JPH0627355B2 - Corrosion resistant material - Google Patents
Corrosion resistant materialInfo
- Publication number
- JPH0627355B2 JPH0627355B2 JP58040730A JP4073083A JPH0627355B2 JP H0627355 B2 JPH0627355 B2 JP H0627355B2 JP 58040730 A JP58040730 A JP 58040730A JP 4073083 A JP4073083 A JP 4073083A JP H0627355 B2 JPH0627355 B2 JP H0627355B2
- Authority
- JP
- Japan
- Prior art keywords
- reaction
- resistant member
- corrosion
- corrosion resistant
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/73—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals characterised by the process
- C23C22/74—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals characterised by the process for obtaining burned-in conversion coatings
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Aftertreatments Of Artificial And Natural Stones (AREA)
- Chemically Coating (AREA)
- Chemical Treatment Of Metals (AREA)
Description
【発明の詳細な説明】 （発明の技術分野） 本発明は，腐食性ガスを取扱う反応容器あるいは配管等
の耐食部材に関する。TECHNICAL FIELD OF THE INVENTION The present invention relates to a corrosion resistant member such as a reaction vessel or a pipe for handling a corrosive gas.
（発明の技術的背景とその問題） 従来より，金属，合金，セラミックス等の基体表面に，
耐摩耗性に優れる，例えば窒化チタン，炭化チタン等の
高融点化合物被膜を形成する方法として化学蒸着法が知
られている。この方法では，反応ガスを用いて高融点化
合物の被覆が９００〜１２００℃で行なわれる。(Technical background of the invention and its problems) Conventionally, on the surface of a substrate such as metal, alloy, ceramics,
A chemical vapor deposition method is known as a method for forming a high-melting-point compound coating film having excellent wear resistance, such as titanium nitride or titanium carbide. In this method, a high melting point compound is coated at 900 to 1200 ° C. using a reaction gas.
また，高温での反応では好ましくない場合には，グロー
放電空間を基体近傍に形成して，放電のエネルギーによ
り化学反応をおこさせ，被覆に要する加熱温度を４００
〜６００℃と低くして行なうグロー放電化学処理とも呼
ぶべき方法が検討されている。If the reaction at a high temperature is not preferable, a glow discharge space is formed in the vicinity of the substrate, a chemical reaction is caused by the energy of the discharge, and the heating temperature required for coating is 400
A method that should be called glow discharge chemical treatment performed at a low temperature of up to 600 ° C. has been studied.
これらの方法に使用する装置としては，例えばグロー放
電化学処理法の場合には，ガス供給口と排気口とを備え
た反応容器内に，被処理基体を電気的に導通した状態で
設置しうる陰極板とその裏面に設けられた基体を加熱す
るための加熱板とそれらを支持し，陰極を導入するため
の陰極導入管と，および陰極板の上方に所定の間隔をお
いて支持される陽極板とが設けられたものが知られてい
る。As an apparatus used in these methods, for example, in the case of a glow discharge chemical treatment method, a substrate to be treated can be installed in an electrically conductive state in a reaction container having a gas supply port and an exhaust port. A cathode plate and a heating plate for heating the substrate provided on the back surface thereof, a cathode introduction tube for supporting them and introducing a cathode, and an anode supported above the cathode plate at a predetermined interval. It is known that a board is provided.
而してこの方法において，例えば金属窒化物の被膜を形
成する場合には，主に金属ハロゲン化物と窒素と水素と
からなる混合ガスをガス供給口から反応容器内に供給
し，グロー放電空間内で化学反応させて基体表面に金属
窒化物の被膜を形成するわけであるが，この反応の際に
ハロゲン化水素やハロゲンガスが形成されるため，反応
容器の内壁が徐々に腐食し，また腐食生成物や反応の残
滓が容器の内壁に付着したりするという現象があった。
その結果反応容器内の真空度があがらなくなったり，得
られる被膜が不均一なものとなったり，また処理終了後
の基体をとりだす際に，大気中の水分や酸素が付着物内
にとりこまれ，それが次の処理の際の不純物となって悪
影響を与えるという問題があった。Thus, in this method, for example, when a metal nitride film is formed, a mixed gas mainly containing a metal halide, nitrogen and hydrogen is supplied into the reaction vessel through the gas supply port, and the inside of the glow discharge space is supplied. The chemical reaction causes a metal nitride film to be formed on the surface of the substrate, but since hydrogen halide and halogen gas are formed during this reaction, the inner wall of the reaction vessel gradually corrodes and corrodes. There was a phenomenon that the product and the residue of the reaction adhered to the inner wall of the container.
As a result, the degree of vacuum in the reaction vessel does not rise, the obtained coating becomes non-uniform, and when the substrate after the treatment is taken out, moisture and oxygen in the atmosphere are taken into the deposits, There is a problem that it becomes an impurity in the next treatment and adversely affects it.
（発明の目的） 本発明はグロー放電化学処理装置等における反応容器の
腐食及び反応残滓などによる上述の問題を解消するもの
である。(Object of the Invention) The present invention solves the above-mentioned problems due to corrosion of reaction vessels and reaction residues in a glow discharge chemical treatment apparatus or the like.
（発明の概要） 本発明の耐食部材は，基体と、基体の表面にクロム化合
物から熱分解により生成された酸化クロムが層状に被覆
されてなる事を特徴とする。(Summary of the Invention) The corrosion-resistant member of the present invention is characterized in that the substrate and the surface of the substrate are coated with a layer of chromium oxide produced by thermal decomposition of a chromium compound.
クロム化合物は，基体に含浸又は化学的に結合させるこ
とが好ましい。この場合，クロム化合物は液状であっ
て，クロム酸，塩化クロム，硝酸クロムあるいはクロム
酸マグネシウム等を主成分とするもの，更に可溶性錯体
クロム化合物等を主成分とするものが適用できる。な
お，必要に応じて酸化亜鉛，ケイ酸，酸化アルミニウム
等を含有する。The chromium compound is preferably impregnated or chemically bound to the substrate. In this case, the chromium compound is a liquid, and a compound containing chromic acid, chromium chloride, chromium nitrate, magnesium chromate, or the like as a main component, and a soluble complex chromium compound or the like as a main component can be applied. If necessary, zinc oxide, silicic acid, aluminum oxide, etc. are contained.
基体は，耐食性及び機械的強度を有するものが望ましく
ステンレス鋼等がよい。The substrate is preferably one having corrosion resistance and mechanical strength, and stainless steel or the like is preferable.
本発明の耐食部材を得るには，例えば，所定の形状に設
定された耐食部材を，クロム化合物を主成分とする反応
液に浸漬したのち，加熱処理を施こして熱化学反応によ
り酸化クロムを含む層を生成する。このサイクルを複数
回繰り返すことにより，層として、酸化クロムが被覆さ
れてなる所望の表面状態を得る。含浸前の耐食部材にあ
らかじめ表面処理，例えばメッキ，溶射等を施こすこと
は効果的である。また，耐食部材がセラミックスの場
合，焼成する前あるいは半焼成のものに含浸処理を施こ
すこともよい。In order to obtain the corrosion-resistant member of the present invention, for example, the corrosion-resistant member set in a predetermined shape is immersed in a reaction solution containing a chromium compound as a main component, and then subjected to heat treatment to remove chromium oxide by a thermochemical reaction. Generate the containing layer. By repeating this cycle a plurality of times, a desired surface state in which chromium oxide is coated as a layer is obtained. It is effective to subject the corrosion-resistant member before impregnation to surface treatment such as plating and thermal spraying in advance. When the corrosion-resistant member is ceramics, it may be impregnated before or half-baked.
なお耐食部材が大きい反応容器の場合には，反応液をス
プレー等で塗布あるいは含浸することもできる。In the case of a reaction vessel having a large corrosion resistant member, the reaction solution can be applied or impregnated with a spray or the like.
こうして得られる耐食部材の表面は極めて緻密で耐食性
に優れているため，反応ガスあるいは反応液等によって
腐食されることはない。また表面に反応生成物が生成し
て付着しても清掃が簡単に行なえる。Since the surface of the corrosion-resistant member thus obtained is extremely dense and has excellent corrosion resistance, it is not corroded by the reaction gas or the reaction solution. Further, even if a reaction product is generated and adheres to the surface, cleaning can be easily performed.
（発明の実施例） ステンレス製の円筒状の反応容器の内面に次のような処
理を施こした。(Examples of the Invention) The following treatment was applied to the inner surface of a cylindrical reaction vessel made of stainless steel.
比重１．６〜１．７のクロム酸を主成分とする溶液を容
器内面に付着せしめたのち，加熱処理を施こす。このサ
イクルを加熱温度３１０゜〜７００℃の間で徐々に温度
をあげながら複数回（３〜１０回）くり返した。その結
果，内面に暗緑色の酸化クロム層を有する反応容器が得
られた。A solution containing chromic acid having a specific gravity of 1.6 to 1.7 as a main component is attached to the inner surface of the container, and then heat treatment is performed. This cycle was repeated a plurality of times (3 to 10 times) while gradually raising the temperature between the heating temperatures of 310 ° to 700 ° C. As a result, a reaction vessel having a dark green chromium oxide layer on the inner surface was obtained.
この容器を用いてＣｒ３８％，Ａｌ３．８％，Ｎｉ残の
組成の合金から成る５０mm×５０mm×５mmの金属板を被
処理基体として載置し，次の条件で処理を５０回繰り返
した。その後反応容器内の付着物を除去したが簡単に除
去することができた。また得られる窒化チタンの被膜は
均一で装飾性に優れていた。Using this container, a metal plate of 50 mm × 50 mm × 5 mm made of an alloy having a composition of 38% Cr, 3.8% Al and Ni balance was placed as a substrate to be treated, and the treatment was repeated 50 times under the following conditions. After that, the deposit in the reaction vessel was removed, but it could be easily removed. The obtained titanium nitride film was uniform and excellent in decorativeness.
反応ガス組成TiCl4:H2：Ｎ2＝1:19:6（モル比） 一方従来のステンレス壁のみで形成された反応容器を使
用し，あとは実施例と同様の条件で処理を行なったとこ
ろ，数１０回繰り返した段階で反応容器内に付着物がひ
どく堆積し，またこの付着物の除去はなかなか困難であ
った。Reaction gas composition TiCl 4 : H 2 : N 2 = 1: 19: 6 (molar ratio) On the other hand, using a conventional reaction vessel formed of only a stainless steel wall, and then performing the treatment under the same conditions as those of the examples, deposits were seriously deposited in the reaction vessel after repeating several tens of times, and It was quite difficult to remove this deposit.
（発明の効果） 以上の実施例からも明らかなように，本発明に係る反応
容器によれば，腐食生成物や反応残滓の付着物が少な
く，真空度の低下や不純物の悪影響を防止することがで
きるため，得られる被膜が均一で，装飾性がすぐれたも
のとなる。(Effects of the Invention) As is clear from the above examples, according to the reaction vessel of the present invention, the amount of the corrosion products and the deposits of the reaction residue are small, and the reduction of the degree of vacuum and the adverse effect of impurities are prevented. The resulting coating is uniform and has excellent decorative properties.
また，本発明の耐食部材は，冷凍サイクルに用いる配管
等の腐食性流体に接触するものに適用して優れた効果を
有する。Further, the corrosion resistant member of the present invention has an excellent effect when applied to a member that comes into contact with a corrosive fluid such as a pipe used in a refrigeration cycle.
Claims (3)
化学反応により生成された酸化クロムが層として被覆さ
れてなる耐食部材。1. A corrosion-resistant member comprising a substrate and a surface of the substrate coated with chromium oxide produced by a thermochemical reaction from a chromium compound as a layer.
第１項記載の耐食部材。2. The corrosion resistant member according to claim 1, wherein the corrosion resistant member is a reaction vessel.
囲第１項に記載の耐食部材。3. The corrosion resistant member according to claim 1, wherein the corrosion resistant member is a fluid pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58040730A JPH0627355B2 (en) | 1983-03-14 | 1983-03-14 | Corrosion resistant material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58040730A JPH0627355B2 (en) | 1983-03-14 | 1983-03-14 | Corrosion resistant material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59166681A JPS59166681A (en) | 1984-09-20 |
| JPH0627355B2 true JPH0627355B2 (en) | 1994-04-13 |
Family
ID=12588738
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58040730A Expired - Lifetime JPH0627355B2 (en) | 1983-03-14 | 1983-03-14 | Corrosion resistant material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0627355B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61204302A (en) * | 1985-03-06 | 1986-09-10 | N D C Kk | Porous al sintered material |
| JPS6253443A (en) * | 1985-08-28 | 1987-03-09 | 株式会社東芝 | Sub-nozzle of fluid jet type loom |
| JPS62222084A (en) * | 1986-02-28 | 1987-09-30 | Toshiba Corp | Steel parts |
| JPH03138303A (en) * | 1990-10-19 | 1991-06-12 | Ndc Co Ltd | Manufacture of porous al series sintered material |
| JP4881101B2 (en) * | 2005-08-12 | 2012-02-22 | 勝成 原 | Basic brick manufacturing method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6014625B2 (en) * | 1978-03-13 | 1985-04-15 | 新日本製鐵株式会社 | Steel lining method |
| JPS575461U (en) * | 1980-06-06 | 1982-01-12 |
-
1983
- 1983-03-14 JP JP58040730A patent/JPH0627355B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59166681A (en) | 1984-09-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6783863B2 (en) | Plasma processing container internal member and production method thereof | |
| CN108504975A (en) | Stainless iron pot acid resistant material and preparation method thereof, stainless container made of iron | |
| JPS58189072A (en) | Composition of protective al-si coating for metallic base | |
| JP6505126B2 (en) | Multilayer substrate and manufacturing method | |
| JP5035731B2 (en) | Method for reactivating electrode for electrolysis | |
| CA2205052C (en) | Method of producing reactive element modified-aluminide diffusion coatings | |
| JPH0466657A (en) | Corrosion-resistant aluminum alloy material and its manufacture | |
| EP0572673B1 (en) | Method of forming layer of evaporation coating | |
| WO1997032053A1 (en) | A method of forming spray deposit | |
| JPH02247393A (en) | Electrolytic electrode with durability and its production | |
| US6406799B1 (en) | Method of producing anti-corrosion member and anti-corrosion member | |
| JPH0627355B2 (en) | Corrosion resistant material | |
| US2876137A (en) | Method of plating metal with magnesium | |
| Hajdu | Surface preparation for electroless nickel plating | |
| US3715231A (en) | Storage of liquid hydrazine rocket fuels | |
| US3703405A (en) | Vapor deposition of rhenium and rhenium-tungsten alloy coatings | |
| US2982016A (en) | Method of gas plating an alloy of aluminum and magnesium | |
| EP1923487B1 (en) | Method of reactivating electrode for electrolysis | |
| US3281262A (en) | Art of bonding of vacuum metallized coatings to metal substrates | |
| JPS58151469A (en) | Chemical treatment device by glow discharge | |
| JP2002053944A (en) | Method for nitriding substrate containing aluminum metal | |
| JPH06220618A (en) | Vacuum film forming device and surface treatment of its component | |
| JPH0610134A (en) | Corrosion resistant material and its production | |
| JPH1067584A (en) | Reaction vessel | |
| JP2019089339A (en) | Multilayer substrate and manufacturing method |