化剤としては、例えば三酸化アンチモン、水酸
化ジルコニウム、メタホウ酸バリウム、水酸化マグネシ
ウム、水酸化アルミニウム等の無機系難燃化剤、テトラ
ブロモビスフェノールA、塩素化パラフィン、パークロ
ロペンタシクロデカン、テトラブロモベンゼン、塩素化
ジフェニル等のハロゲン系難燃化剤、および塩化ホスフ
ォニトリル誘導体、ビニルホスフォネート、アリルホス
フォネート、トリス(β−クロロエチル)ホスフォネー
ト、トリクレジルホスフォネート、リン酸アンモニウム
等のリン系難燃化剤が用いられる。難燃化剤の配合量
は、上記A成分からE成分までの総量100重量部に対
して好ましくは10重量部以下、特に好ましくは5重量
部以下である。Examples of the flame retardant include inorganic flame retardants such as antimony trioxide, zirconium hydroxide, barium metaborate, magnesium hydroxide, and aluminum hydroxide, tetrabromobisphenol A, chlorinated paraffin, perchloropentacyclo. Halogen-based flame retardants such as decane, tetrabromobenzene, chlorinated diphenyl, and chlorophosphonitrile derivatives, vinylphosphonates, allylphosphonates, tris (β-chloroethyl) phosphonates, tricresylphosphonates, Phosphorus flame retardants such as ammonium phosphate are used. The amount of the flame retardant compounded is preferably 10 parts by weight or less, particularly preferably 5 parts by weight or less, based on 100 parts by weight of the total amount of the components A to E.
着色剤としては、例えば酸化チタン、カーボンブラッ
ク、酸化鉄等の無機顔料、メチレンブルー、クリスタル
バイオレット、ローダミンB、フクシン、オーラミン、
アゾ系染料、アントラキノン系染料等の有機染料、ブタ
ロシアニンブルー、フタロシアニングリーン等のフタロ
シアニン系またはアゾ系有機顔料、三菱化成工業社製ダ
イアレジンレッドZ、ブルーK、グリーンC等が用いら
れる。着色剤の配合量は、上記A成分からE成分までの
総量100重量部に対して好ましくは5重量部以下、特
に好ましくは2重量部以下である。Examples of colorants include inorganic pigments such as titanium oxide, carbon black, iron oxide, methylene blue, crystal violet, rhodamine B, fuchsin, auramine, and the like.
Organic dyes such as azo dyes and anthraquinone dyes, phthalocyanine or azo organic pigments such as butalocyanine blue and phthalocyanine green, and dialyzin red Z, blue K and green C manufactured by Mitsubishi Kasei are used. The amount of the colorant compounded is preferably 5 parts by weight or less, particularly preferably 2 parts by weight or less, relative to 100 parts by weight of the total amount of the components A to E.
本発明の液状感光性樹脂組成物は、通常、前記各成分を
スーパーミキサー等の攪拌機で分散させて均一にする
か、有機溶媒に溶解させた後、減圧下に有機溶媒を飛散
させて調製する。またこの際一定量の有機溶媒を液状感
光性樹脂組成物に残存させ、塗布後に飛散させることも
できる。この際用いらる有機溶媒としては、例えばアセ
トン、メチルエチルケトン等のケトン類、メタノール、
エタノール、イソプロピルアルコール等のアルコール
類、テトラヒドロフラン、ジオキサン、ジエチルエーテ
ル等のエーテル類、ベンゼン、トルエン、キシレン、エ
チルベンゼン等の芳香族炭化水素類、およびヘキサン、
ペンタン、シクロヘキサン等の脂肪族炭化水素類、塩化
メチレン、1,2−ジクロロエタン等のハロゲン化炭化
水素類が挙げられる。The liquid photosensitive resin composition of the present invention is usually prepared by dispersing each of the above components with a stirrer such as a super mixer to make them uniform or by dissolving them in an organic solvent and then scattering the organic solvent under reduced pressure. . At this time, a certain amount of the organic solvent may be left in the liquid photosensitive resin composition and scattered after coating. Examples of the organic solvent used in this case include acetone, ketones such as methyl ethyl ketone, methanol,
Alcohols such as ethanol and isopropyl alcohol, ethers such as tetrahydrofuran, dioxane and diethyl ether, aromatic hydrocarbons such as benzene, toluene, xylene and ethylbenzene, and hexane,
Examples thereof include aliphatic hydrocarbons such as pentane and cyclohexane, and halogenated hydrocarbons such as methylene chloride and 1,2-dichloroethane.
このようにして得られる本発明の液状感光性樹脂組成物
を用いて画像を形成するに際しては、この液状感光性樹
脂組成物を基板に塗布後、加熱硬化して非粘着性とし、
次いで硬化塗膜にパターンマスクを密着させて露光し、
アルカリ性水溶液により現像する。When forming an image using the liquid photosensitive resin composition of the present invention thus obtained, after applying the liquid photosensitive resin composition to the substrate, heat curing to make it non-adhesive,
Then, a pattern mask is brought into close contact with the cured coating film and exposed,
Develop with an alkaline aqueous solution.
本発明の液状感光性樹脂組成物を基板上に塗布する方法
としては、例えばスプレー法、浸し塗り法、はけ塗り
法、ローラー塗装法、フローコータ法、カーテンコータ
法、スクリーン印刷法等が挙げられ、特に薄膜金属やプ
リント回路基板にコーティングする際は、スプレー法、
ローラー塗装法、フローコータ法、カーテンコータ法、
スクリーン印刷法等が好ましい。Examples of the method for applying the liquid photosensitive resin composition of the present invention onto a substrate include a spray method, a dip coating method, a brush coating method, a roller coating method, a flow coater method, a curtain coater method, and a screen printing method. Especially when coating thin film metal or printed circuit board, spray method,
Roller coating method, flow coater method, curtain coater method,
A screen printing method or the like is preferable.
本発明の液状感光性樹脂組成物は、熱および光のいずれ
を用いても硬化することができ、特にホトレジストとし
て用いる際には、活性光線を照射する前に、塗膜を加熱
硬化して塗膜表面の粘着性を消失させる。この際加熱硬
化の条件は、例えば80〜120℃で5〜30分であ
る。このように加熱硬化する結果、非粘着性となり、硬
化塗膜にパターンマスクを密着させて露光することが可
能となる。The liquid photosensitive resin composition of the present invention can be cured by using either heat or light, and particularly when it is used as a photoresist, the coating film is heated and cured before being irradiated with actinic rays. The tackiness of the film surface is lost. At this time, the conditions for heat curing are, for example, 80 to 120 ° C. and 5 to 30 minutes. As a result of heat-curing in this way, it becomes non-adhesive, and it becomes possible to bring a pattern mask into close contact with the cured coating film for exposure.
本発明の液状感光性樹脂組成物の光硬化に用いられる露
光装置は、特に限定されないが、300〜400nm付
近の紫外線を放射する高圧水銀灯を装着した紫外線露光
装置を用いることが好ましい。The exposure apparatus used for photocuring the liquid photosensitive resin composition of the present invention is not particularly limited, but it is preferable to use an ultraviolet exposure apparatus equipped with a high pressure mercury lamp that emits ultraviolet rays in the vicinity of 300 to 400 nm.
また本発明の液状感光性樹脂組成物は、必要に応じて光
硬化後にポストベイクすることによって半田耐熱性のよ
り向上した硬化膜とすることもできる。The liquid photosensitive resin composition of the present invention can be post-baked after photo-curing, if necessary, to obtain a cured film having improved solder heat resistance.
本発明の液状感光性樹脂組成物は、現像液としてアルカ
リ性水溶液、例えば水酸化ナトリウム、水酸化カリウ
ム、水酸化リチウム、炭酸ナトリウム、炭酸カリウム、
炭酸リチウム、アンモニア等の0.1〜10重量%の水溶
液を用いる。しかし場合によって、アミン類、例えばブ
チルアミン、ヘキシルアミン、ベンジルアミン、アリル
アミン等の1級アミン、ジエチルアミン、ベンジルエチ
ルアミン等の2級アミン、トリエチルアミン等の3級ア
ミン、エタノールアミン、ジエタノールアミン、トリエ
タノールアミン、2−アミノ−1,3−プロパンジオー
ル等のヒドロキシルアミン、モルホリン、ピリジン、ピ
ペラジン、ピペリジン等の環状アミン、ヒドラジン、エ
チレンジアミン、ヘキサメチレンジアミン等のポリアミ
ン、前記アミンの硫酸塩、炭酸塩、重炭酸塩、アルカリ
金属リン酸塩、ピロリン酸塩等の塩基性塩、テトラメチ
ルアンモニウムヒドロキシド、コリン等のヒドロキシド
塩などを使用することもできる。さらにアルコール類、
ケトン類、芳香族炭化水素類、ハロゲン化炭化水素類、
ハロゲン化芳香族炭化水素類等の有機溶剤を現像液とし
て使用することもできる。またポリオキシエチレングリ
コールオクチルフェニルモノエーテル、ステアリン酸の
硫酸エステル等の界面活性剤を現像液に添加することも
できる。The liquid photosensitive resin composition of the present invention is an alkaline aqueous solution as a developer, such as sodium hydroxide, potassium hydroxide, lithium hydroxide, sodium carbonate, potassium carbonate,
An aqueous solution of 0.1 to 10% by weight of lithium carbonate, ammonia, etc. is used. However, in some cases, amines such as primary amines such as butylamine, hexylamine, benzylamine and allylamine, secondary amines such as diethylamine and benzylethylamine, tertiary amines such as triethylamine, ethanolamine, diethanolamine, triethanolamine, 2 -Hydroxyl amines such as amino-1,3-propanediol, cyclic amines such as morpholine, pyridine, piperazine and piperidine, polyamines such as hydrazine, ethylenediamine and hexamethylenediamine, sulfates, carbonates and bicarbonates of the amines. It is also possible to use basic salts such as alkali metal phosphates and pyrophosphates, and hydroxide salts such as tetramethylammonium hydroxide and choline. More alcohol,
Ketones, aromatic hydrocarbons, halogenated hydrocarbons,
Organic solvents such as halogenated aromatic hydrocarbons can also be used as a developing solution. Further, a surfactant such as polyoxyethylene glycol octylphenyl monoether or stearic acid sulfate can be added to the developer.
(実施例) 以下、実施例により本発明を説明する。(Examples) Hereinafter, the present invention will be described with reference to Examples.
実施例1 両末端アクリレート化ビスフェノールA型エポキシ樹脂
(昭和高分子社製VR90)200g(0.70水酸基当
量)および無水コハク酸70.4g(0.70モル)を、モレキ
ュラーシーブで乾燥したメチルエチルケトン600mlに
溶解させた。次いでこの溶液に、14.1ミリモル(1.71
g)のγ−コリジンを添加した後、20時間還流し、濃
度37.4重量%のカルボキシル基を有するビスフェノール
型エポキシアクリレートと無水コハク酸の反応生成物の
メチルエチルケトン溶液を製造した。Example 1 200 g (0.70 hydroxyl equivalent) of bisphenol A type epoxy resin having both ends acrylated (VR90 manufactured by Showa Polymer Co., Ltd.) and 70.4 g (0.70 mol) of succinic anhydride were dissolved in 600 ml of methyl ethyl ketone dried with a molecular sieve. This solution was then added to 14.1 mmol (1.71
After the addition of γ-collidine of g), the mixture was refluxed for 20 hours to prepare a methyl ethyl ketone solution of a reaction product of a bisphenol epoxy acrylate having a carboxyl group with a concentration of 37.4% by weight and succinic anhydride.
A成分として、上記のようにして得られたカルボキシル
基を有する反応生成物のメチルエチルケトン溶液66.8g
(固型分25.0g)、B成分としてエチレングリコールジ
グリシジルエーテル37.5g、C成分として両末端アクリ
レート化ビスフェノールA型エポキシ樹脂(昭和高分子
社製VR90)37.5g、D成分として三フッ化ホウ素/
2,6−ルチジン錯体5g、E成分として2,2−ジメ
トキシ−2−フェニルアセトフェノン2.5g、および熱
付加重合禁止剤としてN−ニトロソフェニルヒドロキシ
ルアミンのアルミニウム塩0.05gを、アセトン100ml
に混合溶解させて均一な溶液を得た。次いで減圧下に3
0〜40℃でアセトンおよびメチルエチルケトンを飛散
させ、無溶媒の液状感光性樹脂組成物を調製した。この
液状感光性樹脂組成物を使用し、アプリケータを用いて
銅スルーホールプリント回路基板上に厚さ70μmの液
状感光性樹脂組成物の塗膜を形成した。100℃で5分
間加熱した後、ネガ型パターンマスクを密着させ、露光
量200mJ/cm2の紫外線を照射し、次いで2重量%
の炭酸ナトリウム水溶液を用いて10分間現像すると、
鮮明な画像が得られた。As component A, 66.8 g of a methyl ethyl ketone solution of the reaction product having a carboxyl group obtained as described above
(Solid content 25.0 g), ethylene glycol diglycidyl ether as component B 37.5 g, bisphenol A type epoxy resin with both ends acrylated as component C (VR90 manufactured by Showa High Polymer Co., Ltd.) 37.5 g, boron trifluoride as component D /
5 g of 2,6-lutidine complex, 2.5 g of 2,2-dimethoxy-2-phenylacetophenone as an E component, and 0.05 g of an aluminum salt of N-nitrosophenylhydroxylamine as a thermal addition polymerization inhibitor were added to 100 ml of acetone.
Was mixed and dissolved in to obtain a uniform solution. Then under reduced pressure 3
Acetone and methyl ethyl ketone were scattered at 0 to 40 ° C to prepare a solventless liquid photosensitive resin composition. Using this liquid photosensitive resin composition, a coating film of the liquid photosensitive resin composition having a thickness of 70 μm was formed on a copper through-hole printed circuit board using an applicator. After heating at 100 ° C. for 5 minutes, a negative pattern mask was brought into close contact with the substrate, irradiated with ultraviolet rays having an exposure dose of 200 mJ / cm 2 , and then 2% by weight.
When developed with an aqueous solution of sodium carbonate for 10 minutes,
A clear image was obtained.
また露光後のパターンマスク汚れを調べたところ汚れは
全く観察されなかった。When the pattern mask stain after exposure was examined, no stain was observed.
実施例2 B成分としてエチレングリコールジグリシジルエーテル
37.5gに代えてエチレングリコールジグリシジルエーテ
ル27.5gおよびビスフェノールA−ジグリシジルエーテ
ル10gを使用したほかは、実施例1と同様に処理して
液状感光性樹脂組成物を調製した。この液状感光性樹脂
組成物を使用し、銅スルーホールプリント回路基板上に
厚さ70μmの塗膜を形成した。120℃で5分間加熱
した後、ネガ型パターンマスクを密着させ、露光量20
0mJ/cm2の紫外線を照射し、次いで2重量%の炭酸
ナトリウム水溶液を用いて10分間現像すると、鮮明な
画像が得られた。また露光後のパターンマスク汚れを調
べたところ汚れは全く観察されなかった。Example 2 Ethylene glycol diglycidyl ether as component B
A liquid photosensitive resin composition was prepared in the same manner as in Example 1 except that 27.5 g of ethylene glycol diglycidyl ether and 10 g of bisphenol A-diglycidyl ether were used instead of 37.5 g. Using this liquid photosensitive resin composition, a 70 μm thick coating film was formed on a copper through hole printed circuit board. After heating at 120 ° C for 5 minutes, a negative pattern mask is brought into close contact with the substrate and the exposure dose is 20
Irradiation with ultraviolet rays of 0 mJ / cm 2 followed by development with a 2% by weight aqueous solution of sodium carbonate for 10 minutes gave a clear image. When the pattern mask stain after exposure was examined, no stain was observed.
実施例3 実施例1で用いたA成分(固型分として)40g、C成
分として両末端アクリレート化ビスフェノールA型エポ
キシ樹脂17g、およびサンノプコ社製フォトマー40
61(脂肪族2官能性アクリレートモノマー)15g、
B成分としてビスフェノールAジグリシジルエーテル2
8.33g、D成分として三フッ化ホウ素/2,6−ルチジ
ン錯体2.5gを用いた他は、実施例1と同様に処理して
液状感光性樹脂組成物を調製した。この液状感光性樹脂
組成物を使用し、銅スルーホールプリント回路基板上に
厚さ80μmの塗膜を形成した。120℃で15分間加
熱した後、ネガ型パターンマスクを密着させ、露光量2
00mJ/cm2の紫外線を照射し、次いで2重量%の炭
酸ナトリウム水溶液を用いて5分間現像すると、鮮明な
画像が得られた。また露光後のパターンマスク汚れを調
べたところ汚れは全く観察されなかった。Example 3 40 g of component A (as a solid component) used in Example 1, 17 g of bisphenol A-type epoxy resin having both ends acrylated as component C, and Photomer 40 manufactured by San Nopco Ltd.
61 (aliphatic bifunctional acrylate monomer) 15 g,
Bisphenol A diglycidyl ether 2 as component B
A liquid photosensitive resin composition was prepared in the same manner as in Example 1, except that 8.33 g and 2.5 g of boron trifluoride / 2,6-lutidine complex were used as the D component. Using this liquid photosensitive resin composition, a coating film having a thickness of 80 μm was formed on a copper through hole printed circuit board. After heating at 120 ° C for 15 minutes, a negative pattern mask is brought into close contact and the exposure amount is set to 2
Irradiation with ultraviolet rays of 00 mJ / cm 2 followed by development with a 2% by weight aqueous sodium carbonate solution for 5 minutes gave a clear image. When the pattern mask stain after exposure was examined, no stain was observed.
実施例4 D成分として三フッ化ホウ素/2,6−ルチジン錯体7.
5gを用いた他は実施例1と同様に処理して液状感光性
樹脂組成物を調製した。この液状感光性樹脂組成物を使
用し、銅スルーホールプリント回路基板上に厚さ70μ
mの塗膜を形成した。120℃で5分間加熱して塗膜表
面の粘着性を消失させた後、ネガ型パターンマスクを塗
膜表面に密着させて、露光量200mJ/cm2の紫外線
を照射し、次いで2重量%の炭酸ナトリウム水溶液を用
いて20分間スプレー現像すると、鮮明な画像が得られ
た。また露光後のパターンマスク汚れを調べたところ汚
れは全く観察されなかった。Example 4 Boron trifluoride / 2,6-lutidine complex as D component 7.
A liquid photosensitive resin composition was prepared in the same manner as in Example 1 except that 5 g was used. Using this liquid photosensitive resin composition, a thickness of 70μ is formed on a copper through-hole printed circuit board.
m coating film was formed. After heating at 120 ° C. for 5 minutes to eliminate the tackiness of the coating film surface, a negative pattern mask is brought into close contact with the coating film surface, and an ultraviolet ray having an exposure dose of 200 mJ / cm 2 is irradiated. A clear image was obtained by spray development using an aqueous solution of sodium carbonate for 20 minutes. When the pattern mask stain after exposure was examined, no stain was observed.
実施例5 実施例1で用いたA成分(固形分として)22.67g、C
成分として両末端アクリレート化ビスフェノールA型エ
ポキシ樹脂34g、およびサンノプコ社製フォトマー4
061 15gを用いた他は実施例3と同様に処理して
液状感光性樹脂組成物を調製した。この液状感光性樹脂
組成物を使用し、半田スルーホールプリント回路基板上
に厚さ70μmの塗膜を形成した。120℃で5分間加
熱した後、ネガ型パターンマスクを塗膜表面に密着させ
て露光量200mJ/m2の紫外線を照射し、次いで2重
量%の炭酸ナトリウム水溶液を用いて20分間スプレー
現像すると、鮮明な画像が得られた。また露光後のパタ
ーンマスク汚れを調べたところ汚れは全く観察されなか
った。Example 5 Component A (as solid content) used in Example 1 22.67 g, C
34 g of bisphenol A type epoxy resin having both ends acrylated as components, and Photonomer 4 manufactured by San Nopco
A liquid photosensitive resin composition was prepared by treating in the same manner as in Example 3 except that 0615 15 g was used. Using this liquid photosensitive resin composition, a coating film having a thickness of 70 μm was formed on a solder through hole printed circuit board. After heating at 120 ° C. for 5 minutes, a negative type pattern mask is brought into close contact with the surface of the coating film, irradiated with ultraviolet rays having an exposure amount of 200 mJ / m 2 , and then spray-developed for 20 minutes using a 2 wt% sodium carbonate aqueous solution. A clear image was obtained. When the pattern mask stain after exposure was examined, no stain was observed.
実施例6 実施例1で用いたA成分(固形分として)30g、C成
分として両末端アクリレート化ビスフェノールA型エポ
キシ樹脂20g、およびサンノプコ社製フォトマー40
61 20g、B成分としてビスフェノールAジグリシ
ジルエーテル30g、D成分として三フッ化ホウ素/
2,6−ルチジン錯体2.5g、(N−ニトロソフェニル
ヒドロキシルアミンアルミニウム塩0.05g、E成分とし
て2,2−ジメトキシ−2−フェニルアセトフェノン2.
5gおよびセロソルブアセテート7.7gを用い、その他は
実施例1と同様に処理して液状感光性樹脂組成物を調製
した。この液状感光性樹脂組成物を使用し、銅スルーホ
ールプリント回路基板上に厚さ80μmの塗膜を形成し
た。120℃で20分間加熱して、塗膜表面の粘着性を
消失させた後、ネガ型パターンマスクを塗膜表面に密着
させて露光量200mJ/cm2の紫外線を照射し、次い
で2重量%の炭酸ナトリウム水溶液を用いて20分間ス
プレー現像すると、鮮明な画像が得られた。Example 6 30 g of the component A (as a solid content) used in Example 1, 20 g of a bisphenol A type epoxy resin with acrylates having both ends as the component C, and Photomer 40 manufactured by San Nopco Ltd.
61 20 g, B component as bisphenol A diglycidyl ether 30 g, D component as boron trifluoride /
2.5 g of 2,6-lutidine complex, (0.05 g of N-nitrosophenylhydroxylamine aluminum salt, 2,2-dimethoxy-2-phenylacetophenone as E component 2.
A liquid photosensitive resin composition was prepared by using 5 g and 7.7 g of cellosolve acetate and otherwise treating in the same manner as in Example 1. Using this liquid photosensitive resin composition, a coating film having a thickness of 80 μm was formed on a copper through hole printed circuit board. After heating at 120 ° C. for 20 minutes to eliminate tackiness on the surface of the coating film, a negative pattern mask is brought into close contact with the surface of the coating film and irradiated with ultraviolet rays having an exposure dose of 200 mJ / cm 2 , and then 2% by weight. A clear image was obtained by spray development using an aqueous solution of sodium carbonate for 20 minutes.
さらに130℃で30分間加熱して半田耐熱性を調べた
ところ、260℃の半田浴に20秒間浸漬し、さらに再
度20秒間浸漬したが、塗膜表面の変化は全く見られ
ず、本発明の感光性樹脂組成物がソルダーレジストとし
て必要な半田耐熱性を有していることを示した。また半
田付け後の塗膜の絶縁抵抗は、常態下で2×1
012Ω、50℃、90%の湿度下に120時間さらし
た後の値が4×1011Ωで、ソルダーレジストとして
優れていることを示した。また露光後のパターンマスク
汚れを調べたところ汚れは全く観察されなかった。Further, when the solder heat resistance was examined by heating at 130 ° C. for 30 minutes, it was dipped in a solder bath at 260 ° C. for 20 seconds and then dipped again for 20 seconds, but no change was observed on the coating film surface. It was shown that the photosensitive resin composition has the solder heat resistance required as a solder resist. The insulation resistance of the coating film after soldering is 2 × 1 under normal conditions.
The value after exposure to 0 12 Ω , 50 ° C., and 90% humidity for 120 hours was 4 × 10 11 Ω , which was excellent as a solder resist. When the pattern mask stain after exposure was examined, no stain was observed.
実施例7 実施例6で調製した液状感光性樹脂組成物を使用し、銅
スルーホールプリント回路基板上に厚さ80μmの塗膜
を形成した。赤外線ランプを用いて15分間加熱して、
塗膜表面の粘着性を消失させた。赤外線による加熱時の
塗膜表面の温度は室温から100℃へと上昇した。以
下、実施例6と同様にして露光および現像を行なうと、
鮮明な画像が得られた。また露光後のパターンマスク汚
れを調べたところ汚れは全く観察されなかった。Example 7 Using the liquid photosensitive resin composition prepared in Example 6, a coating film having a thickness of 80 μm was formed on a copper through hole printed circuit board. Heat for 15 minutes using an infrared lamp,
The tackiness of the coating film surface was lost. The temperature of the coating film surface during heating by infrared rays increased from room temperature to 100 ° C. Thereafter, when exposure and development are performed in the same manner as in Example 6,
A clear image was obtained. When the pattern mask stain after exposure was examined, no stain was observed.
塗膜の半田耐熱性は260℃/20秒間(2回)を示
し、常態下および耐湿下での絶縁抵抗は、実施例6とほ
とんど同じ値を示し、本発明の液状感光性樹脂組成物が
プリント回路基板用ソルダーレジストとして非常に好適
であることを示した。The solder heat resistance of the coating film shows 260 ° C./20 seconds (twice), the insulation resistance under normal conditions and under humidity resistance shows almost the same value as in Example 6, and the liquid photosensitive resin composition of the present invention is It was shown to be very suitable as a solder resist for printed circuit boards.
(発明の効果) 本発明の液状感光性樹脂組成物は、基板上に塗布後加熱
硬化して塗膜表面の粘着性を消失させることにより、パ
ターンマスクの汚れを生じることなく、従来の露光機を
用いた密着露光が可能であり、またアルカリ性水溶液に
より現像することができるため、溶剤使用による作業環
境汚染の問題もなく、しかもプリント回路基板上に泡の
ない均一な厚みの感光性樹脂層を形成することができ
る。また本発明の液状感光性樹脂組成物は、高密度実装
用プリント回路基板用レジストとしてより好適であり、
紫外線露光に対して高感度、高解像度で、しかも光硬化
後の塗膜の電気特性や機械的特性にも優れ、熱硬化した
後に光硬化が可能であるという特徴を有する。(Effect of the Invention) The liquid photosensitive resin composition of the present invention is applied to a conventional exposure machine without causing contamination of the pattern mask by coating the substrate and then heat-curing it to remove the tackiness of the coating film surface. Since it can be used for contact exposure and can be developed with an alkaline aqueous solution, there is no problem of working environment pollution due to the use of a solvent, and a photosensitive resin layer of uniform thickness without bubbles can be formed on a printed circuit board. Can be formed. Further, the liquid photosensitive resin composition of the present invention is more suitable as a resist for a printed circuit board for high-density mounting,
It is characterized by high sensitivity and resolution for UV exposure, excellent electrical and mechanical properties of the coating film after photocuring, and photocuring after heat curing.
本発明の液状感光性樹脂組成物は、金属、例えば銅、半
田等、および樹脂、例えばエポキシ樹脂、ガラスエポキ
シ樹脂、紙・フェノール樹脂等との密着性に極めて優れ
ており、またレジストとしての電気特性、例えば電気絶
縁性に非常に優れているため、銅装着積層体、すなわち
銅装着エポキシ−ガラス繊維積層板等からなる銅スルー
ホールプリント回路基板、半田スルーホールプリント回
路基板等のプリント回路基板用ホトレジスト、特にプリ
ント回路基板用ソルダーレジストとして好適である。The liquid photosensitive resin composition of the present invention is extremely excellent in adhesion to metals such as copper and solder, and resins such as epoxy resin, glass epoxy resin, and paper / phenol resin, and also serves as an electrical resist. For printed circuit boards such as copper through-hole printed circuit boards and solder through-hole printed circuit boards made of copper-loaded epoxy-glass fiber laminates, etc. because of their extremely excellent characteristics such as electrical insulation. It is suitable as a photoresist, especially as a solder resist for printed circuit boards.
さらに本発明の液状感光性樹脂組成物は、メッキ用ホト
レジスト、エッチング用ホトレジスト、各種印刷用樹脂
板(凸版、平版、凹版、孔版)、光接着剤等に使用する
ことができ、感光性材料を用いることが有利な分野、特
に電子部品用の永久絶縁膜、層間絶縁膜等の用途にも好
適である。Furthermore, the liquid photosensitive resin composition of the present invention can be used for photoresists for plating, photoresists for etching, various printing resin plates (relief plates, planographic plates, intaglio plates, stencil plates), optical adhesives, etc. It is also suitable for fields in which it is advantageous to use, especially for applications such as permanent insulating films for electronic parts and interlayer insulating films.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 池田 弘治 東京都中央区築地2丁目11番24号 日本合 成ゴム株式会社内 (56)参考文献 特開 昭49−107333(JP,A) 特開 昭60−121444(JP,A) 特公 昭60−22004(JP,B1) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Koji Ikeda 2-11-24 Tsukiji, Chuo-ku, Tokyo Within Nippon Synthetic Rubber Co., Ltd. (56) Reference JP-A-49-107333 (JP, A) JP Sho 60-121444 (JP, A) Japanese Patent Sho 60-22004 (JP, B1)
Claims (2)
有するビスフェノール型エポキシアクリレートと酸無水
物との反応生成物5〜60重量%、(B)少なくとも1
個のエポキシ基を有する液状エポキシ化合物(但し前記
(A)成分を除く。)5〜40重量%、(C)少なくと
も1個のエチレン性不飽和二重結合を有する光重合性化
合物10〜60重量%、(D)エポキシ基を熱反応させ
ることができる熱反応性触媒0.01〜10重量%および
(E)光重合開始剤0.001〜15重量%を含有してなる
液状感光性樹脂組成物。(A) 5 to 60% by weight of a reaction product of a bisphenol type epoxy acrylate having at least one carboxyl group and an acid anhydride, (B) at least 1
Liquid epoxy compound having 1 epoxy group (however, excluding the component (A)) 5 to 40% by weight, (C) 10 to 60 weight of a photopolymerizable compound having at least one ethylenically unsaturated double bond %, (D) 0.01 to 10% by weight of a heat-reactive catalyst capable of thermally reacting an epoxy group, and (E) a photopolymerization initiator of 0.001 to 15% by weight.
有するビスフェノール型エポキシアクリレートと酸無水
物との反応生成物5〜60重量%、(B)少なくとも1
個のエポキシ基を有する液状エポキシ化合物(但し前記
(A)成分を除く。)5〜40重量%、(C)少なくと
も1個のエチレン性不飽和二重結合を有する光重合性化
合物10〜60重量%、(D)エポキシ基を熱反応させ
ることができる熱反応性触媒0.01〜10重量%および
(E)光重合開始剤0.001〜15重量%を含有してなる
液状感光性樹脂組成物を、基板上に塗布し、加熱硬化
し、次いで硬化塗膜にパターンマスクを密着させて露光
後、アルカリ性水溶液により現像することを特徴とする
画像形成法。2. (A) 5 to 60% by weight of a reaction product of a bisphenol type epoxy acrylate having at least one carboxyl group and an acid anhydride, and (B) at least 1.
Liquid epoxy compound having 1 epoxy group (however, excluding the component (A)) 5 to 40% by weight, (C) 10 to 60 weight of a photopolymerizable compound having at least one ethylenically unsaturated double bond %, (D) 0.01 to 10% by weight of a heat-reactive catalyst capable of thermally reacting an epoxy group, and (E) a photopolymerization initiator of 0.001 to 15% by weight, a liquid photosensitive resin composition comprising: An image forming method, which comprises coating on the surface, heat-curing, exposing the cured coating film to a pattern mask, exposing, and developing with an alkaline aqueous solution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61030574A JPH0618856B2 (en) | 1986-02-14 | 1986-02-14 | Liquid photosensitive resin composition and image forming method using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61030574A JPH0618856B2 (en) | 1986-02-14 | 1986-02-14 | Liquid photosensitive resin composition and image forming method using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62187722A JPS62187722A (en) | 1987-08-17 |
| JPH0618856B2 true JPH0618856B2 (en) | 1994-03-16 |
Family
ID=12307617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61030574A Expired - Lifetime JPH0618856B2 (en) | 1986-02-14 | 1986-02-14 | Liquid photosensitive resin composition and image forming method using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0618856B2 (en) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5364736A (en) * | 1987-12-07 | 1994-11-15 | Morton International, Inc. | Photoimageable compositions |
| JPH0791363B2 (en) * | 1987-12-08 | 1995-10-04 | 三井石油化学工業株式会社 | Active energy ray curable composition |
| JPH01203424A (en) * | 1988-02-09 | 1989-08-16 | Toagosei Chem Ind Co Ltd | Curable composition |
| JP2590215B2 (en) * | 1988-07-15 | 1997-03-12 | 旭電化工業株式会社 | Optical molding resin composition |
| JP2604438B2 (en) * | 1988-09-19 | 1997-04-30 | 旭電化工業株式会社 | Optical molding method of resin |
| JP2590230B2 (en) * | 1988-09-13 | 1997-03-12 | 旭電化工業株式会社 | Optical molding resin composition |
| US5070002A (en) * | 1988-09-13 | 1991-12-03 | Amp-Akzo Corporation | Photoimageable permanent resist |
| JP2582884B2 (en) * | 1988-12-27 | 1997-02-19 | タムラ化研株式会社 | Photosensitive resin composition |
| JP2582883B2 (en) * | 1988-12-27 | 1997-02-19 | タムラ化研株式会社 | Photosensitive resin composition |
| JPH02173749A (en) * | 1988-12-27 | 1990-07-05 | Tamura Kaken Kk | Photosensitive resin composition |
| JPH0823695B2 (en) * | 1988-12-27 | 1996-03-06 | タムラ化研株式会社 | Photosensitive resin composition |
| IL94474A (en) * | 1989-06-09 | 1993-07-08 | Morton Int Inc | Photoimageable compositions |
| DE3931467A1 (en) * | 1989-09-21 | 1991-04-04 | Hoechst Ag | POLYMERIZABLE MIXTURE BY RADIATION AND METHOD FOR PRODUCING A SOLDER STOP MASK |
| JPH06273631A (en) * | 1993-03-18 | 1994-09-30 | Nippon Telegr & Teleph Corp <Ntt> | Optical waveguide |
| JP3918269B2 (en) * | 1997-12-25 | 2007-05-23 | 凸版印刷株式会社 | Heat resistant low dielectric constant resin composition and method for producing the same, and electronic device component using the heat resistant low dielectric constant resin composition |
| CN107793556A (en) * | 2016-08-29 | 2018-03-13 | Jsr株式会社 | Curable adhensive compositions, hardening thing, light-emitting device and its manufacture method |
| TWI655239B (en) * | 2016-12-21 | 2019-04-01 | 日商三菱化學股份有限公司 | Curable resin composition, and film, molded article, prepreg, and fiber-reinforced plastic using the same |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49107333A (en) * | 1973-02-14 | 1974-10-11 | ||
| JPS6022004A (en) * | 1983-07-15 | 1985-02-04 | Hitachi Ltd | Seal structure of inlet steam pipe for steam turbine |
| JPS60121444A (en) * | 1983-12-06 | 1985-06-28 | Nippon Soda Co Ltd | Alkali-developable photosensitive resin composition |
-
1986
- 1986-02-14 JP JP61030574A patent/JPH0618856B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62187722A (en) | 1987-08-17 |
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