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JPH0629122B2 - Method for manufacturing ceramic microspheres - Google Patents
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JPH0629122B2 - Method for manufacturing ceramic microspheres - Google Patents

Method for manufacturing ceramic microspheres

Info

Publication number
JPH0629122B2
JPH0629122B2 JP12327889A JP12327889A JPH0629122B2 JP H0629122 B2 JPH0629122 B2 JP H0629122B2 JP 12327889 A JP12327889 A JP 12327889A JP 12327889 A JP12327889 A JP 12327889A JP H0629122 B2 JPH0629122 B2 JP H0629122B2
Authority
JP
Japan
Prior art keywords
water
oil
metal compound
microspheres
soluble
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12327889A
Other languages
Japanese (ja)
Other versions
JPH02303537A (en
Inventor
康行 緒方
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP12327889A priority Critical patent/JPH0629122B2/en
Publication of JPH02303537A publication Critical patent/JPH02303537A/en
Publication of JPH0629122B2 publication Critical patent/JPH0629122B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Manufacturing Of Micro-Capsules (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Colloid Chemistry (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は水溶性金属化合物の水溶液に油を混合し超音波
振動により生成した油中水型エマルジョンを加熱するこ
とにより、水分と油分を除去してセラミックマイクロ球
を製造する方法に関する。更に詳しくはセラミックマイ
クロ球の平均粒径を調整する方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention removes water and oil by heating a water-in-oil emulsion produced by mixing oil with an aqueous solution of a water-soluble metal compound and ultrasonically vibrating the mixture. To produce ceramic microspheres. More specifically, it relates to a method for adjusting the average particle size of ceramic microspheres.

[従来の技術] 本出願人は、この種のセラミックマイクロ球を製造する
方法として、出発原料として微細なセラミック微粉体を
必要とすることなく、粒度分布幅の狭い、サブミクロン
のオーダの平均粒径を有する方法を特許出願し(特願昭
63-36239、特開平1-301502号公報参照)、更にこの方法
における超音波の周波数を10kHz〜100kHzの範囲か
ら選定して、高周波数のときにマイクロ球の平均粒径を
小さくし、低周波数のときにその平均粒径を大きくする
方法について特許出願した(特願昭63-317123、特開平1
-301502号公報参照)。
[Prior Art] As a method for producing this type of ceramic microspheres, the present applicant does not require fine ceramic fine powder as a starting material, and has a narrow particle size distribution width and average particle size on the order of submicron. Filed a patent for a method with a diameter
63-36239, JP-A-1-301502), and the frequency of ultrasonic waves in this method is selected from the range of 10 kHz to 100 kHz to reduce the average particle size of the microspheres at high frequencies and to reduce the low frequency. At that time, a patent application was filed for a method of increasing the average particle size (Japanese Patent Application No. 63-317123, Japanese Patent Laid-Open No.
-301502).

[発明が解決しようとする課題] 上記従来の方法でセラミックマイクロ球の平均粒径を調
整するためには、周波数を調整できる特殊な超音波発生
機を用意するか、或いは周波数の異なる複数台の超音波
発生機を用意して目標とするマイクロ球の平均粒径毎に
所定の周波数又は超音波発生機を選択する必要があっ
た。
[Problems to be Solved by the Invention] In order to adjust the average particle size of the ceramic microspheres by the above-mentioned conventional method, a special ultrasonic generator capable of adjusting the frequency is prepared, or a plurality of units having different frequencies are prepared. It was necessary to prepare an ultrasonic wave generator and select a predetermined frequency or an ultrasonic wave generator for each target average particle diameter of the microspheres.

しかし超音波発生機の周波数は現実的に一定の範囲に限
定され、かつきめ細かい周波数設定が困難なため、従来
の方法で所望の平均粒径のマイクロ球を得るには装置的
に容易でない。
However, the frequency of the ultrasonic generator is practically limited to a certain range, and it is difficult to finely set the frequency. Therefore, it is not easy in terms of equipment to obtain microspheres having a desired average particle diameter by the conventional method.

本発明の目的は、粒度分布幅の狭い、サブミクロンのオ
ーダの平均粒径を有するセラミックマイクロ球を、超音
波の周波数の変化によらずに、油中水型エマルジョンを
生成する前の混合液の粘度を調整することにより、所望
の平均粒径に調整し得るセラミックマイクロ球の製造方
法を提供することにある。
The object of the present invention is to prepare a ceramic microsphere having a narrow particle size distribution width and an average particle size on the order of submicron, which is a mixed liquid before forming a water-in-oil emulsion, regardless of a change in the frequency of ultrasonic waves. The object of the present invention is to provide a method for producing ceramic microspheres, which can be adjusted to a desired average particle size by adjusting the viscosity of.

[課題を解決するための手段] 上記目的を達成するために、本発明は、水溶性金属化合
物が溶解した水溶液にこの水溶液に不溶で水より高沸点
の油を混合し、この混合液に超音波振動を与えて油中水
型エマルジョンを生成し、このエマルジョンを水の沸点
未満の温度で加熱し、前記水溶性金属化合物が溶解する
液滴の水分を蒸発させて油相に球形の水溶性金属化合物
を分解させた後、この分散液を前記水溶性金属化合物が
分解し金属酸化物となる温度以上でこの金属酸化物の粒
成長開始温度未満の温度範囲で加熱して油を蒸発又は分
解して除去し、金属酸化物のマイクロ球を得るセラミッ
クマイクロ球の製造方法の改良である。
[Means for Solving the Problems] In order to achieve the above object, the present invention provides that an aqueous solution in which a water-soluble metal compound is dissolved is mixed with an oil insoluble in the aqueous solution and having a boiling point higher than that of water. Sonic vibration is applied to form a water-in-oil emulsion, and this emulsion is heated at a temperature lower than the boiling point of water to evaporate the water content of the droplets in which the water-soluble metal compound is dissolved, and to form a spherical water-soluble emulsion in the oil phase. After decomposing the metal compound, the dispersion is heated at a temperature range above the temperature at which the water-soluble metal compound decomposes to form a metal oxide and below the grain growth start temperature of the metal oxide to evaporate or decompose the oil. It is an improvement of the method for producing ceramic microspheres by removing the metal microspheres to obtain metal oxide microspheres.

その特徴とするところは、前記水溶液金属化合物が溶解
した水溶液に前記油とともにこの油に不溶であって水溶
性の粘度調整剤を混合して所望の平均粒径のマイクロ球
を得る点にある。
The feature is that a microsphere having a desired average particle diameter is obtained by mixing a water-soluble viscosity modifier which is insoluble in this oil together with the oil in an aqueous solution in which the aqueous metal compound is dissolved.

本発明の出発原料は目的とするセラミックスを構成する
水溶性金属化合物である。この水溶性金属化合物を所定
の組成比で20〜50℃の水に溶解して水溶液を調製す
る。
The starting material of the present invention is a water-soluble metal compound that constitutes the target ceramics. This water-soluble metal compound is dissolved in water at a predetermined composition ratio of 20 to 50 ° C. to prepare an aqueous solution.

この水溶液に油と粘度調整剤を混合し、この混合液に超
音波振動を与えて油中水型エマルジョンを生成する。油
は上記水溶液に不溶でありかつ水より高沸点のものであ
れば特に限定されず、毒性及び価格の点からパラフィン
油が望ましい。
Oil and a viscosity modifier are mixed with this aqueous solution, and ultrasonic vibration is applied to this mixed solution to form a water-in-oil emulsion. The oil is not particularly limited as long as it is insoluble in the above aqueous solution and has a boiling point higher than that of water, and paraffin oil is preferable from the viewpoint of toxicity and cost.

粘度調整剤は、上記混合液の粘度を調整する物質であっ
て、上記混合液をエマルジョンに生成したときにエマル
ジョンの液滴径を調整するために、この油に不溶で、し
かも水溶性である必要がある。粘性の低い粘度調整剤、
例えばメチルアルコール、エチルアルコール等を添加し
て混合液の粘度を低下させると、エマルジョンの液滴が
小さくなりセラミックマイクロ球の平均粒径が小さくな
る。反対に粘性の高い粘度調整剤、例えばポリビニルア
ルコール、メチルセルロース等の水溶性ポリマーを添加
して混合液の粘度を高めると、エマルジョンの液滴が大
きくなりセラミックマイクロ球の平均粒径が大きくな
る。このことから混合液の粘度をこの粘度調整剤により
適宜選定すれば、平均粒径を所望の値にすることができ
る。
The viscosity modifier is a substance that adjusts the viscosity of the mixed solution and is insoluble in this oil and is water-soluble in order to adjust the droplet size of the emulsion when the mixed solution is formed into an emulsion. There is a need. A low viscosity viscosity modifier,
For example, when methyl alcohol, ethyl alcohol, or the like is added to reduce the viscosity of the mixed solution, the droplets of the emulsion become smaller and the average particle size of the ceramic microspheres becomes smaller. On the other hand, when a viscosity adjusting agent having a high viscosity, for example, a water-soluble polymer such as polyvinyl alcohol or methyl cellulose is added to increase the viscosity of the mixed liquid, the droplets of the emulsion become large and the average particle size of the ceramic microspheres becomes large. From this fact, the average particle diameter can be set to a desired value by appropriately selecting the viscosity of the mixed liquid with this viscosity modifier.

またエマルジョンを生成する際にはエマルジョンを長時
間安定に存在させるために乳化剤を使用した方がよい。
この乳化剤はイオン系乳化剤、非イオン系乳化剤等のい
ずれの乳化剤でもよい。上記水溶液100重量部に対し
て油は35〜100重量部また乳化剤は1〜6重量部混
合し、粘度調整剤は、粘度調整剤自体の粘度及び目標と
する平均粒系により異なるが、上記水溶液100重量部
に対して10重量部以下の割合で混合する。
Further, when forming an emulsion, it is preferable to use an emulsifier in order to make the emulsion stably exist for a long time.
This emulsifier may be any emulsifier such as an ionic emulsifier and a nonionic emulsifier. The oil is mixed in an amount of 35 to 100 parts by weight and the emulsifier is mixed in an amount of 1 to 6 parts by weight based on 100 parts by weight of the aqueous solution. It is mixed at a ratio of 10 parts by weight or less with respect to 100 parts by weight.

上記混合液は超音波振動により油中水型エマルジョンに
生成する。エマルジョンの生成を超音波振動以外の攪拌
式ホモジナイザ、圧力式ホモジナイザ等の手段で行った
場合には、液滴の径は部分的にサブミクロンのオーダと
なるが、平均的にサブミクロンのオーダとならず、しか
もその液滴径の分布幅は広いため、最終的に得られるセ
ラミックマイクロ球の平均粒径が大きくかつ不揃いとな
る。このため超音波振動以外の方法は本発明に適しな
い。この超音波の周波数は10kHz〜100kHzの範囲か
ら超音波発生機の仕様に基づいて選択する。超音波は一
般的に可聴域より上の周波数、すなわち20kHz以上の
音波であるが、本発明では10kHzの周波数においても
液滴の平均径をサブミクロンのオーダにすることができ
るので、周波数が10kHz以上で20kHz未満の音波につ
いても、超音波の用語を用いる。
The mixed liquid is formed into a water-in-oil emulsion by ultrasonic vibration. When the emulsion is generated by means of a stirring homogenizer other than ultrasonic vibration, a pressure homogenizer, etc., the droplet diameter is partially on the order of submicron, but on average it is on the order of submicron. In addition, since the distribution width of the droplet diameter is wide, the average particle diameter of the finally obtained ceramic microspheres is large and uneven. Therefore, methods other than ultrasonic vibration are not suitable for the present invention. The frequency of this ultrasonic wave is selected from the range of 10 kHz to 100 kHz based on the specifications of the ultrasonic wave generator. The ultrasonic wave is generally a sound wave having a frequency above the audible range, that is, a sound wave having a frequency of 20 kHz or more. However, in the present invention, since the average diameter of droplets can be in the order of submicron even at a frequency of 10 kHz, the frequency is 10 kHz. The term “ultrasonic wave” is used for the sound waves of less than 20 kHz.

生成したエマルジョンを加熱して水溶性金属化合物が溶
解する液滴の水分を蒸発させるときの加熱温度は、高温
の方が迅速に液滴の水分を除去できるが、100℃を越
えると水の沸騰が起きエマルジョンが壊れるので、10
0℃未満、望ましくは70〜95℃がよい。
When the generated emulsion is heated to evaporate the water content of the droplets in which the water-soluble metal compound dissolves, the higher the heating temperature, the faster the water content of the droplets can be removed. Occurs and the emulsion breaks, so 10
The temperature is lower than 0 ° C, preferably 70 to 95 ° C.

更に油を蒸発又は分解するとともに水溶性金属化合物を
熱分解するときの加熱温度は、水溶性金属化合物が分解
し金属酸化物となる温度以上でこの金属化合物の粒成長
開始温度未満の温度であることが必要である。
Further, the heating temperature for evaporating or decomposing oil and thermally decomposing a water-soluble metal compound is a temperature higher than the temperature at which the water-soluble metal compound decomposes to a metal oxide and lower than the grain growth start temperature of this metal compound. It is necessary.

[作用] 水溶性金属化合物が溶解した水溶液に油と粘度調整剤を
混合し、必要により乳化剤を加えて超音波振動を与える
と、超音波による強力なキャビテーション効果が混合液
全体に均一に加わり、前記水溶液がサブミクロンのオー
ダの液滴にまで細分割されて油相に分散する。ここで粘
度調整剤が混合液の粘度を低下させる物質であれば、液
滴の平均径は小さくなり、また粘度調整剤が混合液の粘
度を高める物質であれば、液滴の平均径は大きくなり、
結果としてマイクロ球の所望の平均粒径を決めることが
できる。
[Function] When an oil and a viscosity modifier are mixed in an aqueous solution in which a water-soluble metal compound is dissolved, and an emulsifier is added if necessary, and ultrasonic vibration is applied, a powerful cavitation effect by ultrasonic waves is uniformly applied to the entire mixed liquid, The aqueous solution is subdivided into submicron-order droplets and dispersed in the oil phase. Here, if the viscosity modifier is a substance that reduces the viscosity of the mixed liquid, the average diameter of the liquid droplets is small, and if the viscosity modifier is a substance that increases the viscosity of the mixed liquid, the average diameter of the liquid droplets is large. Becomes
As a result, the desired average particle size of the microspheres can be determined.

このエマルジョンを加熱して水溶性金属化合物が溶解す
る液滴の水分を蒸発させると、液滴が濃縮され、油相に
サブミクロンのオーダの球形の水溶性金属化合物が分散
する。
When the emulsion is heated to evaporate the water content of the droplet in which the water-soluble metal compound is dissolved, the droplet is concentrated and the spherical water-soluble metal compound of submicron order is dispersed in the oil phase.

この水溶性金属化合物が分散した油液を加熱して油を蒸
発又は分解するとともに水溶性金属化合物を熱分解させ
れば、サブミクロンのオーダの金属酸化物のマイクロ球
が得られる。
By heating the oil liquid in which the water-soluble metal compound is dispersed to evaporate or decompose the oil and thermally decompose the water-soluble metal compound, microspheres of a metal oxide in the order of submicrons can be obtained.

[発明の効果] 以上述べたように、本発明の製造方法によれば、粒度分
布幅の狭い、サブミクロンのオーダの平均粒径を有する
セラミックマイクロ球を、超音波の周波数の変化によら
ずに、油中水型エマルジョンを生成する前の混合液の粘
度を粘度調整剤の添加により調整することによって、所
望の平均粒径に調整することができる。
[Effects of the Invention] As described above, according to the manufacturing method of the present invention, ceramic microspheres having a narrow particle size distribution width and an average particle size on the order of submicrons can be used regardless of changes in ultrasonic frequency. In addition, by adjusting the viscosity of the mixed solution before forming the water-in-oil emulsion by adding a viscosity modifier, it is possible to adjust to a desired average particle size.

[実施例] 次に本発明の実施例を比較例とともに説明する。[Examples] Next, examples of the present invention will be described together with comparative examples.

〈実施例1〉 ZrO(NO3)2・2H2O 10gを40℃の水25gに溶解して水溶液を
調製した。この水溶液にパラフィン油50gと粘度調整剤
としてメチルアルコール2gと乳化剤としてポリ・オキシ
エチレン・ノニルフェニル・エーテル1gを加えて粘度2.
7cPの混合液を調製した。この混合液に超音波発生機(Br
anson社製B-30)により15秒間超音波振動を与えて油中水
型エマルジョンを生成した。この時の超音波の周波数は
30kHzであった。このエマルジョンを乾燥器に入れ大気
圧下80℃の温度で8時間乾燥し、水を蒸発させて除去し
た。エマルジョンはZrO2粒子が分散する懸濁液となっ
た。この懸濁液を大気圧下700℃の温度で3時間焼成し油
を分解して除去し、ZrO2球を得た。走査型電子顕微鏡に
よりこのZrO2球の粒径を測定したところ、平均粒径が0.
08μmで粒度分布幅が±0.02μmの極めて微細でバラツ
キの少ないZrO2の単分散セラミックマイクロ球であっ
た。
Example 1 10 g of ZrO (NO 3 ) 2 .2H 2 O was dissolved in 25 g of water at 40 ° C. to prepare an aqueous solution. To this aqueous solution, 50 g of paraffin oil, 2 g of methyl alcohol as a viscosity modifier, and 1 g of polyoxyethylene nonylphenyl ether as an emulsifier were added and the viscosity was 2.
A mixed solution of 7 cP was prepared. An ultrasonic generator (Br
Ultrasonic vibration was applied for 15 seconds by anson B-30) to form a water-in-oil emulsion. The frequency of the ultrasonic waves at this time
It was 30 kHz. The emulsion was placed in a dryer and dried at a temperature of 80 ° C. under atmospheric pressure for 8 hours, and water was removed by evaporation. The emulsion became a suspension in which ZrO 2 particles were dispersed. This suspension was calcined at a temperature of 700 ° C. under atmospheric pressure for 3 hours to decompose and remove the oil to obtain ZrO 2 spheres. When the particle size of the ZrO 2 spheres was measured by a scanning electron microscope, the average particle size was 0.
It was an extremely fine ZrO 2 monodisperse ceramic microsphere with a particle size distribution width of ± 0.02 μm at 08 μm.

〈実施例2〉 実施例1のメチルアルコールの代りに粘度調整剤として
ポリビニルアルコール0.25gを実施例1の水溶液に加え
て混合し粘度38.0cPの混合液を調製した以外は、実施例
1と同様にしてZrO2球を得た。実施例1と同様にこのZr
O2球の粒径を測定したところ、平均粒径が1.1μmで粒
度分布幅が±0.2μmであった。このZrO2球は実施例1
のZrO2球より平均粒径が大きくかつ粒度分布幅の広くな
ったが、なお微細でバラツキの少ない単分散セラミック
マイクロ球であった。
Example 2 Similar to Example 1 except that 0.25 g of polyvinyl alcohol as a viscosity modifier was added to the aqueous solution of Example 1 instead of the methyl alcohol of Example 1 and mixed to prepare a mixed solution having a viscosity of 38.0 cP. Then, a ZrO 2 ball was obtained. As with Example 1, this Zr
When the particle size of the O 2 sphere was measured, the average particle size was 1.1 μm and the particle size distribution width was ± 0.2 μm. This ZrO 2 ball was used in Example 1.
The average particle size was wider and the particle size distribution range was wider than that of ZrO 2 spheres, but they were still monodisperse ceramic micro spheres with finer and less variation.

〈比較例〉 実施例1の水溶液に粘度調整剤を全く添加せずに粘度3.
4cPの混合液を調製した以外は、実施例1と同様にしてZ
rO2球を得た。実施例1と同様にこのZrO2球の粒径を測
定したところ、平均粒径が0.1μmで粒度分布幅が±0.2
μmの極めて微細でバラツキの少ないZrO2の単分散セラ
ミックマイクロ球であった。
<Comparative example> The viscosity of the aqueous solution of Example 1 was 3. without adding a viscosity modifier.
Z was prepared in the same manner as in Example 1 except that a mixed solution of 4 cP was prepared.
I got an rO 2 ball. When the particle size of the ZrO 2 spheres was measured in the same manner as in Example 1, the average particle size was 0.1 μm and the particle size distribution width was ± 0.2.
It was an extremely fine ZrO 2 monodisperse ceramic microsphere of μm.

実施例1、実施例2及び比較例の結果から粘度調整剤を
水溶液に加えて混合液の粘度を調整することにより、セ
ラミックマイクロ球の平均粒径を調整することが判明し
た。
From the results of Example 1, Example 2 and Comparative Example, it was found that the average particle size of the ceramic microspheres was adjusted by adding the viscosity modifier to the aqueous solution to adjust the viscosity of the mixed solution.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 C01G 25/02 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Office reference number FI technical display area C01G 25/02

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】水溶性金属化合物が溶解した水溶液にこの
水溶液に不溶で水より高沸点の油を混合し、この混合液
に超音波振動を与えて油中水型エマルジョンを生成し、
このエマルジョンを水の沸点未満の温度で加熱し、前記
水溶性金属化合物が溶解する液滴の水分を蒸発させて油
相に球形の水溶性金属化合物を分解させた後、この分散
液を前記水溶性金属化合物が分解し金属酸化物となる温
度以上でこの金属酸化物の粒成長開始温度未満の温度範
囲で加熱して油を蒸発又は分解して除去し、金属酸化物
のマイクロ球を得るセラミックマイクロ球の製造方法で
あって、 前記水溶液金属化合物が溶解した水溶液に前記油ととも
にこの油に不溶であって水溶性の粘度調整剤を混合して
所望の平均粒径のマイクロ球を得ることを特徴とするセ
ラミックマイクロ球の製造方法。
1. An aqueous solution in which a water-soluble metal compound is dissolved is mixed with an oil insoluble in the aqueous solution and having a boiling point higher than that of water, and ultrasonic vibration is applied to the mixed solution to produce a water-in-oil emulsion,
The emulsion is heated at a temperature lower than the boiling point of water to evaporate the water content of the droplets in which the water-soluble metal compound is dissolved to decompose the spherical water-soluble metal compound in the oil phase, and then the dispersion is mixed with the water-soluble metal compound. A ceramic that obtains metal oxide microspheres by heating at a temperature above the temperature at which a metal compound decomposes to form a metal oxide and below the grain growth start temperature of this metal oxide to evaporate or decompose oil and remove it. A method for producing microspheres, comprising mixing an aqueous solution in which the aqueous metal compound is dissolved with the oil together with a water-soluble viscosity modifier that is insoluble in the oil to obtain microspheres having a desired average particle size. A method for manufacturing a characteristic ceramic microsphere.
【請求項2】油がパラフィン油であって、粘度調整剤が
メチルアルコールである請求項1記載のセラミックマイ
クロ球の製造方法。
2. The method for producing a ceramic microsphere according to claim 1, wherein the oil is paraffin oil and the viscosity modifier is methyl alcohol.
【請求項3】粘度調整剤が水溶性ポリマーである請求項
1記載のセラミックマイクロ球の製造方法。
3. The method for producing ceramic microspheres according to claim 1, wherein the viscosity modifier is a water-soluble polymer.
JP12327889A 1989-05-17 1989-05-17 Method for manufacturing ceramic microspheres Expired - Lifetime JPH0629122B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12327889A JPH0629122B2 (en) 1989-05-17 1989-05-17 Method for manufacturing ceramic microspheres

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12327889A JPH0629122B2 (en) 1989-05-17 1989-05-17 Method for manufacturing ceramic microspheres

Publications (2)

Publication Number Publication Date
JPH02303537A JPH02303537A (en) 1990-12-17
JPH0629122B2 true JPH0629122B2 (en) 1994-04-20

Family

ID=14856610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12327889A Expired - Lifetime JPH0629122B2 (en) 1989-05-17 1989-05-17 Method for manufacturing ceramic microspheres

Country Status (1)

Country Link
JP (1) JPH0629122B2 (en)

Also Published As

Publication number Publication date
JPH02303537A (en) 1990-12-17

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