JPH0623420B2 - Mechanical structural steel with excellent cold workability - Google Patents
Mechanical structural steel with excellent cold workabilityInfo
- Publication number
- JPH0623420B2 JPH0623420B2 JP5923083A JP5923083A JPH0623420B2 JP H0623420 B2 JPH0623420 B2 JP H0623420B2 JP 5923083 A JP5923083 A JP 5923083A JP 5923083 A JP5923083 A JP 5923083A JP H0623420 B2 JPH0623420 B2 JP H0623420B2
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- Prior art keywords
- cold
- steel
- strength
- plastic workability
- workability
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- Heat Treatment Of Sheet Steel (AREA)
Description
【発明の詳細な説明】 本発明は、成分の偏析が少なく、とくに冷間での塑性加
工性や、転動および回転曲げ疲労等の強度特性などに優
れた機械構造用鋼に関するものである。Description: TECHNICAL FIELD The present invention relates to a steel for machine structural use, which has less segregation of components and is excellent in cold workability and strength characteristics such as rolling and rotary bending fatigue.
一般に、機械構造用鋼としては、JIS G 4051
に制定する機械構造用炭素鋼材(SC材,S−CK材
等)や、JIS G 4102,4103,4104,
4105,4106等に制定する機械構造用低合金鋼鋼
材(SCr材,SCM材,SMn材,SNC材、SNC
M材、SMnC材等)などが知られており、これらの鋼
材は上記JISの「3.製造方法」にそれぞれ説明され
ているようにいずれもキルド鋼塊から製造されている
が、このような従来の機械構造用鋼において、これを圧
延したままの状態で熱間鍛造あるいは半熱間鍛造を行
い、その後冷間鍛造や冷間アイヨニング、サイジング、
コイニング等の塑性加工を行うと、冷間塑性加工性が良
くないために割れを生ずることがあるという問題点があ
った。Generally, as steel for machine structure, JIS G 4051 is used.
Carbon steel materials for machine structures (SC materials, S-CK materials, etc.) and JIS G 4102, 4103, 4104
4105, 4106 and other low alloy steels for machine structures (SCr, SCM, SMn, SNC, SNC)
M material, SMnC material, etc.) are known, and all of these steel materials are manufactured from killed steel ingots as described in “3. Manufacturing method” of JIS, respectively. In conventional steel for machine structural use, hot forging or semi-hot forging is performed in the as-rolled state, and then cold forging, cold ironing, sizing,
When plastic working such as coining is performed, there is a problem that cracking may occur due to poor cold plastic workability.
このため、従来の場合には、熱間鍛造あるいは半熱間鍛
造の際に強度の加工を行い、その後の冷間鍛造等の冷間
での塑性加工の際には加工度を小さくして負荷を少なく
するか、あるいは中間焼なまし等の軟化処理を施るなど
の対策が採られることがあった。For this reason, in the conventional case, strength processing is performed during hot forging or semi-hot forging, and the degree of processing is reduced during subsequent plastic forming in cold such as cold forging. In some cases, measures have been taken such as reducing the heat treatment or performing softening treatment such as intermediate annealing.
しかしながら、熱間鍛造あるいは半熱間鍛造の際に強度
の加工を行った場合には、熱間鍛造用金型の寿命が著し
く低下し、金型コストが増大するという問題を有し、中
間焼なまし等の軟化処理を行った場合には処理コストが
増大して製品価格を上昇すると共に生産性をも低下する
という問題を有していた。また、C含有量が0.3〜
0.7%の鋼を中間焼なまし処理しても冷間塑性加工性
の向上はさほど大きくなく、塑性加工用金型の寿命が短
いと共に依然として製品に割れを生ずることがあるとい
う問題を有していた。However, in the case of performing strength processing during hot forging or semi-hot forging, there is a problem that the life of the hot forging die is significantly reduced, and the die cost increases, and the intermediate firing When the softening treatment such as anneal is performed, there is a problem that the treatment cost increases, the product price rises, and the productivity also decreases. Further, the C content is 0.3 to
Even if the 0.7% steel is subjected to the intermediate annealing, the improvement of the cold plastic workability is not so large, and there is a problem that the life of the plastic working die is short and the product may still crack. Was.
そこで、本発明者らはこのような従来の問題点を解消
し、とくに冷間での塑性加工性に優れた鋼を得ることを
目的として実験・研究を進め、従来の構造用鋼が冷間で
の塑性加工性に劣っている原因はC含有量そのものにあ
ると同時に偏析とくにミクロ偏析が発生していることに
あることを突き止めた。これらのうち、C含有量は構造
用部品あるいは製品の強度および靭性等を確保するため
に変えることはできないが、ミクロ偏析の防止について
は何んらかの対策を施すことによって可能である。そこ
で、先ず考えられるのは、このようなミクロ偏析をなく
すために、1200〜1300℃で長時間のソーキング
処理を施すことであるが、このようなソーキング処理で
は炉設備が必要であって生産コストの上昇や生産効率の
低下などをもたらすと同時に、酸化スケールの発生によ
る歩留り低下が大きくなるという問題があった。また、
鋼塊の単重や連鋳片の寸法を小さくしてミクロ偏析を少
なくすることも考えられるが、これでもミクロ偏析の防
止は不十分であり、冷間での塑性加工性の向上には限界
があるという問題を有していた。Therefore, the inventors of the present invention have conducted experiments and research aiming at solving such conventional problems and obtaining a steel excellent in plastic workability especially in the cold. It was found that the reason why the plastic workability was poor was that the C content itself was present, and at the same time, segregation, particularly microsegregation occurred. Of these, the C content cannot be changed in order to secure the strength and toughness of structural parts or products, but it is possible to prevent microsegregation by taking some measures. Therefore, the first conceivable thing is to perform a soaking treatment at 1200 to 1300 ° C. for a long time in order to eliminate such microsegregation. However, such a soaking treatment requires a furnace facility and therefore the production cost is high. However, there is a problem in that the yield is greatly reduced due to the generation of oxide scale, as well as the increase in the production efficiency and the reduction in the production efficiency. Also,
It is possible to reduce the microsegregation by reducing the unit weight of the steel ingot or the size of the continuous cast piece, but this is still insufficient to prevent the microsegregation, and there is a limit to improving the plastic workability in the cold. Had the problem that there is.
本発明は、上記したような従来の問題点を解消するため
になされたもので、設備費の上昇や生産工数の増大をも
たらす中間焼なまし処理やソーキングを必ずしも必要と
せず、鋼塊単重や鋳片サイズを減少することもなく、と
くに冷間での塑性加工性に優れた機械構造用鋼を得るこ
とを目的としている。The present invention has been made to solve the above-mentioned conventional problems, and does not necessarily require intermediate annealing treatment or soaking that causes an increase in equipment cost and an increase in production man-hours. The purpose of the present invention is to obtain a steel for machine structural use which is excellent in plastic workability especially in the cold state without reducing the size of slab and slab.
すなわち、本発明による冷間での塑性加工性に優れた機
械構造用鋼は、重量%で、C:0.3超過〜0.7%、
Si:0.02〜0.3%、Mn:0.8%以下を基本
含有成分とし、必要に応じて、焼入性を制御して強度の
向上をはかるために、Cr:0.2〜0.5%,B:
0.0005〜0.005%の1種または2種を含有
し、残部Feおよび不純物よりなり、不純物中における
P≦0.02%でかつ 0.25≦1.5Si(%)+1.3・Mn(%)≦1.0 に規制したことを特徴としている。That is, the steel for machine structural use according to the present invention, which is excellent in cold plastic workability, contains C: 0.3% to 0.7% by weight,
Si: 0.02-0.3%, Mn: 0.8% or less as a basic content component, and if necessary, in order to control hardenability and improve strength, Cr: 0.2- 0.5%, B:
0.0005 to 0.005% of 1 or 2 is contained, the balance is Fe and impurities, and P ≦ 0.02% in the impurities and 0.25 ≦ 1.5 Si (%) + 1.3. The feature is that Mn (%) ≦ 1.0 is regulated.
次に、本発明による冷間での塑性加工性に優れた機械構
造用鋼の成分範囲(重量%)の限定理由について説明す
る。Next, the reason for limiting the component range (% by weight) of the steel for machine structure excellent in cold plastic workability according to the present invention will be described.
Cは、機械構造用部品あるいは製品として必要な強度を
確保するために添加する元素であるが、0.3%以下で
は上記強度の確保が困難であり、冷間での塑性加工性に
も問題を生ずるので好ましくなく、0.7%を超えると
靭性が劣化するので、0.3超過〜0.7%の範囲とし
た。C is an element added to secure the strength required for mechanical structural parts or products, but if the content is 0.3% or less, it is difficult to secure the above strength, and there is also a problem with cold plastic workability. Is not preferable, and if over 0.7%, the toughness deteriorates, so the range was made over 0.3 to 0.7%.
Siは、キルド鋼の製鋼時に脱酸剤として作用すると共
に、鋼の強度を高めるのに有効な元素であるので、0.
02%以上とする必要があるが、多すぎるとかえって靭
性を劣化し、冷間での塑性加工性を低下するので、0.
3%以下とする必要がある。Since Si acts as a deoxidizing agent during the production of killed steel, and is an element effective in increasing the strength of the steel, it is preferable that
It is necessary to set the content to 02% or more, but if it is too large, the toughness is rather deteriorated and the plastic workability in the cold is deteriorated.
It should be 3% or less.
Mnは、キルド鋼の製鋼時に脱酸剤および脱硫剤として
作用し、鋼の焼入れ性を向上して強度の改善をはかるの
に有効な元素があるが、冷間加工性を害するので、0.
8%以下とする必要がある。Mn acts as a deoxidizing agent and a desulfurizing agent during the production of killed steel, and there is an element effective for improving the hardenability of the steel and improving the strength, but since it impairs the cold workability, Mn.
It should be 8% or less.
そして、SiとMnとの関係においては、0.25≦
1.5・Si(%)+1.3.Mn(%)≦1.0に規
制することによって、鋼の偏析とくにミクロ偏析を防止
し、冷間での塑性加工性を著しく向上し、さらには転動
疲労や回転曲げ疲労等を強度特性を高めることも可能で
ある。しかし、上記の値において0.25よりも少ない
このような効果を十分に得ることができず、強度の確保
および良好な清浄度の確保が難しくなるので、0.25
以上の値となるようにすることが必要である。一方、上
記式の値が1.0よりも大きいとミクロ偏析の防止が困
難となり、冷間での塑性加工性がかえって低下するの
で、1.0以下の値となるようにすることが必要であ
る。And in the relation between Si and Mn, 0.25 ≦
1.5 · Si (%) + 1.3. By controlling Mn (%) ≤ 1.0, segregation of steel, especially microsegregation, is prevented, plastic workability in cold is remarkably improved, and rolling fatigue and rotational bending fatigue are improved in strength characteristics. It is possible to raise it. However, at the above value, such an effect that is less than 0.25 cannot be sufficiently obtained, and it becomes difficult to secure the strength and the good cleanliness.
It is necessary to set it to the above value. On the other hand, if the value of the above formula is larger than 1.0, it becomes difficult to prevent microsegregation and the plastic workability in the cold deteriorates rather. Therefore, it is necessary to set the value to 1.0 or less. is there.
Pは鋼塊あるいは連鋳片などにおいて偏析を生じやすい
元素であるので、このような偏析とくにミクロ偏析を防
止し、冷間での塑性加工性を向上させると共に転動疲労
や回転曲げ疲労等の強度特性を高めるために、0.02
%以下とする必要がある。Since P is an element that tends to cause segregation in steel ingots or continuous cast pieces, it prevents such segregation, especially microsegregation, improves the plastic workability in the cold, and prevents rolling fatigue and rotational bending fatigue. 0.02 to enhance strength properties
It must be less than or equal to%.
Cr,Bは、鋼の焼入性を制御してその強度を高めるの
に有効な元素であり、このCr,Bは冷間での塑性加工
性に対してはSi,Mn程悪影響を及ぼさないので、使
用目的等に応じてこれらの1種または2種を添加するの
も良い。この場合、Crは0.2%未満では上記した効
果が十分ではなく、強度の確保があまり期待できず、
0.5%を超えると靭性が劣化し、かえって冷間での塑
性加工性を低下するので、0.2〜05%の範囲とする
のが良い。一方、Bは0.0005%未満では上記した
効果が十分でなく、強度の確保があまり期待できず、
0.005%を超えてもその効果はさほど上昇しないの
で、0.0005〜0.005%の範囲とするのが良
い。Cr and B are effective elements for controlling the hardenability of steel and increasing its strength, and Cr and B do not affect plastic workability in cold as much as Si and Mn. Therefore, one or two of these may be added depending on the purpose of use. In this case, if the content of Cr is less than 0.2%, the above-mentioned effect is not sufficient, and securing of strength cannot be expected so much.
If it exceeds 0.5%, the toughness deteriorates and the plastic workability in the cold deteriorates. Therefore, it is preferable to set it in the range of 0.2 to 05%. On the other hand, if B is less than 0.0005%, the above-mentioned effect is not sufficient, and securing strength cannot be expected so much.
Even if it exceeds 0.005%, the effect does not increase so much, so it is preferable to set it in the range of 0.0005 to 0.005%.
以下、実施例により説明する。Hereinafter, description will be made with reference to examples.
実施例 1 電気炉によって表1に示す化学成分の鋼を溶製したのち
2.5トン鋼塊に造塊し、分塊圧延および製品圧延を行
って直径30mm供試材を作成した。この圧延の際、N
o.7,9の一部に対して1300℃×10hrの条件で
ソーキングを施した。Example 1 Steels having the chemical composition shown in Table 1 were melted by an electric furnace, then ingots were made into 2.5 ton steel ingots, and slabbing and product rolling were performed to prepare test materials having a diameter of 30 mm. During this rolling, N
o. Soaking was performed on a part of Nos. 7 and 9 under the condition of 1300 ° C. × 10 hr.
次に、各供試材の冷間成形性を評価するために、無潤滑
の状態で冷間での塑性加工を行って各供試材の限界圧縮
率を求めた。この結果を表2に示す。また、No.7,
9の一部については供試材に対して球状化焼なましを施
したのち同じく無潤滑の状態で冷間での塑性加工を行っ
て各々の限界圧縮率を求めた。この結果を同じく表2に
示す。Next, in order to evaluate the cold formability of each of the test materials, cold plastic working was performed in a non-lubricated state to obtain the critical compressibility of each of the test materials. The results are shown in Table 2. In addition, No. 7,
With respect to a part of No. 9, the specimens were subjected to spheroidizing annealing, and then subjected to cold plastic working in the same non-lubricated state to determine the respective limit compressibility. The results are also shown in Table 2.
一方、各供試材の転動寿命を評価するために、転動寿命
試験片を作成した。この場合の試験片の作成は、前記直
径30mmの供試材に対して高周波焼入れ焼もどしを施
し、平均表面硬度HRC45,表面硬化層深さ2.0mm
が得られるようにした。次いで、円筒型転動寿命試験機
を用い、ヘルツ応力600kgf/mm2で転動寿命試験を行
い、累積破損確率(B10寿命)を求めた。その結果を
同じく表2に示す。On the other hand, rolling life test pieces were prepared in order to evaluate the rolling life of each test material. Creating specimens in this case, subjected to tempering also induction hardening sintered against test piece of the diameter 30 mm, the average surface hardness H R C45, the surface hardening depth 2.0mm
Was obtained. Then, using a cylindrical rolling life tester, a rolling life test was performed at a Hertzian stress of 600 kgf / mm 2 , and a cumulative failure probability (B 10 life) was obtained. The results are also shown in Table 2.
表1および表2より明らかなように、1.5・Si
(%)+1.3・Mn(%)の値が小さすぎるNo.1
の場合には転動寿命が小さく、反対に大きすぎるNo.
9,No.14の場合には限界圧縮率が小さく、冷間の
塑性加工性が低下していることがわかる。また、P含有
量が多すぎるNo.8の場合には限界圧縮率および転動
寿命とも劣っていることがわかる。これに対して本発明
の場合にはいずれも限界圧縮率が高く、冷間での塑性加
工性に優れていると同時に、転動寿命も優れていること
が明らかである。 As is clear from Table 1 and Table 2, 1.5 · Si
(%) + 1.3 · Mn (%) is too small. 1
In the case of No. 2, the rolling life was short, and conversely it was too large.
9, No. It can be seen that in the case of 14, the critical compressibility is small and the cold plastic workability is deteriorated. In addition, the P content is too large No. In the case of 8, the limit compression rate and rolling life are inferior. On the other hand, in the case of the present invention, it is clear that the limit compression rate is high, the plastic workability in cold is excellent, and the rolling life is also excellent.
そして、本発明鋼(No.7)においてソーキングを施
した場合には圧縮限界率および転動寿命がかなり向上し
ているのに対して、従来鋼(No.9)においては同じ
ソーキングを施した場合に限界圧縮率は改善されるもの
の転動寿命の向上はあまり大きくはなかった。Then, when soaking is performed on the steel of the present invention (No. 7), the compression limit rate and rolling life are considerably improved, whereas the same soaking is performed on the conventional steel (No. 9). In this case, the critical compressibility was improved, but the rolling life was not significantly improved.
実施例 2 表1に示した化学成分の鋼を造塊したのち分塊圧延およ
び製品圧延を行って直径d1=50mmの棒鋼を製作し、
次いで高さH=26mmの第1図に示す供試材1を作っ
た。また、供試材No.7,9においてはその一部を1
300℃×10hrの条件でソーキングを施したのち直径
d1=50mmの棒鋼を製作し、次いで高さH=26mmの
供試材1を作った。次に、直径30mmのパンチを有する
鍛造プレスを用いて第2図に示す形状に850℃で半熱
間鍛造を行って直径d2=30mmの孔2をあけ、次い
で、第3図に示すように、外径部分をしごく冷間アイヨ
ニングを行い、これによって各供試材に割れが発生する
時点での限界冷間加工率を求めた。なお、ここでいう限
界冷間加工率は、第2図の状態での上端面の面積S
0と、第3図の状態での上端面の面積S1との比、すな
わち で求めた。この結果を表3に示す。Example 2 Steel having the chemical composition shown in Table 1 was ingot-cast, and then slab rolling and product rolling were performed to manufacture a steel bar having a diameter d 1 = 50 mm.
Next, a test material 1 shown in FIG. 1 having a height H = 26 mm was prepared. In addition, the sample material No. In 7, 9 part of it is 1
Soaking was performed under the conditions of 300 ° C. × 10 hr, a steel bar having a diameter d 1 = 50 mm was manufactured, and then a test material 1 having a height H = 26 mm was manufactured. Next, using a forging press having a punch with a diameter of 30 mm, the shape shown in FIG. 2 is subjected to semi-hot forging at 850 ° C. to make a hole 2 with a diameter d 2 = 30 mm, and then as shown in FIG. Then, the outer diameter portion was squeezed and cold-ioned, and the limit cold-working rate at the time when cracks occurred in each test material was obtained. The limit cold working rate here is the area S of the upper end surface in the state of FIG.
The ratio of 0 to the area S 1 of the upper end surface in the state of FIG. I asked for. The results are shown in Table 3.
表3に示す結果が明らかなように、本発明鋼ではいずれ
も限界冷間加工率が高く、冷間での塑性加工性に優れて
いることがわかる。また、ソーキングを行った場合には
限界冷間加工率がさらに向上することも明らかとなっ
た。なお、No.1においても限界冷間加工率が高い結
果となったが、前述のように転動寿命が短いため好まし
くない。 As is clear from the results shown in Table 3, all of the steels of the present invention have a high limit cold workability and are excellent in plastic workability in cold work. It was also clarified that the critical cold working rate was further improved when soaking was performed. In addition, No. Although No. 1 also resulted in a high limit cold working rate, it is not preferable because the rolling life is short as described above.
以上説明してきたように、本発明の機械構造用鋼によれ
ば、重量%で、C:0.3超過〜0.7%、Si:0.
02〜0.3%、Mn:0.8%以下、必要に応じてC
r:0.2〜0.5%,B:0.0005〜0.005
%の1種または2種を含み、残部Feおよび不純物より
なり、不純物中におけるP≦0.02%でかつ0.25
≦1.5・Si(%)+1.3.Mn(%)≦1.0に
規制したから、中間焼なまし処理やソーキングなどを施
さなくとも、冷間での塑性加工性および転動や回転曲げ
疲労等の強度特性にすぐれた機械構造用鋼を得ることが
でき、等速ジョインと外輪,ラック,コンロッド,ギ
ヤ,リアスピンドル等の各種の機械構造用部品および製
品を高精度でかつ割れ等の不具合を発生することなく、
しかも金型寿命を著しく低下することなく製造すること
が可能であり、必ずしも中間焼なましやソーキング等を
行わなくてもよいため、設備費の低減や工数の減少を実
現することが可能であり、構造用部品を低価格化ならび
に納期の短縮化をはかることができるなどの著大なる効
果を有している。As described above, according to the steel for machine structural use of the present invention, in weight%, C: exceeds 0.3 to 0.7%, Si: 0.
02-0.3%, Mn: 0.8% or less, C if necessary
r: 0.2 to 0.5%, B: 0.0005 to 0.005
% Of 1 or 2 with the balance Fe and impurities, P ≦ 0.02% in the impurities and 0.25
≦ 1.5 · Si (%) + 1.3. Because Mn (%) ≤ 1.0 is regulated, it is suitable for machine structures with excellent cold workability and strength characteristics such as rolling and rotational bending fatigue without intermediate annealing or soaking. Steel can be obtained, and various mechanical structural parts and products such as constant velocity joins and outer rings, racks, connecting rods, gears, and rear spindles can be produced with high accuracy and without causing defects such as cracks.
Moreover, it is possible to manufacture without significantly reducing the mold life, and it is not necessary to perform intermediate annealing or soaking, so that it is possible to realize a reduction in equipment cost and man-hours. In addition, it has a great effect that the price of structural parts can be reduced and the delivery time can be shortened.
第1図,第2図,第3図は本発明の実施例において塑性
加工を行った様子を示す各々素材の側面図,半熱間鍛造
後の側面図、冷間アイヨニング後の側面図である。1, 2, and 3 are a side view of each material, a side view after semi-hot forging, and a side view after cold ironing showing how plastic working is performed in an embodiment of the present invention. .
Claims (2)
i:0.02〜0.3%、Mn:0.8%以下、残部F
eおよび不純物よりなり、不純物中におけるP≦0.0
2%でかつ 0.25≦1.5・Si(%)+1.3・Mn(%)≦1.0 に規制したことを特徴とする冷間での塑性加工性に優れ
た機械構造用鋼。1. C: Excess of 0.3 to 0.7% by weight, S
i: 0.02-0.3%, Mn: 0.8% or less, balance F
e and impurities, P ≦ 0.0 in the impurities
Steel for machine structural use, which is excellent in cold plastic workability, characterized in that it is 2% and 0.25 ≦ 1.5 · Si (%) + 1.3 · Mn (%) ≦ 1.0. .
i:0.02〜0.3%、Mn:0.8%以下、および
Cr:0.2〜0.5%,B:0.0005〜0.00
5%の1種または2種を含み、残部Feおよび不純物よ
りなり、不純物中におけるP≦0.02%でかつ 0.25≦1.5・Si(%)+1.3・Mn(%)≦1.0 に規制したことを特徴とする冷間での塑性加工性に優れ
た機械構造用鋼。2. C: over 0.3 to 0.7% in weight%, S
i: 0.02-0.3%, Mn: 0.8% or less, and Cr: 0.2-0.5%, B: 0.0005-0.00
5% of 1 type or 2 types, balance Fe and impurities, P ≦ 0.02% in the impurities and 0.25 ≦ 1.5 · Si (%) + 1.3 · Mn (%) ≦ A steel for machine structural use that is excellent in cold plastic workability, characterized by being regulated to 1.0.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5923083A JPH0623420B2 (en) | 1983-04-06 | 1983-04-06 | Mechanical structural steel with excellent cold workability |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5923083A JPH0623420B2 (en) | 1983-04-06 | 1983-04-06 | Mechanical structural steel with excellent cold workability |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59185759A JPS59185759A (en) | 1984-10-22 |
| JPH0623420B2 true JPH0623420B2 (en) | 1994-03-30 |
Family
ID=13107364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5923083A Expired - Lifetime JPH0623420B2 (en) | 1983-04-06 | 1983-04-06 | Mechanical structural steel with excellent cold workability |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0623420B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2579640B2 (en) * | 1987-07-30 | 1997-02-05 | 新日本製鐵株式会社 | Manufacturing method of high fatigue strength case hardened product |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4744855B2 (en) | 2003-12-26 | 2011-08-10 | 日本碍子株式会社 | Electrostatic chuck |
-
1983
- 1983-04-06 JP JP5923083A patent/JPH0623420B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4744855B2 (en) | 2003-12-26 | 2011-08-10 | 日本碍子株式会社 | Electrostatic chuck |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59185759A (en) | 1984-10-22 |
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