JPH0624053B2 - Magnetic recording method - Google Patents
Magnetic recording methodInfo
- Publication number
- JPH0624053B2 JPH0624053B2 JP22456384A JP22456384A JPH0624053B2 JP H0624053 B2 JPH0624053 B2 JP H0624053B2 JP 22456384 A JP22456384 A JP 22456384A JP 22456384 A JP22456384 A JP 22456384A JP H0624053 B2 JPH0624053 B2 JP H0624053B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- thin film
- film layer
- metal thin
- ferromagnetic metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- 239000010409 thin film Substances 0.000 claims description 57
- 239000000758 substrate Substances 0.000 claims description 54
- 230000005294 ferromagnetic effect Effects 0.000 claims description 53
- 239000013078 crystal Substances 0.000 claims description 14
- 229910052760 oxygen Inorganic materials 0.000 claims description 12
- 239000010419 fine particle Substances 0.000 claims description 9
- 229910052759 nickel Inorganic materials 0.000 claims description 9
- 229910052804 chromium Inorganic materials 0.000 claims description 8
- 239000003302 ferromagnetic material Substances 0.000 claims description 5
- 229910001004 magnetic alloy Inorganic materials 0.000 claims description 4
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
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- 229910020632 Co Mn Inorganic materials 0.000 description 1
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- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
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- FPVKHBSQESCIEP-JQCXWYLXSA-N pentostatin Chemical compound C1[C@H](O)[C@@H](CO)O[C@H]1N1C(N=CNC[C@H]2O)=C2N=C1 FPVKHBSQESCIEP-JQCXWYLXSA-N 0.000 description 1
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Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Magnetic Record Carriers (AREA)
- Recording Or Reproducing By Magnetic Means (AREA)
Description
【発明の詳細な説明】 I 発明の背景 技術分野 本発明は、磁気記録方法、特にいわゆる斜め蒸着法によ
る連続薄膜型の磁性層を有する磁気記録媒体を用いた磁
気記録方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording method, and more particularly to a magnetic recording method using a magnetic recording medium having a continuous thin film type magnetic layer by a so-called oblique evaporation method.
先行技術とその問題点 ビデオ用、オーディオ用等の磁気記録媒体として、テー
プ化して巻回したときのコンパクト性から、長尺の基体
上に、連続薄膜型の磁性層を有するものの開発が活発に
行われている。Prior art and its problems Active development of a magnetic recording medium for video, audio, etc. having a continuous thin film type magnetic layer on a long substrate due to its compactness when wound into a tape and wound. Has been done.
このような金属薄膜型の媒体の磁性薄膜層としては、特
性上、基体法線に対し所定の傾斜角にて蒸着を行う、い
わゆる斜め蒸着法によって形成したCo、Co−Ni系
等からなる蒸着膜が好適である。As a magnetic thin film layer of such a metal thin film type medium, vapor deposition of Co, Co—Ni or the like formed by a so-called oblique vapor deposition method, which is characteristically performed by vapor deposition at a predetermined inclination angle with respect to the normal line of the substrate. Membranes are preferred.
このよう媒体は、スペーシングロスによる特性低下が大
きいので、その表面をできるだけ平滑化する必要があ
る。Since the characteristics of the medium are largely deteriorated due to spacing loss, it is necessary to make the surface of the medium as smooth as possible.
しかし、あまり表面を平坦にすると、摩擦が大きくな
り、ヘッドタッチ、走行面で支障が出る。However, if the surface is made too flat, friction will increase, which will hinder the head touch and the running surface.
ところで、金属薄膜型の媒体では、磁性層が0.05〜
0.5μmと非常にうすいため、媒体の表面性は基板の
表面性に依存する。By the way, in the metal thin film type medium, the magnetic layer is 0.05 to
Since it is as thin as 0.5 μm, the surface property of the medium depends on the surface property of the substrate.
このため、基板表面に比較的なだらならいわゆるしわ
状、ミミズ状等の突起を設ける旨が提案されている(特
開昭53-116115号等)。For this reason, it has been proposed to provide comparatively smooth wrinkle-shaped or earth-shaped protrusions on the substrate surface (JP-A-53-116115, etc.).
また、特開昭58-68227号、同58-100221号には、基体表
面に微粒子を配設して、光学顕微鏡で50〜400倍で
観察でき、しかも触針式表面粗さ測定装置で実測できる
高さの凹凸を設ける旨が提案されている。Further, in JP-A-58-68227 and JP-A-58-100221, fine particles are arranged on the surface of a substrate so that they can be observed with an optical microscope at a magnification of 50 to 400 times, and actually measured with a stylus type surface roughness measuring device. It has been proposed to provide unevenness with a height that can be achieved.
しかし、これらでも、走行摩擦、耐久走行性、走行安定
性等の物性や、電磁変換特性の点で未だ不十分である。However, even these are still insufficient in terms of physical properties such as running friction, running durability and running stability, and electromagnetic conversion characteristics.
一方、特公昭39-25246号等には、強磁性金属薄膜層表面
に、有機物潤滑剤からなるトップコート層を設け、走行
摩擦を低減する旨が提案されている。On the other hand, Japanese Patent Publication No. 39-25246 and the like propose that a top coat layer made of an organic lubricant is provided on the surface of the ferromagnetic metal thin film layer to reduce running friction.
しかし、有機物潤滑剤を用いるときには、潤滑剤のヘッ
ドへの付着、ヘッド目づまりが発生し、実用上大きな問
題となる。However, when an organic lubricant is used, adhesion of the lubricant to the head and clogging of the head occur, which poses a serious problem in practical use.
他方、斜め蒸着法による強磁性金属薄膜層は、基体主面
の法線に対して傾斜し、その長手方向径が強磁性金属薄
膜層厚さ方向全域におよぶ、柱状結晶粒の集合体として
形成される。On the other hand, the ferromagnetic metal thin film layer formed by the oblique vapor deposition method is formed as an aggregate of columnar crystal grains that are inclined with respect to the normal line of the main surface of the substrate and have a longitudinal diameter extending over the entire thickness direction of the ferromagnetic metal thin film layer. To be done.
そして、Co,Ni等は、柱状結晶粒中に存在し、ま
た、必要に応じ導入されるOは、柱状結晶粒の表面に、
酸化物を形成して存在するものである。Co, Ni, etc. are present in the columnar crystal grains, and O, which is introduced as required, is present on the surface of the columnar crystal grains.
It exists by forming an oxide.
しかし、このような強磁性金属薄膜層は、基体の長手方
向、すなわち媒体の走行方向に形状異方性をもつため
に、媒体の走行方向の正逆のいかんにより、入出力特性
に大きな差を生じるという欠点がある。However, such a ferromagnetic metal thin film layer has a shape anisotropy in the longitudinal direction of the substrate, that is, in the traveling direction of the medium. It has the drawback of occurring.
そこで、本発明者らは、先に、このような入出力差のな
い媒体として、基体の長手方向と、基体主面の法線方向
とではられる平面上で、方向をかえながら保磁力を測定
したとき、 (Hc max-Hc min)/Hc(0)≦0.9 {ここに、Hc maxは保磁力の最大値、Hc minは保磁力の
最小値、Hc(0)は基体の長手方向における保磁力を表わ
す。} なる関係を有することを特徴とする磁気記録媒体を提案
している。Therefore, the present inventors previously measured the coercive force as a medium having no such input / output difference while changing the direction on a plane defined by the longitudinal direction of the substrate and the normal direction of the main surface of the substrate. (Hc max-Hc min) / Hc (0) ≦ 0.9 {where Hc max is the maximum coercive force, Hc min is the minimum coercive force, and Hc (0) is the longitudinal direction of the substrate. Represents the coercive force at. } A magnetic recording medium characterized by having the following relationship is proposed.
この場合、上記(Hc max-Hc min)/Hc(0)が0.6以下
となると、耐食性がきわめて良好となり、この旨も先に
本発明者らが提案を行っている。In this case, when the above (Hc max-Hc min) / Hc (0) is 0.6 or less, the corrosion resistance becomes extremely good, and the inventors of the present invention have also proposed this fact.
このように、所定の面内における保磁力を制御しても、
耐久性の点で不十分であり、静止画像モードでのいわゆ
るスチル特性が悪いという欠点がある。In this way, even if you control the coercive force in a given plane,
It has the drawbacks of insufficient durability and poor so-called still characteristics in the still image mode.
すなわち、走行摩擦が低く、媒体の走行方向の正逆のい
かんによる入出力の差がなく、さらに走行耐久性の非常
によい磁気記録方法は未だ実現していない。That is, a magnetic recording method that has low running friction, has no difference in input / output depending on whether the medium is running or not, and has very good running durability has not yet been realized.
II 発明の目的 本発明の目的は、金属薄膜型の磁気記録媒体を用いた磁
気記録方法において、摩擦、耐久走行性、走行安定性等
の物性を改良し、しかも物性面で支障のない範囲でヘッ
ド付着や目づまりを解消し、かつ電磁変換特性の面でも
何ら不都合が生じないようにすることにあり、媒体の走
行方向の正逆に対し、入出力差が少く、耐久性の高い磁
気記録方法を提供することにある。II Object of the invention The object of the present invention is to improve the physical properties such as friction, durability running property, running stability, etc. in a magnetic recording method using a metal thin film type magnetic recording medium, and to the extent that the physical properties are not hindered. A magnetic recording method that eliminates head adhesion and clogging and that does not cause any inconvenience in terms of electromagnetic conversion characteristics. To provide.
このような目的は、下記の本発明によって達成される。Such an object is achieved by the present invention described below.
すなわち本発明は、可とう性基板上にCoを主成分とす
る強磁性金属薄膜層を設けた磁気記録媒体を、磁気へッ
ドを用いて記録再生を行う磁気記録方法において、 磁気ヘッドのギャップ長をaμmとしたとき、aが0.
1〜0.5であり、媒体表面が1mm2当り平均105/
a2個以上の突起を有し、しかも突起が30〜300Å
の高さを有し、 さらに、基体の長手方向と、基体主面の法線方向とでは
られる平面上で、方向をかえながら強磁性金属薄膜層の
保磁力を測定したとき、 (Hc max-Hc min)/Hc(0)≦0.9 {ここに、Hc maxは保磁力の最大値、Hc minは保磁力の
最小値、Hc(0)は基体の長手方向における保磁力を表わ
す。} なる関係を有し、強磁性金属薄膜層の充填率が0.7以
上であることを特徴とする磁気記録方法である。That is, the present invention provides a magnetic recording method for recording and reproducing a magnetic recording medium having a ferromagnetic metal thin film layer containing Co as a main component on a flexible substrate by using a magnetic head. When the length is a μm, a is 0.
1 to 0.5, and the medium surface has an average of 10 5 / mm 2
a Has two or more protrusions, and the protrusion is 30 to 300Å
Furthermore, when the coercive force of the ferromagnetic metal thin film layer is measured while changing the direction on a plane defined by the longitudinal direction of the base and the normal to the main surface of the base, (Hc max- Hc min) / Hc (0) ≦ 0.9 (where, Hc max represents the maximum value of coercive force, Hc min represents the minimum value of coercive force, and Hc (0) represents coercive force in the longitudinal direction of the substrate. } And the filling factor of the ferromagnetic metal thin film layer is 0.7 or more.
III 発明の具体的構成 以下、本発明の具体的構成について詳細に説明する。III Specific Structure of the Invention Hereinafter, the specific structure of the present invention will be described in detail.
本発明に用いる磁気記録媒体は、基体上に強磁性金属薄
膜層を有する。The magnetic recording medium used in the present invention has a ferromagnetic metal thin film layer on a substrate.
本発明における強磁性金属薄膜層は、Co,Co−N
i,Co−Cr,Co−Ti,Co−Mo,Co−V,
Co−W,Co−Re,Co−Ru,Co−Mn,Co
−Fe,Fe等の公知の種々の組成であってよく、その
形成法も、蒸着、イオンプレーティング等が使用でき
る。The ferromagnetic metal thin film layer in the present invention is made of Co, Co-N.
i, Co-Cr, Co-Ti, Co-Mo, Co-V,
Co-W, Co-Re, Co-Ru, Co-Mn, Co
Various known compositions such as —Fe and Fe may be used, and vapor deposition, ion plating and the like can be used as the forming method.
ただ、本発明の効果が最も大きいのは、Coを主成分と
し、これに必要に応じNi,Cr,Oのうちの1〜3種
が含有される組成の磁性層を有する場合である。However, the effect of the present invention is greatest when the magnetic layer has a composition containing Co as a main component and optionally 1 to 3 of Ni, Cr, and O contained therein.
すなわち、Co単独からなってもよく、CoとNiから
なってもよい。That is, it may be composed of Co alone or may be composed of Co and Ni.
Co+Niである場合、Co/Niの重量比は、1.5
以上であることが好ましい。When Co + Ni, the weight ratio of Co / Ni is 1.5.
The above is preferable.
さらに、CoまたはCo+Niに加え、Oが含まれてい
てもよい。Oが含まれたときには、電磁変換特性の経時
変化や走行耐久性の点で、より好ましい結果をうる。Further, O may be contained in addition to Co or Co + Ni. When O is contained, more preferable results can be obtained in terms of changes in electromagnetic conversion characteristics over time and running durability.
このような場合、O/Co(Niが含まれない場合)あ
るいはO/(Co+Ni)の原子比は、0.5以下、特
に0.1〜0.45であることが好ましい。In such a case, the atomic ratio of O / Co (when Ni is not included) or O / (Co + Ni) is preferably 0.5 or less, and particularly preferably 0.1 to 0.45.
一方、強磁性金属薄膜層中には、Co,Co+Ni,C
o+OあるいはCo+Ni+Oに加え、Crが含有され
ると、より一層好ましい結果を得る。On the other hand, in the ferromagnetic metal thin film layer, Co, Co + Ni, C
When Cr is contained in addition to o + O or Co + Ni + O, even more preferable results are obtained.
これは、電磁変換特性が向上し、出力およびS/N比が
向上し、さらに膜強度が向上するからである。This is because the electromagnetic conversion characteristics are improved, the output and the S / N ratio are improved, and the film strength is further improved.
このような場合、Cr/Co(Niが含まれない場合)
あるいはCr/(Co+Ni)の重量比は、0.1以
下、特に0.001〜0.1であることが好ましい。In such a case, Cr / Co (when Ni is not included)
Alternatively, the weight ratio of Cr / (Co + Ni) is preferably 0.1 or less, and particularly preferably 0.001 to 0.1.
そして、Cr/CoあるいはCr/(Co+Ni)の重
量比は、0.005〜0.05であると、より一層好ま
しい結果を得る。Then, a more preferable result is obtained when the weight ratio of Cr / Co or Cr / (Co + Ni) is 0.005 to 0.05.
なお、このような強磁性金属薄膜層中には、さらに他の
微量成分、特に遷移元素、例えば、Fe,Mn,V,Z
r,Nb,Ta,Ti,Zn,Mo,W,Cu等が含ま
れていてもよい。In such a ferromagnetic metal thin film layer, other trace components, especially transition elements such as Fe, Mn, V, Z
r, Nb, Ta, Ti, Zn, Mo, W, Cu, etc. may be contained.
このような強磁性金属薄膜層は、通常、0.05〜0.
5μm、より好ましくは0.07〜0.3μmの厚さに
形成される。Such a ferromagnetic metal thin film layer usually has a thickness of 0.05-0.
The thickness is 5 μm, more preferably 0.07 to 0.3 μm.
このような強磁性金属薄膜層は、通常、基体主面の法線
に対して傾斜した柱状結晶粒の集合体からなることが好
ましい。Generally, such a ferromagnetic metal thin film layer is preferably composed of an aggregate of columnar crystal grains inclined with respect to the normal to the main surface of the substrate.
このような場合、柱状結晶粒は、基体の主面の法線に対
して、30°以上の角度で傾斜していることが好まし
い。In such a case, the columnar crystal grains are preferably inclined at an angle of 30 ° or more with respect to the normal line of the main surface of the base.
また、各柱状結晶粒は、強磁性金属薄膜側の厚さ方向全
域に亘る長さをもち、その短径は50〜500Å程度と
される。Each columnar crystal grain has a length over the entire thickness direction on the ferromagnetic metal thin film side, and its minor axis is about 50 to 500Å.
そして、柱状結晶粒の基体側の部分における基体主面の
法線に対する傾斜角は、柱状結晶粒の基体と反対側の部
分における基体主面の法線に対する傾斜角よりも大きい
ことが好ましい。The inclination angle of the columnar crystal grains with respect to the normal line of the main body surface of the substrate side is preferably larger than the inclination angle of the columnar crystal grain with respect to the normal line of the main surface of the substrate body on the opposite side.
そして、CoおよびNi,Cr等は、この結晶粒内に存
在し、Oは各柱状結晶粒の表面に主として存在するもの
である。Co, Ni, Cr, etc. are present in the crystal grains, and O is mainly present on the surface of each columnar crystal grain.
このような前提の下で、基体の長手方向と、基体主面の
法線方向とではられる平面上で、方向をかえながら保磁
力を測定したとき、Hc maxとHc minとHc(0)とは、 (Hc max-Hc min)/Hc(0)≦0.9でなければならな
い。Under such a premise, when the coercive force is measured while changing the direction on a plane defined by the longitudinal direction of the base body and the normal direction of the main surface of the base body, Hc max, Hc min, and Hc (0) Must be (Hc max-Hc min) / Hc (0) ≦ 0.9.
この値が0.9をこえると、媒体の走行方向をかえたと
き、2dB以上の大きな入出力差を生じてしまい、実用に
耐えない。If this value exceeds 0.9, a large input / output difference of 2 dB or more will occur when the traveling direction of the medium is changed, which is not practical.
そして、この値が0.6以下となると、走行の正逆に対
する入出力差がきわめて小さくなる。When this value is 0.6 or less, the input / output difference with respect to the forward / reverse traveling is extremely small.
また、この値が0.6をこえると、耐食性が臨界的に低
下して、実用に耐えない。On the other hand, if this value exceeds 0.6, the corrosion resistance is critically reduced, and it cannot be practically used.
そして、この値が0.4以下となると、走行の正逆に対
する入出力差がきわめて小さくなり、また耐食性がきわ
めて高いものとなる。When this value is 0.4 or less, the input / output difference with respect to the forward and reverse running is extremely small, and the corrosion resistance is extremely high.
さらに、強磁性金属薄膜層の充填率は、0.7以上でな
ければならない。Furthermore, the filling factor of the ferromagnetic metal thin film layer must be 0.7 or more.
この場合、充填率は、強磁性金属薄膜層の平均をρ、強
磁性金属薄膜層構成成分の真密度をρBとしたとき、ρ
/ρBで表される。In this case, the filling factor is ρ, where ρ is the average of the ferromagnetic metal thin film layers and ρ B is the true density of the components of the ferromagnetic metal thin film layers.
/ Ρ B
そして、平均密度ρは、強磁性金属薄膜層の全体の実測
の平均密度である。The average density ρ is the actually measured average density of the entire ferromagnetic metal thin film layer.
また、真密度ρBは、強磁性金属薄膜層構成成分と対応
する組成の合金の均質なインゴットのバルクの密度であ
る。Further, the true density ρ B is the bulk density of a homogeneous ingot of an alloy having a composition corresponding to the components of the ferromagnetic metal thin film layer.
そして、ρ/ρBを測定するには、まず、強磁性金属薄
膜層の重量と体積とを実測し、ρを測定する。Then, in order to measure ρ / ρ B , first, the weight and volume of the ferromagnetic metal thin film layer are actually measured to measure ρ.
この場合、重量は、一定面積のサンプルと、用いたベー
スとを乾燥後、秤量し、その差から重量を求める。In this case, the weight is obtained by drying a sample having a constant area and the base used, weighing the sample, and calculating the weight from the difference.
また、体積算出にあたっての強磁性金属薄膜層の厚さ
は、段差計、膜厚計あるいは電顕写真などから求めれば
よい。Further, the thickness of the ferromagnetic metal thin film layer in calculating the volume may be obtained from a step gauge, a film thickness meter, an electron micrograph or the like.
このρを、バルク合金のインゴットから直接測定される
ρBで除せば、ρ/ρBが算出される。Dividing this ρ by ρ B directly measured from the bulk alloy ingot gives ρ / ρ B.
あるいは、強磁性金属薄膜層に対し、蛍光X線分析、オ
ージェ分光分析、ESCA等を行って、成分元素のカウント
数を測定する。Alternatively, the ferromagnetic metal thin film layer is subjected to fluorescent X-ray analysis, Auger spectroscopic analysis, ESCA, etc. to measure the number of counts of the component elements.
この場合、特に斜め蒸着法による強磁性金属薄膜層は、
厚さ方向に密度勾配をもつもので、蛍光X線等のカウン
ト数は、イオンミリング等のドライプロセスのエッチン
グ手段によって、エッチングを行いながら行い、カウン
ト数を平均する。そして、このカウント数(平均カウン
ト数)を、参照インゴットのカウント数で除しても、ρ
/ρBが算出される。In this case, the ferromagnetic metal thin film layer formed by the oblique deposition method in particular is
It has a density gradient in the thickness direction, and the count number of fluorescent X-rays or the like is performed while etching is performed by an etching means of a dry process such as ion milling, and the count number is averaged. Then, even if this count number (average count number) is divided by the count number of the reference ingot, ρ
/ Ρ B is calculated.
このようにして算出されるρ/ρBが0.7以上となる
と、走行耐久性が低下し、スチル耐久時間が短くなる。When ρ / ρ B calculated in this way is 0.7 or more, running durability is reduced and the still durability time is shortened.
この場合、ρ/ρBが0.75以上、特に、0.8以上
となると、より好ましい結果をうる。In this case, if ρ / ρ B is 0.75 or more, particularly 0.8 or more, more preferable results can be obtained.
なお、このようなρ/ρBは強磁性金属薄膜層の厚さ方
向に亘って勾配をもっていることが好ましい。It is preferable that such ρ / ρ B has a gradient in the thickness direction of the ferromagnetic metal thin film layer.
すなわち、蒸着条件を変えることによって、強磁性金属
薄膜層の厚さ方向の密度の分布がかわり、これによって
も走行耐久性に差が生じるものである。That is, by changing the deposition conditions, the distribution of the density of the ferromagnetic metal thin film layer in the thickness direction changes, which also causes a difference in running durability.
この場合、強磁性金属薄膜層の基体側部分のρ/ρBな
いし平均密度は、基体と反対側部分のρ/ρBないし平
均密度よりも大きいものでることが好ましい。In this case, it is preferable that ρ / ρ B or the average density of the portion of the ferromagnetic metal thin film layer on the substrate side is larger than ρ / ρ B or the average density of the portion on the side opposite to the substrate.
この場合、強磁性金属薄膜層を厚さ方向に3等分したと
き、基体と反対側から1/3の部分のρないしρ/ρB
は、基体側から1/3の部分のρないしρ/ρBの1.
5倍以上、好ましくは1.5〜3倍、より好ましくは
1.5〜2.5倍であることが好ましい。In this case, when the ferromagnetic metal thin film layer is divided into three equal parts in the thickness direction, ρ or ρ / ρ B of a portion of 1/3 from the side opposite to the base body.
Is 1. of ρ or ρ / ρ B of a portion of 1/3 from the substrate side.
It is preferably 5 times or more, preferably 1.5 to 3 times, more preferably 1.5 to 2.5 times.
このとき、走行耐久性はより一層向上する。At this time, the running durability is further improved.
なお、3倍より大きくなると、ヘッドタッチが悪くな
り、出力変動を生じる。If it is larger than 3 times, the head touch becomes worse and the output varies.
なお、この場合の各部分の平均密度は、例えば、ESC
Aなどの構成成分の特性X線強度などと、Ar等による
エッチング時間とから求めればよい。The average density of each part in this case is, for example, ESC.
It may be obtained from the characteristic X-ray intensity of the constituent components such as A and the etching time with Ar or the like.
このような強磁性金属薄膜層の表面には、必要に応じ
て、種々のトップコートを設層してもよい。If desired, various top coats may be formed on the surface of such a ferromagnetic metal thin film layer.
また、強磁性金属薄膜層を形成する基体は、長尺でかつ
非磁性のものでありさえすれば特に制限はなく、特に可
とう性の基体、特にポリエステル、ポリイミド等の樹脂
製のものであることが好ましい。The substrate for forming the ferromagnetic metal thin film layer is not particularly limited as long as it is a long and non-magnetic substrate, and is particularly flexible substrate, particularly made of resin such as polyester or polyimide. It is preferable.
また、その厚さは、種々のものであってよいが、特に5
〜20μmであことが好ましい。The thickness may be various, but especially 5
It is preferably ˜20 μm.
この場合、基板の強磁性金属薄膜層形成面の裏面には、
公知の種々のバックコート層が形成されていてもよい。In this case, on the back surface of the ferromagnetic metal thin film layer forming surface of the substrate,
Various known back coat layers may be formed.
このように構成される本発明に用いる磁気記録媒体の表
面には、微細な突起が所定の密度で設けられる。On the surface of the magnetic recording medium used in the present invention having such a structure, fine protrusions are provided with a predetermined density.
微細な突起は、30〜300Å、より好ましくは50〜
250Åの高さを有するものである。The fine protrusions are 30 to 300Å, more preferably 50 to
It has a height of 250Å.
すなわち、本発明の突起は、光学顕微鏡で観察でき、か
つ触針型表面粗さ計で測定できるものではなく、走査型
ないし透過型の電子顕微鏡にて観察できる程度のもので
ある。That is, the projections of the present invention can be observed with an optical microscope and can be observed with a scanning or transmission electron microscope, not with a stylus type surface roughness meter.
突起高さが300Åをこえ、光学顕微鏡にて観察できる
ものとなると、電磁変換特性の劣化と、走行安定性の低
下をもたらす。If the projection height exceeds 300Å and can be observed with an optical microscope, electromagnetic conversion characteristics deteriorate and running stability deteriorates.
また、50Å未満となると、物性の向上の実効がない。Further, if it is less than 50Å, the improvement of physical properties is not effective.
そして、その密度は1mm2あたり平均105/a2個、
より好ましくは2×106/a2〜109/a2個であ
る。And the density is an average of 10 5 / a 2 per 1 mm 2 ,
More preferably, it is 2 × 10 6 / a 2 to 10 9 / a 2 .
この場合、aはμm単位にて、用いる磁気ヘッドのギャ
ップ長を表わす。In this case, a represents the gap length of the magnetic head used in μm unit.
そして、aは、0.1〜0.5μm、特に0.1〜0.
4μmとされる。And, a is 0.1 to 0.5 μm, particularly 0.1 to 0.
4 μm.
なお、突起密度が105/a2個/mm2、より好ましく
は2×106/a2個/mm2未満となると、ノイズが増
大し、スチル特性が低下しヘッド目づまりが多発する等
物性の低下をきたし、実用に耐えない。When the protrusion density is 10 5 / a 2 pieces / mm 2 , more preferably less than 2 × 10 6 / a 2 pieces / mm 2 , noise increases, still characteristics deteriorate, and head clogging occurs frequently. It causes a decrease in power consumption and cannot be put to practical use.
また、109/a2個/mm2をこえると、物性上の効果
が少なくなってしまう。On the other hand, if it exceeds 10 9 / a 2 / mm 2 , the effect on the physical properties will be reduced.
このような突起を設けるには、通常、基板上に微粒子を
配設すればよい。In order to provide such protrusions, it is usually sufficient to dispose fine particles on the substrate.
微粒子径は、30〜300Å、特に50〜250Åとす
ればよく、これにより微粒子径と対応した微細突起が形
成される。The particle size may be 30 to 300 Å, especially 50 to 250 Å, whereby fine protrusions corresponding to the particle size are formed.
用いる微粒子としては、通常コロイド粒子として知られ
ているものであって、例えばSiO2(コロイダルシリ
カ)、Al2O3(アルミナゾル)、MgO,Ti
O2,ZnO,Fe2O3,ジルコニア,CdO,Ni
O,CaWO4,CaCO3,BaCO3,CoC
O3,BaTiO3,Ti(チタンブラック),Au,
Ag,Cu,Ni,Fe、各種ヒドロゾルや、樹脂粒子
等が使用可能である。この場合、特に無機物質を用いる
のが好ましい。The fine particles used are those generally known as colloidal particles, for example, SiO 2 (colloidal silica), Al 2 O 3 (alumina sol), MgO, Ti.
O 2 , ZnO, Fe 2 O 3 , zirconia, CdO, Ni
O, CaWO 4 , CaCO 3 , BaCO 3 , CoC
O 3 , BaTiO 3 , Ti (titanium black), Au,
Ag, Cu, Ni, Fe, various hydrosols, resin particles and the like can be used. In this case, it is particularly preferable to use an inorganic substance.
このような微粒子は、各種溶媒を用いて塗布液とし、こ
れを基板上に塗布、乾燥してもよく、あるいは塗布液中
に各種水性エマルジョン等の樹脂分を添加したものを塗
布、乾燥してもよい。Such fine particles may be used as a coating solution using various solvents, which may be coated on a substrate and dried, or a coating solution to which a resin component such as various aqueous emulsions is added may be coated and dried. Good.
なお、場合によっては、これら塗布液を基板上に配設す
るのではなく、微粒子をトップコート層中に添加して突
起を設けることもできる。In some cases, the projections may be provided by adding fine particles to the top coat layer instead of disposing the coating liquid on the substrate.
また、樹脂分を用いる場合、これら微粒子にもとづく微
細突起に重畳してゆるやかな突起を設けることもできる
が、通常はこのようにする必要はない。Further, when a resin component is used, it is possible to provide a gentle protrusion by superposing on the fine protrusion based on these fine particles, but it is not usually necessary to do so.
なお、基板と強磁性金属薄膜層との間には、必要に応
じ、公知の各種下地層を介在させることもできる。If necessary, various known underlayers may be interposed between the substrate and the ferromagnetic metal thin film layer.
また、もし必要であるならば、強磁性金属薄膜層を複数
に分割して、その間に非強磁性金属薄膜層を介在させて
もよい。If necessary, the ferromagnetic metal thin film layer may be divided into a plurality of layers, and the non-ferromagnetic metal thin film layer may be interposed therebetween.
本発明において、磁性層の形成は電解蒸着、イオンプレ
ーティング,メッキ等を用いることもできるが、いわゆ
る斜め蒸着法によって形成されることが好ましい。In the present invention, the magnetic layer may be formed by electrolytic vapor deposition, ion plating, plating or the like, but it is preferably formed by a so-called oblique vapor deposition method.
この場合、基体法線に対する、蒸着物質の入射角の最小
値は、20°以上とすることが好ましい。In this case, the minimum value of the incident angle of the vapor deposition substance with respect to the normal to the substrate is preferably 20 ° or more.
入射角が20°未満となると、電磁変換特性が低下す
る。When the incident angle is less than 20 °, the electromagnetic conversion characteristics deteriorate.
そして、通常は、蒸着に際しては、蒸着用の円筒状のキ
ャンを用い、これに蒸着マスクを介在させて、基体主面
の法線に対し、90〜20°の入射角となるように、成
膜に際し入射角を漸次減少させることが好ましい。Usually, during vapor deposition, a cylindrical can for vapor deposition is used, and a vapor deposition mask is interposed therebetween so that the incident angle is 90 to 20 ° with respect to the normal to the main surface of the substrate. It is preferable to gradually reduce the incident angle on the film.
このような場合、上記のような保磁力の角度依存性をも
たせるには、例えば、基体の送り方向と直角な方向、す
なわち基体の巾方向に、ハースないしルツボを複数個配
設して、その蒸発レートをかえることによる等の方法が
ある。In such a case, in order to have the above-mentioned angular dependence of the coercive force, for example, a plurality of hearths or crucibles are arranged in a direction perpendicular to the feeding direction of the base body, that is, in the width direction of the base body. There are methods such as changing the evaporation rate.
また、ρ/ρBや、その分布を上記のような値とするに
は、上記のように基体巾方向の蒸発レートをかえ、かつ
蒸着の際の最小入射角を若干低くする等の方法がある。Further, in order to make ρ / ρ B and its distribution have the above values, there are methods such as changing the evaporation rate in the width direction of the substrate and slightly lowering the minimum incident angle during vapor deposition as described above. is there.
このような条件値は、実験から容易に求めることができ
る。Such condition values can be easily obtained from experiments.
なお、蒸着雰囲気は、通常と同様、アルゴン、ヘリウ
ム、真空等の不活性雰囲気とし、 10-5×100 Pa 程度の圧力とし、また、蒸着距離、基体搬送方向、キャ
ンやマスクの構造、配置等は公知の条件と同様にすれば
よい。Incidentally, the deposition atmosphere, as usual by argon, helium, an inert atmosphere such as vacuum, and 10 -5 × 10 0 Pa pressure of about, also deposition distance, the substrate transport direction, the can and the structure of the mask, arranged Etc. may be the same as known conditions.
ただ、蒸着雰囲気中には酸素を含有させて、電磁変換特
性を向上し、耐食性等を向上させることが好ましい。However, it is preferable that oxygen is contained in the vapor deposition atmosphere to improve electromagnetic conversion characteristics and corrosion resistance.
また、蒸着中の任意の磁気には、種々の方法により、酸
素を強磁性金属薄膜層中に導入することができる。Oxygen can be introduced into the ferromagnetic metal thin film layer by various methods for arbitrary magnetism during vapor deposition.
そして、強磁性金属薄膜層形成後にも、各種酸化処理を
行うことができる。Then, various oxidation treatments can be performed even after the ferromagnetic metal thin film layer is formed.
さらに、強磁性金属薄膜層形成後に熱処理を行うと、よ
り好ましい結果を得る。Further, if a heat treatment is performed after forming the ferromagnetic metal thin film layer, more preferable results are obtained.
他方、用いる磁気ヘッドは、種々のものが使用できる。On the other hand, various magnetic heads can be used.
この場合、磁気ヘッドとしては、少なくともギャップ部
端面を金属磁性体で構成したものであることが好適であ
る。In this case, as the magnetic head, it is preferable that at least the end surface of the gap portion is made of a magnetic metal material.
この場合、コア全体を金属強磁性体から形成することも
でき、必要に応じ、ギャップ部端面を含むコアの一部を
金属強磁性体から形成することもできる。In this case, the entire core can be formed of a metal ferromagnetic material, and if necessary, a part of the core including the end face of the gap can be formed of a metal ferromagnetic material.
第1図には、例えばフェライト等の強磁性体からなるコ
ア半体21,22のギャップ部端面に1〜5μm程度の
厚さの金属強磁性体31,32をスパッタリング等によ
り被着し、ガラス質等のギャップ4を介してコア半体2
1,22をつきあわせて磁気ヘッド1を構成した例が示
される。In FIG. 1, for example, metallic half ferromagnetic bodies 31 and 32 having a thickness of about 1 to 5 μm are deposited on the end surfaces of the gaps of the core halves 21 and 22 made of a ferromagnetic material such as ferrite by sputtering or the like, and the glass Core half 2 through gap 4 of quality etc.
An example is shown in which the magnetic head 1 is configured by associating 1 and 22.
これによりきわめて良好な電磁変換特性がえられ、しか
も走行が良好となり、ヘッド付着やヘッド目づまりも良
好となる。As a result, extremely good electromagnetic conversion characteristics can be obtained, the running is good, and head adhesion and head clogging are good.
そして、その形状、構造等は公知のものであってもよ
い。The shape, structure, etc. may be known.
ただ、ギャップ長aは、前記のとおり、通常、0.1〜
0.5μm、特に0.1〜0.4μm、また、トラック
巾は、通常、10〜50μm、特に10〜20μmとす
る。However, as described above, the gap length a is usually 0.1 to
0.5 μm, particularly 0.1 to 0.4 μm, and the track width is usually 10 to 50 μm, especially 10 to 20 μm.
用いる強磁性体としては、種々のものが可能であり、非
晶質磁性金属、センダスト、ハードパーマロイ、パーマ
ロイ等の薄膜、薄板等はいずれも使用可能である。Various ferromagnetic materials can be used, and any of amorphous magnetic metals, sendust, hard permalloy, thin films such as permalloy, and thin plates can be used.
ただ、これらのうちで、ヘッド目づまりないし付着が特
に少なく、電磁変換特性が良好なのは、Coを主成分と
する非晶質磁性合金である。However, among these, the amorphous magnetic alloy containing Co as a main component has particularly small head clogging or adhesion and good electromagnetic conversion characteristics.
このような非晶質磁性合金としては、Co70〜95at
%で、ガラス化元素として、Zr,Nb,Ta,Hf,
希土類元素,Si,B,P,C,Al等、特にZrおよ
び/またはNbを5〜20at%含有するものが好適であ
る。As such an amorphous magnetic alloy, Co70 to 95 at
%, Zr, Nb, Ta, Hf,
Rare earth elements, Si, B, P, C, Al, etc., especially those containing 5 to 20 at% of Zr and / or Nb are preferable.
あるいは、Co65〜85at%で、ガラス化元素として
Siおよび/またはBを15〜35at%含有するものも
好適である。この場合、さらに10at%以下のFe、2
5at%以下のNi、総計20at%以下のCr,Ti,R
u,W,Mo,Ti,Mn等の1種以上が含有されてい
てもよい。Alternatively, Co of 65 to 85 at% and Si and / or B of 15 to 35 at% as a vitrifying element are also preferable. In this case, Fe of 10 at% or less, 2
5 at% or less Ni, total 20 at% or less Cr, Ti, R
One or more of u, W, Mo, Ti, Mn and the like may be contained.
これら非晶質磁性合金は、スパッタリングや高速急冷法
等を用いて、コア半体ないしギャップ部等として形成さ
れる。These amorphous magnetic alloys are formed as core halves or gaps by using sputtering or rapid quenching.
このような磁気ヘッドを用いて、前記した媒体に対して
記録再生を行うには、いわゆるVHS方式、ベータ方
式、8mmビデオ方式、U規格方式等公知のビデオ録画シ
ステムに従えばよい。Recording and reproduction on the above-mentioned medium using such a magnetic head may be performed according to a known video recording system such as a so-called VHS system, beta system, 8 mm video system, U standard system.
IV発明の具体的作用効果 本発明の磁気記録方法は、ビデオ用、オーディオ用、計
算機用等の媒体に用いてして有用である。IV Specific Actions and Effects of the Invention The magnetic recording method of the present invention is useful when used as a medium for video, audio, computer and the like.
本発明によれば、走行耐久性がきわめて高くなり、スチ
ル特性がきわめて良好である。According to the present invention, running durability is extremely high and still characteristics are very good.
また、媒体の走行方向の正逆による入出力差がきわめて
小さくなる。Further, the input / output difference due to the forward and reverse of the traveling direction of the medium becomes extremely small.
そして、耐食性がきわめて良好となり、特性劣化がきわ
めて少ない。Then, the corrosion resistance becomes extremely good and the characteristic deterioration is extremely small.
また、走行摩擦がきわめて小さくなり、安定化するので
走行耐久性がさらに向上し、多数回走行後も走行摩擦の
増大がなく、くりかえし録画、再生回数が格段と向上
し、スチル特性が格段と向上する。In addition, running friction is extremely small and stable, so running durability is further improved, running friction does not increase even after running many times, repetitive recording and playback times are dramatically improved, and still characteristics are dramatically improved. To do.
そして、走行安定性も高く、高温多湿から低温低湿ま
で、巾広い条件下できわめて高い安定性を示す。It also has high running stability and exhibits extremely high stability under a wide range of conditions from high temperature and high humidity to low temperature and low humidity.
さらに、スペーシングロスにもとづく再生出力もきわめ
て小さい。Furthermore, the reproduction output based on the spacing loss is extremely small.
また、ノイズもきわめて少ない。Also, there is very little noise.
そして、ヘッドの目づまりやヘッドの付着もきわめて少
ない。Also, there is very little clogging of the head and adhesion of the head.
このような効果は、金属強磁性体製ヘッドを用いると
き、より高いものとなる。Such an effect is further enhanced when a metal ferromagnetic head is used.
また、このような効果は、最低記録波長1μm未満の高
密度記録において、より一層高いものとなる。Further, such an effect is further enhanced in high density recording with a minimum recording wavelength of less than 1 μm.
V発明の具体的実施例 以下に本発明の具体的実施例について詳細に説明する。V Specific Examples of the Invention Hereinafter, specific examples of the present invention will be described in detail.
実施例1 実質的に微粒子を含まない平滑なポリエステルフィルム
(厚さ12μm)上にコロイダルシリカを塗布し、表1
に示す高さと密度を持つ、微小突起を有する基板を得
た。Example 1 Colloidal silica was coated on a smooth polyester film (thickness 12 μm) substantially free of fine particles, and Table 1
A substrate having micro-protrusions having the height and density shown in 1 was obtained.
次に、Co,Co/Niの重量比が4/1である場合、
およびCo/Ni/Crの重量比が65/30/5であ
る合金を用い、所定の突起を有するポリエステルフィル
ム基体(幅100mm)上に、斜め蒸着法により、0.1
5μm厚の磁性薄膜層を形成した。Next, when the weight ratio of Co and Co / Ni is 4/1,
And an alloy having a Co / Ni / Cr weight ratio of 65/30/5, on a polyester film substrate (width 100 mm) having predetermined protrusions by an oblique vapor deposition method.
A magnetic thin film layer having a thickness of 5 μm was formed.
基体はキャンにて連続搬送し、蒸着物質の入射角を90
から逓減した。また、蒸発源とキャンの距離は200mm
とした。The substrate is continuously transported by a can, and the incident angle of the vapor deposition substance is set to 90.
Gradually decreased from. The distance between the evaporation source and the can is 200 mm.
And
そして、蒸着は PAr=5×10-3Pa、 およびこれに、 の酸素を導入した雰囲気で行った。Then, the vapor deposition is P Ar = 5 × 10 −3 Pa, and Was carried out in an atmosphere in which oxygen was introduced.
この場合、ハースの溶湯面積を25cm2とし、基体中央
部と、これから基体巾方向に20mmはなれた2点に1基
づつ、計3個のハースを配置した。In this case, the molten metal area of the hearth was 25 cm 2, and a total of 3 hearths were arranged, one at the center of the substrate and one at 2 points 20 mm away from the center of the substrate.
これら3個のハースからの蒸発レートのうち、基体端部
方向両ハースの蒸発レートは同一とし、端部方向ハース
と中心ハースの蒸発レートとの比を下記表1のようにか
えて、蒸着を行った。Of the evaporation rates from these three hearths, the evaporation rates of both hearths in the end direction of the substrate are the same, and the ratio of the evaporation rate of the hearths in the end direction and the evaporation rate of the central hearth is changed as shown in Table 1 below. went.
また、蒸着の際の最小入射角は、表1に示されるように
変更した。The minimum incident angle during vapor deposition was changed as shown in Table 1.
次いで、各サンプルに対し、空気中で、85℃、1時間
の熱処理を行なった。Then, each sample was heat-treated in air at 85 ° C. for 1 hour.
各サンプルとも、磁性層は、磁性層の厚さ方向全域に亘
る長さをもち、基体法線に対し傾斜した柱状結晶粒の集
合体からなり、柱状結晶粒の基体側部分の基体法線に対
する傾斜角は、表層側部分のそれより大きいものであっ
た。In each sample, the magnetic layer has a length over the entire thickness direction of the magnetic layer, and is composed of an aggregate of columnar crystal grains inclined with respect to the normal line of the substrate. The inclination angle was larger than that of the surface layer side portion.
また、各サンプルの酸素量は、雰囲気中にO2を導入し
たもので、O/(CoまたはCo+Ni)=18〜20
%、O2を導入しないもので、約1%であった。The oxygen content of each sample was obtained by introducing O 2 into the atmosphere, and O / (Co or Co + Ni) = 18 to 20
%, Without introducing O 2 , it was about 1%.
また、各サンプルと、用いた基体とを乾燥後、重量測定
を行い、ρを測定し、他方、Co/Ni、Co/Ni/
Crのバルクの密度ρBを測定し、ρ/ρBを算出した
ところ、下記表1に示される結果をえた。After drying each sample and the substrate used, the weight is measured and ρ is measured, while Co / Ni and Co / Ni /
When the bulk density ρ B of Cr was measured and ρ / ρ B was calculated, the results shown in Table 1 below were obtained.
なお、表面から膜厚1/3の部分のρ/ρBを、基体か
ら膜厚1/3の部分のρ/ρBで除した値xを、Arエ
ッチングを行いながらESCAにより算出したところ、
表1に示される結果を得た。A value x obtained by dividing ρ / ρ B in a portion having a film thickness of 1/3 from the surface by ρ / ρ B in a portion having a film thickness of 1/3 from the substrate was calculated by ESCA while performing Ar etching.
The results shown in Table 1 were obtained.
次に、各サンプルを1/2インチ巾に切断し、中央部か
ら得られたテープを作製した。Next, each sample was cut into a width of ½ inch, and a tape obtained from the central portion was produced.
なお、用いた磁気ヘッドは、第1図に示されるものであ
り、ギャップ長0.25μm、トラック長20μmのも
のである。この場合、コア半体21,22はフェライト
製、ギャップ端面は、スパッタリングにより形成した3
μm厚のCo0.8 Ni0.1 Zr0.1(原子
比)であり、ギャップ材はガラスとした。The magnetic head used is that shown in FIG. 1 and has a gap length of 0.25 μm and a track length of 20 μm. In this case, the core halves 21 and 22 are made of ferrite, and the gap end faces are formed by sputtering.
It was Co0.8 Ni0.1 Zr0.1 (atomic ratio) with a thickness of μm, and the gap material was glass.
なお、105/a2は1.6×106である。In addition, 10 5 / a 2 is 1.6 × 10 6 .
次いで、各サンプルにつき、下記の測定を行った。Then, the following measurements were performed on each sample.
(1)正逆走行方向での入出力差 市販のVHS型ビデオデッキに搭載して、両走行方向の
4.5MHzにおける入出力を測定し、その最大値の差を
もとめた。(1) Input / output difference in forward / reverse running direction It was mounted on a commercially available VHS type VCR and the input / output at 4.5 MHz in both running directions was measured to find the difference between the maximum values.
(2)耐食性 また、各サンプルを60℃、相対湿度90%にて7日間
放置し、1cm2あたりの−Δφm/φm(%)を測定し
た。(2) Corrosion resistance Each sample was allowed to stand at 60 ° C. and 90% relative humidity for 7 days, and −Δφm / φm (%) per cm 2 was measured.
(3)スチル耐久性 市販のVTR装置にスチルモードにて、20℃、相対湿
度60%で出力が1/2に減衰するに至る時間(分)を
測定した。(3) Still Durability In a still mode of a commercially available VTR device, the time (minutes) until the output attenuated to 1/2 at 20 ° C. and 60% relative humidity was measured.
(4)走行耐久性 各サンプルに対し、市販のVTR装置を用いて50パス
実験を行い、4MHzの信号の減少量(dB)を測定した。(4) Running durability Each sample was subjected to a 50-pass experiment using a commercially available VTR device, and the reduction amount (dB) of the signal at 4 MHz was measured.
これらの結果を表1に示す。The results are shown in Table 1.
表1に示される結果から、本発明における保磁力分布お
よび充填率のもたらす効果があきらかである。 From the results shown in Table 1, the effects brought about by the coercive force distribution and the filling rate in the present invention are clear.
実施例2 実施例1のCo/Ni合金を酸素雰囲気下で蒸着したサ
ンプルにおいて、基板上にコロイダルシリカを塗布し、
下記表2に示される微小突起を設けた。Example 2 In a sample obtained by vapor deposition of the Co / Ni alloy of Example 1 in an oxygen atmosphere, colloidal silica was applied onto a substrate,
The minute protrusions shown in Table 2 below were provided.
本発明のサンプルでは、光学顕微鏡による観察および触
針型表面粗さ計による測定で、コロイダルシリカ塗布の
効果は検出されなかったが、走査型電子顕微鏡による高
倍率の観察では、磁性膜に突起がみられ、その大小は、
塗布したコロイダルシリカの大小に対応していた。In the sample of the present invention, the effect of colloidal silica coating was not detected by observation with an optical microscope and measurement with a stylus type surface roughness meter, but when observed at a high magnification by a scanning electron microscope, protrusions were formed on the magnetic film. Seen, the size is
It corresponded to the size of the applied colloidal silica.
磁性層表面の突起の高さおよび密度と特性の関係を表2
に示す。Table 2 shows the relationship between the height and density of the protrusions on the surface of the magnetic layer and the characteristics.
Shown in.
なお、特性、最短記録波長0.7μmの信号を用いて実
験を行った。Experiments were conducted using signals having characteristics and the shortest recording wavelength of 0.7 μm.
また、用いた磁気ヘッドは、第1図に示されるものであ
り、ギャップ長0.25μm、トラック長20μmのも
のである。この場合、コア半体21,22はフェライト
製、ギャップ端面は、スパッタリングにより形成した3
μm厚のCo0.8、Ni0.1、Zr0.1(at%)
であり、ギャップ材はガラスとした。The magnetic head used is that shown in FIG. 1 and has a gap length of 0.25 μm and a track length of 20 μm. In this case, the core halves 21 and 22 are made of ferrite, and the gap end faces are formed by sputtering.
μm thick Co0.8, Ni0.1, Zr0.1 (at%)
The gap material was glass.
なお、105/a2は1.6×106(mm2)-1である。Note that 10 5 / a 2 is 1.6 × 10 6 (mm 2 ) -1 .
また、比較用の磁気ヘッドとして、フェライトヘッドを
用いた。A ferrite head was used as a magnetic head for comparison.
なお、特性の測定方法は以下のとおりである。The method of measuring the characteristics is as follows.
1.突起観察 SEM(走査型電子顕微鏡)およびTEM(透過型電子
顕微鏡)を使用 2.スチル特性 5MHzで記録し、再生出力のスチル特性を測定する。1
0分以上をOKレベルとする。1. Observation of protrusions SEM (scanning electron microscope) and TEM (transmission electron microscope) are used. Still characteristics Record at 5MHz and measure the still characteristics of playback output. 1
Set the OK level to 0 minutes or more.
3.出力 中心周波数5MHzで記録、再生した場合のS/N比(相
対値)を示す。VHSのVTRを改造し、5MHzまで測
定できるようにする。3. Output Indicates the S / N ratio (relative value) when recording / reproducing at a center frequency of 5 MHz. Modify VHS VTR to measure up to 5MHz.
4.ノイズ 再生出力の測定において、4MHzでのノイズ(dB)を測
定する。4. Noise Measure the noise (dB) at 4MHz in the playback output measurement.
5.耐久走行テスト後の面状態 50パス走行後のテープ面の状態を光学顕微鏡で観察す
る。5. Surface condition after endurance running test The condition of the tape surface after running for 50 passes is observed with an optical microscope.
○:変化なし △:磁性面損傷 ×:磁性層欠落 なお、これら各実施例の磁性層表面はオージェ分光分析
の結果、100〜200Åの酸化物層で覆われているこ
とが判明した。○: No change △: Damage to magnetic surface ×: Missing magnetic layer As a result of Auger spectroscopic analysis, it was found that the surface of the magnetic layer in each of these Examples was covered with an oxide layer of 100 to 200 Å.
なお、サンプルNo.33は酸素を含まない雰囲気での蒸
着による酸素を含まない磁性層のものである。Sample No. 33 is of a magnetic layer containing no oxygen by vapor deposition in an atmosphere containing no oxygen.
なお、上記各実施例では、無機微粒子としてコロイダル
シリカを用いたが、他の物質例えばアルミナゾル,チタ
ンブラック,ジルコニアあるいは各種ヒドロゾル等を用
いても、同等の結果を得た。In each of the above examples, colloidal silica was used as the inorganic fine particles, but the same result was obtained even if other substances such as alumina sol, titanium black, zirconia or various hydrosols were used.
また、Co−Fe−Ru−Cr−Si−B系非晶質を用
いて作製したヘッドを用いた場合も、同様の結果が得ら
れた。Similar results were also obtained when a head made of Co-Fe-Ru-Cr-Si-B based amorphous was used.
なお、センダストを用いて作製したヘッドを用いた場合
は、上記の場合に比べて効果が少なかった。It should be noted that when the head manufactured using Sendust was used, the effect was less than that in the above case.
本発明によるテープとヘッドの組合わせは、他の組合わ
せに比較して、物性面で優れており、各雰囲気における
摩擦係数も安定して低く、耐久走行性の面でもはるかに
優れていた。The combination of the tape and the head according to the present invention was superior to the other combinations in terms of physical properties, the friction coefficient in each atmosphere was stable and low, and the durability and running characteristics were far superior.
第1図は、本発明に用いる磁気ヘッドの1例を示す正面
図である。 1……磁気ヘッド, 21,22……コア半体, 31,32……金属強磁性体, 4……ギャップFIG. 1 is a front view showing an example of a magnetic head used in the present invention. 1 ... Magnetic head, 21, 22 ... Core half body, 31, 32 ... Metal ferromagnetic body, 4 ... Gap
Claims (16)
性金属薄膜層を設けた磁気記録媒体を、磁気ヘッドを用
いて記録再生を行う磁気記録方法において、 磁気ヘッドのギャップ長をaμmとしたとき、aが0.
1〜0.5であり、媒体表面が1mm2当り平均105/
a2個以上の突起を有し、しかも突起が30〜300Å
の高さを有し、 さらに、基体の長手方向と、基体主面の法線方向とでは
られる平面上で、方向をかえながら強磁性金属薄膜層の
保磁力を測定したとき、 (Hc max-Hc min)/Hc(0)≦0.9 {ここに、Hc maxは保磁力の最大値、Hc minは保磁力の
最小値、Hc(0)は基体の長手方向における保磁力を表わ
す。} なる関係を有し、強磁性金属薄膜層の充填率が0.7以
上であることを特徴とする磁気記録方法。1. A magnetic recording method for recording and reproducing a magnetic recording medium having a ferromagnetic metal thin film layer containing Co as a main component on a flexible substrate by using a magnetic head. a is 0.
1 to 0.5, and the medium surface has an average of 10 5 / mm 2
a Has two or more protrusions, and the protrusion is 30 to 300Å
Furthermore, when the coercive force of the ferromagnetic metal thin film layer is measured while changing the direction on a plane defined by the longitudinal direction of the base and the normal to the main surface of the base, (Hc max- Hc min) / Hc (0) ≦ 0.9 (where, Hc max represents the maximum value of coercive force, Hc min represents the minimum value of coercive force, and Hc (0) represents coercive force in the longitudinal direction of the substrate. }, And the filling factor of the ferromagnetic metal thin film layer is 0.7 or more.
金属強磁性体で構成されている特許請求の範囲第1項に
記載の磁気記録方法。2. The magnetic recording method according to claim 1, wherein at least the end surface of the gap portion of the magnetic head is made of a metal ferromagnetic material.
磁性合金である特許請求の範囲第2項に記載の磁気記録
方法。3. The magnetic recording method according to claim 2, wherein the metal ferromagnet is an amorphous magnetic alloy containing Co as a main component.
特許請求の範囲第1項〜第3項のいずれかに記載の磁気
記録方法。4. The magnetic recording method according to any one of claims 1 to 3, wherein (Hc max-Hc min) / Hc (0) ≦ 0.6.
囲第1項〜第4項のいずれかに記載の磁気記録方法。5. The magnetic recording method according to claim 1, wherein the filling rate is 0.75 or more.
とNi,CrおよびOの1〜3種を主成分とする特許請
求の範囲第1項〜第5項のいずれかに記載の磁気記録方
法。6. The ferromagnetic metal thin film layer is Co or Co
6. The magnetic recording method according to any one of claims 1 to 5, which contains 1 to 3 of Ni, Cr and O as main components.
Niの重量比が1.5以上である特許請求の範囲第1項
〜第6項のいずれかに記載の磁気記録方法。7. A ferromagnetic metal thin film layer containing Ni, Co /
The magnetic recording method according to any one of claims 1 to 6, wherein the weight ratio of Ni is 1.5 or more.
(CoまたはCo+Ni)の重量比が0.1以下である
特許請求の範囲第1項〜第7項のいずれかに記載の磁気
記録方法。8. The ferromagnetic metal thin film layer contains Cr, and Cr /
The magnetic recording method according to any one of claims 1 to 7, wherein the weight ratio of (Co or Co + Ni) is 0.1 or less.
oまたはCo+Ni)の原子比が0.5以下である特許
請求の範囲第1項〜第8項のいずれかに記載の磁気記録
方法。9. The ferromagnetic metal thin film layer contains O, and O / (C
9. The magnetic recording method according to any one of claims 1 to 8, wherein the atomic ratio of o or Co + Ni) is 0.5 or less.
0.5μmである特許請求の範囲第1項〜第9項のいず
れかに記載の磁気記録方法。10. The ferromagnetic metal thin film layer has a thickness of 0.05 to
The magnetic recording method according to any one of claims 1 to 9, which has a thickness of 0.5 μm.
対して傾斜した柱状結晶粒の集合体からなる特許請求の
範囲第1項〜第10項のいずれかに記載の磁気記録方
法。11. The magnetic recording according to any one of claims 1 to 10, wherein the ferromagnetic metal thin film layer is composed of an aggregate of columnar crystal grains inclined with respect to a normal line to the main surface of the substrate. Method.
法線に対する傾斜角が、柱状結晶粒の基体と反対側の部
分の基体主面の法線に対する傾斜角よりも大きい特許請
求の範囲第1項〜第11項のいずれかに記載の磁気記録
方法。12. A tilt angle of a columnar crystal grain on a substrate side with respect to a normal line of a substrate main surface is larger than a tilt angle of a columnar crystal grain on a side opposite to a substrate with respect to a normal line of a substrate main surface. 12. The magnetic recording method according to any one of 1 to 11 in the range.
平均密度が、基体側の部分の平均密度より大きい特許請
求の範囲第1項〜第12項のいずれかに記載の磁気記録
方法。13. The magnetic recording method according to claim 1, wherein the average density of the portion of the ferromagnetic metal thin film layer on the side opposite to the substrate is higher than the average density of the portion on the substrate side. .
たとき、基体と反対側の1/3の部分の平均密度が、基
体側の1/3の平均密度の1.5以上である特許請求の
範囲第13項に記載の磁気記録方法。14. When the ferromagnetic metal thin film layer is divided into three equal parts in the thickness direction, the average density of the 1/3 portion on the side opposite to the substrate is 1.5 or more of the average density of 1/3 on the substrate side. 14. The magnetic recording method according to claim 13, wherein
板上に、径が30〜300Åの大きさを有する微粒子を
配設し、その上に強磁性金属薄膜層を設けてなる特許請
求の範囲第1項〜第14項のいずれかに記載の磁気記録
方法。15. A flexible substrate made of a polymer, fine particles having a diameter of 30 to 300Å are arranged on the substrate, and a ferromagnetic metal thin film layer is provided thereon. 15. The magnetic recording method according to any one of 1 to 14 in the range.
の酸化物の層を有する特許請求の範囲第1項〜第15項
のいずれかに記載の磁気記録方法。16. The magnetic recording method according to any one of claims 1 to 15, wherein the ferromagnetic metal thin film layer has a ferromagnetic metal oxide layer on its surface.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22456384A JPH0624053B2 (en) | 1984-10-25 | 1984-10-25 | Magnetic recording method |
| US06/789,842 US4816933A (en) | 1984-10-23 | 1985-10-21 | Magnetic recording medium of particular coercive force, filling ratio, and protrusions and recording/reproducing method therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22456384A JPH0624053B2 (en) | 1984-10-25 | 1984-10-25 | Magnetic recording method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61104424A JPS61104424A (en) | 1986-05-22 |
| JPH0624053B2 true JPH0624053B2 (en) | 1994-03-30 |
Family
ID=16815731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22456384A Expired - Lifetime JPH0624053B2 (en) | 1984-10-23 | 1984-10-25 | Magnetic recording method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0624053B2 (en) |
-
1984
- 1984-10-25 JP JP22456384A patent/JPH0624053B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61104424A (en) | 1986-05-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |