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JPH0632326B2 - Light emitting element - Google Patents
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JPH0632326B2 - Light emitting element - Google Patents

Light emitting element

Info

Publication number
JPH0632326B2
JPH0632326B2 JP13188584A JP13188584A JPH0632326B2 JP H0632326 B2 JPH0632326 B2 JP H0632326B2 JP 13188584 A JP13188584 A JP 13188584A JP 13188584 A JP13188584 A JP 13188584A JP H0632326 B2 JPH0632326 B2 JP H0632326B2
Authority
JP
Japan
Prior art keywords
light
inp
layer
wavelength
light emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13188584A
Other languages
Japanese (ja)
Other versions
JPS6113681A (en
Inventor
眞澄 竹島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP13188584A priority Critical patent/JPH0632326B2/en
Publication of JPS6113681A publication Critical patent/JPS6113681A/en
Publication of JPH0632326B2 publication Critical patent/JPH0632326B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/32Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/04Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/041Optical pumping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/32Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/323Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/3235Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength longer than 1000 nm, e.g. InP-based 1300 nm and 1500 nm lasers
    • H01S5/32391Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength longer than 1000 nm, e.g. InP-based 1300 nm and 1500 nm lasers based on In(Ga)(As)P

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
  • Led Devices (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、オプティカルファイバによる光情報通信に用
いられる発光素子に関するものである。
TECHNICAL FIELD The present invention relates to a light emitting device used for optical information communication using an optical fiber.

(従来例の構成とその問題点) 近年、発光素子とオプティカルファイバの組み合わせに
よる光通信は高度情報技術の中心的役割を果しつつあ
る。長距離通信用オプティカルファイバに最適の光の波
長は1.3〜1.6μmであり、これ以外のオプティカルファ
イバの光伝達特性は著しく悪くなる。従って、任意の波
長の光を用いてのファイバ通信は不可能であり、これが
直接画像通信の障害となる。
(Structure of Conventional Example and Problems Thereof) In recent years, optical communication using a combination of a light emitting element and an optical fiber is playing a central role in advanced information technology. The optimum light wavelength for an optical fiber for long-distance communication is 1.3 to 1.6 μm, and the optical transfer characteristics of other optical fibers are significantly deteriorated. Therefore, fiber communication using light of an arbitrary wavelength is impossible, which is an obstacle to direct image communication.

(発明の目的) 本発明は上記欠点に鑑み、任意の光を1.3〜1.6μmの波
長の光に効率よく変換することのできる発光素子を提供
するものである。
(Object of the Invention) In view of the above-mentioned drawbacks, the present invention provides a light emitting device capable of efficiently converting arbitrary light into light having a wavelength of 1.3 to 1.6 μm.

(発明の構成) この目的を達成するために本発明の発光素子は、p-InP
基板の上にp-In0.53Ga0.47Asと、さらにその上に低不純
物濃度のp-InPを形成した3層から構成される。この構
成によって、最上層のInP側から照射された短波長の光
によってInPの中に生成されたキャリヤの中、電子はIn
0.53Ga0.47Asの層内に集められ、そこで効率よくIn0.53
Ga0.47Asに固有の波長1.6μmの光を放出することを可
能にする。
(Structure of the Invention) In order to achieve this object, the light-emitting device of the present invention comprises p-InP
It is composed of three layers in which p-In 0.53 Ga 0.47 As and a low impurity concentration p-InP are further formed on the substrate. With this configuration, the electrons in the carriers generated in InP by the short-wavelength light emitted from the InP side of the uppermost layer are In
0.53 Ga 0.47 As is collected in the layer, where In 0.53
It is possible to emit light having a wavelength of 1.6 μm, which is unique to Ga 0.47 As.

(実施例の説明) 以下本発明の一実施例について、図面を参照しながら説
明する。第1図は本発明の一実施例における発光素子の
構成を示すものである。第1図において、1はp-InP、
2はp-In0.53Ga0.47As、3はp-InP、4はAl膜、5は照
射光、6は放出光である。1,2,3の各層の厚さは1
μmで、アクセプタ濃度はそれぞれ、1017cm-3、5×10
17cm-3、1018cm-3である。以上の構成の発光素子につい
て、以下その動作を説明する。第2図(a)はこの実施例
の半導体の部分の断面図を、第2図(b)はエネルギー図
を示す。第2図(a)において、1はp-InP、2はp-In0.53
Ga0.47As、3はp-InPを示し、第2図(b)において、5は
照射光、6は放出光、7は電導帯端エネルギー、8はフ
ェルミ準位、9は価電子帯端エネルギー、10は電子井
戸、11は正孔井戸である。Al膜は、膜面に到達した放出
光6を反射して表面に取り出すためのものである。InP
の禁制帯幅はIn0.53Ga0.47Asの禁制帯幅よりも大きく、
InPのアクセプタ準位はIn0.53Ga0.47Asアクセプタ準位
よりも高いエネルギー位置にある。そのために、p-InP
とp-In0.53Ga0.47Asとが接触すると、InPの表面付近の
正孔はIn0.53Ga0.47Asの表面の極く近傍に流入して、熱
平衡に到達する。その結果として、第2図(b)で示した
エネルギー図が得られる。即ち、ショットキ接触に類似
の障壁と空乏層がInPの表面に形成される。今、層1にI
nPの禁制帯幅以上のエネルギーの光を照射すると、InP
の中に生成された電子−正孔対の中で電子は空乏層の電
界によって電子井戸10に集められる。その電子は井戸11
内の正孔と再結合し、In0.53Ga0.47Asの禁制帯幅のエネ
ルギーの光を放出する。この光の波長が1.6μmであ
り、かくして短波長の照射光は所望の長波長光に変換さ
れる。
(Description of Embodiments) An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows the structure of a light emitting device in one embodiment of the present invention. In FIG. 1, 1 is p-InP,
2 is p-In 0.53 Ga 0.47 As, 3 is p-InP, 4 is an Al film, 5 is irradiation light, and 6 is emitted light. The thickness of each layer 1, 2, 3 is 1
μm, acceptor concentration is 10 17 cm -3 , 5 × 10 5, respectively
They are 17 cm -3 and 10 18 cm -3 . The operation of the light emitting device having the above structure will be described below. FIG. 2 (a) is a sectional view of the semiconductor portion of this embodiment, and FIG. 2 (b) is an energy diagram. In Fig. 2 (a), 1 is p-InP and 2 is p-In 0.53.
Ga 0.47 As, 3 indicates p-InP, and in FIG. 2 (b), 5 is irradiation light, 6 is emission light, 7 is conduction band edge energy, 8 is Fermi level, and 9 is valence band edge energy. , 10 are electron wells, and 11 are hole wells. The Al film is for reflecting the emitted light 6 reaching the film surface and extracting it to the surface. InP
The bandgap of is larger than the bandgap of In 0.53 Ga 0.47 As,
The acceptor level of InP is at a higher energy position than the In 0.53 Ga 0.47 As acceptor level. For that purpose, p-InP
When p-In 0.53 Ga 0.47 As comes into contact with the p-In 0.53 Ga 0.47 As, holes near the surface of InP flow into the vicinity of the surface of In 0.53 Ga 0.47 As and reach thermal equilibrium. As a result, the energy diagram shown in FIG. 2 (b) is obtained. That is, a barrier and a depletion layer similar to the Schottky contact are formed on the surface of InP. Now on layer 1 I
When irradiating light with energy above the forbidden band of nP, InP
In the electron-hole pairs generated in the electron, electrons are collected in the electron well 10 by the electric field of the depletion layer. The electron is a well 11
It recombines with the holes inside and emits light with an energy band gap of In 0.53 Ga 0.47 As. The wavelength of this light is 1.6 μm, and thus the irradiation light of short wavelength is converted into desired long wavelength light.

本発明の発光素子においては、層1のアクセプタ濃度は
十分に低く、層の厚さは適当に薄くしてあるために欠乏
層は全体に広がる。その結果、層1内で生成された電子
−正孔対は表面で、非発光再結合することなく電界によ
って電子は層2に集められ蓄積される。各層の形成技術
はレーザダイオード製作の際のエピタキシャル成長技術
として十分高度化されている。従って、各層の界面にお
ける欠陥は少なく、電子の欠陥における損失は少ない。
In the light emitting device of the present invention, the acceptor concentration of the layer 1 is sufficiently low, and the thickness of the layer is appropriately thin so that the depletion layer spreads throughout. As a result, the electron-hole pairs generated in layer 1 are collected on the surface and accumulated in layer 2 by the electric field without non-radiative recombination. The technique for forming each layer is sufficiently advanced as an epitaxial growth technique for manufacturing a laser diode. Therefore, there are few defects at the interface of each layer, and there is little loss in electron defects.

一方、層2での非発光オージェ再結合は、正孔濃度1018
cm-3以下では余り重要でない。かくして井戸の中に蓄積
された電子は正孔と効率よく発光再結合する。
On the other hand, non-radiative Auger recombination in Layer 2 results in a hole concentration of 10 18
Less important than cm -3 . Thus, the electrons accumulated in the well are efficiently radiatively recombined with the holes.

照射された光の中にIn0.53Ga0.47Asの禁制帯幅とInPの
禁制帯幅の中間の値のエネルギーの光が含まれておれ
ば、それは層2に吸収されて電子−正孔対を生成し、1.
6μmの光を放出する。
If the irradiated light contains light with an energy value intermediate between the forbidden band width of In 0.53 Ga 0.47 As and the forbidden band width of InP, it is absorbed by the layer 2 and the electron-hole pair is absorbed. Generate and 1.
It emits 6 μm light.

In0.53Ga0.47Asのみを用いても波長変換はできるが、そ
の場合に短波長の光の吸収は自由表面近傍の薄い層に集
中し、その結果、生成された電子−正孔対の非発光損失
は大きい。本発明の如くにIn0.53Ga0.47Asの外側にInP
の層を設け、その層全体に高電界を作りつけることは、
自由表面の不利を解消し、高効率の波長変換を可能にす
る。
Although wavelength conversion can be performed using only In 0.53 Ga 0.47 As, absorption of short wavelength light is concentrated in a thin layer near the free surface, resulting in non-emission of generated electron-hole pairs. The loss is large. As in the present invention, InP is formed outside In 0.53 Ga 0.47 As.
To create a high electric field in the whole layer,
It eliminates the disadvantage of free surface and enables highly efficient wavelength conversion.

なお、使用する半導体はp型でもn型でもよく、また、
各層の材料はInPとIn0.53Ga0.47Asに限られることな
く、他の適当な材料の組み合わせも可能であり、広範囲
な自由度がある。
The semiconductor used may be p-type or n-type, and
The material of each layer is not limited to InP and In 0.53 Ga 0.47 As, but other suitable materials can be combined, and there is a wide range of degrees of freedom.

(発明の効果) 以上のように本発明は、1.3〜1.6μmの波長帯幅に相当
する0.7〜1.0evの禁制帯幅の半導体を、より広い禁制帯
幅をもつ半導体の2層で挟むことによつて短波長の光を
1.3〜1.6μmの波長の光に効率よく変換することがで
き、オプティカルファイバに基づく光通信分野での実用
性は大なるものがある。
As described above, according to the present invention, a semiconductor having a forbidden band width of 0.7 to 1.0 ev corresponding to a wavelength band of 1.3 to 1.6 μm is sandwiched between two layers of semiconductors having a wider forbidden band width. Light of short wavelength
It can be efficiently converted into light with a wavelength of 1.3 to 1.6 μm and has great practicality in the optical communication field based on optical fibers.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の発光素子の構成、第2図(a)はその断
面図、第2図(b)はエネルギー図を示す。 1……p-InP、2……p-In0.53Ga0.47As、3……p-InP、
4……Al膜、5……照射光、6……放出光、7……電導
帯端エネルギー、8……フェルミ準位、9……価電子帯
端エネルギー。
FIG. 1 shows the structure of the light emitting device of the present invention, FIG. 2 (a) is a sectional view thereof, and FIG. 2 (b) is an energy diagram. 1 …… p-InP, 2 …… p-In 0.53 Ga 0.47 As, 3 …… p-InP,
4 ... Al film, 5 ... Irradiation light, 6 ... Emission light, 7 ... Conduction band edge energy, 8 ... Fermi level, 9 ... Valence band edge energy.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】0.7〜1.0eVの禁制帯幅を有する一導電型の
半導体を、前記禁制帯幅より広い禁制帯幅を有する前記
半導体と同一導電型の半導体の2層で挾むことにより3
層構造とし、1.6μm以下の波長の光を照射することに
より1.3〜1.6μmの波長の光を放出するようにした発光
素子。
1. A semiconductor of one conductivity type having a forbidden band width of 0.7 to 1.0 eV is sandwiched by two layers of a semiconductor of the same conductivity type as the semiconductor having a forbidden band width wider than the forbidden band width.
A light emitting device having a layered structure, which emits light having a wavelength of 1.3 to 1.6 μm by irradiating light having a wavelength of 1.6 μm or less.
JP13188584A 1984-06-28 1984-06-28 Light emitting element Expired - Lifetime JPH0632326B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13188584A JPH0632326B2 (en) 1984-06-28 1984-06-28 Light emitting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13188584A JPH0632326B2 (en) 1984-06-28 1984-06-28 Light emitting element

Publications (2)

Publication Number Publication Date
JPS6113681A JPS6113681A (en) 1986-01-21
JPH0632326B2 true JPH0632326B2 (en) 1994-04-27

Family

ID=15068417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13188584A Expired - Lifetime JPH0632326B2 (en) 1984-06-28 1984-06-28 Light emitting element

Country Status (1)

Country Link
JP (1) JPH0632326B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5073805A (en) * 1989-02-06 1991-12-17 Optoelectronics Technology Research Corporation Semiconductor light emitting device including a hole barrier contiguous to an active layer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529358B2 (en) * 1972-01-25 1977-03-15

Also Published As

Publication number Publication date
JPS6113681A (en) 1986-01-21

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