JPH0623783B2 - Detection electrode - Google Patents
Detection electrodeInfo
- Publication number
- JPH0623783B2 JPH0623783B2 JP7743985A JP7743985A JPH0623783B2 JP H0623783 B2 JPH0623783 B2 JP H0623783B2 JP 7743985 A JP7743985 A JP 7743985A JP 7743985 A JP7743985 A JP 7743985A JP H0623783 B2 JPH0623783 B2 JP H0623783B2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- detection electrode
- charge
- electrostatic
- conductive fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Measuring Leads Or Probes (AREA)
Description
【発明の詳細な説明】 この発明は、帯電物の静電圧を測定するための検出電極
に関する。The present invention relates to a detection electrode for measuring the electrostatic voltage of a charged object.
帯電物の静電圧を測定するには二つの方法がある。その
一つは、被測定帯電物より電荷を集電し、その、電荷が
高抵抗を通してアースに流れるときの電位差を測定する
ことにより被測定帯電物の静電圧を知る方法(以下集電
法と云う)と、他の一つは、被測定帯電物のつくる電界
中に導体の電極を置き、その導体に生ずる誘導電荷を利
用して被測定帯電物の静電圧を測定する方法(以下静電
誘導法と云う)である。There are two methods for measuring the electrostatic voltage of a charged object. One of them is a method of collecting the electric charge from the charged object to be measured and knowing the electrostatic voltage of the charged object to be measured by measuring the potential difference when the electric charge flows to the ground through a high resistance (hereinafter referred to as the current collecting method). The other is a method of placing an electrode of a conductor in an electric field created by an object to be measured and measuring the electrostatic voltage of the object to be measured by using the induced charge generated in the conductor (hereinafter referred to as electrostatic It is called the induction method).
コンデンサー型静電電圧計は、集電法による測定にも静
電誘導法による測定にも使用することのできる、クーロ
ン力を利用した、構造が簡単で、故障が多く、測定値に
対する信頼性の高い計器であるが、問題は、僅少である
が、漏洩コンダクタンスをもつことである。集電法によ
る測定の場合は、電荷が補給されるので問題はないが、
静電誘導法による測定は、漏洩電荷の無視できる短時間
内に限られる。Capacitor type electrostatic voltmeter, which can be used for both current collection method and electrostatic induction method measurement, uses Coulomb force, has a simple structure, has many failures, and is highly reliable for measured values. An instrument, the problem is that it has a small but leaky conductance. In the case of measurement by the current collection method, there is no problem because the charge is replenished, but
The measurement by the electrostatic induction method is limited to a short time when the leakage charge can be ignored.
しかしながら、集電法による測定は、被測定帯電物の電
圧変化に対する追随が一般に緩慢で敏速に帯電状態が変
化する被測定物に対しては数電誘導法を使用したい。コ
ンデンサー型静電圧計を使用する場合、静電誘導法によ
る誘導電荷の発生が短時間で消滅し、次の測定に、その
誘導電荷が残らないような測定を継続して行う場合の連
続長期間測定は問題ないが、誘導電荷が常時連続的に持
続するような対象物に対する長期連続測定は、前述の漏
洩コンダクタンスのために、静電誘導法によっては、不
可能である。However, in the measurement by the current collecting method, it is generally desired to use the several-electrical induction method for an object to be measured, which has a slow follow-up to the voltage change of the object to be measured and whose charge state changes rapidly. When using a capacitor-type electrostatic voltmeter, the generation of induced charge by the electrostatic induction method disappears in a short time, and continuous measurement is performed for a long period of time when the next measurement does not leave the induced charge. Although the measurement is not a problem, long-term continuous measurement of an object in which the induced charge is always continuous is impossible by the electrostatic induction method due to the above-mentioned leakage conductance.
この発明は、被測定帯電物の帯電状態の変化に敏速に追
随でき、長期間の連続測定を可能にするコンデンサー型
静電電圧計用の検出電極を提供するものである。The present invention provides a detection electrode for a capacitor-type electrostatic voltmeter that can promptly follow changes in the charging state of a measured charged object and enable long-term continuous measurement.
この発明の検出電極は、導電性の繊維層に導線の一端を
結合し、この導電性繊維層を、1個または、複数個の開
口部をもって絶縁物で被覆したもので、その導線の他の
一端をコンデンサー型静電電圧計に接続して被測定帯電
物の静電圧を測定するようにしたものである。In the detection electrode of the present invention, one end of a conductive wire is bonded to a conductive fiber layer, and the conductive fiber layer is covered with an insulator with one or a plurality of openings. One end is connected to a condenser-type electrostatic voltmeter to measure the electrostatic voltage of the charged object to be measured.
このような構造の検出電極を電界中に置くと絶縁物は誘
電分極を起し、この絶縁物に接している導電性繊細の部
分には、その誘電分極に応じた電荷が発生する。絶縁物
の開口部の導電性繊維層には直接に静電誘導による電荷
が発生しこれらの導電性繊維層に生じた電荷量と等量で
異種の極性をもった電荷が、その導線の他端に結合され
ているコンデンサー型静電電圧計の電極に発生し、静電
電圧計が作動する。一方絶縁物に設けられた開口部に
は、微細な径の導電性繊維が露出しているので、被測定
帯電物との間にコロナ電流が流れ、静電電圧計の漏洩コ
ンダクタンスによる漏洩電荷を補給する。コロナ電流に
よる電荷の補給量は、絶縁物の孔の面積と検出電極の被
測定帯電物からの距離によって調整する。この発明を図
面を用いて、更に詳細に具体的に説明する。When the detection electrode having such a structure is placed in an electric field, the insulator causes dielectric polarization, and a charge corresponding to the dielectric polarization is generated in the conductive delicate portion in contact with the insulator. Electric charges due to electrostatic induction are directly generated in the conductive fiber layers in the openings of the insulating material, and charges having different polarities, which are the same as the amount of charges generated in these conductive fiber layers, are transferred to other conductive wires. It is generated at the electrodes of a condenser type electrostatic voltmeter that is connected to the end, and the electrostatic voltmeter operates. On the other hand, a conductive fiber with a fine diameter is exposed in the opening provided in the insulator, so a corona current flows between it and the measured object to replenish the leakage charge due to the leakage conductance of the electrostatic voltmeter. To do. The amount of charge replenished by the corona current is adjusted by the area of the hole of the insulator and the distance of the detection electrode from the charged object to be measured. The present invention will be described in more detail with reference to the drawings.
第1図は、この発明の検出電極をコンデンサー型静電電
圧計に接続した場合の機能を説明するための略図であ
り、第2図は第1図の等価回路である。FIG. 1 is a schematic diagram for explaining the function when the detection electrode of the present invention is connected to a condenser type electrostatic voltmeter, and FIG. 2 is an equivalent circuit of FIG.
第1図において、1は被測定帯電物で、この場合、正に
帯電しているものとする。2は開口部3をもった絶縁物
で導電性繊維層4を覆っている。導電性繊維層4に導線
5の一端が結合され、他端はコンデンサー型静電電圧計
の固定電極に接続されている。コンデンサー型静電電圧
計の可動電極7は接地されている。In FIG. 1, reference numeral 1 denotes a charged object to be measured, which in this case is positively charged. Reference numeral 2 is an insulator having an opening 3 and covers the conductive fiber layer 4. One end of the conductive wire 5 is coupled to the conductive fiber layer 4, and the other end is connected to the fixed electrode of the condenser type electrostatic voltmeter. The movable electrode 7 of the condenser type electrostatic voltmeter is grounded.
被測定帯電物1の帯電電荷によって生じた電界中に、こ
の発明の検出電極を置くと、導電性繊維層4を覆ってい
る絶縁物は、誘導分極を起し、外側が負に、導電性繊維
層4に接している内側は正に分極し、従って導電性繊維
層4には負の電荷が生じ、絶縁物の開口部で被測定帯電
物よりの電気力線が直接到達する導電性繊維層も負に帯
電する。これらの導電性繊維層に生じた電荷と等量の正
の電荷が、導線5に接続されているコンデンサー型静電
電圧計の固定電極6に生じ、この電荷により静電電圧計
が作動する。When the detection electrode of the present invention is placed in the electric field generated by the charged electric charge of the measured object 1 to be measured, the insulator covering the conductive fiber layer 4 causes inductive polarization, and the outside is negative and the conductivity is negative. The inner side in contact with the fiber layer 4 is positively polarized, so that a negative electric charge is generated in the conductive fiber layer 4, and the conductive line directly reaches the electric force line from the charged object to be measured at the opening of the insulator. The layer also becomes negatively charged. The same amount of positive charge as the charge generated in these conductive fiber layers is generated in the fixed electrode 6 of the capacitor type electrostatic voltmeter connected to the conductor 5, and this charge activates the electrostatic voltmeter.
しかしながら、静電電圧計には漏洩コンダクタンスがあ
るため固定電極に生じた電荷は減少して行くので電荷の
補充がなければ静電電圧計の指示は減少して行く。However, since the electrostatic voltmeter has a leak conductance, the electric charge generated in the fixed electrode decreases, and therefore the indication of the electrostatic voltmeter decreases unless the electric charge is replenished.
この電荷の補充が、検出電極の被覆絶縁物2の開口部3
に露出している導電性繊維によって行われる。導電性繊
維は、その微細な寸度のため、電気力線の密度が大き
く、従ってコロナ電流が発生する。コロナ電流によっ
て、コンデンサー型静電電圧計の固定電極6より逃げる
電荷が補給される。This replenishment of the electric charge is performed by the opening 3 of the coating insulator 2 of the detection electrode.
Conducted by the conductive fibers exposed to the. Due to the fine size of the conductive fiber, the density of the lines of electric force is high, and therefore a corona current is generated. The corona current replenishes the electric charge escaping from the fixed electrode 6 of the condenser type electrostatic voltmeter.
これを等価回路で示すと第2図のようになる。第2図の
C1は被測定帯電物と検出電極との間の静電容量、g1は被
測定帯電物と検出電極との間のコロナ電流に対するコン
ダクタンス、C2およびg2はそれぞれコンデンサー型静電
電圧計の静電容量および漏洩コンダクタンスである。An equivalent circuit of this is shown in FIG. Of Figure 2
C 1 is the capacitance between the charged object to be measured and the detection electrode, g 1 is the conductance with respect to the corona current between the charged object to be measured and the detection electrode, and C 2 and g 2 are the capacitance type electrostatic voltmeters respectively. Capacitance and leakage conductance.
被測定帯電物の静電圧をEとすればg1,g2 に電流が流れ
ないときには静電電圧計は、 の電圧を示すが最終的には静電電圧計の指示は、 となる。それ故、各コンダクタンスをそれぞれの静電容
量に比例するようにとれれば、静電誘導によって得られ
た指示は変化せず、迅速な指示が得られる。If the static voltage of the charged object to be measured is E, and no current flows in g 1 and g 2 , the electrostatic voltmeter The final indication of the electrostatic voltmeter is Becomes Therefore, if each conductance can be taken to be proportional to each capacitance, the instruction obtained by electrostatic induction does not change, and a quick instruction can be obtained.
コンデンサー型静電電圧計はそれ自体静電容量が変化す
るが、その変化量は比較的少いのでできるだけ各静電容
量に比例するようなコンダクタンスを待たせるようにす
ることにより、比較的迅速に最終指示値に近づけること
ができる。Capacitance-type electrostatic voltmeter itself has a change in capacitance, but the amount of change is relatively small, so by keeping the conductance proportional to each capacitance as much as possible, the final value can be set relatively quickly. It can approach the indicated value.
コンダクタンスg1の調整は、導電性繊維の種類、開口部
の大きさ、被測定帯電物よりの距離などにより行い、コ
ンダクタンスg2の調整は、調整用のコンダクタンスを付
加するなどの方法も採用することができる。また静電容
量C1は検出電極の大きさ、被測定帯電物と検出電極との
距離および導電性繊維の量などによって変化させること
ができるので、測定現場の状況に応じて、適当な検出電
極を選定使用する。The conductance g 1 is adjusted by the type of conductive fiber, the size of the opening, the distance from the charged object to be measured, etc., and the conductance g 2 is adjusted by adding a conductance for adjustment. be able to. The capacitance C 1 can be changed according to the size of the detection electrode, the distance between the object to be measured and the detection electrode, the amount of conductive fibers, and so on. Select and use.
従って、この発明の検出電極には色々の形状寸度のもの
が考えられるが、第3図に一実施例を示す。Therefore, the detecting electrode of the present invention may have various shape dimensions, and FIG. 3 shows an embodiment.
第3図の実施例において、電極形状を保持するための絶
縁体のパイプ6の周囲に導電性繊維層4を設け、その外
側を開口部3をもった絶縁性の収縮チューブ2で被覆し
たもので、導電性繊維4の一端には導線5が結合されて
いる。In the embodiment of FIG. 3, a conductive fiber layer 4 is provided around an insulator pipe 6 for holding the shape of the electrode, and the outer side thereof is covered with an insulating shrink tube 2 having an opening 3. Then, the conductive wire 5 is coupled to one end of the conductive fiber 4.
第1図は、この発明の検出電極コンデンサー型静電電圧
計に接続した場合の機能を説明するための略図であり、
第2図は第1図の等価回路図である。 第3図は、この発明の検出電極の一実施例を示す斜面図
である。FIG. 1 is a schematic diagram for explaining the function when connected to the detection electrode capacitor type electrostatic voltmeter of the present invention,
FIG. 2 is an equivalent circuit diagram of FIG. FIG. 3 is a perspective view showing an embodiment of the detection electrode of the present invention.
Claims (1)
1個または複数個の開口部をもった絶縁物で被覆したコ
ンデンサー型静電電圧計用検出電極。1. An outer surface of a conductive fiber layer bonded to a conductor,
Capacitor type electrostatic voltmeter detection electrode covered with an insulator having one or more openings.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7743985A JPH0623783B2 (en) | 1985-04-11 | 1985-04-11 | Detection electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7743985A JPH0623783B2 (en) | 1985-04-11 | 1985-04-11 | Detection electrode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61235755A JPS61235755A (en) | 1986-10-21 |
| JPH0623783B2 true JPH0623783B2 (en) | 1994-03-30 |
Family
ID=13634052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7743985A Expired - Lifetime JPH0623783B2 (en) | 1985-04-11 | 1985-04-11 | Detection electrode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0623783B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6034592B2 (en) * | 2012-05-09 | 2016-11-30 | 株式会社アルバック | Surface potential measuring device |
-
1985
- 1985-04-11 JP JP7743985A patent/JPH0623783B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61235755A (en) | 1986-10-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0503032B1 (en) | Capacitance sensing probe | |
| US3096478A (en) | Apparatus with conductive gas electrodes for detecting non-uniformity in electrically insulating and electrically semi-conducting materials | |
| JPS5979545A (en) | Electrostatic chucking device | |
| JPH0191431A (en) | Detector for electrostatic charge amount on wafer in ion implanting device | |
| KR100230628B1 (en) | Charge measuring device induced in conductor | |
| JPS61118617A (en) | Method and device for measuring flow rate | |
| EP0980004B1 (en) | Microscopic capacitance measurement system and probing system | |
| US4027238A (en) | Method and apparatus for the moisture measurement of flat structures, especially textile webs | |
| JPH0623783B2 (en) | Detection electrode | |
| US2545386A (en) | Compensation circuit for electrostatic voltmeters | |
| KR100277240B1 (en) | How to determine the surface resistance of a material | |
| JPH0325183Y2 (en) | ||
| JPH06313782A (en) | Potential measuring device | |
| JP6924652B2 (en) | Deposit measuring device | |
| JP3037834B2 (en) | Extrapolated ionization chamber | |
| JP4479861B2 (en) | Device for detecting leakage of water shielding material | |
| SU1497591A1 (en) | Probe sensor for contactless measuring of surface charge density | |
| CN109142894B (en) | Test method for DC conductor corona space charge distribution based on coupling equipotential principle | |
| JPS599864B2 (en) | Surface potential measuring device | |
| JPS61151469A (en) | Condenser type rotary electrostatic voltmeter | |
| JPH11297145A (en) | Insulator dirt detecting device | |
| JPH0567191B2 (en) | ||
| CN121357780A (en) | Langmuir probes and detection systems | |
| Buchman et al. | Charge measurement | |
| JPS6255622B2 (en) |