JPH0621890B2 - Manufacturing method of multilayer thin film star coupler - Google Patents
Manufacturing method of multilayer thin film star couplerInfo
- Publication number
- JPH0621890B2 JPH0621890B2 JP59251800A JP25180084A JPH0621890B2 JP H0621890 B2 JPH0621890 B2 JP H0621890B2 JP 59251800 A JP59251800 A JP 59251800A JP 25180084 A JP25180084 A JP 25180084A JP H0621890 B2 JPH0621890 B2 JP H0621890B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- clad
- refractive index
- star coupler
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 title claims description 32
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 230000003287 optical effect Effects 0.000 claims description 9
- 229920003002 synthetic resin Polymers 0.000 claims description 6
- 239000000057 synthetic resin Substances 0.000 claims description 6
- 238000005520 cutting process Methods 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 claims 4
- 230000001070 adhesive effect Effects 0.000 claims 4
- 238000000465 moulding Methods 0.000 claims 3
- 239000013307 optical fiber Substances 0.000 description 5
- 239000010410 layer Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000012792 core layer Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Description
【発明の詳細な説明】 この発明は、光通信用の多層薄膜スターカプラの製造法
に関する。The present invention relates to a method for manufacturing a multilayer thin film star coupler for optical communication.
スターカプラについては種々研究され、提案されている
(例えば昭59信学総全大337〜341)が従来のも
のは単層体又はブロック状のものが多く、しかもファイ
バー接合部における接合損失が比較的大きいものであっ
た。Various researches and proposals have been made on star couplers (for example, Shogaku Shinshin University 337-341), but conventional ones are often single-layer or block-shaped, and the splice loss in fiber splices is compared. It was a big one.
(目的) 本発明は、光ファイバーとの接続部における結合損失を
低減し、ミキサー部におけるミキシング効率を高めると
共に入出力ポートを高密度に配設し得るスターカプラを
提供するものである。(Object) An object of the present invention is to provide a star coupler capable of reducing the coupling loss at the connecting portion with the optical fiber, improving the mixing efficiency in the mixer portion, and arranging the input / output ports at a high density.
(構成) 本発明スターカプラの製造法は、従来法の如く基体中の
一部に光導波路を形成させる(例えば特開昭55−14
9908)のではなく、光導波路(コアー部)を構成す
る高屈折率方形導波路薄膜間の両端部に、夫々クラッド
部を構成する低屈折率の薄膜片を挟んで重ね合せ体を構
成して真空下又は常圧下で各層間を密着せしめて積層体
とした後、全体を低屈折率の合成樹脂でモールドしてブ
ロック体を形成し、該ブロック体における前記光導波路
薄膜の断面が正方形になるように板状に切裁することを
特徴とするものである。(Structure) In the method for producing the star coupler of the present invention, an optical waveguide is formed in a part of the substrate as in the conventional method (for example, JP-A-55-14).
9908), instead of the high refractive index rectangular waveguide thin films forming the optical waveguide (core part), the superposed body is formed by sandwiching the low refractive index thin film pieces forming the clad part at both ends. After each layer is adhered to each other under vacuum or normal pressure to form a laminated body, the whole is molded with a low refractive index synthetic resin to form a block body, and the optical waveguide thin film in the block body has a square cross section. It is characterized in that it is cut into a plate shape.
更に、このようにして得られた平板状のスターカプラを
多数枚重ねてその両端部間に前記クラッド部と同様の低
屈折率薄膜片を介して前記と同様の方法によって光導波
路断面が2次元的に整列した密着積層体として3次元ス
ターカプラを得るものである。Further, a large number of flat plate star couplers thus obtained are stacked, and a two-dimensional optical waveguide cross-section is formed by the same method as above with a low-refractive-index thin film piece similar to the clad portion interposed between both ends thereof. A three-dimensional star coupler is obtained as a closely aligned laminated body.
以下に本発明を図について説明する。The present invention will be described below with reference to the drawings.
第1図において、1はコアー部を構成するための高屈折
率の長方形導波路薄膜、2,3はクラッド部を形成する
低屈折率のクラッド薄膜片であって導波路薄膜1の両端
部20及び30に間装されて重ね合せ体4が形成され
る。In FIG. 1, 1 is a rectangular waveguide thin film having a high refractive index for forming a core portion, and 2 and 3 are clad thin film pieces having a low refractive index for forming a clad portion, which are both end portions 20 of the waveguide thin film 1. And 30, and the superposed body 4 is formed.
この重ね合せ体4を真空下又は大気中で、適当な物理的
手段によって押圧すると、第1図(b)のように中央部
40の薄膜は相互に密着し中央部40に導波路薄膜の密
着域8aが形成された密着積層体が得られる。この状態
で全体を前記クラック部と同等又はそれ以下の低屈折率
の合成樹脂5でモールドして全体を1個のブロック6と
する。このようにして形成された第2図のブロック6を
積層面に対して直角にスライスすると端面が第4図の如
き平板体7が得られる。When the superposed body 4 is pressed by a suitable physical means under vacuum or in the atmosphere, the thin films in the central portion 40 are in close contact with each other as shown in FIG. A contact laminate having the area 8a is obtained. In this state, the whole is molded with a synthetic resin 5 having a low refractive index equal to or less than that of the crack portion to form one block 6 as a whole. When the block 6 of FIG. 2 thus formed is sliced at a right angle to the laminated surface, a flat plate body 7 having an end face as shown in FIG. 4 is obtained.
上記において各薄膜の膜厚は、接続すべき光ファイバー
によって決定すべきもので、例えばファイバー10のコ
アー径(d)50μm、クラッド径(D)100μmで
あれば各膜厚は夫々50μmのものが好適である。In the above, the thickness of each thin film should be determined depending on the optical fiber to be connected. For example, if the core diameter (d) of the fiber 10 is 50 μm and the clad diameter (D) is 100 μm, it is preferable that each thickness is 50 μm. is there.
またブロック6から平板体7を得る場合において、直接
所望厚さにスライスできない場合はブロック6を適当な
基板上に固定してからできるだけ薄くスライスし、これ
を所望する厚さ即ち膜厚に等しい厚さに研摩加工する。
なお、基板は不要端部を切除してもよいし、場合によっ
てはそのままでもよい。Further, in the case of obtaining the flat plate body 7 from the block 6, if the plate 6 cannot be sliced directly to a desired thickness, the block 6 is fixed on an appropriate substrate and then sliced as thinly as possible to obtain a thickness equal to a desired thickness. And grind.
Note that the substrate may be cut off at unnecessary ends, or may be left as it is in some cases.
このようにして得られた平板体の両端面を研摩すること
によってコアー部端面aとクラッド部端面bが形成され
光ファイバーを接続して2次元スターカプラが得られ
る。A two-dimensional star coupler is obtained by polishing both end faces of the flat plate thus obtained to form a core end face a and a clad end face b and connecting optical fibers.
本発明スターカプラにおいて、ミキサー部8は高屈折薄
膜の密着体で構成されており、各境界9は反射層とな
る。この反射層によって散乱がより強度になりミキサー
部8のミキシング効率は高くなるので出力ポートへの均
等分配が向上する効果もある。In the star coupler of the present invention, the mixer section 8 is composed of a close contact body of high refractive index thin film, and each boundary 9 becomes a reflection layer. This reflection layer increases the intensity of scattering and increases the mixing efficiency of the mixer section 8, which also has the effect of improving the even distribution to the output ports.
上記スターカプラにおいては、ミキサー部8が板状体と
なっているからこの部分の均等分配性能を更に向上する
ためにミキサー部のみに凹凸を形成してもよい。In the above star coupler, since the mixer section 8 is a plate-shaped body, unevenness may be formed only in the mixer section in order to further improve the uniform distribution performance of this section.
即ち、密着積層体を形成する過程又はその後において表
面に波型、カマボコ状又は半球状突出部(直径約1m
m)を形成した押型によってミキサー部となる中央部4
0を押圧することによってミキサー部に波状を形成でき
るのである。That is, in the process of forming a contact laminated body or after that, corrugated, chamfered or hemispherical protrusions (diameter of about 1 m are formed on the surface.
m) the central part 4 which becomes the mixer part by the die
By pressing 0, the wavy shape can be formed in the mixer section.
なお、第2図のブロック体の端面6a,6bにそのコア
ー層に沿って光ファイバーを多段に接続して3次元スタ
ーカプラとして用いることが考えられるが2の使用形態
ではコアー接続部における損失が増加する。第5図に示
すものはこれを解決したものである。It is considered that optical fibers are connected in multiple stages along the core layers on the end faces 6a and 6b of the block body in FIG. 2 to be used as a three-dimensional star coupler. However, in the usage pattern of 2, the loss at the core connecting portion increases. To do. The one shown in FIG. 5 is a solution to this.
即ち第3図のスライス平板体7を一枚の導波路薄膜とみ
なしてこの両端側20,30に夫々低屈折率薄膜片23
を介装して第1図と同様に重ね合せ、この重ね合せ体を
その中央部において圧着すると共に空間部及び全体を合
成樹脂で充填する。That is, the sliced flat plate body 7 of FIG. 3 is regarded as one waveguide thin film, and the low refractive index thin film pieces 23 are provided on both ends 20 and 30, respectively.
1 and superimpose them in the same manner as in FIG. 1, and press the superposed body at its central portion and fill the space and the whole with synthetic resin.
これによって中央部には3次元的な光結合部が形成さ
れ、且つ入出力ポート端面は高屈折率光導波路aが平面
的に等間隔で露出して存在するので光ファイバーを行列
として直接接続できる。As a result, a three-dimensional optical coupling portion is formed in the central portion, and the high-refractive-index optical waveguides a are exposed at the input / output port end faces in plan view at equal intervals, so that the optical fibers can be directly connected as a matrix.
なお第3図の平板体をA−Aで切裁した半裁体はそれ自
体で分配器として使用できる。The half-cut body obtained by cutting the flat plate body of FIG. 3 with AA can be used as a distributor by itself.
(効果) 以上のように本発明によれば屈折率が異なる2種類の薄
膜を積層することによって両端に入出力ポートが高密度
で配列され、中間部に2次元又は3次元ミキサ部を備え
た板状2次元スターカプラ及びブロック状3次元スター
カプラを製造することが可能になる。(Effect) As described above, according to the present invention, by laminating two kinds of thin films having different refractive indexes, the input / output ports are arranged at high density at both ends, and the two-dimensional or three-dimensional mixer section is provided in the middle section. It becomes possible to manufacture a plate-shaped two-dimensional star coupler and a block-shaped three-dimensional star coupler.
また簡単な手段によってミキサー部におけるミキシング
効率を向上させることができる。Also, the mixing efficiency in the mixer section can be improved by a simple means.
第1図は本発明カプラーの作成過程を示す斜視図であっ
て、(a)は重ね合せ体、(b)は加圧積層体である。
第2図はモールドされた状態の斜視図、第3図はスライ
スされた2次元スターカプラの平面図、第4図はその拡
大端面図、第5図は3次元スターカプラの端面図であ
る。 1はコアー部構成用高屈折率導波路薄膜、2,3はクラ
ッド薄膜、4は重ね合せ体、8はミキサー部、9は反射
層である。FIG. 1 is a perspective view showing a production process of the coupler of the present invention, wherein (a) is a laminated body and (b) is a pressure laminated body.
2 is a perspective view of a molded state, FIG. 3 is a plan view of a sliced two-dimensional star coupler, FIG. 4 is an enlarged end view thereof, and FIG. 5 is an end view of a three-dimensional star coupler. 1 is a high refractive index waveguide thin film for core part construction, 2 and 3 are clad thin films, 4 is a superposed body, 8 is a mixer part, and 9 is a reflective layer.
Claims (2)
膜の両端部間に夫々クラッド薄膜片を挟んで重ね合せ体
を構成する工程と、この重ね合せ体の各薄膜を真空下又
は常圧下で密着させて密着積層体とする工程と、該密着
積層体を前記クラッド薄膜の屈折率と同等又はより低い
屈折率の合成樹脂でモールドしてブロック体とする工程
と、該ブロック体における前記導波路薄膜の断面が正方
形になるように板状に切裁する工程とからなる多層薄膜
2次元スターカプラの製造法。1. A step of forming a superposed body by sandwiching a clad thin film piece between both ends of a large number of rectangular waveguide thin films constituting an optical waveguide, and the thin films of the superposed body under vacuum or at ordinary times. A step of bringing them into contact with each other under pressure to form an adhesive laminate; a step of molding the adhesive laminate with a synthetic resin having a refractive index equal to or lower than that of the clad thin film to form a block body; A method of manufacturing a multi-layer thin film two-dimensional star coupler, which comprises a step of cutting a waveguide thin film into a plate shape so as to have a square cross section.
膜の両端部間に夫々クラッド薄膜片を挟んで重ね合せ体
を構成する工程と、この重ね合せ体の各薄膜を真空下又
は常圧下で密着させて密着積層体とする工程と、該密着
積層体を前記クラッド薄膜の屈折率と同等又はより低い
屈折率の合成樹脂でモールドしてブロック体とする工程
と、該ブロック体における前記導波路薄膜の断面が正方
形になるように板状に切裁する工程と、多数の前記切裁
平板体の両端部間に前記クラッド薄膜又はこれと同程度
の低屈折率薄膜を介装させて重ね合せ体を得る工程と、
その後密着積層体としてから低屈折率合成樹脂で全体を
モールドする工程とからなる多層薄膜3次元スターカプ
ラの製造法。2. A step of forming a laminated body by sandwiching a clad thin film piece between both ends of a large number of rectangular waveguide thin films constituting an optical waveguide, and a step of forming each thin film of the laminated body under vacuum or at ordinary times. A step of bringing them into contact with each other under pressure to form an adhesive laminate; a step of molding the adhesive laminate with a synthetic resin having a refractive index equal to or lower than that of the clad thin film to form a block body; A step of cutting the waveguide thin film into a plate shape so as to have a square cross section, and inserting the clad thin film or a low refractive index thin film of the same degree as the clad thin film between both ends of the cutting flat plate body. A step of obtaining a superposed body,
Then, a method for producing a multilayer thin film three-dimensional star coupler, which comprises a step of forming a contact laminate and then molding the whole with a low refractive index synthetic resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59251800A JPH0621890B2 (en) | 1984-11-30 | 1984-11-30 | Manufacturing method of multilayer thin film star coupler |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59251800A JPH0621890B2 (en) | 1984-11-30 | 1984-11-30 | Manufacturing method of multilayer thin film star coupler |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61130906A JPS61130906A (en) | 1986-06-18 |
| JPH0621890B2 true JPH0621890B2 (en) | 1994-03-23 |
Family
ID=17228112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59251800A Expired - Lifetime JPH0621890B2 (en) | 1984-11-30 | 1984-11-30 | Manufacturing method of multilayer thin film star coupler |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0621890B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1148477B1 (en) * | 2000-04-18 | 2005-01-05 | Seiko Instruments Inc. | Information recording and reproducing apparatus |
| JP4184570B2 (en) | 2000-04-18 | 2008-11-19 | セイコーインスツル株式会社 | Information recording / reproducing device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4262995A (en) * | 1979-03-05 | 1981-04-21 | Hughes Aircraft Company | Planar star coupler device for fiber optics |
-
1984
- 1984-11-30 JP JP59251800A patent/JPH0621890B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61130906A (en) | 1986-06-18 |
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