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JPH0630765B2 - Aseptic pure water supply method - Google Patents
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JPH0630765B2 - Aseptic pure water supply method - Google Patents

Aseptic pure water supply method

Info

Publication number
JPH0630765B2
JPH0630765B2 JP1105885A JP10588589A JPH0630765B2 JP H0630765 B2 JPH0630765 B2 JP H0630765B2 JP 1105885 A JP1105885 A JP 1105885A JP 10588589 A JP10588589 A JP 10588589A JP H0630765 B2 JPH0630765 B2 JP H0630765B2
Authority
JP
Japan
Prior art keywords
pure water
ppm
concentration
supplied
supply line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1105885A
Other languages
Japanese (ja)
Other versions
JPH0316692A (en
Inventor
稔夫 立野
光雄 宮本
嘉治 太田
晃一 澤田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Morita Kagaku Kogyo Co Ltd
Nomura Micro Science Co Ltd
Original Assignee
Morita Kagaku Kogyo Co Ltd
Nomura Micro Science Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Morita Kagaku Kogyo Co Ltd, Nomura Micro Science Co Ltd filed Critical Morita Kagaku Kogyo Co Ltd
Priority to JP1105885A priority Critical patent/JPH0630765B2/en
Publication of JPH0316692A publication Critical patent/JPH0316692A/en
Priority to US07/888,429 priority patent/US5282967A/en
Publication of JPH0630765B2 publication Critical patent/JPH0630765B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、例えば電子工業・化学薬品工業・精密部品工
業あるいは食品工業などのように高純度の純水を使用す
る分野において、無菌純水を常に供給する方法に関する
ものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to aseptic pure water in the field of using high-purity pure water, such as the electronics industry, chemical industry, precision parts industry, and food industry. Is always about how to supply.

〔従来技術と発明が解決しようとする課題〕[Problems to be Solved by Prior Art and Invention]

近年、純水を使用する電子工業・化学薬品工業・精密部
品工業あるいは食品工業などの製造プロセスや洗浄プロ
セス等で使用される純水は高純度水が求められており、
しかも常に無菌純水であることが要求されている。しか
しながら、これらの分野の純水製造・供給システムにお
いては1つの装置で製造した純水を種々の目的で使用す
る。例えば、化学薬品工業では仕込み用、洗浄用、調合
用、希釈用に利用するため大型化・複雑化していく傾向
がある。また既設の装置を改造したり増設したりすれば
なおさらである。
In recent years, high-purity water is required for pure water used in manufacturing processes such as the electronics industry, chemical industry, precision parts industry, food industry, etc. that use pure water, and cleaning processes.
Moreover, it is always required to be sterile pure water. However, in the pure water production / supply system in these fields, pure water produced by one device is used for various purposes. For example, in the chemical industry, there is a tendency to increase in size and complexity because it is used for preparation, cleaning, preparation, and dilution. Especially if the existing equipment is modified or added.

このように大型化・複雑化していく純水製造・供給シス
テムにおいては、多数のタンク、バルブ、ポンプ、フィ
ルター、長距離配管を使用し配設しているため、生菌が
繁殖しやすい環境を提供している。また純水供給ライン
においても、分岐配管が多くなり、純水が溜って流れに
くい個所、いわゆる溜まりができやすく、そこに生菌が
繁殖しやすいようになっている。特に運転停止時は、純
水が流れなくなり、全体が溜まりとなって生菌がなお繁
殖し易くなる。したがってその対策として、純水製造装
置と各ユースポイント(純水を使用現場へ分配、供給す
る個所)のあいだには、純水製造装置の純水タンクへ純
水を戻す循環ラインを設け、純水の定常的な循環流を通
して常に滞留部分がないようにして生菌の発生を押さえ
るようにしたり、あるいは各ユースポイントに再濾過系
を個々に設けたりするところもある。
In a pure water production and supply system that is becoming larger and more complex in this way, a large number of tanks, valves, pumps, filters, and long-distance pipes are used and installed, creating an environment in which live bacteria can easily propagate. providing. Also, in the pure water supply line, the number of branch pipes is increased, and a portion where pure water is hard to flow and flows, that is, a so-called pool is easily formed, and live bacteria are easily propagated there. In particular, when the operation is stopped, pure water does not flow, and the whole is pooled so that live bacteria can easily propagate. Therefore, as a countermeasure, a circulation line that returns pure water to the pure water tank of the pure water production device is installed between the pure water production device and each point of use (where pure water is distributed and supplied to the site of use). In some cases, there is no retention part through a constant circulating flow of water so as to suppress the generation of viable bacteria, or a re-filtration system is individually provided at each use point.

さらに純水供給ラインは定期的に殺菌されなければなら
ない。従来の一般的な殺菌操作としては、1〜3重量%
の過酸化水素の水溶液で1時間処理、または1〜5ppm
の次亜塩素酸ナトリウムの水溶液で1時間処理が用いら
れる。こうした方法では、殺菌時に多量の廃液が排出さ
れ、その処分が必要なことや、過酸化水素や次亜塩素酸
ナトリウムのような強力な酸化剤は、純水製造装置中の
イオン交換樹脂・メンブレンフィルター等を酸化分解し
てしまう可能性もある。また殺菌終了時には多量の純水
で系内を洗って殺菌剤の排出を行なわなければならない
という欠点があった。
Furthermore, the pure water supply line must be sterilized regularly. As a conventional general sterilization operation, 1 to 3% by weight
Treatment with an aqueous solution of hydrogen peroxide for 1 hour, or 1-5ppm
Treatment with an aqueous solution of sodium hypochlorite for 1 hour is used. In such a method, a large amount of waste liquid is discharged at the time of sterilization, and it is necessary to dispose of it, and strong oxidizers such as hydrogen peroxide and sodium hypochlorite cannot be removed from the ion exchange resin / membrane in the pure water production equipment. There is also a possibility that the filters will be decomposed by oxidation. In addition, there is a drawback that the sterilizing agent must be discharged by washing the inside of the system with a large amount of pure water at the end of sterilization.

その他、スチーム殺菌法や熱水殺菌法などもあるが、そ
のエネルギー効率等を考えればあまり経済的な方法とは
いえない。
Other methods such as steam sterilization and hot water sterilization are not very economical methods considering their energy efficiency.

こうしたことから大型化・複雑化するプロセスの中で、
大型化・複雑化した純水製造・供給システムからでも、
常に無菌純水を供給するには、多大のエネルギー・コス
ト・労力・時間を必要としていた。
Due to these factors, in the process of becoming larger and more complex,
Even from a large and complicated pure water production and supply system,
A great deal of energy, cost, labor, and time were required to constantly supply sterile pure water.

本発明は高純度水を製造し供給するシステムにおいて、
前述のような従来方法による殺菌の多くの問題を解決
し、操作が簡単でしかも大型化・複雑化した装置におい
ても常に無菌純水を供給できる方法を提供することを目
的とするものである。
The present invention is a system for producing and supplying high-purity water,
It is an object of the present invention to solve many problems of sterilization by the conventional method as described above, and to provide a method which can always supply sterile pure water even in an apparatus which is easy to operate and which is large and complicated.

〔課題を解決するための手段〕[Means for Solving the Problems]

本発明者は前記の目的を達成するために種々研究を行っ
た。
The present inventor has conducted various studies to achieve the above object.

古くからフッ素化合物は、歯のう蝕防止剤・木材防腐剤
として使われ、生体に対して特異な活性をしめすことが
知られている。こうした知見をもとに、純水中で増殖し
うる生菌例えばPseudomonas属菌又は真菌等について、
純水中に存在させる各種の水溶性化合物成分の菌増殖に
対する影響を、化合物濃度を変え詳細に検討した結果、
純水中に微量のフッ素イオンの存在により驚異的な殺菌
効果が得られることを見出だした。すなわち純水中に存
在させるフッ素イオン濃度を10ppm以下の程度の低レベ
ルに保っても生菌が死滅し、さらに1ppm以下の程度の
低レベルでも生菌が増殖しない静菌状態の得られること
が明らかになった。こうした極微量のフッ素イオンの殺
菌メカニズムについては、定かでないが、水素イオン濃
度(pH)や酸化還元を利用した一般的な殺菌能力とは異な
るフッ素イオン独特の生理的薬効を示したものと推察さ
れる。
Fluorine compounds have long been used as dental caries preventives and wood preservatives, and are known to exhibit specific activity against the living body. Based on these findings, for live bacteria that can grow in pure water, such as Pseudomonas spp. Or fungi,
As a result of detailed examination of the effect of various water-soluble compound components present in pure water on bacterial growth, the compound concentration was examined,
It has been found that the presence of a trace amount of fluoride ions in pure water has a surprising bactericidal effect. That is, even if the concentration of fluoride ions present in pure water is maintained at a low level of 10 ppm or less, the viable bacteria die, and even at a low level of 1 ppm or less, a viable bacteriostatic state in which viable bacteria do not grow can be obtained. It was revealed. The sterilization mechanism of such trace amount of fluoride ion is not clear, but it is presumed that it showed a unique physiological effect of fluoride ion, which is different from general sterilization ability using hydrogen ion concentration (pH) and redox. It

更に、純水中で生菌の繁殖を防止するに有効なフッ素イ
オン濃度はそのフッ素イオンを与える使用化合物の種類
によって変り、フッ化水素酸(HF)では0.1ppm以上の、好
適には0.1〜100ppmの濃度で有効であるが、水溶性のフ
ッ化物塩、例えばフッ化アルカリ金属又はフッ化アンモ
ニウムでは1ppm以上の、好適には1〜100ppmの濃度で
有効であることが認められた。しかし、100ppmより実質
的に高い濃度では、殺菌効果は得られるけれども、純水
として言い得なくなる場合もあり、またフッ化化合物の
十分な脱除に手間がかかることにもなる。
Furthermore, the concentration of fluorine ions effective in preventing the growth of viable bacteria in pure water varies depending on the type of compound used to give the fluorine ions, and in hydrofluoric acid (HF), 0.1 ppm or more, preferably 0.1 to While effective at a concentration of 100 ppm, it has been found that water soluble fluoride salts, such as alkali metal fluorides or ammonium fluoride, are effective at concentrations of 1 ppm or greater, preferably 1-100 ppm. However, if the concentration is substantially higher than 100 ppm, the sterilizing effect can be obtained, but in some cases it cannot be said as pure water, and it takes time and effort to sufficiently remove the fluorinated compound.

従って、第1の本発明によると、純水供給ライン内にお
ける供給される純水中に0.1〜100ppmの濃度のフッ化水
素酸を存在させ、こうして純水中に存在させたフッ素イ
オンにより生菌を繁殖させないで純水を無菌状態に保ち
ながら供給することを特徴とする無菌純水の供給方法が
提供される。
Therefore, according to the first aspect of the present invention, hydrofluoric acid having a concentration of 0.1 to 100 ppm is present in the pure water supplied in the pure water supply line, and thus the viable bacteria are produced by the fluorine ions present in the pure water. There is provided a method for supplying aseptic pure water, characterized in that pure water is supplied while being kept aseptic without being propagated.

また、第2の本発明によると、純水供給ライン内におけ
る供給される純水中に1〜100ppmの濃度の水溶性フッ化
物塩を存在させ、こうして純水中に存在させたフッ素イ
オンにより生菌を繁殖させないで純水を無菌状態に保ち
ながら供給することを特徴とする無菌純水の供給方法が
提供される。
Further, according to the second aspect of the present invention, the water-soluble fluoride salt having a concentration of 1 to 100 ppm is present in the pure water supplied in the pure water supply line, and thus it is generated by the fluorine ions present in the pure water. Provided is a method for supplying aseptic pure water, which is characterized in that pure water is supplied while keeping the sterilized state without propagating bacteria.

上記の本発明方法によって供給される無菌純水は、この
中に含まれる微量のフッ化化合物の存在が許容できる用
途で利用できる。また、所望ならば、利用前に完全にフ
ッ化化合物を例えばイオン交換樹脂によって、除去する
こともできる。本発明の方法において、フッ化水素酸又
はフッ化物塩は、これの水溶液の形で純水中に添加され
て純水中に存在させられ、その添加個所は純水製造・供
給システムに付属する純水供給ライン、特に純水供給配
管上の任意な適当な個所でよい。また、水溶性フッ化物
塩の水溶性とは、1〜100ppmの濃度で水に溶け得る程度
の溶解度をもつことを意味し、適当なフッ化物塩の例に
は、アルカリ金属、例えばナトリウム、カリウム、リチ
ウムのフッ化物、アルカリ土類金属、例えばカルシウ
ム、マグネシウムのフッ化物、フッ化アンモニウム、鉄
又はその他の適当な金属のフッ化物、等がある。
The sterile pure water supplied by the above-described method of the present invention can be used for applications in which the presence of a trace amount of a fluorinated compound contained in the pure water is acceptable. If desired, the fluorinated compound can also be completely removed before use, for example with an ion exchange resin. In the method of the present invention, hydrofluoric acid or a fluoride salt is added to pure water in the form of an aqueous solution thereof to be present in pure water, and the addition point is attached to the pure water production / supply system. It may be a pure water supply line, particularly any suitable position on the pure water supply pipe. Further, the water solubility of a water-soluble fluoride salt means that it has a solubility that can be dissolved in water at a concentration of 1 to 100 ppm, and examples of suitable fluoride salts include alkali metals such as sodium and potassium. , Lithium fluoride, alkaline earth metals such as calcium, magnesium fluoride, ammonium fluoride, iron or other suitable metal fluorides, and the like.

以下に、1〜100ppmの極めて低い濃度で用いた各種の化
合物の殺菌乃至静菌作用を調べるために試験を行った。
すなわち、普通寒天液体培地の1000倍希釈液に各種化合
物を加え、所定の化合物濃度とした試験液を作る。純水
製造装置からサンプリングした純水試料を微孔膜に通し
て集菌した純水から分離の生菌を試験液に適当量加え
(初期の生菌接種数は5×104個/mlとした)、4日間3
0℃で静置培養したのち、繁殖後の生菌数をMF法で測
定した(生菌数測定方法はJIS K0101による)。
Below, tests were carried out in order to investigate the bactericidal or bacteriostatic action of various compounds used at extremely low concentrations of 1 to 100 ppm.
That is, various compounds are added to a 1000-fold diluted solution of normal agar liquid medium to prepare a test solution having a predetermined compound concentration. An appropriate amount of viable bacteria isolated from pure water collected by passing a pure water sample sampled from a pure water producing device through a microporous membrane was added to the test solution (the initial viable cell inoculum count was 5 × 10 4 cells / ml). Yes) 4 days 3
After static culture at 0 ° C., the viable cell count after breeding was measured by the MF method (viable cell count measurement method according to JIS K0101).

測定した生菌数値を次の表1に要約して示す。The measured live cell counts are summarized in Table 1 below.

上記の表1では、殺菌効果が認められたものは+印、増
殖が認められたものは−印、静菌効果の認められたもの
は±印で示している。これによれば、HFの殺菌効果は
明らかである。しかしながらHClを10ppmの濃度で加えて
も殺菌効果が見出だせず、HFの滅菌作用は単にpHの変
動によるものではなくフッ素イオン特有のものであるこ
とがわかる。またフッ化物塩類であっても、その添加量
によっては殺菌効果のあることがわかる。塩の場合も同
様に、NaClを100ppmの濃度で加えても殺菌効果は見いだ
せず、従って、フッ化物塩から生じたフッ素イオンによ
るものである。
In Table 1 above, those showing a bactericidal effect are indicated by +, those showing proliferation are indicated by a-, and those showing a bacteriostatic effect are indicated by ±. According to this, the bactericidal effect of HF is clear. However, even if HCl was added at a concentration of 10 ppm, no bactericidal effect was found, and it can be seen that the sterilizing action of HF is specific to fluoride ions, not merely due to pH fluctuation. Further, it can be seen that even a fluoride salt has a bactericidal effect depending on the added amount. Similarly, in the case of salt, no bactericidal effect was found even when NaCl was added at a concentration of 100 ppm, and it is therefore due to the fluoride ion generated from the fluoride salt.

表1は100ppmのフッ化水素酸及び50〜100ppmの水溶性フ
ッ化物塩の殺菌乃至静菌作用を示しているが、本試験は
普通寒天液体培地の1000倍希釈液を用いて生菌の挙動を
調べているために、非常に生菌の繁殖しやすい環境で殺
菌乃至静菌作用を調べたものといえる。従って、純水に
はほとんど生菌の栄養源となる物質が含まれていないた
めに、フッ化水素酸及び水溶性フッ化物塩は更に低濃度
でも、純水内において十分に殺菌乃至静菌効果を示すも
のであり、フッ化水素酸では0.1〜100ppmで有効であ
り、水溶性フッ化物塩では1〜100ppmで有効であること
を本発明者は知見している。
Table 1 shows the bactericidal or bacteriostatic action of 100 ppm hydrofluoric acid and 50 to 100 ppm of water-soluble fluoride salt. In this test, the behavior of viable bacteria was determined by using a 1000-fold dilution of ordinary agar liquid medium. Therefore, it can be said that the bactericidal or bacteriostatic action was investigated in an environment in which live bacteria are prone to propagate. Therefore, since pure water contains almost no substance that serves as a nutrient source for viable bacteria, hydrofluoric acid and water-soluble fluoride salts have sufficient sterilizing or bacteriostatic effects in pure water even at lower concentrations. The present inventors have found that hydrofluoric acid is effective at 0.1 to 100 ppm and water-soluble fluoride salt is effective at 1 to 100 ppm.

以下に本発明の方法を応用した純水製造・供給システム
を示す添付図面の第1図について本発明を具体的に説明
する。
The present invention will be specifically described below with reference to FIG. 1 of the accompanying drawings showing a pure water production / supply system to which the method of the present invention is applied.

第1図は本発明の方法を応用される装置の一例を示す純
水供給ラインを含むシステムの図解図である。これらの
図において原水は純水製造装置1内に設置された前処理
装置2、逆浸透膜装置3、2床3塔型イオン交換装置
4、紫外線殺菌装置5、逆浸透膜装置3′を経て精製さ
れて一次純水となり、一次純水は一次純水貯槽6に蓄え
られる。ついでさらに高純度な純水にするためにカート
リッジ型ポリシャー(イオン交換樹脂装置)7、紫外線
殺菌装置5′、メンブレンフィルター8、限外濾過膜装
置9を経て最終的な高純度水となる。高純度水は純水供
給ライン10を通って各ユースポイント11に送られる。純
水供給ライン管10の適当な個所からリターンライン13を
返して純水が分流されて純水貯槽6に戻される。
FIG. 1 is a schematic view of a system including a pure water supply line showing an example of an apparatus to which the method of the present invention is applied. In these figures, raw water is passed through a pretreatment device 2, a reverse osmosis membrane device 3, a two-bed three-column type ion exchange device 4, an ultraviolet sterilization device 5, and a reverse osmosis membrane device 3 ′ installed in a pure water producing device 1. It is purified into primary pure water, and the primary pure water is stored in the primary pure water storage tank 6. Then, in order to obtain pure water of higher purity, the final high-purity water is passed through a cartridge type polisher (ion exchange resin device) 7, an ultraviolet sterilizer 5 ', a membrane filter 8 and an ultrafiltration membrane device 9. The high-purity water is sent to each use point 11 through the pure water supply line 10. The return line 13 is returned from an appropriate portion of the pure water supply line pipe 10, and the pure water is branched and returned to the pure water storage tank 6.

第1の本発明では、純水製造装置の直後の配管、すなわ
ち純水供給ライン管内の適当な個所以降の純水中のフッ
素イオン濃度が0.1〜100ppmとなるように、フッ化水素
酸の水溶液を例えば薬注ポンプなどを用いて純水供給ラ
イン10の適当な個所の注入管12から断続又は連続的に注
入し、均一に混合して純水中のフッ素イオン濃度が常に
一定になるようにする。純水中に存在させるフッ素イオ
ンの量は系内で発生する菌種、菌濃度、温度、滞留時間
等の要因により調整すればよいが、フッ素イオン濃度10
0ppmを越えて添加しても装置材料に対する腐食等への影
響が考えられる。また、0.1ppmを下回っては、殺菌効果
が薄くなる。
In the first aspect of the present invention, an aqueous solution of hydrofluoric acid is provided so that the fluorine ion concentration in the pure water after a suitable position in the pure water supply line pipe, that is, in the pure water supply line pipe is 0.1 to 100 ppm. Is intermittently or continuously injected from the injection pipe 12 at an appropriate point of the pure water supply line 10 using, for example, a chemical injection pump, and uniformly mixed so that the fluorine ion concentration in pure water is always constant. To do. The amount of fluoride ions to be present in pure water may be adjusted depending on factors such as bacterial species generated in the system, concentration of bacteria, temperature and residence time.
Even if added in excess of 0 ppm, it may have an effect on corrosion of equipment materials. Also, if it is less than 0.1 ppm, the bactericidal effect becomes weak.

なお、第2の本発明では、フッ化水素酸の代りに、フッ
化水素酸の塩(フッ化物塩)、例えばNH4F、NaF、KF等の
水溶液をこれら塩の濃度が1〜100ppmになるように注入
される。
In the second aspect of the present invention, instead of hydrofluoric acid, a salt of hydrofluoric acid (fluoride salt), for example, an aqueous solution of NH 4 F, NaF, KF or the like is added to adjust the concentration of these salts to 1 to 100 ppm. To be injected.

各ユースポイントでは、微量のフッ素イオンが存在して
も問題のない場合はそのまま使用し、フッ素イオンが純
水の使用目的上で不都合な場合には、第1図中のNo.3ユ
ースのようにイオン交換樹脂を充填したポリシャー14な
どを設置してこれに通水してフッ素イオン除去後、使用
すればよい。また実施例では純水製造装置の出口配管内
の純水中に直接にフッ化水素酸もしくはその塩類の水溶
液を注入しているが、一旦貯槽を設けてそこからポンプ
もしくは圧送によってユースポイントへ供給することも
できる。
At each use point, if there is no problem even if a small amount of fluorine ion exists, use it as it is. If fluorine ion is inconvenient for the purpose of using pure water, use it as No. 3 use in Fig. 1. A polisher 14 or the like filled with an ion exchange resin may be installed and water may be passed through this to remove fluorine ions, and then used. Further, in the embodiment, the aqueous solution of hydrofluoric acid or its salt is directly injected into the pure water in the outlet pipe of the pure water producing apparatus, but once the storage tank is provided, it is supplied to the point of use by pumping or pumping. You can also do it.

本発明では純水製造・供給システムの途中に、例えば薬
注ポンプ等を介して、純水中に微量のフッ素イオンを存
在させるだけで殺菌効果、静菌効果が生じ、たとえ大型
化複雑化した装置においても常に無菌状態の純水を供給
することができる。
In the present invention, a sterilizing effect and a bacteriostatic effect are produced only by allowing a small amount of fluorine ions to exist in pure water during the pure water production / supply system, for example, via a chemical injection pump, etc. Even in the apparatus, pure water in a sterile state can be constantly supplied.

次に本発明を、以下の実施例及び比較例に基づいて説明
する。
Next, the present invention will be described based on the following examples and comparative examples.

実施例1 第1図に示した純水供給ラインをもつ4m3/hの純水製
造・供給システムにおいて以下の条件で運転した。
Example 1 A pure water production / supply system of 4 m 3 / h having the pure water supply line shown in FIG. 1 was operated under the following conditions.

従来法による初期殺菌: 一次純水貯槽6内に1%のH2O2水溶液ができるように35
%H2O2水溶液を一次純水に加えて調整した。
Initial sterilization by conventional method: To make 1% H 2 O 2 aqueous solution in the primary pure water storage tank 6 35
The% H 2 O 2 aqueous solution was added to the primary pure water for adjustment.

カートリッジ型ポリシャー(イオン交換樹脂装置)7の
入口側と出口側の接続導管を該ポリシャーから外し、両
者を直結して、これによってポリシャー7を通らないバ
イパス接続部を形成した後、サークルライン及びユース
ポイントへの純水供給ライン10へ貯槽6から1%のH2O2
溶液を送りながら、各ユースポイントNo.1、2、4及
び5でドレンを行った。1時間にわたって上記運転を行
った後、さらに1時間ライン内にH2O2溶液を滞留させて
ラインの内壁面を浸積した。その後、各ラインを純水で
洗浄して、H2O2溶液を排出、No.1ユースポイントで水
の比抵抗17.5MΩ・cmで生菌数0個/100mlであること
を確認した。
After removing the connecting conduits on the inlet side and the outlet side of the cartridge type polisher (ion exchange resin device) 7 from the polisher and directly connecting the two, thereby forming a bypass connection part that does not pass through the polisher 7, a circle line and a youth 1% H 2 O 2 from storage tank 6 to pure water supply line 10 to the point
Drain was performed at each use point No. 1, 2, 4 and 5 while sending the solution. After the above operation was carried out for 1 hour, the H 2 O 2 solution was retained in the line for an additional 1 hour to immerse the inner wall surface of the line. Then, each line was washed with pure water, the H 2 O 2 solution was discharged, and it was confirmed that the specific resistance of water was 17.5 MΩ · cm and the number of viable cells was 0/100 ml at the No. 1 point of use.

菌数測定頻度及び方法: 純水の製造と供給を再開し、5日に1度、No.1ユース
ポイントから純水試料を抜出すサンプリングを行い、純
水100ml当たりの生菌数を、純水試料についてメンブレ
ンフィルター法を用いた生菌数測定法(JIS K0101)で測
定した。
Bacteria count frequency and method: Restart the production and supply of pure water, and once every 5 days, sample the pure water sample from the No. 1 point of use and perform sampling to determine the viable cell count per 100 ml of pure water. The water sample was measured by the viable cell count method (JIS K0101) using the membrane filter method.

純水製造の運転方法と本発明実施法: 上記の初期殺菌を行った後に、一次純水貯槽6には4m3
/hの率で一次純水を供給させる。
Operation method for pure water production and method for practicing the present invention: After the above initial sterilization, 4 m 3 is stored in the primary pure water storage tank 6.
The primary pure water is supplied at a rate of / h.

また、一次純粋貯槽から一次純水を8m3/hでカートリ
ッジ型ポリシャー(カートリッジ型混床イオン交換樹脂
装置)、紫外線殺菌装置、メンブレンフィルター、限外
濾過膜を通過して通水し精製して高純度純水にする。そ
の中で約4m3/hの高純度純水は再び一次純水貯槽に戻
り、約4m3/hの高純度純水が純水供給ライン10を通っ
てユースポインへ送られる。
In addition, primary pure water from the primary pure storage tank was passed through a cartridge type polisher (cartridge type mixed bed ion exchange resin device), an ultraviolet sterilizer, a membrane filter and an ultrafiltration membrane at 8 m 3 / h to purify the purified water. Use high-purity pure water. Returning to the high-purity pure water primary pure water storage tank again about 4m 3 / h in the high purity deionized water at about 4m 3 / h is fed to use point through the pure water supply line 10.

本実施例では、ユースポイントへの純水供給ライン10
と、一次純水貯槽へ戻るラインの分岐管13の接続点から
後段の位置において、例えば注入管12から高純度純水中
のフッ素イオン濃度が1ppmとなるようにフッ化水素酸
水溶液を薬注ポンプを介してライン10内の水に連続に注
入した。
In this embodiment, the pure water supply line 10 to the point of use is used.
Then, at a position subsequent to the connection point of the branch pipe 13 of the line returning to the primary pure water storage tank, for example, a hydrofluoric acid aqueous solution is chemically injected from the injection pipe 12 so that the fluorine ion concentration in the high-purity pure water becomes 1 ppm. Water in line 10 was continuously injected via a pump.

上記の初期殺菌後に純水の製造と供給を上記の要領で続
け且つフッ素イオンの補給も続け、5日目毎にNo.1ユ
ースポイントから純水試料を抜出し、その中の生菌数を
上記の方法で測定した。その結果の生菌数を添付図面の
第2図に示した。No.1のユースポイントで90日間以上
にわたって無菌純水を供給することができた。
After the above-mentioned initial sterilization, the pure water production and supply were continued in the same manner as above, and the fluoride ion was also replenished. Was measured by the method. The resulting viable cell count is shown in FIG. 2 of the accompanying drawings. Aseptic pure water could be supplied for 90 days or more at the No. 1 point of use.

比較例1 実施例1と全く同様の初期殺菌及び純水の製造と供給の
運転をおこなったが、HFの注入を省略した。
Comparative Example 1 The same initial sterilization and pure water production and supply operations as in Example 1 were performed, but the injection of HF was omitted.

ユースポイントNo.1からサンプリングした純水試料に
ついて、実施例1と同様に生菌数を測定し、その結果を
第3図に示す。初期殺菌後、5日目で生菌が確認され、
その後著しく増加した。
With respect to the pure water sample sampled from the use point No. 1, the viable cell count was measured in the same manner as in Example 1, and the result is shown in FIG. After the initial sterilization, live bacteria were confirmed on the 5th day,
After that, it increased remarkably.

実施例2 実施例1と全く同様の初期殺菌後に、供給ライン10内の
純水中のフッ化水素濃度が100ppmに維持されるようにフ
ッ化水素酸水溶液を実施例1と同様に補給した。
Example 2 After the same initial sterilization as in Example 1, an aqueous hydrofluoric acid solution was replenished in the same manner as in Example 1 so that the hydrogen fluoride concentration in the pure water in the supply line 10 was maintained at 100 ppm.

初期殺菌後の90日間以上にわたりNo.1ユースポイント
で無菌純水を供給することができた。
Aseptic pure water could be supplied at the No. 1 point of use over 90 days after the initial sterilization.

実施例3 供給ライン10内に純水中のフッ化アンモニウム濃度が50
ppmとなるようにフッ化アンモニウム水溶液を注入して
実施例1の方法を反復した。
Example 3 In the supply line 10, the concentration of ammonium fluoride in pure water was 50.
The method of Example 1 was repeated by injecting an ammonium fluoride aqueous solution so that the concentration would be ppm.

No.1ユースポイントで抜出した純水試料について生菌
数を測定した結果を第4図に示す。初期殺菌後の90日間
以上にわたり無菌純水を供給することができた。
Fig. 4 shows the results of measuring the viable cell count of the pure water sample extracted at No. 1 point of use. Aseptic pure water could be supplied for 90 days or more after the initial sterilization.

実施例4 供給ライン10内に純水中のフッ化ナトリウム濃度が50pp
mとなるようにNaF水溶液を注入して実施例1の方法を反
復した。
Example 4 Sodium fluoride concentration in pure water was 50 pp in the supply line 10.
The method of Example 1 was repeated by injecting an aqueous NaF solution so as to obtain m.

No.1ユースポイントで抜出した純水試料について生菌
数を測定した結果を第5図に示す。90日間以上にわたり
無菌純水を供給することができた。
Fig. 5 shows the result of measuring the viable cell count of the pure water sample extracted at No. 1 point of use. Aseptic pure water could be supplied for more than 90 days.

実施例5 供給ライン10内に純水中のフッ化水素濃度が0.1ppmとな
るようにフッ化水素酸水溶液を注入して実施例1の方法
を反復した。
Example 5 The method of Example 1 was repeated by injecting an aqueous solution of hydrofluoric acid into the supply line 10 so that the concentration of hydrogen fluoride in pure water was 0.1 ppm.

No.1ユースポイントで抜出した純水試料について生菌
数を測定した結果を第6図に示す。初期殺菌後の90日間
以上にわたり無菌純水を供給することができた。
Fig. 6 shows the result of measuring the viable cell count of the pure water sample extracted at No. 1 point of use. Aseptic pure water could be supplied for 90 days or more after the initial sterilization.

実施例6 供給ライン10内に純水中のフッ化アンモニウム濃度が1
ppmとなるようにフッ化アンモニウム水溶液を注入して
実施例1の方法を反復した。
Example 6 In the supply line 10, the concentration of ammonium fluoride in pure water was 1
The method of Example 1 was repeated by injecting an ammonium fluoride aqueous solution so that the concentration would be ppm.

No.1ユースポイントで抜出した純水試料について生菌
数を測定した結果を第7図に示す。初期殺菌後の90日間
以上にわたり無菌純水を供給することができた。
Fig. 7 shows the result of measuring the viable cell count of the pure water sample extracted at No. 1 point of use. Aseptic pure water could be supplied for 90 days or more after the initial sterilization.

実施例7 供給ライン10内に純水中のフッ化ナトリウム濃度が1pp
mとなるようにNaF水溶液を注入して実施例1の方法を反
復した。
Example 7 The sodium fluoride concentration in pure water in the supply line 10 was 1 pp.
The method of Example 1 was repeated by injecting an aqueous NaF solution so as to obtain m.

No.1ユースポイントで抜出した純水試料について生菌
数を測定した結果を第8図に示す。90日間以上にわたり
無菌純水を供給することができた。
Fig. 8 shows the result of measuring the viable cell count of the pure water sample extracted at No. 1 point of use. Aseptic pure water could be supplied for more than 90 days.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明方法を応用され得る純水供給ラインを有
する純水製造・供給システムのフロー図解図である。第
2図、第4図乃至第7図及び第8図は夫々に本発明の実
施例1、3乃至6及び7で得られた無菌の供給純水中の
生菌数の経時変化を示す曲線図であり、第3図は本発明
を行わなかった比較例1で得られた供給純水中の生菌数
(対数表示)の経時変化を示す曲線図である。
FIG. 1 is a flow diagram of a pure water production / supply system having a pure water supply line to which the method of the present invention can be applied. 2, FIG. 4 to FIG. 7 and FIG. 8 are curves respectively showing the changes with time of the viable cell count in the aseptic pure water supplied in Examples 1, 3 to 6 and 7 of the present invention. FIG. 3 is a curve diagram showing the change with time of the viable cell count (logarithmic display) in the pure water supplied, which was obtained in Comparative Example 1 in which the present invention was not performed.

フロントページの続き (72)発明者 太田 嘉治 東京都千代田区大手町2丁目1番1号 野 村マイクロ・サイエンス株式会社内 (72)発明者 澤田 晃一 東京都千代田区大手町2丁目1番1号 野 村マイクロ・サイエンス株式会社内 (56)参考文献 特開 昭63−221889(JP,A) 特開 昭50−125548(JP,A) 特開 昭57−15885(JP,A)Front page continuation (72) Inventor Kaji Ota 2-1-1 Otemachi, Chiyoda-ku, Tokyo Nomura Micro Science Co., Ltd. (72) Inventor Koichi Sawada 2-1-1 Otemachi, Chiyoda-ku, Tokyo Nomura Micro Science Co., Ltd. (56) Reference JP-A 63-221889 (JP, A) JP-A 50-125548 (JP, A) JP-A 57-15885 (JP, A)

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】純水供給ライン内における供給される純水
中に0.1〜100ppmの濃度のフッ化水素酸を存在させ、こ
うして純水中に存在させたフッ素イオンにより、生菌を
繁殖させないで純水を無菌状態に保ちながら供給するこ
とを特徴とする無菌純水の供給方法。
1. A pure water supplied in a pure water supply line is allowed to contain hydrofluoric acid at a concentration of 0.1 to 100 ppm, and the viable bacteria are not propagated by the fluorine ions thus existing in the pure water. A method for supplying aseptic pure water, characterized in that pure water is supplied while being kept sterile.
【請求項2】純水供給ライン内における供給される純水
中に1〜100ppmの濃度の水溶性フッ化物塩を存在させ、
こうして純水中に存在させたフッ素イオンにより生菌を
繁殖させないで純水を無菌状態に保ちながら供給するこ
とを特徴とする無菌純水の供給方法。
2. A water-soluble fluoride salt having a concentration of 1 to 100 ppm is present in pure water supplied in the pure water supply line,
A method for supplying aseptic pure water, characterized in that pure water is supplied while keeping the sterilized state without allowing viable bacteria to propagate by the fluorine ions present in the pure water.
JP1105885A 1989-03-06 1989-04-27 Aseptic pure water supply method Expired - Lifetime JPH0630765B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1105885A JPH0630765B2 (en) 1989-03-06 1989-04-27 Aseptic pure water supply method
US07/888,429 US5282967A (en) 1989-03-06 1992-05-28 Method for feeding germ-free pure water

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP5215489 1989-03-06
JP1-52154 1989-03-06
JP1105885A JPH0630765B2 (en) 1989-03-06 1989-04-27 Aseptic pure water supply method

Publications (2)

Publication Number Publication Date
JPH0316692A JPH0316692A (en) 1991-01-24
JPH0630765B2 true JPH0630765B2 (en) 1994-04-27

Family

ID=26392771

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Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JPH0630765B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105517960A (en) * 2013-10-04 2016-04-20 栗田工业株式会社 Ultrapure water production apparatus
CN110589770A (en) * 2019-10-29 2019-12-20 浙江森田新材料有限公司 Preparation method of electronic-grade hydrofluoric acid

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50125548A (en) * 1974-03-22 1975-10-02
JPS5715885A (en) * 1980-06-30 1982-01-27 Nippon Rensui Kk Method for recovery of high-purity waste water of washing
JPS63221889A (en) * 1987-03-12 1988-09-14 Akuasu Kk Method for preventing generation of bacteria in recirculation aqueous system

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