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JPH0623736B2 - Ultrasonic densitometer - Google Patents
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JPH0623736B2 - Ultrasonic densitometer - Google Patents

Ultrasonic densitometer

Info

Publication number
JPH0623736B2
JPH0623736B2 JP59271394A JP27139484A JPH0623736B2 JP H0623736 B2 JPH0623736 B2 JP H0623736B2 JP 59271394 A JP59271394 A JP 59271394A JP 27139484 A JP27139484 A JP 27139484A JP H0623736 B2 JPH0623736 B2 JP H0623736B2
Authority
JP
Japan
Prior art keywords
ultrasonic wave
signal
receiver
concentration
ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59271394A
Other languages
Japanese (ja)
Other versions
JPS61148365A (en
Inventor
優 見竹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP59271394A priority Critical patent/JPH0623736B2/en
Publication of JPS61148365A publication Critical patent/JPS61148365A/en
Publication of JPH0623736B2 publication Critical patent/JPH0623736B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/024Analysing fluids by measuring propagation velocity or propagation time of acoustic waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/028Material parameters
    • G01N2291/02809Concentration of a compound, e.g. measured by a surface mass change

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Description

【発明の詳細な説明】 <産業上の利用分野> 本発明は、試料液中に含まれる混濁物質の濃度を測定す
る超音波濃度計に関する。
The present invention relates to an ultrasonic densitometer for measuring the concentration of turbid substances contained in a sample solution.

<従来の技術> 試料液中に含まれるセメントや汚泥等の混濁物質の濃度
を測定する手段として超音波濃度計がある。この超音波
濃度計は、試料液中に超音波を発信する発信子と試料液
中を伝播した超音波を受信する受信子とが所定距離を保
って対向配置された濃度検出部を備える。そして、この
濃度検出部の発信子から試料液中に超音波を放射する
と、放射された超音波は試料液中の混濁物質の濃度に応
じた減衰を受ける。試料液中を伝播した超音波を受信子
で受信すると、受信子からは受信した超音波に対応した
受信信号が出力されるので、この受信信号の信号強度を
測定する。これにより試料液中の混濁物質の濃度が測定
される。
<Prior Art> An ultrasonic densitometer is a means for measuring the concentration of turbid substances such as cement and sludge contained in a sample solution. This ultrasonic densitometer includes a concentration detector in which a transmitter for transmitting ultrasonic waves into a sample solution and a receiver for receiving ultrasonic waves propagated in the sample solution are arranged to face each other with a predetermined distance. Then, when ultrasonic waves are radiated into the sample solution from the transmitter of the concentration detector, the radiated ultrasonic waves are attenuated according to the concentration of the turbid substance in the sample solution. When the ultrasonic wave propagating in the sample liquid is received by the receiver, a received signal corresponding to the received ultrasonic wave is output from the receiver, so that the signal intensity of this received signal is measured. Thereby, the concentration of the turbid substance in the sample solution is measured.

<発明が解決しようとする問題点> 試料液の温度が変化すると、これに伴ない試料液中を伝
播する超音波の音速が変化する。そして、この音速の変
化は超音波の減衰係数の変化をもたらす。この結果、温
度変化は試料液の測定濃度の誤差となって現われる。
<Problems to be Solved by the Invention> When the temperature of the sample liquid changes, the sound velocity of the ultrasonic wave propagating in the sample liquid changes accordingly. Then, this change in sound velocity causes a change in the attenuation coefficient of ultrasonic waves. As a result, the temperature change appears as an error in the measured concentration of the sample solution.

従来の超音波濃度計では、この温度変化の影響を補償す
る手段が何等設けられていなかったため、超音波の音速
の温度変化に伴なう影響が避けられないという難点があ
った。
In the conventional ultrasonic densitometer, no means for compensating for the influence of the temperature change is provided, so that there is a problem that the influence of the sound velocity of the ultrasonic wave due to the temperature change cannot be avoided.

本発明は、上述の問題点に鑑みてなされたものであっ
て、試料液濃度測定時の温度の影響を有効に補償できる
ようにすること目的とする。
The present invention has been made in view of the above problems, and an object of the present invention is to enable effective compensation of the influence of temperature when measuring the concentration of a sample liquid.

<問題点を解決するための手段> 本発明は、上記の目的を達成するために、発信子に加わ
る励振駆動用の発信信号と受信子から出力される受信信
号とを共通に入力して前記試料液中を伝播する超音波の
伝播時間に対応したパルス幅を有する温度補正信号を出
力する温度補正回路を備えることを特徴としている。
<Means for Solving the Problems> In order to achieve the above-mentioned object, the present invention inputs the excitation driving oscillation transmission signal applied to the transmission element and the reception signal output from the reception element in common, It is characterized by including a temperature correction circuit for outputting a temperature correction signal having a pulse width corresponding to the propagation time of an ultrasonic wave propagating in the sample liquid.

<作用> 試料液中の超音波の伝播時間は温度補償回路によって伝
播時間に対応したパルス幅を有する温度補正信号に変換
される。従って、試料液の温度が変化すると、該試料液
中を伝播する超音波の音速も変化するが、この音速の変
化は結果的にパルス幅の変化となって現われることにな
る。従って、温度補正回路で得られた温度補正信号に基
づいて受信子から出力される試料液の濃度に対応する受
信信号を補正することができる。
<Operation> The propagation time of the ultrasonic wave in the sample solution is converted into a temperature correction signal having a pulse width corresponding to the propagation time by the temperature compensation circuit. Therefore, when the temperature of the sample liquid changes, the sound velocity of the ultrasonic wave propagating in the sample liquid also changes, but this change in the sound velocity results in a change in the pulse width. Therefore, the received signal corresponding to the concentration of the sample solution output from the receiver can be corrected based on the temperature correction signal obtained by the temperature correction circuit.

<実施例> 以下、本発明を図面に示す実施例に基づいて詳細に説明
する。
<Examples> Hereinafter, the present invention will be described in detail based on Examples shown in the drawings.

第1図は本発明の一実施例を示す超音波濃度計の構成図
である。同図において、符号1は超音波濃度計を示し、
2は濃度検出部、4はセメントや汚泥等の混濁物質を含
む試料液である。上記濃度検出部2は、試料液4を貯留
する容器6を備えるとともに、試料液4中に超音波を発
信する発信子8と試料液4中を伝播した超音波を受信す
る受信子10とが所定距離を保って対向配置されて構成
される。12は発信子8を励振駆動する発信信号を出力
する発振器、14はオン/オフスイッチ、16はオン/
オフスイッチ14を動作させる切換パルスを発生する切
換パルス発生器、18は発振器12から出力される発信
信号を増幅する第1増幅器である。また、20は受信子
10から受波した超音波の強度に対応して出力される受
信信号を増幅する第2増幅器、22は第2増幅器20の
受信信号を整流する整流器、24は整流器22で整流さ
れた受信信号の試料液4の濃度にリニアに対応したDC
電圧の濃度信号に変換して増幅出力する逆対数増幅器で
ある。
FIG. 1 is a block diagram of an ultrasonic densitometer showing an embodiment of the present invention. In the figure, reference numeral 1 indicates an ultrasonic densitometer,
Reference numeral 2 is a concentration detection unit, and 4 is a sample liquid containing turbid substances such as cement and sludge. The concentration detection unit 2 includes a container 6 that stores the sample solution 4, and a transmitter 8 that transmits ultrasonic waves into the sample solution 4 and a receiver 10 that receives the ultrasonic waves propagated in the sample solution 4. It is configured to be opposed to each other with a predetermined distance maintained. Reference numeral 12 is an oscillator that outputs a transmission signal for driving the oscillator 8; 14 is an on / off switch; 16 is an on / off switch.
A switching pulse generator that generates a switching pulse for operating the off switch 14 and a first amplifier 18 that amplifies a transmission signal output from the oscillator 12. Further, 20 is a second amplifier that amplifies the received signal output corresponding to the intensity of the ultrasonic wave received from the receiver 10, 22 is a rectifier that rectifies the received signal of the second amplifier 20, and 24 is a rectifier 22. DC that linearly corresponds to the concentration of the sample liquid 4 of the rectified received signal
It is an antilogarithmic amplifier that converts a voltage concentration signal and amplifies and outputs it.

さらに、この実施例の超音波濃度計1では、前記発信子
8に加わる励振駆動用の発信信号と前記受信子10から
出力される受信信号とを共通に入力して試料液中を伝播
する超音波の伝播時間に対応したパルス幅を有する温度
補正信号を出力する温度補正回路26が設けられてい
る。この温度補正回路26は、発信子8に加わる励振駆
動用の発信信号を受けてトリガパルスを発生する第1ト
リガパルス発生器28と、受信子10から出力される受
信信号を受けてトリガパルスを発生する第2トリガパル
ス発生器30と、第1、第2トリガパルス発生器28、
30からそれぞれ出力されるトリガパルスを入力するR
Sフリップフロップ32と、RSフリップフロップ32
の出力信号のパルス幅をこれに対応したDC電圧に変換
するパルス幅/電圧変換器34と、このパルス幅/電圧
変換器34から出力されるDC電圧に一定比率の係数を
掛け算して温度補正信号に変換する掛け算器とからな
る。また、38は逆対数増幅器24から出力される濃度
信号に温度補正回路26の掛け算回路36から出力され
る温度補正信号を加算する加算器、40は加算器38か
ら出力される温度補正後のDC電圧値を電流値に変換す
る電圧/電流変換器である。
Further, in the ultrasonic densitometer 1 of this embodiment, an ultrasonic wave driving signal applied to the oscillator 8 and a received signal output from the receiver 10 are commonly input to propagate the ultrasonic wave in the sample solution. A temperature correction circuit 26 that outputs a temperature correction signal having a pulse width corresponding to the propagation time of a sound wave is provided. The temperature correction circuit 26 receives a signal for excitation drive applied to the oscillator 8 and generates a trigger pulse, and a first trigger pulse generator 28, and receives a reception signal output from the receiver 10 to generate a trigger pulse. A second trigger pulse generator 30 to be generated, first and second trigger pulse generators 28,
R to input the trigger pulse output from each 30
S flip-flop 32 and RS flip-flop 32
Pulse width / voltage converter 34 for converting the pulse width of the output signal of the above into a DC voltage corresponding thereto, and the DC voltage output from this pulse width / voltage converter 34 are multiplied by a constant ratio coefficient to correct the temperature. It is composed of a multiplier for converting into a signal. Further, 38 is an adder for adding the temperature correction signal output from the multiplication circuit 36 of the temperature correction circuit 26 to the concentration signal output from the antilogarithmic amplifier 24, and 40 is the temperature-corrected DC output from the adder 38. It is a voltage / current converter that converts a voltage value into a current value.

この超音波濃度計1を適用して試料液4中の混濁物質の
濃度を測定する場合の各部の動作を第2図に示すタイム
チャートを参照して説明する。
The operation of each part when the concentration of the turbid substance in the sample liquid 4 is measured by applying the ultrasonic densitometer 1 will be described with reference to the time chart shown in FIG.

まず、切換パルス発生器16からオン/オフスイッチ1
4に切換パルスが与えられると、オン/オフスイッチ1
4は、第2図(a)に示すように、切換パルスが与えられ
ている期間T1にのみオン状態を維持する。しかも、オ
ン/オフスイッチ14の一つのオン期間から次のオン期
間までの時間間隔T2は濃度検出部2における超音波の
送受信期間を考慮して所定値T2に設定されている。従
って、オン/オフスイッチ14は設定された時間間隔T
2でもって間欠的にオン/オフ動作を繰り返す。そし
て、オン/オフスイッチ14がオン状態のときには、同
図(b)に示すように、発振器12から出力された発信信
号が、オン/オフスイッチ14を介して第1増幅器18
で増幅された後、発振子8と第1トリガパルス発生器2
8とに加わる。発信信号が発信子8に加わると、発振子
8はこれにより励振駆動されて試料液4中に超音波を放
射する。試料液4中に放射された超音波は試料液4中の
混濁物質の濃度に応じた減衰を受ける。こうして、試料
液4中を伝播した超音波はある時間T3の後、受信子1
0で受信される。受信子10は超音波を受信すると、同
図(c)に示すように、受信した超音波の強度に対応した
受信信号を出力する。この受信信号には、発信子8から
放射された超音波がそのまま受信子10で受信されたも
のと、反射波となり発信子8、受信子10間を1往復し
た後、あるいは数回往復した後受信子10で受信された
ものとが現われる。
First, from the switching pulse generator 16 to the on / off switch 1
4 is given a switching pulse, the on / off switch 1
As shown in FIG. 2 (a), 4 maintains the ON state only during the period T1 in which the switching pulse is applied. Moreover, the time interval T2 from one ON period of the ON / OFF switch 14 to the next ON period is set to a predetermined value T2 in consideration of the ultrasonic wave transmission / reception period in the concentration detection unit 2. Therefore, the on / off switch 14 is set to the set time interval T
The ON / OFF operation is intermittently repeated with 2. Then, when the on / off switch 14 is in the on state, the oscillation signal output from the oscillator 12 is transmitted via the on / off switch 14 to the first amplifier 18 as shown in FIG.
The oscillator 8 and the first trigger pulse generator 2 after being amplified by
Join 8 and. When a transmission signal is applied to the oscillator 8, the oscillator 8 is excited and driven by this, and emits ultrasonic waves into the sample solution 4. The ultrasonic waves radiated into the sample solution 4 are attenuated according to the concentration of the turbid substance in the sample solution 4. In this way, the ultrasonic wave propagated in the sample liquid 4 is received by the receiver 1 after a certain time T3.
Received with 0. When receiving the ultrasonic wave, the receiver 10 outputs a reception signal corresponding to the intensity of the received ultrasonic wave, as shown in FIG. In this received signal, the ultrasonic wave radiated from the transmitter 8 is directly received by the receiver 10 and becomes a reflected wave, and after one round trip between the oscillator 8 and the receiver 10, or after several round trips. What is received by the receiver 10 appears.

受信子10から出力された受信信号は第2増幅器20と
第2トリガパルス発生器30とにそれぞれ入力される。
第2増幅器20は入力された受信信号を増幅し、これを
次段の整流器22に与える。整流器22は入力された受
信信号をDC電圧に整流する。整流化された受信信号
は、次いで逆対数増幅器24に与えられる。逆対数増幅
器24は整流器22で整流された受信信号を試料液4の
濃度にリニアに対応するDC電圧の濃度信号に変換す
る。
The reception signal output from the receiver 10 is input to the second amplifier 20 and the second trigger pulse generator 30, respectively.
The second amplifier 20 amplifies the input reception signal and supplies it to the rectifier 22 in the next stage. The rectifier 22 rectifies the input reception signal into a DC voltage. The rectified received signal is then provided to the antilogarithmic amplifier 24. The inverse logarithmic amplifier 24 converts the received signal rectified by the rectifier 22 into a DC voltage concentration signal linearly corresponding to the concentration of the sample liquid 4.

一方、第1トリガパルス発生器28に発信子8を励振駆
動する発信信号が加わると、第1トリガパルス発生器2
8はトリガパルスを発生し、このトリガパルスがRSフ
リップフロップ32のセット入力端子に与えられる。こ
れによりRSフリップフロップ32がセットされ、ハイ
レベルの信号が出力される。また、第2トリガパルス発
生器30に受信子10から出力された受信信号が加わる
と、第2トリガパルス発生器30はトリガパルスを発生
し、このトリガパルスがRSフリップフロップ32のリ
セット入力端子に与えられる。これにより、RSフリッ
プフロップ32がリセットされ、ハイレベルの信号出力
がローレベルに反転する。従って、RSフリップフロッ
プ32からは、第2図(d)に示すように、試料液4中を
伝播する超音波の伝播時間T3に対応したパルス幅を有
する信号が出力されることになる。すなわち、RSフリ
ップフロップ32から出力される信号のパルス幅は温度
の関数となっているので、試料液4の温度が変化する
と、その温度変化はパルス幅の変化となって現われる。
RSフリップフロップ32の出力信号は次段のパルス幅
/電圧変換器34によって、パルス幅に対応したDC電
圧に変換される。パルス幅/電圧変換器34でDC電圧
に変換された信号は、さらに掛け算器36に入力され
る。掛け算器36は、パルス幅/電圧変換器34の信号
出力に一定比率の係数を掛け算して温度補正信号に変換
する。そして、次段の加算器38では逆対数増幅器24
から出力される濃度信号に掛け算回路36から出力され
る温度補正信号を加算し、これによって、濃度信号が温
度補正される。そして、加算器38から出力された温度
補正後の信号は電圧/電流変換器40によってこれに対
応した電流値に変換される。
On the other hand, when an oscillation signal for driving the oscillator 8 is applied to the first trigger pulse generator 28, the first trigger pulse generator 2
8 generates a trigger pulse, which is applied to the set input terminal of the RS flip-flop 32. As a result, the RS flip-flop 32 is set and a high level signal is output. Further, when the reception signal output from the receiver 10 is applied to the second trigger pulse generator 30, the second trigger pulse generator 30 generates a trigger pulse, and this trigger pulse is applied to the reset input terminal of the RS flip-flop 32. Given. As a result, the RS flip-flop 32 is reset and the high-level signal output is inverted to the low level. Therefore, as shown in FIG. 2D, the RS flip-flop 32 outputs a signal having a pulse width corresponding to the propagation time T3 of the ultrasonic wave propagating in the sample liquid 4. That is, since the pulse width of the signal output from the RS flip-flop 32 is a function of temperature, when the temperature of the sample liquid 4 changes, the temperature change appears as a change in pulse width.
The output signal of the RS flip-flop 32 is converted into a DC voltage corresponding to the pulse width by the pulse width / voltage converter 34 in the next stage. The signal converted into the DC voltage by the pulse width / voltage converter 34 is further input to the multiplier 36. The multiplier 36 multiplies the signal output of the pulse width / voltage converter 34 by a constant ratio coefficient and converts the signal output into a temperature correction signal. Then, in the next stage adder 38, the antilogarithmic amplifier 24
The temperature correction signal output from the multiplication circuit 36 is added to the concentration signal output from the output circuit, and the temperature of the concentration signal is corrected. The temperature-corrected signal output from the adder 38 is converted by the voltage / current converter 40 into a corresponding current value.

なお、上記実施例の他、たとえば第3図に示すように、
第2増幅器20、第2トリガパルス発生器30と受信子
10との間にオン/オフスイッチ44を設けるととも
に、切換パルス発生器16に遅延回路42を設け、受信
子10から出力される受信信号の内の反射波に基づくも
のを除去するように構成することも可能である。
In addition to the above embodiment, for example, as shown in FIG.
The on / off switch 44 is provided between the second amplifier 20, the second trigger pulse generator 30 and the receiver 10, and the switching pulse generator 16 is provided with the delay circuit 42, so that the reception signal output from the receiver 10 is provided. It is also possible to configure so as to remove the one based on the reflected wave in the.

<発明の効果> 以上のように本発明によれば、試料液中の超音波の伝播
時間は温度補償回路によって伝播時間に対応したパルス
幅を有する温度補正信号に変換され、この温度補正信号
に基づいて受信子から出力される受信信号が補正され
る。従って、温度センサを特に設けなくても超音波の伝
播速度の温度変化に伴なう影響を有効に補償できる。こ
のため、従来に比べてより正確に試料液中の混濁物質の
濃度を測定できるようになる。
<Effects of the Invention> As described above, according to the present invention, the propagation time of the ultrasonic wave in the sample solution is converted into the temperature correction signal having the pulse width corresponding to the propagation time by the temperature compensation circuit, and the temperature correction signal is converted into the temperature correction signal. Based on this, the received signal output from the receiver is corrected. Therefore, it is possible to effectively compensate for the influence of the change in the propagation velocity of the ultrasonic wave due to the temperature, even if the temperature sensor is not provided. Therefore, the concentration of the turbid substance in the sample liquid can be measured more accurately than in the conventional case.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の一実施例を示す超音波濃度計の構成
図、第2図は第1図の超音波濃度計の出力信号のタイム
チャート、第3図は本発明の応用例を示す超音波濃度計
の構成図である。 1……超音波濃度計、2……濃度検出部、4……試料
液、8……発振子、10……受信子、26……温度補正
回路。
FIG. 1 is a configuration diagram of an ultrasonic densitometer showing an embodiment of the present invention, FIG. 2 is a time chart of output signals of the ultrasonic densitometer of FIG. 1, and FIG. 3 is an application example of the present invention. It is a block diagram of an ultrasonic densitometer. 1 ... Ultrasonic densitometer, 2 ... Concentration detector, 4 ... Sample solution, 8 ... Oscillator, 10 ... Receiver, 26 ... Temperature correction circuit.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】試料液中に超音波を発信する発信子と試料
液中を伝播した超音波を受信する受信子とが所定距離を
保って対向配置された濃度検出部を備えた超音波濃度計
において、前記発信子に加わる励振駆動用の発信信号と
前記受信子から出力される受信信号とを共通に入力して
前記試料液中を伝播する超音波の伝播時間に対応したパ
ルス幅を有する温度補正信号を出力する温度補正回路を
備えることを特徴とする超音波濃度計。
1. An ultrasonic wave concentration comprising a concentration detector in which a transmitter for transmitting an ultrasonic wave into a sample solution and a receiver for receiving an ultrasonic wave propagated in the sample solution are opposed to each other with a predetermined distance therebetween. In the meter, a pulse width corresponding to a propagation time of an ultrasonic wave propagating in the sample liquid by commonly inputting an excitation driving oscillation signal applied to the oscillator and a reception signal output from the receiver is provided. An ultrasonic densitometer, comprising a temperature correction circuit that outputs a temperature correction signal.
JP59271394A 1984-12-21 1984-12-21 Ultrasonic densitometer Expired - Lifetime JPH0623736B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59271394A JPH0623736B2 (en) 1984-12-21 1984-12-21 Ultrasonic densitometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59271394A JPH0623736B2 (en) 1984-12-21 1984-12-21 Ultrasonic densitometer

Publications (2)

Publication Number Publication Date
JPS61148365A JPS61148365A (en) 1986-07-07
JPH0623736B2 true JPH0623736B2 (en) 1994-03-30

Family

ID=17499450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59271394A Expired - Lifetime JPH0623736B2 (en) 1984-12-21 1984-12-21 Ultrasonic densitometer

Country Status (1)

Country Link
JP (1) JPH0623736B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5166991B2 (en) * 2008-06-25 2013-03-21 パナソニック株式会社 Airborne particle measurement system

Also Published As

Publication number Publication date
JPS61148365A (en) 1986-07-07

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