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JPH0629864B2 - Surface defect inspection method - Google Patents
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JPH0629864B2 - Surface defect inspection method - Google Patents

Surface defect inspection method

Info

Publication number
JPH0629864B2
JPH0629864B2 JP63225274A JP22527488A JPH0629864B2 JP H0629864 B2 JPH0629864 B2 JP H0629864B2 JP 63225274 A JP63225274 A JP 63225274A JP 22527488 A JP22527488 A JP 22527488A JP H0629864 B2 JPH0629864 B2 JP H0629864B2
Authority
JP
Japan
Prior art keywords
defect
grade
ratio
inspection method
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP63225274A
Other languages
Japanese (ja)
Other versions
JPH0273142A (en
Inventor
節男 女鹿
範男 太田
秀樹 江本
守 吉田
敬 銭場
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp, Kawasaki Steel Corp filed Critical Mitsubishi Electric Corp
Priority to JP63225274A priority Critical patent/JPH0629864B2/en
Publication of JPH0273142A publication Critical patent/JPH0273142A/en
Publication of JPH0629864B2 publication Critical patent/JPH0629864B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Description

【発明の詳細な説明】Detailed Description of the Invention 【産業上の利用分野】[Industrial applications]

この発明は圧延鋼板等の被検材の表面欠陥を効率良く、
且つ、高精度で検査することができるようにした被欠陥
検査方法に関する。
This invention efficiently removes surface defects of the test material such as rolled steel plate,
Further, the present invention relates to a defect inspecting method capable of inspecting with high accuracy.

【従来の技術】[Prior art]

従来の表面欠陥検査方法、例えばレーザータイプの表面
疵検査方法にあつては、被検材表面に照射したレーザー
光の反射光から、第5図に示されるように、重欠陥、中
欠陥、軽欠陥の閾値との関係から、欠陥のグレード判定
を行う簡易方式がある。 又、特公昭54−36876号に開示されるように、疵
信号を量子化し、疵の長さ、幅、面積等の情報により疵
種を判定し、疵種毎の閾値との関係からグレード判定を
行う方法等がある。
In the conventional surface defect inspection method, for example, the laser type surface defect inspection method, as shown in FIG. 5, from the reflected light of the laser beam irradiated on the surface of the material to be inspected, heavy defect, medium defect, light defect There is a simple method for judging the grade of a defect based on the relationship with the threshold value of the defect. In addition, as disclosed in Japanese Patent Publication No. Sho 54-36876, the flaw signal is quantized, and the flaw type is determined based on the information such as the length, width, and area of the flaw, and the grade is determined from the relationship with the threshold value for each flaw type. There is a method to do.

【発明が解決しようとする課題】[Problems to be Solved by the Invention]

前記従来の簡易方式は、欠陥部の輝度レベルと正常部の
輝度レベルの比、即ちS/Nに基づく判定であるため
に、人間の目視による判定と齟齬が多いという問題点が
あつた。 又、前記特公昭54−36876号の場合は、量子化さ
れた疵信号から疵の特徴を抽出し、その情報から種々の
判断基準に基づいて疵種を推定しているが、この疵種と
実際の疵種とが合致しない場合がある。この場合でも、
推定された疵種の閾値に基づいてのグレード判定をする
ことになるので、誤判定が生じることが多いという問題
点がある。
Since the conventional simple method is based on the ratio of the luminance level of the defective portion and the luminance level of the normal portion, that is, S / N, there is a problem that there are many discrepancies in the determination by human eyes. In the case of Japanese Patent Publication No. 54-36876, the feature of the flaw is extracted from the quantized flaw signal and the flaw type is estimated from the information based on various judgment criteria. It may not match the actual defect type. Even in this case,
Since the grade determination is performed based on the estimated threshold value of the defect type, there is a problem that an erroneous determination often occurs.

【発明の目的】[Object of the Invention]

この発明は上記従来の問題点に鑑みてなされたものであ
つて、高精度に表面欠陥のグレード判定を行うことがで
きるようにした表面欠陥検査方法を提供することを目的
とする。
The present invention has been made in view of the above conventional problems, and an object of the present invention is to provide a surface defect inspection method capable of highly accurately determining a grade of a surface defect.

【課題を解決するための手段】[Means for Solving the Problems]

この発明は、被検材に照明光を照射し、被照射部をカメ
ラにより撮像し、静止画として捕え、該静止画に基づき
欠陥判定する表面欠陥検査方法において、前記静止画に
より捕えられた表面欠陥の面積と、欠陥部の輝度レベル
と正常部の輝度レベルの比であるSN比と、を検出し、
該検出された面積及びSN比から欠陥グレードを判定す
る表面欠陥検査方法により上記目的を達成するものであ
る。
In the surface defect inspection method of the present invention, in a surface defect inspection method of irradiating a material to be inspected with illumination light, capturing an image of a portion to be irradiated with a camera, and capturing the image as a still image, and determining a defect based on the still image The defect area and the SN ratio, which is the ratio of the luminance level of the defective portion to the luminance level of the normal portion, are detected,
The above object is achieved by a surface defect inspection method for determining a defect grade from the detected area and SN ratio.

【作用】[Action]

この発明においては、静止画として捕えられた欠陥画像
から、表面欠陥の面積とSN比を検出して、これら検出
された面積及びSN比の両方から欠陥グレードを判定す
るようにしているので、高精度に表面欠陥を判定するこ
とができる。
In the present invention, the area of surface defects and the SN ratio are detected from the defect image captured as a still image, and the defect grade is determined from both the detected area and the SN ratio. Surface defects can be accurately determined.

【発明の具体的構成】[Specific Structure of the Invention]

この発明は、本発明者が、多種類の欠陥サンプルを用
い、多くの実験を重ねた結果によるものであり、静止画
として捕えた欠陥画像における表面欠陥の面積と、欠陥
部の輝度レベルと正常部の輝度レベルの比、即ちSN比
と、の2つの要素に基づいて欠陥サンプルを分類する
と、人間の目視判定による欠陥グレードの判定結果と一
致することが判明した。 具体的には、次の第1表に示される各種欠陥を、第1図
に示されるように、鋼帯1の表面をストロボ2によつて
照射し、被照射部を高精細度カメラ3で撮像し、画像視
野(47.5m2)内の欠陥面積と、該欠陥のS/N(S
は欠陥部の輝度レベル、Nは正常部の輝度レベル)と、
の関係は第2図に示されるようになつた。 前記第1表の各種欠陥を、人間の目視判定によりA、
B、Cの3つのグレードに分類すると、第2図に示され
る3つの領域に分けられる。 即ち、第2図において右上側ほど欠陥グレードが悪化す
ることが判明した。 ここでグレードAは、表面品質の最も厳しい用途の鋼帯
においては不可となる欠陥であり、グレードCは表面品
質要求があまり厳しくない鋼帯でも不可となる領域であ
り、グレードBは前2者の中間である。 上記第2図に示されるように、本発明者の実験により、
欠陥グレードの判定は単純に欠陥のSN比のみでは行う
ことができず、欠陥の面積をも考慮して初めて正確に判
定できることが判明した。 従来は、欠陥のSN比のみで判定していたので、例えば
SN比が小さく、欠陥の面積が大きい場合は目視ではC
グレードの欠陥であるにも拘らず、Bグレードとして判
定されたり、反対に、欠陥のSN比は高いが、面積が小
さい場合は、目視検査よりも厳しい判定となり易く不正
確であつた。 次に、本発明方法により実際に鋼帯の表面欠陥を検査す
る過程について説明する。 第1図に示されるようになストロボ2及び高精細度カメ
ラ3により得られた画像Y(第3図参照)における欠陥
、Dを走査する場合は、任意に決められた輝度レ
ベル(LOW LEVEL)以上をその連続性を見なが
ら走査し、当該欠陥の面積を算出すると同時に、該欠陥
における最も高い輝度レベル(SIGNAL LEVE
L)を検出する。 シグナルレベルが求められたら、ノイズレベル(NOI
SE LEVEL)とから、S/Nを求める。この求め
られた欠陥面積とS/Nから、予め作成された第4図に
示される判定基準に当てはめて、ここから、欠陥グレー
ド判定する。 即ち、第3図における欠陥Dはその欠陥面積及びSN
比からCグレード、欠陥DはBグレードと各々判定さ
れる。 なお上記実施例は鋼帯における表面欠陥を検査する場合
のものであるが、本発明はこれに限定されるものでな
く、ステンレス等の鋼帯以外の被検材にも当然適用され
得るものである。 その場合は、被検材の種類に応じて、予め第2図に示さ
れるようなグレード判定をするための基準を設けてお
く。
The present invention is based on the results of many experiments conducted by the present inventor using many kinds of defect samples. The area of surface defects in a defect image captured as a still image, the brightness level of the defect portion and normal It was found that when the defect samples were classified on the basis of the two factors, that is, the ratio of the brightness level of the part, that is, the SN ratio, the result of the judgment of the defect grade by human visual judgment coincided. Specifically, as shown in FIG. 1, the surface of the steel strip 1 is irradiated by the strobe 2 with various defects shown in the following Table 1, and the irradiated portion is irradiated with the high-definition camera 3. The defect area in the image field of view (47.5 m 2 ) and the S / N (S
Is the brightness level of the defective part, N is the brightness level of the normal part),
The relationship was as shown in FIG. The various defects shown in Table 1 were evaluated by the human visual judgment as A,
When classified into three grades of B and C, they are divided into three regions shown in FIG. That is, it was found that the defect grade deteriorates toward the upper right side in FIG. Here, Grade A is a defect that cannot be applied to steel strips for which the surface quality is the strictest, Grade C is an area where steel strips with less stringent surface quality requirements cannot be used, and Grade B is the former two. Is in the middle of. As shown in FIG. 2 above, according to the experiment of the present inventors,
It has been found that the defect grade cannot be determined simply by the S / N ratio of the defect, and can be accurately determined only by taking the area of the defect into consideration. Conventionally, since the judgment was made only by the SN ratio of the defect, for example, when the SN ratio is small and the area of the defect is large, C is visually observed.
Despite being a grade defect, it was judged as B grade, or conversely, when the SN ratio of the defect was high, but when the area was small, the judgment was stricter than the visual inspection and it was inaccurate. Next, the process of actually inspecting the surface defects of the steel strip by the method of the present invention will be described. When scanning the defects D 1 and D 2 in the image Y (see FIG. 3) obtained by the strobe 2 and the high-definition camera 3 as shown in FIG. 1 , an arbitrarily determined brightness level ( LOW LEVEL) and above while scanning the continuity to calculate the area of the defect, and at the same time, calculate the highest brightness level (SIGNAL LEVE) of the defect.
L) is detected. When the signal level is required, the noise level (NOI
SE LEVEL) and S / N is calculated. From the obtained defect area and S / N, the judgment grade shown in FIG. 4 is applied, and the defect grade is judged from this. That is, the defect D 1 in FIG.
From the ratio, the C grade and the defect D 2 are determined to be the B grade, respectively. Although the above-mentioned embodiment is for inspecting surface defects in the steel strip, the present invention is not limited to this, and can naturally be applied to test materials other than steel strip such as stainless steel. is there. In that case, a standard for grade determination as shown in FIG. 2 is set in advance according to the type of material to be inspected.

【発明の効果】【The invention's effect】

本発明は上記のように構成したので、検検材の表面欠陥
のグレード判定を、人間の目視による判定と略一致する
程度に正確に行うことができるという優れた効果を有す
る。
Since the present invention is configured as described above, it has an excellent effect that the grade determination of the surface defect of the inspection material can be accurately performed to the extent that the grade determination is substantially the same as the human visual determination.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明表面欠陥検査方法に利用する静止画像を
得るための装置を示す側面図、第2図は欠陥種類と該欠
陥の面積及びSN比の関係を示す線図、第3図は本発明
方法により欠陥を検査する過程を示す線図、第4図は欠
陥面積、SN比と判定グレードとの関係を示す線図、第
5図は従来の欠陥判定方法を示す線図である。 1…鋼帯、 2…ストロボ、 3…高精細度カメラ。
FIG. 1 is a side view showing an apparatus for obtaining a still image used in the surface defect inspection method of the present invention, FIG. 2 is a diagram showing the relationship between the defect type and the area and SN ratio of the defect, and FIG. FIG. 4 is a diagram showing a process of inspecting defects by the method of the present invention, FIG. 4 is a diagram showing a relationship between a defect area, an SN ratio and a judgment grade, and FIG. 5 is a diagram showing a conventional defect judgment method. 1 ... Steel strip, 2 ... Strobe, 3 ... High-definition camera.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 江本 秀樹 千葉県千葉市川崎町1番地 川崎製鉄株式 会社千葉製鉄所内 (72)発明者 吉田 守 神奈川県鎌倉市上町屋325番地 三菱電機 株式会社鎌倉製作所内 (72)発明者 銭場 敬 神奈川県鎌倉市上町屋325番地 三菱電機 株式会社鎌倉製作所内 (56)参考文献 特開 昭61−245045(JP,A) 特開 昭55−40978(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Hideki Emoto, No. 1 Kawasaki-cho, Chiba City, Chiba Prefecture Inside the Chiba Works, Kawasaki Steel Co., Ltd. (72) Mamoru Yoshida, 325 Kamimachiya, Kamakura City, Kanagawa Mitsubishi Electric Corporation Kamakura Works (72) Inventor Takashi Zenba, 325 Kamimachiya, Kamakura City, Kanagawa Mitsubishi Electric Corporation Kamakura Factory (56) Reference JP 61-245045 (JP, A) JP 55-40978 (JP, A) )

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】被検材に照明光を照射し、被照射部をカメ
ラにより撮像し、静止画として捕え、該静止画に基づき
欠陥判定する表面欠陥検査方法において、前記静止画に
より捕えられた表面欠陥の面積と、欠陥部の輝度レベル
と正常部の輝度レベルの比であるSN比と、を検出し、
該検出された面積及びSN比から欠陥グレードを判定す
ることを特徴とする表面欠陥検査方法。
1. A surface defect inspection method in which a material to be inspected is irradiated with illumination light, a portion to be irradiated is imaged by a camera, captured as a still image, and a defect is determined based on the still image. The area of the surface defect and the SN ratio, which is the ratio of the luminance level of the defective portion and the luminance level of the normal portion, are detected,
A surface defect inspection method characterized by determining a defect grade from the detected area and SN ratio.
JP63225274A 1988-09-08 1988-09-08 Surface defect inspection method Expired - Fee Related JPH0629864B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63225274A JPH0629864B2 (en) 1988-09-08 1988-09-08 Surface defect inspection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63225274A JPH0629864B2 (en) 1988-09-08 1988-09-08 Surface defect inspection method

Publications (2)

Publication Number Publication Date
JPH0273142A JPH0273142A (en) 1990-03-13
JPH0629864B2 true JPH0629864B2 (en) 1994-04-20

Family

ID=16826757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63225274A Expired - Fee Related JPH0629864B2 (en) 1988-09-08 1988-09-08 Surface defect inspection method

Country Status (1)

Country Link
JP (1) JPH0629864B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2003006969A1 (en) * 2001-07-10 2004-11-04 株式会社東京精密 Method and apparatus for inspecting scratches on work
JP6409606B2 (en) * 2015-02-10 2018-10-24 東レ株式会社 Scratch defect inspection device and scratch defect inspection method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5540978A (en) * 1978-09-18 1980-03-22 Kobe Steel Ltd Signal processing method in surface deficiency detection of hot steel material
JPS61245045A (en) * 1985-04-23 1986-10-31 Nisshin Steel Co Ltd Automatic surface defect inspecting method for metallic band

Also Published As

Publication number Publication date
JPH0273142A (en) 1990-03-13

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