JPH0629815B2 - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JPH0629815B2 JPH0629815B2 JP59011056A JP1105684A JPH0629815B2 JP H0629815 B2 JPH0629815 B2 JP H0629815B2 JP 59011056 A JP59011056 A JP 59011056A JP 1105684 A JP1105684 A JP 1105684A JP H0629815 B2 JPH0629815 B2 JP H0629815B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- sensitive
- pressure sensor
- sensitive structure
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
- G01L5/162—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of piezoresistors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Description
【発明の詳細な説明】 〔発明の属する技術分野〕 本発明は圧覚センサに関し、特にリング形状の感圧構造
体に複数のストレンゲージを配置してなる圧覚センサに
関する。Description: TECHNICAL FIELD The present invention relates to a pressure sensor, and more particularly to a pressure sensor having a plurality of strain gauges arranged in a ring-shaped pressure-sensitive structure.
最近では電子技術の発達に伴い、作業用ロボットの開発
が進められており、この種のもので更に感覚機能を持た
せたロボットが研究されつつある。しかして、このよう
なロボットにおいて圧覚認識が得られるようにするため
に、複数の感圧構造体を配設した圧覚センサを用いるこ
とが考えられている。Recently, with the development of electronic technology, work robots are being developed, and robots of this kind having further sensory functions are being studied. In order to obtain pressure perception in such a robot, it has been considered to use a pressure sensor having a plurality of pressure sensitive structures.
第１図はこのような圧覚センサの構成に適用可能な感圧
構造体の一例を示し、ここで、１は圧覚センサ、２は圧
覚センサ１に用いられるリング形状の感圧構造体であ
る。FIG. 1 shows an example of a pressure-sensitive structure applicable to the structure of such a pressure-sensitive sensor, where 1 is a pressure-sensitive sensor and 2 is a ring-shaped pressure-sensitive structure used in the pressure-sensitive sensor 1.
感圧構造体２は単結晶シリコンで形成されており、その
リング形状の上下対称位置には受圧面３と基板取付面４
とが形設され、更にこれらの面と直交する側面５には複
数個のストレンゲージ６とその出力端子６Ａが図に示す
ような左右対称位置にプレーナ技術により拡散形成され
ている。The pressure-sensitive structure 2 is made of single crystal silicon, and the pressure-receiving surface 3 and the board mounting surface 4 are located at vertically symmetrical positions of the ring shape.
Further, a plurality of strain gauges 6 and their output terminals 6A are diffused and formed in a laterally symmetrical position as shown in the figure by a planar technique on a side surface 5 orthogonal to these surfaces.
かくして、これらのストレンゲージ６に発生するひずみ
量から受圧面３にかかる荷重の三方向成分Ｆx,Ｆｙおよ
びＦｚを検出するように構成されるもので、圧覚センサ
の場合はこのような感圧構造体２を基板上に縦横列に配
置し、受圧面３側からの分布荷重を個々の感圧構造体２
に分担負荷させ、以て総合的に圧覚が検知されるように
構成することが考えられる。Thus, the strain gauge 6 is configured to detect the three-direction components F x, F y and F z of the load applied to the pressure receiving surface 3 from the strain amount generated in the strain gauge 6. The pressure-sensitive structures 2 are arranged in rows and columns on the substrate, and the distributed load from the pressure-receiving surface 3 side is applied to each pressure-sensitive structure 2.
It is conceivable that the pressure is sensed comprehensively as a result of a shared load.
しかしながら、このような感圧構造体２を第２図および
第３図に示すように基板７上にアレイ状に配置して圧覚
センサを構成する場合、感圧構造体２から基板７上に配
線の接続がなされる関係上、相隣接する感圧構造体２同
士間の間隔８は短縮される余裕がなく、また、感圧構造
体２の肉厚９も受圧板１０から受ける荷重に耐えるだけ
の強度維持のために、ストローク（間隔８と肉厚９との
和をストロークと呼ぶ）１１に対して所定厚以下に薄く
することはできない。However, when such a pressure-sensitive structure 2 is arranged in an array on the substrate 7 as shown in FIGS. 2 and 3 to form a pressure sensor, wiring from the pressure-sensitive structure 2 to the substrate 7 is performed. The space 8 between the pressure-sensitive structures 2 adjacent to each other does not have a margin to be shortened due to the connection between the pressure-sensitive structures 2 and the thickness 9 of the pressure-sensitive structure 2 only bears the load received from the pressure receiving plate 10. In order to maintain the strength of, the stroke (the sum of the space 8 and the wall thickness 9 is called a stroke) 11 cannot be made thinner than a predetermined thickness.
そこで、ストローク１１の寸法がほぼ設定されてしま
い、このように片方の垂直側面５にのみストレンゲージ
６が配置される感圧構造体２からなる圧覚センサ１で
は、このようなストローク１１から得られる圧覚情報が
三方向に対し、それぞれ１つに限られてしまう。Therefore, the dimension of the stroke 11 is almost set, and in the pressure sensor 1 including the pressure sensitive structure 2 in which the strain gauge 6 is arranged only on one of the vertical side surfaces 5 in this way, the stroke 11 can be obtained. The pressure information is limited to one for each of the three directions.
すなわち、圧覚の測定精度を高めるには感圧構造体２の
肉厚９を薄くしてその強度を犠牲としなければならず、
また、感圧構造体２の肉厚９を薄くしない限り、測定精
度を高めることができないという問題があった。That is, in order to improve the accuracy of measuring the pressure sense, the wall thickness 9 of the pressure sensitive structure 2 must be reduced to sacrifice its strength.
Further, there is a problem that the measurement accuracy cannot be improved unless the wall thickness 9 of the pressure sensitive structure 2 is reduced.
本発明の目的は、上述したような問題点に鑑みて、感圧
構造体の強度を犠牲にすることなく、しかも、分布荷重
（面圧分布）の測定精度を高めることができるように配
置した圧覚センサを提供することにある。In view of the above-mentioned problems, the object of the present invention is arranged so that the strength of the pressure-sensitive structure is not sacrificed and the accuracy of measuring the distributed load (contact pressure distribution) can be improved. It is to provide a pressure sensor.
かかる目的を達成するために、本発明では、単結晶シリ
コンによって形成された感圧構造体に設けられた受圧面
に直角な方向の互いに平行する側面のうち一方の面に複
数のストレンゲージを配設して受圧面に加えられた力の
３次元分力の検出を行う圧覚センサであって、複数のス
トレンゲージの配設されていない他方の面同士が近接対
向された一対の感圧構造体を備え、この一対の感圧構造
体が複数対基板上に立設配置する。In order to achieve such an object, in the present invention, a plurality of strain gauges are arranged on one of the side surfaces parallel to each other in the direction perpendicular to the pressure receiving surface provided on the pressure sensitive structure formed of single crystal silicon. A pressure sensor for detecting a three-dimensional component force of a force applied to a pressure receiving surface, wherein a pair of pressure-sensitive structures in which the other surfaces not provided with a plurality of strain gauges are closely opposed to each other The pair of pressure-sensitive structures are vertically arranged on the plurality of pairs of substrates.
以下に、図面に基づいて本発明を詳細に説明する。 Hereinafter, the present invention will be described in detail with reference to the drawings.
第４図および第５図は本発明の一実施例を示し、ここ
で、２１Ａおよび２１Ｂは対をなす感圧構造体であり、
感圧構造体２１Ａと２１Ｂとは互いにその一方の垂直側
面同士が接近状態に保たれるようになし、ストレンゲー
ジ６の設けられている垂直側面５が互いに外方に向くよ
うにする。4 and 5 show an embodiment of the present invention, where 21A and 21B are paired pressure sensitive structures,
The pressure-sensitive structures 21A and 21B are arranged such that their one vertical side surfaces are kept close to each other, and the vertical side surfaces 5 provided with the strain gauges 6 are directed outwards.
このような配列構成となした圧覚センサにおいて、い
ま、感圧構造体２１Ａおよび２１Ｂの肉厚が例えば第２
図に示した感圧構造体２の肉厚９と同じ厚さであると仮
定し、また、第２図で間隔８が肉厚９の２倍であるとし
た場合を例にとって説明すると、出力端子６Ａに接続さ
れる基板７上の配線は第５図に示すように互いに向き合
った形態となるので、これらの配線を適切に組合わすこ
とにより一対の感圧構造体間の間隔８Ａを第２図に示し
た間隔８の２倍とする必要がなく、理想的な配線を示し
た場合は間隔８Ａを間隔８と等しくすることも可能であ
る。そして感圧構造体２１Ａおよび２１Ｂの受持つ強度
は補強される。In the pressure sensor having such an arrangement configuration, the thickness of the pressure sensitive structures 21A and 21B is, for example, second
Assuming that the thickness is the same as the wall thickness 9 of the pressure-sensitive structure 2 shown in the figure, and the gap 8 is twice the wall thickness 9 in FIG. Since the wirings on the substrate 7 connected to the terminals 6A face each other as shown in FIG. 5, by appropriately combining these wirings, the space 8A between the pair of pressure-sensitive structures is set to the second. It is not necessary to make the distance 8 twice as shown in the figure, and it is possible to make the distance 8A equal to the distance 8 when ideal wiring is shown. The strength of the pressure sensitive structures 21A and 21B is reinforced.
また、感圧構造体２１Ａおよび２１Ｂに分担させる強度
が第２図に示した例と同じでよければ、これらの肉厚を
第２図の例の肉厚９の1/2 まで薄くすることが可能であ
る。すなわち、以上に述べたようにして、本発明では、
アレイ状に配置される感圧構造体の少なくともその配置
密度を高めることを可能にするものである。If the strengths shared by the pressure-sensitive structures 21A and 21B are the same as those in the example shown in FIG. 2, the wall thickness of these can be reduced to 1/2 of the wall thickness 9 in the example of FIG. It is possible. That is, as described above, in the present invention,
It is possible to increase at least the arrangement density of the pressure-sensitive structures arranged in an array.
以上説明してきたように、本発明によれば、単結晶シリ
コンによって形成された感圧構造体を有し、感圧構造体
を設けられた受圧面に直角な方向の互いに平行する側面
のうち一方の面に複数のストレンゲージを配設して受圧
面に加えられた力の３次元分力の検出を行う圧覚センサ
であって、複数のストレンゲージを配設されていない他
方の面同士が近接対向された一対の感圧構造体を備え、
この一対の感圧構造体が複数対基板上に立設配置された
ので、圧覚センサとして受圧方向に対し強度の向上を図
ることができると共に、感圧構造体の配置密度を高める
ことができて測定点を増やせるので分布荷重（面圧分
布）の測定精度の向上を図ることができる。As described above, according to the present invention, the pressure-sensitive structure is formed of single crystal silicon, and one of the side surfaces parallel to each other in the direction perpendicular to the pressure-receiving surface provided with the pressure-sensitive structure. Is a pressure sensor that detects a three-dimensional component of the force applied to the pressure receiving surface by disposing a plurality of strain gauges on the surface of the With a pair of pressure-sensitive structures facing each other,
Since the pair of pressure-sensitive structures are vertically arranged on the plurality of substrates, it is possible to improve the strength as a pressure sensor in the pressure receiving direction and to increase the arrangement density of the pressure-sensitive structures. Since the number of measurement points can be increased, it is possible to improve the measurement accuracy of the distributed load (contact pressure distribution).
第１図は従来の圧覚センサに用いる感圧構造体の構成の
一例を示す斜視図、 第２図および第３図はその感圧構造体をアレイ状に配設
した圧覚センサの構成の一例を示すそれぞれ模型図およ
び斜視図、 第４図および第５図は本発明の圧覚センサにおける感圧
構造体の配列の一例を示すそれぞれ模型図および斜視図
である。 １……圧覚センサ、 ２……感圧構造体、 ３……受圧面、 ４……基板取付面、 ５……側面、 ６……ストレンゲージ、 ６Ａ……出力端子、 ７……基板、 ８，８Ａ……間隔、 ９……肉厚、 １０……受圧板、 １１……ストローク、 ２１Ａ，２１Ｂ……感圧構造体。FIG. 1 is a perspective view showing an example of the structure of a pressure-sensitive structure used in a conventional pressure sensor, and FIGS. 2 and 3 are examples of the structure of a pressure sensor in which the pressure-sensitive structures are arranged in an array. FIGS. 4 and 5 are respectively a model view and a perspective view, and FIGS. 4 and 5 are a model view and a perspective view, respectively, showing an example of the arrangement of the pressure-sensitive structures in the pressure sensor of the present invention. 1 ... Pressure sensor, 2 ... Pressure sensitive structure, 3 ... Pressure receiving surface, 4 ... Board mounting surface, 5 ... Side surface, 6 ... Strain gauge, 6A ... Output terminal, 7 ... Board, 8 , 8A ... Interval, 9 ... Wall thickness, 10 ... Pressure receiving plate, 11 ... Stroke, 21A, 21B ... Pressure sensitive structure.
Claims (1)
造体を有し、該感圧構造体に設けられた受圧面に直角な
方向の互いに平行する側面のうち一方の面に複数のスト
レンゲージを配設して前記受圧面に加えられた力の３次
元分力の検出を行う圧覚センサであって、前記複数のス
トレンゲージの配設されていない他方の面同士が近接対
向された一対の感圧構造体を備え、該一対の感圧構造体
が複数対基板上に立設配置されたことを特徴とする圧覚
センサ。1. A pressure sensor having a pressure sensitive structure made of single crystal silicon, and a plurality of strain gauges are provided on one of the side surfaces parallel to each other in a direction perpendicular to a pressure receiving surface provided on the pressure sensitive structure. Is a pressure sensor for detecting a three-dimensional component force of the force applied to the pressure receiving surface, and a pair of the other surfaces where the plurality of strain gauges are not arranged are closely opposed to each other. A pressure sensor, comprising a pressure-sensitive structure, wherein a plurality of the pair of pressure-sensitive structures are vertically arranged on a pair of substrates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59011056A JPH0629815B2 (en) | 1984-01-26 | 1984-01-26 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59011056A JPH0629815B2 (en) | 1984-01-26 | 1984-01-26 | Pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60155938A JPS60155938A (en) | 1985-08-16 |
| JPH0629815B2 true JPH0629815B2 (en) | 1994-04-20 |
Family
ID=11767356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59011056A Expired - Lifetime JPH0629815B2 (en) | 1984-01-26 | 1984-01-26 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0629815B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7216703B2 (en) | 2017-08-09 | 2023-02-01 | シーカ テクノロジー アクチェンゲゼルシャフト | Systems for applying building materials |
-
1984
- 1984-01-26 JP JP59011056A patent/JPH0629815B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60155938A (en) | 1985-08-16 |
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