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JPH0636454B2 - Semiconductor laser wavelength stabilizer - Google Patents
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JPH0636454B2 - Semiconductor laser wavelength stabilizer - Google Patents

Semiconductor laser wavelength stabilizer

Info

Publication number
JPH0636454B2
JPH0636454B2 JP61093563A JP9356386A JPH0636454B2 JP H0636454 B2 JPH0636454 B2 JP H0636454B2 JP 61093563 A JP61093563 A JP 61093563A JP 9356386 A JP9356386 A JP 9356386A JP H0636454 B2 JPH0636454 B2 JP H0636454B2
Authority
JP
Japan
Prior art keywords
amplifier
semiconductor laser
wavelength
light
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61093563A
Other languages
Japanese (ja)
Other versions
JPS62250682A (en
Inventor
敏嗣 植田
英治 荻田
克哉 池澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP61093563A priority Critical patent/JPH0636454B2/en
Publication of JPS62250682A publication Critical patent/JPS62250682A/en
Publication of JPH0636454B2 publication Critical patent/JPH0636454B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/06Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068Stabilisation of laser output parameters
    • H01S5/0683Stabilisation of laser output parameters by monitoring the optical output parameters
    • H01S5/0687Stabilising the frequency of the laser

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)

Description

【発明の詳細な説明】 <産業上の利用分野> 本発明は、主として光通信,光応用計側,光情報処理用
光源として用いられる半導体レーザに関し,更に詳しく
はレーザ波長の安定化およびスペクトル線幅の狭帯域化
を同時に実現した半導体レーザ波長安定化装置に関す
る。
DETAILED DESCRIPTION OF THE INVENTION <Industrial field of application> The present invention relates to a semiconductor laser mainly used as a light source for optical communication, optical application meter side, optical information processing, and more specifically, stabilization of laser wavelength and spectral line. The present invention relates to a semiconductor laser wavelength stabilization device that simultaneously realizes a narrow band.

<従来の技術> 半導体レーザは,小形,高効率,波長可変,低価格,高
速動作が可能等の利点があり,また,従来0.7〜1.
6μm程度の波長域で発振するレーザが少なかったこと
などから精密計測,高分解能分光等への応用も期待され
ている。これらへの応用に対して,半導体レーザに要求
される特性の中で特に重要なものは,高いスペクトル純
度と周波数の安定性で,この2つの要素は測定の感度や
分解能に大きく影響する。
<Prior Art> Semiconductor lasers have advantages such as small size, high efficiency, variable wavelength, low cost, and high speed operation.
Since there are few lasers that oscillate in the wavelength range of about 6 μm, it is expected to be applied to precision measurement and high resolution spectroscopy. For these applications, particularly important characteristics required for semiconductor lasers are high spectral purity and frequency stability, and these two factors greatly affect the sensitivity and resolution of measurement.

従来,半導体レーザの周波数安定化装置の一つとして第
10図に示すファブリペローエタロンを用いて構成した
ものが知られている。
Conventionally, as one of the frequency stabilizers for semiconductor lasers, a device using a Fabry-Perot etalon shown in FIG. 10 is known.

第10図において、1は半導体レーザであり,定電流源
7からの電流により駆動される。この半導体レーザ1か
らのレーザ光はレンズ2によりコリメートされ,絞り板
3,オプティカル・アイソレータ4を通ってビームスプ
リッタ5により2方向に分岐される。分岐された一方の
光は基準となるファベリペロー・エタロン(以下エタロ
ンという)6に導かれ,エタロン6の波長−透過率特性
に応じてパワーの減衰を受けて出射する。このエタロン
6から出射した光は絞り板3aを通ってフォトダイオー
ド8で光電変換され,その電気信号Vは割算器10に
入力される。一方ビームスプリッタ5により分岐された
他方のレーザ光は鏡13で反射してフォトダイオード9
に入射され,ここで光電変換された電気信号Vは同じ
く割算器10に入力され,フォトダイオード8からの出
力Vがフォトダイオード9からの出力Vにより割算
される。この割算器10からの出力は差動増幅器11の
反転入力端子側に入力され、基準入力電圧13との差が
増幅される。そして差動増幅器11の出力により制御回
路12の出力が制御され,この出力に基づいて定電流源
7の出力制御が行われる。
In FIG. 10, 1 is a semiconductor laser, which is driven by a current from a constant current source 7. Laser light from the semiconductor laser 1 is collimated by a lens 2, passes through a diaphragm plate 3, an optical isolator 4, and is split into two directions by a beam splitter 5. One of the branched lights is guided to a reference Fabry-Perot etalon (hereinafter referred to as an etalon) 6, where it is attenuated in power according to the wavelength-transmittance characteristic of the etalon 6 and is emitted. The light emitted from the etalon 6 is photoelectrically converted by the photodiode 8 through the diaphragm plate 3a, and its electric signal V B is input to the divider 10. On the other hand, the other laser beam split by the beam splitter 5 is reflected by the mirror 13 and reflected by the photodiode 9
The electric signal V A which is incident on the optical signal and is photoelectrically converted therein is also input to the divider 10, and the output V B from the photodiode 8 is divided by the output V A from the photodiode 9. The output from the divider 10 is input to the inverting input terminal side of the differential amplifier 11, and the difference from the reference input voltage 13 is amplified. The output of the control circuit 12 is controlled by the output of the differential amplifier 11, and the output of the constant current source 7 is controlled based on this output.

上記構成により定電流源7からの電流を制御し,エタロ
ン6の波長−透過率特性上の一点に半導体レーザ1の発
振波長を固定し安定化を図っている。
With the above configuration, the current from the constant current source 7 is controlled, and the oscillation wavelength of the semiconductor laser 1 is fixed at one point on the wavelength-transmittance characteristic of the etalon 6 for stabilization.

第11図は注入電流を帰還量として,帰還帯域を広くし
てスペクトル線幅の狭帯域化を図った従来例を示す構成
説明図である。図において第10図と同一要素には同一
符号が付してある。
FIG. 11 is a configuration explanatory view showing a conventional example in which a feedback band is widened by using an injection current as a feedback amount to narrow a spectral line width. In the figure, the same elements as those in FIG. 10 are designated by the same reference numerals.

第11図において,30は半導体レーザ1の温度を一定
に保つ温度コントローラである。定電流源7により駆動
された半導体レーザ1はレンズ2,絞り板3,オプティ
カル・アイソレータ4を通ってビームスプリッタ5で2
方向に分離される。
In FIG. 11, reference numeral 30 is a temperature controller for keeping the temperature of the semiconductor laser 1 constant. A semiconductor laser 1 driven by a constant current source 7 passes through a lens 2, an aperture plate 3, an optical isolator 4 and a beam splitter 5 to a beam splitter 2.
Separated into directions.

このビームスプリッタ5を透過した光は出力光として利
用される。一方ビームスプリッタ5で反射した光はエタ
ロン6に入射する。エタロン6からは波長−透過率特性
に応じてパワーの減衰を受けた光が出射するが,この光
はレンズ2,絞り板3を経てアバランシェ・フォト・ダ
イオード22に入射する。このアバランシェ・フォト・
ダイオード22で光電変換された電気信号は高周波増幅
器24で増幅され,高周波増幅器24からの出力はコン
デンサ25を経て半導体レーザ1に帰還される。
The light transmitted through the beam splitter 5 is used as output light. On the other hand, the light reflected by the beam splitter 5 enters the etalon 6. The etalon 6 emits light whose power is attenuated according to the wavelength-transmittance characteristic, and this light enters the avalanche photodiode 22 through the lens 2 and the diaphragm plate 3. This avalanche photo
The electric signal photoelectrically converted by the diode 22 is amplified by the high frequency amplifier 24, and the output from the high frequency amplifier 24 is fed back to the semiconductor laser 1 via the capacitor 25.

上記構成によれば,コンデンサ25を介して周波数帯域
の高い交流信号を帰還しているのでスペクトル線幅を狭
帯域化することができる。
According to the above configuration, since the AC signal having a high frequency band is fed back through the capacitor 25, the spectral line width can be narrowed.

<発明が解決しようとする問題点> しかしながら、上記第10図に示す従来例によれば,割
算器を用いるので構成が複雑になり,帰還の帯域を広く
出来ないのでスペクトル線幅の狭帯域化が困難になると
いう問題があり,第11図に示す従来例ではスペクトル
線幅の狭帯域化のためには有効であるが,波長の安定化
には有効でないため実用化には問題がある。本発明は上
記従来技術の問題点に鑑みて成されたもので,帰還量と
して応答速度の速い量である注入電流を選び帰還の帯域
を広げることにより,波長の安定化とスペクトル線幅の
狭帯域化を行うと共に帰還ループの安定化を図った半導
体レーザ波長安定化装置を提供することを目的とする。
<Problems to be Solved by the Invention> However, according to the conventional example shown in FIG. 10, since the divider is used, the configuration is complicated, and the feedback band cannot be widened. However, the conventional example shown in FIG. 11 is effective in narrowing the spectral line width, but is not effective in stabilizing the wavelength, and therefore has a problem in practical use. . The present invention has been made in view of the above-mentioned problems of the prior art, and stabilizes the wavelength and narrows the spectral line width by selecting an injection current having a high response speed as the feedback amount and widening the feedback band. It is an object of the present invention to provide a semiconductor laser wavelength stabilizing device that achieves band-passing and stabilizes a feedback loop.

<問題点を解決するための手段> 恒温槽内に配置された半導体レーザと、この半導体レー
ザからの光を2方向に分岐するビームスプリッタと,こ
のビームスプリッタからの一方の光を電気信号に変換す
る第1の光電変換素子と,この第1の光電変換素子から
の電気信号を増幅する第1の増幅器と,前記ビームスプ
リッタで分岐した他方の光が入射する波長選択素子と,
この波長選択素子からの出射光を電気信号に変換する第
2の光電変換素子と,前記第1の増幅器からの電気信号
と前記第2の光電変換素子からの電気信号を入力してそ
の差を積分する積分器と,この積分器からの出力を第2
の増幅器を介して前記半導体レーザの注入電流に帰還す
るように構成し,前記積分器と第2増幅器に広い帯域の
ものを使用し,前記第1の増幅器の位相遅れが小さい範
囲に帯域を制限して前記積分器と第2増幅器の帯域より
も前記第1の増幅器の帯域を狭くすることにより,スペ
クトル線幅の狭帯域化を図ると共に制御系の安定化を図
ったものである。
<Means for Solving Problems> A semiconductor laser arranged in a constant temperature bath, a beam splitter for splitting light from the semiconductor laser into two directions, and one light from the beam splitter is converted into an electric signal. A first photoelectric conversion element, a first amplifier that amplifies an electric signal from the first photoelectric conversion element, and a wavelength selection element on which the other light branched by the beam splitter enters.
A second photoelectric conversion element that converts the light emitted from the wavelength selection element into an electric signal, the electric signal from the first amplifier and the electric signal from the second photoelectric conversion element are input, and the difference between them is calculated. The integrator that integrates and the output from this integrator
The amplifier is configured to be fed back to the injection current of the semiconductor laser, and a wide band is used for the integrator and the second amplifier, and the band is limited to a range in which the phase delay of the first amplifier is small. Then, the band of the first amplifier is made narrower than the band of the integrator and the second amplifier, whereby the spectral line width is narrowed and the control system is stabilized.

<実施例> 第1図は本発明の半導体レーザ波長安定化装置の一実施
例を示す回路構成図(a),および制御系ブロツク図
(b)である。第1図(a)において,LDは半導体レ
ーザ・ダイオードであり(以下LDという),このLD
は温度変動による波長の変動を抑制するために図示しな
い恒温槽内に配置され,温度コントローラTCによりそ
の温度が一定に制御されている。そして,波長安定化回
路はあらかじめ決められた定電流で駆動され恒温槽内の
温度があらかじめ決められた温度になったことを判別す
る温度判別器(図示せず)の信号をうけたのち動作する
ように構成されている。LDから出た光はレンズLで平
行光にコリメートされ,ハーフミラーHMで帰還用に使
用する反射光と実用光としての透過光に分岐される。ハ
ーフミラーHMで反射された帰還用の光は1/2λ板Z
を通ってビームスプリッタPBSで分岐され,このビー
ムスプリッタPBSを透過した一方の光は第1の光電変
換素子(例えばフォトダイオード)PDで電気信号に
変換されたのち第1の増幅器Aの反転入力端子に入力
される。一方ビームスプリッタPBSで反射した光は波
長選択素子(例えばエタロン,回折格子,ガスセル等)
Eに入射され,その波長−透過率特性に応じてパワーの
減衰を受けた光は第2の光電変換素子PDで電気信号
に変換されたのち,第1の増幅器Aからの出力ととも
に帰還抵抗Rおよび帰還コンデンサCを有する積分器
Bの反転入力端子に入力される。この積分器の出力は抵
抗Rを経て,抵抗Rを経たVinからの出力ととも
に第2の増幅器Aを構成するトランジスタTのベー
スに接続される。トランジスタTのコレクタ側は抵抗
R5を経てLDに接続されており,エミッタ側は抵抗R
を経て接地されている。
<Embodiment> FIG. 1 is a circuit configuration diagram (a) and a control system block diagram (b) showing an embodiment of a semiconductor laser wavelength stabilizing device of the present invention. In FIG. 1 (a), LD is a semiconductor laser diode (hereinafter referred to as LD).
Is placed in a thermostatic chamber (not shown) in order to suppress wavelength fluctuations due to temperature fluctuations, and its temperature is controlled to be constant by a temperature controller TC. Then, the wavelength stabilization circuit is driven by a predetermined constant current and operates after receiving a signal from a temperature discriminator (not shown) for discriminating that the temperature inside the constant temperature bath has reached the predetermined temperature. Is configured. The light emitted from the LD is collimated by the lens L into parallel light, and split by the half mirror HM into reflected light used for feedback and transmitted light as practical light. The return light reflected by the half mirror HM is a ½λ plate Z
After passing through the beam splitter PBS, one of the light beams transmitted through the beam splitter PBS is converted into an electric signal by the first photoelectric conversion element (for example, photodiode) PD 1 and then the first amplifier A 1 is inverted. It is input to the input terminal. On the other hand, the light reflected by the beam splitter PBS is a wavelength selection element (eg etalon, diffraction grating, gas cell, etc.)
The light that is incident on E and is attenuated in power according to its wavelength-transmittance characteristic is converted into an electric signal by the second photoelectric conversion element PD 2 , and is then fed back together with the output from the first amplifier A 1. It is input to the inverting input terminal of an integrator B having a resistor R 0 and a feedback capacitor C. The output of this integrator is connected via a resistor R 2 to the base of a transistor T r that constitutes a second amplifier A 2 together with the output from Vin via a resistor R 3 . The collector of the transistor T r is connected to the LD via the resistor R5, the emitter-side resistor R
It is grounded via 4 .

上記構成において,帰還されたベース電圧に基づいてL
Dに駆動電流Iが流れる。
In the above configuration, L based on the fed back base voltage
The drive current I flows through D.

第1(b)図は上記回路構成図の制御系のブロツク図
で,それぞれの記号は以下の通りである。, Λ() ;LDの電流−波長特性 P ;LDの電流−光パワー変換係数 D,D ;1/2λ板とビームスプリッタPBSに
より分配される出射光パワーの分配率 0<D+D≦1 K ;光電変換素子PD,PDの感度 G ;光電変換素子PD後段の第1の増幅器
の利得 T ;波長選択素子Eのスループット 0<T<1 g(λ) ;波長選択素子Eの透過率特性(最大透過
率が1となるように規格化したもの) G ;第2の増幅器A(トランジスタ回路)
の電圧−電流変換係数 上記の記号を用いるとレーザ光の波長(λ)と半導体レ
ーザに注入する電流Iの関係は次式のようになる。
FIG. 1 (b) is a block diagram of the control system of the above circuit configuration diagram, and the respective symbols are as follows. , Λ ( I ); Current-wavelength characteristic of LD P; Current-optical power conversion coefficient of LD D 1 , D 2 ; Distribution ratio of outgoing light power distributed by 1/2 λ plate and beam splitter PBS 0 <D 1 + D 2 ≦ 1 K 0 ; sensitivity of photoelectric conversion elements PD 1 and PD 2 G 1 ; gain of first amplifier A 1 at the subsequent stage of photoelectric conversion element PD 1 ; throughput of wavelength selection element E 0 <T <1 g ( λ); Transmittance characteristic of the wavelength selection element E (standardized so that the maximum transmittance is 1) G 2 ; Second amplifier A 2 (transistor circuit)
Voltage-current conversion coefficient of the above, using the above symbols, the relationship between the wavelength (λ) of the laser light and the current I injected into the semiconductor laser is as follows.

λ=Λ() …(1) I=G・Vin +G{−(1+sCR)/(sC)} ・(GPI −Kg(λ)TDPI)…(2) ここで,sは複素数(ωj) (1),(2)からIを消去すると, λ= Λ(G・Vin/[1 +{(1+sCR) /(sC)}GP(G −TDg(λ))])…(3) ここで,LDの発振波長λは注入電流Iに対して図2に
一点鎖線で示すような特性を持つので,着目する電流付
近を実線で示すような直線(イ)で表わすことができ
る。
λ = Λ ( I ) (1) I = G 2 · Vin + G 2 {-(1 + sCR 0 ) / (sC)} ・ (G 1 K 0 D 1 PI −K 0 g (λ) TD 2 PI) ... (2) where s is the complex number (ωj) (1), if I is eliminated from (2), λ = Λ (G 2 · Vin / [1 + {(1 + sCR 0 ) / (sC)} G 2 K 0 P (G 1 D 1 −TD 2 g (λ))]) (3) Here, since the oscillation wavelength λ of the LD has the characteristics shown by the alternate long and short dash line in FIG. 2 with respect to the injection current I, The vicinity of the current of interest can be represented by a straight line (a) as shown by a solid line.

この実線は次式により表わされる。This solid line is represented by the following equation.

Λ(=ΛI+λ ここで,λは第2図における仮定した直線と縦軸が交
わる点の値 (3)式より [1+{(1+sCR)/(sC)}GP (G −TDg(λ))](λ−λ) =Λ・G・Vin …
(4) 波長が一定値に制御されている状態ではs=0として GP(G−TDg(λ)) ・(λ−λ)=0 …(5) (5)式が成立するためには G≠0,K≠0,P≠0であるから λ=λ またはTDg(λ)=G λ=λのときI=0 つまり発光してない状態であるのでλ≠λと考えてよ
い。従って, g(λ)=(G)/(TD)…(6) ここで,第1図に示す第1の増幅器Aの利得Gの出
力と第2の光電変換素子PDの出力との差出力をIer
r とし,(6)式を満足する波長をλとすると,g
(λ)が単調増加の領域では第1の増幅器Aの出力と
第2の光電変換素子PDの出力の関係は第3図に示す
ようなものとなる。
Λ ( I = ΛI + λ 0 where λ 0 is the value at the point where the assumed straight line and the vertical axis in Fig. 2 intersect (3) [1 + {(1 + sCR 0 ) / (sC)} G 2 K 0 P ( G 1 D 1 −TD 2 g (λ))] (λ−λ 0 ) = Λ · G 2 · Vin ...
(4) as s = 0 in the state where the wavelength is controlled to a constant value G 2 K 0 P (G 1 D 1 -TD 2 g (λ)) · (λ-λ 0) = 0 ... (5) ( To satisfy the expression (5), G 2 ≠ 0, K 0 ≠ 0, and P ≠ 0. Therefore, when λ = λ 0 or TD 2 g (λ) = G 1 D 1 λ = λ 0 , I = 0 In other words, since it is in a state of not emitting light, it may be considered that λ ≠ λ 0 . Therefore, g (λ) = (G 1 D 1 ) / (TD 2 ) ... (6) Here, the output of the gain G 1 of the first amplifier A 1 shown in FIG. 1 and the second photoelectric conversion element PD Ier the difference output from the output of 2
and r, and the λ f the wavelength, thereby satisfying the expression (6), g
In the region where (λ) monotonically increases, the relationship between the output of the first amplifier A 1 and the output of the second photoelectric conversion element PD 2 is as shown in FIG.

第3図から分るように, λ<λのときIerr >0となり このとき,Iは減少しλは小, λ>λのときIerr <0 となり このとき,Iが増加しλは大となる。As can be seen from FIG. 3, when λ <λ f , I err> 0, then I decreases and λ is small, and when λ> λ f , I err <0, I increases and λ is large. Becomes

従って正帰還となるため波長をλに安定化することが
できない。
Therefore, since positive feedback occurs, the wavelength cannot be stabilized at λ f .

また,g(λ)が単調減少の領域では第1の増幅器の出
力と第2の光電変換素子PDの出力の関係は第4図に
示すようなものとなる。
Further, in the region where g (λ) monotonously decreases, the relationship between the output of the first amplifier and the output of the second photoelectric conversion element PD 2 is as shown in FIG.

第4図から分かるように, λ<λのときIeff <0 となり このとき,Iが増加しλは大, λ>λのときIeff > 0となり, このとき,Iが減少しλは小となる。As can be seen from FIG. 4, when λ <λ f , Ieff <0, and then I increases and λ is large, and when λ> λ f , Ieff> 0, and I decreases and λ is small. Becomes

従って負帰還となり,波長をλに安定化することがで
る。つまり,波長をg(λ)の特定の位置に安定化させ
ることができる。
Therefore, it becomes a negative feedback, and the wavelength can be stabilized at λ f . That is, the wavelength can be stabilized at a specific position of g (λ).

第6図は前記第3図と第4図を合成し,縦軸を1/TD
にスケーリングしたものである。第6図において,λ
近傍を直線で近似し, g(λ)=α(λ−λe) (α<0) ここで,αは直線の傾き λは近似した直線が横軸と交わる点の値 λ=(G)/(TDα)+λ となる。
FIG. 6 is a combination of FIG. 3 and FIG. 4, with the vertical axis representing 1 / TD.
It is scaled to 2 . In Fig. 6, λ
The neighborhood of f is approximated by a straight line, g (λ) = α (λ−λe) (α <0) where α is the slope of the straight line λ e is the value at the point where the approximated straight line intersects the horizontal axis λ f = ( G 1 D 1 ) / (TD 2 α) + λ e .

実際には,g(λ)は第5図に示すような周期性を持つ
ので,Vinによりλの初期値を目標の1周期の範囲内に
設定すれば,安定化される波長は一つとなる。
Actually, since g (λ) has the periodicity shown in FIG. 5, if the initial value of λ is set within the range of the target one period by Vin, only one wavelength will be stabilized. .

ここで,(6)式を変形すると G/(Tg(λ)D)=1 となるが,これは第10図に示す従来例のV/V
一定となるように帰還をかける場合と等価である。従っ
て割算器を使用しないで割算器を用いた場合と同様な制
御が可能となる。
Here, when the formula (6) is modified, G 1 D 1 / (Tg (λ) D 2 ) = 1, which is V B / V A = of the conventional example shown in FIG.
This is equivalent to applying feedback so that it is constant. Therefore, it is possible to perform the same control as when the divider is used without using the divider.

また,積分器Bと第2の増幅器Aに広い帯域のものを
使用するエタロン透過光パワー変動の高周波成分も帰還
されるので,スペクトル線幅の狭帯域化を実現すること
ができる。
Further, since the high frequency component of the power variation of the etalon transmitted light, which uses a wide band, is fed back to the integrator B and the second amplifier A 2 , the spectral line width can be narrowed.

上記構成によれば,波長はエタロンの特性(7式におけ
るα,λ)と差動前の利得(7式におけるG
,T,D)のみで決まり,注入電流と波長を結ぶ
係数Λや光パワーおよび入力値にも依存しない。(ただ
し,エタロンの特性g(λ)が周期性を持つため,特定
の一周期を選択するためにはVinで入力値を設定する
ことが必要) 第1の光電変換素子PD1から第1の増幅器Aを経て
積分器Bに入力される信号は第2の光電変換素子PD2
から直接積分器Bに入力される信号に比較して第1の増
幅器A(G)で生ずる位相遅れがある。この位相遅
れ量が大きくなると,LDの光強度の変動に対して位相
遅れの小さい信号と位相遅れの大きい信号の差を帰還す
ることになるので,帰還ループが不安定となる。この帰
還ループを安定なものにするためには第1の増幅器の位
相遅れ量を小さくする必要があり,そのため,第1の増
幅器Aの位相遅れが小さい範囲に帯域を制限する。
According to the above configuration, the wavelength is the characteristic of the etalon (α, λ e in Equation 7) and the gain before differential (G 1 in Equation 7,
It is determined only by D 1 , T, D 2 ) and does not depend on the coefficient Λ connecting the injection current and the wavelength, the optical power, or the input value. (However, since the characteristic g (λ) of the etalon has a periodicity, it is necessary to set the input value with Vin in order to select a specific period.) First photoelectric conversion element PD1 to first amplifier The signal input to the integrator B via A 1 is the second photoelectric conversion element PD 2
There is a phase delay that occurs in the first amplifier A 1 (G 1 ) compared to the signal input directly to the integrator B from. When this phase delay amount becomes large, the difference between the signal having a small phase delay and the signal having a large phase delay is fed back to the fluctuation of the light intensity of the LD, and the feedback loop becomes unstable. In order to make this feedback loop stable, it is necessary to reduce the amount of phase delay of the first amplifier. Therefore, the band is limited to the range where the phase delay of the first amplifier A 1 is small.

第7図は他の実施例を示す回路構成図(a),および制
御系ブロック図(b)である。第7図(a),(b)に
おいて,第1図と同一要素には同一符号を付して重複す
る説明は省略するが,この例においては第1,第2の光
電変換素子PDとPDの向きが逆に取付けられてい
る。従って,図(b)に示すブロック図のうち第1の増
幅器A(G)の出力と第2の光電変換素子PD
らの出力の記号の正負が第1図(b)とは逆になる。こ
のため,波長によるエタロンの透過率の変化率αがα>
0の場合に波長安定化が可能となる。
FIG. 7 is a circuit configuration diagram (a) and a control system block diagram (b) showing another embodiment. 7 (a) and 7 (b), the same elements as those in FIG. 1 are designated by the same reference numerals and duplicate description is omitted, but in this example, the first and second photoelectric conversion elements PD 1 and The orientation of PD 2 is reversed. Therefore, in the block diagram shown in FIG. 2B, the sign of the output of the first amplifier A 1 (G 1 ) and the sign of the output from the second photoelectric conversion element PD 2 are opposite to those in FIG. 1B. become. Therefore, the rate of change α of the transmittance of the etalon depending on the wavelength is α>
When 0, wavelength stabilization is possible.

第8図は更に他の実施例を示す回路構成図(a),およ
び制御系ブロック図(b)である。第8図(a),
(b)において,第1図と同一要素には同一符号を付し
て重複する説明は省略するが,この例においてはエタロ
ンの代りに回折格子Uを用いたものである。回折格子は
波長に応じて光パワーを強めあう方向が異なるので,入
射光,回折格子,観測点を固定すると入射光の波長に対
して第9図に示すような特性を得ることができる。従っ
て第1図に示す場合と同様な動作で波長の安定化および
スペクトル線幅の狭帯域化を図ることができる。
FIG. 8 is a circuit configuration diagram (a) and a control system block diagram (b) showing still another embodiment. FIG. 8 (a),
In (b), the same elements as those in FIG. 1 are designated by the same reference numerals and the duplicate description is omitted, but in this example, the diffraction grating U is used instead of the etalon. Since the diffraction grating has different directions in which the optical powers are strengthened according to the wavelength, if the incident light, the diffraction grating, and the observation point are fixed, the characteristics shown in FIG. 9 can be obtained for the wavelength of the incident light. Therefore, it is possible to stabilize the wavelength and narrow the spectral line width by the same operation as that shown in FIG.

<発明の効果> 以上,実施例とともに具体的に説明したように本発明に
よれば,DC〜高周波にわたる帰還を同時に行うように
したので,波長安定化とスペクトル線幅狭帯域化を簡単
な構成で同時に実現することができる。また,温度コン
トローラと半導体レーザ安定化回路とを別々に動作さ
せ,装置が所定の温度に達したのち動作させるようにし
たので,一旦電源をOFFした後,再び電源をONして
も,同じ波長にLDの発振波長を安定化することができ
る。
<Effects of the Invention> According to the present invention as described above in detail with reference to the embodiments, the feedback from DC to high frequency is performed at the same time. Therefore, the wavelength stabilization and the narrowing of the spectral line width can be easily performed. Can be realized at the same time. Further, since the temperature controller and the semiconductor laser stabilizing circuit are separately operated so that the device is operated after reaching a predetermined temperature, even if the power is turned off and then turned on again, the same wavelength is obtained. Moreover, the oscillation wavelength of the LD can be stabilized.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の半導体レーザ波長安定化装置の一実施
例を示す回路構成図(a),および制御系ブロック図
(b),第2図は半導体レーザダイオードの電流波長特
性を示す図,第3図,第4図はg(λ)が単調増加およ
び単調減少の領域における第1の増幅器Aの出力と第
2の光電変換素子PDの出力の関係を示す図,第5図
はg(λ)のλに対する周期性を示す関係図,第6図は
λ近傍を直線で近似した状態を示す関係図,第7図,
第8図は他の実施例を示す図,第9図は回折格子を使用
した場合の波長(λ)と光強度の関係を示す図,第10
図,第11図は従来例を示す構成説明図である。 A……第1の増幅器,A……第2の増幅器,B……
積分器,E……波長選択素子,L……レンズ,LD……
半導体レーザダイオード,PD,PD……光電変換
素子,PBS……ビームスプリッタ,R〜R……抵
抗,Z……1/2λ板。
FIG. 1 is a circuit configuration diagram (a) showing an embodiment of a semiconductor laser wavelength stabilizing device of the present invention, and a control system block diagram (b), and FIG. 2 is a diagram showing current wavelength characteristics of a semiconductor laser diode, 3 and 4 are diagrams showing the relationship between the output of the first amplifier A 1 and the output of the second photoelectric conversion element PD 2 in the region where g (λ) monotonically increases and monotonically decreases, and FIG. 5 shows FIG. 6 is a relationship diagram showing the periodicity of g (λ) with respect to λ, FIG. 6 is a relationship diagram showing a state in which the vicinity of λ f is approximated by a straight line, FIG. 7,
FIG. 8 is a diagram showing another embodiment, FIG. 9 is a diagram showing a relationship between wavelength (λ) and light intensity when a diffraction grating is used,
FIG. 11 and FIG. 11 are configuration explanatory views showing a conventional example. A 1 ... First amplifier, A 2 ... Second amplifier, B ...
Integrator, E ... Wavelength selection element, L ... Lens, LD ...
Semiconductor laser diode, PD 1 , PD 2 ... Photoelectric conversion element, PBS ... Beam splitter, R 1 to R 5 ... Resistor, Z ... 1 / 2λ plate.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】恒温槽内に配置された半導体レーザと,こ
の半導体レーザからの光を2方向に分岐するビームスプ
リッタと,このビームスプリッタからの一方の光を電気
信号に変換する第1の光電変換素子と,この第1の光電
変換素子からの電気信号を増幅する第1の増幅器と,前
記ビームスプリッタで分岐した他方の光が入射する波長
選択素子と,この波長選択素子からの出射光を電気信号
に変換する第2の光電変換素子と,前記第1の増幅器か
らの電気信号と前記第2の光電変換素子からの前記信号
を入力してその差を積分する積分器と,この積分器から
の出力を第2の増幅器を介して前記半導体レーザの注入
電流に帰還するように構成し,前記積分器と第2増幅器
に広い帯域のものを使用し,前記第1の増幅器の位相遅
れが小さい範囲に帯域を制限して前記積分器と第2増幅
器の帯域よりも前記第1の増幅器の帯域を狭くすること
により,スペクトル線幅の狭帯域化を図ると共に制御系
の安定化を図ったことを特徴とする半導体レーザ波長安
定化装置。
1. A semiconductor laser arranged in a constant temperature bath, a beam splitter for splitting light from the semiconductor laser into two directions, and a first photoelectric converter for converting one light from the beam splitter into an electric signal. A conversion element, a first amplifier for amplifying an electric signal from the first photoelectric conversion element, a wavelength selection element on which the other light branched by the beam splitter is incident, and light emitted from the wavelength selection element A second photoelectric conversion element for converting into an electric signal, an integrator for inputting the electric signal from the first amplifier and the signal from the second photoelectric conversion element, and integrating the difference, and this integrator Output from the semiconductor laser is fed back to the injection current of the semiconductor laser through a second amplifier, and a wide band is used for the integrator and the second amplifier, and the phase delay of the first amplifier is In a small range By limiting the band and making the band of the first amplifier narrower than the band of the integrator and the second amplifier, the spectral line width is narrowed and the control system is stabilized. A semiconductor laser wavelength stabilizer.
【請求項2】温度コントローラと半導体レーザ波長安定
化回路を別々に動作させ,まず,温度コントローラによ
り恒温槽内の温度を初期設定温度にし,あらかじめ決め
られた温度になったことを温度判別回路が確認後,レー
ザ波長安定化回路を動作させるようにしたことを特徴と
する特許請求の範囲第1項記載の半導体レーザ波長安定
化装置。
2. A temperature controller and a semiconductor laser wavelength stabilizing circuit are operated separately, and first, the temperature controller sets the temperature in the thermostatic chamber to an initial set temperature, and the temperature discriminating circuit indicates that the temperature has reached a predetermined temperature. The semiconductor laser wavelength stabilizing device according to claim 1, characterized in that the laser wavelength stabilizing circuit is operated after confirmation.
【請求項3】波長選択素子へ入射する光と,波長選択素
子を経ないで帰還に使用される光のパワーの比若しくは
波長選択素子を経ないで光が入射する第1の光電変換素
子後段の第1の増幅器の利得(G)を変えることによ
り,安定化する波長を可変できるようにしたことを特徴
とする特許請求の範囲第1項記載の半導体レーザ波長安
定化装置。
3. A first photoelectric conversion element post-stage in which the ratio of the power of light incident on the wavelength selection element and the power of light used for feedback without passing through the wavelength selection element or the light input without passing through the wavelength selection element 2. The semiconductor laser wavelength stabilizing device according to claim 1, wherein the wavelength to be stabilized can be varied by changing the gain (G 1 ) of the first amplifier.
JP61093563A 1986-04-23 1986-04-23 Semiconductor laser wavelength stabilizer Expired - Fee Related JPH0636454B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61093563A JPH0636454B2 (en) 1986-04-23 1986-04-23 Semiconductor laser wavelength stabilizer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61093563A JPH0636454B2 (en) 1986-04-23 1986-04-23 Semiconductor laser wavelength stabilizer

Publications (2)

Publication Number Publication Date
JPS62250682A JPS62250682A (en) 1987-10-31
JPH0636454B2 true JPH0636454B2 (en) 1994-05-11

Family

ID=14085715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61093563A Expired - Fee Related JPH0636454B2 (en) 1986-04-23 1986-04-23 Semiconductor laser wavelength stabilizer

Country Status (1)

Country Link
JP (1) JPH0636454B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3014620U (en) * 1995-01-11 1995-08-15 株式会社友和 Product display

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0636599Y2 (en) * 1988-06-21 1994-09-21 横河電機株式会社 Semiconductor laser wavelength stabilizer
JPH02284486A (en) * 1989-04-25 1990-11-21 Yokogawa Electric Corp Wavelength stabilizing apparatus for semiconductor laser
JPH02284487A (en) * 1989-04-25 1990-11-21 Yokogawa Electric Corp Wavelength stabilizing apparatus for semiconductor laser

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5864083A (en) * 1981-10-14 1983-04-16 Nippon Telegr & Teleph Corp <Ntt> Frequency stabilized semiconductor laser

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3014620U (en) * 1995-01-11 1995-08-15 株式会社友和 Product display

Also Published As

Publication number Publication date
JPS62250682A (en) 1987-10-31

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