JPH0622309B2 - Piezoelectric vibrator for etching monitor - Google Patents
Piezoelectric vibrator for etching monitorInfo
- Publication number
- JPH0622309B2 JPH0622309B2 JP59213042A JP21304284A JPH0622309B2 JP H0622309 B2 JPH0622309 B2 JP H0622309B2 JP 59213042 A JP59213042 A JP 59213042A JP 21304284 A JP21304284 A JP 21304284A JP H0622309 B2 JPH0622309 B2 JP H0622309B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- piezoelectric
- piezoelectric vibrator
- divided electrodes
- etching monitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Drying Of Semiconductors (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、圧電振動板などの一面をドライエッチングす
る際に、エッチング量をモニタするためのエッチングモ
ニタ用圧電振動子に関する。Description: TECHNICAL FIELD The present invention relates to an etching monitor piezoelectric vibrator for monitoring an etching amount when dry-etching one surface of a piezoelectric diaphragm or the like.
（従来技術） 通常、圧電振動子をドライエッチングする場合には、第
７図に示されるように、エッチング台１の上に圧電振動
子２を配置して、この圧電振動子２の上面を、例えば、
ＣＨ４ガスによってドライエッチングするようにしてい
る。(Prior Art) Usually, when dry etching a piezoelectric vibrator, as shown in FIG. 7, a piezoelectric vibrator 2 is placed on an etching table 1 and the upper surface of the piezoelectric vibrator 2 is For example,
Dry etching is performed with CH 4 gas.
そして、エッチング量はエッチング時間によったり、オ
ペレータの感によりエッチングされた圧電振動子をころ
あいをみはからってピックアップし、そのピックアップ
された圧電振動子をメータ等により測定してエッチング
量の監視を行なっていた。The etching amount depends on the etching time or the operator feels that the etched piezoelectric vibrator is picked up by taking a rolling contact, and the picked-up piezoelectric vibrator is measured by a meter or the like to determine the etching amount. I was watching.
（従来技術の問題点） 前記したエッチング量の監視方法は、面倒であり、省人
化、省力化上問題があるばかりでなく、圧電振動子の品
質及び信頼性の向上という点からも問題であった。(Problems of the prior art) The above-described etching amount monitoring method is troublesome, and not only has problems in labor saving and labor saving, but also in terms of improving the quality and reliability of the piezoelectric vibrator. there were.
（発明の目的） 本発明は、上記の問題点を解決するために、圧電振動子
をドライエッチングする場合にエッチングの進行状況を
監視して迅速、かつ的確にエッチング状況を把握し得る
エッチングモニタ用圧電振動子を提供することを目的と
する。(Object of the Invention) In order to solve the above problems, the present invention is for an etching monitor capable of monitoring the progress of etching when a piezoelectric vibrator is dry-etched to grasp the etching status quickly and accurately. An object is to provide a piezoelectric vibrator.
（発明の概要） 本発明は、圧電振動板の片面に対になった少なくとも一
対の分割電極を設け、該分割電極に交番電流を供給して
水平電界励振を行わせ、該圧電振動板の他面のエッチン
グにより共振周波数が変化することを検出して、他の圧
電振動板のエッチング状態をモニタできるようにしたこ
とを特徴とするものである。(Summary of the Invention) The present invention provides at least a pair of divided electrodes that are paired on one surface of a piezoelectric diaphragm, and supplies an alternating current to the divided electrodes to cause horizontal electric field excitation. It is characterized in that the etching state of other piezoelectric diaphragms can be monitored by detecting that the resonance frequency is changed by etching the surface.
（実施例） 以下、本発明の一実施例を図面を参照しながら詳細に説
明する。(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings.
第１図は本発明に係るエッチングモニタ装置を有する圧
電振動子を説明する図であり、第２図は当該圧電振動子
の断面図である。図において、２は圧電平板、３はモニ
タ用分割電極、１０は高周波電源である。FIG. 1 is a diagram for explaining a piezoelectric vibrator having an etching monitor device according to the present invention, and FIG. 2 is a sectional view of the piezoelectric vibrator. In the figure, 2 is a piezoelectric flat plate, 3 is a monitor division electrode, and 10 is a high frequency power supply.
図から明らかなように、圧電結晶平板（以下、圧電平板
という）２の片面に一対のモニタ用分極電極３を配置
し、その電極３に高周波電源１０から交番電流を流し、
一対の電極３，３間に水平電界（第４図参照）をかけて
水晶片２を励振させる。即ち、圧電結晶の電気軸に対し
斜め方向に切断した圧電平板２を設け、その圧電平板２
の片面に励振のための分割電極３を設けて、交番電界を
かけると平面の境界条件を満足する共振点付近で共振現
象がみられる。勿論、この共振は電気軸に沿った電界成
分によって圧電平板が強制励振されるために生起するも
のであるために、一般にその圧電平板２の両面対向電極
構造の場合の共振と比べると共振レベルは弱い。従っ
て、一般の発振法によらず、第３図に示されるように、
伝送法と称されるループの発振回路網を設け、そのルー
プ間に当該圧電振動子を間挿させて用いるようにするの
が望ましい。この時、当該圧電振動子の両端子間の位相
がほぼ０になるように位相調整増幅器８によって調整さ
れ、かつ振幅が発振に十分なように増幅される。As is clear from the figure, a pair of polarization electrodes for monitoring 3 are arranged on one surface of a piezoelectric crystal flat plate (hereinafter referred to as a piezoelectric flat plate) 2, and an alternating current is passed from the high frequency power source 10 to the electrodes 3.
A horizontal electric field (see FIG. 4) is applied between the pair of electrodes 3 and 3 to excite the crystal blank 2. That is, a piezoelectric flat plate 2 cut obliquely to the electric axis of the piezoelectric crystal is provided, and the piezoelectric flat plate 2 is provided.
When the divided electrode 3 for excitation is provided on one surface of the above and an alternating electric field is applied, a resonance phenomenon is observed near the resonance point that satisfies the boundary condition of the plane. Of course, this resonance occurs because the piezoelectric flat plate is forcibly excited by the electric field component along the electric axis, and therefore the resonance level is generally lower than that in the case of the double-sided opposing electrode structure of the piezoelectric flat plate 2. weak. Therefore, regardless of the general oscillation method, as shown in FIG.
It is desirable that an oscillation circuit network of a loop called a transmission method is provided and the piezoelectric vibrator is inserted between the loops for use. At this time, the phase adjustment amplifier 8 adjusts so that the phase between both terminals of the piezoelectric vibrator becomes substantially zero, and the amplitude is amplified to be sufficient for oscillation.
次に、当該圧電振動子を水晶振動子とした場合について
説明する。Next, a case where the piezoelectric vibrator is a crystal vibrator will be described.
水晶片の場合は、ＡＴカットはＹ軸から約３５゜傾けた
結晶板を用いる。一般に、結晶板の厚みに反比例した固
有周波数、つまり共振周波数を示すが、第４図のよう
に、この場合にも、片面に付設された薄い分割電極３を
含めて厚みｔに反比例した共振周波数を有する。即ち、 ｆ＝Ｋ／ｔ …（１） が成立する。ここでＫは厚み周波数定数である。In the case of a crystal piece, AT cutting uses a crystal plate tilted by about 35 ° from the Y axis. Generally, the natural frequency, which is inversely proportional to the thickness of the crystal plate, that is, the resonance frequency, is shown. As shown in FIG. 4, in this case as well, the resonance frequency including the thin divided electrode 3 attached to one surface is inversely proportional to the thickness t. Have. That is, f = K / t (1) holds. Here, K is a thickness frequency constant.
そこで、分割電極３が付設された面と反対側の面が、例
えば、真空中でドライエッチングまたはリアクティブイ
オンエッチングと称されるエッチング（蝕刻）を受ける
と、これによって厚みが減じた分Δｔだけ周波数が高く
なる。つまり、周波数Δｆだけ周波数が高くなる。即
ち、 Δｆ＝−Ｋ′ｆ2Δｔ …（２） として示されることになり、この式（２）よりΔｆをモ
ニタすることにより、Δｔ、即ちエッチング量を知るこ
とができる。Therefore, when the surface opposite to the surface provided with the divided electrodes 3 is subjected to etching (etching) called dry etching or reactive ion etching in a vacuum, for example, the thickness is reduced by Δt. The frequency becomes higher. That is, the frequency increases by the frequency Δf. That is, it is expressed as Δf = −K′f 2 Δt (2), and by monitoring Δf from this equation (2), Δt, that is, the etching amount can be known.
ところで、第５図に示されるように、圧電振動子の構造
として、圧電平板２の分割電極３が付設された側と反対
側にエッチングすべき物質と同じ物質膜４を付着し、こ
の物質膜４をエッチングするようにすると好適である。
この場合はエッチングガスの選択特性による被エッチン
グ物のエッチング特性を同一にできる。即ち、質量付加
効果の逆の効果によってそのエッチング量を正確に知る
ことができる。By the way, as shown in FIG. 5, as the structure of the piezoelectric vibrator, the same material film 4 as the material to be etched is attached to the side of the piezoelectric flat plate 2 opposite to the side where the divided electrodes 3 are attached. 4 is preferably etched.
In this case, the etching characteristics of the object to be etched can be made the same by the selection characteristics of the etching gas. That is, the etching amount can be accurately known by the opposite effect of the mass addition effect.
前記したように、圧電平板２の片面にのみ配設された分
割電極３の電気軸成分電界による励振のため極めて弱い
レベルでしか共振が観測できないので、この欠点を補う
ため第６図に示されるように、分割電極を交互に複数組
設けた多電極型のものとすることができる。As described above, resonance is observed only at an extremely weak level due to the excitation by the electric field component electric field of the divided electrode 3 arranged only on one surface of the piezoelectric flat plate 2, so that it is shown in FIG. Thus, a multi-electrode type in which a plurality of sets of divided electrodes are alternately provided can be used.
尚、当該圧電振動子の振動モードは圧電結晶板の両面を
境界条件とするものであれば、例えば、辷り、面すべ
り、縦、屈曲など自由に用いることができる。また、圧
電振動子は結晶板だけでなく適当な斜方向分極を施すこ
とによりセラミックなども使用することができる。更
に、ＡＴカットは温度特性の点で有利である。また、半
導体などやＳｉＯ２エッチングに別な物質を付着せず、
そのまま利用することができる。Note that the vibration mode of the piezoelectric vibrator can be freely used, such as sloping, surface slipping, vertical, and bending, as long as both sides of the piezoelectric crystal plate are used as boundary conditions. Further, not only a crystal plate but also a ceramic or the like can be used as the piezoelectric vibrator by subjecting it to appropriate oblique polarization. Furthermore, AT cut is advantageous in terms of temperature characteristics. Also, do not attach another substance to semiconductors or SiO 2 etching,
It can be used as it is.
（発明の効果） 本発明によれば、圧電振動板の片面に対になった分割電
極を設け、該分割電極に交番電流を供給して水平電界励
振を行なわせて、圧電振動板のエッチング状態をモニタ
できるようにしたので、従来、面倒であったエッチング
に係る作業の効率化を図ることができる。従って、本発
明は、省人化、省力化を推進すると共に圧電振動子の品
質及び信頼性の向上を達成し得るという効果を奏するこ
とができる。(Effects of the Invention) According to the present invention, a pair of divided electrodes is provided on one surface of a piezoelectric diaphragm, and an alternating current is supplied to the divided electrodes to cause horizontal electric field excitation, thereby etching the piezoelectric diaphragm. Since it is possible to monitor, it is possible to improve the efficiency of the work related to etching, which has been troublesome in the past. Therefore, the present invention can bring about an effect that the labor and labor can be promoted and the quality and reliability of the piezoelectric vibrator can be improved.
第１図は本発明に係る圧電振動子の説明図、第２図は当
該圧電振動子の断面図、第３図は当該圧電振動子の共振
レベルをアップさせるための説明図、第４図は当該圧電
振動子の励振を説明するための圧電振動子の断面図、第
５図及び第６図は他の実施例を示す圧電振動子の断面
図、第７図は従来の圧電振動子のエッチングを説明する
説明図である。 ２……圧電結晶平板、３……分割電極、４……被エッチ
ング物質と同一な物質膜、８……位相調整増幅器、１０
……高周波電源。FIG. 1 is an explanatory view of a piezoelectric vibrator according to the present invention, FIG. 2 is a sectional view of the piezoelectric vibrator, FIG. 3 is an explanatory view for increasing the resonance level of the piezoelectric vibrator, and FIG. A sectional view of the piezoelectric vibrator for explaining the excitation of the piezoelectric vibrator, FIGS. 5 and 6 are sectional views of a piezoelectric vibrator showing another embodiment, and FIG. 7 is an etching of the conventional piezoelectric vibrator. It is an explanatory view explaining. 2 ... Piezoelectric crystal flat plate, 3 ... divided electrode, 4 ... substance film same as material to be etched, 8 ... phase adjustment amplifier, 10
…… High frequency power supply.
Claims (3)
一対の分割電極を設け、該分割電極に交番電流を供給し
て水平電界励振を行わせ、該圧電振動板の他面のエッチ
ングにより共振周波数が変化することを検出して、他の
圧電振動板のエッチング状態をモニタできるようにした
ことを特徴とするエッチングモニタ用圧電振動子。1. A piezoelectric vibrating plate is provided with at least one pair of divided electrodes which are paired on one side thereof, and an alternating current is supplied to the divided electrodes to cause horizontal electric field excitation, and the other surface of the piezoelectric vibrating plate is etched. A piezoelectric vibrator for an etching monitor, characterized in that the etching state of another piezoelectric diaphragm can be monitored by detecting a change in the resonance frequency.
とする特許請求の範囲第（１）項記載のエッチングモニ
タ用圧電振動子。2. The piezoelectric vibrator for an etching monitor according to claim 1, wherein the piezoelectric diaphragm is made of quartz.
多電極型であることを特徴とする特許請求の範囲第
（１）項又は第（２）項記載のエッチングモニタ用圧電
振動子。3. The piezoelectric vibrator for an etching monitor according to claim 1, wherein the pair of divided electrodes is a multi-electrode type having a plurality of sets. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59213042A JPH0622309B2 (en) | 1984-10-11 | 1984-10-11 | Piezoelectric vibrator for etching monitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59213042A JPH0622309B2 (en) | 1984-10-11 | 1984-10-11 | Piezoelectric vibrator for etching monitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6192020A JPS6192020A (en) | 1986-05-10 |
| JPH0622309B2 true JPH0622309B2 (en) | 1994-03-23 |
Family
ID=16632551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59213042A Expired - Lifetime JPH0622309B2 (en) | 1984-10-11 | 1984-10-11 | Piezoelectric vibrator for etching monitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0622309B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2903399B2 (en) * | 1992-10-26 | 1999-06-07 | 捷雄 金丸 | Frequency adjustment method for piezoelectric filter |
| JP2004241706A (en) | 2003-02-07 | 2004-08-26 | Tokyo Electron Ltd | Semiconductor manufacturing equipment |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6038893B2 (en) * | 1976-08-06 | 1985-09-03 | 日本電気株式会社 | Parallel field excited piezoelectric vibrator |
| JPS6338578Y2 (en) * | 1980-08-11 | 1988-10-12 | ||
| JPS57174912A (en) * | 1981-04-21 | 1982-10-27 | Seiko Epson Corp | Size managing device for quartz oscillator |
| JPS57188120A (en) * | 1981-05-15 | 1982-11-19 | Seiko Epson Corp | Size managing device for quartz oscillator |
-
1984
- 1984-10-11 JP JP59213042A patent/JPH0622309B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6192020A (en) | 1986-05-10 |
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|---|---|---|---|
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Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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| EXPY | Cancellation because of completion of term |