JPH0626909B2 - Thermal head - Google Patents
Thermal headInfo
- Publication number
- JPH0626909B2 JPH0626909B2 JP60241400A JP24140085A JPH0626909B2 JP H0626909 B2 JPH0626909 B2 JP H0626909B2 JP 60241400 A JP60241400 A JP 60241400A JP 24140085 A JP24140085 A JP 24140085A JP H0626909 B2 JPH0626909 B2 JP H0626909B2
- Authority
- JP
- Japan
- Prior art keywords
- thermal head
- substrate
- thermal
- protective film
- wiring conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 23
- 239000010408 film Substances 0.000 claims description 22
- 230000001681 protective effect Effects 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 15
- 230000003746 surface roughness Effects 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 7
- 239000004020 conductor Substances 0.000 description 13
- 239000010410 layer Substances 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 5
- 230000004044 response Effects 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 210000004243 sweat Anatomy 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910019819 Cr—Si Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000003064 anti-oxidating effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 239000013535 sea water Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
- B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
- B41J2/335—Structure of thermal heads
Landscapes
- Electronic Switches (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、例えば記録紙面に熱転写記録を形成するサ
ーマルプリンタのサーマルヘツド、特にその保護膜中の
ピンホールの低減に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermal head of a thermal printer for forming thermal transfer recording on a recording paper surface, and more particularly to reduction of pinholes in its protective film.
第2図は例えば特開昭58−131077号公報に示さ
れた従来のサーマルヘツドを示す平面図、第3図は第2
図のIII−III矢視断面図であり、これらの図において、
(2)は絶縁性の基板であり、この基板の上には薄膜回路
が形成されている。この薄膜回路は、基板(2)上に直線
的に配列された複数の発熱体(41)〜(4n)と、発熱体
(41)〜(4n)の各一端を共通接続する共通端子(6)
と、発熱体(41)〜(4n)の各他端を個別に接続した駆
動信号入力端子(81)〜(8n)と、Al膜等からなる配
線導体(10)とからなる。この薄膜回路は第3図に示すよ
うに、保護膜(12)で被覆されている。FIG. 2 is a plan view showing a conventional thermal head disclosed in, for example, Japanese Patent Laid-Open No. 58-131077, and FIG.
It is a sectional view taken along the line III-III of the drawings, and in these drawings,
(2) is an insulating substrate on which a thin film circuit is formed. This thin film circuit includes a plurality of heating elements (4 1 ) to (4 n ) linearly arranged on the substrate (2) and a heating element.
A common terminal (6) for commonly connecting one end of each of (4 1 ) to (4 n ).
Consisting When the heating element (4 1) to the driving signal input terminal of the other ends connected to separate (4 n) (8 1) to (8 n), a wiring conductor made of Al film or the like (10) . As shown in FIG. 3, this thin film circuit is covered with a protective film (12).
従来のサーマルヘツドは上記のように構成され、記録紙
面に印字記録を行なう場合は、このサーマルヘツドを、
熱溶融性インクが塗布された転写マスター材を介して、
記録紙面に密着させた状態で、共通端子(6)と駆動信号
入力端子(81)〜(8n)との間に印字情報に対応した駆
動信号電流を選択的に流し、発熱体(41)〜(4n)を選
択的に発熱させるとともに、サーマルヘツドを発熱体
(41)〜(4n)の配列方向と直行する矢印A方向に移動
させる。転写マスター材に塗布された熱溶融性インクは
発熱体(41)〜(4n)により印字情報に対応して部分的
に溶融し、この溶融した熱溶融性インクが記録紙面に転
写され、該記録紙面にシリアルに印字記録が形成され
る。The conventional thermal head is configured as described above, and when performing print recording on the recording paper surface, this thermal head is
Via the transfer master material coated with heat-meltable ink,
In a state of being in close contact with the recording paper surface, selectively passing a drive signal current corresponding to the print information between the common terminal (6) and the driving signal input terminal (8 1) ~ (8 n), the heating element (4 1 ) to (4 n ) are selectively heated and the thermal head is used as a heating element.
It is moved in the direction of arrow A which is orthogonal to the arrangement direction of (4 1 ) to (4 n ). The heat-meltable ink applied to the transfer master material is partially melted by the heating elements (4 1 ) to (4 n ) according to the print information, and the melted heat-meltable ink is transferred to the recording paper surface, A print record is serially formed on the recording paper surface.
上記のような従来のサーマルヘツドでは、基板(2)を被
覆している保護膜(12)中のピンホールが下部の配線導体
(10)まで達していることがあり、保護膜(12)を誤つて手
で触れてしまつたり、あるいは、インクリボンの保護膜
(12)に接触付着してしまうなどした場合には、保護膜(1
2)中のピンホールに汗やインク等が浸込み、この汗やイ
ンク等の配線導体(10)を腐食劣化させ、駆動中に配線導
体(10)の断線を生じさせ、印字品位を著しく劣化せしめ
てしまうことがあるという問題点があつた。In the conventional thermal head as described above, the pinhole in the protective film (12) covering the substrate (2) has a lower wiring conductor.
(10) has been reached, and the protective film (12) is touched by mistake, or the protective film of the ink ribbon is
If it gets in contact with (12), the protective film (1
2) Sweat, ink, etc. infiltrate into the pinhole inside, corroding and deteriorating the wiring conductor (10) of this sweat, ink, etc., causing disconnection of the wiring conductor (10) during driving, and the print quality is significantly deteriorated. There was a problem in that it might end up.
又、そのようなサーマルヘツドあるいはそれを搭載した
サーマルプリンタについて、耐湿試験等を行なうなどし
た場合にも前記と同様の現象を生じるという問題点があ
つた。特に、海岸近郊においては塩素分に富んだ環境雰
囲気であるため、前記現象が著しく、機器の信頼性を低
下させているという問題点があつた。In addition, such a thermal head or a thermal printer having the thermal head mounted therein has a problem that the same phenomenon as described above occurs when a moisture resistance test or the like is performed. In particular, in the suburbs near the coast, since the environment atmosphere is rich in chlorine, the above-mentioned phenomenon is remarkable and the reliability of the equipment is deteriorated.
更に、前記サーマルヘツドの取扱中、ヘツドの表面が金
属箔などと接触した場合に、ショートを生じるという問
題点もあつた。あるいは、ヘツドが例えば内側をメタル
コーテイングしたインクリボンと接触して印字する場
合、ショートが発生して、サーマルヘツドの駆動回路が
働かなくなるという問題点もあつた。Further, there is a problem that a short circuit occurs when the surface of the thermal head comes into contact with a metal foil or the like during handling of the thermal head. Alternatively, when the head contacts with an ink ribbon whose inside is coated with a metal for printing, a short circuit occurs and the drive circuit of the thermal head does not work.
この原因は、サーマルヘツドの外部接続端子(6)、(8
1)〜(8n)をメツキする際、ピンホール内部にもメツ
キ金属が析出し、この金属がピンホールの開口部に盛り
上がつて凸部を形成する等により、前記の問題点が発生
するものと思われる。This is due to the external connection terminals (6) and (8) of the thermal head.
When plating 1 ) to (8 n ), a plating metal also deposits inside the pinhole, and this metal rises up at the opening of the pinhole to form a convex portion. It seems to do.
サーマルヘツドは、かつては第4図に示す構造のものが
多く、配線導体(10)の部分において、基板(2)の上にガ
ラス等からなるグレーズ層(14)が40〜50μm位設け
られていた。このようなサーマルヘツドでは、表面荒さ
がいくら荒くてもグレーズ層(14)を形成すれば、グレー
ズ層(14)表面が極めて平滑であるため、ピンホールなど
の問題は生じなかつた。しかし、近年、第5図に示すよ
うな、基板(2)の一部に部分的にグレーズ層(14)を設け
ただけの構造のサーマルヘツドが主に用いられている。
この場合、配線導体(10)の部分には基板(2)上にグレー
ズ層(14)がほとんど形成されていないので、上記のよう
な問題点が発生しているのである。Many thermal heads used to have the structure shown in FIG. 4, and in the wiring conductor (10), a glaze layer (14) made of glass or the like is provided on the substrate (2) for about 40 to 50 μm. It was In such a thermal head, no matter how rough the surface is, if the glaze layer (14) is formed, the surface of the glaze layer (14) is extremely smooth, so that no problem such as pinholes occurs. However, in recent years, a thermal head having a structure in which a glaze layer (14) is partially provided on a part of the substrate (2) as shown in FIG. 5 is mainly used.
In this case, since the glaze layer (14) is hardly formed on the substrate (2) in the portion of the wiring conductor (10), the above-mentioned problems occur.
この発明は、かかる問題点を解決するためになされたも
ので、サーマルヘツドのサーマルプリンタへの取付、交
換作業において、人体や金属との接触が生じても、又、
多湿雰囲気、塩分含有雰囲気下において長期に渡って使
用しても、更に、メタルコートされたインクリボンやメ
タリツクな部分を持つ感熱紙を用いても、腐食による配
線の断線やショートによる駆動回路の故障が発生しな
い、極めて信頼性の高いサーマルヘツドを提供すること
を目的とする。The present invention has been made in order to solve the above problems, and even if contact with a human body or metal occurs during installation or replacement of a thermal head in a thermal printer,
Even if it is used for a long time in a humid or salt-containing atmosphere, or even if a metal-coated ink ribbon or thermal paper with a metallic part is used, drive circuit failure due to wire breakage or short circuit due to corrosion It is an object of the present invention to provide a highly reliable thermal head that does not generate heat.
表面荒さを中心線平均荒さで0.3μRa以下とした絶
縁性の基板と、この基板の上に形成され、選択的に発熱
する複数の発熱体を備えた薄膜回路と、この薄膜回路を
被覆する保護膜とを備えたことを特徴とするものであ
る。An insulating substrate having a surface roughness of 0.3 μRa or less in terms of center line average roughness, a thin film circuit having a plurality of heating elements formed on the substrate and selectively generating heat, and covering the thin film circuit And a protective film.
この発明においては、基板の表面荒さを中心線平均荒さ
で0.3μRa以下としたので、保護膜中のピンホール
の発生が抑制される。In the present invention, the surface roughness of the substrate is 0.3 μRa or less in terms of the center line average roughness, so that the generation of pinholes in the protective film is suppressed.
この発明に係るサーマルヘツドの基本構造は従来技術に
おいて説明したものと略同一である。そして、この発明
は基板(2)の表面荒さを中心線平均荒さで0.3μRa
以下としたことを特徴とするものである。The basic structure of the thermal head according to the present invention is substantially the same as that described in the prior art. Further, according to the present invention, the surface roughness of the substrate (2) is 0.3 μRa as the center line average roughness.
It is characterized by the following.
このサーマルヘツドは、例えば、部分グレーズ層(14)を
持つ基板(2)の上に発熱体(41)〜(4n)、配線導線(1
0)、保護膜(12)を真空蒸着あるいはスパツタリング等の
方法で順次形成することにより製造する。発熱体(41)
〜(4n)の上には部分的にグレーズ層(14)を形成して蓄
熱させていることが多い。基板(2)と配線導線(10)との
間には発熱体(41)〜(4n)を形成していないものもあ
る。基板(2)の材料としてはアルミナ、AlN、Be
O、SiC、Si3N4,ZrO2等が用いられる。The thermal head is, for example, heating element on the substrate (2) having a partial glaze layer (14) (4 1) ~ (4 n), the wiring conductors (1
0) and the protective film 12 are sequentially formed by a method such as vacuum deposition or sputtering. Heating element (4 1 )
In most cases, a glaze layer (14) is partially formed on (4 n ) to store heat. In some cases, the heating elements (4 1 ) to (4 n ) are not formed between the substrate (2) and the wiring conductor (10). The material of the substrate (2) is alumina, AlN, Be
O, SiC, Si 3 N 4 , ZrO 2 or the like is used.
基板(2)上の配線導線(10)の膜厚は通常0.5〜2μ程
度であり、更にその上の保護膜(12)の厚さは5〜10μ
である。このような構造では基板(2)の表面の荒さが保
護膜(12)のピンホール発生に及ぼす影響が大きい。保護
膜(12)を厚くすればピンホール数は減少するが、コスト
高となり、更に、熱伝導性も劣ってくるので、サーマル
ヘツドの機能上好ましくない。そこで、基板(2)の表面
荒さを中心線平均荒さで0.3μRa以下にした。The film thickness of the wiring conductor (10) on the substrate (2) is usually about 0.5 to 2 μ, and the thickness of the protective film (12) thereon is 5 to 10 μ.
Is. In such a structure, the surface roughness of the substrate (2) has a great influence on the generation of pinholes in the protective film (12). If the thickness of the protective film (12) is increased, the number of pinholes is reduced, but the cost is increased and the thermal conductivity is deteriorated, which is not preferable in terms of the function of the thermal head. Therefore, the surface roughness of the substrate (2) is set to 0.3 μRa or less in terms of center line average roughness.
上記のように構成されたサーマルヘツドにおいては、基
板(2)の表面の荒さを中心線平均荒さで0.3μRa以
下にしたことにより、腐食の著しい減少効果を呈し、人
体や金属との接触、メタルコーテイングしたインクリボ
ンや感熱紙の使用、多湿、塩素含有雰囲気中等において
駆動信頼性を高めることができる。In the thermal head configured as described above, the roughness of the surface of the substrate (2) is set to 0.3 μRa or less in terms of the center line average roughness, thereby exhibiting a remarkable effect of reducing corrosion, contact with the human body or metal, It is possible to improve the driving reliability in the use of a metal coated ink ribbon or thermal paper, in a humid environment, in an atmosphere containing chlorine.
実験例1 アルミナ、AlN、SiCを基板材料とし、体積充填率
の変化あるいは研磨等により表面荒さを数種類設定調整
して、一部分にガラスグレーズ層を形成した後、Ta2
N、Ta−Si、Cr−Siの発熱体、AlやCuの配
線導体、SiO2の酸化防止膜とTa2O5の耐摩耗膜と
による2層構造の保護膜、を真空蒸着又はスパツタリン
グ方法で順次積層形成して作成した数種のサーマルヘツ
ドを第1表に示す成分組成の人工汗に浸漬して引き上
げ、40℃、相対湿度90%の雰囲気中にて48時間放
置した後、断線による不良発生率を調べた。又、第2表
に示す成分組成の人工海水を作り、サンプルを浸漬して
引き上げ、前記と同様の試験を行った。これらの試験の
結果を第3表に示す。なお、このサンプルにおいて、発
熱体の膜厚は約1000〜2000Å、配線導体は約1
〜2μm、保護膜は約6〜10μmとした。Experimental Example 1 Alumina, AlN, and SiC were used as the substrate material, and several types of surface roughness were set and adjusted by changing the volume filling rate or polishing, and after forming a glass glaze layer on a part, Ta 2
N, Ta-Si, a heating element Cr-Si, Al and Cu of the wiring conductor, a protective film having a two-layer structure by a wear-resistant film of the anti-oxidation film and of Ta 2 O 5 which has a SiO 2, vacuum deposition or Supatsutaringu methods Several thermal heads prepared by sequentially laminating with the above are soaked in artificial sweat having the component composition shown in Table 1 and pulled up, and allowed to stand in an atmosphere of 40 ° C. and 90% relative humidity for 48 hours, and then broken. The defect occurrence rate was investigated. Further, artificial seawater having the composition of components shown in Table 2 was prepared, the sample was immersed and pulled up, and the same test as above was conducted. The results of these tests are shown in Table 3. In addition, in this sample, the film thickness of the heating element is about 1000 to 2000Å, and the wiring conductor is about 1
˜2 μm, and the protective film was about 6 to 10 μm.
実験例2 外部接続端子にNiやSnの電解メツキを施したヘツド
を駆動回路と接続し、電源を入れて発熱駆動させ、ヘツ
ドの配線部上の保護膜表面にアルミ箔を密着させたが、
ショートは発生しなかつた。 Experimental Example 2 A head with Ni or Sn electrolytic plating applied to the external connection terminal was connected to a drive circuit, and power was turned on to drive heat, and an aluminum foil was adhered to the surface of the protective film on the head wiring portion.
No short circuit occurred.
実験例3 第3表の条件2と条件4のサーマルヘツドについて、印
字に最小限必要なピーク発熱温度を発生させるに要す、
1ドツトあたりの印字電力を調べたところ、条件4のも
のは1.2W、条件2のものは0.7Wであったこのよ
うに、表面荒さを押さえることにより、配線導体の抵抗
が減少し、消費電力の省力化が可能になり、そのため、
電池等を用いた携帯型のプリンタの駆動の長寿命化を図
ることができる。Experimental Example 3 Regarding the thermal heads of Condition 2 and Condition 4 in Table 3, it is necessary to generate the minimum peak heat generation temperature required for printing.
When the printing power per dot was examined, it was 1.2 W for condition 4 and 0.7 W for condition 2. Thus, by suppressing the surface roughness, the resistance of the wiring conductor decreased, It is possible to save power consumption, and therefore
It is possible to extend the driving life of a portable printer using a battery or the like.
実験例4 第3表の条件2と条件4のサーマルヘツドの熱応答性を
調べたところ、その結果は第1図の熱応答曲線に示す通
り、条件2のサーマルヘツドは実線A、条件4のサーマ
ルヘツドは破線Bのようになつた。すなわち、サーマル
ヘツドの熱応答性は、第1図の実線部に示されるよう
に、表面荒さの小さいほど発熱体への電圧印加時におけ
る温度上昇は速やかに起こり、電圧の印加を停止した時
においては速やかに温度が降下することがわかる。Experimental Example 4 When the thermal responsiveness of the thermal heads of Condition 2 and Condition 4 in Table 3 was examined, the results are shown in the thermal response curve of FIG. The thermal head was as shown by the broken line B. That is, as shown by the solid line portion in FIG. 1, the thermal response of the thermal head is such that the smaller the surface roughness is, the more quickly the temperature rises when the voltage is applied to the heating element, and when the voltage application is stopped. It can be seen that the temperature drops rapidly.
従って、その発明のようにすれば、基板表面の荒さ、又
は基板材質の体積密度などが相互作用して、サーマルヘ
ツドの熱応答性が向上し、印字の高速化が可能となり、
又、残熱による尾引きのない高印字品質をもたらす。Therefore, according to the invention, the roughness of the substrate surface or the volume density of the substrate material interacts with each other, the thermal response of the thermal head is improved, and the printing speed can be increased.
In addition, high print quality without tailing due to residual heat is provided.
この発明は以上説明したとおり、保護層にピンホールを
発生しないようにしたので、サーマルヘツドのサーマル
プリンタへの取付、交換作業において、人体や金属との
接触が生じても、又、それらを多湿雰囲気、塩分含有雰
囲気下において長期に渡って使用しても、更には、メタ
ルコートされたインクリボンやメタリツクな部分を持つ
感熱紙を用いても、腐食による配線の断線やショートに
よる駆動回路の故障が発生せず、サーマルプリンタの信
頼性を極めて高くすることができるという効果がある。As described above, according to the present invention, since the pinholes are not generated in the protective layer, even if contact with a human body or metal occurs during installation or replacement of the thermal head to the thermal printer, it is also necessary to keep them wet. Even if it is used for a long time in an atmosphere or an atmosphere containing salt, or even if a metal-coated ink ribbon or thermal paper with a metallic part is used, the drive circuit malfunctions due to a broken wire or a short circuit due to corrosion. There is an effect that the reliability of the thermal printer can be made extremely high without causing the problem.
第1図はこの発明に係るサーマルヘツドの熱応答性を示
すグラフ、第2図は従来のサーマルヘツドを示す平面
図、第3図は第2図のIII−III矢視断面図、第4図及び
第5図は従来の他のサーマルヘツドの断面図である。 図において、(2)は基板、(41)〜(4n)は発熱体、
(6)は共通端子、(81)〜(8n)は駆動信号入力端子、
(10)は配線導体、(12)は保護膜、(14)はグレーズ層であ
る。 なお、各図中同一符号は同一又は相当部分を示す。FIG. 1 is a graph showing the thermal response of the thermal head according to the present invention, FIG. 2 is a plan view showing a conventional thermal head, FIG. 3 is a sectional view taken along the line III-III of FIG. 2, and FIG. And FIG. 5 is a sectional view of another conventional thermal head. In the figure, (2) is a substrate, (4 1 ) to (4 n ) are heating elements,
(6) a common terminal, (8 1) ~ (8 n) of the drive signal input terminal,
(10) is a wiring conductor, (12) is a protective film, and (14) is a glaze layer. In the drawings, the same reference numerals indicate the same or corresponding parts.
Claims (1)
以下とした絶縁性の基板と、この基板の上に形成され、
選択的に発熱する複数の発熱体を備えた薄膜回路と、こ
の薄膜回路を被覆する保護膜とを備えたことを特徴とす
るサーマルヘッド。1. Surface roughness is 0.3 μRa in terms of centerline average roughness.
The following insulating substrate and formed on this substrate,
A thermal head comprising: a thin film circuit including a plurality of heating elements that selectively generate heat; and a protective film that covers the thin film circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60241400A JPH0626909B2 (en) | 1985-10-30 | 1985-10-30 | Thermal head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60241400A JPH0626909B2 (en) | 1985-10-30 | 1985-10-30 | Thermal head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62103158A JPS62103158A (en) | 1987-05-13 |
| JPH0626909B2 true JPH0626909B2 (en) | 1994-04-13 |
Family
ID=17073715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60241400A Expired - Lifetime JPH0626909B2 (en) | 1985-10-30 | 1985-10-30 | Thermal head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0626909B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62142396A (en) * | 1985-12-17 | 1987-06-25 | アルプス電気株式会社 | Thin film circuit substrate |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55132093A (en) * | 1979-04-02 | 1980-10-14 | Tokyo Shibaura Electric Co | Graded substrate |
| JPS5841994A (en) * | 1981-09-02 | 1983-03-11 | 住友化学工業株式会社 | Paper coating composition |
| JPS58179668A (en) * | 1982-04-15 | 1983-10-20 | Ngk Spark Plug Co Ltd | Glazed base plate for facsimile |
| JPS59104963A (en) * | 1982-12-07 | 1984-06-18 | Seiko Instr & Electronics Ltd | Method of manufacturing thermal head |
| JPS59167276A (en) * | 1983-03-14 | 1984-09-20 | Mitani Denshi Kogyo Kk | Thermal head |
| JPS6042069A (en) * | 1983-08-19 | 1985-03-06 | Rohm Co Ltd | Thermal print head |
| JPS60206655A (en) * | 1984-03-31 | 1985-10-18 | Canon Inc | liquid jet recording head |
| JPS60210469A (en) * | 1984-04-04 | 1985-10-22 | Matsushita Electric Ind Co Ltd | thermal head |
| JPS61155281A (en) * | 1984-12-27 | 1986-07-14 | 日本特殊陶業株式会社 | Manufacture of partially glazed substrate |
-
1985
- 1985-10-30 JP JP60241400A patent/JPH0626909B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62103158A (en) | 1987-05-13 |
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