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JPH0623646B2 - Imaging type groundwork treatment surface grade determination device - Google Patents
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JPH0623646B2 - Imaging type groundwork treatment surface grade determination device - Google Patents

Imaging type groundwork treatment surface grade determination device

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Publication number
JPH0623646B2
JPH0623646B2 JP61052974A JP5297486A JPH0623646B2 JP H0623646 B2 JPH0623646 B2 JP H0623646B2 JP 61052974 A JP61052974 A JP 61052974A JP 5297486 A JP5297486 A JP 5297486A JP H0623646 B2 JPH0623646 B2 JP H0623646B2
Authority
JP
Japan
Prior art keywords
measured
image
brightness
grade
grade determination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61052974A
Other languages
Japanese (ja)
Other versions
JPS62209306A (en
Inventor
洪 横川
照郎 吉岡
健二 鎌田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Ishikawajima Harima Heavy Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Ishikawajima Harima Heavy Industries Co Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP61052974A priority Critical patent/JPH0623646B2/en
Publication of JPS62209306A publication Critical patent/JPS62209306A/en
Publication of JPH0623646B2 publication Critical patent/JPH0623646B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は塗装下地処理面のグレード判定を撮像式にて行
なう装置に係り、特に船舶等鉄鋼構造物のブラストによ
る下地処理面の除錆度を自動的に判定する装置に関す
る。
Description: TECHNICAL FIELD The present invention relates to an apparatus for performing a grade determination of a coated surface to be treated by an image pickup method, and particularly to a degree of rust removal of the surface to be treated by blasting a steel structure such as a ship. The present invention relates to a device for automatically determining.

[従来の技術] 従来、この種の下地処理面の評価はスエーデン規格(S
IS)に基づいて検査員が目視で限度見本となる標準写
真と比較することにより行なわれていた。そして、除錆
の度合いをSa3.0,Sa2.5,Sa2.0,Sa1.0(数値が大きい
程グレードが良い)の各記号で示し、上に塗装される塗
装系に指定されたグレードと対比させて合否を判断して
いた。
[Prior Art] Conventionally, the evaluation of this type of surface-treated surface is performed by the Swedish standard (S
It was carried out by an inspector visually comparing with a standard photograph as a limit sample based on IS). The degree of rust removal is indicated by the symbols Sa3.0, Sa2.5, Sa2.0, Sa1.0 (the higher the number, the better the grade), and the grade specified for the coating system to be coated on top is used. I was judging the pass / fail by comparing them.

しかしながら、この目視による標準写真法では、その判
定に熟練度を要すると共に個人差によるバラツキが大き
く定量的な評価を行なうことができなかった。
However, this visual standard photographic method requires a high degree of skill in the determination, and the variations due to individual differences are large, so that quantitative evaluation cannot be performed.

そこで、第4図に示すように光源aにより測定面bに45
゜の入射角で照明光を照射し、測定面bからの乱反射光
量をフィルタcを介して受光セルdで測定し、その測定
量から測定面bの除錆の度合いを判定するブラストメー
タが考案されている。このブラストメータは第5図のよ
うに、光源a,フィルタc,受光セルd等を内蔵したセ
ンサ部eとこのセンサ部eに電気的に接続されたメータ
部fとからなっている。センサ部eは筐体形状をなして
おり、周辺からの光が受光セルdに入射しないようにこ
のセンサ部eを測定面b上に密着させて測定が行なわれ
る。
Therefore, as shown in FIG.
A blast meter is devised in which illumination light is radiated at an incident angle of °, the amount of diffused light reflected from the measurement surface b is measured by the light receiving cell d through the filter c, and the degree of rust removal on the measurement surface b is determined from the measured amount. Has been done. As shown in FIG. 5, this blast meter is composed of a sensor part e having a light source a, a filter c, a light receiving cell d, etc. built therein, and a meter part f electrically connected to the sensor part e. The sensor portion e has a housing shape, and the sensor portion e is brought into close contact with the measurement surface b so that the light from the periphery does not enter the light receiving cell d, and the measurement is performed.

[発明が解決しようとする課題] しかしながら、測定面bの表面上には第6図あるいは第
7図のような凸部gや第8図のような凹部hが生じやす
く、また異物が介入することもある。この場合には第6
図ないし第8図に示すようにセンサ部eと測定面bとの
間に隙間が生じてここから周辺の光が入ってしまう。そ
の結果、測定面bの評価の安定度が低下し、正確なグレ
ード判定を行なうことができないという問題点を有して
いた。
[Problems to be Solved by the Invention] However, a convex portion g as shown in FIG. 6 or 7 and a concave portion h as shown in FIG. 8 are likely to be formed on the surface of the measurement surface b, and foreign matter intervenes. Sometimes. In this case the sixth
As shown in FIG. 8 to FIG. 8, a gap is created between the sensor portion e and the measurement surface b, and ambient light enters from here. As a result, the stability of evaluation of the measurement surface b is lowered, and there is a problem in that accurate grade determination cannot be performed.

かくして、本発明の目的は上記従来の問題点を解消し、
測定面上に凹凸が存在しても高精度で測定面のグレード
判定を自動的に行なうことができる撮像式塗装下地処理
面グレード判定装置を提供することにある。
Thus, the object of the present invention is to solve the above-mentioned conventional problems,
It is an object of the present invention to provide an imaging type coating surface treatment surface grade determination apparatus capable of automatically determining the grade of a measurement surface with high accuracy even if unevenness exists on the measurement surface.

[課題を解決するための手段] 本発明は、被測定面全体を照明するための光源と、被測
定面を一定の測定面積だけ撮像する撮像機と、撮像機で
捉えた被測定面の照度を測定すると共に照度が所定の範
囲内になるように光源の光度を制御する制御部と、撮像
機で捉えた被測定面の画像を多数の画素に分割し、各画
素の輝度を多段階で測定して各段の輝度に対する画素数
のヒストグラムを作成すると共に各輝度までの累積濃度
曲線を求め、他方、除錆度を示す各グレードに対応して
累積濃度曲線パターンを予め作成、記憶しておき、この
累積濃度曲線パターンと被測定面から得られた累積濃度
曲線とから被測定面の除錆度のグレード判定を行い、そ
の結果を出力する画像解析部と、を備えたものである。
[Means for Solving the Problems] The present invention is directed to a light source for illuminating the entire surface to be measured, an image pickup device for picking up a fixed measurement area of the surface to be measured, and an illuminance of the surface to be measured captured by the image pickup device. And the control unit that controls the luminous intensity of the light source so that the illuminance is within a predetermined range, and divides the image of the measured surface captured by the imager into a number of pixels, and the brightness of each pixel in multiple stages. Measure and create a histogram of the number of pixels for each level of brightness and obtain a cumulative density curve up to each brightness, while creating and storing a cumulative density curve pattern in advance corresponding to each grade indicating the degree of rust removal. Every time, the grade determination of the rust removal degree of the surface to be measured is performed based on the cumulative density curve pattern and the cumulative density curve obtained from the surface to be measured, and an image analysis unit for outputting the result is provided.

[作用] 上記構成により、制御部で光源の光度を制御することに
より、種々の環境下にある被測定面(塗装下地処理面)
の照度が所定の範囲内とされる。すなわち、撮像機によ
る撮像条件を常に一定とすることができる。さらに、被
測定面の除錆度のグレード判定を行うにおいて、撮像機
で得られた各画素を各輝度段階毎にヒストグラム化して
解析することで、被測定面の粗さを、すなわち除錆度を
示すグレードを求めることができる。従って、除錆度を
示す各グレードに対応した累積濃度曲線パターンを予め
作成しておき、このパターンと被測定面から得られた累
積濃度曲線とからグレード判定を行うことで、そのグレ
ード判定は目視による観察結果に近いものとなると共に
再現性、安定性に優れたものとなる。
[Operation] With the above configuration, the control unit controls the luminous intensity of the light source, so that the surface to be measured (painted surface treated surface) under various environments
The illuminance of is within a predetermined range. That is, the imaging condition of the imaging device can be kept constant. Further, in determining the grade of the rust removal degree of the surface to be measured, by making a histogram for each pixel obtained by the imager for each brightness step and analyzing it, the roughness of the surface to be measured, that is, the rust removal degree It is possible to obtain a grade indicating. Therefore, a cumulative concentration curve pattern corresponding to each grade indicating the degree of rust removal is created in advance, and grade determination is performed from this pattern and the cumulative concentration curve obtained from the surface to be measured. The results are similar to the observation results obtained by and the reproducibility and stability are excellent.

[実施例] 以下、本発明の実施例を添付図面に従って説明する。EXAMPLES Examples of the present invention will be described below with reference to the accompanying drawings.

第1図は本発明の一実施例に係る撮像式塗装下地処理面
グレード判定装置の構成図である。照明部1は被測定面
2を照明すると共に撮像するものであり、光源としての
2個の100Wハロゲンランプ3及び8個の50Wクリプト
ンランプ4、撮像機としてのCCDカメラ5及びズーム
レンズ6を備えている。なお、被測定面2側から見た照
明部1の正面図を第2図に示すように、ハロゲンランプ
3及びクリプトンランプ4がCCDカメラ5及びズーム
レンズ6を囲繞するように配置されている。この照明部
1に照明フォーカス制御部7,モニタ8及び画像解析部
9がそれぞれ接続されている。照明フォーカス制御部7
はCCDカメラ5で撮像した被測定面2の画像から被測
定面2の照度を測定してこの照度が900ルクスとなるよ
うにハロゲンランプ3及びクリプトンランプ4に供給さ
れる電圧を調節することによりそれらの光度を制御する
と共に、ズームレンズ6の焦点合わせ及びズーム比の調
節を行なうことができるように構成されている。モニタ
8はCCDカメラ5で撮影した被測定面2の画像を写し
出す。さらに、画像解析部9はCCDカメラ5で撮影し
た被測定面2の画像を取込み、この画像をそれぞれ等し
い面積を有する512×512の画素に分割すると共に各画素
の輝度を0〜63の64段階で測定して被測定面2のグレー
ド判定を行なう。
FIG. 1 is a configuration diagram of an image pickup type coating base treated surface grade determination apparatus according to an embodiment of the present invention. The illumination unit 1 illuminates the surface to be measured 2 and also captures an image, and includes two 100 W halogen lamps 3 and eight 50 W krypton lamps 4 as a light source, a CCD camera 5 as an imager, and a zoom lens 6. ing. A halogen lamp 3 and a krypton lamp 4 are arranged so as to surround the CCD camera 5 and the zoom lens 6, as shown in FIG. 2 which is a front view of the illuminating unit 1 viewed from the measured surface 2 side. An illumination focus control unit 7, a monitor 8 and an image analysis unit 9 are connected to the illumination unit 1. Lighting focus control unit 7
Measures the illuminance of the measured surface 2 from the image of the measured surface 2 captured by the CCD camera 5 and adjusts the voltage supplied to the halogen lamp 3 and the krypton lamp 4 so that the illuminance becomes 900 lux. It is configured so that the luminosity thereof can be controlled and the focus of the zoom lens 6 and the zoom ratio can be adjusted. The monitor 8 displays an image of the measured surface 2 taken by the CCD camera 5. Further, the image analysis unit 9 takes in an image of the surface to be measured 2 taken by the CCD camera 5, divides this image into 512 × 512 pixels each having the same area, and sets the brightness of each pixel to 64 levels from 0 to 63. And the grade of the surface 2 to be measured is determined.

次に、本実施例の動作を述べる。Next, the operation of this embodiment will be described.

まず、照明部1を被測定面2から所定の距離(600〜100
0mm程度)だけ離して設置し、ハロゲンランプ3及びク
リプトンランプ4を点灯して被測定面2を照明する。そ
して、CCDカメラ5によってモニタ8上に写し出され
る被測定面2の画像を観察しながら照明フォーカス制御
部7を操作してズームレンズ6の焦点合わせを行なうと
共にモニタ8上に写し出された画像が被測定面2上にお
ける測定面積である80×50mmをちょうど含むようにズー
ム比を調節する。なお、このとき照明フォーカス制御部
7によって被測定面2の照度が900ルクスとなるように
照明部1内のハロゲンランプ3及びクリプトンランプ4
の光度は制御されている。
First, place the illumination unit 1 at a predetermined distance (600 to 100) from the surface 2 to be measured.
Installed at a distance of about 0 mm), the halogen lamp 3 and the krypton lamp 4 are turned on to illuminate the surface 2 to be measured. Then, while observing the image of the surface to be measured 2 projected on the monitor 8 by the CCD camera 5, the illumination focus control section 7 is operated to focus the zoom lens 6 and the image projected on the monitor 8 is projected. The zoom ratio is adjusted so that the measurement area on the measurement surface 2 of 80 × 50 mm is exactly included. At this time, the illumination focus control unit 7 controls the halogen lamp 3 and the krypton lamp 4 in the illumination unit 1 so that the illuminance on the surface 2 to be measured becomes 900 lux.
The intensity of is controlled.

次に、画像解析部9によりCCDカメラ5で撮像された
被測定面2の画像が取込まれ、512×512の画素に分割さ
れる。さらに、各画素の輝度がそれぞれ0〜63の64段階
で測定され、横軸を輝度とし、縦軸を画素数とし、各輝
度を64段階毎に各段の輝度に対応して各画素の個数を求
めてヒストグラム(図示せず)が作成される。そして、
所定の輝度以下の画素数が計数され、全画素数に対する
百分率(累積濃度)が算出されると共にこの累積濃度に
基づいて累積濃度曲線が求まり、この累積濃度曲線を、
予め作成したSa1.0ないしSa3.0に対応する累積濃度曲線
のパターンのいずれに含まれるかをみて、いずれのグレ
ードであるかのグレード判定が行なわれ、累積濃度及び
グレード判定の結果が例えば画像解析部9に内蔵されて
いるモニタ上に表示される。この累積濃度曲線パターン
は、試験片をグレードブラストしてSa1.0ないしSa3.0に
相当するグレード判定試料を多数作成し、その各試料を
上述した被測定面での累積濃度曲線の算出と同様に求
め、各グレード毎の最大値と最小値の濃度の範囲を第3
図のようにパターン化し、これを画像解析部に記憶させ
ておくものである。
Next, the image analysis unit 9 takes in the image of the measured surface 2 captured by the CCD camera 5 and divides it into 512 × 512 pixels. Furthermore, the brightness of each pixel is measured in 64 steps from 0 to 63, the horizontal axis is the brightness, the vertical axis is the number of pixels, and each brightness corresponds to the brightness of each step in 64 steps and the number of each pixel. Then, a histogram (not shown) is created. And
The number of pixels having a predetermined brightness or less is counted, the percentage (cumulative density) with respect to the total number of pixels is calculated, and a cumulative density curve is obtained based on this cumulative density.
Depending on which one of the patterns of the cumulative concentration curve corresponding to Sa1.0 to Sa3.0 created in advance is included, a grade determination of which grade is performed is performed, and the result of the cumulative concentration and the grade determination is, for example, an image. It is displayed on the monitor built in the analysis unit 9. This cumulative concentration curve pattern is the same as the calculation of the cumulative concentration curve on the surface to be measured described above by grade blasting the test piece and creating a number of grade determination samples corresponding to Sa1.0 to Sa3.0. The maximum and minimum density range for each grade.
The pattern is formed as shown in the figure, and this is stored in the image analysis unit.

本実施例を用いた具体的な測定結果を以下に述べる。厚
さ9mmの黒皮付軟鋼板から大きさ150mm角の試験片を4
枚切り出し、スエーデン規格の標準写真と対比させなが
らそれぞれSa1.0,Sa2.0,Sa2.5,Sa3.0相当のグリット
ブラスト仕上げを行ない、本実施例の装置を用いて各試
験片の輝度分布を測定した。その測定結果を第3図に示
す。横軸は64段階の輝度を、縦軸は各輝度までの累積濃
度をそれぞれ示している。この第3図からわかるように
Sa1.0ないしSa3.0の各グレードに相当する試験片の累積
濃度曲線は互いに分離しており、重なり合うことがな
い。従って、任意の被測定面の累積濃度を求めることに
よってその被測定面のグレード判定を行なうことができ
る。
Specific measurement results using this example will be described below. 4 pieces of 150 mm square test piece from 9 mm thick mild steel plate with black skin
Glue blast finishing corresponding to Sa1.0, Sa2.0, Sa2.5, Sa3.0 was performed while cutting out a sheet and comparing it with a standard photograph of Swedish standard, and using the apparatus of this example, the luminance distribution of each test piece Was measured. The measurement result is shown in FIG. The horizontal axis represents 64 levels of brightness, and the vertical axis represents cumulative density up to each brightness. As you can see from Figure 3
The cumulative concentration curves of the test pieces corresponding to Sa1.0 to Sa3.0 grades are separated from each other and do not overlap. Therefore, the grade of the measured surface can be determined by obtaining the cumulative concentration of the measured surface.

なお、上記実施例における被測定面上の設定照度(900
ルクス),測定面積(80×50mm),輝度段階(64段
階),画素数(512×512)等は一例を示したに過ぎず、
これに限るものではない。
In addition, the set illuminance (900
Lux), measurement area (80 x 50 mm), brightness level (64 levels), number of pixels (512 x 512), etc. are merely examples.
It is not limited to this.

さらに、照明部1のズームレンズ6にオートフォーカス
機構を採用すれば照明フォーカス制御部7で焦点合わせ
を行なう必要がなくなる。
Further, if an autofocus mechanism is adopted for the zoom lens 6 of the illumination unit 1, it is not necessary for the illumination focus control unit 7 to perform focusing.

[発明の効果] 以上説明したように本発明によれば、次のごとき優れた
効果を発揮する。
[Effects of the Invention] As described above, according to the present invention, the following excellent effects are exhibited.

(1) 目視によらずに自動的に被測定面全体の除錆度の
グレード判定を行なうことができ、判定の精度及び再現
性が向上する。
(1) The grade of the rust removal degree of the entire surface to be measured can be automatically judged without visual inspection, and the judgment accuracy and reproducibility are improved.

(2) 被測定面に接触せずに測定及び判定を行なうの
で、被測定面上に凹凸が存在してもそれが撮像機の焦点
深度内であれば正確なグレード判定を行なうことができ
る。
(2) Since the measurement and determination are performed without contacting the surface to be measured, accurate grade determination can be performed if unevenness exists on the surface to be measured as long as it is within the depth of focus of the imaging device.

(3) 造船塗装を始めとする各塗装の自動化を図ること
が可能となる。
(3) It is possible to automate each coating including shipbuilding coating.

(4) 被測定面のグレードを示すデータが瞬時に得ら
れ、現場写真の保存等と異なってグレード判定結果の永
久保存が可能となる。
(4) Data indicating the grade of the surface to be measured can be obtained instantly, and the grade determination result can be stored permanently, unlike the case where the site photograph is stored.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の一実施例に係る撮像式塗装下地処理面
グレード判定装置の構成図、第2図は実施例における照
明部の正面図、第3図は実施例による測定結果を示すグ
ラフ、第4図ないし第8図は従来例及び従来の問題点を
示す説明図である。 図中、1は照明部、2は被測定面、3はハロゲンラン
プ、4はクリプトンランプ、5はCCDカメラ、6はズ
ームレンズ、7は照明フォーカス制御部、8はモニタ、
9は画像分析部である。
FIG. 1 is a configuration diagram of an image pickup type coating surface treatment surface grade determining apparatus according to an embodiment of the present invention, FIG. 2 is a front view of an illumination unit in the embodiment, and FIG. 3 is a graph showing a measurement result according to the embodiment. 4 to 8 are explanatory views showing a conventional example and problems of the conventional example. In the figure, 1 is an illumination unit, 2 is a surface to be measured, 3 is a halogen lamp, 4 is a krypton lamp, 5 is a CCD camera, 6 is a zoom lens, 7 is an illumination focus control unit, 8 is a monitor,
Reference numeral 9 is an image analysis unit.

───────────────────────────────────────────────────── フロントページの続き 審査官 江藤 保子 (56)参考文献 特開 昭59−180346(JP,A) 特開 昭57−139607(JP,A) ─────────────────────────────────────────────────── ─── Continuation of front page Examiner Yasuko Eto (56) References JP-A-59-180346 (JP, A) JP-A-57-139607 (JP, A)

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】被測定面全体を照明するための光源と、被
測定面を一定の測定面積だけ撮像する撮像機と、該撮像
機で捉えた被測定面の照度を測定すると共に該照度が所
定の範囲内になるように上記光源の光度を制御する制御
部と、上記撮像機で捉えた被測定面の画像を多数の画素
に分割し、各画素の輝度を多段階で測定して各段の輝度
に対する画素数のヒストグラムを作成すると共に各輝度
までの累積濃度曲線を求め、他方、除錆度を示す各グレ
ードに対応して累積濃度曲線パターンを予め作成、記憶
しておき、この累積濃度曲線パターンと被測定面から得
られた上記累積濃度曲線とから被測定面の除錆度のグレ
ード判定を行い、その結果を出力する画像解析部と、を
備えたことを特徴とする撮像式塗装下地処理面グレード
判定装置。
1. A light source for illuminating the entire surface to be measured, an image pickup device for picking up an image of the surface to be measured over a fixed measurement area, and measuring the illuminance of the surface to be measured captured by the image pickup device and measuring the illuminance. A control unit for controlling the luminous intensity of the light source so as to be within a predetermined range, and an image of the surface to be measured captured by the image pickup device is divided into a large number of pixels, and the brightness of each pixel is measured in multiple stages. A histogram of the number of pixels with respect to the brightness of the step is created, and a cumulative density curve up to each brightness is obtained. On the other hand, a cumulative density curve pattern corresponding to each grade indicating the degree of rust removal is created and stored in advance. An image capturing system characterized by comprising an image analysis unit for performing grade determination of the degree of rust removal of the surface to be measured from the concentration curve pattern and the cumulative concentration curve obtained from the surface to be measured, and outputting the result. Painted surface treatment surface grade determination device.
JP61052974A 1986-03-10 1986-03-10 Imaging type groundwork treatment surface grade determination device Expired - Lifetime JPH0623646B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61052974A JPH0623646B2 (en) 1986-03-10 1986-03-10 Imaging type groundwork treatment surface grade determination device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61052974A JPH0623646B2 (en) 1986-03-10 1986-03-10 Imaging type groundwork treatment surface grade determination device

Publications (2)

Publication Number Publication Date
JPS62209306A JPS62209306A (en) 1987-09-14
JPH0623646B2 true JPH0623646B2 (en) 1994-03-30

Family

ID=12929866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61052974A Expired - Lifetime JPH0623646B2 (en) 1986-03-10 1986-03-10 Imaging type groundwork treatment surface grade determination device

Country Status (1)

Country Link
JP (1) JPH0623646B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016075650A (en) * 2014-10-09 2016-05-12 株式会社フジエンジニアリング Surface cleanness determination device and surface cleanness determination program

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6646525B2 (en) * 2016-06-03 2020-02-14 日本電信電話株式会社 Method and apparatus for determining rust removal end point of metal sample using captured image

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139607A (en) * 1981-02-23 1982-08-28 Hitachi Ltd Position measuring equipment
JPS59180346A (en) * 1983-03-31 1984-10-13 Toshiba Corp Surface inspecting device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016075650A (en) * 2014-10-09 2016-05-12 株式会社フジエンジニアリング Surface cleanness determination device and surface cleanness determination program

Also Published As

Publication number Publication date
JPS62209306A (en) 1987-09-14

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